JP2001354926A - Double-sided adhesive tape for fixing abrasive - Google Patents
Double-sided adhesive tape for fixing abrasiveInfo
- Publication number
- JP2001354926A JP2001354926A JP2000177102A JP2000177102A JP2001354926A JP 2001354926 A JP2001354926 A JP 2001354926A JP 2000177102 A JP2000177102 A JP 2000177102A JP 2000177102 A JP2000177102 A JP 2000177102A JP 2001354926 A JP2001354926 A JP 2001354926A
- Authority
- JP
- Japan
- Prior art keywords
- double
- adhesive tape
- abrasive
- sided adhesive
- abrasives
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Abstract
Description
【０００１】[0001]
【発明の属する技術分野】本発明は、研磨材固定用の両
面接着テープに関する。The present invention relates to a double-sided adhesive tape for fixing abrasives.
【０００２】[0002]
【従来の技術】従来、レンズ、ガラス、アルミディス
ク、シリコンウェハーなどを研磨するための研磨材とし
ては、硬質ウレタン発泡体、合成皮革、不織布などが広
く使用されている。2. Description of the Related Art Conventionally, hard urethane foams, synthetic leathers, nonwoven fabrics and the like have been widely used as abrasives for polishing lenses, glass, aluminum disks, silicon wafers and the like.
【０００３】この種の研磨材はポリッシングマシンの定
盤に固定されて使用されるが、この固定手段としては、
主に両面粘着テープが使用されている。しかし、上記の
ような研磨材の表面は多孔質であり、特に硬質ウレタン
発泡体からなる研磨材に対しては、両面粘着テープでは
接着強度が低く、回転研磨時に剥がれが生じるという欠
点がある。[0003] This type of abrasive is used by being fixed to a surface plate of a polishing machine.
Mainly double-sided adhesive tape is used. However, the surface of the above-mentioned abrasive is porous, and especially with respect to an abrasive made of a hard urethane foam, there is a disadvantage that the adhesive strength is low with a double-sided pressure-sensitive adhesive tape and peeling occurs during rotary polishing.
【０００４】[0004]
【発明が解決しようとする課題】本発明は、上記従来の
研磨材固定用の両面粘着テープの問題を解決するもの
で、その目的とするところは、各種の研磨材、特に硬質
ウレタン発泡体からなる研磨材に対して強い接着性を示
し、ポリッシングマシンの定盤から研磨材ごと再剥離可
能で、しかも製造にあまり手間を要しない研磨材固定用
両面接着テープを提供することにある。SUMMARY OF THE INVENTION The present invention solves the above-mentioned problems of the conventional double-sided pressure-sensitive adhesive tape for fixing abrasives, and aims at solving various types of abrasives, especially hard urethane foams. An object of the present invention is to provide a double-sided adhesive tape for fixing abrasives, which exhibits strong adhesiveness to abrasives, can be re-peeled together with the abrasives from the surface plate of the polishing machine, and does not require much labor for production.
【０００５】[0005]
【課題を解決するための手段】上記の目的を達成するた
めに、本発明では、基材の片面に熱活性のアクリル系接
着剤層が設けられ、基材の他面に再剥離性の粘着剤層が
設けられていることを特徴とする研磨材固定用両面接着
テープが提供される。In order to achieve the above object, according to the present invention, a thermally active acrylic adhesive layer is provided on one surface of a substrate, and a removable adhesive is provided on the other surface of the substrate. Provided is a double-sided adhesive tape for fixing an abrasive, characterized by being provided with an agent layer.
【０００６】本発明において、基材としては、一般に、
ポリエステル、ポリエチレン、ポリプロピレン、ポリ塩
化ビニル等からなるプラスチックフィルムが好ましく使
用されるが、これに限定されるものではない。In the present invention, the substrate is generally
A plastic film made of polyester, polyethylene, polypropylene, polyvinyl chloride or the like is preferably used, but is not limited thereto.
【０００７】上記基材の片面には、熱活性のアクリル系
接着剤層、所謂ホットメルト接着剤層が設けられる。こ
のような熱活性型のアクリル系接着剤としては、一般
に、（メタ）アクリル酸エステルポリマー或いは（メ
タ）アクリル酸エステルと（メタ）アクリル酸や２−ヒ
ドロキシエチルメタクリレートのようなカルボキシル基
や水酸基を有するモノマーとのコポリマーを主成分と
し、これにキシレン樹脂やフェノール樹脂のような高軟
化点の樹脂を混合してガラス転移温度を２０〜７０℃に
調整したものが使用される。[0007] On one side of the substrate, a thermally active acrylic adhesive layer, a so-called hot melt adhesive layer, is provided. Such a heat-active acrylic adhesive generally includes a (meth) acrylate polymer or a (meth) acrylate ester and a carboxyl group or a hydroxyl group such as (meth) acrylic acid or 2-hydroxyethyl methacrylate. A resin whose main component is a copolymer with a monomer having a high softening point such as xylene resin or phenol resin and whose glass transition temperature is adjusted to 20 to 70 ° C. is used.
【０００８】さらに、これに加えてエポキシ系の架橋剤
を含有させたものが使用されるが、これ等に限定されな
い。[0008] In addition, an epoxy-based crosslinking agent containing an epoxy-based crosslinking agent is used, but is not limited thereto.
【０００９】また、上記基材の他面には、再剥離性の粘
着剤層が設けられる。このような再剥離型の粘着剤層と
しては、一般に、（メタ）アクリル酸エステルポリマー
を主成分とし、これに粘着付与樹脂を混合して粘着力を
低く調節したものが使用される。[0009] On the other surface of the substrate, a removable pressure-sensitive adhesive layer is provided. As such a re-peelable pressure-sensitive adhesive layer, a layer having a (meth) acrylic acid ester polymer as a main component and a tackifying resin mixed with the main component to adjust the adhesion to a low level is generally used.
【００１０】その他、上記（メタ）アクリル酸エステル
ポリマーに替えて、（メタ）アクリル酸エステルと（メ
タ）アクリル酸や２−ヒドロキシエチルメタクリレート
のようなカルボキシル基や水酸基を有するモノマーとの
コポリマーを主成分とし、これに粘着付与樹脂を混合
し、さらにイソシアネート系の架橋剤を含有させて粘着
力を低く調節したものが使用されるが、これ等に限定さ
れない。In addition, instead of the above (meth) acrylate polymer, a copolymer of (meth) acrylate and a monomer having a carboxyl group or a hydroxyl group such as (meth) acrylic acid or 2-hydroxyethyl methacrylate is mainly used. As the component, a mixture obtained by mixing a tackifier resin with the mixture and further containing an isocyanate-based cross-linking agent to adjust the adhesion to a low level is used, but is not limited thereto.
【００１１】このように構成された本発明の研磨材固定
用両面接着テープは、熱活性のアクリル系接着剤層が研
磨材の貼り合わせ面となるように、研磨材に熱プレス法
や熱ラミネート法により熱接着され、また再剥離性の粘
着剤層をポリッシングマシンの定盤に貼り付けて研磨に
使用される。The double-sided adhesive tape for fixing abrasives of the present invention thus constituted is prepared by applying a hot press method or a heat laminating method to the abrasives so that the heat-active acrylic adhesive layer becomes the surface to which the abrasives are bonded. A pressure-sensitive adhesive layer which is thermally bonded by a method and which is removable is attached to a surface plate of a polishing machine and used for polishing.
【００１２】（作用）上述のように、基材の片面に熱活
性のアクリル系接着剤層を用いると、前述した従来の両
面粘着テープに比べて、酸やアルカリ性の研磨砥粒液の
存在下でも各種の研磨材、特に硬質ウレタン発泡体から
なる研磨材に対して強い接着性を示す。(Function) As described above, when a heat-active acrylic adhesive layer is used on one side of the base material, compared with the above-mentioned conventional double-sided pressure-sensitive adhesive tape, the presence of an acid or alkaline polishing abrasive liquid is more difficult. However, it exhibits strong adhesion to various abrasives, particularly abrasives made of rigid urethane foam.
【００１３】また、他面の再剥離性の粘着剤層は、再剥
離性となるように接着性が調整されているので、研磨材
が磨耗して交換が必要になった時は両面接着テープごと
定盤から容易に引き剥がすことができる。Further, since the adhesive property of the re-peelable pressure-sensitive adhesive layer on the other side is adjusted so as to be re-peelable, when the abrasive is worn and needs to be replaced, a double-sided adhesive tape is used. The whole can be easily peeled off from the surface plate.
【００１４】[0014]
【発明の実施の形態】以下、本発明の実施例及び比較例
を示す。 （実施例１）両面コロナ処理したポリエステル基材（厚
さ２３μｍのＰＥＴ）の片面に、熱活性のアクリル系接
着剤として、ＳＫ−１３８９（綜研化学社製）（水酸基
を有するメタクリル酸エステル共重合体に高軟化点のフ
ェノール樹脂を混合したもの）１００重量部に、Ｅ−Ａ
Ｘ（綜研化学社製）（エポキシ系の架橋剤）０．５重量
部を配合してなる熱活性のアクリル系接着剤層（ホット
メルト接着剤）を厚さ８０μｍに塗工した。DESCRIPTION OF THE PREFERRED EMBODIMENTS Examples and comparative examples of the present invention are shown below. (Example 1) SK-1389 (manufactured by Soken Chemical Co., Ltd.) (a methacrylic acid ester having a hydroxyl group) was coated on one side of a polyester substrate (23 μm thick PET) which had been subjected to corona treatment on both sides as a thermally active acrylic adhesive. A mixture of a phenolic resin having a high softening point and the coalesced) 100 parts by weight of EA
X (manufactured by Soken Chemical Co., Ltd.) (epoxy-based cross-linking agent) was mixed with 0.5 part by weight of a heat-active acrylic adhesive layer (hot-melt adhesive) to a thickness of 80 μm.
【００１５】さらに、上記基材の他面に、再剥離性の架
橋型アクリル系粘着剤溶液（積水化学社製の「ＷＨＤ
糊」と日本ポリウレタン社製の架橋剤「コロネートＬ−
５５Ｅ」とからなるもの）を塗布し乾燥して、厚さ３５
μｍの再剥離性の架橋型アクリル系粘着剤層を形成し
て、研磨材固定用両面接着テープを製造した。Further, on the other surface of the base material, a removable cross-linkable acrylic pressure-sensitive adhesive solution (“WHD” manufactured by Sekisui Chemical Co., Ltd.)
Glue "and a cross-linking agent" Coronate L-
55E "), dried and dried to a thickness of 35
A cross-linkable acrylic pressure-sensitive adhesive layer having a removability of μm was formed to produce a double-sided adhesive tape for fixing abrasives.
【００１６】（実施例２）両面コロナ処理したポリエス
テル基材（厚さ２３μｍのＰＥＴ）の片面に、熱活性の
アクリル系接着剤として、ＳＫ−１６０４（綜研化学社
製）（水酸基を有するメタクリル酸エステル共重合体）
１００重量部に、ニカノールＴ−６０（綜研化学社製）
（高軟化点のフェノール樹脂）２０重量部及びＥ−ＡＸ
（綜研化学社製）（エポキシ系の架橋剤）０．５重量部
を配合してなる熱活性のアクリル系接着剤層（ホットメ
ルト接着剤）を厚さ８０μｍに塗工した。Example 2 SK-1604 (manufactured by Soken Kagaku Co., Ltd.) (a methacrylic acid having a hydroxyl group) was used as a thermally active acrylic adhesive on one side of a polyester substrate (23 μm thick PET) which had been subjected to corona treatment on both sides. Ester copolymer)
100 parts by weight of Nicanol T-60 (manufactured by Soken Chemical Co., Ltd.)
(High softening point phenol resin) 20 parts by weight and E-AX
A thermoactive acrylic adhesive layer (hot melt adhesive) containing 0.5 part by weight of an epoxy-based crosslinking agent (manufactured by Soken Chemical Co., Ltd.) was applied to a thickness of 80 μm.
【００１７】さらに、上記基材の他面に、再剥離性の架
橋型アクリル系粘着剤溶液（積水化学社製の「ＷＨＤ
糊」と日本ポリウレタン社製の架橋剤「コロネートＬ−
５５Ｅ」とからなるもの）を塗布し乾燥して、厚さ３５
μｍの再剥離性の架橋型アクリル系粘着剤層を形成し
て、研磨材固定用両面接着テープを製造した。Further, on the other surface of the base material, a removable cross-linkable acrylic pressure-sensitive adhesive solution (“WHD” manufactured by Sekisui Chemical Co., Ltd.)
Glue "and a cross-linking agent" Coronate L-
55E "), dried and dried to a thickness of 35
A cross-linkable acrylic pressure-sensitive adhesive layer having a removability of μm was formed to produce a double-sided adhesive tape for fixing abrasives.
【００１８】（比較例１）研磨材固定用両面接着テープ
として、積水化学製のアクリル系両面粘着テープ♯５６
０を使用した。(Comparative Example 1) As a double-sided adhesive tape for fixing abrasives, an acrylic double-sided adhesive tape # 56 manufactured by Sekisui Chemical
0 was used.
【００１９】上記実施例１、２及び比較例１により得ら
れた研磨材固定用両面接着テープを用い、熱活性のアク
リル系接着剤層が研磨材の貼り合わせ面となるように、
硬質ウレタン発泡体からなる研磨材（ロデールニッタ社
製の「ＩＣ１０００」及び「ＭＨＣ１４Ａ」）に熱ロー
ルラミネート法により温度１００℃、線圧約２０Ｎ／ｃ
ｍ、速度１ｃｍ／秒の条件で熱接着し、こうして得られ
た試料（２５ｍｍ幅）について、２３℃、引張速度３０
０ｍｍ／分の条件で、研磨材と両面接着テープ間のＴ型
剥離強度を測定した。その結果を表１に示す。Using the double-sided adhesive tape for fixing abrasives obtained in Examples 1 and 2 and Comparative Example 1, the heat-active acrylic adhesive layer was used as the surface to which the abrasives were bonded.
Abrasives made of rigid urethane foam (“IC1000” and “MHC14A” manufactured by Rodel Nitta) are heated at a temperature of 100 ° C. and a linear pressure of about 20 N / c by a hot roll laminating method.
m, at a speed of 1 cm / sec, and heat-bonded.
The T-peel strength between the abrasive and the double-sided adhesive tape was measured under the condition of 0 mm / min. Table 1 shows the results.
【００２０】[0020]
【表１】 [Table 1]
【００２１】[0021]
【発明の効果】上述の通り、本発明によれば、各種の研
磨材、特に硬質ウレタン発泡体からなる研磨材に対して
強い接着性を示し、ポリッシングマシンの定盤から研磨
材ごと再剥離可能で、しかも従来の両面粘着テープと同
様に、その製造にあまり手間を要しない研磨材固定用両
面接着テープが得られる。As described above, according to the present invention, it shows a strong adhesiveness to various abrasives, especially abrasives made of a hard urethane foam, and can be re-peeled together with the abrasives from the surface plate of a polishing machine. In addition, as with the conventional double-sided adhesive tape, a double-sided adhesive tape for fixing the abrasive, which does not require much trouble in its production, can be obtained.
Claims (1)
層が設けられ、基材の他面に再剥離性の粘着剤層が設け
られていることを特徴とする研磨材固定用両面接着テー
プ。An abrasive-fixing double-sided surface, wherein a heat-active acrylic adhesive layer is provided on one side of a substrate, and a removable adhesive layer is provided on the other side of the substrate. Adhesive tape.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2000177102A JP2001354926A (en) | 2000-06-13 | 2000-06-13 | Double-sided adhesive tape for fixing abrasive |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2000177102A JP2001354926A (en) | 2000-06-13 | 2000-06-13 | Double-sided adhesive tape for fixing abrasive |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JP2001354926A true JP2001354926A (en) | 2001-12-25 |
Family
ID=18678744
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2000177102A Pending JP2001354926A (en) | 2000-06-13 | 2000-06-13 | Double-sided adhesive tape for fixing abrasive |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2001354926A (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2004080654A1 (en) * | 2003-03-14 | 2004-09-23 | Ebara Corporation | Polishing tool and polishing apparatus |
| WO2007132694A1 (en) * | 2006-05-12 | 2007-11-22 | Seiko Epson Corporation | Pressure sensitive adhesive sheet and method of edging operation |
| JP2011224704A (en) * | 2010-04-19 | 2011-11-10 | Teijin Cordley Ltd | Sheet for smoothing |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS62153058A (en) * | 1985-12-25 | 1987-07-08 | Tokyo Kikai Seisakusho:Kk | Table inverting device |
| JP2000071170A (en) * | 1998-08-28 | 2000-03-07 | Nitta Ind Corp | Polished-wafer holding member, and method of attaching and detaching same to and from surface plate of polishing machine |
| JP2000077366A (en) * | 1998-08-28 | 2000-03-14 | Nitta Ind Corp | Polishing cloth and method for attaching/detaching polishing cloth to/from turn table of polishing machine |
| JP2000087004A (en) * | 1998-09-17 | 2000-03-28 | Nitta Ind Corp | Holding agent for workpiece and separation of workpiece held therewith |
-
2000
- 2000-06-13 JP JP2000177102A patent/JP2001354926A/en active Pending
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS62153058A (en) * | 1985-12-25 | 1987-07-08 | Tokyo Kikai Seisakusho:Kk | Table inverting device |
| JP2000071170A (en) * | 1998-08-28 | 2000-03-07 | Nitta Ind Corp | Polished-wafer holding member, and method of attaching and detaching same to and from surface plate of polishing machine |
| JP2000077366A (en) * | 1998-08-28 | 2000-03-14 | Nitta Ind Corp | Polishing cloth and method for attaching/detaching polishing cloth to/from turn table of polishing machine |
| JP2000087004A (en) * | 1998-09-17 | 2000-03-28 | Nitta Ind Corp | Holding agent for workpiece and separation of workpiece held therewith |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2004080654A1 (en) * | 2003-03-14 | 2004-09-23 | Ebara Corporation | Polishing tool and polishing apparatus |
| WO2007132694A1 (en) * | 2006-05-12 | 2007-11-22 | Seiko Epson Corporation | Pressure sensitive adhesive sheet and method of edging operation |
| JP4949390B2 (en) * | 2006-05-12 | 2012-06-06 | セイコーエプソン株式会社 | Adhesive sheet and processing method |
| JP2011224704A (en) * | 2010-04-19 | 2011-11-10 | Teijin Cordley Ltd | Sheet for smoothing |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN103596729B (en) | Structural member for polishing | |
| JPH10130593A (en) | Tacky sheet and its production | |
| JPH08293477A (en) | Polishing cloth and attaching/detaching method for this polishing cloth to polishing plate | |
| US6616520B1 (en) | Polishing cloth and method for attaching/detaching the polishing cloth to/from polishing machine base plate | |
| JP5520026B2 (en) | Double-sided tape for fixing polishing pad | |
| JP2008111008A (en) | Double-sided pressure-sensitive adhesive tape for fixing abrasive | |
| JP2000071170A (en) | Polished-wafer holding member, and method of attaching and detaching same to and from surface plate of polishing machine | |
| JP4446508B2 (en) | Adhesive material | |
| JP2006265410A (en) | Double sided-adhesive tape for multilayer polishing pad and preparation process for multilayer polishing pad | |
| JP2007203400A (en) | Double-faced adhesive tape for fixing polishing pad | |
| JP4601089B2 (en) | Thermally active adhesive composition and film adhesive | |
| JP2008098356A (en) | Double-faced adhesive tape and its manufacturing method | |
| JP2001354926A (en) | Double-sided adhesive tape for fixing abrasive | |
| JP2002285114A (en) | Tape for abrasive fixing | |
| JP4107729B2 (en) | Thermal foaming adhesive and adhesive member | |
| JP2000309760A (en) | Double-coated pressure-sensitive adhesive tape | |
| JP5346226B2 (en) | Double-sided adhesive tape for fixing abrasive and adhesive tape with abrasive | |
| JP2002224944A (en) | Bonding method of abrasive | |
| JPH10310745A (en) | Tacky sheet | |
| JPS6123673A (en) | Double-coated, pressure-sensitive adhesive tape or sheet | |
| JP2000265140A (en) | Pressure-sensitive adhesive double coated tape for recycling molded article | |
| JPH06116536A (en) | Adhesive tape | |
| JP2969303B2 (en) | Abrasive fixing tape | |
| JP2009262253A (en) | Pressure-sensitive adhesion double-coated tape for fixing polishing pad | |
| JPH08267668A (en) | Polishing wafer holding component and method for attaching and detaching wafer holding component to and from polishing machine surface plate |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20070222 |
|
| A977 | Report on retrieval |
Free format text: JAPANESE INTERMEDIATE CODE: A971007 Effective date: 20100428 |
|
| A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20100510 |
|
| A521 | Written amendment |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20100709 |
|
| RD02 | Notification of acceptance of power of attorney |
Free format text: JAPANESE INTERMEDIATE CODE: A7422 Effective date: 20100709 |
|
| A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20101207 |
|
| A02 | Decision of refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A02 Effective date: 20110405 |