JP2003273430A - Method and apparatus for driving laser - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To solve the problem that a laser cannot be emitted at an equal interval due to the speed variation of an object to be illuminated by a method for oscillating the laser at each fixed time, a laser oscillation apparatus also stops when the object to be illuminated stops by a method for oscillating the laser at a fixed distance and position when a stage travels so that a temperature associated with the heat generation of the laser oscillation apparatus and the temperature of a component for passing laser beams change, and stability in the illumination energy of the laser beams is lost. <P>SOLUTION: A position priority mode-setting means 26 for outputting a signal I for oscillating a pulse laser 4 at each travel of a specific interval by a stage 10, and a frequency fixed mode-setting means 28 for outputting a frequency-fixed signal G for oscillating the pulse laser 4 with a fixed frequency are provided. When an object 5 to be illuminated is located at an illumination- enable position of the pulse laser 4, the position priority mode-setting means 26 is connected to a laser oscillation apparatus 1. When the object 5 to be illuminated is not at the illumination-enable position of the pulse laser 4, the frequency fixed mode-setting means 28 is connected to the laser oscillation apparatus 1. <P>COPYRIGHT: (C)2003,JPO

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a laser driving method and apparatus.

[0002]

2. Description of the Related Art For example, in the production of crystallized silicon of a thin film transistor used in a liquid crystal display device, a pulsed laser is irradiated onto an object to be irradiated composed of a substrate. In that case, the laser light generated by the laser oscillator that generates the excimer laser is guided to the optical equipment, and the direction is appropriately changed by the reflection mirror, and the intensity is made uniform by shaping it through the long-axis homogenizer and the short-axis homogenizer. After this, a rectangular line beam is shaped by passing through a reticle and a condenser lens, and the object to be irradiated is irradiated. The irradiation object is installed in the vacuum chamber of the laser annealing apparatus.

At this time, in order to crystallize the entire surface of the object to be irradiated, the object to be irradiated is shortened by the pulse laser at a feed pitch of about 5 to 10% of the line beam short axis width per shot of the pulse laser. Move intermittently in the direction of the axis. The number of times of irradiation with laser light per location of the object to be irradiated is 10 to 20.
It is about once.

Here, as a conventional method of oscillating a pulse laser by driving a laser oscillating device at predetermined intervals, there is a method of oscillating a pulse laser of a constant frequency by driving it at regular intervals. Hereinafter, this is referred to as a constant frequency mode. Further, when irradiating a pulsed laser on the object to be irradiated, the stage is moved relative to the laser oscillator in a predetermined direction. At that time, there is a method of oscillating a pulse laser by driving a laser oscillation device at a distance / position of a constant interval. Hereinafter, this is referred to as a position priority mode.

When an object to be irradiated is oscillated / irradiated with a laser in a constant frequency mode, the temperature associated with the heat generation of the laser oscillator and the temperature of the condenser lens in the optical device are kept constant, and these are in a stable state. Therefore, a laser beam with stable output can be obtained. By the way, in a gas laser such as an excimer laser, a small amount (2 to 3%) of energy is converted into laser light, and the rest becomes heat.

However, in the conventional laser driving method and apparatus thereof, the laser light is oscillated and irradiated in one of the constant frequency mode and the position priority mode, and therefore the following technical problems occur. Have

When the object to be irradiated is oscillated / irradiated with laser light in a constant frequency mode, the laser light oscillates / irradiates irrespective of the accuracy of the moving device for moving the stage in a predetermined direction relative to the laser oscillating device and its control device. Because it is irradiated,
There is a technical problem that it is not possible to irradiate the objects at equal intervals due to the fluctuation of the moving speed of the object to be irradiated.

On the other hand, when irradiating and irradiating the irradiation target with laser light in the position priority mode, the irradiation target that is moving at a constant speed is irradiated at equidistant positions. When the object is stopped, the laser oscillator also stops, so the temperature accompanying the heat generation of the laser oscillator and the temperature of the components such as the condenser lens in the optical equipment that pass the laser light decrease.
Not only does this affect the output of the laser oscillator, but the amount of deformation of the optical device changes, and the stability of the irradiation energy of the laser light is impaired.

According to the present invention, by obtaining the functions of the constant frequency mode and the position priority mode in association with each other, the advantages of the position priority mode are maintained, the drawbacks thereof are eliminated, and the stability of the laser oscillation device and the optical equipment is impaired. It is an object to provide a method and a device for driving a laser without a laser.

[0010]

The present invention has been made in view of the above-mentioned conventional technical problems, and the structure thereof is as follows.
It is as follows. The invention of claim 1 is directed to a laser oscillating device 1
And the stage 10 on which the irradiation target 5 is placed, and the stage 10
And a moving device 20 for reciprocally moving the laser oscillation device 1 in a predetermined direction X relative to the laser oscillation device 1. While moving the stage 10, the pulse laser 4 from the laser oscillation device 1 is moved on the stage 10 at predetermined intervals. In the method of driving the laser that irradiates the irradiation object 5, the position priority mode setting means 26 that outputs the signal I that oscillates the pulse laser 4 each time the stage 10 moves at a predetermined interval, and the pulse of a constant frequency.
The stage 1 is provided with a constant frequency mode setting means 28 for outputting a constant frequency signal G for oscillating the laser 4.
When the irradiation object 5 placed on 0 is at the irradiation possible position of the pulse laser 4, the position priority mode setting means 26 is connected to the laser oscillation device 1 and the laser oscillation device 1 is moved at predetermined intervals of the stage 10. Drive pulse laser 4
When the irradiation target 5 placed on the stage 10 is not in the irradiation position of the pulse laser 4, the constant frequency mode setting means 28 is connected to the laser oscillation device 1 to drive the laser oscillation device 1 at a constant frequency. The laser driving method is characterized in that the pulse laser 4 is oscillated. The invention according to claim 2 is provided with a laser oscillation device 1, a stage 10 on which an object to be irradiated 5 is placed, and a moving device 20 that moves the stage 10 back and forth relative to the laser oscillation device 1 in a predetermined direction X. In the laser driving device for irradiating the irradiation object 5 on the stage 10 with the pulse laser 4 from the laser oscillation device 1 at predetermined intervals while moving the irradiation object, the irradiation object 5 placed on the stage 10 is a pulse laser. 4 detecting means 39 for detecting that the stage 10 is in the irradiation possible position, a position priority mode setting means 26 for outputting a signal I for oscillating the pulse laser 4 each time the stage 10 moves by a predetermined interval, and a pulse of a constant frequency. A constant frequency mode setting means 28 for outputting a constant frequency signal G for oscillating the laser 4, a position priority mode setting means 26, and a constant frequency mode setting means. A switch SW for switching and connecting one of the eight to the laser oscillating device 1, and when the detection means 39 detects that the irradiation target 5 placed on the stage 10 is at the irradiation possible position of the pulse laser 4. The position priority mode setting means 26 by the switch SW.
Is connected to the laser oscillating device 1, the laser oscillating device 1 is driven every time the stage 10 moves at a predetermined interval, and the pulse laser 4 is oscillated.
When it is detected that the irradiation target 5 placed on the laser is not in the irradiation position of the pulse laser 4, the constant frequency mode setting means 28 is connected to the laser oscillation device 1 by the switch SW, and the laser oscillation device 1 is fixed. The laser driving device is characterized in that the pulse laser 4 is oscillated by driving at a frequency. According to a third aspect of the invention, the detection means 39 for detecting that the irradiation object 5 placed on the stage 10 is at the irradiation possible position of the pulse laser 4 is the stage movement detection means (24, 34, 36). The stage 10 by means of stage movement detection means (24, 34, 36).
Based on the detection of movement at a predetermined speed of
It is detected that the irradiation object 5 placed on the stage 10 is at the irradiation possible position of the pulse laser 4, and the movement detection means (24, 34, 36) of the stage can move the stage 10 at a predetermined speed or more. 3. The laser driving device according to claim 2, wherein it is detected that the irradiation object 5 placed on the stage 10 is not at the irradiation possible position of the pulse laser 4 based on the fact that it is not detected. According to the invention of claim 4, the detecting means 39 for detecting that the irradiation object 5 placed on the stage 10 is in the irradiation possible position of the pulse laser 4 is provided on one of the stage 10 and the laser oscillator 1 side. Limit switches 50, 51 and fixing member 5 provided on the other side
2, 53, and the pulse laser 4 is the stage 1
When the irradiation target 5 placed on the stage 0 is positioned between both ends in the predetermined direction X, the irradiation target 5 mounted on the stage 10 is pulsed by the limit switches 50 and 51 and the fixing members 52 and 53. Is detected at the irradiation possible position of
When the pulse laser 4 is not located between both ends of the irradiation object 5 placed on the stage 10 in the predetermined direction X, the irradiation object placed on the stage 10 is controlled by the limit switches 50 and 51 and the fixing members 52 and 53. 3. The laser driving device according to claim 2, wherein it is detected that the pulse laser 5 is not in the irradiation possible position of the pulse laser 4.

[0011]

1 to 5 show one embodiment of a laser driving device according to the present invention. In the figure, reference numeral 10 is a stage. As shown in FIG. 3, with the irradiation target 5 made of a substrate placed on the stage 10, the moving device 20 moves the stage 10 from the laser oscillator 1 to the pulse laser 4 With respect to, a reciprocating movement is relatively performed in a predetermined direction X (X-axis direction for scanning). Of course, instead of moving the stage 10, the laser oscillator 1 can be moved.

The laser oscillating device 1 is fixedly mounted on a base 22 as shown in FIG. 5A, generates an excimer laser composed of a pulse laser, and generates the laser beam A1 with the reticle 21 and a condenser lens. 3 is directed to an optical instrument 9 including 3 and is redirected by a reflection mirror 7, and is shaped through a long axis homogenizer 2a and a short axis homogenizer 2b to make the strength uniform, and then is redirected by a reflection mirror 8 again, and the reticle 21 By passing the light through the condenser lens 3, the pulse laser 4 formed of a rectangular line beam is irradiated onto the irradiation target 5 placed on the stage 10. The irradiation object 5 is installed in the vacuum chamber of the laser annealing apparatus.

Specifically, the moving device 20 includes a servo motor 40 shown in FIG. 4, and the stage 10 is intermittently rotated at predetermined intervals via a ball screw mechanism (not shown) by the forward and reverse rotations of the servo motor 40. Or, it is reciprocated continuously. As the stage 10 moves in the predetermined direction X, the pulse laser 4 is irradiated over the entire width of the irradiation target 5 in the predetermined direction X.

The irradiation object 5 is a thin a-Si (amorphous silicon) film 5a on a glass substrate 6 as shown in FIG.
By irradiating the a-Si film 5a with the pulse laser 4, the a-Si film 5a is crystallized to form a thin p-Si (polysilicon) film 5b. After irradiating the pulse laser 4 over the entire width of the irradiation target 5 in the predetermined direction X while moving the stage 10, the stage 1
0 is displaced in a direction orthogonal to the predetermined direction X, the moving direction of the stage 10 is reversed, and the pulse laser 4 is irradiated over the entire width of the irradiation target 5 in the predetermined direction X. Irradiate pulse laser 4 on the entire surface of
The irradiation target 5 whose entire surface has reached a predetermined irradiation number (10 to 20 times) is replaced, and the irradiation target 5 is successively irradiated with the pulse laser 4.

The pulse laser 4 drives and oscillates the laser oscillator 1 by one of the pulse signal I of the position priority mode setting means 26 and the constant frequency pulse signal G of the constant frequency mode setting means 28.

For this purpose, the base 22 is provided with a speed detecting means 24 for detecting the moving speed of the stage 10 and a microcomputer. The microcomputer includes a reference value setting means 34 for setting a reference value V0 of the moving speed of the stage 10 shown in FIG. 2, a comparing means 36, essential parts of the position priority mode setting means 26, and a constant frequency mode setting means 28.
Function as. This reference value V0 is a value corresponding to a state in which the stage 10 is moving at a predetermined speed without stopping, the moving speed exceeds zero, and the steady moving speed (theoretical constant speed) of the stage 10 It is a value corresponding to a speed slightly lower than the value, and is set to be switched to the position priority mode when the stage 10 enters a steady movement state. Further, the speed detecting means 24, the reference value setting means 34, and the comparing means 36 of the stage for detecting that the irradiation object 5 placed on the stage 10 is positioned substantially below the pulse laser 4 and is in the irradiation possible position. Movement detecting means (detecting means 3
9 (shown in FIG. 1)), and also detects that the irradiation position is not present.

The position priority mode setting means 26 is shown in FIG.
Will be described with reference to. The number of rotations (rotation angle) of the servo motor 40 is detected by the rotary encoder 41, and the detection pulse is counted by the first counter 42,
Every time the moving length of the stage 10 reaches a predetermined value, a moving signal Zn composed of a pulse signal is output from the first counter 42. This movement signal Zn corresponds to the movement length of the stage 10 of, for example, 1 μm for each pulse.

This movement signal Zn is sent to the second counter 4
Is counted by 3, and every time the count value becomes 1 / N1,
A signal I for oscillating the pulse laser 4 is output each time the stage 10 moves by a predetermined interval, and the laser oscillator 1 is operated by this signal I. For example, the moving device 20
With the stage 10 driven by the stage 1,
In the case of irradiating one pulse laser 4 every 0 mm and the moving distance of the irradiation object 5 is 1 mm, the second counter 43
A value of 1 mm / 1 μm = 1,000 is set for N1 in FIG. Thereby, the signal I is generated from the second counter 43 every time the stage 10 moves by 1 mm, and the signal I is input to the laser oscillation device 1 via the switch SW to irradiate the pulse laser 4 as described later. .

The first counter 42 and the second counter 43 are provided in the microcomputer, and
The counter 42, the second counter 43, the rotary encoder 41, and the servomotor 40 of the moving device 20 constitute the position priority mode setting means 26.

The constant frequency mode setting means 28 outputs a constant frequency signal G, and this signal G is input to the laser oscillating device 1 via a switch SW as described later to operate the laser oscillating device 1. The pulsed laser 4 having a constant frequency is oscillated.

The servo motor 40 is driven by the servo control device 46 based on the drive signal R4 shown in FIG. 4, and stops when the movement signal Zn is subtracted from the drive signal R4 and becomes zero. The stage 10 and the irradiation target 5 are also stopped. After that, the servomotor 40 is driven in reverse rotation,
When the movement signal Zn is subtracted from the drive signal R4 and it becomes zero, the stage is stopped again, and the stage 10 and the irradiation target 5 are also stopped. By repeating this, the irradiation target 5 on the stage 10
Move relative to the pulsed laser 4 from the laser oscillator 1 in a predetermined direction X.

Further, in the comparing means 36, as shown in FIG. 2, the detected value V by the speed detecting means 24 is compared with the reference value V0, and when the detected value V is equal to or more than the reference value V0, the stage 10 moves. The comparison signal M is output, the switch SW is switched based on the comparison signal M, and the laser oscillation device 1 is driven by the pulse signal I of the position priority mode setting means 26. On the other hand, the detected value V is the reference value V
When it is less than 0, it is judged that the stage 10 is practically stopped, and the switch SW is switched based on the fact that the comparison signal M is not output, and the constant frequency mode setting means 28 uses the constant frequency pulse signal G. Then, the laser oscillator 1 is driven. Therefore, the speed detecting means 24, the reference value setting means 34, and the comparing means 36 are configured by a switch (a stage movement detecting means) whose contacts are closed when the stage 10 is moving at a predetermined speed or more. It is also possible. When the irradiation object 5 placed on the stage 10 is positioned below the pulse laser 4, the stage 10 moves at a theoretical constant speed, and the irradiation object 5 placed on the stage 10 moves to the pulse laser 4. It is in the irradiation possible position of 4.

The switch SW has a position priority contact O1 and a constant frequency contact O2 as shown in FIG.
Due to the presence of the comparison signal M of 6, the coil (not shown) is excited to close the position priority contact O1, and the pulse signal I of the position priority mode setting means 26 is input to the laser oscillator 1.
Further, the constant frequency contact O2 is closed by the disappearance of the comparison signal M, and the constant frequency signal G of the constant frequency mode setting means 28 is input to the laser oscillator 1.

When the moving device 20 is not driven and the stage 1 is stopped, since the servo motor 40 is stopped, a pulse is not output from the rotary encoder 41 and is not counted by the first counter 42. Therefore, the movement signal Zn is not output. Therefore, the comparison signal M
Instead, the switch SW is switched based on the stop of the servomotor 40, that is, the detection pulse of the rotary encoder 41 or the movement signal Zn is not output, and the constant pulse signal G is sent from the constant frequency mode setting means 28 via the switch SW. It is not impossible to operate the laser oscillator 1 by inputting it to the laser oscillator 1.

Next, the operation of the first embodiment will be described. Now, the laser oscillator 1 is oscillated in the constant frequency mode, the pulse laser 4 is constantly irradiated, and the laser oscillator 1 and the optical device 9 such as the reticle 21 and the condenser lens 3 are all in a thermally stable state. It is assumed that

When the moving device 20 starts driving the stage 10 from this state, the comparing unit 36 compares the detected value V by the speed detecting unit 24 with the reference value V0, and the stage 10 moves at a predetermined speed or more. When the movement is started, the detected value V becomes equal to or larger than the reference value V0, it is determined that the stage 10 is moving, and the comparison signal M is output. When the stage 10 starts moving and is moving at a predetermined speed or higher, the irradiation target 5 placed on the stage 10 is pulsed.
This is when the laser 4 can be irradiated. Therefore, the switch SW is switched based on the comparison signal M,
The position priority contact O1 is closed, and the position priority mode setting means 26
The laser oscillation device 1 is operated by the electric signal I, and the pulse laser 4 is oscillated.

On the other hand, when the stage 10 decelerates from the steady moving speed and reaches a stop, the stage 10 relatively moves below the predetermined speed, the detected value V becomes less than the reference value V0, and the comparison signal M is not output. Thereby, the detection means (2
4, 34, 36), it is detected that the irradiation object 5 placed on the stage 10 is not in the irradiation possible position of the pulse laser 4, so that the switch SW is switched on the basis of the fact that the comparison signal M is not output. Is switched to close the constant frequency contact O2, and the electric signal G from the constant frequency mode setting means 28 drives the laser oscillator 1 to oscillate the pulse laser 4. When the stage 10 is relatively moving or stopped at a speed lower than a predetermined speed, the irradiation target 5 placed on the stage 10 is not in the irradiation position of the pulse laser 4.

When the stage 10 stops, 1
When the process for one irradiation target 5 is completed and the target irradiation target 5 is exchanged with another irradiation target 5 by a robot (not shown), the stage 10 on which the irradiation target 5 is placed is placed on both sides in the predetermined direction X. Sufficiently moved to either end, and then the stage 10 is displaced in a direction orthogonal to the predetermined direction X while the irradiation target 5 is placed, and the pulse laser 4 is irradiated while moving in the opposite direction. There are times when it will turn to illuminate 5.

Next, another structural example of the detecting means 39 for detecting that the irradiation object 5 placed on the stage 10 is in the irradiation possible position of the pulse laser 4 will be described with reference to FIGS. 6 to 8. .

In this structural example, as shown in FIG. 7, it is detected that the irradiation object 5 placed on the stage 10 is positioned substantially below the pulse laser 4 and is in the irradiation possible position. The first and second limit switches 50 and 51 are arranged at both ends of the stage 10 in the predetermined direction X. In addition, as a position where each limit switch 50, 51 is contacted, the base 2
The fixing members 52 and 53 are fixedly installed on the laser oscillator 1 side which is the second side.

In this example, the reticle 21 integrated with the base 22 is used.
Fixing members 52 and 53 are fixed to both ends in the predetermined direction X. Of course, the fixing members 52 and 53 are provided on the stage 10, and the limit switches 50 and 51 are provided on the laser oscillator 1 side.
It is also possible to provide. Also, limit switch 5
0, 51 and one fixing member 52, 53,
It is also possible to provide one on the stage 10 and the other on the laser oscillator 1 side so as to avoid interference with the pulse laser 4.

The limit switches 50, 51
Is when the irradiation target 5 placed on the stage 10 moves to a position where the pulse laser 4 can irradiate, that is, the stage 1
A detection signal N (shown in FIG. 6) is generated when 0 shifts from a stopped state to a moving state at a constant predetermined speed (between horizontal portions b and c in FIG. 7 and between horizontal portions f and g in FIG. 7). . That is,
The stage 10 is at the right end in FIG. 7 (between the horizontal portion 0-a in FIG. 8).
From the stop state in which the fixing member 52 comes into contact with the first limit switch 50, the stage 10 starts moving to the left, and the fixing member 52 moves away from the first limit switch 50 (hatched portion a in FIG. 8). -B), the stage 10 moves from a stopped state to a steady predetermined speed (horizontal part b- in FIG. 7).
c), and the left end (horizontal part d-e in FIG. 7).
6) starts moving rightward, the fixing member 53 separates from the second limit switch 51 (between the shaded portions ef in FIG. 7), and the stage 10 is stationary from the stopped state. Movement at a predetermined speed (horizontal part f-
detection signal N (shown in FIG. 6) at the time of shifting to (g). On the other hand, the stage 10 is at the left end (cf in FIG. 7).
Position) and the right end (between 0-b and g- (i) in FIG. 7), the limit switches 50,
When 51 is in contact, the detection signal N disappears.

According to this structural example, the limit switches 50 and 51 are at least when the stage 10 is in a moving state at a constant predetermined speed, that is, at least between bc and fg in FIG. It is detected that the irradiation object 5 placed on the stage 10 apart from the fixing members 52 and 53 is at the irradiation position of the pulse laser 4, and the detection signal N is obtained. A coil (not shown) is excited based on the detection signal N to close the position priority contact O1 of the switch SW, and the pulse signal I of the position priority mode setting means 26 is supplied to the laser oscillator 1. Further, when the stage 10 stops and moves at a steady speed less than a predetermined speed, that is, 0-b in FIG.
During the interval, between c and f, and between g and (i), the limit switches 50 and 51 come into contact with the fixing members 52 and 53, so that the irradiation target 5 placed on the stage 10 is at the irradiation possible position of the pulse laser 4. It is detected that there is not, the detection signal N disappears, and the constant frequency contact O2 of the switch SW is closed. This allows
The laser oscillation device 1 is driven based on the constant frequency signal G of the constant frequency mode setting means 28.

Thus, the pulse laser 4 is in the stage 1
When the irradiation target 5 placed on the stage 0 is positioned between both ends of the irradiation target 5 in the predetermined direction X, the limit switches 50 and 51 are separated from the fixing members 52 and 53, so that the irradiation target 5 placed on the stage 10 is pulsed. It is detected that the laser 4 can be irradiated. When the irradiation object 5 placed on the stage 10 is located below the pulse laser 4 and the irradiation object 5 placed on the stage 10 is at the irradiation possible position of the pulse laser 4, the stage 10 is at a steady predetermined speed ( Since it is moving at a theoretically constant speed), it is desirable that the pulse signal I of the position priority mode setting means 26 is already supplied to the laser oscillation device 1 at this time. Therefore, the switching timing between the constant frequency mode setting means 28 and the position priority mode setting means 26 is at the time of speedup and deceleration, that is, between a and b in FIG.
Stage 1 in the range between cd and ef, and between g and h
It is desirable that the moving speed of 0 exceeds zero and is less than the steady predetermined speed.

[0035]

As can be understood from the above description,
According to the laser driving method and the device thereof according to the present invention,
The following effects can be achieved. When the irradiation target placed on the stage is in the position where pulse laser irradiation is possible,
In order to maintain the advantage of the position priority mode, a pulse laser is oscillated every time the stage moves at a predetermined interval by the signal from the position priority mode setting means, and the irradiation target placed on the stage is the pulse laser. When not in the irradiation possible position, a pulse laser of a constant frequency is oscillated by a signal from the constant frequency mode setting means so as to eliminate the disadvantage of the position priority mode.

As a result, the irradiation of the object to be irradiated with the pulsed laser is accurately performed, and the temperature accompanying the heat generation of the laser oscillator and the temperature of the optical equipment such as the condenser lens are lowered, which affects the output of the laser oscillator. In addition to the above, it is possible to solve the problem that the amount of deformation of the condenser lens and the like changes and the stability of the irradiation energy of the pulse laser is impaired. As a result, it is possible to obtain an effect that it is possible to obtain a high quality irradiation target.

[Brief description of drawings]

FIG. 1 is a diagram showing components of a laser driving device according to an embodiment of the present invention.

FIG. 2 is a diagram showing concrete components of the same.

FIG. 3 is a front view showing the irradiation state of the pulsed laser on the irradiation target on the stage.

FIG. 4 is a diagram similarly showing a position priority mode setting means and a constant frequency mode setting means.

FIG. 5 shows a state of irradiating the irradiation object on the stage with the pulsed laser from the laser oscillator in the same manner.
Is a front view and (b) is a right side view.

FIG. 6 is a diagram showing components of a laser driving device including a detection unit that detects that an irradiation target placed on a stage of another structure example is in a position where a pulse laser can be irradiated.

FIG. 7 is a diagram showing another example of the structure, in which the irradiation target placed on the stage is pulsed to the irradiation target on the stage by a laser driving device including a detection unit that detects that the irradiation target position of the pulse laser is detected. The front view which shows the state which irradiates a laser.

FIG. 8 is a diagram showing a speed-time characteristic of an irradiation target similarly placed on the stage.

[Explanation of symbols]

DESCRIPTION OF SYMBOLS 1: Laser oscillating device, 4: Pulse laser, 5: Irradiation object, 10: Stage, 20: Moving device, 24: Velocity detecting means (stage moving detecting means), 26: Position priority mode setting means, 28: Constant frequency mode setting means, 34:
Reference value setting means (stage movement detection means), 36: comparison means (stage movement detection means), 39: detection means,
50, 51: Limit switch, 52, 53: Fixed member, G: Signal, I: Signal, V: Detected value, V0: Reference value,
X: predetermined direction, SW: switch.

Continued front page    (72) Inventor Junichi Tsuda             2-2-1 Fukuura, Kanazawa-ku, Yokohama-shi, Kanagawa               Japan Steel Works, Ltd. (72) Inventor Takafumi Nii             2-2-1 Fukuura, Kanazawa-ku, Yokohama-shi, Kanagawa               Japan Steel Works, Ltd. F term (reference) 5F072 AA06 GG05 GG07 SS06 YY08

Claims (4)

[Claims] 1. A laser oscillator (1), a stage (10) on which an object to be irradiated (5) is placed, and a stage (10).
And a moving device (20) for reciprocally moving the laser oscillator (1) in a predetermined direction (X) relative to the laser oscillator (1). While moving the stage (10), the pulse laser (from the laser oscillator (1) ( 4) at a predetermined interval (1)
0) In the laser driving method for irradiating the object (5) to be irradiated, a position priority mode setting for outputting a signal (I) for oscillating the pulse laser (4) every time the stage (10) moves at a predetermined interval. Means (26) and constant frequency mode setting means (28) for outputting a constant frequency signal (G) for oscillating a constant frequency pulse laser (4) are provided, and the irradiation target mounted on the stage (10) is provided. When the object (5) is in the irradiation position of the pulse laser (4), the position priority mode setting means (26) is connected to the laser oscillator (1), and the laser oscillator (1) is set to the stage (10). When the pulse laser (4) is oscillated by being driven at every movement of a predetermined interval and the irradiation object (5) mounted on the stage (10) is not in the irradiation position of the pulse laser (4), the constant frequency mode is set. Setting To connecting means (28) for laser oscillation apparatus (1), a laser driving method characterized in that the laser oscillating device (1) is driven at a constant frequency oscillating a pulsed laser (4). 2. A laser oscillator (1), a stage (10) on which an object to be irradiated (5) is placed, and a stage (10).
And a moving device (20) for reciprocally moving the laser oscillator (1) in a predetermined direction (X) relative to the laser oscillator (1). While moving the stage (10), the pulse laser (from the laser oscillator (1) ( 4) at a predetermined interval (1)
0) Detection of detecting that the irradiation object (5) mounted on the stage (10) is in the irradiation possible position of the pulse laser (4) in the drive device of the laser for irradiating the irradiation object (5) on Means (39) and position priority mode setting means (26) for outputting a signal (I) for oscillating the pulse laser (4) each time the stage (10) moves by a predetermined distance,
A constant frequency mode setting means (28) for outputting a constant frequency signal (G) for oscillating a constant frequency pulse laser (4), a position priority mode setting means (26) and a constant frequency mode setting means (28). A switch (SW) for switching and connecting one of them to the laser oscillator (1) is provided, and the irradiation target (5) placed on the stage (10) is switched to the pulse laser (4) by the detection means (39). When it is detected that the irradiation is possible, the position priority mode setting means (26) is connected to the laser oscillator (1) by the switch (SW), and the laser oscillator (1) is set to the predetermined stage (10). The pulse laser (4) is oscillated by driving it at every interval movement, and the irradiation means (5) placed on the stage (10) is moved to the irradiation possible position of the pulse laser (4) by the detecting means (39). When it detects that no, switch (SW) to'll go-between constant frequency mode setting means (2
8) is connected to a laser oscillator (1), and the laser oscillator (1) is driven at a constant frequency to oscillate a pulse laser (4). 3. A detection means (39) for detecting that the irradiation object (5) placed on the stage (10) is at the irradiation possible position of the pulse laser (4), the movement detection means (24, 34, 36), the stage movement detecting means (24, 34, 36) detects that the stage (10) has moved at a predetermined speed or higher, and It is detected that the mounted irradiation object (5) is at the irradiation possible position of the pulse laser (4), and the movement detection means (24, 34, 36) of the stage detects that the irradiation speed is higher than a predetermined speed of the stage (10). 3. The laser according to claim 2, wherein it is detected that the irradiation object (5) mounted on the stage (10) is not in the irradiation possible position of the pulse laser (4) based on the fact that the movement of the pulse laser is not detected. Drive. 4. A detection means (39) for detecting that the irradiation object (5) placed on the stage (10) is in the irradiation possible position of the pulse laser (4), the stage (10) and the laser oscillator. The limit switch (50, 51) provided on one side of the (1) side and the fixing member (5
2, 53) and the pulsed laser (4) is mounted on the stage (10) in a predetermined direction (X) of the irradiation target (5).
Limit switch (5
0, 51) and the fixing members (52, 53) detect that the irradiation object (5) placed on the stage (10) is at the irradiation possible position of the pulse laser (4), and the pulse laser (4) is detected. ) Is the object to be irradiated (5) placed on the stage (10)
Of the limit switch (50, 51) and the fixing member (52, 5) when they are not located between both ends of the predetermined direction (X).
3), the irradiated object (5) placed on the stage (10)
3. The laser driving device according to claim 2, wherein the laser beam is detected not to be irradiated by the pulse laser (4).