JP2003284304A - Electric contact-point device and contact - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To maintain good electric characteristics for a long period of time. <P>SOLUTION: An electric contact-point device includes an electrode 31 mounted on an electric part 30, a movable conductor 33 through which electricity inputted and outputted for the electric part runs, a contact 32 fitted on the opposite surface of the electrode in the movable conductor, and an energizing mechanism for bringing the contact into contact with the electrode by energizing the movable conductor. In this electric contact-point device, the contact 32 is constituted of a bundled carbon nano tubes 35 comprising a plurality of carbon nano tubes 37 of which the one end is fixed on the movable conductor and the free end of the other end faces the electrode. <P>COPYRIGHT: (C)2004,JPO

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an electrical contact device for establishing electrical conduction between an electrode of an electric component and a movable conductor, and a contactor incorporated in this electrical contact device.

[0002]

2. Description of the Related Art Various forms have been proposed as an electric contact device for applying an electric signal or electric power to an electric component or extracting an electric signal from the electric component via an electric contact.

FIG. 9 is a schematic sectional view showing a schematic structure of a measuring terminal proposed in Japanese Patent Laid-Open No. 11-304838. The electrode 2 is formed on the semiconductor substrate 1. The tip of the probe terminal 3 is in contact with this electrode 2. The other end of the probe terminal 3 is fixed to the movable conductor 5 with a fixture 4. The movable conductor 5 is moved in the direction of arrow 6 in the figure by a moving function (not shown). By moving the movable conductor 5 upward, the probe terminal 3 is moved to the electrode 2
Away from the movable conductor 5 by moving the movable conductor 5 downward,
The probe terminal 3 contacts the electrode 2. FIG. 9 shows a state in which the probe terminal 3 comes into contact with the electrode 2 and electrical conduction is realized between them.

The probe terminal 3 is pressed against the electrode 2 by an S-shaped spring action to ensure electrical conduction between the two.
The surface of the probe terminal 3 is covered with a metal containing hard fine powder such as diamond, alumina, SiC, WC, WN, etc., and wear due to a large number of contact with the electrode 2 is suppressed.

FIG. 10 is a schematic configuration diagram of an electrical contact device incorporated in a mechanical relay switch. The conductor 8 and the fixing jig 9 are mounted on the substrate 7. This fixing jig 9
One end of the strip-shaped movable conductor 10 is fixed to the tip of the. A fixed contact 11 is attached to the conductor 8 at a position facing the other end of the movable conductor 10. Movable conductor 10
The pressure bar 13 whose movement function 12 controls the movement in the up-down direction indicated by the arrow 14 is in contact with the middle position.

When the pressing rod 13 is moved downward by the moving function 12, the movable conductor 10 is bent downward, and the tip of the movable conductor 10 contacts the fixed contact 11. When the pressing rod 13 is moved upward by the moving function 12, the movable conductor 10 returns to the original horizontal state by the restoring force of the spring, and the tip of the movable conductor 10 separates from the fixed contact 11.

Since the fixed contact 11 is abraded by mechanical contact between the movable conductor 10 and the fixed contact 11, reliability with respect to multiple contacts becomes a problem. Therefore, a hard metal material is used for the fixed contact 11.

FIG. 11 shows an IC mounting board 1 of an IC testing apparatus.
5 is a schematic cross-sectional view of an electrode prober 19 inserted between the electrode 16 formed on the electrode 5 and the electrode 18 of the IC package 17. FIG. Electrode 16 of IC mounting board 15 of IC tester
Connection conductor 20 having a cross-sectional shape shown in the figure with the lower surface fixed to the
An elastic rubber 21 is enclosed inside, and the lower end of the movable contact 22 contacts the elastic rubber 21, and the upper end of the movable contact 22 contacts the electrode 18 of the IC package 17. The movable contact 22 is slidably provided in a hole provided in the connection conductor 20.

The IC package 17 is pressed against the electrode prober 19 from above so that the electrode 18 of the IC package 17 and the movable contact 22 come into contact with each other. At this time, the movable contact 22 is pushed in along the hole provided in the connection conductor 20, and the moving amount is absorbed by the deformation of the elastic rubber 21. If the IC package 17 is removed, the movable contact 22
Is released from the external force received from the electrode 18 of the IC package 17, and the elastic rubber 21 tries to return to its original shape, so that the movable contact 22 also returns to its original position.

FIG. 12 is a schematic view showing a brush structure as an electric contact device in a DC (direct current) motor. A pair of electrodes 25a and 25b formed on the curved surface are attached to the outer peripheral surface of the rotary shaft 23 that rotates about the central axis indicated by the alternate long and short dash line, with a pair of gaps 24a and 24b interposed therebetween. The electrodes 25a and 25b are connected to a coil of an armature (not shown) attached to the rotary shaft 23. This electrode 2
The vicinity of the tips of the pair of brushes 26a and 26b is in contact with the outer peripheral surfaces of 5a and 25b. This pair of brushes 26a,
The other end of 26b is fixed to a brush fixing member 27 made of an insulating material.

In the case of a DC motor, the electrodes 25a, 25b are connected to different terminals of the same coil of the armature, and the brushes 26a, 26b are connected to the battery's anode and cathode, respectively. Therefore, as the rotary shaft 23 rotates, the electrodes 25a, 25 with which the brushes 26a, 26b contact each other.
b is changed, the direction of the current flowing through the armature coil is reversed, and the direction of the magnetic field generated by the coil is also reversed. If a permanent magnet is arranged outside the coil, the rotary shaft 23 obtains rotational force.

[0012]

However, as shown in FIG.
The electric contact devices shown in FIGS. 10, 11, and 12 also have the following problems to be improved.

That is, in the measuring terminal shown in FIG. 9, the surface of the probe terminal 3 is covered with a metal containing hard fine powder such as diamond, alumina, SiC, WC, WN. However, this hard fine powder is held by a soft metal, and when this soft metal is worn away, the hard fine powder is scattered in the air, and the wear resistance of the probe terminal 3 itself is reduced. Has a certain limit and has a problem that it cannot be used for a long period of time.

Further, when the metallic electrode 2 is used in the atmosphere, there is a problem that an oxide film is formed on the surface of the electrode 2 due to the influence of oxygen and humidity contained in the atmosphere, and the electrical characteristics at the contact are deteriorated. there were. In order to prevent the formation of this oxide film, a method of intentionally abrading the surface of the electrode 2 to some extent to prevent the deterioration of the electrical characteristics is usually adopted. But,
This not only aggravates the problem relating to the above-mentioned life, but also when the oxide of fine powder resulting from abrasion remains as dust on the contact of the probe terminal 3, electrical contact between the electrode 2 and the probe terminal 3 may occur. This also causes defects.

Also, in the electrical contact device incorporated in the mechanical relay switch shown in FIG. 10, even if the fixed contact 11 is made of a hard metal material, the measurement shown in FIG. For almost the same reason as in the case of the working terminal, the fixed contact 11 is worn due to mechanical contact.
Further, deterioration due to metal fatigue caused by repeated deformation of the movable conductor 10 by the pressure rod 13 becomes a problem.

The electrode prober 19 shown in FIG.
In the above, since the elastic rubber 21 is adopted, it is possible to absorb the variation of the electrode 18 of the IC package 17 in the height of several tens of μm or more, but since the rubber material is adopted, the number of times of use increases. Degradation of the elastic material progresses rapidly, and it becomes impossible to return to its original shape after deformation. As a result, contact failure will occur.

Further, in the electric contact device in the DC motor shown in FIG. 12, the electrodes 25a, 2
Since 5b and the brushes 26a and 26b slide with each other as the rotary shaft 23 rotates, wear due to this sliding occurs. Therefore, due to these abrasions, the electrodes 25a, 2
5b and the brushes 26a and 26b have a shorter life.

The present invention has been made in view of such circumstances, and by adopting carbon nanotubes, abrasion due to mechanical contact in electrical contacts does not occur,
Deterioration of electrical characteristics does not occur even when mechanical contact is performed many times, and further, an oxide film is not formed on the surface,
Moreover, it aims at providing the electric contact device and contactor which can adjust the elasticity of an electric contact itself.

[0019]

According to the present invention, an electrode attached to an electric component, a movable conductor through which electricity input / output to / from the electric component is energized, and the movable conductor is attached to an opposing surface of the electrode. And a biasing mechanism for biasing the movable conductor to bring the contact into contact with the electrode, wherein the contactor has one end fixed to the movable conductor and the other free end is the electrode. It is formed by a carbon nanotube bundle composed of a plurality of carbon nanotubes facing each other.

In the electrical contact device thus constructed, the contacts, which are carbon nanotube bundles, are brought into contact with the electrodes with a biasing force.

The carbon nanotube (CNT) is shown in FIG.
As shown in (1), it is formed in a cylindrical shape with a single crystal consisting only of covalent bonds of carbon atoms. The carbon nanotubes (CNTs) alone have high conductivity and high oxidation resistance without semipermanently deteriorating mechanical properties. A contact is formed by a carbon nanotube bundle in which a plurality of the carbon nanotubes (CNT) are collected.

Therefore, the contact is hardly worn by a large number of mechanical contacts, and the surface oxide film is not formed, so that an electrical contact device in which the electrical characteristics are maintained semipermanently is realized. it can.

Further, even if a large external force (biasing force) is applied to this contactor due to its very excellent mechanical characteristics, the contactor is only deformed and is not mechanically damaged, and the external force (biasing force) is applied. If is removed, the contactor has a spring property that returns to its original shape, and it is possible to realize an excellent electrical contact mechanically as compared with the case of using a metal material.

Therefore, it is possible to prevent the deterioration of the electrical characteristics of the electrical contact device in which the contactor is incorporated.

In a further invention, the contact in the electrical contact device of the above invention can change the elastic modulus from one end to the other end by changing the density of the carbon nanotubes contained in the carbon nanotube bundle. I have to.

From a microscopic point of view, the carbon nanotubes (CNTs) forming the bundle of carbon nanotubes are not densely arranged but are arranged with a small space therebetween. Therefore, the rigidity of the entire carbon nanotube bundle can be changed by changing the density of the carbon nanotubes contained in the carbon nanotube bundle.

Further, another aspect of the present invention is that a bundle of carbon nanotubes constituting a contactor in the electrical contact device of the above-mentioned invention has carbon on cobalt nickel dispersedly arranged on a semiconductor substrate according to the density of carbon nanotubes. It is grown and manufactured.

As described above, the carbon nanotube bundles constituting the contacts can be easily manufactured by using the existing semiconductor manufacturing method.

Further, according to another invention, a carbon nanotube bundle composed of a plurality of carbon nanotubes is formed, and one end of each carbon nanotube is fixed to a movable conductor, and the movable conductor is urged so that the other end is formed. Is a contactor whose free end is configured to abut an electrode attached to an electrical component.

[0030]

BEST MODE FOR CARRYING OUT THE INVENTION Embodiments of the present invention will be described below with reference to the drawings. (First Embodiment) FIG. 1 is a schematic view showing a schematic configuration of an electric contact device incorporating a contactor according to a first embodiment of the present invention.

An electrode 31 is attached to the upper surface of a semiconductor 30 as an electric component. A movable conductor 33 is provided so as to face the electrode 31. An electric signal input to and output from the semiconductor 30 as an electric component flows through the movable conductor 33. The contact 32 is fixed to a position of the movable conductor 33 facing the electrode 31. The contactor 32 has a disk-shaped fixed plate 36 whose upper surface is fixed to the movable conductor 33,
Each upper end is fixed to this fixing plate 36, and the free end of the lower end is opposed to the electrode 31.
T) 37 and carbon nanotube bundle 35.

The movable conductor 33 is controlled to move in the vertical direction indicated by an arrow 38 in the figure by an urging mechanism 34 including, for example, a spring 34a and a movable arm 34b. That is, when the biasing mechanism 34 biases the movable conductor 33 downward by the elastic force of the spring 34 a, the lower end of the contactor 32 formed of the carbon nanotube bundle 35 attached to the movable conductor 33 causes the electrode 3 to move.
Abut 1. Therefore, the movable conductor 33 and the semiconductor 30
The electrode 31 on the upper surface of the is electrically connected via a contact 32.

When the urging mechanism 34 rotates the movable arm 34b to move the movable conductor 33 upward, the carbon nanotube bundle 35 attached to the movable conductor 33 is formed as shown in FIG. The lower end of the contact 32 is the electrode 31
Move away from and move upwards. Therefore, the movable conductor 33
And the electrode 31 on the upper surface of the semiconductor 30 are electrically disconnected.

Although the spring 34a and the movable arm 34b are used as the biasing mechanism 34 here, a cantilever-like member may be used as long as it has a biasing function. As described above, by configuring the biasing mechanism 34 with one component, the size of the entire apparatus can be reduced.

A plurality of carbon nanotubes (CNT) 3
The contactor 32 formed of the carbon nanotube bundle 35 made of 7 has a circular cross section, as shown in FIG. Each carbon nanotube (CNT) 37 is, as shown in FIG. 3, formed in a cylindrical shape by a single crystal consisting of only covalent bonds of carbon atoms.

As described above, microscopically, the carbon nanotubes (CNT) 37 constituting the carbon nanotube bundle 35 are not densely arranged, but
As shown in FIG. 2 (b), they are arranged with a slight gap between them. Each carbon nanotube (CNT) 3
The diameter d, the length L, and the interval S of 7 are set in the following ranges.

Diameter d: several nm to several tens of nm Length L: several tens of μm to several hundreds μm Interval S: several hundreds nm to several μm A plurality of carbon nanotubes (CNT) are used as the contacts 32 of the electrical contact device configured as described above. The advantage of adopting the carbon nanotube bundle 35 composed of 37 will be described.

As described above, the carbon nanotube (CNT) 38 alone is semipermanently deteriorated in mechanical properties such as elastic modulus (elastic modulus), shear modulus, yield point stress of plastic deformation, friction coefficient and hardness. It has high elasticity, high conductivity, and high corrosion resistance.

These carbon nanotubes (CNT)
37 has mechanical, electrical and chemical properties,
The electrodes 2, 8, 18, 25a, 2 shown in FIGS.
5b, the probe terminal 3 as each contact that selectively abuts on 5b, the fixed contact 11, the movable contact 22, the brushes 26a, 2
6b is remarkably excellent as compared with each characteristic of each material.

For example, the elastic modulus (Young's modulus), which is one measure of mechanical strength, is the hardness used for ordinary electrical contacts.
Even Ni (nickel) is 200 GPa, whereas the elastic modulus (Young's modulus) of the carbon nanotube (CNT) 37 is several thousand GPa, which is an order of magnitude higher.

Therefore, the contactor 32 causes almost no elastic deterioration and is not worn by a large number of mechanical contacts, and the surface oxide film is not formed, so that the electrical characteristics are semipermanently constant. It is possible to realize a maintained electrical contact device.

Further, since the contacts shown in FIGS. 9 to 12 are metallic materials, surface oxygen is generated by oxygen in the atmosphere, and the electrical characteristics of the contacts are deteriorated. However, since the contactor 32 incorporated in the device of this embodiment is formed of the carbon nanotube (CNT) 37,
No surface oxidation occurs and electrical characteristics do not change.

Further, when the contactor is made of a metal material as in the conventional device, the oxide film formed on the surface must be removed by intentionally sliding it between the contactor and the electrode. Even if the film can be removed and the electrical characteristics are improved, the life of the contact is shortened.

On the other hand, the carbon nanotube (CNT) 37 of this embodiment is, as described above, formed in a cylindrical shape with a single crystal consisting only of covalent bonds of carbon atoms. However, even if it is oxidized, only carbon dioxide CO ₂ in the form of gas is generated, so an oxide film is not formed on the surface and the electrical characteristics do not change. Therefore, it is not necessary to intentionally slide between the contactor and the electrode to remove the oxide film formed on the surface, and a highly reliable electrical contact device can be realized.

Further, when the contactor is made of a metal material as in the conventional device, the strain amount (%) at the yield point at which the plastic deformation occurs in the stress-strain characteristic of this metal material is small, so that an urging force is applied from the outside. The deformation amount of the contact is small when the contact is made. Therefore, as shown in FIG. 9, the structure of the probe terminal 3 as a contactor is made into a spring shape, as shown in FIG. 10, the movable conductor 10 is formed into a cantilever, and as shown in FIG. It was necessary to use it together.

However, since the strain amount (%) at the yield point at which the plastic deformation of the carbon nanotube (CNT) 37 of the present embodiment occurs is significantly larger than that of the metal material, the contact 32 itself is used as a spring material. By deforming and using it, it is possible to realize a small-sized electrical contact device having a spring property without using an elastic body outside.

Furthermore, a plurality of carbon nanotubes (C
The carbon nanotubes (CN) of the whole contactor 32 formed by the carbon nanotube bundle 35 composed of NT) 37.
T) A method of changing the elastic modulus in the 37 direction to an arbitrary value will be described with reference to FIGS. 4 and 5.

As shown in FIG. 4A, each carbon nanotube (CNT) 37 has a carbon nanotube bundle 3
Since the carbon nanotubes (CNTs) 37 are arranged at predetermined intervals S inside the carbon nanotubes 5, when the biasing force F is applied from above, the carbon nanotubes (CNTs) 37 are separated from each other as shown in FIG. ) Deflection in the gap between 37,
The length of the carbon nanotube bundle 35 shrinks from L to La, but it does not project to the outside of the carbon nanotube bundle 35.

With the entire cross-sectional area of the carbon nanotube bundle 35 kept constant, the carbon nanotube bundle 3
The number of carbon nanotubes (CNT) 37 accommodated in 5 is changed to
Change the density of. By changing the density in this way, the elastic modulus of the contactor 32 in the long axis direction of the carbon nanotube (CNT) 37 can be set to an arbitrary value.

In this case, when the density of the carbon nanotubes (CNTs) 37 in the carbon nanotube bundle 35 is increased, the interval S between the carbon nanotubes (CNTs) 37 is narrowed, and the adjacent carbon nanotubes (CNTs) 37 are deformed. When they come into contact with each other, they are not further deformed in the vertical direction (no contraction). This carbon nanotube bundle 3
FIG. 5 shows the relationship between the deformability ratio (La-L) / L in the vertical direction and the space S (density) between the carbon nanotubes (CNTs) 37 in FIG.

Thus, the carbon nanotube (CN
By adjusting the interval S (density) between the T) 37, the deformability (La-L) / L of the contact 32 can be intentionally set to a specific value.

FIG. 6 is a diagram showing a method of manufacturing the carbon nanotube bundle 35 for forming the contact 32. Figure 6
As shown in (a), the cobalt nickel 40 is formed on the semiconductor substrate 39 with a space S between the carbon nanotubes (CNTs) 37, using a photomask. And
As shown in FIG. 6B, each carbon nanotube (CNT) 37 is obtained by growing carbon (carbon C) on this cobalt nickel 40 in a vacuum.

In this way, the carbon nanotube bundle 35 constituting the contact 32 can be easily manufactured by using the existing semiconductor manufacturing method.

In addition to cobalt nickel 40, nickel (Ni) silicon carbide (Sic) can be used.

(Second Embodiment) FIG. 7 is a schematic view showing a schematic structure of a brush structure in a DC motor incorporating an electric contact device according to a second embodiment of the present invention, and FIG. 8 shows this brush structure. It is a top view seen from above. The same parts as those in the brush structure of the conventional DC motor shown in FIG. 12 are designated by the same reference numerals, and detailed description of the overlapping parts will be omitted.

A pair of curved electrodes 25a and 25b are attached to the outer peripheral surface of the rotary shaft 23 which rotates about the central axis indicated by the alternate long and short dash line, with a pair of gaps 24a and 24b interposed therebetween. The electrodes 25a and 25b are connected to the rotary shaft 23.
Is connected to a coil of an armature (not shown) attached to. The tip surfaces of the pair of contacts 41a, 41b are in contact with the outer peripheral surfaces of the electrodes 25a, 25b. The other ends of the pair of contacts 41a, 41b are connected to the movable conductors 42a, 42b.
It is fixed to b.

Then, the movable conductors 42a and 42b are biased toward the rotary shaft 23 by a biasing mechanism (not shown). Therefore, the tip surfaces of the contacts 41a, 41b are constantly urged against the electrodes 25a, 25b with a constant pressure. Therefore, each contact 41a, 41b and each electrode 25a, 25b maintain a good electrical contact state.

In the case of a DC motor, the electrodes 25a, 25b are connected to different terminals of the same coil of the armature, and each movable conductor 42a, 42b is connected to the anode and cathode of the battery, respectively. Therefore, as the rotary shaft 23 rotates, the electrodes 25a with which the contacts 41a, 41b come into contact,
25b alternates, the direction of the current flowing through the armature coil is reversed, and the direction of the magnetic field generated by the coil is also reversed.
If a permanent magnet is placed outside the coil, the rotating shaft 2
3 obtains rotational force.

Each of the contacts 41a, 41b is composed of a carbon nanotube bundle 35 composed of a plurality of carbon nanotubes (CNT) 37, like the contacts 32a, 32b shown in FIG.

In the electric contact device according to the second embodiment having such a structure, the tip surfaces of the contacts 41a, 42b abut on the electrodes 25a, 25b having curved surfaces, and the surfaces of the electrodes 25a, 25b are contacted. Although it slides on the top, as described above, the wear resistance of the carbon nanotubes (CNT) 37 forming the contacts 41a and 42b is significantly superior to that of the conventional brushes 26a and 26b shown in FIG. ing.

Therefore, similarly to the electric contact device of the first embodiment described above, the contacts 41a, 42b and the electrode 25 are provided.
It is possible to extend the life of the electrical contact device while maintaining a good electrical contact state between a and 25b.

Further, as described above, since the contacts 41a and 42b themselves composed of the carbon nanotube bundle 35 have good spring characteristics, the conventional strip brushes 26a and 26b shown in FIG. Since it is not necessary to adopt it, it is possible to reduce the size of the entire brush structure in the DC motor.

In the second embodiment device,
Although the brush structure of the DC motor is taken as an example, the application is not limited as long as the contact portion moves, such as a variable resistor.

[0064]

As described above, in the electrical contact device and contactor of the present invention, by adopting carbon nanotubes, wear due to mechanical contact at the electrical contacts does not occur, and therefore the minute contact resulting from the wear occurs. The powdered oxide does not adhere to the contacts as dust, the electrical characteristics do not deteriorate even after a large number of mechanical contacts, and no oxide film is formed on the surface. The elasticity of the device itself can be adjusted, and the applicable range of this electrical contact device can be widened.

[Brief description of drawings]

FIG. 1 is a schematic diagram showing a schematic configuration of an electrical contact device incorporating a contactor according to a first embodiment of the present invention.

FIG. 2 is a schematic diagram showing a structure of a contact according to the first embodiment.

FIG. 3 is a schematic diagram showing the structure of carbon nanotubes that constitute the contactor.

FIG. 4 is a view showing a deformed state of the carbon nanotube bundle.

FIG. 5 is a diagram showing the relationship between the distance between carbon nanotubes and the deformable amount in the same carbon nanotube bundle.

FIG. 6 is a diagram showing a method for manufacturing the carbon nanotube bundle.

FIG. 7 is a schematic diagram showing a brush structure of a DC motor incorporating an electric contact device according to a second embodiment of the present invention.

FIG. 8 is a top view of a brush structure of the DC motor.

FIG. 9 is a schematic diagram showing a schematic configuration of a conventional measuring terminal.

FIG. 10 is a schematic cross-sectional view showing a schematic configuration of a conventional electrical contact device incorporated in a mechanical relay switch.

FIG. 11 is a schematic sectional view showing a schematic configuration of a conventional electrical contact device incorporated in an IC test device.

FIG. 12 is a schematic diagram showing a brush structure of a DC motor incorporating a conventional electric contact device.

[Explanation of symbols]

23 ... rotary shaft 30 ... Semiconductor 31, 25a, 25b ... Electrodes 32, 41a, 41b ... Contactor 33 ... Movable conductor 34 ... Energizing mechanism 35 ... Carbon nanotube bundle 36 ... Fixed plate 37 ... Carbon nanotube (CNT) 39 ... Semiconductor substrate 40 ... Cobalt nickel 42a, 42b ... Movable conductor

Claims (4)

[Claims] 1. Electrodes (31, 2) attached to electrical components
5a, 25b) and movable conductors (33, 42a, 42b) through which electricity input to and output from the electric component is energized,
A contact (32, 41a, 41b) attached to the surface of the movable conductor facing the electrode, and an urging mechanism (3) for urging the movable conductor to bring the contact into contact with the electrode.
4) In the electrical contact device, the contactor has a carbon nanotube bundle (35) composed of a plurality of carbon nanotubes (37) having one end fixed to the movable conductor and the other free end facing the electrode. An electric contact device characterized by being formed by. 2. The contactor can change the elastic modulus in the direction from the one end to the other end by changing the density of the carbon nanotubes contained in the carbon nanotube bundle. 1. The electrical contact device according to 1. 3. The carbon nanotube bundle according to claim 2, wherein the carbon nanotube bundle is manufactured by growing carbon on cobalt nickel dispersedly arranged on a semiconductor substrate in accordance with the density of the carbon nanotubes. Electrical contact device. 4. A carbon nanotube bundle composed of a plurality of carbon nanotubes, wherein one end of each carbon nanotube is fixed to a movable conductor, and the movable conductor is biased so that the free end of the other end is formed. A contactor, which is in contact with an electrode attached to an electric component.