JP2003309007A - Sintered soft magnetic material for sensor of high permeability and small strain sensitivity - Google Patents
Sintered soft magnetic material for sensor of high permeability and small strain sensitivityInfo
- Publication number
- JP2003309007A JP2003309007A JP2002320751A JP2002320751A JP2003309007A JP 2003309007 A JP2003309007 A JP 2003309007A JP 2002320751 A JP2002320751 A JP 2002320751A JP 2002320751 A JP2002320751 A JP 2002320751A JP 2003309007 A JP2003309007 A JP 2003309007A
- Authority
- JP
- Japan
- Prior art keywords
- soft magnetic
- sensor
- magnetic material
- strain sensitivity
- yoke
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Abandoned
Links
Landscapes
- Power Steering Mechanism (AREA)
- Soft Magnetic Materials (AREA)
Abstract
Description
【０００１】[0001]
【産業上の利用分野】この発明は、トルクセンサー、変
位センサーなど各種センサーに使用される透磁率が高く
かつ歪感受性の小さい焼結軟磁性材料に関するものであ
り、特に自動車用電動パワーステアリングのトルクセン
サーにおける検出ヨークおよびコイルヨークを製造する
ための焼結軟磁性材料に関するものである。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a sintered soft magnetic material having a high magnetic permeability and a low strain sensitivity, which is used for various sensors such as a torque sensor and a displacement sensor. The present invention relates to a sintered soft magnetic material for manufacturing a detection yoke and a coil yoke in a sensor.
【０００２】[0002]
【従来の技術】従来の自動車の電動パワーステアリング
におけるトルクセンサーは、ステアリングホイールに繋
がる入力軸と操舵機構に繋がる出力軸とをトーションバ
ーを介して連結すると共に、前記入力軸と出力軸にはそ
れぞれ検出ヨークまたは磁気遮蔽材が固定されている。
入力軸にトルクを与えるとトーションバーがねじれ、ト
ルクに比例した角度だけ入力軸が出力軸に対して回転
し、入力軸に固定された検出ヨークまたは磁気遮蔽材
が、出力軸に固定された検出ヨークまたは磁気遮蔽材に
対して相対的に回転するようになっている。これらとは
別に検出コイルとヨークコイルが設けられており、検出
コイルには数ＫＨｚの交流が流されていて、この交流電
流により発生した磁束は検出ヨークおよびコイルヨーク
からなる磁気回路を通るようになっている。入力軸に与
えられたトルクによる検出ヨークまたは磁気遮蔽材の相
対的な回転により検出ヨークおよびコイルヨークを通る
磁束が変化し、検出コイルのインピーダンスが変化し、
それに伴って検出コイルの端子間の電圧が変化し、トル
クの検出が出来るようになっている。前記検出ヨークお
よびコイルヨークは一般にＳＵＳ４１０Ｌで規定される
電磁ステンレス鋼粉末を圧粉成形し焼結して製造されて
いる。2. Description of the Related Art A conventional torque sensor for electric power steering of an automobile connects an input shaft connected to a steering wheel and an output shaft connected to a steering mechanism via a torsion bar, and the input shaft and the output shaft are connected to each other. The detection yoke or magnetic shield is fixed.
When torque is applied to the input shaft, the torsion bar twists, the input shaft rotates with respect to the output shaft by an angle proportional to the torque, and the detection yoke or magnetic shield fixed to the input shaft is detected on the output shaft. It is adapted to rotate relative to the yoke or magnetic shield. In addition to these, a detection coil and a yoke coil are provided. An alternating current of several KHz is passed through the detection coil, and the magnetic flux generated by this alternating current passes through a magnetic circuit composed of the detection yoke and the coil yoke. Has become. The magnetic flux passing through the detection yoke and the coil yoke changes due to the relative rotation of the detection yoke or the magnetic shielding material due to the torque applied to the input shaft, and the impedance of the detection coil changes,
Along with that, the voltage between the terminals of the detection coil changes, and the torque can be detected. The detection yoke and the coil yoke are generally manufactured by compacting and sintering electromagnetic stainless steel powder specified by SUS410L.
【０００３】[0003]
【発明が解決しようとする課題】しかし、ＳＵＳ４１０
Ｌで規定される電磁ステンレス鋼粉末を圧粉成形し焼結
して製造した従来の検出ヨークおよびコイルヨークは、
振動、衝撃などを受けて歪が導入されると透磁率などの
磁気特性が低下するところから、（イ）圧粉成形し焼結
して製造した検出ヨークおよびコイルヨークの寸法精度
を高めるために機械加工を施すと透磁率などの磁気特性
が低下し、焼鈍処理しても磁気特性が１００％回復する
ことはなく、また部品として検出ヨークおよびコイルヨ
ークを運搬する途中で振動、衝撃を受けると磁気特性に
ばらつきが発生する、（ロ）自動車に実装した電動パワ
ーステアリングのトルクセンサーにおける検出ヨークお
よびコイルヨークは、自動車の走行中に頻繁に振動、衝
撃を受けて歪が導入される環境に置かれるので検出ヨー
クおよびコイルヨークの透磁率は自動車の使用年数が増
加するにしたがって低下し、結果としてセンサー感度が
低下すると共にばらつきが生じ、センサーとしての機能
が低下する、（ハ）さらに、インピーダンスの変化を検
出する検出コイルの感度を高めてトルクセンサーの感度
を向上させるべく一層高い周波数の交流を流す要求があ
り、近年、周波数をさらに上げて一層検出感度を向上さ
せようとしているが、ＳＵＳ４１０Ｌで規定される電磁
ステンレス鋼粉末を圧粉成形し焼結して製造した従来の
検出ヨークおよびコイルヨークでは電気抵抗率が低く、
高周波における透磁率が低いために周波数を一層高めて
も検出コイルのインピーダンスを上げることができず、
したがって検出感度を十分に向上させることができな
い、などの欠点があった。[Problems to be Solved by the Invention] However, SUS410
The conventional detection yoke and coil yoke manufactured by compacting and sintering electromagnetic stainless steel powder specified by L are
Since magnetic properties such as magnetic permeability deteriorate when strain is introduced due to vibration, shock, etc. (a) To improve the dimensional accuracy of the detection yoke and coil yoke manufactured by compacting and sintering. When mechanical processing is applied, magnetic properties such as magnetic permeability deteriorate, and even if annealing is performed, the magnetic properties do not recover 100%. Also, if vibration or impact is received during transportation of the detection yoke and coil yoke as parts. (B) The detection yokes and coil yokes of the torque sensor of the electric power steering mounted on the automobile, where the magnetic characteristics vary, are placed in an environment where distortion is introduced due to frequent vibrations and shocks while the automobile is running. Therefore, the magnetic permeability of the detection yoke and the coil yoke decreases as the number of years of use of the vehicle increases, and as a result, the sensitivity of the sensor decreases. The function as a sensor deteriorates. (C) Furthermore, there is a demand to pass an alternating current of higher frequency in order to improve the sensitivity of the torque sensor by increasing the sensitivity of the detection coil that detects changes in impedance. Although the frequency is further increased to improve the detection sensitivity, the conventional detection yoke and coil yoke manufactured by compacting and sintering electromagnetic stainless steel powder specified by SUS410L have low electric resistivity. ,
Since the permeability at high frequencies is low, the impedance of the detection coil cannot be increased even if the frequency is further increased,
Therefore, there is a drawback that the detection sensitivity cannot be improved sufficiently.
【０００４】[0004]
【課題を解決するための手段】そこで、本発明者らは、
振動、衝撃などを受けて歪が導入されても透磁率など磁
気特性の低下が少なく（以下、歪が導入されても透磁率
など磁気特性の低下が少ないことを「歪感受性が小さ
い」という）、さらに一層透磁率の高い焼結軟磁性材料
を開発し、その焼結軟磁性材料により歪感受性が小さく
かつ透磁率の高いトルクセンサーの検出ヨークおよびコ
イルヨークを作製すべく研究を行った。その結果、質量
％で、Ｃｒ：０．１〜１５％、ＳｉおよびＡｌのうちの
１種または２種を合計で１〜２０％、Ｐ：０．０１〜３
％を含有し、残部：Ｆｅおよび不可避不純物からなる組
成を有する焼結軟磁性材料からなる検出ヨークおよびコ
イルヨークは、歪感受性が小さくかつ透磁率が高い、と
いう研究結果が得られたのである。Therefore, the present inventors have
Even if strain is introduced due to vibration, shock, etc., the magnetic properties such as magnetic permeability are less deteriorated. (Hereinafter, the fact that the magnetic properties such as magnetic permeability are less deteriorated even if strain is introduced is called "small strain sensitivity".) In addition, we have developed a sintered soft magnetic material with even higher magnetic permeability, and conducted research to produce a detection yoke and a coil yoke for a torque sensor that has low strain sensitivity and high magnetic permeability due to the sintered soft magnetic material. As a result, in mass%, Cr: 0.1 to 15%, 1 or 2 kinds of Si and Al in total of 1 to 20%, P: 0.01 to 3%
The research results show that the detection yoke and the coil yoke made of a sintered soft magnetic material having a composition of% and the balance: Fe and unavoidable impurities have low strain sensitivity and high magnetic permeability.
【０００５】この発明は、かかる研究結果に基づいてな
されたものであって、Ｃｒ：０．１〜１５％、Ｓｉおよ
びＡｌのうちの１種または２種を合計で１〜２０％、
Ｐ：０．０１〜３％を含有し、残部：Ｆｅおよび不可避
不純物からなる組成を有する透磁率が高くかつ歪感受性
の小さいセンサー用焼結軟磁性材料およびその焼結軟磁
性材料からなるトルクセンサー、に特徴を有するもので
ある。The present invention has been made on the basis of the results of such research. Cr: 0.1 to 15%, one or two of Si and Al in total of 1 to 20%,
Sintered soft magnetic material for sensor having high permeability and low strain sensitivity, having a composition of P: 0.01 to 3%, balance: Fe and unavoidable impurities, and torque sensor made of the sintered soft magnetic material , Are characterized.
【０００６】次に、この発明の焼結軟磁性材料の成分組
成を前述の如く限定した理由を説明する。
（ａ） Ｃｒ
Ｃｒは電気抵抗率および高周波における透磁率を高め、
さらに耐食性を向上させる作用があるが、その含有量が
０．１％未満では電気抵抗率および高周波における透磁
率が低下し、さらに耐食性も低下するので好ましくな
く、一方、その含有量が１５％を越えて含有すると、歪
感受性が増大するので好ましくない。したがって、Ｃｒ
含有量は０．１〜１５％に定めた。Ｃｒの含有量の一層
好ましい範囲は１〜１０％である。Next, the reason why the component composition of the sintered soft magnetic material of the present invention is limited as described above will be explained. (A) Cr Cr enhances electric resistivity and magnetic permeability at high frequencies,
Although it has an effect of further improving the corrosion resistance, if its content is less than 0.1%, it is not preferable because the electrical resistivity and the magnetic permeability at high frequencies are lowered, and further the corrosion resistance is lowered. If it is contained in excess, strain sensitivity is increased, which is not preferable. Therefore, Cr
The content was set to 0.1 to 15%. A more preferable range of the Cr content is 1 to 10%.
【０００７】（ｂ） ＳｉおよびＡｌ
これら成分は電気抵抗および高周波における透磁率を増
大させ、さらに歪感受性を低下させる作用を有するが、
ＳｉおよびＡｌのうちの１種または２種を合計で１％未
満含まれていても十分な効果が得られず、一方、２０質
量％を越えて含有すると、かえって歪感受性を増大させ
るので好ましくない。したがって、ＳｉおよびＡｌのう
ちの１種または２種を合計で１〜２０質量％に定めた。
これら成分の含有量の一層好ましい範囲は２〜１５質量
％である。(B) Si and Al These components have the effects of increasing electrical resistance and magnetic permeability at high frequencies, and further reducing strain sensitivity.
Sufficient effects cannot be obtained even if one or two of Si and Al are contained in a total amount of less than 1%. On the other hand, if it is contained in an amount of more than 20% by mass, strain sensitivity is rather increased, which is not preferable. . Therefore, one or two kinds of Si and Al are defined as 1 to 20 mass% in total.
A more preferable range of the content of these components is 2 to 15% by mass.
【０００８】（ｃ） Ｐ
Ｐは、焼結性を向上させ、透磁率を向上させる作用があ
るが、その含有量が０．０１％未満では所望の高い透磁
率を確保することができず、一方、その含有量が３％を
越えて含有するとかえって透磁率が低下するので好まし
くない。したがって、Ｐの含有量は０．０１〜３％の範
囲内になるように定めた。Ｐ含有量の一層好ましい範囲
は０．０１〜１％である。(C) P P has the effects of improving the sinterability and the magnetic permeability, but if its content is less than 0.01%, the desired high magnetic permeability cannot be secured. On the other hand, if the content exceeds 3%, the magnetic permeability is rather lowered, which is not preferable. Therefore, the P content is determined to be within the range of 0.01 to 3%. The more preferable range of P content is 0.01 to 1%.
【０００９】[0009]
【発明の実施の形態】合金原料を高周波溶解して表１〜
２に示される成分組成の溶湯を作製し、これら溶湯を水
アトマイズしてアトマイズ粉末を作製し、そのアトマイ
ズ粉末を分級処理して粒径：７５μｍ以下を有し表１〜
２に示されるアトマイズ原料粉末を作製した。このアト
マイズ原料粉末に６ｔｏｎ／ｃｍ2の成形圧をかけるこ
とにより外径：３５ｍｍ、内径：２５ｍｍ、高さ：５ｍ
ｍの寸法を有するリング状圧粉体を作製し、これらリン
グ状圧粉体を真空雰囲気中、温度：１２５０℃で燒結す
ることにより外径：３２〜３５ｍｍ、内径：２３〜２５
ｍｍ、高さ：４．５〜５ｍｍの寸法を有し本発明軟磁性
焼結材１〜１８、比較軟磁性焼結材１〜６および従来軟
磁性焼結材からなる実質的に歪が導入されていないリン
グ状試験片（以下、歪無試験片という）を作製した。BEST MODE FOR CARRYING OUT THE INVENTION
2 melts having the component composition shown in FIG. 2 were prepared, and the melts were atomized with water to prepare atomized powders, and the atomized powders were classified to have a particle size of 75 μm or less.
The atomized raw material powder shown in 2 was produced. By applying a molding pressure of 6 ton / cm 2 to this atomized raw material powder, outer diameter: 35 mm, inner diameter: 25 mm, height: 5 m
A ring-shaped green compact having a size of m was produced, and these ring-shaped green compacts were sintered in a vacuum atmosphere at a temperature of 1250 ° C. to have an outer diameter of 32 to 35 mm and an inner diameter of 23 to 25.
mm, height: 4.5 to 5 mm, which is substantially composed of the soft magnetic sinters 1 to 18 of the present invention, the comparative soft magnetic sinters 1 to 6 and the conventional soft magnetic sinter. A ring-shaped test piece (hereinafter, referred to as a strain-free test piece) which was not formed was prepared.
【００１０】さらに、表１〜２に示されるアトマイズ原
料粉末に６ｔｏｎ／ｃｍ2の成形圧をかけることにより
外径：４０ｍｍ、内径：２０ｍｍ、高さ：１０ｍｍの寸
法を有するリング状圧粉体を作製し、これらリング状圧
粉体を真空雰囲気中、温度：１２５０℃で燒結すること
により外径：３６〜４０ｍｍ、内径：１８〜２０ｍｍ、
高さ：９〜１０ｍｍの寸法を有する本発明軟磁性焼結材
１〜１８からなるリング状試験片を作製し、これらリン
グ状試験片を切削加工してそれぞれの成分組成において
歪無試験片と同一寸法を有し本発明軟磁性焼結材１〜１
８、比較軟磁性焼結材１〜６および従来軟磁性焼結材か
らなる歪が導入されたリング状試験片（以下、歪有試験
片という）を作製した。それぞれの成分組成において歪
無試験片と歪有試験片の密度はほぼ同じであった。Furthermore, by applying a molding pressure of 6 ton / cm 2 to the atomized raw material powders shown in Tables 1 and 2, ring-shaped green compacts having dimensions of outer diameter: 40 mm, inner diameter: 20 mm, height: 10 mm are obtained. It is produced, and these ring-shaped green compacts are sintered in a vacuum atmosphere at a temperature of 1250 ° C. to give an outer diameter of 36 to 40 mm and an inner diameter of 18 to 20 mm.
Height: A ring-shaped test piece made of the soft magnetic sintered materials 1 to 18 of the present invention having a size of 9 to 10 mm was prepared, and the ring-shaped test piece was cut to be a strain-free test piece in each component composition. Soft magnetic sintered materials 1 to 1 of the present invention having the same dimensions
8. Strain-introduced ring-shaped test pieces (hereinafter referred to as strained test pieces) made of the comparative soft magnetic sintered materials 1 to 6 and the conventional soft magnetic sintered material were prepared. The densities of the unstrained test piece and the strained test piece were almost the same in each component composition.
【００１１】本発明軟磁性焼結材１〜１８、比較軟磁性
焼結材１〜６および従来軟磁性焼結材からなる歪無試験
片および歪有試験片について、それぞれ周波数：１ＫＨ
ｚ、３ＫＨｚおよび１０ＫＨｚにおける比透磁率をイン
ピーダンスアナライザーで測定し、その結果を表１〜２
に示した。さらに歪無試験片と歪有試験片の比透磁率か
ら歪導入による透磁率変化率［（歪有試験片の比透磁率
−歪無試験片の比透磁率）／（歪無試験片の比透磁率）
×１００］を求め、それらの値を表１〜２に示して歪感
受性を評価した。Frequency: 1 KH for each of the strain-free test piece and the strain-containing test piece made of the soft magnetic sintered materials 1 to 18 of the present invention, the comparative soft magnetic sintered materials 1 to 6 and the conventional soft magnetic sintered material.
The relative permeability at z, 3 KHz and 10 KHz was measured with an impedance analyzer, and the results are shown in Tables 1-2.
It was shown to. Further, from the relative permeability of the strain-free test piece and the strained test piece, the rate of change in permeability due to the introduction of strain [(relative permeability of the strained test piece-relative permeability of the unstrained test piece) / (ratio of the unstrained test piece Permeability)
X100] was obtained and those values were shown in Tables 1 and 2 to evaluate the strain sensitivity.
【００１２】[0012]
【表１】 [Table 1]
【００１３】[0013]
【表２】 [Table 2]
【００１４】表１〜２に示される結果から、各周波数に
おける本発明軟磁性焼結材１〜１８は比較軟磁性焼結材
１〜６および従来軟磁性焼結材に比べて、各周波数にお
ける歪無試験片および歪有試験片の比透磁率が格段に優
れており、さらに歪導入による透磁率変化率が小さいと
ころから、歪感受性が小さいことが分かる。From the results shown in Tables 1 and 2, the soft magnetic sintered materials 1 to 18 of the present invention at each frequency are higher than the comparative soft magnetic sintered materials 1 to 6 and the conventional soft magnetic sintered material at each frequency. From the fact that the relative magnetic permeability of the unstrained test piece and the strained test piece are remarkably excellent, and the rate of change of the magnetic permeability due to the introduction of strain is small, it is understood that the strain sensitivity is small.
【００１５】[0015]
【発明の効果】この発明は、透磁率が高くかつ歪感受性
の小さいトルクセンサー用焼結軟磁性材料を提供するこ
とができ、とくに自動車産業において優れた効果をもた
らすものである。INDUSTRIAL APPLICABILITY The present invention can provide a sintered soft magnetic material for a torque sensor, which has a high magnetic permeability and a low strain sensitivity, and has an excellent effect particularly in the automobile industry.
Claims (4)
よびＡｌのうちの１種または２種を合計で１〜２０％、
Ｐ：０．０１〜３％を含有し、残部：Ｆｅおよび不可避
不純物からなる組成を有することを特徴とする透磁率が
高くかつ歪感受性の小さいセンサー用焼結軟磁性材料。1. In mass%, Cr: 0.1 to 15%, 1 or 2 in total of 1 or 2 of Si and Al,
A sintered soft magnetic material for a sensor having a high magnetic permeability and a low strain sensitivity, which has a composition containing P: 0.01 to 3% and the balance: Fe and inevitable impurities.
の小さいセンサー用焼結軟磁性材料からなることを特徴
とするトルクセンサー。2. A torque sensor comprising the sintered soft magnetic material for a sensor according to claim 1, which has a high magnetic permeability and a low strain sensitivity.
の小さいセンサー用焼結軟磁性材料からなることを特徴
とする電動パワーステアリングのトルクセンサー用検出
ヨークおよびコイルヨーク。3. A detection yoke and a coil yoke for a torque sensor of an electric power steering, comprising the sintered soft magnetic material for a sensor according to claim 1, which has a high magnetic permeability and a small strain sensitivity.
の小さいセンサー用焼結軟磁性材料からなることを特徴
とする電動パワーステアリングのトルクセンサー用コイ
ルヨーク。4. A coil yoke for a torque sensor of an electric power steering, comprising the sintered soft magnetic material for a sensor having high magnetic permeability and low strain sensitivity according to claim 1.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2002320751A JP2003309007A (en) | 2002-02-14 | 2002-11-05 | Sintered soft magnetic material for sensor of high permeability and small strain sensitivity |
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| Application Number | Priority Date | Filing Date | Title |
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| JP2002036721 | 2002-02-14 | ||
| JP2002-36721 | 2002-02-14 | ||
| JP2002320751A JP2003309007A (en) | 2002-02-14 | 2002-11-05 | Sintered soft magnetic material for sensor of high permeability and small strain sensitivity |
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| JP2003309007A true JP2003309007A (en) | 2003-10-31 |
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| JP2002320751A Abandoned JP2003309007A (en) | 2002-02-14 | 2002-11-05 | Sintered soft magnetic material for sensor of high permeability and small strain sensitivity |
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR101307523B1 (en) | 2011-10-10 | 2013-09-26 | (재)대구기계부품연구원 | Controller for angular velocity of steering wheel ultilizing soft magnetic tork |
| JP2014078629A (en) * | 2012-10-11 | 2014-05-01 | Daido Steel Co Ltd | Iron-based soft magnetic metal powder |
| US10290409B2 (en) | 2014-03-28 | 2019-05-14 | Hitachi Metals, Ltd. | Soft magnetic component for torque sensor and torque sensor using the same |
-
2002
- 2002-11-05 JP JP2002320751A patent/JP2003309007A/en not_active Abandoned
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR101307523B1 (en) | 2011-10-10 | 2013-09-26 | (재)대구기계부품연구원 | Controller for angular velocity of steering wheel ultilizing soft magnetic tork |
| JP2014078629A (en) * | 2012-10-11 | 2014-05-01 | Daido Steel Co Ltd | Iron-based soft magnetic metal powder |
| US10290409B2 (en) | 2014-03-28 | 2019-05-14 | Hitachi Metals, Ltd. | Soft magnetic component for torque sensor and torque sensor using the same |
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