JP2003282683A5 - - Google Patents
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- Publication number
- JP2003282683A5 JP2003282683A5 JP2003008037A JP2003008037A JP2003282683A5 JP 2003282683 A5 JP2003282683 A5 JP 2003282683A5 JP 2003008037 A JP2003008037 A JP 2003008037A JP 2003008037 A JP2003008037 A JP 2003008037A JP 2003282683 A5 JP2003282683 A5 JP 2003282683A5
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2003008037A JP4590162B2 (ja) | 2002-01-17 | 2003-01-16 | 基板ホルダ、積層ボート、半導体製造装置および半導体装置の製造方 |
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2002008923 | 2002-01-17 | ||
| JP2002-8923 | 2002-01-17 | ||
| JP2003008037A JP4590162B2 (ja) | 2002-01-17 | 2003-01-16 | 基板ホルダ、積層ボート、半導体製造装置および半導体装置の製造方 |
Related Child Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2005290269A Division JP2006108677A (ja) | 2002-01-17 | 2005-10-03 | 半導体製造装置 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2003282683A JP2003282683A (ja) | 2003-10-03 |
| JP2003282683A5 true JP2003282683A5 (ru) | 2006-03-02 |
| JP4590162B2 JP4590162B2 (ja) | 2010-12-01 |
Family
ID=29252971
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2003008037A Expired - Lifetime JP4590162B2 (ja) | 2002-01-17 | 2003-01-16 | 基板ホルダ、積層ボート、半導体製造装置および半導体装置の製造方 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP4590162B2 (ru) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7077913B2 (en) * | 2002-01-17 | 2006-07-18 | Hitachi Kokusai Electric, Inc. | Apparatus for fabricating a semiconductor device |
| JP5042950B2 (ja) * | 2008-09-05 | 2012-10-03 | 東京エレクトロン株式会社 | 縦型熱処理装置及び基板支持具 |
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2003
- 2003-01-16 JP JP2003008037A patent/JP4590162B2/ja not_active Expired - Lifetime