JP2003282683A5 - - Google Patents

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Publication number
JP2003282683A5
JP2003282683A5 JP2003008037A JP2003008037A JP2003282683A5 JP 2003282683 A5 JP2003282683 A5 JP 2003282683A5 JP 2003008037 A JP2003008037 A JP 2003008037A JP 2003008037 A JP2003008037 A JP 2003008037A JP 2003282683 A5 JP2003282683 A5 JP 2003282683A5
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2003008037A
Other languages
Japanese (ja)
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JP2003282683A (ja
JP4590162B2 (ja
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Publication date
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Priority to JP2003008037A priority Critical patent/JP4590162B2/ja
Priority claimed from JP2003008037A external-priority patent/JP4590162B2/ja
Publication of JP2003282683A publication Critical patent/JP2003282683A/ja
Publication of JP2003282683A5 publication Critical patent/JP2003282683A5/ja
Application granted granted Critical
Publication of JP4590162B2 publication Critical patent/JP4590162B2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

JP2003008037A 2002-01-17 2003-01-16 基板ホルダ、積層ボート、半導体製造装置および半導体装置の製造方 Expired - Lifetime JP4590162B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2003008037A JP4590162B2 (ja) 2002-01-17 2003-01-16 基板ホルダ、積層ボート、半導体製造装置および半導体装置の製造方

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2002008923 2002-01-17
JP2002-8923 2002-01-17
JP2003008037A JP4590162B2 (ja) 2002-01-17 2003-01-16 基板ホルダ、積層ボート、半導体製造装置および半導体装置の製造方

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP2005290269A Division JP2006108677A (ja) 2002-01-17 2005-10-03 半導体製造装置

Publications (3)

Publication Number Publication Date
JP2003282683A JP2003282683A (ja) 2003-10-03
JP2003282683A5 true JP2003282683A5 (enrdf_load_stackoverflow) 2006-03-02
JP4590162B2 JP4590162B2 (ja) 2010-12-01

Family

ID=29252971

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2003008037A Expired - Lifetime JP4590162B2 (ja) 2002-01-17 2003-01-16 基板ホルダ、積層ボート、半導体製造装置および半導体装置の製造方

Country Status (1)

Country Link
JP (1) JP4590162B2 (enrdf_load_stackoverflow)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7077913B2 (en) * 2002-01-17 2006-07-18 Hitachi Kokusai Electric, Inc. Apparatus for fabricating a semiconductor device
JP5042950B2 (ja) * 2008-09-05 2012-10-03 東京エレクトロン株式会社 縦型熱処理装置及び基板支持具
JP2025014516A (ja) * 2023-07-18 2025-01-30 株式会社東芝 サセプタおよび気相成長装置

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