JP2003315815A5 - - Google Patents
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- Publication number
- JP2003315815A5 JP2003315815A5 JP2003062708A JP2003062708A JP2003315815A5 JP 2003315815 A5 JP2003315815 A5 JP 2003315815A5 JP 2003062708 A JP2003062708 A JP 2003062708A JP 2003062708 A JP2003062708 A JP 2003062708A JP 2003315815 A5 JP2003315815 A5 JP 2003315815A5
- Authority
- JP
- Japan
- Prior art keywords
- wiring
- film
- insulating film
- insulating
- substrate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
Links
- 239000000758 substrate Substances 0.000 claims description 7
- 239000010408 film Substances 0.000 claims 26
- 229910052581 Si3N4 Inorganic materials 0.000 claims 4
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims 4
- 229910052782 aluminium Inorganic materials 0.000 claims 4
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 claims 4
- 239000010409 thin film Substances 0.000 claims 3
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims 2
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 claims 2
- 239000011347 resin Substances 0.000 claims 2
- 229920005989 resin Polymers 0.000 claims 2
- 229910052814 silicon oxide Inorganic materials 0.000 claims 2
- 229910052719 titanium Inorganic materials 0.000 claims 2
- 239000010936 titanium Substances 0.000 claims 2
- 238000003475 lamination Methods 0.000 claims 1
- 239000004973 liquid crystal related substance Substances 0.000 claims 1
- 239000000463 material Substances 0.000 claims 1
- 239000011159 matrix material Substances 0.000 claims 1
- 239000011229 interlayer Substances 0.000 description 4
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2003062708A JP2003315815A (ja) | 2003-03-10 | 2003-03-10 | 配線構造 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2003062708A JP2003315815A (ja) | 2003-03-10 | 2003-03-10 | 配線構造 |
Related Parent Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8358956A Division JPH10198292A (ja) | 1996-12-30 | 1996-12-30 | 半導体装置およびその作製方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2003315815A JP2003315815A (ja) | 2003-11-06 |
| JP2003315815A5 true JP2003315815A5 (enExample) | 2004-12-24 |
Family
ID=29546055
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2003062708A Withdrawn JP2003315815A (ja) | 2003-03-10 | 2003-03-10 | 配線構造 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2003315815A (enExample) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7864281B2 (en) | 2004-08-24 | 2011-01-04 | Sharp Kabushiki Kaisha | Active matrix substrate and display unit provided with it |
| JP4275038B2 (ja) | 2004-09-01 | 2009-06-10 | シャープ株式会社 | アクティブマトリクス基板およびそれを備えた表示装置 |
| CN108897176B (zh) * | 2018-09-07 | 2025-04-25 | 武汉华星光电技术有限公司 | 阵列基板及液晶显示器 |
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2003
- 2003-03-10 JP JP2003062708A patent/JP2003315815A/ja not_active Withdrawn