JP2003302323A - Heat shock tester - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To control a rate of a temperature change of a testing chamber at the time of transition from a high temperature test to a low temperature test or transition from the low temperature test to the high temperature test. <P>SOLUTION: A heat shock tester is compose of three chambers separated vertically i.e., a high temperature chamber 5, the testing chamber 6, and a low temperature chamber 7. The high temperature test is performed by circulating air heated by a heater 24 into the testing chamber 6 through a high temperature air supply port 10, and a high temperature air recovery port 11. The low temperature test is performed by circulating air cooled by an evaporator 31 of a refrigerator cycle into the testing chamber 6 through a low temperature air supply port 12, and a low temperature recovery port 13. The heat shock test is performed by switching the high temperature test and the low temperature test alternatively, wherein an outer air intake port 35 and outer air damper opening/closing a discharge port and a heater 33 are provided. At the time of transition from the high temperature test to the low temperature test, the outer air damper 37 is opened so as to control the temperature of high temperature chamber, at the time of transition from the cold temperature test to high temperature test, a heater 33 is made to work so as to control the temperature of cold chamber. By these means the temperature change rate is controlled. <P>COPYRIGHT: (C)2004,JPO

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a thermal shock test apparatus, and more particularly to a thermal shock test apparatus including a high temperature tank for storing high temperature gas and a low temperature tank for storing low temperature gas.

[0002]

2. Description of the Related Art A thermal shock test apparatus is a heater for preheating a test chamber in which an object to be tested is stored and a gas such as air (hereinafter referred to as air) to a high temperature preset temperature (for example, 60 ° C. to 200 ° C.). And a low temperature tank having an evaporator of a refrigeration cycle for precooling air to a low temperature set temperature (for example, -65 ° C to 0 ° C). Then, the high-temperature air stored in the high-temperature tank and the low-temperature air stored in the low-temperature tank are alternately supplied to the test chamber, and abrupt temperature stress (heat Impact) is applied to evaluate changes in heat resistance and physical / electrical characteristics.

The high temperature tank and the low temperature tank of such a thermal shock test apparatus are generally formed by providing a heat insulating material or the like in order to efficiently store the amount of heat. In addition, JP-A-5-18
In Japanese Patent Publication No. 7984, in order to suppress a decrease in temperature of air during a thermal shock test, a heat storage body having a relatively large heat capacity is provided to increase the total heat storage amount in a high temperature tank and a low temperature tank. .

[0004]

By the way, in a thermal shock test for evaluating the operation of an electronic component under a temperature stress, for example, a temperature change in a test chamber at the time of shifting from a high temperature test to a low temperature test or from a low temperature test to a high temperature test. There is a demand for a test in which the temperature of the test chamber is changed over a relatively long time by controlling the rate to be constant. On the other hand, a conventional thermal shock test that gives a sudden temperature stress is also performed.
Therefore, there is a demand for a thermal shock test device having both the function of relatively slowly changing the temperature of the test chamber and the conventional function of rapidly changing the temperature.

However, the conventional thermal shock test device is
No consideration is given to controlling the rate of temperature change in the test room during the transition of the hot or cold test. In particular,
When the high temperature tank and the low temperature tank are provided with a heat storage material or a heat insulating material, it is difficult to change the temperature of the air in the tank. Therefore, it is difficult to control the temperature change rate of the test chamber with the conventional one that adjusts the temperature of the air in the high temperature tank and the low temperature tank by controlling ON / OFF of the heater or the like.

On the other hand, a method of simultaneously supplying air from the high temperature tank and the low temperature tank to the test chamber and controlling the temperature change rate of the test chamber by controlling the supply ratio of the high temperature and low temperature air can be considered. However, this method is not preferable because air having a plurality of different temperatures is caused to flow into the test chamber, and the temperature distribution in the test chamber becomes uneven.

Therefore, an object of the present invention is to control the temperature change rate of the test chamber when the high temperature test is changed to the low temperature test or when the low temperature test is changed to the high temperature test.

[0008]

The thermal shock test apparatus of the present invention comprises a test chamber in which an object to be tested is stored, a high temperature tank connected to the test chamber via a high temperature gas passage, and a test chamber. A low-temperature tank connected via a low-temperature gas passage, a main heater for heating the gas in the high-temperature tank, a main cooler for cooling the gas in the low-temperature tank, and a first heater for opening and closing the high-temperature gas passage Damper, an auxiliary cooler for cooling the inside of the high temperature tank, an auxiliary heater for heating the inside of the low temperature tank, and a second damper for opening and closing the low temperature gas flow path,
A controller for controlling opening / closing of the first damper and the second damper and controlling operations of the auxiliary cooler and the auxiliary heater is provided, and the controller opens the first damper and opens the second damper. By switching between a high temperature test in which the temperature of the closed test chamber is controlled to a high temperature set temperature and a low temperature test in which the first damper is closed and the second damper is opened to control the temperature of the test chamber to a low temperature set temperature, the above test is performed. Solve the problem.

That is, by providing an auxiliary cooler for lowering the temperature of the high temperature tank and an auxiliary heater for increasing the temperature of the low temperature tank, the temperatures of the high temperature tank and the low temperature tank can be adjusted.

With this, the temperature of the air in the high temperature tank and the temperature in the low temperature tank can be arbitrarily controlled, so that the rate of temperature change in the test chamber at the time of shifting from the high temperature test to the low temperature test or from the low temperature test to the high temperature test is controlled. be able to.

Specifically, the control device activates the auxiliary cooler at the time of shifting from the high temperature test to the low temperature test. With this, when shifting from the high temperature test to the low temperature test, the auxiliary cooler can be operated with the first damper opened and the second damper closed, and the temperature of the air in the high temperature tank can be adjusted. Can be supplied to the test chamber. Similarly, in the auxiliary heater, when the low temperature test is shifted to the high temperature test, the auxiliary heater is operated while the first damper is closed and the second damper is opened, so that the air in the low temperature tank is operated. The temperature can be adjusted and supplied to the test chamber.

Here, the temperature change rate of the test chamber is, for example,
It can be determined from the temperatures at two points detected by a thermometer that detects the temperature of the test chamber. It can also be determined from the time elapsed from the end of the high temperature test or the low temperature test and the temperature of the test chamber. Then, so that the obtained temperature change rate becomes the preset temperature change rate, the main heater, the main cooler,
Control the output of the auxiliary heater and auxiliary cooler.

Further, since the temperature change rate of the test chamber can be controlled, the first operation mode in which the high temperature test and the low temperature test are alternately repeated, the high temperature test, and the temperature of the test chamber from the high temperature set temperature to the low temperature set temperature. It is possible to adopt a configuration in which the second operation mode in which the temperature decreasing operation for decreasing, the low temperature test, and the temperature increasing operation for increasing the temperature of the test chamber from the low temperature setting temperature to the high temperature setting temperature are repeated is selected.

Here, in the temperature lowering operation and the temperature raising operation, an intermediate temperature is set between the high temperature setting temperature and the low temperature setting temperature, and when the temperature of the test chamber is equal to or higher than the intermediate temperature, the first damper is opened. The second damper is closed, and at least one of the main heater and the auxiliary cooler is controlled based on the temperature change rate of the test chamber. When the temperature of the test chamber is lower than the intermediate temperature, the first damper is closed. The second damper can be opened and at least one of the main cooler and the auxiliary heater can be controlled based on the temperature change rate of the test chamber. As a result, the temperature range of the chamber can be narrowed compared to the case where the temperature of the test chamber is controlled by controlling the air temperature in one of the chambers. Can be suppressed.

In this case, the intermediate temperature is preferably set according to the capabilities of the main heater, main cooler, auxiliary heater and auxiliary cooler. For example, if the capacities of the high temperature tank side and the low temperature tank side are about the same, it is preferable to set the average temperature of the high temperature set temperature and the low temperature set temperature. Also,
When the damper is used as the auxiliary heater, the lower limit of the temperature of the high temperature tank is the outside air temperature, so it is preferable to set the intermediate temperature to the outside air temperature (for example, 23 ° C.).

Here, the auxiliary cooler can be formed by an opening for introducing and discharging outside air into the high temperature tank and a third damper for opening and closing this opening. Furthermore, it is preferable to provide a blower at this opening because the introduction and discharge of outside air can be promoted. Further, instead of this opening, the auxiliary cooler may be formed by a heat exchanger through which the refrigerant flows and an adjusting valve that adjusts the flow rate of the refrigerant. The refrigerant flowing through the heat exchanger may be the refrigerant flowing through the main cooler of the low temperature tank, or may be a fluid such as water. here,
The high temperature tank and the low temperature tank are preferably equipped with a blower for sending air to the test chamber. Further, when the damper for communicating the inside of the tank and the test chamber is closed, the air in the tank can be stirred by operating this blower, which is preferable.

[0017]

BEST MODE FOR CARRYING OUT THE INVENTION An embodiment of a thermal shock test apparatus to which the present invention is applied will be described below with reference to FIGS. FIG. 1 is a front sectional view of an embodiment of a thermal shock test device to which the present invention is applied. FIG. 2 is a time chart showing the operation in the first operation mode. FIG. 3 is a time chart showing the operation in the second operation mode.

As shown in FIG. 1, the thermal shock test device of this embodiment is formed of a box-shaped casing 1 made of a heat insulating material. The inside of the housing 1 is partitioned into upper and lower three stages by heat insulating walls 2 and 3 made of a heat insulating material like the housing 1, and three rooms are formed. These three chambers are referred to as a high temperature tank 5, a test chamber 6 and a low temperature tank 7 from the top. A high temperature air supply port 10 and a high temperature air recovery port 11 are formed on a heat insulating wall 2 separating the high temperature tank 5 and the test chamber 6 so that air can circulate between the high temperature tank 5 and the test chamber 6. There is. Further, a low temperature air supply port 12 and a low temperature air recovery port 13 are formed on the heat insulating wall 3 separating the low temperature tank 7 and the test chamber 5 so that air can circulate between the low temperature tank 7 and the test chamber 5. Has become. The high temperature air supply port 10 and the high temperature air recovery port 11 are opened and closed by a high temperature damper 15 which is a first damper, and the low temperature air supply port 12 and the low temperature air recovery port 13 are second dampers. It is adapted to be opened and closed by a low temperature damper 16. Each of the high temperature damper 15 and the low temperature damper 16 has a structure that opens toward the test chamber 5 side.

The test chamber 5 is provided with a carry-in door (not shown), and the DUT 18 is accommodated in the test chamber 5 through the carry-in door. Further, the high temperature tank 5 is formed by having a plate member 19 that partitions the inside of the tank into upper and lower parts. The plate member 19 has openings 20 and 21 formed at positions corresponding to the hot air supply port 10 and the hot air recovery port 11, respectively. The blower 22 is arranged to send the air on the upper surface side of the plate material 19 to the lower surface side of the plate material 19 through the opening 20 and further to the high temperature air supply port 10. A heater 24 that is a main heater that heats air and a heat storage material 25 that is made of a metal such as iron that stores heat is disposed on the upper surface side of the plate material 19.

The low temperature tank 7 is a plate member 27 for partitioning the inside of the tank into upper and lower parts.
Is formed. The plate member 27 has openings 28 and 29 formed at positions corresponding to the low temperature air supply port 12 and the low temperature air recovery port 13, respectively. Blower 30
It is arranged so that the air on the lower surface side of the plate material 27 is sent to the upper surface side of the plate material 27 through the opening 28 and further to the low temperature air supply port 12. Further, an evaporator 31 which is a main cooler for cooling air and a heat storage material 32 which is made of a metal such as iron and which stores the amount of cold heat are arranged on the lower surface side of the plate material 27. Further, the evaporator 31 is connected to a refrigerating cycle of a refrigerating device (not shown) installed outside the housing 1 so that the refrigerant flows therethrough. A heater 33, which is an auxiliary heater, is provided on the opening 28 side of the heat storage material 32.

Here, an opening for introducing and discharging outside air into the high temperature tank, which is a characteristic part of this embodiment, and a third opening for opening and closing this opening.
The configuration of the auxiliary cooler formed with the damper will be described. An outside air inlet 35 and an outlet 36 are formed on the top plate of the housing 1 forming the high temperature tank 5, so that the outside air can be taken into the high temperature tank 5 and the air in the high temperature tank 5 can be discharged to the outside. . The outside air introduction port 35 is arranged at a position corresponding to the high temperature air recovery port 11 and the opening 21, that is, right above, and the discharge port 36 is also provided at a position corresponding to the high temperature air supply port 10 and the opening 20. . The outside air inlet 35 and the outlet 36 are each provided with an openable / closeable outside air damper 37. Further, the blower 38 that blows air is the outside air introduction port 3
It is arranged so as to guide the outside air into the high temperature tank 5 via 5.

The configuration of the control system of this embodiment will be described. The thermal shock test device of the present embodiment includes a test thermometer (not shown) for detecting the temperature of the air in the test chamber 6,
A high temperature thermometer for detecting the temperature of the air in the high temperature tank 5 and a low temperature thermometer for detecting the temperature of the air in the low temperature tank 7 are provided.
Further, a control device (not shown) is provided, and the temperature detected by the test thermometer, the high temperature thermometer and the low temperature thermometer is input to the control device. The control device outputs a signal for controlling a driving device (not shown) that drives the high temperature damper 15, the low temperature damper 16, and the outside air damper. Further, a signal for controlling the output of the heater 24 and the heater 33 is output. The outputs of the heaters 24 and 33 are sent to an SSR (switching element) (not shown) that controls energization of the heaters 24 and 33. This SSR has a structure in which the heater output can be controlled over 0 to 100% by performing so-called ON / OFF control in which the heater is energized for a certain period of a certain period and the heater energization is stopped during the other period. Has become.

The control operation of the thermal shock test device having such a control system will be described. First, the control for changing the temperature from the low temperature to the high temperature or from the high temperature to the low temperature in the first operation mode in the thermal shock test device in several minutes (for example, 5 minutes) will be described with reference to FIG. When the operation is started, a refrigerating cycle (not shown) starts to operate, and the control device controls the heaters 24 and 33 so that the air in the high temperature tank 5 and the low temperature tank 7 reaches the preheating or precooling temperature. Then, for example, when the low temperature test is started (state), the high temperature damper 15 is closed and a signal to open the low temperature damper 16 is output to circulate air in the low temperature tank 7 and the test chamber 6.
The detected temperature input from the test thermometer is, for example, -65 ° C.
The heater 33 is controlled so as to be maintained at the low set temperature of. At this time, the heater 24 controls so that the temperature detected by the high temperature thermometer becomes the preheating temperature. Also, the air in the high temperature tank 5 is
As indicated by the broken arrow, the blower 22 causes the plate material 1
The lower surface side of 9, the opening 21, the heat storage body 25, the heater 24, and the opening 20 are circulated in this order. As a result, it is possible to preheat the air in the high temperature tank 5 and suppress the occurrence of bias in the temperature distribution of the air.

When the low temperature test time has passed, the high temperature damper 1
5 is opened, the low temperature damper 16 is closed, and the high temperature tank 5 and the test chamber 6 are closed.
Circulate air through. As a result, the high-temperature heat source of the high-temperature tank 5 is immediately transmitted to the test room, and the temperature is changed from low to high in a short time (state). Then, the heater 24 is controlled so that the detected temperature input from the test thermometer is maintained at a high set temperature of 120 ° C., for example. At this time, the heater 33 is controlled so that the temperature detected by the low temperature thermometer becomes the precooling temperature.
Further, the air in the low temperature tank 7 is circulated by the blower 30 in the order of the upper surface side of the plate material 27, the opening 29, the evaporator 31, the heat storage body 32, the heater 33, and the opening 28, as indicated by the dashed arrow. As a result, similarly to the high temperature tank 5, it is possible to suppress the occurrence of bias in the temperature distribution of the air. Here, when the high temperature test is completed and the low temperature test is performed, the operation in the state is performed again. As described above, in the first operation mode, by opening and closing the low-temperature or high-temperature damper, the heat accumulated in the high-temperature tank or the low-temperature tank can be transferred to the test room at once, and a temperature change in the test room can be generated in a short time. it can.

Next, the control for giving the DUT a relatively gentle (for example, 10 minutes) temperature change in the second operation mode will be described with reference to FIG. When the operation is started, a refrigerating cycle (not shown) starts to operate, and the controller controls the heaters 24 and 33 so that the air inside the high temperature tank 5 and the air inside the low temperature tank 7 reach the preheating or precooling temperature, respectively. Then, for example, when the low temperature test is started (state), the high temperature damper 15 is closed and a signal to open the low temperature damper 16 is output to circulate air in the low temperature tank 7 and the test chamber 6. The detected temperature input from the test thermometer is, for example, −6.
The heater 33 is controlled so as to be maintained at the low set temperature of 5 ° C. At this time, the heater 24 is controlled to be turned off. Further, the air in the high temperature tank 5 passes through the heat storage body 25 and the heater 24 from the lower surface side of the plate material 19 through the opening 21 and the plate material 19 through the opening 20 again by the blower 22 as shown by the arrow of the broken line. Is circulated to the lower surface side of.

When the low temperature test time has passed, the high temperature damper 1
5 is closed and the low temperature damper 16 is kept open, the temperature change rate of the test chamber is calculated from the detected temperatures at two points input from the test thermometer, and the calculated temperature change rate becomes the set temperature change rate. To control the heater 33 (state). After that, when the test chamber temperature reaches an intermediate temperature A (for example, 0 ° C.), a signal that opens the high temperature damper 15 and closes the low temperature damper 16 is output, and air is circulated between the high temperature tank 5 and the test chamber 6. Further, while outputting a signal to turn off the heater 33, the temperature change rate of the test chamber 6 is calculated from the detected temperatures at two points of time input from the test thermometer, and the calculated temperature change rate becomes the set temperature change rate. The heater 24 is controlled (state). When the temperature of the test chamber 6 reaches the high set temperature,
The high temperature damper 15 is opened as it is, and the heater 24 is controlled so that the detected temperature input from the test thermometer is maintained at the high set temperature (state).

When the high temperature test is completed and the low temperature test is started, the outside air damper 37 is opened and a signal for operating the blower 38 is output. As a result, air is circulated in the high temperature tank 5 and the test chamber 6 as shown by the solid line arrow, and the outside air is supplied into the high temperature tank 5 and is released into the atmosphere again. The temperatures of the heat storage body 25 and the air can be lowered. Then, the temperature change rate of the test chamber 6 is calculated from the detected temperatures at two points input from the test thermometer, and the heater 24 is controlled so that the calculated temperature change rate becomes the set temperature change rate (state). As a result, the inside of the high temperature tank 5 can be cooled and the temperature of the high temperature tank 5 can be arbitrarily controlled, so that the temperature change rate of the test chamber 6 at the time of shifting from the high temperature test to the low temperature test can be controlled.

Thereafter, the test chamber temperature is at an intermediate temperature B.
When the temperature drops to (for example, 23 ° C.), the outside air damper 37 is closed, the blower 38 is stopped, the high temperature damper 15 is closed, and the heater 24 is turned off. Further, the low temperature damper 16 is opened, the temperature change rate of the test chamber 6 is calculated from the detected temperatures at two points input from the test thermometer, and the heater 33 is set so that the calculated temperature change rate becomes the set temperature change rate.
Control (state). When the temperature of the test chamber 6 reaches the low temperature set temperature, the low temperature damper 16 is left open to perform the low temperature test (state).

As described above, when the low-temperature test is changed to the high-temperature test or the high-temperature test is changed to the low-temperature test, the low-temperature damper 16 and the high-temperature damper 15 are not operated at a stroke and the operation of each damper and the heater 24 are responded to the temperature change of the test chamber. , 33, and the outside air damper 37 and the blower 38 are operated to freely control the change in the test temperature state. Then, by controlling the operating temperatures of the heaters 24 and 33 in terms of time, it is possible to control an arbitrary transition time, the temperature and time change of the sample can be changed, and a test different from the conventional one can be performed. .

In this embodiment, as means for lowering the temperature of the high temperature tank 5, the high temperature tank 5 is provided with the outside air inlet 35 and the outlet 36, and the opening and closing of this opening is controlled by the outside air damper 37. Alternatively, as shown in FIG. 4, the heat exchanger 40 through which the refrigerant flows may be provided near the heater 24 on the upper surface side of the plate member 19. A modified example of the present embodiment will be described below. FIG. 4 is a front sectional view showing a modified example of the thermal shock test device to which the present invention is applied. The same parts as those in the embodiment shown in FIG. 1 are designated by the same reference numerals and the description thereof will be omitted.

The thermal shock test apparatus of the modified example is characterized in that a heat exchanger 40 is provided on the upper surface side of the plate member 19 of the high temperature tank 5. This heat exchanger 40 is connected to an evaporator 31 provided on the lower surface side of the plate member 27 of the low temperature tank 7 via refrigerant pipe lines 41 and 42 so that the refrigerant can circulate with each other.
A solenoid valve 4 for controlling the flow rate of the refrigerant is provided in the refrigerant pipes 41, 42.
4 and 45 are provided respectively, and the opening degrees of the solenoid valves 44 and 45 are controlled by a control device (not shown). The solenoid valves 44 and 45 open the outside air damper 37 in the state of the operation shown in FIG.
It is controlled to open instead of operating. Further, in this case, the refrigerant is not limited to that of the evaporator 31, and may be water supplied from a water supply or the like. The auxiliary cooler only needs to be able to lower the temperature of the high temperature tank 5, and various known techniques can be used.

Further, in this embodiment, the heat storage bodies 25, 3
Although a metal plate is used for 2, the material is not limited to this and any material having a larger heat capacity than air can be used for the heat storage body. In addition, the plate materials 19 and 2 are placed in the high temperature tank 5 and the low temperature tank 7.
7 is provided and the air in the tank is circulated when not communicating with the test chamber 6, respectively.
It is not always necessary to provide 7. Further, in the present embodiment, the temperature change rate of the test chamber 6 is obtained from the temperatures at two points detected by the test thermometer, but the present invention is not limited to this, and the temperature change rate can be calculated from the end of the high temperature test or the low temperature test. It can also be obtained from the elapsed time and the temperature of the test chamber 6.

Further, in this embodiment, the outside air introduction port 3 is used to introduce outside air into the high temperature tank 5 and discharge the air inside the high temperature tank 5.
5 and the discharge port 36 are provided, but the number of openings is not limited to this, and the number of openings is 1 as long as the outside air can be introduced and discharged.
One or more may be used. Further, a high temperature air supply port 10 and a high temperature air recovery port 11 for circulating air between the high temperature tank 5 and the test chamber 6, a low temperature air supply port 12 for circulating air between the low temperature tank 7 and the test chamber 6, and The same applies to the low temperature air recovery port 13.

As described above, according to the present embodiment, the temperature of the air in the high temperature tank 5 and the low temperature tank 7 can be arbitrarily controlled. Therefore, in addition to the conventional thermal shock test, the high temperature test to the low temperature test can be performed. Alternatively, it is possible to perform a test in which the temperature of the test chamber 6 is changed over a relatively long time by controlling the temperature change rate of the test chamber 6 at the time of shifting from the low temperature test to the high temperature test. In addition, since the rate of temperature change can be controlled, it is possible to avoid a rapid temperature change in the test chamber when switching between the high temperature test and the low temperature test, and prevent thermal shock from occurring while suppressing damage to the test object due to thermal shock. It is possible to evaluate the influence of the DUT on, for example, the operation.

[0035]

According to the present invention, it is possible to control the temperature change rate in the test chamber when the high temperature test is changed to the low temperature test or when the low temperature test is changed to the high temperature test.

[Brief description of drawings]

FIG. 1 is a front sectional view of an embodiment of a thermal shock test apparatus to which the present invention is applied.

FIG. 2 is a time chart showing the operation in the first operation mode.

FIG. 3 is a time chart showing the operation in the second operation mode.

FIG. 4 is a front sectional view of another embodiment of the thermal shock test apparatus to which the present invention is applied.

[Explanation of symbols]

5 high temperature tank 6 test room 7 low temperature tank 18 DUT 24 heater 31 Evaporator 33 heater 35 Outside air inlet

   ─────────────────────────────────────────────────── ─── Continued front page    (72) Inventor Shintaro Masuda             390 Muramatsu, Shimizu City, Shizuoka Prefecture Hitachi Shimizu En             Inside Genialing Co., Ltd. (72) Inventor Yasuo Kawamoto             390 Muramatsu, Shimizu City, Shizuoka Prefecture Hitachi Shimizu En             Inside Genialing Co., Ltd.

Claims (5)

[Claims] 1. A test chamber in which an object to be tested is stored, a high temperature tank connected to the test chamber via a high temperature gas passage, and a low temperature tank connected to the test chamber via a low temperature gas passage. A main heater that heats the gas in the high temperature tank, a main cooler that cools the gas in the low temperature tank, a first damper that opens and closes the high temperature gas passage, and the low temperature gas passage. A second damper that opens and closes, an auxiliary cooler that cools the inside of the high temperature tank, an auxiliary heater that heats the inside of the low temperature tank, and the opening and closing of the first damper and the second damper while controlling the opening and closing of the second damper. An auxiliary cooler and a control device for controlling the operation of the auxiliary heater are provided, and the control device controls the temperature of the test chamber to a high set temperature by opening the first damper and closing the second damper. High temperature test and the test by closing the first damper and opening the second damper Thermal shock test apparatus for performing switch between cold test to control the low set temperature the temperature of the. 2. The control device operates the auxiliary cooler when shifting from the high temperature test to the low temperature test, and activates the auxiliary heater when shifting from the low temperature test to the high temperature test. The thermal shock test device according to claim 1. 3. A thermometer for detecting the temperature of the test chamber, wherein the control device alternately repeats the high temperature test and the low temperature test in a first operation mode, the high temperature test, and the test chamber A second operation mode in which a temperature lowering operation for lowering the temperature from the high temperature set temperature to the low temperature set temperature, the low temperature test, and a temperature raising operation for raising the temperature of the test chamber from the low temperature set temperature to the high temperature set temperature are repeated. When the temperature decrease operation and the temperature increase operation, the detected value of the thermometer is equal to or higher than an intermediate temperature preset between the high temperature set temperature and the low temperature set temperature, the first damper Open and close the second damper, and control at least one of the main heater or the auxiliary cooler based on the temperature change rate of the test chamber, and detect the thermometer during the temperature-decreasing operation and the temperature-increasing operation. value When the temperature is lower than the intermediate temperature, the first damper is closed and the second damper is opened, and at least one of the main cooler and the auxiliary heater is controlled based on the temperature change rate of the test chamber. Claim 1 or 2 characterized by the above-mentioned.
The thermal shock test device described in. 4. The auxiliary cooler includes an inlet for introducing outside air into the high temperature tank, an outlet for discharging air from the high temperature tank to the outside, and a third damper for opening and closing the inlet and the outlet. The thermal shock test device according to claim 1, wherein the thermal shock test device is formed of 5. The auxiliary cooler is formed by a heat exchanger through which a refrigerant flows and an adjusting valve that adjusts the flow rate of the refrigerant. The thermal shock test device described in.