GB2387973A - Double sided switching module - Google Patents
Double sided switching module Download PDFInfo
- Publication number
- GB2387973A GB2387973A GB0306764A GB0306764A GB2387973A GB 2387973 A GB2387973 A GB 2387973A GB 0306764 A GB0306764 A GB 0306764A GB 0306764 A GB0306764 A GB 0306764A GB 2387973 A GB2387973 A GB 2387973A
- Authority
- GB
- United Kingdom
- Prior art keywords
- limms
- substrate
- pattern
- vies
- switch
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
Links
- 239000000758 substrate Substances 0.000 claims abstract description 36
- 229910001338 liquidmetal Inorganic materials 0.000 abstract description 6
- QSHDDOUJBYECFT-UHFFFAOYSA-N mercury Chemical compound [Hg] QSHDDOUJBYECFT-UHFFFAOYSA-N 0.000 description 13
- 229910052753 mercury Inorganic materials 0.000 description 13
- 229910000679 solder Inorganic materials 0.000 description 8
- 230000005540 biological transmission Effects 0.000 description 6
- 239000007789 gas Substances 0.000 description 6
- 238000000034 method Methods 0.000 description 6
- 229910052751 metal Inorganic materials 0.000 description 5
- 239000002184 metal Substances 0.000 description 5
- 239000000463 material Substances 0.000 description 4
- 230000008859 change Effects 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 3
- 239000000919 ceramic Substances 0.000 description 2
- 239000004020 conductor Substances 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 2
- 239000010931 gold Substances 0.000 description 2
- 229910052737 gold Inorganic materials 0.000 description 2
- 238000002955 isolation Methods 0.000 description 2
- 230000007246 mechanism Effects 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 230000015556 catabolic process Effects 0.000 description 1
- 229910010293 ceramic material Inorganic materials 0.000 description 1
- 230000000295 complement effect Effects 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 230000018109 developmental process Effects 0.000 description 1
- 239000010408 film Substances 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 239000011261 inert gas Substances 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 238000007789 sealing Methods 0.000 description 1
- 239000012945 sealing adhesive Substances 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
- 230000035939 shock Effects 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
- 230000007704 transition Effects 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01P—WAVEGUIDES; RESONATORS, LINES, OR OTHER DEVICES OF THE WAVEGUIDE TYPE
- H01P1/00—Auxiliary devices
- H01P1/10—Auxiliary devices for switching or interrupting
- H01P1/12—Auxiliary devices for switching or interrupting by mechanical chopper
- H01P1/127—Strip line switches
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
- H01H1/00—Contacts
- H01H1/0036—Switches making use of microelectromechanical systems [MEMS]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
- H01H29/00—Switches having at least one liquid contact
- H01H2029/008—Switches having at least one liquid contact using micromechanics, e.g. micromechanical liquid contact switches or [LIMMS]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
- H01H29/00—Switches having at least one liquid contact
- H01H29/28—Switches having at least one liquid contact with level of surface of contact liquid displaced by fluid pressure
Landscapes
- Micromachines (AREA)
- Push-Button Switches (AREA)
- Contacts (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US10/128,849 US6633213B1 (en) | 2002-04-24 | 2002-04-24 | Double sided liquid metal micro switch |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| GB0306764D0 GB0306764D0 (en) | 2003-04-30 |
| GB2387973A true GB2387973A (en) | 2003-10-29 |
Family
ID=22437284
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| GB0306764A Withdrawn GB2387973A (en) | 2002-04-24 | 2003-03-24 | Double sided switching module |
Country Status (5)
| Country | Link |
|---|---|
| US (1) | US6633213B1 (enExample) |
| JP (1) | JP2003317580A (enExample) |
| DE (1) | DE10305355A1 (enExample) |
| GB (1) | GB2387973A (enExample) |
| TW (1) | TW200305903A (enExample) |
Families Citing this family (75)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| AU2001249055A1 (en) * | 2000-02-02 | 2001-08-14 | Raytheon Company | Microelectromechanical micro-relay with liquid metal contacts |
| US6689976B1 (en) * | 2002-10-08 | 2004-02-10 | Agilent Technologies, Inc. | Electrically isolated liquid metal micro-switches for integrally shielded microcircuits |
| US7078849B2 (en) * | 2001-10-31 | 2006-07-18 | Agilent Technologies, Inc. | Longitudinal piezoelectric optical latching relay |
| JP2005139901A (ja) * | 2001-11-19 | 2005-06-02 | Ngk Insulators Ltd | 回路切換えスイッチ |
| US6741767B2 (en) * | 2002-03-28 | 2004-05-25 | Agilent Technologies, Inc. | Piezoelectric optical relay |
| US20030194170A1 (en) * | 2002-04-10 | 2003-10-16 | Wong Marvin Glenn | Piezoelectric optical demultiplexing switch |
| US6927529B2 (en) | 2002-05-02 | 2005-08-09 | Agilent Technologies, Inc. | Solid slug longitudinal piezoelectric latching relay |
| US6750594B2 (en) * | 2002-05-02 | 2004-06-15 | Agilent Technologies, Inc. | Piezoelectrically actuated liquid metal switch |
| US6756551B2 (en) | 2002-05-09 | 2004-06-29 | Agilent Technologies, Inc. | Piezoelectrically actuated liquid metal switch |
| US6774324B2 (en) * | 2002-12-12 | 2004-08-10 | Agilent Technologies, Inc. | Switch and production thereof |
| US7022926B2 (en) | 2002-12-12 | 2006-04-04 | Agilent Technologies, Inc. | Ultrasonically milled channel plate for a switch |
| US6855898B2 (en) * | 2002-12-12 | 2005-02-15 | Agilent Technologies, Inc. | Ceramic channel plate for a switch |
| US20040112727A1 (en) * | 2002-12-12 | 2004-06-17 | Wong Marvin Glenn | Laser cut channel plate for a switch |
| US6743990B1 (en) * | 2002-12-12 | 2004-06-01 | Agilent Technologies, Inc. | Volume adjustment apparatus and method for use |
| US7019235B2 (en) * | 2003-01-13 | 2006-03-28 | Agilent Technologies, Inc. | Photoimaged channel plate for a switch |
| US6809277B2 (en) * | 2003-01-22 | 2004-10-26 | Agilent Technologies, Inc. | Method for registering a deposited material with channel plate channels, and switch produced using same |
| US6747222B1 (en) | 2003-02-04 | 2004-06-08 | Agilent Technologies, Inc. | Feature formation in a nonphotoimagable material and switch incorporating same |
| US6825429B2 (en) * | 2003-03-31 | 2004-11-30 | Agilent Technologies, Inc. | Hermetic seal and controlled impedance RF connections for a liquid metal micro switch |
| US6920259B2 (en) * | 2003-04-14 | 2005-07-19 | Agilent Technologies, Inc. | Longitudinal electromagnetic latching optical relay |
| US6838959B2 (en) * | 2003-04-14 | 2005-01-04 | Agilent Technologies, Inc. | Longitudinal electromagnetic latching relay |
| US7012354B2 (en) * | 2003-04-14 | 2006-03-14 | Agilent Technologies, Inc. | Method and structure for a pusher-mode piezoelectrically actuated liquid metal switch |
| US6894424B2 (en) * | 2003-04-14 | 2005-05-17 | Agilent Technologies, Inc. | High frequency push-mode latching relay |
| US6794591B1 (en) | 2003-04-14 | 2004-09-21 | Agilent Technologies, Inc. | Fluid-based switches |
| US6803842B1 (en) | 2003-04-14 | 2004-10-12 | Agilent Technologies, Inc. | Longitudinal mode solid slug optical latching relay |
| US6946776B2 (en) * | 2003-04-14 | 2005-09-20 | Agilent Technologies, Inc. | Method and apparatus for maintaining a liquid metal switch in a ready-to-switch condition |
| US6879088B2 (en) * | 2003-04-14 | 2005-04-12 | Agilent Technologies, Inc. | Insertion-type liquid metal latching relay array |
| US6891116B2 (en) * | 2003-04-14 | 2005-05-10 | Agilent Technologies, Inc. | Substrate with liquid electrode |
| US6956990B2 (en) * | 2003-04-14 | 2005-10-18 | Agilent Technologies, Inc. | Reflecting wedge optical wavelength multiplexer/demultiplexer |
| US6841746B2 (en) * | 2003-04-14 | 2005-01-11 | Agilent Technologies, Inc. | Bent switching fluid cavity |
| US6924443B2 (en) * | 2003-04-14 | 2005-08-02 | Agilent Technologies, Inc. | Reducing oxides on a switching fluid in a fluid-based switch |
| US6798937B1 (en) | 2003-04-14 | 2004-09-28 | Agilent Technologies, Inc. | Pressure actuated solid slug optical latching relay |
| US6900578B2 (en) * | 2003-04-14 | 2005-05-31 | Agilent Technologies, Inc. | High frequency latching relay with bending switch bar |
| US6876132B2 (en) * | 2003-04-14 | 2005-04-05 | Agilent Technologies, Inc. | Method and structure for a solid slug caterpillar piezoelectric relay |
| US6765161B1 (en) | 2003-04-14 | 2004-07-20 | Agilent Technologies, Inc. | Method and structure for a slug caterpillar piezoelectric latching reflective optical relay |
| US6879089B2 (en) * | 2003-04-14 | 2005-04-12 | Agilent Technologies, Inc. | Damped longitudinal mode optical latching relay |
| US6818844B2 (en) * | 2003-04-14 | 2004-11-16 | Agilent Technologies, Inc. | Method and structure for a slug assisted pusher-mode piezoelectrically actuated liquid metal optical switch |
| US6885133B2 (en) * | 2003-04-14 | 2005-04-26 | Agilent Technologies, Inc. | High frequency bending-mode latching relay |
| US6876133B2 (en) * | 2003-04-14 | 2005-04-05 | Agilent Technologies, Inc. | Latching relay with switch bar |
| US6903490B2 (en) * | 2003-04-14 | 2005-06-07 | Agilent Technologies, Inc. | Longitudinal mode optical latching relay |
| US6870111B2 (en) * | 2003-04-14 | 2005-03-22 | Agilent Technologies, Inc. | Bending mode liquid metal switch |
| US6762378B1 (en) | 2003-04-14 | 2004-07-13 | Agilent Technologies, Inc. | Liquid metal, latching relay with face contact |
| US6961487B2 (en) * | 2003-04-14 | 2005-11-01 | Agilent Technologies, Inc. | Method and structure for a pusher-mode piezoelectrically actuated liquid metal optical switch |
| US6730866B1 (en) | 2003-04-14 | 2004-05-04 | Agilent Technologies, Inc. | High-frequency, liquid metal, latching relay array |
| US6906271B2 (en) * | 2003-04-14 | 2005-06-14 | Agilent Technologies, Inc. | Fluid-based switch |
| US6894237B2 (en) * | 2003-04-14 | 2005-05-17 | Agilent Technologies, Inc. | Formation of signal paths to increase maximum signal-carrying frequency of a fluid-based switch |
| US6903493B2 (en) * | 2003-04-14 | 2005-06-07 | Agilent Technologies, Inc. | Inserting-finger liquid metal relay |
| US6882088B2 (en) * | 2003-04-14 | 2005-04-19 | Agilent Technologies, Inc. | Bending-mode latching relay |
| US6876131B2 (en) * | 2003-04-14 | 2005-04-05 | Agilent Technologies, Inc. | High-frequency, liquid metal, latching relay with face contact |
| US6876130B2 (en) * | 2003-04-14 | 2005-04-05 | Agilent Technologies, Inc. | Damped longitudinal mode latching relay |
| US7070908B2 (en) * | 2003-04-14 | 2006-07-04 | Agilent Technologies, Inc. | Feature formation in thick-film inks |
| US6770827B1 (en) | 2003-04-14 | 2004-08-03 | Agilent Technologies, Inc. | Electrical isolation of fluid-based switches |
| US6831532B2 (en) * | 2003-04-14 | 2004-12-14 | Agilent Technologies, Inc. | Push-mode latching relay |
| US20040201447A1 (en) * | 2003-04-14 | 2004-10-14 | Wong Marvin Glenn | Thin-film resistor device |
| US6774325B1 (en) | 2003-04-14 | 2004-08-10 | Agilent Technologies, Inc. | Reducing oxides on a switching fluid in a fluid-based switch |
| US6903492B2 (en) * | 2003-04-14 | 2005-06-07 | Agilent Technologies, Inc. | Wetting finger latching piezoelectric relay |
| US6903287B2 (en) * | 2003-04-14 | 2005-06-07 | Agilent Technologies, Inc. | Liquid metal optical relay |
| US6740829B1 (en) | 2003-04-14 | 2004-05-25 | Agilent Technologies, Inc. | Insertion-type liquid metal latching relay |
| US6946775B2 (en) * | 2003-04-14 | 2005-09-20 | Agilent Technologies, Inc. | Method and structure for a slug assisted longitudinal piezoelectrically actuated liquid metal optical switch |
| US6888977B2 (en) * | 2003-04-14 | 2005-05-03 | Agilent Technologies, Inc. | Polymeric liquid metal optical switch |
| US6816641B2 (en) * | 2003-04-14 | 2004-11-09 | Agilent Technologies, Inc. | Method and structure for a solid slug caterpillar piezoelectric optical relay |
| US7048519B2 (en) * | 2003-04-14 | 2006-05-23 | Agilent Technologies, Inc. | Closed-loop piezoelectric pump |
| US6925223B2 (en) * | 2003-04-14 | 2005-08-02 | Agilent Technologies, Inc. | Pressure actuated optical latching relay |
| US6768068B1 (en) | 2003-04-14 | 2004-07-27 | Agilent Technologies, Inc. | Method and structure for a slug pusher-mode piezoelectrically actuated liquid metal switch |
| US6891315B2 (en) * | 2003-04-14 | 2005-05-10 | Agilent Technologies, Inc. | Shear mode liquid metal switch |
| US7071432B2 (en) * | 2003-04-14 | 2006-07-04 | Agilent Technologies, Inc. | Reduction of oxides in a fluid-based switch |
| US6750413B1 (en) | 2003-04-25 | 2004-06-15 | Agilent Technologies, Inc. | Liquid metal micro switches using patterned thick film dielectric as channels and a thin ceramic or glass cover plate |
| US6777630B1 (en) | 2003-04-30 | 2004-08-17 | Agilent Technologies, Inc. | Liquid metal micro switches using as channels and heater cavities matching patterned thick film dielectric layers on opposing thin ceramic plates |
| US6759610B1 (en) | 2003-06-05 | 2004-07-06 | Agilent Technologies, Inc. | Multi-layer assembly of stacked LIMMS devices with liquid metal vias |
| US6759611B1 (en) | 2003-06-16 | 2004-07-06 | Agilent Technologies, Inc. | Fluid-based switches and methods for producing the same |
| US6833520B1 (en) * | 2003-06-16 | 2004-12-21 | Agilent Technologies, Inc. | Suspended thin-film resistor |
| US6781074B1 (en) | 2003-07-30 | 2004-08-24 | Agilent Technologies, Inc. | Preventing corrosion degradation in a fluid-based switch |
| US6787720B1 (en) | 2003-07-31 | 2004-09-07 | Agilent Technologies, Inc. | Gettering agent and method to prevent corrosion in a fluid switch |
| GB0323043D0 (en) * | 2003-09-24 | 2003-11-05 | Lux Biotechnology Ltd | Biochip |
| US20060017532A1 (en) * | 2004-07-23 | 2006-01-26 | Trutna William R Jr | Metallic contact electrical switch incorporating lorentz actuator |
| US8830016B2 (en) * | 2012-09-10 | 2014-09-09 | Broadcom Corporation | Liquid MEMS magnetic component |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5841686A (en) * | 1996-11-22 | 1998-11-24 | Ma Laboratories, Inc. | Dual-bank memory module with shared capacitors and R-C elements integrated into the module substrate |
| US6021048A (en) * | 1998-02-17 | 2000-02-01 | Smith; Gary W. | High speed memory module |
| US6326447B1 (en) * | 1998-06-19 | 2001-12-04 | E. I. Du Pont De Nemours And Company | Polymeric compositions for soil release on fabrics |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5912606A (en) * | 1998-08-18 | 1999-06-15 | Northrop Grumman Corporation | Mercury wetted switch |
| US6304450B1 (en) * | 1999-07-15 | 2001-10-16 | Incep Technologies, Inc. | Inter-circuit encapsulated packaging |
| AU2001249055A1 (en) * | 2000-02-02 | 2001-08-14 | Raytheon Company | Microelectromechanical micro-relay with liquid metal contacts |
-
2002
- 2002-04-24 US US10/128,849 patent/US6633213B1/en not_active Expired - Fee Related
- 2002-11-25 TW TW091134203A patent/TW200305903A/zh unknown
-
2003
- 2003-02-10 DE DE10305355A patent/DE10305355A1/de not_active Withdrawn
- 2003-03-17 JP JP2003071655A patent/JP2003317580A/ja active Pending
- 2003-03-24 GB GB0306764A patent/GB2387973A/en not_active Withdrawn
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5841686A (en) * | 1996-11-22 | 1998-11-24 | Ma Laboratories, Inc. | Dual-bank memory module with shared capacitors and R-C elements integrated into the module substrate |
| US6021048A (en) * | 1998-02-17 | 2000-02-01 | Smith; Gary W. | High speed memory module |
| US6326447B1 (en) * | 1998-06-19 | 2001-12-04 | E. I. Du Pont De Nemours And Company | Polymeric compositions for soil release on fabrics |
Also Published As
| Publication number | Publication date |
|---|---|
| TW200305903A (en) | 2003-11-01 |
| US6633213B1 (en) | 2003-10-14 |
| JP2003317580A (ja) | 2003-11-07 |
| GB0306764D0 (en) | 2003-04-30 |
| DE10305355A1 (de) | 2003-11-13 |
| US20030201855A1 (en) | 2003-10-30 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| WAP | Application withdrawn, taken to be withdrawn or refused ** after publication under section 16(1) |