JP2003285994A - Elevating apparatus - Google Patents

Elevating apparatus

Info

Publication number
JP2003285994A
JP2003285994A JP2002090160A JP2002090160A JP2003285994A JP 2003285994 A JP2003285994 A JP 2003285994A JP 2002090160 A JP2002090160 A JP 2002090160A JP 2002090160 A JP2002090160 A JP 2002090160A JP 2003285994 A JP2003285994 A JP 2003285994A
Authority
JP
Japan
Prior art keywords
cam
male screw
follower
mounting plate
elevating
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
JP2002090160A
Other languages
Japanese (ja)
Inventor
Yasumichi Tawara
靖通 田原
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hirata Corp
Original Assignee
Hirata Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hirata Corp filed Critical Hirata Corp
Priority to JP2002090160A priority Critical patent/JP2003285994A/en
Publication of JP2003285994A publication Critical patent/JP2003285994A/en
Withdrawn legal-status Critical Current

Links

Abstract

<P>PROBLEM TO BE SOLVED: To provide smooth elevating movement, size reduction, and simplification in an elevating apparatus. <P>SOLUTION: An elevating mechanism for elevating a placement board 8 is provided with a cam follower 12 engaging with a cylindrical cam member 5 formed with a spiral cam groove 5a on the outer periphery thereof; annular member 6 disposed coaxially to the cam member 5; a driving means 9 for rotating the cam member 5 around the center line thereof; and a guide member 3 for guiding the annular member 6 in the elevating direction Z. The placement board 8 is secured onto the annular member 3. When the cam member 5 rotates, the annular member 6 and the placement board 8 elevate smoothly. <P>COPYRIGHT: (C)2004,JPO

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【発明の属する技術分野】本発明は、産業用リフト又は
搬送ロボット、あるいはクリーンルーム内で使用される
搬送ロボットに適用されて物体の昇降を行なう昇降装置
に関する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an elevating device which is applied to an industrial lift or a transfer robot or a transfer robot used in a clean room to lift and lower an object.

【0002】[0002]

【従来の技術】従来の昇降装置として、例えば特開平7
−245334号公報に開示されたものが知られてい
る。この公報に開示の昇降装置は、略中央に配置され鉛
直方向に伸長するねじ棒、ねじ棒に螺合するナット及び
ねじ棒を挟んで配置された一対の支持腕により支持され
た載置板(テーブル)を一体的に備えて昇降する昇降
台、昇降台を鉛直方向に案内するガイドシャフト、ねじ
棒を回転させるモータ等を備えている。そして、モータ
を駆動させてねじ棒を回転させることで、昇降台すなわ
ち載置板を昇降させて、載置板上に載置された物体を所
望の高さまで上昇あるいは下降させるものである。
2. Description of the Related Art As a conventional lifting device, for example, Japanese Patent Laid-Open No.
The one disclosed in Japanese Patent Publication No. 245334 is known. The lifting device disclosed in this publication has a mounting plate supported by a pair of support arms arranged at substantially the center and vertically extending in a screw rod, a nut screwed with the screw rod, and the screw rod. A table is integrally provided to elevate and lower, a guide shaft for guiding the elevating table in the vertical direction, a motor for rotating a screw rod, and the like. Then, by driving the motor to rotate the screw rod, the elevating table, that is, the mounting plate is moved up and down to raise or lower the object mounted on the mounting plate to a desired height.

【0003】[0003]

【発明が解決しようとする課題】ところで、上記従来の
昇降装置においては、昇降動作を行なうための駆動機構
が、軸径が比較的小さいねじ棒、ねじ棒に螺合するナッ
ト、及びねじ棒に駆動力を付与するモータにより形成さ
れているため、昇降台(及び載置板)の昇降ストローク
は、ねじ棒に螺合したナットが移動するストロークの範
囲内に制限される。すなわち、この装置の背丈を低く
(小型化)して、昇降ストロークを長くすることは困難
である。また、昇降動作を迅速に行なわせるには、モー
タによるねじ棒の回転速度を速くしなければならない
が、この高速化に伴なって、振動あるいは騒音等の悪化
を招く虞がある。
By the way, in the above-mentioned conventional lifting device, the drive mechanism for carrying out the lifting operation includes a threaded rod having a relatively small shaft diameter, a nut screwed to the threaded rod, and a threaded rod. Since it is formed by a motor that applies a driving force, the lifting stroke of the lifting table (and the mounting plate) is limited to the range of the stroke in which the nut screwed with the screw rod moves. That is, it is difficult to reduce the height of the device (downsize it) and lengthen the lifting stroke. Further, in order to perform the raising and lowering operation quickly, the rotation speed of the screw rod by the motor must be increased, but this increase in speed may cause deterioration of vibration or noise.

【0004】本発明は、上記従来技術の問題点に鑑みて
なされたものであり、その目的とするところは、構造の
簡略化、小型化、部品点数の削減等を図りつつ、昇降動
作に伴なう振動、騒音の発生を抑制ないしは防止するこ
とで安定した昇降動作が行なえ、昇降ストロークを長く
でき、さらには、駆動速度を増すことなく昇降動作の高
速化を行なえる昇降装置を提供することにある。
The present invention has been made in view of the above-mentioned problems of the prior art. The purpose of the present invention is to simplify the structure, reduce the size, reduce the number of parts, etc. To provide a lifting device capable of performing a stable lifting operation by suppressing or preventing the generation of vibration and noise, extending the lifting stroke, and further increasing the lifting speed without increasing the driving speed. It is in.

【0005】[0005]

【課題を解決するための手段】本発明の昇降装置は、被
昇降体を載置する載置板と、載置板を昇降させる昇降機
構とを備えた昇降装置であって、上記昇降機構は、外周
面又は内周面において螺旋状のカム溝が形成されかつ昇
降方向に伸長する軸心をもつ円筒状のカム部材と、カム
溝に係合するカムフォロワが設けられかつカム部材と同
軸に配置されたフォロワ部材と、カム部材及びフォロワ
部材の一方を軸心回りに回転させる駆動力を及ぼす駆動
手段と、カム部材及びフォロワ部材の他方を昇降方向に
案内するガイド部材とを有し、上記載置板は、カム部材
及びフォロワ部材の他方に固定されている、ことを特徴
としている。
SUMMARY OF THE INVENTION An elevating device of the present invention is an elevating device including a placing plate on which an object to be raised and lowered and an elevating mechanism for elevating the placing plate are provided. A cylindrical cam member having a spiral cam groove formed on the outer peripheral surface or the inner peripheral surface and having an axial center extending in the up-and-down direction, and a cam follower engaging with the cam groove provided and arranged coaxially with the cam member The follower member, a drive means that exerts a driving force that rotates one of the cam member and the follower member around the axis, and a guide member that guides the other of the cam member and the follower member in the vertical direction. The placing plate is fixed to the other of the cam member and the follower member.

【0006】この構成によれば、駆動手段により、カム
部材及びフォロワ部材の一方が回動すると、カム部材及
びフォロワ部材の他方がガイド部材により案内されて昇
降し、載置板に載置された被昇降体が所定の高さに移動
させられる。すなわち、カム溝とカムフォロワとが係合
する半径(軸心からの距離)を大きく設定できる円筒状
にカム部材が形成されているため、中実で小径のリード
スクリュウー等に比べて、軽量化、構造の簡略化を図り
つつ、安定したカム作用を得ることができる。これによ
り、載置板の傾き、騒音、振動等を抑制ないし防止で
き、円滑な昇降動作が得られる。
According to this structure, when one of the cam member and the follower member is rotated by the driving means, the other of the cam member and the follower member is guided by the guide member to move up and down and is placed on the placing plate. The lifted body is moved to a predetermined height. That is, since the cam member is formed in a cylindrical shape that can set a large radius (distance from the shaft center) at which the cam groove and the cam follower engage with each other, the weight is lighter than that of a solid small-diameter lead screw or the like. A stable cam action can be obtained while simplifying the structure. As a result, it is possible to suppress or prevent the inclination, noise, vibration, etc. of the mounting plate, and obtain a smooth lifting operation.

【0007】上記構成において、カム部材は、外周面に
おいて螺旋状の第1カム溝が形成されかつ軸心回りに回
動自在に支持された第1カム部材、外周面において螺旋
状の第2カム溝が形成されかつ第1カム部材の内側にお
いて同軸にかつ昇降方向に出没自在に配置された第2カ
ム部材を含み、フォロワ部材は、第1カム溝と係合する
第1カムフォロワが設けられかつ昇降可能な環状の第1
フォロワ部材、第2カム溝に係合する第2カムフォロワ
が設けられると共に第1フォロワ部材と一体的に昇降し
かつ第1カム部材と一体的に回転する環状の第2フォロ
ワ部材を含み、ガイド部材は、第1フォロワ部材を昇降
方向に案内する第1ガイド部材、第2カム部材を昇降方
向に案内する第2ガイド部材を含み、載置板は第2カム
部材に固定され、駆動手段は第1カム部材に回転駆動力
を及ぼす、構成を採用できる。
In the above-mentioned structure, the cam member has the first cam member having the spiral first cam groove formed on the outer peripheral surface thereof and rotatably supported about the axis, and the second cam spiral on the outer peripheral surface. A follower member provided with a first cam follower that engages with the first cam groove; A ring-shaped first that can be raised and lowered
The guide member includes a follower member, a second cam follower that engages with the second cam groove, and an annular second follower member that moves up and down integrally with the first follower member and rotates integrally with the first cam member. Includes a first guide member that guides the first follower member in the vertical direction and a second guide member that guides the second cam member in the vertical direction, the mounting plate is fixed to the second cam member, and the drive means is the first. A configuration can be adopted in which the rotational driving force is applied to one cam member.

【0008】この構成によれば、駆動手段により、第1
カム部材が回動すると、第1フォロワ部材が第1ガイド
部材により案内されて昇降し、第2フォロワ部材が第1
フォロワ部材と一体的に昇降すると共に第1カム部材と
一体的に回動し、第2カム部材及び載置板が第2ガイド
部材に案内されて昇降し、載置板に載置された被昇降体
が所定の高さに移動させられる。すなわち、カム溝とカ
ムフォロワとが係合する半径(軸心からの距離)を大き
く設定できる円筒状に第1カム部材及び第2カム部材が
形成されているため、中実で小径のリードスクリュウー
等に比べて、軽量化、構造の簡略化を図りつつ、安定し
たカム作用を得ることができ、載置板の傾き、騒音、振
動等を防止でき、円滑な昇降動作が得られる。また、第
1カム部材及び第2カム部材が同軸にて入れ子状に配置
されているため、装置の背丈(下降位置に縮んだ状態で
の高さ)を低くして小型化を図りつつも、昇降ストロー
クを長く設定できる。
According to this structure, the first
When the cam member rotates, the first follower member is guided by the first guide member to move up and down, and the second follower member moves to the first follower member.
It moves up and down integrally with the follower member and rotates integrally with the first cam member, and the second cam member and the mounting plate are guided by the second guide member to ascend and descend, and are mounted on the mounting plate. The elevating body is moved to a predetermined height. That is, since the first cam member and the second cam member are formed in a cylindrical shape so that the radius at which the cam groove and the cam follower engage with each other (the distance from the shaft center) can be set to be large, a solid lead screw with a small diameter, etc. Compared with the above, while achieving the weight reduction and the simplification of the structure, the stable cam action can be obtained, the inclination of the mounting plate, the noise, the vibration and the like can be prevented, and the smooth lifting operation can be obtained. Further, since the first cam member and the second cam member are coaxially arranged in a nested manner, the height of the apparatus (the height when the apparatus is contracted to the lowered position) is reduced, and the apparatus is downsized. The lifting stroke can be set long.

【0009】上記構成において、カム溝とカムフォロワ
とは、カム部材の径方向において所定の間隙をおいて係
合するように形成された、構成を採用できる。この構成
によれば、カム溝とカムフォロワとが径方向(昇降方向
に直交する方向)において接触しないため、径方向にガ
イド部材を押し付ける力が作用するのを防止できる。こ
れにより、ガイド部材の摺動面でスティック(かじり)
等が発生するのを防止でき、円滑な昇降動作が得られ
る。
In the above structure, the cam groove and the cam follower may be formed so as to be engaged with each other with a predetermined gap in the radial direction of the cam member. With this configuration, the cam groove and the cam follower do not come into contact with each other in the radial direction (direction orthogonal to the up-and-down direction), so that it is possible to prevent the force pressing the guide member in the radial direction from acting. This allows the sliding surface of the guide member to stick.
It is possible to prevent the occurrence of such problems, and to obtain a smooth lifting operation.

【0010】また、本発明の昇降装置は、被昇降体を載
置する載置板と、載置板を昇降させる昇降機構とを備え
た昇降装置であって、上記昇降機構は、外周面において
多条雄ねじが形成されかつ昇降方向に伸長する軸心をも
つ円筒状の雄ねじ部材と、多条雄ねじと螺合する多条雌
ねじが設けられた環状の雌ねじ部材と、雄ねじ部材及び
雌ねじ部材の一方を軸心回りに回転させる駆動力を及ぼ
す駆動手段と、雄ねじ部材及び雌ねじ部材の他方を昇降
方向に案内するガイド部材とを有し、上記載置板は、雄
ねじ部材及び雌ねじ部材の他方に固定されている、こと
を特徴としている。
The elevating device of the present invention is an elevating device comprising a mounting plate for mounting an elevating / lowering body and an elevating mechanism for elevating the mounting plate, wherein the elevating mechanism has an outer peripheral surface. A cylindrical male screw member having a multi-threaded male screw and having an axis extending in the up-and-down direction, an annular female screw member provided with a multi-threaded female screw that engages with the multi-threaded male screw, and one of the male screw member and the female screw member. Has a drive means for applying a driving force for rotating the shaft around the axis, and a guide member for guiding the other of the male screw member and the female screw member in the vertical direction, and the above-mentioned mounting plate is fixed to the other of the male screw member and the female screw member. It is characterized by being.

【0011】この構成によれば、駆動手段により、雄ね
じ部材及び雌ねじ部材の一方が回動すると、雄ねじ部材
及び雌ねじ部材の他方がガイド部材により案内されて昇
降し、載置板に載置された被昇降体が所定の高さに移動
させられる。すなわち、多条雄ねじと多条雌ねじとが螺
合する半径(軸心からの距離)を大きく設定できる円筒
状に雄ねじ部材が形成されているため、中実で小径のリ
ードスクリュウー等に比べて、軽量化、構造の簡略化を
図りつつ、安定したねじ送り作用を得ることができ、載
置板の傾き、騒音、振動等を防止でき、円滑な昇降動作
が得られる。また、多条ねじ(多条雄ねじ及び多条雌ね
じ)を採用したことにより、リードが大きくなるため、
駆動手段による回転速度を大きくすることなく、昇降動
作を高速化できる。また、回転速度を小さく設定できる
ため、騒音、振動等をより一層抑制ないし防止できる。
According to this structure, when one of the male screw member and the female screw member is rotated by the driving means, the other of the male screw member and the female screw member is guided by the guide member to move up and down and is placed on the placing plate. The lifted body is moved to a predetermined height. That is, since the male thread member is formed in a cylindrical shape that can set a large radius (distance from the axis) at which the multi-thread male thread and the multi-thread female thread are screwed, compared to a solid, small-diameter lead screw or the like, It is possible to obtain a stable screw feed action while preventing weight reduction and structure simplification, to prevent tilting, noise, vibration and the like of the mounting plate, and to obtain a smooth lifting operation. Also, the adoption of multi-start threads (multi-start male threads and multi-start female threads) increases the lead size,
The raising / lowering operation can be speeded up without increasing the rotation speed by the driving means. Further, since the rotation speed can be set low, noise, vibration, etc. can be further suppressed or prevented.

【0012】上記構成において、雄ねじ部材は、外周面
において第1多条雄ねじが形成されかつ軸心回りに回動
自在に支持された第1雄ねじ部材、第1雄ねじ部材の内
側において同軸にかつ昇降方向に出没自在に配置されか
つ外周面において第2多条雄ねじが形成された第2雄ね
じ部材を含み、雌ねじ部材は、第1多条雄ねじと螺合す
る第1多条雌ねじが設けられかつ昇降可能な第1雌ねじ
部材、第2多条雄ねじと螺合する第2多条雌ねじが設け
られると共に第1雌ねじ部材と一体的に昇降しかつ第1
雄ねじ部材と一体的に回転する第2雌ねじ部材を含み、
ガイド部材は、第1雌ねじ部材を昇降方向に案内する第
1ガイド部材、第2雄ねじ部材を昇降方向に案内する第
2ガイド部材を含み、載置板は第2雄ねじ部材に固定さ
れ、駆動手段は第1雄ねじ部材に回転駆動力を及ぼす、
構成を採用できる。
In the above structure, the male screw member has the first multi-threaded male screw formed on the outer peripheral surface thereof and is supported rotatably about the axis, and coaxially and vertically moves inside the first male screw member. A second male screw member that is arranged so as to be retractable in the direction and has a second multiple male screw formed on the outer peripheral surface, and the female screw member is provided with a first multiple female screw that is screwed with the first multiple male screw and is moved up and down. A possible first female thread member, a second multi-thread female thread to be screwed with the second multi-thread male thread are provided, and the first female thread member moves up and down integrally with the first female thread member and
A second female screw member that rotates integrally with the male screw member,
The guide member includes a first guide member for guiding the first female screw member in the ascending / descending direction and a second guide member for guiding the second male screw member in the ascending / descending direction, and the mounting plate is fixed to the second male screw member and the driving means. Exerts a rotational driving force on the first male screw member,
Configuration can be adopted.

【0013】この構成によれば、駆動手段により、第1
雄ねじ部材が回動すると、第1雌ねじ部材が第1ガイド
部材により案内されて昇降し、第2雌ねじ部材が第1雌
ねじ部材と一体的に昇降すると共に第1雄ねじ部材と一
体的に回動し、第2雄ねじ部材及び載置板が第2ガイド
部材に案内されて昇降し、載置板に載置された被昇降体
が所定の高さに移動させられる。すなわち、多条雄ねじ
と多条雌ねじとが螺合する半径(軸心からの距離)を大
きく設定できる円筒状に第1雄ねじ部材及び第2雄ねじ
部材が形成されているため、中実で小径のリードスクリ
ュウー等に比べて、軽量化、構造の簡略化を図りつつ、
安定したねじ送り作用を得ることができ、載置板の傾
き、騒音、振動等を防止でき、円滑な昇降動作が得られ
る。また、回転速度を大きくすることなく昇降動作を高
速化できる。さらに、第1雄ねじ部材及び第2雄ねじ部
材が同軸にて入れ子状に配置されているため、装置の背
丈(下降位置に縮んだ状態での高さ)を低くして小型化
を図りつつも、昇降ストロークを長く設定できる。
According to this structure, the first driving device drives the first driving device.
When the male screw member rotates, the first female screw member is guided by the first guide member to move up and down, the second female screw member moves up and down integrally with the first female screw member, and rotates integrally with the first male screw member. The second male screw member and the mounting plate are guided by the second guide member to move up and down, and the lifted object mounted on the mounting plate is moved to a predetermined height. That is, since the first male screw member and the second male screw member are formed in a cylindrical shape that can set a large radius (distance from the shaft center) at which the multiple-thread male screw and the multiple-thread female screw are screwed, a solid, small-diameter Compared to lead screw etc., while aiming for weight reduction and simplification of structure,
A stable screw feeding action can be obtained, tilting of the mounting plate, noise, vibration, etc. can be prevented, and a smooth lifting operation can be obtained. Further, the lifting operation can be speeded up without increasing the rotation speed. Further, since the first male screw member and the second male screw member are coaxially arranged in a nested manner, the height of the device (height in the state of being contracted to the lowered position) can be reduced to achieve miniaturization, The lifting stroke can be set long.

【0014】上記構成において、多条雄ねじと多条雌ね
じとは、雄ねじ部材の径方向において所定の間隙をおい
て係合するように形成された、構成を採用できる。この
構成によれば、多条雄ねじと多条雌ねじとが径方向(昇
降方向に直交する方向)において接触しないため、径方
向にガイド部材を押し付ける力が作用するのを防止でき
る。これにより、ガイド部材の摺動面でスティック(か
じり)等が発生するのを防止でき、円滑な昇降動作が得
られる。
In the above structure, the multiple-thread male screw and the multiple-thread female screw may be formed so as to be engaged with each other with a predetermined gap in the radial direction of the male screw member. According to this configuration, since the multiple-thread male screw and the multiple-thread female screw do not contact each other in the radial direction (direction orthogonal to the vertical direction), it is possible to prevent the force pressing the guide member in the radial direction from acting. As a result, it is possible to prevent sticking or the like from occurring on the sliding surface of the guide member, so that a smooth lifting operation can be obtained.

【0015】[0015]

【発明の実施の形態】以下、本発明の実施の形態につい
て、添付図面を参照しつつ説明する。図1ないし図3
は、本発明に係る昇降装置の一実施形態を示すものであ
り、図1は縮んだ下降位置にある状態を示す縦断面図、
図2は伸びた上昇位置にある状態を示す縦断面図、図3
(a),(b)は平面図及び図2中のA1−A1におけ
る横断面図である。
BEST MODE FOR CARRYING OUT THE INVENTION Embodiments of the present invention will be described below with reference to the accompanying drawings. 1 to 3
1 shows an embodiment of an elevating device according to the present invention, and FIG. 1 is a longitudinal sectional view showing a state in a contracted descending position,
2 is a vertical cross-sectional view showing a state in an extended and raised position, FIG.
(A), (b) is a top view and a cross-sectional view taken along line A1-A1 in FIG.

【0016】この昇降装置は、図1ないし図3に示すよ
うに、中央に開口部を有する円板状のベース1、ベース
1と対向して配置され開口部2aを有する円板状の上板
2、ベース1と上板2との間に固定され昇降方向Zに伸
長する3本のガイド部材3、ベース1に対して回転支持
体4を介して支持された円筒状のカム部材5、カム部材
5の周りにおいてカム部材5と同軸に配置された環状の
フォロワ部材6、フォロワ部材6に対して3本の支持部
材7を介して固定された円板状の載置板8、カム部材5
に回転駆動力を及ぼす駆動手段9等を備えている。ここ
では、カム部材5、フォロワ部材6(及び後述するカム
フォロワ12)、駆動手段9、ガイド部材3等により、
載置板8を昇降させる昇降機構が形成されている。
As shown in FIGS. 1 to 3, this lifting device includes a disk-shaped base 1 having an opening at the center, and a disk-shaped upper plate having an opening 2a arranged so as to face the base 1. 2, three guide members 3 fixed between the base 1 and the upper plate 2 and extending in the ascending / descending direction Z, a cylindrical cam member 5 supported by the base 1 via a rotary support 4, a cam An annular follower member 6 arranged coaxially with the cam member 5 around the member 5, a disk-shaped mounting plate 8 fixed to the follower member 6 via three support members 7, a cam member 5
Is provided with a driving means 9 for exerting a rotational driving force. Here, by the cam member 5, the follower member 6 (and the cam follower 12 described later), the drive means 9, the guide member 3, and the like,
An elevating mechanism for elevating the placing plate 8 is formed.

【0017】ベース1と上板2との外縁部には、図1及
び図3(b)に示すように、内部を囲繞するように形成
された円筒状のカバー10が設けられている。また、載
置板8の外縁部とフォロワ部材6の上面との間には、図
1及び図3(b)に示すように、内部を囲繞するように
形成された円筒状のカバー11が設けられている。そし
て、カバー11は、上板2の開口部2aの内縁に近接し
た状態で、フォロワ部材6と一体的に昇降し、図1に示
すように、載置板8が下降位置にある状態では、カバー
11がカバー10の内側に入れ子状に入り込んで収納さ
れ、図2に示すように、載置板8が上昇位置にある状態
では、カバー11がカバー10と協働して内部全体を囲
繞するようになっている。
At the outer edges of the base 1 and the upper plate 2, as shown in FIGS. 1 and 3 (b), a cylindrical cover 10 is formed so as to surround the inside. Further, between the outer edge portion of the mounting plate 8 and the upper surface of the follower member 6, a cylindrical cover 11 formed so as to surround the inside is provided as shown in FIGS. 1 and 3B. Has been. Then, the cover 11 moves up and down integrally with the follower member 6 in the state of being close to the inner edge of the opening 2a of the upper plate 2, and as shown in FIG. 1, when the mounting plate 8 is in the lowered position, When the cover 11 is nested inside the cover 10 and accommodated therein, and as shown in FIG. 2, the mounting plate 8 is in the raised position, the cover 11 cooperates with the cover 10 to surround the entire interior. It is like this.

【0018】カム部材5は、図1及び図2に示すよう
に、回転支持体4によって、昇降方向Zに伸長する軸心
CL回りに回動自在に支持されており、その外周面にお
いて螺旋状のカム溝5aが形成されている。カム溝5a
は、矩形形状の断面をなすように形成されている。ま
た、カム部材5の下端部には、リングギヤ5bが一体的
に形成されている。尚、回転支持体4は、カム部材5を
スラスト方向及びラジアル方向において位置決めしつつ
回動自在に支持する軸受等である。ここで、カム部材5
は、中空の円筒状に形成されているため、カム溝5aが
形成される外周面の半径を比較的大きくしても、軽量化
を行なえる。そして、その内部空間には、例えば、半導
体製造プロセスのクリーンルーム等で使用する際に必要
な種々の電線ケーブル、塵吸引ホース等を収容すること
ができ、構造を簡素化できる。
As shown in FIGS. 1 and 2, the cam member 5 is supported by a rotary support 4 so as to be rotatable about an axis CL extending in the ascending / descending direction Z, and has a spiral shape on its outer peripheral surface. Is formed with a cam groove 5a. Cam groove 5a
Are formed to have a rectangular cross section. A ring gear 5b is integrally formed at the lower end of the cam member 5. The rotary support 4 is a bearing or the like for rotatably supporting the cam member 5 while positioning it in the thrust direction and the radial direction. Here, the cam member 5
Is formed in a hollow cylindrical shape, the weight can be reduced even if the radius of the outer peripheral surface in which the cam groove 5a is formed is relatively large. Then, for example, various electric cables and dust suction hoses necessary for use in a clean room of a semiconductor manufacturing process can be accommodated in the internal space, and the structure can be simplified.

【0019】フォロワ部材6は、カム部材5の周りを取
り囲むように環状に形成され、軸受ブッシュ3aを介し
て、ガイド部材3により昇降方向Zに移動自在にかつカ
ム部材5と同軸に配置されている。フォロワ部材6の内
縁部には、軸心CL周りの中心角θが120度となる間
隔で配置された3つのカムフォロワ12が設けられてい
る。カムフォロワ12は、円柱状のローラからなり、カ
ム部材5のカム溝5aに挿入されて、カム溝5aの上下
面(溝側面)に係合して転動するようになっている。
The follower member 6 is formed in an annular shape so as to surround the cam member 5, is movably in the up-and-down direction Z by the guide member 3 via the bearing bush 3a, and is arranged coaxially with the cam member 5. There is. The inner edge of the follower member 6 is provided with three cam followers 12 arranged at intervals such that the central angle θ around the axis CL is 120 degrees. The cam follower 12 is composed of a cylindrical roller, is inserted into the cam groove 5a of the cam member 5, and is adapted to engage with the upper and lower surfaces (groove side surfaces) of the cam groove 5a to roll.

【0020】ここで、カムフォロワ12とカム溝5aと
は、図4(a)に示すように、カム部材5の径方向D
(昇降方向Zと直交する方向)において、所定の間隙C
をおいて係合するように配置されている。所定の間隔C
とは、軸心CLと直交する径方向Dにおいて、カム部材
5とフォロワ部材6との間に相対的な移動が生じた場合
でも、カム溝5aの溝底面とカムフォロワ12の先端面
とが接触しない寸法を隔てた状態である。このように間
隙Cを設けることで、カム部材5が回転駆動される際
に、回転駆動力等の関係により径方向Dに若干偏倚した
場合でも、その偏倚挙動はカムフォロワ12に伝達され
ず、昇降方向Zへのカム作用のみが伝達される。
Here, the cam follower 12 and the cam groove 5a are arranged in the radial direction D of the cam member 5 as shown in FIG. 4 (a).
In (the direction orthogonal to the ascending / descending direction Z), a predetermined gap C
Are arranged so as to be engaged with each other. Predetermined interval C
In the radial direction D orthogonal to the axis CL, the bottom surface of the cam groove 5a and the tip end surface of the cam follower 12 contact each other even when the cam member 5 and the follower member 6 move relative to each other. It is in a state where the dimensions are separated. By providing the gap C in this way, when the cam member 5 is rotationally driven, even if the cam member 5 is slightly deviated in the radial direction D due to the rotational driving force or the like, the deviating behavior is not transmitted to the cam follower 12 and the ascending / descending movement is performed. Only the cam action in direction Z is transmitted.

【0021】したがって、径方向Dにガイド部材3を押
圧する力が発生することはなく、摺動面でのスティック
(かじり)等を防止でき、円滑な昇降動作が得られる。
また、3つのカムフォロワ12が等間隔(120度)で
配置されているため、カム部材5とフォロワ部材6との
間には、カム作用による均一なリフト力が作用し、カム
部材5あるいはフォロワ部材6の傾き、偏倚等を極力防
止することができる。尚、カムフォロワとしては、図4
(b)に示すように、中央部分が膨らむようにクラウニ
ングを設けたローラ形状をなすカムフォロワ12´を用
いてもよい。この場合、片当たりを防止でき、ある程度
の傾斜も許容できるため、より円滑な昇降動作を得るこ
とができる。
Therefore, no force is generated to press the guide member 3 in the radial direction D, sticking (gnawing) or the like on the sliding surface can be prevented, and a smooth lifting operation can be obtained.
Further, since the three cam followers 12 are arranged at equal intervals (120 degrees), a uniform lift force due to the cam action acts between the cam member 5 and the follower member 6, and the cam member 5 or the follower member 6 is acted. It is possible to prevent the inclination, deviation, etc. of 6 as much as possible. As a cam follower, see FIG.
As shown in (b), it is also possible to use a cam follower 12 'in the shape of a roller provided with crowning so that the central portion swells. In this case, one-sided contact can be prevented and a certain degree of inclination can be allowed, so that a smoother lifting operation can be obtained.

【0022】3本の支持部材7は、図3(b)に示すよ
うに、軸心CL周りの中心角θが120度となる等間隔
に配置され、図1及び図2に示すように、フォロワ部材
6に対して載置板8を固定している。このように、載置
板8が3本の支持部材7により支持されているため、構
造の簡略化を図りつつ、載置板8を堅固に支持してその
傾き等を防止できる。載置板8は、円板状に形成されて
その上面に被昇降体を載置できるようになっている。
尚、載置板8に電線ケーブル、塵吸引ホース等を通す開
口部を設け、載置板8の上にさらに担持部材等を設け
て、その担持部材に被昇降体を載置するように形成して
もよい。
As shown in FIG. 3 (b), the three support members 7 are arranged at equal intervals such that the central angle θ around the axis CL is 120 degrees, and as shown in FIGS. The mounting plate 8 is fixed to the follower member 6. Since the mounting plate 8 is thus supported by the three support members 7, the mounting plate 8 can be firmly supported and its inclination can be prevented while simplifying the structure. The mounting plate 8 is formed in a disc shape so that the lifted body can be mounted on the upper surface thereof.
It should be noted that the mounting plate 8 is provided with an opening through which an electric wire cable, a dust suction hose and the like are passed, and a supporting member or the like is further provided on the mounting plate 8 so that the lifted body is mounted on the supporting member. You may.

【0023】駆動手段9は、図1、図2、図3(a)に
示すように、カム部材5のリングギヤ5bに噛合するウ
ォームギヤ9a、ウォームギヤ9aを回転させるモータ
9b等により形成されている。したがって、モータ9b
が回転すると、ウォームギヤ9aが回転してリングギヤ
5b及びカム部材5を回転させる。
As shown in FIGS. 1, 2 and 3 (a), the driving means 9 is composed of a worm gear 9a meshing with the ring gear 5b of the cam member 5, a motor 9b for rotating the worm gear 9a, and the like. Therefore, the motor 9b
When is rotated, the worm gear 9a is rotated to rotate the ring gear 5b and the cam member 5.

【0024】次に、この昇降装置の動作について説明す
る。先ず、図1に示すように、載置板8が下降位置にあ
る状態から、モータ9bが回転して、カム部材5がRU
方向に回転し始めると、カム溝5a内をカムフォロワ1
2が転動して、フォロワ部材6はガイド部材3に案内さ
れつつ上昇し始める。と同時に、フォロワ部材6に一体
的に固定された載置板8も上昇し始める。
Next, the operation of this lifting device will be described. First, as shown in FIG. 1, from the state where the mounting plate 8 is in the lowered position, the motor 9b rotates and the cam member 5 moves to the RU position.
When it starts rotating in the direction, the cam follower 1 moves in the cam groove 5a.
2 rolls, and the follower member 6 begins to rise while being guided by the guide member 3. At the same time, the mounting plate 8 integrally fixed to the follower member 6 also starts to rise.

【0025】この上昇動作に際して、回転支持体4のガ
タ等により、仮にカム部材5が軸ずれ等を生じても、径
方向Dにおいてカム溝5aとカムフォロワ12とは接触
しないため、径方向Dにおいて無理な力がガイド部材3
に作用することもない。これにより、摺動面でのスティ
ック、騒音、振動等を招くことなく、フォロワ部材6
(及び載置板8)は円滑に上昇し、被昇降体(不図示)
は、図2に示すように、最大上昇位置まで円滑に持ち上
げられる。
In this ascending operation, even if the cam member 5 is displaced due to backlash of the rotary support 4 or the like, the cam groove 5a and the cam follower 12 do not come into contact with each other in the radial direction D. Unreasonable force is the guide member 3
It does not act on. As a result, the follower member 6 does not cause sticking, noise, vibration, etc. on the sliding surface.
(And the mounting plate 8) rises smoothly, and an object to be lifted (not shown)
Is smoothly lifted to the maximum raised position, as shown in FIG.

【0026】一方、図2に示すように、載置板8が最大
上昇位置にある状態から、モータ9bが逆向きに回転し
て、カム部材5がRD方向に回転し始めると、カム溝5
a内をカムフォロワ12が逆向きに転動して、フォロワ
部材6はガイド部材3に案内されつつ下降し始める。と
同時に、載置板8も下降し始める。
On the other hand, as shown in FIG. 2, when the mounting plate 8 is at the maximum raised position, the motor 9b rotates in the opposite direction and the cam member 5 starts rotating in the RD direction.
The cam follower 12 rolls in the reverse direction in a, and the follower member 6 begins to descend while being guided by the guide member 3. At the same time, the mounting plate 8 also begins to descend.

【0027】この下降動作に際して、回転支持体4のガ
タ等により、仮にカム部材5が軸ずれ等を生じても、前
述同様にカム溝5aとカムフォロワ12とは接触しない
ため、ガイド部材3の摺動面でのスティック、騒音、振
動等を招くことなく、フォロワ部材6(及び載置板8)
は円滑に下降し、図1に示す下降位置まで円滑に下降す
る。以上のように、昇降動作が全体に亘って円滑に行な
われ、騒音、振動等が抑制ないし防止される。
In this descending operation, even if the cam member 5 is misaligned due to backlash of the rotary support 4 or the like, the cam groove 5a and the cam follower 12 do not come into contact with each other in the same manner as described above, so that the guide member 3 slides. The follower member 6 (and the mounting plate 8) without causing stick, noise, vibration, etc. on the moving surface.
Smoothly descends to the descending position shown in FIG. As described above, the lifting operation is smoothly performed throughout, and noise, vibration, etc. are suppressed or prevented.

【0028】この実施形態においては、カム部材5を回
転させてフォロワ部材6及び載置板8を昇降させる構成
としたが、逆に、カム部材5に載置板8を固定すると共
にガイド部材により昇降方向Zに移動自在に案内し、駆
動手段によりフォロワ部材6を回転させることで、カム
部材5及び載置板8を昇降させる構成としてもよい。ま
た、カム溝5aは、カム部材5の外周面に形成したが、
カム部材の内周面に形成し、この内周面に形成したカム
溝と係合するようにカムフォロワを配置してもよい。
In this embodiment, the cam member 5 is rotated to raise and lower the follower member 6 and the mounting plate 8. However, conversely, the mounting plate 8 is fixed to the cam member 5 and the guide member is used. The cam member 5 and the mounting plate 8 may be moved up and down by movably guiding in the up-and-down direction Z and rotating the follower member 6 by the drive means. Further, although the cam groove 5a is formed on the outer peripheral surface of the cam member 5,
The cam follower may be formed on the inner peripheral surface of the cam member, and the cam follower may be arranged to engage with the cam groove formed on the inner peripheral surface.

【0029】図5は、本発明に係る昇降装置の他の実施
形態を示すものであり、前述の実施形態におけるカム部
材5及びフォロワ部材6並びにカムフォロワ12に替え
て、多条雄ねじが形成された円筒状の雄ねじ部材及び多
条雌ねじが形成された環状の雌ねじ部材を採用した以外
は、前述の実施形態と同一の構成をなすものである。
FIG. 5 shows another embodiment of the lifting device according to the present invention. In place of the cam member 5, the follower member 6 and the cam follower 12 in the above-mentioned embodiment, a multiple thread male screw is formed. The configuration is the same as that of the above-described embodiment, except that a cylindrical male screw member and an annular female screw member on which multiple threads are formed are adopted.

【0030】すなわち、この昇降装置においては、前述
のカム部材5の替わりに円筒状の雄ねじ部材5´、フォ
ロワ部材6の替わりに環状の雌ねじ部材6´が採用さ
れ、載置板8は支持部材7を介して雌ねじ部材6´に固
定されている。雄ねじ部材5´は、カム部材5と同様
に、回転支持体4によって、昇降方向Zに伸長する軸心
CL回りに回動自在に支持されており、その外周面にお
いて多条(ここでは、3条の)雄ねじ5a´が形成され
ている。雄ねじ5a´は、矩形形状の断面をなすように
(四角ねじに)形成されている。
That is, in this lifting device, a cylindrical male screw member 5'is used instead of the cam member 5 and an annular female screw member 6'is used instead of the follower member 6, and the mounting plate 8 is a supporting member. It is fixed to the female screw member 6 ′ via 7. Similar to the cam member 5, the male screw member 5'is supported by the rotation support 4 so as to be rotatable about an axis CL extending in the up-and-down direction Z, and has multiple threads (here, 3) on its outer peripheral surface. A male thread 5a 'is formed. The male screw 5a 'is formed to have a rectangular cross section (square screw).

【0031】ここで、雄ねじ部材5´は、中空の円筒状
に形成されているため、雄ねじ5a´と雌ねじ6a´と
が螺合する半径(軸心からの距離)を大きく設定でき、
中実で小径のリードスクリュウー等に比べて、構造の簡
略化を図りつつ、安定したねじ送り作用を得ることがで
き、載置板8の傾き、騒音、振動等を防止でき、円滑な
昇降動作が得られる。また、中空であるが故に、雄ねじ
5a´が形成される外周面の半径を比較的大きくして
も、軽量化を行なえる。そして、その内部空間には、例
えば、半導体製造プロセスのクリーンルーム等で使用す
る際に必要な種々の電線ケーブル、塵吸引ホース等を収
容することができ、構造を簡素化できる。
Since the male screw member 5'is formed in a hollow cylindrical shape, the radius (distance from the axial center) at which the male screw 5a 'and the female screw 6a' are screwed can be set large.
Compared to solid, small-diameter lead screws, etc., while simplifying the structure, it is possible to obtain a stable screw feed action, prevent tilting of the mounting plate 8, noise, vibration, etc., and smooth lifting operation. Is obtained. Further, since it is hollow, the weight can be reduced even if the radius of the outer peripheral surface on which the male screw 5a 'is formed is relatively large. Then, for example, various electric cables and dust suction hoses necessary for use in a clean room of a semiconductor manufacturing process can be accommodated in the internal space, and the structure can be simplified.

【0032】雌ねじ部材6´は、雄ねじ部材5´の周り
を取り囲むように環状に形成され、ガイド部材3により
昇降方向Zに移動自在にかつ雄ねじ部材5´と同軸に配
置されている。雌ねじ部材6´の内縁部には、多条(こ
こでは、3条の)雌ねじ6a´が形成されている。雌ね
じ6a´は、矩形形状の断面をなすように(四角ねじ
に)形成されている。
The female screw member 6'is formed in an annular shape so as to surround the male screw member 5 ', is movable in the up-and-down direction Z by the guide member 3, and is arranged coaxially with the male screw member 5'. Multiple threads (here, three threads) female threads 6a 'are formed on the inner edge portion of the female thread member 6'. The female screw 6a 'is formed so as to have a rectangular cross section (a square screw).

【0033】ここで、雌ねじ6a´と雄ねじ5a´と
は、図5に示すように、雄ねじ部材5´の径方向D(昇
降方向Zと直交する方向)において、所定の間隙Cをお
いて係合するように配置されている。所定の間隔Cと
は、前述同様に、軸心CLと直交する径方向Dにおい
て、雄ねじ部材5´と雌ねじ部材6´との間に相対的な
移動が生じた場合でも、雄ねじ5a´の山及び谷と雌ね
じ6a´の谷及び山とが接触しない寸法を隔てた状態で
ある。このように間隙Cを設けることで、雄ねじ部材5
´が回転駆動される際に、回転駆動力等の関係により径
方向Dに若干偏倚した場合でも、その偏倚挙動は雌ねじ
部材6´に伝達されず、昇降方向Zへのねじ送り作用の
みが伝達される。したがって、前述同様に、径方向Dに
ガイド部材3を押圧する力が発生することはなく、ガイ
ド部材3の摺動面でスティック(かじり)等が発生する
のを防止でき、円滑な昇降動作が得られる。
Here, as shown in FIG. 5, the female screw 6a 'and the male screw 5a' are engaged with each other with a predetermined gap C in the radial direction D of the male screw member 5 '(direction orthogonal to the ascending / descending direction Z). It is arranged to meet. Similarly to the above, the predetermined interval C means that in the radial direction D orthogonal to the axial center CL, even when a relative movement occurs between the male screw member 5 ′ and the female screw member 6 ′, the crest of the male screw 5a ′. And the valleys and the valleys and peaks of the internal thread 6a 'are separated from each other by a dimension such that they do not come into contact with each other. By providing the gap C in this way, the male screw member 5
When ′ ′ is rotationally driven, even if it is slightly biased in the radial direction D due to the rotational driving force or the like, the biasing behavior is not transmitted to the female screw member 6 ′, and only the screw feeding action in the vertical direction Z is transmitted. To be done. Therefore, similarly to the above, the force pressing the guide member 3 in the radial direction D is not generated, and it is possible to prevent sticks (gnails) and the like from being generated on the sliding surface of the guide member 3 and to perform a smooth lifting operation. can get.

【0034】この昇降装置の動作については、前述の装
置と基本的に同一であるが、多条ねじ(多条雄ねじ5a
´、多条雌ねじ6a´)を採用しているため、モータ9
bの回転速度を上げなくても、昇降動作を高速化でき
る。すなわち、N本のねじ山が巻きついている多条雄ね
じ5aが形成された雄ねじ部材5´が1回転するとき、
ねじ山の進む距離(リード)Lは、ねじ山のピッチをP
とすると、L=N×P、となる。したがって、1条ねじ
の場合に比べて、N倍(3条ねじの場合、3倍)の昇降
速度を得ることができる。これにより、モータ9bの回
転速度を上げることなく、昇降動作の高速化を図ること
ができ、又、回転駆動力に伴なう振動、騒音等を抑制な
いしは防止できる。
The operation of this elevating device is basically the same as that of the above-mentioned device, but a multi-start screw (multi-start male screw 5a) is used.
', Multi-thread female screw 6a')
The elevating operation can be speeded up without increasing the rotation speed of b. That is, when the male screw member 5'formed with the multi-threaded male screw 5a around which N threads are wound makes one revolution,
For the distance (lead) L that the screw thread travels, set the pitch of the screw thread to P
Then, L = N × P. Therefore, it is possible to obtain an ascending / descending speed N times (three times in the case of a triple thread) as compared with the case of the single thread. As a result, the raising / lowering operation can be speeded up without increasing the rotation speed of the motor 9b, and the vibration, noise, etc. associated with the rotational driving force can be suppressed or prevented.

【0035】図6ないし図9は、本発明に係る昇降装置
の他の実施形態を示すものであり、図6は縮んだ下降位
置にある状態を示す縦断面図、図7は伸びた上昇位置に
ある状態を示す縦断面図、図8(a),(b)は平面図
及び図7中のA2−A2における横断面図、図9
(a),(b)は図7中のA3−A3及びA4−A4に
おける横断面図である。尚、前述の実施形態と同一の構
成については、同一の符号を付してその説明を省略す
る。
6 to 9 show another embodiment of the lifting device according to the present invention. FIG. 6 is a longitudinal sectional view showing a state in which the lifting device is in a contracted lowered position, and FIG. 7 is an extended raised position. 8 is a vertical cross-sectional view showing the state of FIG. 8, FIGS. 8A and 8B are plan views, and a cross-sectional view taken along line A2-A2 in FIG.
7A and 7B are cross-sectional views taken along lines A3-A3 and A4-A4 in FIG. The same components as those in the above-described embodiment are designated by the same reference numerals and the description thereof will be omitted.

【0036】この昇降装置は、図6ないし図9に示すよ
うに、中央に開口部を有する円板状のベース1、ベース
1と対向して配置され開口部2aを有する円板状の上板
2、ベース1と上板2との間に固定され昇降方向Zに伸
長する3本の第1ガイド部材3、ベース1に対して回転
支持体4を介して支持された円筒状の第1カム部材5、
第1カム部材5の周りにおいて第1カム部材5と同軸に
配置された環状の第1フォロワ部材6、第1フォロワ部
材6に対して3本の支持部材7を介して固定された環状
の可動ベース20、可動ベース20の内側において回転
支持体21を介して回動自在に支持された環状の第2フ
ォロワ部材22、第2フォロワ部材22の内側に配置さ
れた第2カム部材23、第2カム部材23を昇降方向Z
に案内する3本の第2ガイド部材24、第2フォロワ部
材22と第1カム部材5とが一体的に回転するように両
者の相対的な回転を規制して連結する3本の連結シャフ
ト25、第1カム部材5に回転駆動力を及ぼす駆動手段
9等を備えている。
As shown in FIGS. 6 to 9, this lifting device has a disk-shaped base 1 having an opening at the center thereof, and a disk-shaped upper plate having an opening 2a disposed so as to face the base 1. 2, three first guide members 3 fixed between the base 1 and the upper plate 2 and extending in the ascending / descending direction Z, and a cylindrical first cam supported by the base 1 via a rotary support 4. Member 5,
An annular first follower member 6 arranged coaxially with the first cam member 5 around the first cam member 5, and an annular movable member fixed to the first follower member 6 via three support members 7. The base 20, the annular second follower member 22 rotatably supported inside the movable base 20 via the rotary support 21, the second cam member 23 disposed inside the second follower member 22, and the second follower member 22. Move the cam member 23 up and down Z
The three connecting shafts 25 that restrict the relative rotation of the two second guide members 24, the second follower member 22, and the first cam member 5 so that they rotate integrally with each other, and connect the two. Drive means 9 for exerting a rotational drive force on the first cam member 5 are provided.

【0037】ここでは、第1カム部材5、第1フォロワ
部材6(及び第1カムフォロワ12)、第2フォロワ部
材22(及び後述する第2カムフォロワ28)、第2カ
ム部材23、駆動手段9、第1ガイド部材3、第2ガイ
ド部材24等により、載置板8を昇降させる昇降機構が
形成されている。
Here, the first cam member 5, the first follower member 6 (and the first cam follower 12), the second follower member 22 (and the second cam follower 28 described later), the second cam member 23, the driving means 9, The first guide member 3, the second guide member 24, and the like form an elevating mechanism for elevating the placing plate 8.

【0038】第1カム部材5の上端部には、図7及び図
9(a)に示すように、環状の上板5cが固着されてい
る。上板5cには、開口部5c´が設けられており、第
2カム部材23が開口部5c´を通過できるようになっ
ている。また、上板5cには、軸心CL周りの中心角θ
が120度となる間隔で3つの軸受ブッシュ25aが配
置されている。そして、3つの連結シャフト25が軸受
ブッシュ25aに案内されて昇降方向Zに移動自在にな
っている。
An annular upper plate 5c is fixed to the upper end of the first cam member 5, as shown in FIGS. 7 and 9A. The upper plate 5c is provided with an opening 5c 'so that the second cam member 23 can pass through the opening 5c'. Further, the upper plate 5c has a central angle θ around the axis CL.
The three bearing bushes 25a are arranged at intervals of 120 degrees. The three connecting shafts 25 are guided by the bearing bush 25a so as to be movable in the vertical direction Z.

【0039】3つの連結シャフト25は、その下端部が
リング部材26に固着され、その上端部が第2フォロワ
部材22の下面に固着されている。すなわち、3つの連
結シャフト25は、第2フォロワ部材22の自由な回転
を規制して第1カム部材5と一体的に回転するように連
結すると共に、第2フォロワ部材22を昇降方向Zに移
動自在に案内する。
The lower ends of the three connecting shafts 25 are fixed to the ring member 26, and the upper ends thereof are fixed to the lower surface of the second follower member 22. That is, the three connecting shafts 25 connect the second follower member 22 so as to rotate integrally with the first cam member 5 by restricting the free rotation of the second follower member 22, and move the second follower member 22 in the vertical direction Z. Guide freely.

【0040】第2カム部材23は、図6、図7、図9
(b)に示すように、第1カム部材5の内側において同
軸にかつ昇降方向Zに出没自在に配置され、その外周面
において螺旋状の第2カム溝23aが形成されている。
第2カム溝23aは、矩形形状の断面をなすように形成
されている。第2カム部材23の上端部は、載置板8に
固着されている。ここで、第2カム部材23は、中空の
円筒状に形成されているため、第2カム溝23aが形成
される外周面の半径を比較的大きくしても、軽量化を行
なえる。そして、その内部空間には、例えば、半導体製
造プロセスのクリーンルーム等で使用する際に必要な種
々の電線ケーブル、塵吸引ホース等を収容することがで
き、構造を簡素化できる。
The second cam member 23 has a structure similar to that shown in FIGS.
As shown in (b), it is arranged coaxially inside the first cam member 5 so as to be retractable in the ascending / descending direction Z, and a spiral second cam groove 23a is formed on the outer peripheral surface thereof.
The second cam groove 23a is formed to have a rectangular cross section. The upper end of the second cam member 23 is fixed to the mounting plate 8. Here, since the second cam member 23 is formed in a hollow cylindrical shape, the weight can be reduced even if the radius of the outer peripheral surface in which the second cam groove 23a is formed is relatively large. Then, for example, various electric cables and dust suction hoses necessary for use in a clean room of a semiconductor manufacturing process can be accommodated in the internal space, and the structure can be simplified.

【0041】可動ベース20は、図7及び図9(b)に
示すように、第1フォロワ部材6の上面に固着された円
筒状のカバー11´よりも小さい外径をなす環状に形成
されており、第1カム部材5の周りに位置する領域に
は、軸心CL周りの中心角θが120度となる間隔で3
つの軸受ブッシュ24aが配置されている。そして、3
つの第2ガイド部材24が軸受ブッシュ24aに案内さ
れて昇降方向Zに移動自在になっている。
As shown in FIGS. 7 and 9B, the movable base 20 is formed in an annular shape having an outer diameter smaller than that of the cylindrical cover 11 'fixed to the upper surface of the first follower member 6. In the area located around the first cam member 5, the central angle θ about the axis CL is 3 at intervals of 120 degrees.
One bearing bush 24a is arranged. And 3
The two second guide members 24 are guided by the bearing bush 24a and are movable in the up-and-down direction Z.

【0042】3つの第2ガイド部材24は、図6及び図
7に示すように、その下端部が第1カム部材5よりも大
きい内径をもつリング部材27に固着され、その上端部
が載置板8の下面に固着されている。すなわち、第2ガ
イド部材24は、載置板8及び第2カム部材23を昇降
方向Zに案内する。載置板8の外縁部には、図6及び図
7に示すように、円筒状のカバー29が固着されてお
り、カバー11´に対して出没自在となっている。すな
わち、カバー29とカバー11´とは、載置板8が上昇
させられた状態で、協働して内部を囲繞するように形成
されている。
As shown in FIGS. 6 and 7, the lower ends of the three second guide members 24 are fixed to the ring member 27 having an inner diameter larger than that of the first cam member 5, and the upper ends thereof are placed. It is fixed to the lower surface of the plate 8. That is, the second guide member 24 guides the mounting plate 8 and the second cam member 23 in the up-and-down direction Z. As shown in FIGS. 6 and 7, a cylindrical cover 29 is fixed to the outer edge portion of the mounting plate 8 so that the mounting plate 8 can be retracted from the cover 11 '. That is, the cover 29 and the cover 11 ′ are formed so as to cooperate with each other to surround the inside of the mounting plate 8 in the raised state.

【0043】第2フォロワ部材22は、図6、図7、図
9(b)に示すように、第2カム部材23の周りを取り
囲むように環状に形成され、回転支持体21を介して、
可動ベース20に対し回動自在に支持されている。ま
た、第2フォロワ部材22は、連結シャフト25及び第
1ガイド部材3により、昇降方向Zに移動自在にかつ第
2カム部材23と同軸に配置されている。尚、回転支持
体21は、第2フォロワ部材22をスラスト方向及びラ
ジアル方向において位置決めしつつ回動自在に支持する
軸受等である。第2フォロワ部材22の内縁部には、図
9(b)に示すように、軸心CL周りの中心角θが12
0度となる間隔で配置された3つの第2カムフォロワ2
8が設けられている。3つの第2カムフォロワ28は、
円柱状のローラからなり、第2カム部材23の第2カム
溝23aに挿入されて、第2カム溝23aの上下面(溝
側面)に係合して転動するようになっている。
As shown in FIGS. 6, 7 and 9B, the second follower member 22 is formed in an annular shape so as to surround the second cam member 23, and via the rotary support body 21,
It is rotatably supported by the movable base 20. The second follower member 22 is arranged so as to be movable in the up-and-down direction Z and coaxial with the second cam member 23 by the connecting shaft 25 and the first guide member 3. The rotary support 21 is, for example, a bearing that rotatably supports the second follower member 22 while positioning the second follower member 22 in the thrust direction and the radial direction. At the inner edge of the second follower member 22, as shown in FIG. 9B, the central angle θ around the axis CL is 12
Three second cam followers 2 arranged at intervals of 0 degree
8 are provided. The three second cam followers 28 are
It is composed of a cylindrical roller, is inserted into the second cam groove 23a of the second cam member 23, and is adapted to roll by engaging with the upper and lower surfaces (groove side surfaces) of the second cam groove 23a.

【0044】ここで、第2カムフォロワ28と第2カム
溝23aとは、前述の図4に示す場合と同様に、第2カ
ム部材23の径方向D(昇降方向Zと直交する方向)に
おいて、所定の間隙Cをおいて係合するように配置され
ている。所定の間隔Cとは、軸心CLと直交する径方向
Dにおいて、第2カム部材23と第2フォロワ部材22
との間に相対的な移動が生じた場合でも、第2カム溝2
3aの溝底面と第2カムフォロワ28の先端面とが接触
しない寸法を隔てた状態である。このように間隙Cを設
けることで、第2フォロワ部材22が回転する際に、回
転駆動力の伝達形態等により第2フォロワ部材22が径
方向Dに若干偏倚した場合でも、その偏倚挙動は第2カ
ム部材23に伝達されず、昇降方向Zへのカム作用のみ
が伝達される。
Here, the second cam follower 28 and the second cam groove 23a are arranged in the radial direction D of the second cam member 23 (direction orthogonal to the ascending / descending direction Z) as in the case shown in FIG. It is arranged so as to be engaged with a predetermined gap C. The predetermined interval C is the second cam member 23 and the second follower member 22 in the radial direction D orthogonal to the axis CL.
Even if a relative movement occurs between the second cam groove 2 and
The bottom surface of the groove 3a and the tip end surface of the second cam follower 28 are separated from each other by a dimension such that they do not contact each other. By providing the gap C in this way, when the second follower member 22 rotates, even if the second follower member 22 is slightly biased in the radial direction D due to the transmission form of the rotational drive force, the biasing behavior is It is not transmitted to the 2 cam member 23, but only the cam action in the up-and-down direction Z is transmitted.

【0045】したがって、第2ガイド部材24と軸受ブ
ッシュ24aとの間に押圧力が発生することはなく、第
2ガイド部材24の摺動面でスティック(かじり)等が
発生するのを防止でき、円滑な昇降動作が得られる。ま
た、3つの第2カムフォロワ28が等間隔(120度)
で配置されているため、第2カム部材23と第2フォロ
ワ部材22との間には、カム作用による均一なリフト力
が作用し、第2カム部材23あるいは第2フォロワ部材
22の傾き、偏倚等を極力防止することができる。尚、
第2カムフォロワ28としては、前述の図4(b)に示
すように、中央部分が膨らむようにクラウニングを設け
た樽状のローラに形成されていてもよい。この場合、片
当たりを防止でき、ある程度の傾斜も許容できるため、
より円滑な昇降動作を得ることができる。
Therefore, no pressing force is generated between the second guide member 24 and the bearing bush 24a, and it is possible to prevent a stick (galling) from occurring on the sliding surface of the second guide member 24. A smooth lifting operation can be obtained. Further, the three second cam followers 28 are equally spaced (120 degrees).
Since a uniform lift force is applied between the second cam member 23 and the second follower member 22 due to the cam action, the second cam member 23 or the second follower member 22 is tilted or biased. Etc. can be prevented as much as possible. still,
As the second cam follower 28, as shown in FIG. 4B, the second cam follower 28 may be formed as a barrel-shaped roller provided with crowning so that the central portion swells. In this case, it is possible to prevent one-sided contact and allow a certain degree of inclination,
A smoother lifting operation can be obtained.

【0046】次に、この昇降装置の動作について説明す
る。先ず、図6に示すように、載置板8が下降位置にあ
る状態から、モータ9bが回転して、第1カム部材5が
RU方向に回転し始めると、第1カム溝5a内を第1カ
ムフォロワ12が転動して、第1フォロワ部材6は第1
ガイド部材3に案内されつつ上昇し始める。と同時に、
第1フォロワ部材6に一体的に固定された可動ベース2
0及び可動ベース20に回動自在に支持された第2フォ
ロワ部材22も上昇し始める。
Next, the operation of this lifting device will be described. First, as shown in FIG. 6, when the mounting plate 8 is in the lowered position, the motor 9b rotates and the first cam member 5 starts rotating in the RU direction. The first cam follower 12 rolls, and the first follower member 6 moves to the first
It starts to rise while being guided by the guide member 3. At the same time
Movable base 2 integrally fixed to the first follower member 6
0 and the second follower member 22 rotatably supported by the movable base 20 also starts to rise.

【0047】また、第1カム部材5の回転に伴なって、
第2フォロワ部材22も一体的に同一方向RUに回転し
始める。第2フォロワ部材22の回転により、第2カム
溝23a内を第2カムフォロワ28が転動して、第2カ
ム部材23は第2ガイド部材24に案内されつつ上昇し
始める。と同時に、第2カム部材23に一体的に固定さ
れた載置板8も上昇し始める。
Further, as the first cam member 5 rotates,
The second follower member 22 also starts to rotate integrally in the same direction RU. The rotation of the second follower member 22 causes the second cam follower 28 to roll in the second cam groove 23a, and the second cam member 23 starts to move up while being guided by the second guide member 24. At the same time, the mounting plate 8 integrally fixed to the second cam member 23 also starts to rise.

【0048】この上昇動作に際して、回転支持体4のガ
タ等により、仮に第1カム部材5が軸ずれ等を生じて
も、径方向Dにおいて第1カム溝5aと第1カムフォロ
ワ12とは接触しないため、径方向Dにおいて無理な力
が第1ガイド部材3に作用することもない。また、第2
フォロワ部材22と第2カム部材23とが相対的に軸ず
れ等を生じても、径方向Dにおいて第2カム溝23aと
第2カムフォロワ28とは接触しないため、径方向Dに
おいて無理な力が第2ガイド部材24に作用することも
ない。これにより、摺動面でのスティック(かじり)、
騒音、振動等を招くことなく、第1フォロワ部材6及び
第2フォロワ部材22並びに載置板8は円滑に上昇し、
被昇降体(不図示)は、図7に示すように、最大上昇位
置まで円滑に持ち上げられる。
In this ascending operation, even if the first cam member 5 is misaligned due to backlash of the rotary support 4 or the like, the first cam groove 5a and the first cam follower 12 do not come into contact with each other in the radial direction D. Therefore, an unreasonable force does not act on the first guide member 3 in the radial direction D. Also, the second
Even if the follower member 22 and the second cam member 23 are relatively misaligned with each other, the second cam groove 23a and the second cam follower 28 do not come into contact with each other in the radial direction D, so that an unreasonable force is applied in the radial direction D. It does not act on the second guide member 24. As a result, sticking on the sliding surface,
The first follower member 6 and the second follower member 22 and the mounting plate 8 are smoothly raised without inviting noise and vibration,
The lifted body (not shown) is smoothly lifted to the maximum lifted position as shown in FIG. 7.

【0049】一方、図7に示すように、載置板8が最大
上昇位置にある状態から、モータ9bが逆向きに回転し
て、第1カム部材5がRD方向に回転し始めると、第1
カム溝5a内を第1カムフォロワ12が逆向きに転動し
て、第1フォロワ部材6は第1ガイド部材3に案内され
つつ下降し始める。と同時に、第1フォロワ部材6に一
体的に固定された可動ベース20及び可動ベース20に
回動自在に支持された第2フォロワ部材22も下降し始
める。
On the other hand, as shown in FIG. 7, when the mounting plate 8 is at the maximum raised position, the motor 9b rotates in the opposite direction and the first cam member 5 starts rotating in the RD direction. 1
The first cam follower 12 rolls in the opposite direction in the cam groove 5a, and the first follower member 6 begins to descend while being guided by the first guide member 3. At the same time, the movable base 20 integrally fixed to the first follower member 6 and the second follower member 22 rotatably supported by the movable base 20 also start descending.

【0050】また、第1カム部材5の逆向きの回転に伴
なって、第2フォロワ部材22も一体的に同一方向RD
に回転し始める。第2フォロワ部材22の回転により、
第2カム溝23a内を第2カムフォロワ28が転動し
て、第2カム部材23は第2ガイド部材24に案内され
つつ下降し始める。と同時に、第2カム部材23に一体
的に固定された載置板8も下降し始める。
Further, as the first cam member 5 rotates in the opposite direction, the second follower member 22 also integrally moves in the same direction RD.
Begins to rotate to. By the rotation of the second follower member 22,
The second cam follower 28 rolls in the second cam groove 23a, and the second cam member 23 begins to descend while being guided by the second guide member 24. At the same time, the mounting plate 8 integrally fixed to the second cam member 23 also starts to descend.

【0051】この下降動作に際して、回転支持体4のガ
タ等により、仮に第1カム部材5が軸ずれ等を生じて
も、径方向Dにおいて第1カム溝5aと第1カムフォロ
ワ12とは接触しないため、径方向Dにおいて無理な力
が第1ガイド部材3に作用することもなく、又、第2フ
ォロワ部材22と第2カム部材23とが相対的に軸ずれ
等を生じても、径方向Dにおいて第2カム溝23aと第
2カムフォロワ28とは接触しないため、径方向Dにお
いて無理な力が第2ガイド部材24に作用することもな
く、前述同様に、摺動面でのスティック(かじり)、騒
音、振動等を招くことなく、第1フォロワ部材6及び第
2フォロワ部材22並びに載置板8は、図6に示す下降
位置まで円滑に下降する。
In this descending operation, even if the first cam member 5 is misaligned due to backlash of the rotary support 4 or the like, the first cam groove 5a and the first cam follower 12 do not come into contact with each other in the radial direction D. Therefore, an unreasonable force does not act on the first guide member 3 in the radial direction D, and even if the second follower member 22 and the second cam member 23 are relatively misaligned with each other in the radial direction, Since the second cam groove 23a and the second cam follower 28 do not come into contact with each other at D, an unreasonable force does not act on the second guide member 24 in the radial direction D. ), The first follower member 6, the second follower member 22, and the mounting plate 8 smoothly descend to the descending position shown in FIG. 6 without causing noise, vibration, or the like.

【0052】以上のように、昇降動作が全体に亘って円
滑に行なわれ、騒音、振動等が抑制ないし防止される。
また、第2カム部材23を第1カム部材5に対して入れ
子状に出没自在に配置したことにより、図6に示すよう
に下降位置(収納状態)での装置の背丈を低くしつつ
も、図7に示すように最大上昇位置をより高く(すなわ
ち昇降ストロークをより長めに)設定することができ
る。
As described above, the lifting and lowering operation is smoothly performed throughout, and noise, vibration, etc. are suppressed or prevented.
Further, by disposing the second cam member 23 so as to be retractable in a telescopic manner with respect to the first cam member 5, as shown in FIG. 6, while reducing the height of the device in the lowered position (stored state), As shown in FIG. 7, the maximum rising position can be set higher (that is, the lifting stroke can be set longer).

【0053】さらに、他の実施形態として、図6ないし
図9に示す実施形態において、図5に示すような多条雄
ねじ及び多条雌ねじを備える構成を採用することができ
る。すなわち、前述の第1カム部材5に替えて外周面に
第1多条雄ねじ5a´が形成された第1雄ねじ部材5´
を採用し、第2カム部材23に替えて外周面に第2多条
雄ねじ23a´が形成された第2雄ねじ部材23´を採
用し、第1フォロワ部材6及び第1カムフォロワ12に
替えて第1多条雄ねじ5a´と螺合する第1多条雌ねじ
6a´が設けられた第1雌ねじ部材6´を採用し、第2
フォロワ部材22に替えて第2多条雄ねじ23a´と螺
合する第2多条雌ねじ22a´が設けられた第2雌ねじ
部材22´を採用した構成とすることができる。尚、雄
ねじ及び雌ねじの構成は、図5に示すものと実質的に同
一であるため、ここでの説明は省略する。
Further, as another embodiment, in the embodiment shown in FIG. 6 to FIG. 9, it is possible to adopt a structure having a multiple thread male screw and a multiple thread female screw as shown in FIG. That is, in place of the above-mentioned first cam member 5, a first male screw member 5'having a first multi-thread male screw 5a 'formed on the outer peripheral surface thereof.
In place of the second cam member 23, a second male screw member 23 ′ having a second multi-thread male screw 23 a ′ formed on the outer peripheral surface thereof is adopted, and the first follower member 6 and the first cam follower 12 are replaced by a second male screw member 23 ′. The first female thread member 6 ′ provided with the first multiple thread female screw 6a ′ screwed with the one multiple thread male screw 5a ′ is adopted.
The follower member 22 may be replaced with a second female screw member 22 'provided with a second multiple female screw 22a' screwed with the second male screw 23a '. Since the configurations of the male screw and the female screw are substantially the same as those shown in FIG. 5, description thereof will be omitted here.

【0054】この実施形態によれば、装置の背丈を低く
しつつ昇降ストロークをより長めに)設定できると共
に、モータ9bの回転速度を上げることなく、昇降動作
の高速化が図れ、回転駆動力に伴なう振動、騒音等をよ
り一層抑制ないし防止できる。
According to this embodiment, the height of the device can be set shorter and the lifting stroke can be set longer, and the lifting operation can be speeded up without increasing the rotation speed of the motor 9b. It is possible to further suppress or prevent accompanying vibration and noise.

【0055】以上述べた実施形態においては、駆動手段
として、電動によるギヤ駆動機構を示したが、モータ9
bを設けず、外部に突出するハンドルを設けて、このハ
ンドルを手動により回転させることで、ウォームギヤ9
aを回転させ、カム部材(第1カム部材)5に回転駆動
力を及ぼすように構成してもよい。また、他の駆動手段
として、ウォームギヤ9a及びモータ9bを設けず、カ
ム部材(第1カム部材)5をダイレクトモータにより直
接駆動する構成を採用してもよい。さらに、第1カム部
材5と第2カム部材23との二段構成までを示したが、
より多くの段数からなるカム部材を入れ子状に配置した
構成を採用してもよい。尚、カムフォロワ12,28に
ついては、それぞれ3つ設けた場合を示したが、これに
限定されない。
In the above-described embodiments, an electric gear drive mechanism is shown as the drive means.
By providing a handle protruding outside without providing b, and manually rotating the handle, the worm gear 9
It is also possible to rotate a and apply a rotational driving force to the cam member (first cam member) 5. Further, as another driving means, a structure in which the worm gear 9a and the motor 9b are not provided and the cam member (first cam member) 5 is directly driven by a direct motor may be adopted. Furthermore, although the two-stage configuration of the first cam member 5 and the second cam member 23 is shown,
You may employ | adopt the structure which arrange | positioned the cam member which consists of a larger number of steps in a nest shape. It should be noted that although the case where three cam followers 12 and 28 are provided is shown, the present invention is not limited to this.

【0056】[0056]

【発明の効果】以上述べたように、本発明の昇降装置に
よれば、昇降機構が、外周面又は内周面において螺旋状
のカム溝をもつ円筒状のカム部材及びカムフォロワを有
しカム部材と同軸に配置されたフォロワ部材を基本構成
として備えているため、カム溝とカムフォロワとが係合
する半径(軸心からの距離)を大きく設定でき、中実で
小径のリードスクリュウー等に比べて、軽量化、構造の
簡略化を行ないつつ、騒音、振動等を抑制ないし防止で
き、円滑な昇降動作を得ることができる。また、本発明
の昇降装置によれば、昇降機構が、外周面において多条
雄ねじが形成された円筒状の雄ねじ部材及び多条雄ねじ
と螺合する多条雌ねじが設けられた環状の雌ねじ部材を
基本構成として備えているため、多条雄ねじと多条雌ね
じとが螺合する半径(軸心からの距離)を大きく設定で
き、中実で小径のリードスクリュウー等に比べて、軽量
化、構造の簡略化を行ないつつ、騒音、振動等を抑制な
いし防止でき、円滑な昇降動作を得ることができる。ま
た、多条ねじ(多条雄ねじ及び多条雌ねじ)を採用した
ことにより、リードが大きくなるため、駆動手段による
回転速度を大きくすることなく、昇降動作を高速化でき
る。
As described above, according to the lifting device of the present invention, the lifting mechanism has the cam member having the cylindrical cam member and the cam follower having the spiral cam groove on the outer peripheral surface or the inner peripheral surface. Since a follower member arranged coaxially with is provided as a basic configuration, the radius (distance from the shaft center) at which the cam groove and the cam follower engage can be set to a large value, and compared to a solid small lead screw, etc. It is possible to suppress or prevent noise, vibration, and the like, while achieving weight reduction and simplification of the structure, and obtain a smooth lifting operation. According to the elevating device of the present invention, the elevating mechanism includes a cylindrical male screw member having a multi-threaded male screw formed on the outer peripheral surface thereof and an annular female screw member provided with the multi-threaded female screw screwed with the multi-threaded male screw. Since it is provided as a basic configuration, the radius (distance from the shaft center) at which the multiple-thread male screw and the multiple-thread female screw are screwed can be set to a large value, making it lighter and more lightweight than a solid, small-diameter lead screw or the like. While simplifying, noise, vibration, etc. can be suppressed or prevented, and a smooth lifting operation can be obtained. In addition, since the lead is enlarged by adopting the multi-start screw (multi-start male screw and multi-start female screw), the lifting operation can be speeded up without increasing the rotation speed of the driving means.

【図面の簡単な説明】[Brief description of drawings]

【図1】本発明に係る昇降装置の一実施形態を示すもの
であり、載置板が下降位置にある状態を示す縦断面図で
ある。
FIG. 1 is a vertical cross-sectional view showing an embodiment of a lifting device according to the present invention, showing a state in which a mounting plate is in a lowered position.

【図2】本発明に係る昇降装置の一実施形態を示すもの
であり、載置板が上昇位置にある状態を示す縦断面図で
ある。
FIG. 2 shows an embodiment of a lifting device according to the present invention, and is a vertical cross-sectional view showing a state in which a mounting plate is in a raised position.

【図3】(a)は図1に示す昇降装置の平面図であり、
(b)は図2中のA1−A1における横断面図である。
3 (a) is a plan view of the lifting device shown in FIG.
(B) is a cross-sectional view taken along line A1-A1 in FIG.

【図4】(a)は本発明に係る昇降装置の一実施形態に
おけるカム部材のカム溝とフォロワ部材のカムフォロワ
との関係を示す部分断面図であり、(b)はカムフォロ
ワの他の実施形態を示す部分断面図である。
FIG. 4A is a partial cross-sectional view showing the relationship between the cam groove of the cam member and the cam follower of the follower member in the one embodiment of the lifting device according to the present invention, and FIG. 4B is another embodiment of the cam follower. FIG.

【図5】本発明に係る昇降装置の他の実施形態を示すも
のであり、多条雄ねじが形成された円筒状の雄ねじ部材
及び多条雌ねじが形成された環状の雌ねじ部材を示す部
分断面図である。
FIG. 5 shows another embodiment of the lifting device according to the present invention, and is a partial cross-sectional view showing a cylindrical male screw member having multiple male threads formed therein and an annular female screw member having multiple female threads formed therein. Is.

【図6】本発明に係る昇降装置の他の実施形態を示すも
のであり、載置板が下降位置にある状態を示す縦断面図
である。
FIG. 6 shows another embodiment of the lifting device according to the present invention, and is a vertical cross-sectional view showing a state in which the mounting plate is in the lowered position.

【図7】本発明に係る昇降装置の他の実施形態を示すも
のであり、載置板が上昇位置にある状態を示す縦断面図
である。
FIG. 7 shows another embodiment of the lifting device according to the present invention, and is a vertical cross-sectional view showing a state in which the mounting plate is in a raised position.

【図8】(a)は図6に示す昇降装置の平面図であり、
(b)は図7中のA2−A2における横断面図である。
8 (a) is a plan view of the lifting device shown in FIG.
7B is a cross-sectional view taken along line A2-A2 in FIG. 7.

【図9】(a)は図7中のA3−A3における横断面図
であり、(b)は図7中のA4−A4における横断面図
である。
9A is a cross-sectional view taken along line A3-A3 in FIG. 7, and FIG. 9B is a cross-sectional view taken along line A4-A4 in FIG.

【符号の説明】[Explanation of symbols]

1 ベース 3 ガイド部材(第1ガイド部材) 4 回転支持体 5 カム部材(第1カム部材) 5´ 雄ねじ部材 5a カム溝(第1カム溝) 5a´ 多条雄ねじ(第1多条雄ねじ) 6 フォロワ部材(第1フォロワ部材) 6´ 雌ねじ部材(第1雌ねじ部材) 6a´ 多条雌ねじ(第1多条雌ねじ) 7 支持部材 8 載置板 9 駆動手段 9a ウォームギヤ 9b モータ 10,11,11´,29 カバー 12,12´ カムフォロワ(第1カムフォロワ) 20 可動ベース 21 回転支持体 22 第2フォロワ部材 22´ 第2雌ねじ部材 23 第2カム部材 23´ 第2雄ねじ部材 24 第2ガイド部材 25 連結シャフト 26,27 リング部材 28 第2カムフォロワ CL 軸心 Z 昇降方向 D 径方向 1 base 3 guide members (first guide member) 4 rotating support 5 Cam member (first cam member) 5'Male screw member 5a Cam groove (first cam groove) 5a 'Multi-thread male thread (1st multi-thread male thread) 6 Follower member (first follower member) 6'female screw member (first female screw member) 6a 'Multiple thread female thread (first multiple thread female thread) 7 Support member 8 Placement plate 9 Drive means 9a Worm gear 9b motor 10, 11, 11 ', 29 cover 12,12 'Cam follower (first cam follower) 20 movable base 21 Rotating support 22 Second follower member 22 'Second female screw member 23 Second Cam Member 23 'Second male screw member 24 Second guide member 25 connecting shaft 26,27 Ring member 28 Second Cam Follower CL axis center Z up and down direction D radial direction

Claims (6)

【特許請求の範囲】[Claims] 【請求項1】 被昇降体を載置する載置板と、前記載置
板を昇降させる昇降機構と、を備えた昇降装置であっ
て、 前記昇降機構は、外周面又は内周面において螺旋状のカ
ム溝が形成されかつ昇降方向に伸長する軸心をもつ円筒
状のカム部材と、前記カム溝に係合するカムフォロワが
設けられかつ前記カム部材と同軸に配置されたフォロワ
部材と、前記カム部材及びフォロワ部材の一方を前記軸
心回りに回転させる駆動力を及ぼす駆動手段と、前記カ
ム部材及びフォロワ部材の他方を昇降方向に案内するガ
イド部材と、を有し、 前記載置板は、前記カム部材及びフォロワ部材の他方に
固定されている、ことを特徴とする昇降装置。
1. An elevating device comprising a mounting plate for mounting an elevating / lowering body, and an elevating mechanism for elevating the mounting plate, wherein the elevating mechanism has a spiral on an outer peripheral surface or an inner peripheral surface. A cylindrical cam member having a shaft-shaped cam groove and having an axis extending in the up-and-down direction, a follower member provided with a cam follower engaging with the cam groove, and arranged coaxially with the cam member, A driving member that exerts a driving force that rotates one of the cam member and the follower member around the axis, and a guide member that guides the other of the cam member and the follower member in a vertical direction. An elevating device fixed to the other of the cam member and the follower member.
【請求項2】 前記カム部材は、外周面において螺旋状
の第1カム溝が形成されかつ前記軸心回りに回動自在に
支持された第1カム部材と、外周面において螺旋状の第
2カム溝が形成されかつ前記第1カム部材の内側におい
て同軸にかつ昇降方向に出没自在に配置された第2カム
部材とを含み、 前記フォロワ部材は、前記第1カム溝と係合する第1カ
ムフォロワが設けられかつ昇降可能な環状の第1フォロ
ワ部材と、前記第2カム溝に係合する第2カムフォロワ
が設けられると共に前記第1フォロワ部材と一体的に昇
降しかつ前記第1カム部材と一体的に回転する環状の第
2フォロワ部材とを含み、 前記ガイド部材は、前記第1フォロワ部材を昇降方向に
案内する第1ガイド部材と、前記第2カム部材を昇降方
向に案内する第2ガイド部材とを含み、 前記載置板は、前記第2カム部材に固定され、 前記駆動手段は、前記第1カム部材に回転駆動力を及ぼ
す、ことを特徴とする請求項1記載の昇降装置。
2. A first cam member having a spiral first cam groove formed on an outer peripheral surface thereof and rotatably supported about the axis, and a second spiral member on the outer peripheral surface of the cam member. A second cam member which is formed with a cam groove and is arranged coaxially inside the first cam member so as to be retractable in the vertical direction, wherein the follower member engages with the first cam groove. An annular first follower member provided with a cam follower and capable of ascending and descending, and a second cam follower engaging with the second cam groove are provided, and ascending and descending integrally with the first follower member and with the first cam member. An annular second follower member that rotates integrally; the guide member includes a first guide member that guides the first follower member in a vertical direction and a second guide member that guides the second cam member in a vertical direction. With a guide member Wherein, the mounting plate is fixed to the second cam member, said drive means, said first exerts a rotational driving force to the cam member, the lifting apparatus according to claim 1, wherein a.
【請求項3】 前記カム溝と前記カムフォロワとは、前
記カム部材の径方向において所定の間隙をおいて係合す
るように形成されている、ことを特徴とする請求項1又
は2に記載の昇降装置。
3. The cam groove and the cam follower are formed so as to be engaged with each other at a predetermined gap in the radial direction of the cam member, according to claim 1 or 2. lift device.
【請求項4】 被昇降体を載置する載置板と、前記載置
板を昇降させる昇降機構と、を備えた昇降装置であっ
て、 前記昇降機構は、外周面において多条雄ねじが形成され
かつ昇降方向に伸長する軸心をもつ円筒状の雄ねじ部材
と、前記多条雄ねじと螺合する多条雌ねじが設けられた
環状の雌ねじ部材と、前記雄ねじ部材及び雌ねじ部材の
一方を前記軸心回りに回転させる駆動力を及ぼす駆動手
段と、前記雄ねじ部材及び雌ねじ部材の他方を昇降方向
に案内するガイド部材と、を有し、 前記載置板は、前記雄ねじ部材及び雌ねじ部材の他方に
固定されている、ことを特徴とする昇降装置。
4. An elevating device comprising a mounting plate for mounting an elevating / lowering body, and an elevating mechanism for elevating the mounting plate, wherein the elevating mechanism has a multi-thread male screw formed on an outer peripheral surface thereof. And a cylindrical male screw member having an axis extending in the ascending and descending direction, an annular female screw member provided with a multiple female thread screwed with the multiple male screw, and one of the male screw member and the female screw member being the shaft. A driving means that exerts a driving force to rotate about the center, and a guide member that guides the other of the male screw member and the female screw member in a vertical direction, and the mounting plate is provided on the other of the male screw member and the female screw member. Lifting device characterized by being fixed.
【請求項5】 前記雄ねじ部材は、外周面において第1
多条雄ねじが形成されかつ前記軸心回りに回動自在に支
持された第1雄ねじ部材と、前記第1雄ねじ部材の内側
において同軸にかつ昇降方向に出没自在に配置されかつ
外周面において第2多条雄ねじが形成された第2雄ねじ
部材とを含み、 前記雌ねじ部材は、前記第1多条雄ねじと螺合する第1
多条雌ねじが設けられかつ昇降可能な第1雌ねじ部材
と、前記第2多条雄ねじと螺合する第2多条雌ねじが設
けられると共に前記第1雌ねじ部材と一体的に昇降しか
つ前記第1雄ねじ部材と一体的に回転する第2雌ねじ部
材とを含み、 前記ガイド部材は、前記第1雌ねじ部材を昇降方向に案
内する第1ガイド部材と、前記第2雄ねじ部材を昇降方
向に案内する第2ガイド部材とを含み、 前記載置板は、前記第2雄ねじ部材に固定され、 前記駆動手段は、前記第1雄ねじ部材に回転駆動力を及
ぼす、ことを特徴とする請求項4記載の昇降装置。
5. The external thread member has a first outer peripheral surface.
A first male screw member formed with a multi-threaded male screw and rotatably supported about the axis, and a first male screw member coaxially arranged inside the first male screw member so as to be retractable in the ascending and descending direction and a second member on the outer peripheral surface. A second male screw member having a multi-start male screw formed thereon, wherein the female screw member is screwed with the first multi-start male screw.
A first female screw member provided with a multiple-thread female screw and capable of moving up and down, and a second multiple-thread female screw screwed with the second multiple-thread male screw are provided, and the first female screw member moves up and down integrally with the first female screw member and A second female screw member that rotates integrally with the male screw member, wherein the guide member includes a first guide member that guides the first female screw member in a vertical direction and a second guide member that guides the second male screw member in a vertical direction. 5. The elevator according to claim 4, further comprising: two guide members, wherein the mounting plate is fixed to the second male screw member, and the drive unit exerts a rotational driving force on the first male screw member. apparatus.
【請求項6】 前記多条雄ねじと前記多条雌ねじとは、
前記雄ねじ部材の径方向において所定の間隙をおいて係
合するように形成されている、ことを特徴とする請求項
4又は5に記載の昇降装置。
6. The multi-start male screw and the multi-start female screw,
The lifting device according to claim 4, wherein the male screw member is formed so as to be engaged with a predetermined gap in the radial direction of the male screw member.
JP2002090160A 2002-03-28 2002-03-28 Elevating apparatus Withdrawn JP2003285994A (en)

Priority Applications (1)

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Application Number Priority Date Filing Date Title
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Publications (1)

Publication Number Publication Date
JP2003285994A true JP2003285994A (en) 2003-10-07

Family

ID=29235524

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Application Number Title Priority Date Filing Date
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Country Link
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Cited By (14)

* Cited by examiner, † Cited by third party
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KR100724252B1 (en) 2004-02-09 2007-05-31 주식회사 만도 Automatic high adjusted index device
JP2009127742A (en) * 2007-11-22 2009-06-11 Nidec Sankyo Corp Linear motor
JP2011219261A (en) * 2010-04-14 2011-11-04 Yoshida Tekkosho:Kk Elevating and lowering device and turn table which is freely elevated and lowered
KR101340832B1 (en) * 2012-02-15 2013-12-11 홍병기 A Level
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JP2015001288A (en) * 2013-06-17 2015-01-05 株式会社椿本チエイン Engagement chain drive device and movable body mobile device
CN104495688A (en) * 2014-12-26 2015-04-08 大连理工大学 Automatic lifting platform applied to motor homes
US9494202B2 (en) 2013-07-25 2016-11-15 Toyota Jidosha Kabushiki Kaisha Clutch
CN108869970A (en) * 2017-05-11 2018-11-23 中国科学院地理科学与资源研究所 A kind of single screw Equipoising support apparatus
CN109950070A (en) * 2019-03-08 2019-06-28 武汉心浩智能科技有限公司 A kind of single-power rotates and upgrades device and the coaxial switch with the device
JP2021017355A (en) * 2019-07-22 2021-02-15 株式会社シィップ Lifting platform device
CN113562661A (en) * 2021-07-28 2021-10-29 江苏万达特种轴承有限公司 Built-in type rotary lifting device
CN113942955A (en) * 2020-07-15 2022-01-18 沈阳新松机器人自动化股份有限公司 Two-stage linkage lifting device
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KR100724252B1 (en) 2004-02-09 2007-05-31 주식회사 만도 Automatic high adjusted index device
JP2009127742A (en) * 2007-11-22 2009-06-11 Nidec Sankyo Corp Linear motor
JP2011219261A (en) * 2010-04-14 2011-11-04 Yoshida Tekkosho:Kk Elevating and lowering device and turn table which is freely elevated and lowered
KR101340832B1 (en) * 2012-02-15 2013-12-11 홍병기 A Level
CN104662322A (en) * 2012-09-25 2015-05-27 丰田自动车株式会社 Clutch
US9759272B2 (en) 2012-09-25 2017-09-12 Toyota Jidosha Kabushiki Kaisha Clutch having a groove formed in an outer circumferential surface
WO2014050869A1 (en) * 2012-09-25 2014-04-03 トヨタ自動車 株式会社 Clutch
WO2014050868A1 (en) * 2012-09-25 2014-04-03 トヨタ自動車 株式会社 Clutch
CN104662321B (en) * 2012-09-25 2017-03-15 丰田自动车株式会社 Clutch
CN104662321A (en) * 2012-09-25 2015-05-27 丰田自动车株式会社 Clutch
WO2014050870A1 (en) * 2012-09-25 2014-04-03 トヨタ自動車 株式会社 Clutch
JP2015001288A (en) * 2013-06-17 2015-01-05 株式会社椿本チエイン Engagement chain drive device and movable body mobile device
US9494202B2 (en) 2013-07-25 2016-11-15 Toyota Jidosha Kabushiki Kaisha Clutch
CN104495688A (en) * 2014-12-26 2015-04-08 大连理工大学 Automatic lifting platform applied to motor homes
CN104495688B (en) * 2014-12-26 2018-01-09 大连理工大学 Caravan automatic rising-sinking platform
CN108869970A (en) * 2017-05-11 2018-11-23 中国科学院地理科学与资源研究所 A kind of single screw Equipoising support apparatus
CN109950070A (en) * 2019-03-08 2019-06-28 武汉心浩智能科技有限公司 A kind of single-power rotates and upgrades device and the coaxial switch with the device
JP2021017355A (en) * 2019-07-22 2021-02-15 株式会社シィップ Lifting platform device
CN113942955A (en) * 2020-07-15 2022-01-18 沈阳新松机器人自动化股份有限公司 Two-stage linkage lifting device
CN113562661A (en) * 2021-07-28 2021-10-29 江苏万达特种轴承有限公司 Built-in type rotary lifting device
JP7266085B1 (en) 2021-12-22 2023-04-27 愛知機械テクノシステム株式会社 Lifter device and automated guided vehicle equipped with the same
JP2023092642A (en) * 2021-12-22 2023-07-04 愛知機械テクノシステム株式会社 Lifter device and unmanned conveyance vehicle including the same

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