JP2003297274A - Sample holding device - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a sample holding device used for various instruments for processing, analysis, observation, or the like, capable of holding the sample at an intended slope and/or height by attaching it to a sample stand of each instrument, capable of easily moving and holding the sample to the desired position. <P>SOLUTION: The sample supporting device comprises a supporting member attached to the main part side of the device, a sample holder holding the sample, and a coupling means conecting the supporting member to the sample holder, enabling any one or more operations of an inclination operation, a rotating operation, or a vertical operation of the sample holder, capable of restoring the sample holder to the original position. The sample holding device is a spherical bearing composed of a spherically convex part formed on either side of the component or the sample holder, and a spherically concave part which is formed on the other side, turnably coupled with the spherically convex part. <P>COPYRIGHT: (C)2004,JPO

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION This invention relates to a scanning electron microscope (hereinafter SEM), an X-ray microanalyzer (hereinafter EP
MA), Auger electron spectroscope (XPS) and other analytical observation equipment, sample processing equipment such as focused ion beam processing equipment, and further focused ion beam processing and observation equipment equipped with both sample processing and analytical observation functions. Sample processing, analysis, observation equipment, etc. are mounted on various devices, and various samples are held at predetermined positions of the device and in predetermined postures for observation, measurement, length measurement, analysis, processing, etc. The present invention relates to a sample holding device for performing.

[0002]

2. Description of the Related Art In recent years, ULS has been highly integrated and has become ultra-miniaturized.
In the field of I, the field of material development that requires more advanced functions and characteristics, various samples such as semiconductors and metal materials are manufactured with higher processing accuracy, or analyzed and / or analyzed with higher position accuracy. Or it has become necessary to observe. In addition, when performing advanced processing of metallic materials such as improving the purity, making the foil thinner, and finishing the surface to be a mirror surface, the surface condition of the sample to be targeted should be observed more three-dimensionally. Required to obtain information. Further, when these samples have a shape or a characteristic structure in the sample itself, one sample needs to be processed, analyzed, and observed from a plurality of directions and angles.

In order to perform the above-mentioned processing, analysis, observation, etc., the target sample is put in the sample chamber of each device and each process is carried out. The inside of the sample chamber of such device is mainly the sample. A sample stage that holds the sample, a sample stage that sets the sample stage, a detector that detects signals such as X-rays and secondary electrons emitted from the sample by irradiating the sample with an electron beam or an ion beam, and a sample. It is composed of an objective lens for observing. In such a situation, in order to process, analyze, and observe the sample from multiple angles and directions,
It is common to incline the sample stage on which the sample stage holding the sample is set. However, as described above, there are a plurality of insides of the sample chamber, and since these electron optical columns, detectors, and the like obtain sufficient signal intensity emitted from the sample necessary for observation, analysis, etc., they are Since they are placed close to each other, even if the sample stage on which the sample is set is tilted in a desired direction or angle, the components interfere with each other, or the tilting function of the instrument itself from the beginning. Because it is restricted,
These instruments cannot always be said to have a sufficient sample tilting function.

When performing processing, analysis, observation, etc. using these instruments, the actual condition is that the sample stand on which the sample is set is taken out from the sample chamber of the instrument each time observation of the sample is completed. If the sample is adhered and fixed with an adhesive, etc., peel off the sample, or if it is fixed with a fixing jig, remove the fixing jig and face it in the direction or surface necessary for the next observation. Attach the sample to the sample table again,
It is necessary to set the sample stage on the sample stage in the sample chamber again. If the desired tilt angle cannot be obtained with the sample tilting function of the instrument even if the sample mounting direction or surface is changed, mount the sample using a sample stand with a predetermined tilt angle in advance. It is necessary to perform observations in addition to the sample tilt function. If the sample tilting function of the instrument is not sufficient, it requires a lot of setup as described above, which is troublesome and reduces the efficiency of observation, etc.
Since it is necessary to attach and detach the sample every time observation is performed, it may cause damage, contamination, deformation, distortion, etc. of the sample. Further, the sample tilting function of the instrument has a range of use, and there is a tilting angle that cannot be obtained by any means, and there is a big problem that sufficient processing, analysis, observation and the like cannot be performed.

Until now, attempts have been made to supplement the above-mentioned equipment with a tilt function. For example, in Japanese Patent Application Laid-Open No. 10-172484, in a charged particle device such as a scanning electron microscope (SEM), in addition to a tilt function of a sample stage, a tilt function is also provided on an electron optical column side for irradiating a sample with an electron beam. The method of making it proposed is proposed.
However, in the method of providing the tilt function on the electron optical column side as described above, the cost becomes higher than that of the conventional device, and the tilt function of the sample stage and the tilt function on the electron optical column side cause tilting. It may be difficult to adjust the accuracy, and the operation of the device may be complicated. There is also a problem that the above means cannot be applied to existing equipment.

[0006]

Therefore, the present inventors have proposed a sample holding device which is mounted on various devices and holds various samples at a predetermined position of the device and in a predetermined posture. The present invention has been completed by earnestly investigating a means capable of holding and positioning a desired inclination and / or height.

Therefore, an object of the present invention is to be used in various equipments which need to hold a sample at a predetermined position in a predetermined posture and perform processing, analysis, observation, etc. By attaching it, the sample can be held at the desired inclination and / or height, and the sample is removed from the sample table after each observation, etc., and turned to the direction and angle necessary for the next observation. An inexpensive sample holder that can easily move and hold the sample to the desired position without having to re-hold the sample on the sample table, and can be easily applied to existing equipment. To provide a device.

[0008]

That is, according to the present invention, a support member attached to the equipment main body side, a sample holder for holding a sample, and the support member and the sample holder are connected to each other, and And a coupling means capable of performing at least one of a tilting operation, a rotating operation, and an up-and-down operation, maintaining its posture, and returning the sample holder to the original posture. In the sample holding device, the coupling means is rotatably fitted between a spherical convex portion formed on one of the support member and the sample holder and the spherical convex portion formed on the other side. The sample holding device is a spherical bearing including a spherical concave portion.

Further, according to the present invention, a supporting member attached to the instrument body side, a sample holder for holding a sample, and the supporting member and the sample holder are connected to each other, and the tilting operation, the rotating operation and the rotating operation of the sample holder are performed. A sample holding device provided with a coupling means capable of performing one or more vertical movements and holding the posture thereof and returning the sample holder to the original posture. The sample holding device is characterized in that the coupling means is composed of a plurality of support shafts that are erected on the support member so that the height thereof can be adjusted and support the sample holder.

Further, according to the present invention, a supporting member attached to the instrument body side, a sample holder for holding a sample, and the supporting member and the sample holder are connected to each other, and the tilting operation, the rotating operation and the rotating operation of the sample holder are performed. A sample holding device provided with a coupling means capable of performing one or more vertical movements and holding the posture thereof and returning the sample holder to the original posture. The above-mentioned coupling means is an expandable / bendable expandable / bendable member, which is a sample holding device.

In the present invention, the support member may be attached to the device body side, and even if it is formed integrally with the device body, it is formed separately from the device body and is detachable from the device body side. It may be attached. If the support member can be detachably attached to the device body side, it is possible to perform processing, analysis, observation, etc. by a plurality of devices while holding the same sample without removing the sample held in the sample holder. Further, the shape may be any shape as long as the sample holder of the present invention can be connected thereto. For example, analysis and observation equipment such as SEM, EPMA, XPS, etc., which is an equipment using the sample holding device of the present invention, focusing It may be formed according to the shape of a sample processing device such as an ion beam processing device, or a focused ion beam processing and observation device having both functions of sample processing and analytical observation.

The support member has a cylindrical body having a hollow portion and an internal thread portion formed on the inner wall of the hollow portion, and a circular body having a circular cross section and the female screw portion formed on the outer peripheral wall thereof. It may be configured by a disc body which is formed with a male screw portion which is screwed into and is screwed into the hollow portion of the cylindrical body. When the support member is configured as described above,
If the cylinder body is attached to the device body side and the sample holder of the present invention is connected to the disc body, the disc body screwed into the hollow portion of the cylinder body is rotated, whereby the height of the disc body in the cylinder body is increased. Can be adjusted, and the height of the sample holder connected to this disk can be easily finely adjusted.

The sample holder in the present invention may be any one as long as it can securely hold a sample to be processed, analyzed, observed, etc., and formed according to the shape and size of the sample to be held. Good. For example, when the sample is a thin film or a thin plate, the sample holder may be formed in a flat plate shape, the sample may be placed on the sample holder, and the sample may be fixed with an adhesive tape or an adhesive. In the case of a rod-shaped object, a sample insertion hole for inserting one end of the sample may be formed and the sample may be fixed by a screw or the like that abuts. When the sample is plate-shaped, a pair of sandwiching portions facing each other may be formed so as to sandwich one end of the sample. By forming the sample holder according to the shape and size of the sample in this manner, the sample holder can be tilted in any direction, rotated, and securely held even when it is moved up and down, processed, analyzed, Observation and the like can be performed.

Further, in the present invention, the connecting means for connecting the supporting member and the sample holder enables at least one of tilting operation, rotating operation and up-and-down operation of the sample holder and It is necessary to be able to hold the posture and return the sample holder to the original posture. Below, the example of a structure is shown about a concrete coupling means.

That is, in the first configuration example, a spherical convex portion formed on either one of the support member or the sample holder in the present invention and the spherical convex portion formed on the other is rotatable. It is a coupling means by a spherical bearing composed of a spherical concave portion fitted.

The spherical convex portion and the spherical concave portion forming the spherical bearing in the present invention may be fitted so that the spherical convex portion and the spherical concave portion can rotate, and the spherical convex portion and the spherical concave portion The spherical concave portions may be formed so that their contact surfaces are spherical. As described above, the spherical convex portion formed on either one of the support member or the sample holder and the spherical concave portion formed on the other are rotatably fitted to each other to form the spherical bearing. The sample holder connected to the supporting member can be tilted and rotated, and the tilting and rotating operations of the sample holder can be continuously performed in any direction in an arbitrary manner. Therefore, fine adjustment of the tilt and rotation of the sample held in the sample holder can be easily performed.

Further, in the above spherical bearing, a preload may be applied between the spherical convex portion and the spherical concave portion.
The method of applying the preload is not particularly limited, but for example, the convex diameter of the spherical convex portion is formed slightly larger than the concave inner diameter of the spherical concave portion, and when these are fitted to the spherical convex portion, You may make it apply a preload (force). If a preload is applied between the spherical convex portion and the spherical concave portion in this way, the sample holder connected to the supporting member via the spherical bearing can be tilted or rotated in any direction. The sample holder can be held in that posture (position), and the movement of returning the sample holder to the original posture (position) before tilting or rotating can be easily performed.

Further, in the present invention, in order to attract the spherical convex portion and the spherical concave portion which compose the spherical bearing to each other, a magnetic force that attracts each other or both of the spherical convex portion and the spherical concave portion is applied. It may have been done. When a magnetic force is applied to one of the spherical convex portion or the spherical concave portion, the other is formed of a material attracted by the magnetic force, or a material in which these materials are clad or plated. It may be made of any material, such as iron, stainless steel, or chrome. As described above, if the spherical bearing is configured such that the spherical convex portion and the spherical concave portion attract each other by magnetic force, the sample holder connected to the support member via the spherical bearing tilts and rotates in any direction. Even if the sample holder is moved, the sample holder can be held in that posture (position), and the movement to return the sample holder to the original posture (position) before tilting and rotating operation is easy. It can be carried out.

Regarding the spherical projections and the spherical recesses which compose the spherical bearing in the present invention, the spherical projections and / or the spherical recesses are provided at the tip of the projecting shaft provided on the support member and / or the sample holder. Good. The shape of the protruding shaft is not particularly limited, and by providing a spherical convex portion and / or a spherical concave portion at the tip thereof, a spherical bearing including the spherical convex portion and the spherical concave portion and the support member and / or the sample holder can be obtained. What is necessary is just to be able to provide a certain distance between and. By configuring the spherical bearing as described above, the sample holder connected to the support member via this spherical bearing can be provided with a certain distance from the support member, so that the sample holder is tilted. It is possible to prevent the sample holder, support member and spherical bearings from interfering with each other as much as possible even when the sample holder is rotated or rotated. Therefore, a larger tilt and rotation operation area is secured for the sample holder. can do.

A male screw portion is formed at one end of the protruding shaft, and a female screw portion that is screwed into the male screw portion is formed on the supporting member and / or the sample holder.
The projecting shaft may be attached to the support member and / or the sample holder by screwing the male screw portion into the female screw portion. As described above, by mounting the projecting shaft by screwing the supporting member and / or the sample holder, the height of the projecting shaft can be easily adjusted by rotating the projecting shaft. Up and down movement of the sample can be performed, and fine adjustment of the height of the sample held in the sample holder can be easily performed.

Next, a second example of the constitution of the coupling means in the present invention is a coupling means composed of a plurality of support shafts which are erected on the above-mentioned supporting member so that the height thereof can be adjusted to support the sample holder. is there.

In the second configuration example, it is necessary that the height of the support shaft erected on the support member can be adjusted, and in this configuration example, the support shaft is the support member. Since multiple pieces are erected to support the sample holder,
It is necessary that the heights of these support shafts can be adjusted independently of each other. In order to configure such a coupling means, for example, a member in which the support shaft itself is expandable and contractible may be used, and the sample holder may be supported by a plurality of support shafts as described above. Since the sample holder supported by these support shafts can be tilted and moved up and down by adjusting the height.

In the coupling means, preferably, a male screw portion is formed on one of the support shafts, and a female screw portion that is screwed into the male screw portion is formed in the thickness direction of the support member according to the present invention. The connecting means is configured by screwing the male screw portion to the female screw portion and vertically setting the support shaft with respect to the support member. By rotating the support shaft screwed into the female screw portion of the support member as described above, the height of the support shaft with respect to the support member can be easily adjusted, and a plurality of supports erected on the support member are provided. The height of each shaft can be adjusted independently.

When the male screw portion is formed on one of the support shafts as described above, the sample holder supported by the support shaft is detachable from the support shaft and the height of the support shaft can be adjusted. The sample holder may be detached from the support shaft each time and then re-attached to the support shaft after the height adjustment of the support shaft is completed. Also, the sample holder is supported while being supported by the support shaft. The height of the support shaft may be adjusted by rotating the support shaft. In order to enable the height adjustment by rotating the support shaft while supporting the sample holder as described above, for example, a concave groove is formed on the surface of the sample holder on the side supported by the support shaft. May be formed so that the tip of the supporting shaft is loosely fitted in this groove, and a spherical convex portion is formed on either one of the tip of the supporting shaft or the sample holder, and the other of the spherical shape is formed on the other side. A spherical concave portion that rotatably fits with the convex portion may be formed so that the spherical convex portion and the spherical concave portion fit together. By doing so, the support shaft can be rotated while the sample holder is being supported, and even if the sample holder is tilted by the rotation of the support shaft, the sample holder can be reliably supported. can do.

In the coupling means, an elastic member such as rubber or spring may be interposed between the support shaft and the sample holder. If the sample holder is supported by the support shaft via the elastic member, the rotation of the support shaft can be absorbed by the elastic member, and when the height of the support shaft is adjusted by rotating the support shaft, The sample holder can be more surely tilted by the elastic force of the elastic member.

In the present invention, the number of support shafts for supporting the sample holder may be plural, and the tilting motion and the vertical motion of the sample holder can be performed by changing the heights of these support shafts. However, it is preferable that the number of support shafts is three. By vertically arranging three support shafts on the support member so as to be positioned at the respective vertices of a substantially equilateral triangle, and supporting the sample holder by three-point support, the tilting movement and the vertical movement of the sample holder are stepless A wide range can be continuously applied, and fine adjustment of the inclination and height of the sample held in the sample holder can be easily performed.

A third structural example of the connecting means in the present invention is a connecting means for connecting the support member and the sample holder by an expandable / bendable expandable / bendable member.

The expansion / contraction member in the present invention means that the member itself can be expanded / contracted and bent, and even if it is extended, contracted or bent once, it can be easily returned to its original shape. It is possible to return, when connecting between the support member and the sample holder in the present invention,
Anything that can reliably hold the posture of the sample holder may be used. A member such as a flexible tube can be exemplified as a specific example of such a stretchable / bendable member. If the supporting member and the sample holder are connected by such an expansion / contraction member, the sample holder can be tilted, rotated, and moved up and down, and the tilt, rotation, and height of the sample held in the sample holder can be adjusted. Fine adjustment can be easily performed.

Further, the expansion / contraction member may be composed of a connecting shaft having three or more joint joints. The connecting shaft connects between the support member and the sample holder, and the connecting shaft is divided by three or more joint joints. The articulation part may be any one that allows the connecting shaft to be bent freely with the articulation part as a base point, and the movement of the bending can be performed in the plane region or the three-dimensional region. It may be. An example of such an articulated joint portion is a screw bearing, a spherical bearing or the like that is composed of a spherical convex portion and a spherical concave portion and is rotatably fitted to each other. When the expansion / contraction / bending member is constituted by the connecting shaft having three or more joint joints in this way, the joint shaft is connected to the support member by adjusting the bending amount of the joint shaft at each joint joint. The sample holder can be tilted, rotated, and moved up and down, and the sample held in the sample holder can be easily adjusted for tilt, rotation, and height.

Regarding the above-mentioned expansion / contraction / bending member,
A male screw portion is formed at one end thereof, and a supporting member and / or
Alternatively, the sample holder may be formed with a female screw portion that is screwed into the male screw portion, and the male screw portion may be screwed into the female screw portion to attach the expansion / contraction / bending member to the support member and / or the sample holder. . Expansion and contraction attached in this way
By rotating the folding member, it is possible to easily adjust the height of the expansion / contraction / bending member with respect to the support member and / or the sample holder. The operation becomes possible, and the fine adjustment of the height of the sample held in the sample holder can be easily performed.

The sample holder, the supporting member and the coupling means in the present invention may be made of different materials according to the type of equipment used and the contents of observation, and when used in an SEM or EPMA device, It is preferable to use a conductive material such as stainless steel, brass, aluminum, or carbon.

The support member, the sample holder and the coupling means constituting the sample holding device of the present invention may be used in the same relationship after they are assembled once, or depending on the type or the type of sample. A plurality of devices may be prepared according to the device, and these devices may be exchanged for use.

[0033]

BEST MODE FOR CARRYING OUT THE INVENTION Preferred embodiments of the present invention will be specifically described below with reference to the accompanying drawings.

FIG. 1 shows a sample holding device S according to an example of the present invention. This sample holding device S is
A hemispherical convex portion 1 having a spherical surface to which magnetic force is applied is formed, and a supporting member 2 whose base end side is fixed to various equipment main body sides and a hemispherical concave portion 3 are formed to form the above hemisphere. It comprises a sample holder 4 made of iron that attracts the magnetic force applied to the convex protrusion 1, and the hemispherical convex portion 1 and the hemispherical concave portion 3 are rotatably fitted to each other so that the spherical bearing 5 is formed. Is forming. Further, the sample holding device S is
A device body (not shown) is fastened and fixed by bolts 6, and a sample 7 is placed on the sample holder 4 and fixed by a conductive tape 8.

In the sample holder S according to this embodiment,
The sample holder 4 attracts the hemispherical convex portion 1 of the support member 2 by the applied magnetic force, and the hemispherical concave portion 3 is rotatably fitted to the hemispherical convex portion 1 to form a spherical bearing 5. is doing. Therefore, since the sample holder 4 can be moved steplessly to any position with respect to the hemispherical convex portion 1, the sample holder 4 can be tilted and rotated, and at the desired position. Thus, the posture can be held, and the tilt and rotation of the sample 7 held by the sample holder 4 can be easily finely adjusted.

FIG. 2 shows another example of a sample holding device S according to the present invention. This sample holder S
Has a protruding shaft 10 having a spherical recess 9 at the tip,
A support member 2 whose base end side is fixed to various equipment main body sides
And a sample holder 4 having a projecting shaft 12 having a spherical convex portion 11 at the tip thereof.
And the spherical convex portion 11 are rotatably fitted to each other to form a spherical bearing 13. The sample holding device S is fastened and fixed by bolts 6 to the device body side (not shown), and a sample 7 is placed on the sample holder 4 and fixed by a conductive tape 8.

In the sample holder S according to this embodiment,
Since the diameter of the convex portion of the spherical convex portion 11 is slightly larger than the inner diameter of the concave portion of the spherical concave portion 9, the spherical convex portion 11 fitted into the spherical concave portion 9 is preloaded. The sample holder 4 is capable of inclining and rotating the sample holder 4 by steplessly moving in a wide range to any position around the spherical bearing 13, and a spherical surface to which a preload is applied. The bearing 13 can hold the posture at a desired position. Therefore, the sample 7 held in the sample holder 4 can be easily finely adjusted with respect to its inclination and rotation.

FIGS. 3 and 4 show another example of the sample holding device S according to the present invention. In this sample holding device S, a male screw portion 14 is formed on one side, a spring 15 is attached to the other side, and a support shaft 17 to which a rotor 16 having the shape of a truncated cone is attached to the tip of the spring 15, The support member 2 fixed to the device body side and the sample holder 4 having the holding hole 19 in which the rotor 16 of the support shaft 17 is enclosed with a slight gap. Here, the support member 2 has a female screw with which the male screw portion 14 of the support shaft 17 is screwed in its thickness direction at three positions corresponding to the vertexes of the substantially equilateral triangle on the surface opposite to the device body side. A portion 18 is formed, and the male screw portion 14 is screwed into the female screw portion 18, and three support shafts 17 are erected on the support member 2. The sample holder 4 is composed of a sample holder forming plate 4a and a top plate 4b. The sample holder forming plate 4a has a lower opening 20 and an upper opening which have different opening sizes on the upper and lower surfaces thereof. 21 is formed. Then, the top plate 4b is attached to the surface having the upper surface opening 21 having a large opening size to form the sample holder 4 and the holding hole 19. Since the frustoconical rotor 16 is enclosed in the thus-formed holding hole 19, the rotor 16 does not fall off from the sample holder 4, and the support shaft 17 allows the sample holder 4 to move to three points. Supported by support. Further, the sample holding device S is
A device main body (not shown) is fastened and fixed by a bolt (not shown), and a sample 7 is placed on the sample holder 4 and fixed by a conductive tape 8.

In the sample holder S according to this embodiment,
When the support shaft 17 screwed into the female screw portion 18 of the support member 2 is rotated, the rotor 16 of the support shaft 17 can rotate within the holding hole 19 of the sample holder 4 formed to be slightly larger. The height of the support shaft 17 can be freely adjusted while the sample holder 4 is being supported. Here, the movement of the sample holder 4 accompanying the height adjustment of the support shaft 17 will be described with reference to FIG. In addition, FIG.
3 is a cross section orthogonal to the arrow A line passing through the two centers of the support shaft 17 shown in FIG. As shown in FIG. 4, for example, when one of the support shafts 17 supporting the sample holder 4 is rotated to lower its height in the direction shown by the arrow in the figure, the height is reduced. One end of the sample holder 4 is lowered by the elastic force of the spring 15 attached to the lowered support shaft 17, and the sample holder 4 before the height of the support shaft 17 is adjusted.
The sample holder 4 can be tilted compared to the position (indicated by a broken line in the figure). Similarly, according to another combination with the height adjustment of the support shaft 17, the sample holder 4 can be freely tilted and moved up and down, and the sample 7 held on the sample holder 4 can be tilted and raised. Fine adjustment of the height can be easily performed.

FIG. 5 shows another example of the sample holding device S according to the present invention. This sample holder S
Is composed of a support member 2 fixed to various equipment main body sides, a sample holder 4, and a flexible tube 22 connecting between the support member 2 and the sample holder 4. This sample holding device S is fastened and fixed to a device body side (not shown) by bolts 6, and a sample 7 is placed on the sample holder 4 and fixed by a conductive tape 8.

In the sample holder S according to this embodiment,
Since the flexible tube 22 can be expanded and contracted and bent, and the flexible tube 22 can be easily restored to its original shape even if it is stretched, contracted, or bent once, the flexible tube 22 The sample holder 4 connected to the support member 2 can be bent at an arbitrary position, the sample holder 4 can be tilted and vertically moved, and the posture thereof can be maintained at a desired position. Therefore, the sample 7 held in the sample holder 4 can easily be finely adjusted in its inclination and height.

FIG. 6 shows another example of the sample holding device S according to the present invention. This sample holder S
Is composed of a support member 2 fixed to various equipment main body sides, a sample holder 4, and a connecting shaft 23 that connects the support member 2 and the sample holder 4 together. Further, the joint shaft 2 (23a, 23b, 23c, 23d) is a joint joint part 2 constructed by screwing with connecting screws 24 at three locations.
It is divided by 5. In addition, this sample holding device S
Is fastened and fixed to the main body of the device (not shown) with bolts 6, and a sample 7 is placed on the sample holder 4 and fixed with a conductive tape 8.

In the sample holder S according to this embodiment,
By adjusting the bending amount in each joint coupling part 25 constituting the connecting shaft 23, the sample holder 4 connected to the connecting shaft 23 can be tilted in any direction, and the sample holder 4 can be moved up and down. It will be possible. for that reason,
The sample 7 held in the sample holder 4 can easily be finely adjusted with respect to its inclination and height.

FIG. 7 shows another example of the sample holding device S according to the present invention. This sample holder S
The supporting member 2 in FIG. 2 has a hollow portion 26 and a cylindrical body 2 in which an internal thread portion 27 is formed on the inner wall of the hollow portion 26.
8 and a male screw portion 29 which is formed in a circular cross section and is screwed to the female screw portion 27 on the outer peripheral wall thereof.
It is composed of a disk body 30 that is screwed onto the disc 6. Also,
Regarding the support member 2, the cylindrical body 28 has the bolt 6
The sample holder 4 is attached to the device body side (not shown) by the above, and the sample holder 4 is connected to the disk body 30 via the same spherical bearing 13 as the sample holding device S of the present invention shown in FIG. A sample 7 is placed on the sample holder 4 and fixed by a conductive tape 8.

In the sample holder S according to this embodiment,
Since the height of the disk body 30 screwed into the cylindrical body 28 can be adjusted, the sample holder 4 connected to the disk body 30 can move up and down. Become. Since the sample holders 4 associated with each other via the spherical bearings 13 can be tilted steplessly to any position as described above, the tilting operation and the rotating operation of the sample holder 4 are possible, and the disk is By the vertical movement of the body 30, the height of the sample holder 4 can be adjusted. Therefore, the sample 7 held in the sample holder 4
Can easily be finely adjusted for its inclination and height.

The sample holding device S of the present invention shown in FIG.
An example of use in the case where SEM observation is performed with an arbitrary tilt angle attached to the sample by using will be described with reference to FIGS. 8 and 9.

In the use example of FIG. 8, the support member 2 of the sample holding device S is placed on a predetermined position of the SEM sample base 31 and fixed by the bolts 6, and the sample 7 is placed on the sample holder 4 by a conductive tape. It is fixed by 8. First, the sample holder 4 is positioned so that the sample surface 7a is horizontal with respect to the objective lens 32 above the sample 7, and the S of the sample surface 7a is adjusted.
EM observation is performed. Next, with respect to the sample holder 4 connected to the support member 2 via the spherical bearing 5 composed of the hemispherical convex portion 1 and the hemispherical concave portion 3, the sample 7 necessary for the next observation while holding the sample 7 Move to the position where the tilt angle of is obtained. As a result, as shown in FIG.
The next SEM observation can be performed at a desired inclination angle of a. Further, even when the SEM observation is performed on the sample surface 7a at another position, the sample holder 4 is subjected to the same adjustment procedure as above.
The observation can be performed by changing the inclination angle and height of the sample, and the SEM observation can be efficiently performed at an arbitrary position without removing the sample 7 fixed with the conductive tape 8 and reattaching it. You can

[0048]

EFFECTS OF THE INVENTION According to the present invention, there is provided a sample holding device which is mounted on various equipments and which can hold a sample at a desired position by adjusting tilt, rotation and height. The sample is removed from the sample table each time, and the sample is continuously adjusted and held at the desired position without the trouble of re-holding the sample on the sample table so that the inclination and height will be required for the next observation. Another object of the present invention is to provide an inexpensive sample holding device that can be used and can be easily applied to existing equipment.

[Brief description of drawings]

FIG. 1 is a front explanatory view of a sample holding device according to the present invention.

FIG. 2 is a front explanatory view of a sample holding device according to the present invention.

FIG. 3 is a perspective view of a sample holding device according to the present invention.

4 is a IV-IV of the sample holding device in FIG.
FIG.

FIG. 5 is a front explanatory view of the sample holding device according to the present invention.

FIG. 6 is a front explanatory view of a sample holding device according to the present invention.

FIG. 7 is a front explanatory view of the sample holding device according to the present invention.

FIG. 8 is a front explanatory view of a use example in which the sample holding device according to the present invention is used.

9 is a front explanatory view of a usage example in which the sample holding device of FIG. 8 is used.

[Explanation of symbols]

S ... Sample holding device, 1 ... Hemispherical convex portion, 2 ... Support member, 3 ... Hemispherical concave portion, 4 ... Sample holder, 4a ... Sample holder forming plate, 4b ... ..Top plate, 5 ... Spherical bearing, 6 ... Bolt, 7 ... Sample, 7a ... Sample surface, 8 ... Conductive tape,
9 ... Spherical concave portion, 10 ... Projection shaft, 11 ... Spherical convex portion, 1
2 ... Projection shaft, 13 ... Spherical bearing, 14 ... Male screw part, 1
5 ... Spring, 16 ... Rotor, 17 ... Support shaft, 1
8 ... female screw portion, 19 ... wrapping hole, 20 ... lower surface opening portion,
21 ... Top opening, 22 ... Flexible tube, 2
3 (23a, 23b, 23c, 23d) ... connecting shaft, 24 ... connecting screw, 25 ... articulating part, 26 ... hollow part, 27 ... female screw part, 28 ... cylinder Body, 29 ... Male screw part, 30 ... Disk body, 31 ... SEM sample stand, 32 ... Objective lens.

Claims (14)

[Claims] 1. A support member attached to the instrument body side, a sample holder for holding a sample, and a tilting operation of the sample holder, which connects the support member and the sample holder to each other.
A sample holding device provided with a coupling means capable of performing at least one of a rotating operation and a vertical movement and maintaining its posture, and capable of returning the sample holder to the original posture. And the coupling means is
A spherical bearing comprising a spherical convex portion formed on one of the support member and the sample holder and a spherical concave portion formed on the other and rotatably fitted between the spherical convex portion. Sample holder. 2. The spherical bearing has a preload applied between the spherical convex portion and the spherical concave portion.
The sample holding device according to. 3. The sample holding device according to claim 1, wherein the spherical bearing is provided with a magnetic force attracting each other to one or both of the spherical convex portion and the spherical concave portion. 4. The spherical bearing is characterized in that the spherical convex portion and / or the spherical concave portion is provided at the tip of a protruding shaft provided on the support member and / or the sample holder.
The sample holding device according to any one of claims 1 to 3. 5. A male screw portion is formed at one end of the protruding shaft, a female screw portion that is screwed into the male screw portion is formed on the supporting member and / or the sample holder, and the male screw portion is formed on the female screw portion. The sample holding device according to claim 4, wherein the projecting shaft is attached to the supporting member and / or the sample holder by screwing parts together. 6. A support member attached to the instrument body side, a sample holder for holding a sample, and a connection between the support member and the sample holder for tilting operation of the sample holder,
A sample holding device provided with a coupling means capable of performing at least one of a rotating operation and a vertical movement and maintaining its posture, and capable of returning the sample holder to the original posture. And the coupling means is
A sample holding device comprising: a plurality of support shafts which are erected on the supporting member so that the height thereof can be adjusted and support the sample holder. 7. A male screw portion is formed on one of the support shafts, and a female screw portion that is screwed into the male screw portion is formed in the thickness direction of the support member. The female screw portion is formed with the male screw portion. 7. The sample holding device according to claim 6, wherein the support shaft is erected on the support member by screwing. 8. The sample holding device according to claim 6, wherein an elastic member is interposed between the support shaft and the sample holder. 9. The sample holding device according to claim 6, wherein the support member has three support shafts provided upright, and supports the sample holder by three-point support. 10. A support member attached to the instrument body side, a sample holder for holding a sample, and a tilting operation of the sample holder, which connects the support member and the sample holder.
A sample holding device provided with a coupling means capable of performing at least one of a rotating operation and a vertical movement and maintaining its posture, and capable of returning the sample holder to the original posture. And the coupling means is
A sample holding device, which is an expandable / bendable expandable / bendable member. 11. The sample holding device according to claim 10, wherein the expansion / contraction / bending member is a flexible tube. 12. The sample holding device according to claim 10, wherein the expandable / contractible member is composed of a connecting shaft having three or more joint joints. 13. The expansion / contraction / bending member is formed with a male screw portion at one end or both ends thereof, and the supporting member and / or the sample holder is formed with a female screw portion screwed into the male screw portion. 13. The sample holding device according to claim 10, wherein the expansion / contraction member is attached to the support member and / or the sample holder by screwing the male screw portion to the female screw portion. 14. A cylindrical body, wherein the support member has a hollow portion and an internal thread portion is formed on an inner wall of the hollow portion,
The cross-section is formed in a circular shape, and the outer peripheral wall thereof is formed with a male screw portion that is screwed into the female screw portion, and is constituted by a disc body screwed into the hollow portion of the cylindrical body, A sample holding device, wherein the disc body and the sample holder are connected by the coupling means according to any one of claims 1 to 13.