JP2003297671A - プレート懸架構造を有するマイクロマシン加工された平行板可変コンデンサ - Google Patents

プレート懸架構造を有するマイクロマシン加工された平行板可変コンデンサ

Info

Publication number
JP2003297671A
JP2003297671A JP2003069574A JP2003069574A JP2003297671A JP 2003297671 A JP2003297671 A JP 2003297671A JP 2003069574 A JP2003069574 A JP 2003069574A JP 2003069574 A JP2003069574 A JP 2003069574A JP 2003297671 A JP2003297671 A JP 2003297671A
Authority
JP
Japan
Prior art keywords
upper plate
plate
capacitor
spring
lower plate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
JP2003069574A
Other languages
English (en)
Japanese (ja)
Other versions
JP2003297671A5 (enExample
Inventor
Kirt Reed Williams
カート・リード・ウィリアムズ
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Agilent Technologies Inc
Original Assignee
Agilent Technologies Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Agilent Technologies Inc filed Critical Agilent Technologies Inc
Publication of JP2003297671A publication Critical patent/JP2003297671A/ja
Publication of JP2003297671A5 publication Critical patent/JP2003297671A5/ja
Withdrawn legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01G—CAPACITORS; CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES, LIGHT-SENSITIVE OR TEMPERATURE-SENSITIVE DEVICES OF THE ELECTROLYTIC TYPE
    • H01G5/00—Capacitors in which the capacitance is varied by mechanical means, e.g. by turning a shaft; Processes of their manufacture
    • H01G5/16—Capacitors in which the capacitance is varied by mechanical means, e.g. by turning a shaft; Processes of their manufacture using variation of distance between electrodes

Landscapes

  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Micromachines (AREA)
  • Semiconductor Integrated Circuits (AREA)
  • Pressure Sensors (AREA)
JP2003069574A 2002-03-22 2003-03-14 プレート懸架構造を有するマイクロマシン加工された平行板可変コンデンサ Withdrawn JP2003297671A (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US10/104,349 US6549394B1 (en) 2002-03-22 2002-03-22 Micromachined parallel-plate variable capacitor with plate suspension
US10/104349 2002-03-22

Publications (2)

Publication Number Publication Date
JP2003297671A true JP2003297671A (ja) 2003-10-17
JP2003297671A5 JP2003297671A5 (enExample) 2006-04-27

Family

ID=22300019

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2003069574A Withdrawn JP2003297671A (ja) 2002-03-22 2003-03-14 プレート懸架構造を有するマイクロマシン加工された平行板可変コンデンサ

Country Status (4)

Country Link
US (1) US6549394B1 (enExample)
EP (1) EP1347478B1 (enExample)
JP (1) JP2003297671A (enExample)
DE (1) DE60221961T2 (enExample)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005340536A (ja) * 2004-05-27 2005-12-08 Kyocera Corp 可変容量コンデンサ
JP2006165380A (ja) * 2004-12-09 2006-06-22 Kyocera Corp 可変容量コンデンサ
JP2007273932A (ja) * 2006-03-06 2007-10-18 Fujitsu Ltd 可変キャパシタおよび可変キャパシタ製造方法

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KR100519749B1 (ko) * 2001-05-10 2005-10-07 삼성전자주식회사 단일 앵커를 구비하는 마이크로 전자 기계시스템(ｍｅｍｓ) 스위치
US6747863B2 (en) * 2002-01-11 2004-06-08 Hewlett-Packard Development Company, L.P. Electrostatic drive
US7275292B2 (en) * 2003-03-07 2007-10-02 Avago Technologies Wireless Ip (Singapore) Pte. Ltd. Method for fabricating an acoustical resonator on a substrate
US7615833B2 (en) * 2004-07-13 2009-11-10 Avago Technologies Wireless Ip (Singapore) Pte. Ltd. Film bulk acoustic resonator package and method of fabricating same
US20060029151A1 (en) * 2004-08-05 2006-02-09 Moran Robert D Capacitive data link
US7388454B2 (en) * 2004-10-01 2008-06-17 Avago Technologies Wireless Ip Pte Ltd Acoustic resonator performance enhancement using alternating frame structure
US8981876B2 (en) 2004-11-15 2015-03-17 Avago Technologies General Ip (Singapore) Pte. Ltd. Piezoelectric resonator structures and electrical filters having frame elements
US7202560B2 (en) 2004-12-15 2007-04-10 Avago Technologies Wireless Ip (Singapore) Pte. Ltd. Wafer bonding of micro-electro mechanical systems to active circuitry
US7791434B2 (en) 2004-12-22 2010-09-07 Avago Technologies Wireless Ip (Singapore) Pte. Ltd. Acoustic resonator performance enhancement using selective metal etch and having a trench in the piezoelectric
US7369013B2 (en) * 2005-04-06 2008-05-06 Avago Technologies Wireless Ip Pte Ltd Acoustic resonator performance enhancement using filled recessed region
US7737807B2 (en) * 2005-10-18 2010-06-15 Avago Technologies Wireless Ip (Singapore) Pte. Ltd. Acoustic galvanic isolator incorporating series-connected decoupled stacked bulk acoustic resonators
US20070210724A1 (en) * 2006-03-09 2007-09-13 Mark Unkrich Power adapter and DC-DC converter having acoustic transformer
US7746677B2 (en) * 2006-03-09 2010-06-29 Avago Technologies Wireless Ip (Singapore) Pte. Ltd. AC-DC converter circuit and power supply
US20070210748A1 (en) * 2006-03-09 2007-09-13 Mark Unkrich Power supply and electronic device having integrated power supply
US7479685B2 (en) * 2006-03-10 2009-01-20 Avago Technologies General Ip (Singapore) Pte. Ltd. Electronic device on substrate with cavity and mitigated parasitic leakage path
US7855618B2 (en) * 2008-04-30 2010-12-21 Avago Technologies Wireless Ip (Singapore) Pte. Ltd. Bulk acoustic resonator electrical impedance transformers
US7732977B2 (en) * 2008-04-30 2010-06-08 Avago Technologies Wireless Ip (Singapore) Transceiver circuit for film bulk acoustic resonator (FBAR) transducers
US8902023B2 (en) 2009-06-24 2014-12-02 Avago Technologies General Ip (Singapore) Pte. Ltd. Acoustic resonator structure having an electrode with a cantilevered portion
US8248185B2 (en) 2009-06-24 2012-08-21 Avago Technologies Wireless Ip (Singapore) Pte. Ltd. Acoustic resonator structure comprising a bridge
US8193877B2 (en) * 2009-11-30 2012-06-05 Avago Technologies Wireless Ip (Singapore) Pte. Ltd. Duplexer with negative phase shifting circuit
US9243316B2 (en) 2010-01-22 2016-01-26 Avago Technologies General Ip (Singapore) Pte. Ltd. Method of fabricating piezoelectric material with selected c-axis orientation
US8796904B2 (en) 2011-10-31 2014-08-05 Avago Technologies General Ip (Singapore) Pte. Ltd. Bulk acoustic resonator comprising piezoelectric layer and inverse piezoelectric layer
US8962443B2 (en) 2011-01-31 2015-02-24 Avago Technologies General Ip (Singapore) Pte. Ltd. Semiconductor device having an airbridge and method of fabricating the same
US9083302B2 (en) 2011-02-28 2015-07-14 Avago Technologies General Ip (Singapore) Pte. Ltd. Stacked bulk acoustic resonator comprising a bridge and an acoustic reflector along a perimeter of the resonator
US9048812B2 (en) 2011-02-28 2015-06-02 Avago Technologies General Ip (Singapore) Pte. Ltd. Bulk acoustic wave resonator comprising bridge formed within piezoelectric layer
US9203374B2 (en) 2011-02-28 2015-12-01 Avago Technologies General Ip (Singapore) Pte. Ltd. Film bulk acoustic resonator comprising a bridge
US9136818B2 (en) 2011-02-28 2015-09-15 Avago Technologies General Ip (Singapore) Pte. Ltd. Stacked acoustic resonator comprising a bridge
US9154112B2 (en) 2011-02-28 2015-10-06 Avago Technologies General Ip (Singapore) Pte. Ltd. Coupled resonator filter comprising a bridge
US9148117B2 (en) 2011-02-28 2015-09-29 Avago Technologies General Ip (Singapore) Pte. Ltd. Coupled resonator filter comprising a bridge and frame elements
US9425764B2 (en) 2012-10-25 2016-08-23 Avago Technologies General Ip (Singapore) Pte. Ltd. Accoustic resonator having composite electrodes with integrated lateral features
US8575820B2 (en) 2011-03-29 2013-11-05 Avago Technologies General Ip (Singapore) Pte. Ltd. Stacked bulk acoustic resonator
US9444426B2 (en) 2012-10-25 2016-09-13 Avago Technologies General Ip (Singapore) Pte. Ltd. Accoustic resonator having integrated lateral feature and temperature compensation feature
US8350445B1 (en) 2011-06-16 2013-01-08 Avago Technologies Wireless Ip (Singapore) Pte. Ltd. Bulk acoustic resonator comprising non-piezoelectric layer and bridge
US8922302B2 (en) 2011-08-24 2014-12-30 Avago Technologies General Ip (Singapore) Pte. Ltd. Acoustic resonator formed on a pedestal
US11522469B2 (en) 2019-12-06 2022-12-06 Alliance For Sustainable Energy, Llc Electric machines as motors and power generators

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US5103283A (en) * 1989-01-17 1992-04-07 Hite Larry R Packaged integrated circuit with in-cavity decoupling capacitors
US5008774A (en) * 1989-02-28 1991-04-16 United Technologies Corporation Capacitive accelerometer with mid-plane proof mass
US5253526A (en) * 1990-05-30 1993-10-19 Copal Company Limited Capacitive acceleration sensor with free diaphragm
US5696662A (en) * 1995-08-21 1997-12-09 Honeywell Inc. Electrostatically operated micromechanical capacitor
JP2785766B2 (ja) * 1995-09-29 1998-08-13 日本電気株式会社 半導体装置の製造方法
US5911627A (en) * 1997-10-23 1999-06-15 Logitech, Inc. Electromagnetic joystick using varying overlap of coils and conductive elements
US6215645B1 (en) * 1998-05-01 2001-04-10 Motorola, Inc. Differential capacitor structure
US6242989B1 (en) * 1998-09-12 2001-06-05 Agere Systems Guardian Corp. Article comprising a multi-port variable capacitor
WO2001084660A1 (en) * 2000-05-02 2001-11-08 Paratek Microwave, Inc. Voltage tuned dielectric varactors with bottom electrodes

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005340536A (ja) * 2004-05-27 2005-12-08 Kyocera Corp 可変容量コンデンサ
JP2006165380A (ja) * 2004-12-09 2006-06-22 Kyocera Corp 可変容量コンデンサ
JP2007273932A (ja) * 2006-03-06 2007-10-18 Fujitsu Ltd 可変キャパシタおよび可変キャパシタ製造方法

Also Published As

Publication number Publication date
DE60221961T2 (de) 2007-12-20
EP1347478A3 (en) 2005-07-06
EP1347478A2 (en) 2003-09-24
DE60221961D1 (de) 2007-10-04
EP1347478B1 (en) 2007-08-22
US6549394B1 (en) 2003-04-15

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