JP2003294798A - Environment testing device - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To propose an environment testing device allowing the temperature of a testing object to quickly reach a prescribed temperature by uniformly cooling or heating the testing object without nonuniformity of a temperature and capable of stabilizing even the testing object having a large heat capacity in that state. <P>SOLUTION: This environment testing device 1 cools or heats the testing object 5 placed on a work placing surface 6a in a testing tank 3 by circulating temperature-controlled air formed by a tank inside temperature control mechanism 4 in the testing tank 3, and at the same time, directly cools or heats the testing object 5 by heat transfer from the work placing surface 6a controlled in a prescribed temperature by a work placing surface temperature control mechanism 7. Thus, even the temperature of the testing object 5 having a large heat capacity quickly reaches a prescribed testing temperature, and transfers to a prescribed testing temperature state without nonuniformity of the temperature because of being uniformly cooled or heated as a whole. <P>COPYRIGHT: (C)2004,JPO

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an environmental test apparatus used for conducting an environmental test such as energization on electric and electronic parts such as semiconductor elements under various temperature environments.

[0002]

2. Description of the Related Art As an environmental test apparatus used to perform various environmental tests in a state in which a DUT is kept at a desired temperature, an environmental test is carried out by putting the DUT in an independent thermostatic chamber, 2. Description of the Related Art A so-called line-type environmental test device is known in which a product under test is carried along a carrying line passing through a plurality of test tanks to perform various environmental tests in each test tank. In these environmental testing devices, in order to reach the predetermined test temperature of the DUT, an air temperature control system,
Alternatively, a plate temperature control method is generally adopted.

In the air temperature control method, temperature-controlled air is circulated in the test tank to heat or cool the DUT placed in the test tank to a predetermined test temperature and maintain that temperature state. It is a method. For example, Japanese Patent Publication No. 8-141
No. 9 discloses such an air temperature control type line type environmental test device, and Japanese Patent Laid-Open No. 7-209373 discloses supplying dry air to cool an IC to be tested to a predetermined test temperature. A cooling test device is disclosed.

In the latter plate temperature control method, a plate for placing a work placed in a test tank is directly cooled or heated by a cooling mechanism or a heating mechanism to maintain a predetermined temperature state, and this plate is used. In this method, the DUT placed on the test piece is cooled or heated to maintain a predetermined test temperature state. For example, Japanese Patent Publication 6-27
698 and Japanese Patent Laid-Open No. 11-284037 disclose a plate temperature control type environmental test device.

[0005]

However, in the air temperature control type environmental test apparatus, since the heat capacity of air, which is a medium for heating and cooling the DUT, is small, the DUT is heated to a predetermined test temperature. It takes time to reach it. Therefore, there is a problem that the environmental test takes a long time.

Particularly, in the case of a DUT having a large heat capacity, it takes a long time to bring the DUT to a predetermined test temperature state. In addition, there is a high possibility that the side of the work mounting table on which the DUT having a large heat capacity is placed is cooled or heated by heat exchange with the DUT and transitions to a temperature state deviating from the predetermined temperature. In this state, it becomes difficult to maintain the DUT at a predetermined test temperature state.

On the other hand, in the plate temperature control type environmental test device, the test object is directly cooled or heated by the cooling or heating plate on which the test object is placed.
Compared with the air temperature control method, the time required to cool or heat the DUT to a predetermined test temperature state is shorter.

However, there are cases in which the portion of the DUT that is not in contact with the plate, especially the portion that is distant from the plate, cannot be sufficiently cooled or heated, and in some cases, such a portion has a temperature condition different from the plate temperature. There is a problem that it becomes stable.

In particular, in the case of a DUT having a large heat capacity and a poor heat conductivity or a material having a different heat conductivity, or a DUT having a large heat capacity and having a protruding portion separated from the plate. In the case of, such a harmful effect is likely to occur. For this reason, there is a problem that there is a limitation on the DUT that can perform the environmental test by the plate temperature control method.

An object of the present invention is to enable a test product having a large heat capacity to be quickly brought to a predetermined temperature state in a test tank, and to test the whole test product with a predetermined temperature without unevenness. It is to propose an environmental test device capable of obtaining a temperature state.

[0011]

In order to solve the above problems, the present invention provides an environment test apparatus used for performing an environment test on a product under test in a predetermined temperature state, in which the product under test is inserted. A test tank, a work placement table arranged in the test tank for mounting the test object, and an internal temperature of the test tank to a predetermined temperature by circulating temperature-controlled air inside the test tank. And a work placement surface temperature control mechanism for cooling and / or heating the work placement surface so that the work placement surface of the work placement table has a predetermined temperature. It is characterized by having.

In the environment testing apparatus of the present invention, the test object placed on the work table in the test tank is cooled or heated by the tank temperature control mechanism based on the air temperature control method and is transferred to a predetermined test temperature state. To do. At the same time, since the workpiece mounting surface is kept at a predetermined temperature state by the workpiece mounting surface temperature control mechanism, the DUT placed on the workpiece mounting surface is directly cooled or heated by the workpiece mounting surface. And shift to a predetermined test temperature state.

As described above, the product under test is cooled or heated by both the in-tank temperature control mechanism and the work placement surface temperature control mechanism. Therefore, even if the test product has a large heat capacity, it is subjected to a predetermined test. The transition time to reach the temperature can be shortened.

The product under test is cooled or heated by heat conduction from the work mounting surface, and the portion not in contact with the work mounting table is cooled or heated by air whose temperature is controlled. Therefore, unlike the case of the plate temperature control method, the entire DUT is uniformly cooled or heated, so that the unevenness of temperature does not occur in the DUT, and the entire DUT is made uniform. A predetermined test temperature can be obtained.

Here, it is preferable that the in-vessel temperature control mechanism be configured to directly supply temperature-controlled air to the work mounting surface. By supplying the temperature-controlled air directly to the DUT, it is possible to accelerate the cooling or heating of the DUT by air, so that the portion of the DUT that is not in contact with the workpiece mounting surface can be quickly specified. The test temperature can be reached. This is particularly effective when the DUT is made of a material having a large heat capacity and a poor thermal conductivity.

Next, the work placement surface temperature control mechanism is
A mechanism for cooling and / or heating the work mounting surface by an electronic refrigeration system or a refrigerant circulation system can be used.

[0017]

BEST MODE FOR CARRYING OUT THE INVENTION An example of an environment test apparatus to which the present invention is applied will be described below with reference to the drawings.

FIG. 1 is a schematic configuration diagram of an environment test apparatus to which the present invention is applied. The environmental test apparatus 1 of this example includes a heat insulating box 2 formed of a heat insulating panel, a test tank 3 partitioned inside the heat insulating box 2, and an empty space for controlling the temperature inside the test tank 3. It has an in-tank temperature control mechanism 4 of an air temperature control system, and a work placing table 6 for placing an article under test 5 installed in the test tank 3. Further, it has a work placement surface temperature control mechanism 7 of a refrigerant circulation system for cooling or heating the work placement surface 6a of the work placement table 6 to a predetermined temperature.

The inside of the heat insulating box 2 is divided into two compartments by a partition plate 30, one compartment being a test tank 3 and the other compartment being a cooler constituting a tank temperature control mechanism 4. 41, heater 42 and fan 43 for air agitation
Are arranged. The partition plate 30 includes a side plate portion 31 that extends vertically and a ceiling plate portion 32 that horizontally bends and extends from the upper end of the side plate portion 31, and the partition plate 30 is provided between the side plate portion 31 and the inner surface 21 of the heat insulating box 2. A cooler 41 and a heater 42 are disposed in the air conditioner, and a fan 43 for agitating air is disposed downward between the ceiling plate portion 32 and the top plate surface 22 of the heat insulating box 2. The air outlet 32a of the fan 43
Is located directly above the work mounting table 6, and an air circulation port 31a is opened at the lower end portion of the side plate portion 31 arranged on the side of the work mounting table 6.

Accordingly, the air outlet 32 of the fan 43
The air blown from the a into the test tank 3 is blown onto the work mounting table 6 as shown by an arrow in the figure, and thereafter, through the air circulation port 31a located on the lower side of the side. The air is sucked toward the air suction port of the cooler 41, and after passing through the cooler 41, is discharged from the air discharge port through the heater 42, is sucked by the fan 43, and is blown into the test tank 3 again. It The air is circulated through the air circulation path, and is controlled to have a predetermined temperature state while passing through the cooler 41 and the heater 42 of the in-tank temperature control mechanism 4.

Next, the work placing table 6 includes a plate 61 made of aluminum or the like having a work placing surface 6a having a flat upper surface, and a pair of support legs 62 horizontally supporting the plate 61. I have it. The work placement surface temperature control mechanism 7 for cooling or heating the work placement surface 6a to a predetermined temperature is a refrigerant circulation pipe that penetrates through the plate 61 and is bent in a multiple-folded state. The heat exchanging unit 71 composed of 63 and the refrigerant supply / recovery unit 72 arranged outside the heat insulating box 2 are provided. The refrigerant supply / recovery section 72 supplies the refrigerant whose temperature is controlled to a predetermined temperature to the heat exchange section 71 via the refrigerant circulation pipe 63, and the heat exchange section 7
In general, the refrigerant after heat exchange in 1 is recovered and adjusted to a predetermined temperature.

The environmental test apparatus 1 of this example configured as described above
In 1, the internal temperature of the test tank 3 is brought to a predetermined temperature state by driving the in-tank temperature control mechanism 4 to circulate air having a predetermined temperature through the test tank 3. At the same time, the work placement surface temperature adjusting mechanism 7 is driven to bring the work placement surface 6a of the work placement table 6 into a predetermined temperature state.

Next, the DUT 5 is put in the test tank 3 and placed on the work placing surface 6a of the work placing table 6. DUT 5
Is cooled or heated by the air circulating in the test tank 3, and is also cooled or heated by heat transfer from the work mounting surface 6a. That is, the DUT 5 exchanges heat with the air and the work mounting surface 6a to shift to a predetermined test temperature state. Therefore, compared with the case where only the air temperature adjusting method is used, the transition time until the DUT 5 reaches the predetermined test temperature can be shortened. In particular, even if the heat capacity of the DUT 5 is large, a predetermined test temperature state is quickly reached by direct cooling or direct heating by the workpiece mounting surface temperature control mechanism 7.

Further, in the DUT 5, a portion in contact with the work mounting surface 6a is directly cooled or heated by heat conduction from here, and a portion not in contact with the work mounting table 6 is temperature-controlled air. Cooled or heated by. Therefore, unlike the case of the plate temperature control method, the entire DUT 5 is uniformly cooled or heated, so that there is no temperature unevenness in the DUT 5, and
Can be brought to a state of a predetermined test temperature uniformly.

Further, in this example, the air blown out from the fan 43 is supplied by directly blowing on the work mounting surface 6a. That is, it is directly sprayed on the DUT 5 placed here. Alternatively, it is supplied by circulating air. Therefore, the cooling or heating of the DUT 5 with air can be promoted, so that the portion of the DUT 5 which is not in contact with the work mounting surface 6a can be quickly brought to the predetermined test temperature. Therefore, even if the DUT 5 has a large heat capacity or is made of a material having a poor thermal conductivity, the entire DUT 5 can be uniformly specified without causing temperature unevenness. The test temperature can be reached, and the temperature state can be stably maintained.

As described above, in the environment test apparatus 1 of this example,
Even if the DUT 5 put in the test tank 3 has a large heat capacity, it can reach a predetermined test temperature state in a short time, and the whole test can be uniformly performed in a predetermined test without temperature unevenness. Can be brought to a temperature condition.

(Other Embodiments) It goes without saying that the plate 61 of the work mounting table 6 may be made of a material other than aluminum as long as it has a high thermal conductivity.
Further, the work placement surface temperature control mechanism 7 for controlling the work placement surface 6a to a predetermined temperature may be not only the above-mentioned refrigerant circulation type but also other types such as an electronic refrigeration type. Good.

[0028]

As described above, in the environmental test apparatus of the present invention, the temperature of the temperature-controlled air is circulated in the test chamber to cool or heat the DUT placed on the work mounting table so as to obtain a predetermined temperature. In addition to the test temperature state, the workpiece mounting surface is also controlled to a predetermined temperature by a temperature control mechanism such as a refrigerant circulation system or an electronic refrigeration system.

Therefore, the DUT placed on the work mounting surface is cooled or heated by the temperature-controlled air, and at the same time, directly cooled or heated by the work mounting surface. Therefore, even for a DUT having a large heat capacity, the time required to reach the predetermined test temperature state can be shortened. Further, the entire DUT can be cooled or heated uniformly without temperature unevenness to reach a predetermined test temperature state. Therefore, it is possible to reduce the size of the environmental test device and shorten the test time.

Further, according to the present invention, the temperature-controlled air is blown directly to the DUT placed on the work mounting surface, so that the heat exchange efficiency between the air and the DUT is enhanced. Therefore, even a device under test having a large heat capacity can be quickly and uniformly reached a predetermined test temperature state.

[Brief description of drawings]

FIG. 1 is a schematic configuration diagram showing an example of an environment test apparatus to which the present invention is applied.

[Explanation of symbols]

1 Environmental test equipment 2 insulation box 3 test tanks 31a Air circulation port 32a Air outlet 4 Tank temperature control mechanism 41 Cooler 42 heater 43 Fan for stirring air 5 DUT 6 Work stand 6a Work surface 61 plate 62 support legs 63 Refrigerant circulation pipe 7 Work placement surface temperature control mechanism 71 heat exchange section 72 Refrigerant supply / recovery section

   ─────────────────────────────────────────────────── ─── Continued front page    (72) Inventor Akira Shimizu             Orion 246 Kodaka, Suzaka City, Nagano Prefecture             Machinery Co., Ltd. F-term (reference) 2G036 AA28 CA12                 2G050 AA07 CA02 CA06 CA10 DA01                       EA01 EC05                 4M106 AA01 AA02 DH02 DH44 DH45                       DH46 DH47

Claims (3)

[Claims] 1. An environmental test apparatus for performing an environmental test on a product under test in a predetermined temperature state, and a test tank in which the product under test is placed, and a workpiece arranged in the test tank for mounting the product under test. A mounting table, an in-vessel temperature control mechanism for controlling the internal temperature of the test tank to a predetermined temperature by circulating temperature-controlled air inside the test tank, and a work mounting table on the work mounting table. An environment test apparatus, comprising: a work placement surface temperature control mechanism for cooling and / or heating the work placement surface so that the surface reaches a predetermined temperature. 2. The environmental test apparatus according to claim 1, wherein the tank temperature control mechanism supplies temperature-controlled air to the work placement surface. 3. The work mounting surface temperature control mechanism according to claim 1 or 2, wherein the work mounting surface is cooled and / or cooled by an electronic refrigeration system or a refrigerant circulation system.
Alternatively, an environmental test device having a heating mechanism.