JP2003286460A - Double-adhesive tape - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a double-adhesive tape capable of easy adjustment of adhering site giving sufficient tackiness for use and suitable for fixing an abrasive cloth to an abraser. <P>SOLUTION: The double-adhesive tape (5) comprises adhesive layers (2, 3) on both sides of a base (1) for adhesion of the abrasive cloth (6) to the abraser having a masking part (4) with partially non-adhesive or slightly adhesive on one surface of the adhesive layer (preferably covering 13-70% of the adhesive layer surface). <P>COPYRIGHT: (C)2004,JPO

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a double-sided pressure-sensitive adhesive tape, and more specifically, it is suitable for use in fixing a polishing cloth to a polishing device for polishing an object to be polished such as a lens, glass, aluminum disk, and silicon wafer. Related double-sided adhesive tape.

[0002]

2. Description of the Related Art Conventionally, synthetic leather called a polishing cloth made of urethane has been widely used for polishing silicon wafers and glass. As the polishing method in that case, usually, a polishing cloth is fixed to a disk called a surface plate of a polishing machine by using a double-sided adhesive tape, and a slurry in which an abrasive such as abrasive grains is mixed with an aqueous solution adjusted to be alkaline or acidic. A method of polishing an object to be polished in an aqueous solution called a liquid by rotational movement or reciprocating movement is adopted. The double-sided pressure-sensitive adhesive tape used in this case is usually a pressure-sensitive adhesive film coated on both sides of a strong film such as PET (polyethylene terephthalate) in consideration of removability.

The above-mentioned polishing cloth is usually attached to one surface of a double-sided adhesive tape by a laminator or the like, and then processed into a shape suitable for a polishing device such as a circle or a quadrangle by using a method such as punching with a Thomson blade. , Brought to the polishing process. The above-mentioned processing is generally performed before the step of actually polishing.

As an example of the adhesive tape used for fixing to the surface plate as described above, for example, Japanese Patent Laid-Open No. 2000-2000
No. 309760 discloses a double-sided pressure-sensitive adhesive tape using an acrylic pressure-sensitive adhesive having a gel fraction of 70 to 90%, a liquid rubber component having a specific amount of functional groups, a tackifying resin, and a natural rubber. A double-sided pressure-sensitive adhesive tape using a rubber-based pressure-sensitive adhesive composed of a crosslinking agent is disclosed.

However, in recent years, there has been a tendency to increase the number of objects to be polished at one time for the purpose of improving the productivity, and accordingly, the polishing apparatus is increased in size and the polishing cloth used is also increased in size. In some cases, a circular polishing cloth having a radius of about 1.5 m may be used.

In the above, the work of attaching the polishing cloth to the surface plate of the polishing apparatus is usually performed manually, but the operation of attaching the polishing cloth to the surface plate at an accurate position is a highly skilled operation. Even people have difficulties. The reason for this is that the adhesive on the side of the double-sided adhesive tape where the polishing cloth is not pasted adheres at the same time when pasted when it is pasted onto the surface plate, so if the position is different, peel it off again and put it on again. This is because it is difficult to correct. Regarding the above, although some improvement is possible by controlling the initial adhesiveness as the physical properties of the pressure-sensitive adhesive,
This is an essential problem of the double-sided pressure-sensitive adhesive tape, and drastic improvement was difficult.

[0007]

SUMMARY OF THE INVENTION In view of the problems of the conventional double-sided pressure-sensitive adhesive tape, the object of the present invention is to easily correct the position at the time of bonding and to exert a sufficient pressure-sensitive adhesive force at the time of use. An object of the present invention is to provide a double-sided pressure-sensitive adhesive tape suitable for use in fixing an adhesive to a polishing device.

[0008]

A double-sided pressure-sensitive adhesive tape according to claim 1 is a double-sided pressure-sensitive adhesive tape for fixing a polishing cloth to a polishing device, which has a pressure-sensitive adhesive layer on both sides of a base material and is provided on one side. It is characterized in that a masking portion made of a non-adhesive or slightly adhesive material that covers a part of the surface of the adhesive layer is formed. A double-sided pressure-sensitive adhesive tape according to a second aspect is the double-sided pressure-sensitive adhesive tape according to the first aspect, wherein the masking portion is formed so as to cover 13 to 70% of the surface of the pressure-sensitive adhesive layer.

The present invention will be described in detail below. The base material in the present invention is not particularly limited, and for example, PE
T (polyethylene terephthalate), PEN (polyethylene naphthalate), polyethylene, polypropylene,
Alternatively, a composite film of these may be used. The thickness of the base material is not particularly limited, but is 10 to 10
It is preferably 0 μm.

The pressure-sensitive adhesive forming the pressure-sensitive adhesive layer is not particularly limited, but the pressure-sensitive adhesive forming the pressure-sensitive adhesive layer on the side to be attached to the surface plate is difficult to peel off during polishing and is re-peeled after finishing polishing. In terms of achieving a well-balanced stability in the polishing liquid, rubber adhesives, acrylic adhesives,
A silicone-based pressure-sensitive adhesive or the like is preferable, and the coating thickness of the pressure-sensitive adhesive layer is preferably 20 to 120 μm.

The double-sided pressure-sensitive adhesive tape of the present invention comprises a surface of the pressure-sensitive adhesive layer on one side, and a masking portion made of a non-tacky or slightly tacky material for covering a part of the surface thereof. When the masking portion is formed, the position at the time of bonding can be easily corrected.

Therefore, the material constituting the non-adhesive or slightly adhesive masking portion (hereinafter sometimes referred to as "masking material") is formed so that the outer surface thereof protrudes from the adhesive layer surface. Is preferably
Further, it is preferable that the masking portion is formed so as to cover 13 to 70% of the surface of the pressure-sensitive adhesive layer. When the outer surface of the masking material does not protrude beyond the surface of the adhesive layer, or when the coverage of the adhesive surface is less than 13%,
The surface of the pressure-sensitive adhesive layer easily contacts the adherend, and the workability of shifting the position is likely to deteriorate. If the coverage exceeds 70%, the adhesive area may be insufficient and sufficient adhesive strength may not be obtained.

The maximum thickness of the masking material (for example, the thickness of the intersection of the yarns forming the masking material) is not particularly limited, but is preferably 30 to 400 μm. If the maximum thickness is less than 30 μm, the masking material will be buried inside the pressure-sensitive adhesive layer surface with a small pressure, and it will not be possible to perform a sufficient position shifting workability. Even if
The masking material is less likely to be buried inside the adhesive layer surface,
It may not be possible to obtain sufficient adhesive strength.

The material of the non-adhesive masking material is not particularly limited, and examples thereof include natural or synthetic fibers,
Any material such as synthetic resin or metal can be used, and more specifically, the above-mentioned cotton thread or synthetic resin fiber woven, mesh or net made of polyethylene, polypropylene, PET, or polyester fiber is used. It is possible to use one made of any material such as a constructed non-woven fabric or a metal mesh made of a metal such as brass or stainless steel.

Examples of the material of the slightly tacky masking material include those obtained by coating the surface of the above non-tacky masking material with a slightly tacky adhesive. As the slightly tacky pressure-sensitive adhesive, a commonly used pressure-sensitive adhesive can be used, for example, EVA (ethylene-vinyl acetate copolymer).
Examples thereof include system adhesives, EVA / SBS (styrene butadiene styrene copolymer) adhesives, acrylic adhesives, rubber adhesives, and silicone adhesives.

The polishing cloth used in the present invention is not particularly limited, but for example, soft synthetic leather,
Various non-woven fabrics which may be impregnated with resin, hard foams, synthetic resin plates and the like are used. In addition, the polishing cloth generally has a thickness of 0.5 mm or more because it finishes a silicon wafer or a hard disk into a uniform mirror surface.
Those having a 5% compression load of 5.0 kg / cm or less are preferably used.

[0017]

BEST MODE FOR CARRYING OUT THE INVENTION Embodiments of the present invention will be further described below with reference to the drawings. FIG. 1 is a schematic sectional view illustrating an example of the double-sided pressure-sensitive adhesive tape of the present invention to which a polishing cloth is attached. FIG. 2 is a schematic cross-sectional view illustrating the method of using the double-sided pressure-sensitive adhesive tape of the present invention.

As shown in FIG. 1, the double-sided pressure-sensitive adhesive tape 5 of the present invention has an adhesive layer 2 (abrasive cloth side) and an adhesive layer 3 (platen side) laminated on both sides of a base material 1 for masking. The material 4 is laminated on the adhesive layer 3 side. In this case, as shown in FIG. 1, the polishing pad 6 is used by being attached to the pressure-sensitive adhesive layer 2 side.

As a method of using the double-sided pressure-sensitive adhesive tape of the present invention, as shown in FIG. 2, for example, a double-sided pressure-sensitive adhesive tape 5 to which a polishing cloth 6 is attached is cut in advance to a size suitable for a polishing apparatus. As shown in FIG. 2 (a), the side on which the masking material is laminated is placed on the surface plate 7 of the polishing apparatus, and if necessary, the position is corrected, and then pressure bonding is performed. As shown, a method of fixing on the surface plate 7 is used.

In this case, the masking material 4 is in contact with the surface plate 7 when it is simply placed as shown in FIG. 2 (a), and the adhesive layer 3 does not contact the surface plate. If this is the case, it can be modified. When the position is fixed by the correction and then pressure bonding is performed as shown in FIG. 2B, the masking material 4 sinks inward from the surface of the adhesive layer 3,
The pressure-sensitive adhesive layer 3 is in contact with the surface plate and is pressure-bonded and fixed to the surface plate 7.

Therefore, the double-sided adhesive tape 5 can be polished without being peeled off during polishing. At this time, the masking material 4 is pressed into the pressure-sensitive adhesive layer 3 by pressure, and in this case, it is preferable that the polishing cloth 6 has elasticity because the masking material 4 is easily pressed.

(Function) In the present invention, a masking portion made of a non-adhesive or slightly adhesive material is formed on the surface of the pressure-sensitive adhesive layer on the side to be bonded to the surface plate of the polishing apparatus. As a result, it is easy to correct the position at the time of bonding, and it is possible to firmly press-bond after the position is fixed, and a sufficient adhesive force can be exhibited during use.

[0023]

EXAMPLES The present invention will be specifically described by showing Examples and Comparative Examples below. The present invention is not limited to the following examples. Example 1 As shown in FIG. 1, a polyester film (“Taiko Polyester Film FE2002” manufactured by Nimura Chemical Co., Ltd., thickness 23 μm) was used as a substrate 1, and an acrylic adhesive was used on both sides thereof to form an adhesive layer 2 (Polishing cloth side) and pressure-sensitive adhesive layer 3 (surface plate side) are laminated so as to have a thickness shown in Table 1, and a polyolefin resin net (manufactured by Nisseki Sheet Pallet System Co., Ltd., thickness 23 μm) is used as the masking material 4.
A coating rate of 16%) was laminated on the side of the pressure-sensitive adhesive layer 3 to obtain a double-sided pressure-sensitive adhesive tape 5.

(Example 2) A stretched polypropylene film ("Taiko OPP film" manufactured by Nimura Chemical Co., Ltd.,
Nonwoven fabric (“Sof HN77” manufactured by Sekisui Film Co., Ltd., thickness 60 μm) as the masking material 4 using a thickness of 60 μm.
A double-sided pressure-sensitive adhesive tape 5 was obtained in the same manner as in Example 1 except that a coating rate of 68%) was laminated. Example 3 A soft resin film (“POVIC-T” manufactured by Achilles, thickness 200 μm) is used as the substrate 1, and a non-woven fabric (“Soft N” manufactured by Sekisui Film Co., Ltd.) is used as the masking material 4.
A33 ″, a thickness of 60 μm, and a coverage of 33%) were laminated in the same manner as in Example 1 to obtain a double-sided adhesive tape 5.

Comparative Example 1 A double-sided pressure-sensitive adhesive tape was obtained in the same manner as in Example 1 except that the masking material 4 was not used. Comparative Example 2 A double-sided pressure-sensitive adhesive tape was obtained in the same manner as in Example 2 except that the masking material 4 was not used. Comparative Example 3 A double-sided pressure-sensitive adhesive tape was obtained in the same manner as in Example 3 except that the masking material 4 was not used.

Using the double-sided pressure-sensitive adhesive tapes of Examples and Comparative Examples obtained as described above, a pressure-sensitive adhesive layer 2 (polishing cloth side) was bonded with a polishing cloth 6 ("SUBA400" manufactured by Rodel Nitta, resin-impregnated non-woven fabric). Then, the following evaluation was performed. (90-degree peeling adhesive strength) The 90-degree peeling adhesive strength to stainless steel was measured according to JIS Z0237. The 90-degree peeling adhesive strength to stainless steel is generally 5 N / inch (2.04 N / cm) or more, and it is considered that it can be held on the surface plate for about a week in the polishing step without peeling. There is. (Vertical drop) As a substitute test for the ease of position correction, the surface side of a double-sided adhesive tape in which a polishing cloth is attached to a stainless steel plate (masking material 4 in the example, adhesive layer 3 in the comparative example) Were placed in contact with each other, and after rotating the 50 g roll once, the stainless steel plate was made vertical, and it was observed whether or not the double-sided pressure-sensitive adhesive tape dropped, and evaluated according to the following criteria. ◯: Dropped (meaning that position correction is easy) ×: Not dropped (meaning that position correction is difficult) The above evaluation results are shown in Table 1.

[0027]

[Table 1]

As is clear from Table 1, in the examples of the present invention, it was found that the position can be easily corrected and the adhesive strength is sufficient.

[0029]

The double-sided pressure-sensitive adhesive tape of the present invention has a pressure-sensitive adhesive layer on both sides of a substrate, and a non-tacky or slightly tacky material for coating a part of the surface of the pressure-sensitive adhesive layer on one side. Since the masking part made of is formed, it is possible to easily correct the position at the time of bonding and it is excellent in workability when bonding a large polishing cloth to a surface plate or the like. Moreover, when pressure-bonded to a surface plate or the like after use for position correction, sufficient adhesive force can be exerted.

[Brief description of drawings]

FIG. 1 is a schematic cross-sectional view illustrating an example of the double-sided pressure-sensitive adhesive tape of the present invention.

FIG. 2 is a schematic cross-sectional view illustrating the method of using the double-sided pressure-sensitive adhesive tape of the present invention.

[Explanation of symbols]

1 base material 2 Adhesive layer (polishing cloth side) 3 Adhesive layer (plate side) 4 Masking material (masking part) 5 Double-sided adhesive tape 6 polishing cloth 7 surface plate

Claims (2)

[Claims] 1. A double-sided pressure-sensitive adhesive tape for fixing a polishing cloth to a polishing device, comprising a substrate and pressure-sensitive adhesive layers on both sides, wherein one surface of the pressure-sensitive adhesive layer covers a part of the surface. A double-sided pressure-sensitive adhesive tape having a masking portion formed of a non-adhesive or slightly adhesive material. 2. The masking portion is 13 to 7 on the surface of the pressure-sensitive adhesive layer.
The double-sided adhesive tape according to claim 1, which is formed so as to cover 0%.