JP2003294799A - Environment testing device - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To propose an environment testing device allowing the temperature of a testing object to quickly reach a prescribed temperature by uniformly cooling or heating the testing object without nonuniformity of a temperature and capable of stabilizing the testing object in that state. <P>SOLUTION: This environment testing device 1 cools or heats the testing object 3 placed on a work placing surface 4a controlled in the prescribed temperature by a work placing surface temperature control mechanism 5, and transfers the testing object to a prescribed testing temperature. Since compressed air controlled in a prescribed temperature state is supplied in a testing space 2 from a nozzle 63 by using this work placing surface temperature control mechanism 5, an ambient temperature in the testing space becomes a uniform temperature state without nonuniformity. Thus, since the temperature of the testing object 3 can be allowed quickly to reach a prescribed testing temperature and can be uniformly cooled or heated as a whole, the whole can be held in a prescribed testing temperature state without nonuniformity of the temperature. Since temperature-controlled air is formed by using the work placing surface temperature control mechanism 5, the device can be miniaturized, and the manufacturing cost can be reduced. <P>COPYRIGHT: (C)2004,JPO

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an environmental test apparatus used for conducting an environmental test such as energization on electric and electronic parts such as semiconductor elements under various temperature environments.

[0002]

2. Description of the Related Art As an environmental test apparatus used to perform various environmental tests in a state in which a DUT is kept at a desired temperature, an environmental test is carried out by putting the DUT in an independent thermostatic chamber, 2. Description of the Related Art A so-called line-type environmental test device is known in which a product under test is carried along a carrying line passing through a plurality of test tanks to perform various environmental tests in each test tank. In these environmental testing devices, an air temperature control system is known as a temperature control mechanism for making a device under test reach a predetermined test temperature.

The air temperature control system circulates temperature-controlled air in the test tank to heat or cool the DUT placed in the test tank to a predetermined test temperature and maintain the temperature. It is a method. For example, Japanese Patent Publication No. 8-141
No. 9 discloses such an air temperature control type line type environmental test device, and Japanese Patent Laid-Open No. 7-209373 discloses supplying dry air to cool an IC to be tested to a predetermined test temperature. A cooling test device is disclosed.

However, in the case of the air temperature control system,
Since the heat capacity of air, which is the heat medium, is small, the transition time required to cool or heat the DUT to the specified test temperature becomes long, and the test time of the DUT becomes long as a whole, resulting in poor efficiency. There is. In particular, such a problem becomes remarkable when the test of the DUT having a large heat capacity is performed.

Therefore, when carrying out an environmental test on a device under test having a large heat capacity, an environmental test device using a plate temperature control system may be used. In the plate temperature control method, the plate for placing the work placed in the test tank is directly cooled or heated by a cooling mechanism or a heating mechanism to maintain a predetermined temperature state, and the plate is placed there. In this method, the DUT is directly cooled or heated to maintain a predetermined test temperature.
For example, Japanese Patent Publication No. 6-27698 and Japanese Patent Laid-Open No. 11-2
Japanese Patent No. 84037 discloses a plate temperature control type environmental test device. Further, JP-A-61-68568 discloses a plate temperature control system using a Peltier element.

In the plate temperature control type environmental test device, the test object is directly cooled or heated by the cooling or heating plate on which the test object is placed. Therefore, the test object is cooled or heated as compared with the air temperature control method. Thus, the time required to bring the test temperature to the predetermined test temperature state can be shortened.

[0007]

However, in the case of the plate temperature control method, since the atmosphere temperature in the test tank, that is, the test space is not controlled, the portion of the DUT that is not in contact with the plate is not controlled. In particular, there is a case where the part far from the plate cannot be sufficiently cooled or heated due to the influence of the air having a temperature different from the predetermined temperature. Further, depending on the case, there is a problem that such a portion is stabilized in a temperature state different from the plate temperature.

In particular, in the case of a DUT having a large heat capacity and a poor heat conductivity or a material having a different heat conductivity, or a DUT having a large heat capacity and having a protruding portion separated from the plate. In the case of, such a harmful effect is likely to occur. For this reason, there is a problem that there is a limitation on the DUT that can perform the environmental test by the plate temperature control method.

An object of the present invention is to rapidly move an article under test to a predetermined temperature state in a test space,
Another object of the present invention is to propose an environmental test device capable of obtaining a predetermined temperature state of the entire DUT without uneven temperature.

[0010]

In order to solve the above problems, the present invention provides an environment test apparatus used for performing an environment test on a product under test in a predetermined temperature state, in which the product under test is inserted. The test space, the work placing table arranged in the test space for placing the DUT, and the work placing surface of the work placing table are cooled and / or cooled so that the work placing surface of the work placing table has a predetermined temperature. Alternatively, it is characterized by having a work placement surface temperature control mechanism for heating and a temperature controlled air supply mechanism for supplying the air cooled or heated by the work placement surface temperature control mechanism into the test space. There is.

In the environment testing apparatus of the present invention, the workpiece placed on the work placement surface in the test space is held at a predetermined temperature state by the work placement surface temperature control mechanism. Therefore, the workpiece mounting surface directly cools or heats and shifts to a predetermined test temperature state. Further, since the air controlled to the predetermined temperature by the work mounting surface temperature control mechanism is supplied into the test space, the atmosphere temperature in the test space is also cooled or heated so as to reach the predetermined temperature state.

As described above, the product under test is cooled or heated by the work mounting surface temperature control mechanism and also cooled or heated by the air in the test space controlled to a predetermined temperature state. Therefore, the DUT can be quickly brought to a predetermined test temperature state. Further, since the part not in contact with the work mounting surface is cooled or heated by the temperature-controlled air, unlike the case of the plate temperature control method, the entire DUT is uniformly cooled or heated, It is possible to uniformly bring the entire DUT to a predetermined test temperature state without causing temperature unevenness in the test article.

Here, the temperature-controlled air supply mechanism is an air supply pipe for exchanging heat with the workpiece mounting surface temperature control mechanism, and a temperature-controlled air jet attached to the tip of the air supply pipe. It can be configured to include a nozzle. When air is supplied to the air supply pipe from a supply source such as compressed air, the air is cooled or heated by the workpiece mounting surface temperature control mechanism to a predetermined temperature state while flowing through the air supply pipe, and the air enters the test space. Supplied.

In this case, if the ejection holes for ejecting the air are formed in the test space in the air supply pipe, the air in the test space is agitated by the ejected air, and the air in the test space is agitated. This is preferable because the ambient temperature can be made uniform.

Next, in the environmental test apparatus of the present invention, instead of the above temperature-controlled air supply mechanism, an air stirring mechanism for stirring the air in the test space and / or an air for circulating the air in the test space. It is also possible to adopt a configuration provided with a circulation mechanism.

According to this structure, the air around the work mounting surface, which is indirectly cooled or heated by the work mounting surface temperature control mechanism, is agitated or circulated in the test space. A uniform temperature condition can be achieved. As a result, it is possible to cool or heat the DUT as a whole without causing temperature unevenness to reach a predetermined test temperature state, and it is possible to maintain the predetermined test temperature state.

[0017]

BEST MODE FOR CARRYING OUT THE INVENTION An example of an environment test apparatus to which the present invention is applied will be described below with reference to the drawings.

(Embodiment 1) FIG. 1 is a schematic configuration diagram of an environment test apparatus according to Embodiment 1 to which the present invention is applied. The environment test apparatus 1 of this example includes a test space 2 formed of a panel,
It has a work mounting table 4 for mounting the DUT 3 installed in the test space 2. In addition, a workpiece circulating surface temperature control including a coolant circulation system for cooling or heating the workpiece mounting surface 4a of the workpiece mounting table 4 to a predetermined temperature, an electronic refrigeration system, or a cooling and heating element such as a Peltier element. It has a mechanism 5. Further, the temperature control air supply mechanism 6 is provided for supplying the air cooled or heated by the workpiece mounting surface temperature control mechanism 5 to a predetermined temperature state into the test space 2. The DUT 3 of the present example is placed on the carrier 7 for transporting the DUT 3 and placed on the work placement surface 4a to be subjected to the environmental test.

The work mounting table 4 is provided with a plate 41 of a certain thickness which is horizontally installed on the bottom surface of the test space 2, and the flat upper surface is the work mounting surface 4a. The plate 41 is formed with a through hole 42 penetrating in the horizontal direction.

The temperature-controlled air supply mechanism 6 supplies a compressed air source 61 installed outside the test space 2 and an air supply for supplying the compressed air supplied from the compressed air source 61 into the test space 2. A pipe 62 and a temperature control air injection nozzle 63 attached to the tip of the air supply pipe 62 are provided. The air supply pipe 62 is drawn from the compressed air source 61 through the side wall 21 forming the test space 2, penetrates the through hole 42 formed in the plate 41 in a close contact state, and the other side of the through hole 42. Has been pulled out from the opening. Further, the air supply pipe 62 penetrates the other side wall 22 forming the test space 2 and is once drawn to the outside, then penetrates the side wall 22 again and is drawn into the upper portion in the test space 2. , The nozzle 63 at the tip of this part
Is attached.

In the air supply pipe 62 of this example, the portion penetrating the plate through hole 42 is a heat exchange portion 62a for exchanging heat with the plate 41. That is,
The air flowing through the heat exchange portion 62a which is cooled or heated by the plate 41 which is kept at the predetermined temperature state by the work placement surface temperature control mechanism 5 is cooled or heated so as to reach the predetermined temperature state. In addition,
In the present example, the air supply pipe 62 is passed through the plate through hole 42, but it is of course possible to connect the air supply pipes to the openings at both ends of the through hole 42 so that the air flows through the through hole 42. Is.

Here, in the heat exchange portion 62a of this example, a large number of air ejection holes 62b for ejecting air upward are formed along the longitudinal direction thereof. An air blowing hole 43 extending vertically is formed in a portion of the plate through hole 42 corresponding to each air ejection hole 62b.

The environment test apparatus 1 of this example configured as described above
In step 1, the work placement surface temperature control mechanism 5 is driven to bring the work placement surface 4a of the work placement table 4 into a predetermined temperature state. Further, the temperature-controlled air supply mechanism 6 is driven to supply compressed air, and the compressed air whose temperature is controlled by the workpiece mounting surface temperature control mechanism 5 is ejected from the nozzle 63 into the test space 2. As a result, the ambient temperature in the work placement surface 4a and the test space is brought to the predetermined temperature state as a whole.

Next, the device under test 3 is put in the test space 2 and
The work placing table 4 is placed on the work placing surface 4a. The DUT 3 is directly cooled or heated by heat transfer from the work mounting surface 4a. At the same time, it is exposed to the temperature-controlled compressed air ejected from the nozzle 63 to be cooled or heated. That is, the DUT 3 exchanges heat with the work mounting surface 4a and the compressed air and shifts to a predetermined test temperature state. Therefore, as compared with the case of using the plate temperature control method, the transition time until the DUT 3 reaches a predetermined test temperature can be shortened.

Further, since the portion of the DUT 3 which is not in contact with the work mounting surface 4a is located in the atmosphere kept at a predetermined temperature by the temperature-controlled compressed air,
Unlike the conventional plate temperature control method, the DUT 3
Is uniformly cooled or heated. Therefore, the temperature unevenness does not occur in the DUT 3, and the entire DUT 3 can be uniformly brought to a predetermined test temperature state.

In particular, in this example, a large number of compressed air blowing holes 43 are formed in the work mounting surface 4a, and the compressed air is blown out from these, so that the air in the test space 2 can be efficiently agitated. Also, heat exchange with the DUT 3 is efficiently performed.

Further, in this example, since the temperature of the workpiece mounting surface temperature control mechanism 5 is controlled to form the temperature-controlled air, a dedicated temperature control mechanism is not required.
Therefore, there is an advantage that the device configuration can be downsized and an increase in manufacturing cost can be suppressed.

(Embodiment 2) FIG. 2 is a schematic configuration diagram of an environment test apparatus according to Embodiment 2 of the present invention. The basic configuration of the environmental test apparatus 10 shown in this figure is the above-mentioned environmental test apparatus 1
And has a test space 12 formed by a panel, and a work mounting table 14 for mounting the DUT 13 installed in the test space 12. In addition, a workpiece circulating surface temperature control mechanism including a refrigerant circulation system for cooling or heating the workpiece mounting surface 14a of the workpiece mounting table 14 to a predetermined temperature, an electronic refrigeration system, or a heating element such as a Peltier element. Have 15. The work mounting table 14 is provided with a plate 141 of a certain thickness that is horizontally installed on the bottom surface of the test space 12, and the flat upper surface is the work mounting surface 14a. The DUT 13 of this example also
An environment test is carried out by mounting the work 17 on the carrier 17 for carrying the work on the work mounting surface 14a.

However, the environment test apparatus 10 of this example
Does not include the temperature-controlled air supply mechanism 6 as in the above example. Instead, inside the test space 12, at the upper end position of one side wall 22 thereof, there is provided a blower fan 16 for air diffusion which is arranged so as to blow out air in the horizontal direction as shown by the arrow in the figure. .

The environment test apparatus 1 of this example configured as described above
0 adopts a plate temperature control method in which the plate 14 whose temperature is controlled by the temperature control mechanism 15 causes the DUT 13 to reach a predetermined temperature, and further, the air in the test space 12 is agitated by the blower fan 16. As a result, the temperature unevenness in the test space 12 is reduced, and the DUT 13 reaches the predetermined test temperature and is kept in that temperature state.

That is, the side of the carrier 17 placed on the work placement surface 14a of the plate 141 becomes a predetermined temperature due to heat exchange with the plate 141. At the same time, the DUT 13 placed on the carrier 17 is cooled or heated by the plate 141 via the carrier 17 and reaches a predetermined test temperature by heat exchange with the air in the test space 12. . Since the air in the test space 12 is agitated by the blower fan 16, the air in the test space 12 is maintained at a predetermined temperature without temperature unevenness. Therefore, the DUT 13 as a whole is kept in a predetermined test temperature state.

In this example, the blower fan 16 is arranged at the upper position of the side wall in the test space 12, but it is arranged, for example, on the ceiling surface to circulate the air in the test space 12 vertically. May be. Alternatively, the blower fan 16 is arranged in the lower portion of the side wall of the test space 12, and the plate 14
The air may be circulated in the horizontal direction along the outer peripheral surface of 1.

[0033]

As described above, in the environment testing apparatus of the present invention, the work surface is controlled to a predetermined temperature by a temperature control mechanism such as a refrigerant circulation system or an electronic refrigeration system, and the temperature control mechanism is used. Then, the temperature-controlled air is supplied into the test space to shift the ambient temperature in the test space to a predetermined temperature state.

Therefore, the object to be tested placed on the work placement surface is cooled or heated directly by the work placement surface, and at the same time, cooled or heated by the temperature-controlled air. Therefore, it is possible to shorten the time required to bring the DUT to the predetermined temperature state. Further, the entire DUT can be cooled or heated uniformly without temperature unevenness to reach a predetermined test temperature state. As a result,
It is possible to reduce the size of the environmental test device and shorten the test time.

In particular, in the present invention, since the temperature of the temperature is controlled by using the temperature control mechanism for the work placement surface, the size of the apparatus can be reduced unlike the case where a dedicated temperature control mechanism is separately arranged. The manufacturing cost can be reduced at the same time.

Next, in the environment test apparatus of the present invention, the work surface is controlled to a predetermined temperature by a temperature control mechanism such as a refrigerant circulation system or an electronic refrigeration system, and the air in the test space is stirred or circulated. I have to. By agitating or circulating the air in the test space, the air in the test space will be in the same temperature state as the work placement surface that is controlled to the predetermined temperature in the test space, and there will be no temperature unevenness. become.

Therefore, since the DUT is cooled or heated so that it is brought to the predetermined temperature state even by the air in the test space, it is uniformly cooled or heated as a whole without temperature unevenness and reaches the predetermined test temperature state. can do.

[Brief description of drawings]

FIG. 1 is a schematic configuration diagram of an environment test apparatus according to a first embodiment of the present invention.

FIG. 2 is a schematic configuration diagram of an environment test apparatus according to a second embodiment of the present invention.

[Explanation of symbols]

1, 10 Environmental test equipment 2, 12 test space 3, 13 DUT 4, 14 Work stand 4a, 14a Work placement surface 41, 141 plates 43 through hole 43 Air outlet 5, 15 Work surface temperature control mechanism 6 Temperature control air supply mechanism 61 Compressed air source 62 Air supply pipe 62a heat exchange section 62b Air ejection hole 63 nozzles 7, 17 career 16 Blower fan (air stirring mechanism)

   ─────────────────────────────────────────────────── ─── Continued front page    (72) Inventor Akira Shimizu             Orion 246 Kodaka, Suzaka City, Nagano Prefecture             Machinery Co., Ltd. F-term (reference) 2G036 CA12                 2G050 AA07 BA05 BA10 CA02 DA01                       EA01 EA05 EC01                 4M106 AA01 CA60 CA62 DH44 DH45                       DH46 DH47

Claims (4)

[Claims] 1. An environmental test apparatus for performing an environmental test on a product under test in a predetermined temperature state, a test space for containing the product under test, and a workpiece arranged in the test space for mounting the product under test. A mounting table, a workpiece mounting surface temperature control mechanism that cools and / or heats the workpiece mounting surface so that the workpiece mounting surface of the workpiece mounting table has a predetermined temperature, and the workpiece mounting surface temperature control mechanism. An environment test apparatus, comprising: a temperature-controlled air supply mechanism that supplies air cooled or heated by the test space. 2. The temperature-controlled air supply mechanism according to claim 1, wherein the temperature-controlled air supply mechanism is an air supply pipe for exchanging heat with the work placement surface temperature control mechanism, and a temperature attached to a tip of the air supply pipe. An environmental test device comprising a nozzle for ejecting air-conditioned air. 3. The environmental test apparatus according to claim 2, wherein the air supply pipe is formed with a blowout hole for blowing air into the test space. 4. An environmental test apparatus for performing an environmental test on a device under test kept at a predetermined temperature condition, a test space for storing the device under test, and a test space for mounting the device under test in the test space. And a work placement surface temperature control mechanism for cooling and / or heating the work placement surface so that the work placement surface of the work placement table has a predetermined temperature. Air stirring mechanism for stirring air and / or
Alternatively, an environmental test device having an air circulation mechanism for circulating the air in the test space.