1222249 (1) 玖、發明說明 【發明所屬之技術領域】 本發明有關於雷射（激光）之驅動方法及其裝置 【先前技術】 例如在於製造使用於液晶顯示裝置之薄膜電晶體之結 晶化矽時，乃對於由基板所成之被照射物照射脈衝雷射。 此時乃將，以發生激元雷射之雷射振盪裝置所發生之雷射 光引導至光學機器，藉反射鏡使之適當之方向變換，同時 經過長軸均化器及短軸均化器予以整形，將強度予以均一 化之後，經過光栅及聚光透鏡而整形成爲方形線光束之後 照射於照射物。被照射物係設置於射退火裝置之真空室內 〇 此時，爲了使被照射物之全面結晶化起見，以脈衝雷 射之每一射擊地，以線光束之短軸幅之約5〜1 0%之推送節 距地將被照射物間歇地移動於脈衝雷射之短軸方向。對於 被照射物之每一處之雷射光之照射次數係1 0〜20次程度。 按，做爲，以每一預定時間地使雷射振盪裝置予以驅 動，使脈衝雷射振盪之先前方法中，有每一預定時間地驅 動（雷射振盪裝置）而振邊發生一定週波數之脈衝雷射之 方法，稱之謂週波數一定模式。 再者，對於被照射物照射脈衝雷射時，對於雷射振盪 裝置而使平台（工作台）相對移動於預定之方向。此時， 有以一定之間隔之距離·位置來驅動雷射振盪裝置而使脈 -6- (2) (2)1222249 衝雷射振盪之方法。（下面稱之謂 ''位置優先模式〃）。 對於被照射物以週波數一定模式地將雷射振盪•照射 時，隨應於雷射振盪裝置之發熱之溫度，及光學機器內之 聚光透鏡等之溫度係維持於一定，而這些係處於安定狀態 ，所以可以獲得安定之輸出之雷射光，按激光雷射等之氣 體雷射乃只有微小部份 （2〜3%)之能量係變換爲雷射光 ，其餘即成爲熱。 惟在於先前之驅動方法及其裝置乃藉週波數一定模式 及位置優先模式其中之一方而使雷射光振盪•照射，因此 具有下述之技術的課題。 以週波數一定模式對於被照射物振盪·照射雷射光時 ，由於對於將平台對於雷射振盪裝置相對移動於預定方向 之移動裝置及其控制裝置，無關係地振盪·照射雷射光。 因此，具有起因於被照射物之移動速度之變動，不能照射 於等間隔之位置之技術的課題。 另一方面，以位置優先模式的對於被照射物振盪•照 射雷射光時，雖然對於定常的速度而移動中之被照射物係 可以照射於等間隔之位置，惟被照射物停止時，雷射振盪 裝置也會停止，因而隨應於雷射振盪裝置之發熱之溫度以 及透過光學機器內之聚光透鏡等之通過雷射光之構件會降 低，由而不會對於雷射振盪裝置之輸出有所影響，而光學 機器之變形量也改變，由而損及雷射光之照射能量之安定 性。 本發明乃藉相關連地獲取週波數一定模式及,位置優先 -7- (3) (3)1222249 模式之機能，由一面維持位置優先模式之長處，而除其缺 點由而提供一種不會損及雷射振盪裝置及光學機器之安定 性地驅動雷射之方法及其裝置爲目的。 【發明內容】 本發明乃鑑於上述先前技術之課題所創作，其構成如 下。 申請專利範圍第i項之本發明乃：在於具備有，雷射振 盪裝置（1)，及載置被照射物（5)之平台（10)，及將平 台（10)對於雷射振盪裝置（1)而往復相對移動於預定方 向 （X)之移動裝置 （20)。一面移動平台 （10)，同時 以每一預定之間隔地從雷射振盪裝置（1)之脈衝雷射（4) 照射於平台（10)上之被照射物（5)之雷射之驅動方法中 ，使之具備：平台 （10)之每一預定間隔之移動地輸出令 脈衝雷射（4)振盪之訊號（I)之位置優先模式設定手段 (26)，及輸出令一定週波數之脈衝雷射（4)振盪之週波 數一定之訊號（G)之週波數一定模式設定手段（28)，當 載置於平台（10)之被照射物（5)之據於脈衝雷射（4) 之可能照射位置時，將位置優先模式設定手段（2 6)連接 於雷射振盪裝置（1)，而於平台（10)之每一預定間隔 地驅動雷射振盪裝置（1)以資使脈衝雷射（4)振盪，載 置於平台（10)之被照射物（5)係不據於脈衝雷射（4) 之可能照射位置時，即將週波數一定模式設定手段（28) 連接於雷射振盪裝置（I)，而以一定週波數地驅動雷射 -8 - (4) (4)1222249 振盪裝置 （1)，以資使脈衝雷射 （4)振盪爲其特徵之 雷射之驅動方法。 申請專利範圍第2項之本發明乃：在於具備有，雷射振 盪裝置 （1)，及載置被照射物 （5)之平台 （1〇)，及 將平台（1 〇)對於雷射振盪裝置（1)而往復相對移動於 預定方向 （X)之移動於預定方向（X)之移動裝置（20) ，一面移動平台（1 〇)同時以每一預定之間隔地從雷射振 盪裝置 （1)之脈衝雷射 （4)照射於平台 （10)上之被 照射物 （5)之雷射之驅動裝置中，具備：用於檢測載置 於平台 （10)之被照射物 （5)之在於脈衝雷射 （4)之 可能照射位置之檢測手段 （39)，及平台 （1 0)之每一 預定間隔之移動地，輸出令脈衝雷射（4)振盪之訊號 (I)之位置優模式設定手段（26)，及輸出令一定週波數 之脈衝雷射（4)振盪之週波數一定之訊號（G)之週波 數一定模式設定手段 （28)，以及將位置優先模式手段 (2 6)及週波數一定模式設定手段（28)中之一方切換連 接於雷射振盪裝置（1)之開關SW，當由檢測手段（39) 而檢測出，載置於平台（10)之被照射物（5)之在於脈 衝雷射（4)之可能照射位置時，藉開關（SW)而使位置 優先模式手段（26)連接於雷射振盪裝置（1)，而以平 台 （1〇)之每一預定間隔之移動地驅動雷射振盪裝置（1) 而使脈衝雷射振盪，而由檢測手段（39)檢測出，載置於 平台（10)之被照射物（5)之不在於脈衝雷射（4)之可 能照射位置上時，藉開關（SW)而將週波數一定模式設定 -9- (5) (5)1222249 手段（28)連接於雷射振盪裝置（1)，以一定週波數來驅 動雷射振盪裝置（1)而使脈衝雷射（4)振盪爲其特徵之 雷射之驅動裝置。 申請專利範圍第3項之本發明乃上述用於檢測，載置於 平台（10)之被照射物（5)之在於脈衝；雷射（4)之可 能照射位置之檢測手段 （39)係由平台之移動檢測手段 (24，34，36)所構成，依據，由平台之移動檢測手 （24， 34，3 6)之檢測出，平台（10)之預定，速度以上之移動 之事實來檢測出該載置於平台（10)之被照射物（5)係在 於脈衝雷射（4)之可能照射之位置上，而依據，由平台之 移動檢測手段 （24，34，36)之沒有檢測出平台 （10)之 預定速度以上之移動之事實來檢測出該載置於平台 （10) 之被照射物 （5)係不在於脈衝雷射 （4)之可能照射之位 置上爲其特徵之如申請專利範圍第2項所述之雷射之驅動裝 置0 申請專利範圍第4項之本發明乃上述用於檢測載置於平 台 （10)之被照射物（5)係在於脈衝雷射 （4)之可能照 射位置之檢測手段（39)係由，設置於平台（10)及雷射 振盪裝置（1)側之中之一方之限制開關（50，51)，以及 設於另一方之固定構件 （52，53)所構成，當脈衝雷射 (4) 之據於載置於平台（10)之被照射物（5)之預定方向 (X)之兩端部之間位置時，藉由限制開關（50，51)及固 定構件（52，53)而檢測該載置於平台（10)之被照射物 (5) 之在於脈衝雷射 （4)之可能照射位置，當脈衝雷射 -10- (6) (6)1222249 (4)之不據於載置於平台（10)之被照射物（5)預定方向 (X)之兩端部之間之位置時，藉由限制開關（50，51)及 固定構件 （52，53)而檢測該載置於平台（1〇)之被照射 物（5)之不在於脈衝雷射（4)之可能照射位置爲特徵之 如申請專利範圍第2項所述之雷射驅動裝置。 【實施方式】 第1圖乃至第5圖表示有關本發明之雷射之驅動裝置之 一實施形態。圖中符號1 0係平台（工作台），如第3圖所 示，將由基板所成之被照射物、5載置於平台1 0上狀態的， 藉由移動裝置20而將平台1〇對於來自雷射振盪裝置1之脈 衝雷射4而相對地往復移動於預定方向X (掃瞄之X軸方向） 〇 當然亦可以替代於移動平台1 〇而移動雷射振盪裝置1 〇 雷射振盪裝置1係如第5圖（A)所示固設於基台22， 發生由脈衝雷射所成之激元雷射，而將所發生之雷射光 A1引導至包含光柵21及聚光透鏡3之光學機器9，以反射 鏡7使之變換方向，經過長軸均化器2a及短軸均化器26予 以整形使強度均一化之後，再度以反射鏡8變換方向，經 過光栅2 1及聚光透鏡3由而整形成爲由方形之線光束所成 之脈衝雷射4，而照射於載置於平台〗〇上之被照射物5。被 照射物5係設置於雷射退火裝置之真空室內。 移動裝置20係具體的設備有第4圖所示之伺服馬達4〇 -11 ► (7) (7) 1222249 。由伺服馬達4 0之正逆之旋轉，介著圖外之球螺桿機構而 將平台1 0每一間隔地間歇或連續予以往復運動。隨應於平 台10之移動於預定方向X，在於被照射物5之預定方向X之 全幅地照射脈衝雷射4也。 被照射物5乃，如第5圖所示，在於玻璃基板6上’形 成了薄的a- Si (非晶形矽）膜5a者，對此a- Si膜5a照射脈 衝雷射4，由而使a- Si膜5 a予以結晶化，做成薄的p- Si ( 多晶矽）膜5 b。 一面使平台10移動一面對於被照射物5之預定方向X 之全幅地照射脈衝雷射4之後，將平台變位爲與預定方向 X成直角之方向，同時，將平台10反轉其移動方向，而在 被照射物5之預定方向X之全幅地照射脈衝雷射4，由而在 於被照射物5之全面照射脈衝雷射4，而更換全面均達到預 定之照射次數 （1〇〜20次）之被照射物5，而一個接一個地 對於被照射物5照射脈衝雷射4也。 脈衝雷射4乃藉位置優先模式設定手段26之脈衝訊號I 或週波數一定模式設定手段28之週波數一定之脈衝訊號G 之一方而驅動雷射振盪裝置1使之振盪。 因此在於基台2 2將設置用於檢測平台1 〇之移動速度之 速度檢測手段24，及微電腦。 微電腦係如第2圖所示將做爲：第2圖所示之設定平台 10之移動速度之基準値V0之基準値設定手段34，及比較手 36，及位置優先模式設定手段Μ之要部，及週波數一定模式 設定手段28而機能之。該基準値v〇係對應於平台1〇不停止 -12 - (8) (8)1222249 而以預定速度移動之狀態之値，即對應於移動速度係超過零 ，而以較平台10之定常之移動速度（理論上的一定速度） 之値稍低之速度之値，而平台1 〇之成爲定常的移動狀態時即 切換爲位置優先模式也。 又，速度檢出手段24，基準値設定手段34及比較手段 3 6係做爲檢測載置於平台1 0之被照射物5係大約據於脈衝雷 射4之下方之位置而係位於可能照射位置之平台之移動檢測 手段（檢測手段3 9 (第1圖所示）之機能，亦可以檢測不在 於可能照射位置之情形。 下面參照第4圖說明位置優先模式設定手段26。 以旋轉編碼器4 1檢測出伺服馬達40之旋轉數（旋轉角 度），而以第1計數器42來計數該檢測出之脈衝。而平台1 0 之移動長度每一次達到預定値時生成由脈衝訊號所成之移動 訊Zii而從第1計數器42，該移動訊號Zri乃每一脈衝各對應於 平台10之例如lum之移動長度。 該移動訊號Zn係由第2計數器43所計數，每達計數値 1/N1地做爲平台10之每一個預定間隔之移動，輸出令脈衝雷 射4振盪之訊號I，依據此訊號I使雷射振盪裝置1動作。例如 ，以移動裝置20來驅動平台10之狀態下，平台10及被照射物 5之移動距離係每1 mm地照射一個脈衝雷射之情形時，對於 第2計數器43之N1係設定lmm/lum=l，000之値，於是從第2計 數器43而平台10之每移動1mm地發生訊號I，而此訊號乃如 後述經由開關SW輸入於雷射振盪裝置1，而實施脈衝雷射4 之照射。 - 1 j - 1222249 Ο) 該第1計數器42及第2計數器43係設置於微電腦內。而由 第1計數器42，第2計數器43，旋轉編碼器41以及移動裝置20 之伺服馬達40來構成位置優先模式設定機構26。 週波數一定模式設定手段28係輸出週波數一定之訊號G ，該訊號G乃如後述，經由開關SW輸入於雷射振盪裝置1 ，使雷射振盪裝置1動作振盪出一定之週波數之脈衝雷射4。 伺服馬達40係依據第4圖所示之驅動訊號R4而由伺服控 制裝置4 6所驅動。從驅動訊號R4減算移動訊號Zn而成了零 時就停止。平台1 0及被照射物5也一齊停止。而後，伺服馬 達40乃被逆旋轉驅動，從驅動訊號R4減算移動訊號Ζη，在 成了零時再停止，平台10及被照射物5也停止，反複此過程 就可以使平台10上之被照射物5對於來自雷射振盪裝置1之脈 衝雷射4地相對往復移動於預定方向X。 又，在於比較手段3 6乃，如第2圖所示，比較由速度測 手段24之檢測値V與基準値VO，如檢測値（檢測出之値）係 基準値VO以上時判斷爲平台1 0係在於移動中，輸出比較訊 號Μ，依據此比較訊號Μ而切換開關SW。依位置優先模式設 定手段26之脈衝訊號I來驅動雷射振盪裝置。 任一方面檢測値V係未滿基準値VO時，判斷爲平台10係 事實上停止。依據不輸出比較訊號Μ來切換開關SW，而依 週波數一定模式設定手段28之一定週波數之脈衝訊號G來驅 動雷射振盪裝置1。所以速度檢測手段24，基準値設定手段 3 4及比較手段3 6乃得依據平台1 0之以預定速度以上地移動而 接點之會閉合之開關（平台之移動檢測手段）來構成。 -14- (10) (10)1222249 又’載置於平台1 0之被照射物5之據於脈衝雷射4之下 方之位置時，平台10乃以理論之一定速度而移動，載置於平 台10之被照射物5係處於脈衝雷射4之可能照射位置。 開關SW係如第4圖所示，具有位置優先接點〇1及週波 數一定接點02，而由比較手段36之比較訊號Μ之存在而圖外 之線圈係被激磁，而閉合位置優先接點〇 1，而位置優先模 式設疋手段26之脈衝訊號I係輸入於雷射振盪裝置1。又，由 於比較訊號Μ之消減而關閉週波數一定接02，於是週波數一 定模式設定手段28之週波數一定之訊號G，乃被輸入於雷射 振盪裝置1也。 又，移動裝置20之沒有被驅動，平台1在於停止時，由 於伺服馬達40係在於停止中，所以從旋轉編碼器4 1不輸出脈 衝，沒有由第1計數器42所計數，所以不會輸出移動訊號Ζη ，所以替代於比較訊號Μ，詳述之即依據伺服馬達40之停止 ，換言之依據旋轉編碼器4 1之不輸出檢測脈衝或不輸出移動 訊Ζη而切換開關SW，經由開關SW，而從週波數一定模式設 定手段28而將一定脈衝之訊號G輸入於雷射振盪裝置1，而 使雷射振盪裝置1動作也不是不可能。 下面說明上述一實施形態之作用。現在，以週波數一 定模式而雷射振盪裝置1。而脈衝雷射4係定常（經常地） 地照射，而假定雷射振盪1及光栅21，聚光透鏡3等之光.學機 器9係均處於熱的安定狀態。 從此狀態，以移動裝置20開始平台10之驅動時，先於 比較手段36比較，依速度檢測手段24之檢測値V與基準値V0 -15- (11) (11)1222249 ，平台1 〇之開始以預定速度以上之速度移動時，檢測値V將 成爲超過基準値VO以上，判斷爲平台10在移動中，輸出比 較訊號Μ，此平台1 0之開始移動，而以預定速度以上之速度 移動時，載置於平台1 0之被照射物5係處脈衝雷射4之可能照 射之位置上之狀態。於是依據此比較訊號Μ來切換開關SW ，閉合位置優先接點01，依位置優先模式設定手段26之電 氣訊號I而使雷射振盪裝置1動作令脈衝雷射4振盪也。 另一方面，平台1 0係從定常的移動速度減速到停止時 ，即構成以未滿預定速度實施相對移動之情形，檢測値V即 爲末滿（小於）基準値V0之情形，於是不輸出比較訊號Μ 。於是，由檢測手段 （24，34，36)而檢測出載置於平台 1 〇之被照射物5係不在於脈衝雷射4之可能照射之位置上，於 是依據不輸出比較訊號Μ而切換SW，使週波數一定接點02 閉合，依週波數一定模式設定手段28之電氣訊號G而驅動雷 射振盪裝置1。使脈衝雷射4振盪。該平台10之以未滿預定速 度而行相對移動或停止時，就是載置於平台1 0之被照射物5 之不據於脈衝雷射4之可能照射之位置之情形。 該平台1〇之停止之情形乃有：除了對於一個被照射物5 之處理完竣，而以圖外之產業機器人更換爲另一其他被照射 物5之外，其他有，載置3被照射物5之平台10係充分的移動 到預定方向X之兩側之任一端部，而後以載置3被照射物5之 狀態地，使平台10變位爲直交於預定方向X之方向，一面移 動於相反之方向之爲了對被照射物5照射脈衝雷射4而實施變 換方向之情形。 -16- (12) (12)1222249 接著參照第6圖〜第8圖說明，用於檢測出載置於平台1〇 之被照射物5之在於脈衝雷射4之可能照射位置之檢測手段39 之其他構造例。 在此構造例乃，如第7圖所示，在於平台1 0之預定方 向X之兩端部配設，用於檢測載置於平台1 〇上之被照射物 5係大致據於脈衝雷射4之下方位置而可能照射位置之第1 ，第2限制開關50，5 1。又做爲接觸於各限制開關50，5 1 之位置而在於基台22側之雷射振盪裝置1側固設固定構52 ，53 〇 本例中，在於與基台22—體之光栅21之預定方向X之 兩端部固設固定構件5 2，5 3。當然在於平台1 〇設置固定構 件52，5 3，在於雷射振盪1側設置限制開關50，5 1也可能 。再者，將限制開關5 0，5 1及固定構件5 2，5 4分別使用1 個，且設在可以避開與脈衝雷射4之位置，而一方設於平 台1 0，另一方設於雷射振盪1側亦可能。 又，此限制開關5 0，5 1係載置於平台丨〇之被照射物5 之移fT於脈衝雷射4之可能照射之位置時，換言之平台1 〇 之從停止狀態而移行於定常的預定速度之移動狀態（第7 圖之水平部b - c間及第7圖之水平部g間）時產生檢測訊 號N (第6圖）。換言之，平台10在第7圖中，據於右端位 置（第8圖之水平部0- a間），固定構件52係從接觸於第1 限制開關50之停止狀態而平台10係開始朝左方之移動，固 定構件52係從第1限制開關5〇離開（第8圖之斜線部a_ b間） ，平台1 〇係從停止狀態，移行至以定常之預定速度之移動 -17- (13) (13)1222249 狀態（第7圖之水平部b- c間）時，及據於左端（第7圖之 水平部d- e間）位置之平台10係開始朝右方向之移動，固 定構件53係從第2限制開關51離開（第7圖之斜線部e- f間） ’平台1 〇之從停止狀態移行至，以定常速度之移動狀態 (第7圖之水平部f- g間）時，產生了檢測訊號N (表示於第 6圖）。另一方面平台10之據於左端（第7圖之c-f間）及 右端（第7圖之〇· b間及g· (i)間）位置，而固定構件52， 53有限制開關50，51接觸時，檢測訊號N會消減也。 % 依此構造例時，至少平台10係在於定常之預定速度下 之移動狀態時，換言之至少在於第7圖上之b· c間及f- g間時 ’ ，限制開關5 0，5 1係離開固定構件5 2，5 3，而載置於平台1 0 · 之被照射物5係被檢測出處於脈衝雷射4之照射可能之位置上 之事實，於是可以獲得檢測訊號N。依據此檢測訊號N，使 圖外之線圏激磁，閉合圖外之開關SW之位置優先接點〇1， 而將位置優先模式設定手段26之脈衝訊號I供給於雷射振盪 裝置1。又平台10係停止或以未滿定常之預定速度地移動時 # ，換言之，在於第7圖上之0· b間，c- f間及g- (i)間時，限 制開關50，51係接觸於固定構件52，53，而載置於平台1〇之 被照射物5係被檢測出，不處於脈衝雷射4之可能照射之位置 · ，檢測訊號N係消減，由而閉合開關SW之週波數一定接點 . 02。由而依據週波數一定模式設定手段28之週波數一定之 訊號G，而驅動雷射振盪裝置1也。 於是，脈衝雷射4之據於，載置於平台10之被照射物5之 預定方向X之兩端部之間之位置時，藉限制開關5 0，5 1之離 -18- (14) (14)1222249 開固定構件52，53，由而可以檢測出載置於平台10之被照射 物5之處於脈衝雷射4之可能照射位置之事實。 按，載置於平台10之被照射物5係據於脈衝雷射4之可能 照射位置時，由於平台10係以定常的預定速度（理論上之 一定速度）地在於移動中，所以在此時，已經有將位置優 先模式設定手段26之脈衝訊號I供給於雷射振盪裝置1爲宜。 所以週波數一定模式設定手段28與位置優先模式設定 手段26之切換時期係，在於增速減速時，換言之於第7圖上 之a- b間，c- d間，e- f間及g- h間之範圍，而平台10之移動 速度超過零，未滿定常的預定速度之時爲合宜。 (發明之效果） 如上面之說明而可以了解，依本發明之雷射之驅動方 法及其裝置時可以奏出下述之效果。 載置於平台上之被照射物在處於脈衝雷射之可能照射 位置時，即可能維持位置優先模式之長處地，藉由從位置優 先模式設定手段之訊號而，在於平台之每預定間隔之移動地 使雷射振盪裝置。 又，載置之平台上之被照射物不在於脈衝雷射之可能 照射位置時，即能去除位置優先模式之缺點地藉從週波數一 定模式設定手段之訊號而使一定週波數之脈衝•雷射振盪者 〇 由而可以兩立：將脈衝雷射正確的照射於被照射物， 以及，解消：隨應於雷射振盪裝置之發熱所致之溫度及聚 -19- (15) (15)1222249 光透鏡等之光學機器之溫度之降低，由而不但對於雷射振盪 裝置之輸出有所影響，聚光透鏡等之變形量改變’損及脈衝 雷射之照射能量之安定性等等之不合宜情形’結果可以獲得 ，高品質之被照射物之效果也。 【圖式簡單說明】 第1圖表示，依本發明之一實施形態之雷射驅動裝置之 構成要素之圖。 第2圖表示，同具體的構成要素之圖。 第3圖表示，同對於平台上之被照射物之脈衝•雷射之 照射狀態之正面圖。 第4圖表示，同位置優先模式設定手段及週波數一定模 式設定手段之圖。 第5圖表示自同雷射振盪裝置之脈衝•雷射照射於平台 上之被照射物之狀態，（A)係正面圖，（B)係右側面圖1222249 (1) Description of the invention [Technical field to which the invention belongs] The present invention relates to a laser (laser) driving method and its device [prior art] For example, it is used to manufacture crystalline silicon for thin film transistors used in liquid crystal display devices At that time, pulse laser is irradiated on the object to be irradiated formed by the substrate. At this time, the laser light generated by the laser oscillation device that generates the excimer laser is guided to the optical device, and the appropriate direction is changed by the mirror, and at the same time it is passed through the long axis homogenizer and the short axis homogenizer. After shaping, uniformizing the intensity, it is shaped into a square linear beam through a grating and a condenser lens, and is then irradiated to the irradiated object. The object to be irradiated is set in the vacuum chamber of the radiation annealing device. At this time, in order to fully crystallize the object to be irradiated, each firing location of the pulse laser is about 5 to 1 of the short axis width of the line beam. The push pitch of 0% moves the irradiated object intermittently in the short axis direction of the pulse laser. The number of times the laser light is irradiated to each of the objects is about 10 to 20 times. Press, as, the laser oscillation device is driven every predetermined time, and in the previous method of pulsed laser oscillation, the laser oscillation device is driven every predetermined time (laser oscillation device) and a certain number of vibrations occurs at the edge of the vibration. The method of pulsed laser is called a certain frequency mode. In addition, when the subject is irradiated with a pulse laser, the platform (table) is relatively moved to a predetermined direction with respect to the laser oscillation device. At this time, there is a method of driving the laser oscillation device at a certain distance and position to pulsate the pulse -6- (2) (2) 1222249. (Hereafter referred to as `` location-first mode ''). When the laser is oscillated and irradiated with a constant frequency for the object to be irradiated, the temperature corresponding to the heat generated by the laser oscillating device and the temperature of the condenser lens in the optical device are kept constant. It is in a stable state, so you can get a stable output of laser light. According to gas lasers such as laser lasers, only a small part (2 ~ 3%) of the energy system is converted into laser light, and the rest becomes heat. However, the previous driving method and its device oscillate and irradiate laser light by one of a fixed frequency mode and a position priority mode, and therefore have the following technical problems. When the subject is oscillated and irradiated with laser light in a fixed cycle number mode, the moving device and its control device that relatively move the platform to the laser oscillating device in a predetermined direction irrelevantly oscillate and irradiate the laser light. Therefore, there is a problem of a technology that cannot be irradiated to equally spaced positions due to fluctuations in the moving speed of the object to be irradiated. On the other hand, when oscillating and irradiating laser light on the object in the position priority mode, although the object to be irradiated can be irradiated at regular intervals while moving at a constant speed, the laser is emitted when the object is stopped. The oscillating device will also stop. Therefore, the temperature of the laser oscillating device and the components passing through the laser such as the condenser lens in the optical device will be reduced in accordance with the heating temperature of the laser oscillating device. Influence, and the amount of deformation of the optical machine also changes, thereby jeopardizing the stability of the irradiation energy of the laser light. The present invention is based on the function of obtaining a certain number of cycles and a mode of position priority -7- (3) (3) 1222249 mode, maintaining the advantages of the position priority mode on one side, and in addition to its disadvantages, it provides a A method and a device for stably driving a laser oscillating device and an optical machine that impair the stability of the laser oscillating device and the optical machine are aimed at. [Summary of the Invention] The present invention has been made in view of the problems of the foregoing prior art, and has the following constitution. The invention of item i in the scope of patent application is that the invention includes a laser oscillation device (1), a platform (10) on which an object to be irradiated (5) is placed, and a platform (10) for the laser oscillation device ( 1) A reciprocating relative moving device (20) in a predetermined direction (X). A method for driving a laser moving a platform (10) while irradiating an object (5) on the platform (10) from a pulse laser (4) of the laser oscillation device (1) at predetermined intervals. It is provided with: a position priority mode setting means (26) for outputting a pulse laser (4) oscillation signal (I) at each predetermined interval of the platform (10), and outputting pulses with a certain number of cycles Laser (4) Oscillation cycle number is fixed Signal (G) Cycle frequency is fixed Mode setting means (28), when the object (5) on the platform (10) is irradiated by pulse laser ( 4) When possible irradiation position, the position priority mode setting means (2 6) is connected to the laser oscillation device (1), and the laser oscillation device (1) is driven at each predetermined interval of the platform (10) to provide When the pulse laser (4) is oscillated, and the illuminated object (5) placed on the platform (10) does not depend on the possible irradiation position of the pulse laser (4), the mode setting means (28) is set for the cycle number Connected to the laser oscillation device (I), and drive the laser -8-(4) (4) 1222249 oscillation device with a certain number of cycles (1 ), A laser driving method that uses pulse laser (4) to oscillate as its characteristic. The invention of item 2 of the scope of patent application is that the invention includes a laser oscillation device (1), a platform (10) on which an object to be irradiated (5) is placed, and the platform (1 〇) for laser oscillation The device (1) moves back and forth relative to the predetermined direction (X), and the mobile device (20) moves in the predetermined direction (X). While moving the platform (10), the laser oscillation device ( 1) The pulsed laser (4) is irradiated on the platform (10) and the laser driving device for the laser (5) is provided with a device for detecting the object (5) placed on the platform (10) It lies in the detection means (39) of the possible irradiation position of the pulse laser (4), and at each predetermined interval of the platform (1 0), the position of the signal (I) that oscillates the pulse laser (4) is output. Optimal mode setting means (26), and a pulse number laser (4) that oscillates a fixed number of cycles, a fixed number of cycles (G), and a mode setting method (28), and a mode that prioritizes position (2 6) and one of the fixed mode setting means (28) is switched to be connected to the laser When the switch SW of the device (1) is detected by the detection means (39), when the illuminated object (5) placed on the platform (10) lies in a possible irradiation position of the pulse laser (4), the switch ( SW) and the position priority mode means (26) is connected to the laser oscillation device (1), and the laser oscillation device (1) is driven to move at every predetermined interval of the platform (10) to oscillate the pulse laser When detected by the detection means (39), when the illuminated object (5) placed on the platform (10) is not in the possible irradiation position of the pulse laser (4), the cycle number is switched by the switch (SW) Certain mode setting -9- (5) (5) 1222249 Means (28) are connected to the laser oscillation device (1) and drive the laser oscillation device (1) with a certain number of cycles to oscillate the pulse laser (4) The laser driving device is its characteristic. The invention of item 3 in the scope of the patent application is the above-mentioned detection means (39) for detecting the irradiated object (5) placed on the platform (10); the detection means (39) of the possible irradiation position of the laser (4) is The platform's movement detection means (24, 34, 36) is constituted, based on which is detected by the platform's movement detection hand (24, 34, 36), the platform (10) is scheduled, and the fact that the speed is above the speed is detected. The irradiated object (5) carried on the platform (10) is located at the possible irradiation position of the pulse laser (4), and according to the non-detection of the platform's movement detection means (24, 34, 36) Detect the fact that the platform (10) moves above the predetermined speed to detect that the illuminated object (5) placed on the platform (10) is not a feature of the pulse laser (4) where it may be illuminated The driving device of the laser as described in the second item of the patent application 0 The invention of the fourth item of the patent application is the above-mentioned detection of the object (5) placed on the platform (10) by a pulsed laser ( 4) The detection method (39) of the possible irradiation position is set on the platform (10) One of the laser oscillation device (1) is a limit switch (50, 51) and a fixed member (52, 53) is provided on the other side. When the pulse laser (4) is placed on the When the position between the two ends of the object (5) in the predetermined direction (X) of the platform (10) is detected by the limit switch (50, 51) and the fixed member (52, 53) (10) The object to be irradiated (5) is the possible irradiation position of the pulse laser (4), when the pulse laser -10- (6) (6) 1222249 (4) is not placed on the platform (10 ) Of the object (5) between the two ends in the predetermined direction (X), the load on the platform (1〇) is detected by the limit switches (50, 51) and the fixed members (52, 53). ) Of the object to be irradiated (5) is not the laser driving device described in item 2 of the scope of patent application, which is characterized by the possible irradiation position of the pulsed laser (4). [Embodiment] Figs. 1 to 5 show one embodiment of a laser driving device according to the present invention. Symbol 10 in the figure is a platform (workbench). As shown in FIG. 3, when the object to be irradiated formed by the substrate and 5 are placed on the platform 10, the platform 10 is moved by the mobile device 20. The pulse laser 4 from the laser oscillation device 1 is relatively reciprocated in a predetermined direction X (the X-axis direction of the scanning). Of course, it can also be replaced with the mobile platform 1 〇 and the laser oscillation device 1 〇 the laser oscillation device 1 is fixed on the base 22 as shown in FIG. 5 (A), an excimer laser generated by a pulse laser is generated, and the generated laser light A1 is guided to a lens including a grating 21 and a condenser lens 3 The optical machine 9 changes the direction with the reflecting mirror 7 and shapes it by the long-axis homogenizer 2a and the short-axis homogenizer 26 to make the intensity uniform, and then changes the direction again with the mirror 8 and passes through the grating 21 and the light condensing. The lens 3 is thus formed into a pulse laser 4 formed by a square line beam, and irradiates the object 5 to be irradiated on the platform. The irradiated object 5 is installed in a vacuum chamber of a laser annealing apparatus. The specific equipment of the mobile device 20 is a servo motor 4-10 shown in FIG. 4 ► (7) (7) 1222249. The forward and reverse rotation of the servo motor 40, through the ball screw mechanism outside the figure, intermittently or continuously reciprocates the platform 10 at intervals. The pulse laser 4 is also irradiated on the entire width of the predetermined direction X of the object 5 in accordance with the movement of the platform 10 in the predetermined direction X. The object to be irradiated 5 is, as shown in FIG. 5, a thin a-Si (amorphous silicon) film 5 a formed on the glass substrate 6, and the a-Si film 5 a is irradiated with a pulse laser 4 so that The a-Si film 5a is crystallized to form a thin p-Si (polycrystalline silicon) film 5b. While moving the platform 10 while irradiating the pulse laser 4 to the full width of the predetermined direction X of the irradiated object 5, the platform is displaced to a direction at right angles to the predetermined direction X, and at the same time, the platform 10 is reversed in its moving direction. The pulse laser 4 is irradiated in the full direction of the irradiated object 5 in the predetermined direction X, so that the pulse laser 4 is irradiated in all directions of the irradiated object 5, and the predetermined number of irradiations (10 to 20 times) are all replaced. The object 5 is irradiated, and the pulse laser 4 is also irradiated to the object 5 one by one. The pulse laser 4 drives the laser oscillator 1 to oscillate by one of the pulse signal I of the position priority mode setting means 26 or the pulse signal G of a constant cycle number setting mode 28. Therefore, the base station 22 will be provided with a speed detection means 24 for detecting the moving speed of the platform 10, and a microcomputer. The microcomputer is shown in FIG. 2 as follows: the reference for setting the moving speed of the platform 10, the reference for V0, and the setting means 34, the comparison hand 36, and the position priority mode setting means M shown in FIG. , And the cycle number constant mode setting means 28 and function. This reference 値 v〇 corresponds to the state where the platform 10 does not stop -12-(8) (8) 1222249 and is moving at a predetermined speed, that is, it corresponds to the movement speed exceeding zero, and it is The speed of movement (theoretical constant speed) is slightly lower than the speed, and the platform 10 switches to the position priority mode when it becomes a constant movement state. In addition, the speed detection means 24, the reference chirp setting means 34, and the comparison means 3 and 6 are used to detect the irradiated object 5 placed on the platform 10, and the irradiated object is located at a position possible to be irradiated according to the position below the pulse laser 4. The function of the positional platform's movement detection means (detection means 39 (shown in Fig. 1)) can also detect situations that do not lie on the possible irradiation position. The position priority mode setting means 26 will be described below with reference to Fig. 4. Using a rotary encoder 4 1 The rotation number (rotation angle) of the servo motor 40 is detected, and the detected pulse is counted by the first counter 42. Each time the movement length of the platform 10 reaches a predetermined time, a movement caused by a pulse signal is generated. From the first counter 42, the moving signal Zri is the moving length of each pulse corresponding to, for example, the lum of the platform 10. The moving signal Zn is counted by the second counter 43, each time the count is 値 1 / N1 As each movement of the platform 10 at a predetermined interval, a signal I that causes the pulsed laser 4 to oscillate is output, and the laser oscillation device 1 is operated according to this signal I. For example, when the platform 10 is driven by the mobile device 20 When the moving distance of the platform 10 and the irradiated object 5 is irradiated with a pulse laser every 1 mm, the N1 of the second counter 43 is set to 1 mm / lum = 1, 000, so from the second counter 43 A signal I occurs every 1 mm of the movement of the platform 10, and this signal is input to the laser oscillation device 1 via the switch SW as described later, and the pulse laser 4 is irradiated.-1 j-1222249 〇) The first counter 42 And the second counter 43 is installed in the microcomputer. The first counter 42, the second counter 43, the rotary encoder 41, and the servo motor 40 of the mobile device 20 constitute a position priority mode setting mechanism 26. The fixed-cycle number setting mode 28 outputs a signal G with a fixed cycle number. The signal G is input to the laser oscillation device 1 via the switch SW as described later, so that the laser oscillation device 1 operates to oscillate a certain number of cycles. Pulse laser 4. The servo motor 40 is driven by a servo control device 46 according to a drive signal R4 shown in FIG. It is stopped when the moving signal Zn is subtracted from the driving signal R4 to zero. The platform 10 and the irradiated object 5 are also stopped at the same time. Then, the servo motor 40 is driven in reverse rotation, subtracting the movement signal Zη from the driving signal R4, and then stops when it becomes zero. The platform 10 and the object 5 to be irradiated also stop. Repeating this process can make the platform 10 be irradiated. The object 5 relatively reciprocates in a predetermined direction X with respect to the pulse laser 4 from the laser oscillation device 1. The comparison means 36 is, as shown in FIG. 2, comparing the detection 値 V and the reference VO by the speed measuring means 24. If the detection 値 (the detected 値) is above the reference 値 VO, it is judged as the platform 1. 0 is in the middle of movement, and outputs a comparison signal M, and switches SW according to the comparison signal M. The laser oscillator is driven by the pulse signal I of the position priority mode setting means 26. When the detection of the “V series is less than the reference” VO in any aspect, it is determined that the platform 10 series has actually stopped. The switch SW is switched based on not outputting the comparison signal M, and the laser oscillation device 1 is driven by the pulse signal G of a certain cycle number of the cycle setting mode 28. Therefore, the speed detection means 24, the reference / setting means 34, and the comparison means 36 may be constituted according to a switch (the platform's movement detection means) that moves the platform 10 at a predetermined speed or higher and the contacts are closed. -14- (10) (10) 1222249 When the irradiated object 5 placed on the platform 10 is located under the pulse laser 4, the platform 10 moves at a certain theoretical speed and placed on The irradiated object 5 of the platform 10 is in a possible irradiation position of the pulse laser 4. As shown in FIG. 4, the switch SW has a position priority contact 〇1 and a fixed number of contact contacts 02, and the presence of a comparison signal M by the comparison means 36 causes the coil system outside the figure to be excited, and the closed position has priority. The contact signal 01 is input to the laser oscillation device 1 by the pulse signal I of the position priority mode setting means 26. In addition, because the comparison signal M is reduced and the closed frequency is fixedly connected to 02, the fixed frequency signal G of the fixed frequency setting mode 28 is input to the laser oscillation device 1 as well. In addition, when the mobile device 20 is not driven, when the platform 1 is stopped, since the servo motor 40 is stopped, no pulse is output from the rotary encoder 41, and it is not counted by the first counter 42, so no movement is output. The signal Zη is replaced by the comparison signal M. In detail, it is based on the stop of the servo motor 40. In other words, the switch SW is switched without switching the detection pulse or the movement signal Zn by the rotary encoder 41. It is not impossible to input the signal G of a fixed pulse to the laser oscillation device 1 with the fixed-cycle number setting mode 28. The effect of the above embodiment will be described below. Now, the laser oscillation device 1 is set in a fixed cycle number mode. The pulse laser 4 is irradiated steadily (often), and it is assumed that the laser oscillation 1 and the light of the grating 21, the condenser lens 3, etc. are all in a thermally stable state. From this state, when the driving of the platform 10 is started with the mobile device 20, the comparison is performed before the comparison means 36, and the detection 値 V and the reference 値 V of the speed detection means 24 are compared with V0 -15- (11) (11) 1222249, and the start of the platform 〇 When moving at a speed higher than a predetermined speed, the detection 値 V will exceed the reference 値 VO or higher. It is determined that the platform 10 is moving and outputs a comparison signal M. When the platform 10 starts to move and moves at a speed higher than a predetermined speed , Placed on the platform 10 at the irradiated object 5 system at the position where the pulse laser 4 may be irradiated. Therefore, the switch SW is switched according to the comparison signal M, the position priority contact 01 is closed, and the laser oscillation device 1 is operated to cause the pulse laser 4 to oscillate according to the electrical signal I of the position priority mode setting means 26. On the other hand, when platform 10 decelerates from a constant moving speed to a stop, it constitutes a case where relative movement is performed at a speed less than the predetermined speed. The detection of 値 V is the case of the final full (less than) reference 値 V0, so it does not output. Compare signal M. Therefore, the detection means (24, 34, 36) detects that the irradiated object 5 placed on the platform 10 is not in the possible irradiation position of the pulse laser 4, so the SW is switched based on not outputting the comparison signal M Then, the fixed cycle number contact 02 is closed, and the laser oscillation device 1 is driven according to the electrical signal G of the constant cycle number mode setting means 28. The pulse laser 4 is oscillated. When the platform 10 is relatively moved or stopped at a speed less than a predetermined speed, it is the situation where the irradiated object 5 placed on the platform 10 does not depend on the possible irradiation position of the pulse laser 4. The stoppage of the platform 10 is as follows: In addition to the completion of the processing of one irradiated object 5, and the industrial robot outside the picture is replaced with another other irradiated object 5, there are other cases where 3 irradiated objects are placed The platform 10 of 5 is fully moved to either end on both sides of the predetermined direction X, and then the platform 10 is displaced to a direction orthogonal to the predetermined direction X with the object 3 to be irradiated 5 moved, while moving on The opposite direction is a case where the pulse is changed to irradiate the pulse laser 4 to the object 5. -16- (12) (12) 1222249 Next, referring to FIGS. 6 to 8, the detection means 39 for detecting the irradiated object 5 placed on the platform 10 is the possible irradiation position of the pulse laser 4 39 Other structural examples. Here, as shown in FIG. 7, the structure is arranged at both ends of the platform X in a predetermined direction X, and is used to detect the irradiated object 5 placed on the platform 10, which is roughly based on a pulsed laser. The first and second limit switches 50, 51 are located below the 4 and the irradiation position is possible. Also as a position contacting each limit switch 50, 5 1 and a fixed structure 52, 53 is located on the laser oscillation device 1 side of the base 22 side. In this example, it is located on the side of the grating 21 of the base 22 body. Fixing members 5 2 and 5 3 are fixed to both ends of the predetermined direction X. Of course, it is possible to set the fixed members 52, 53 on the platform 10, and to set the limit switches 50, 51 on the laser oscillation 1 side. In addition, one limit switch 50, 51 and one fixed member 5 2, 54 are used, and they are set in a position that can be avoided and the pulse laser 4, and one is set on the platform 10 and the other is set on Laser oscillation is also possible on one side. In addition, when the limit switch 5 0, 5 1 is placed on the platform f, the displacement fT of the irradiated object 5 is at the position where the pulse laser 4 may be irradiated, in other words, the platform 1 0 moves from a stopped state to a steady state. A detection signal N (FIG. 6) is generated when the vehicle is moving at a predetermined speed (between horizontal portions b to c in FIG. 7 and between horizontal portions g in FIG. 7). In other words, according to the right position of the platform 10 in FIG. 7 (between the horizontal part 0 and a in FIG. 8), the fixed member 52 starts from the stop state of contacting the first limit switch 50 and the platform 10 starts to the left. During the movement, the fixed member 52 is moved away from the first limit switch 50 (between the slanted lines a and b in FIG. 8), and the platform 10 is moved from the stopped state to the movement at a constant predetermined speed -17- (13) (13) In the state of 1222249 (horizontal part b-c in FIG. 7), and the platform 10 according to the position at the left end (horizontal part d-e in FIG. 7) starts to move to the right, and the fixed member 53 When leaving from the second limit switch 51 (between the slanted part e-f in FIG. 7), when the platform 10 moves from the stopped state to a moving state at a constant speed (horizontal part f-g in FIG. 7) , A detection signal N is generated (shown in FIG. 6). On the other hand, the platform 10 is located at the left end (between cf in Fig. 7) and the right end (between 〇 · b and g · (i) in Fig. 7), and the fixed members 52, 53 have limit switches 50, 51. When touched, the detection signal N will also decrease. % According to this structure example, at least the platform 10 is in a moving state at a constant predetermined speed, in other words at least in the time between b · c and f-g on the figure 7, the limit switch 5 0, 5 1 series The detection signal N can be obtained by leaving the fixed member 5 2, 5 3, and the irradiated object 5 placed on the platform 10 is detected to be in a position where irradiation with the pulse laser 4 is possible. Based on this detection signal N, the line outside the figure is excited, the position priority contact 0 of the switch SW outside the figure is closed, and the pulse signal I of the position priority mode setting means 26 is supplied to the laser oscillation device 1. When the platform 10 is stopped or moved at a predetermined speed that is less than the normal #, in other words, when it is between 0 · b, c-f, and g- (i) on FIG. 7, the limit switches 50, 51 are The irradiated object 5 placed on the platform 10 was detected when it was in contact with the fixed members 52 and 53. It was not in the possible irradiation position of the pulse laser 4. The detection signal N was reduced and the switch SW was closed. The number of cycles must be connected. 02. As a result, the laser oscillation device 1 is driven based on the signal G having a constant frequency in the constant frequency setting mode 28. Therefore, the pulse laser 4 is based on the position between the two ends of the predetermined direction X of the irradiated object 5 placed on the platform 10 by the limit switch 5 0, 5 1 and the distance -18- (14) (14) 1222249 The fixing members 52, 53 are opened, so that the fact that the irradiated object 5 placed on the platform 10 is in a possible irradiation position of the pulse laser 4 can be detected. Press, when the illuminated object 5 placed on the platform 10 is based on the possible irradiation position of the pulse laser 4, because the platform 10 is moving at a constant predetermined speed (theoretical constant speed), so at this time It is suitable to supply the pulse signal I of the position priority mode setting means 26 to the laser oscillation device 1. Therefore, the switching period of the fixed-cycle mode setting means 28 and the position priority mode setting means 26 is during acceleration and deceleration, in other words, between a-b, c-d, e-f, and g in FIG. 7 -The range between h, and the moving speed of the platform 10 exceeds zero, which is appropriate when the predetermined speed is not reached. (Effects of the Invention) As can be understood from the above description, the following effects can be achieved when the laser driving method and device according to the present invention are used. When the irradiated object placed on the platform is in the possible irradiation position of the pulse laser, it can maintain the advantages of the position priority mode. By the signal from the position setting mode setting means, it lies in the movement of the platform at every predetermined interval. Ground the laser oscillator. In addition, when the object to be irradiated on the platform is not the possible irradiation position of the pulse laser, the shortcomings of the position priority mode can be eliminated, and the pulse of a certain cycle number can be obtained by using the signal of a certain mode setting method. The laser oscillator can stand in two directions: irradiate the pulsed laser with the object to be irradiated correctly, and cancel: the temperature and the temperature caused by the heat generated by the laser oscillation device. (15) (15 ) 1222249 The temperature of optical devices such as optical lenses is lowered, which not only affects the output of the laser oscillation device, but also changes the amount of deformation of the condenser lens, which damages the stability of the irradiation energy of the pulse laser, etc. Unsuitable conditions' results can be obtained, as well as the effect of high-quality irradiated objects. [Brief Description of the Drawings] Fig. 1 is a diagram showing the components of a laser driving device according to an embodiment of the present invention. Fig. 2 shows the same constituent elements. Figure 3 shows the front view of the pulse and laser irradiation status of the object on the platform. Fig. 4 is a diagram showing the same position priority mode setting means and the fixed frequency setting mode setting means. Fig. 5 shows the pulses from the same laser oscillation device. The state of the object irradiated by the laser on the platform. (A) is a front view, and (B) is a right side view.
第6圖表示同其他構造例之具備有檢測出載置於平台上 之被照射物在於脈衝•雷射之照射可能位置之檢測手段之雷 射驅動裝置之構成要素之圖。 第7圖表示同其他構造例之藉由具備有檢測出載置於平 台上之被照射物之在於脈衝•雷射之照射可能位置之檢測手 段之雷射驅動裝置而對於平台上之被照射物照射脈衝•雷射 之狀態之正面圖。 第8圖表示同載置於平台上之被照射物之速度一時間特 -20- (16)1222249 性之線圖。 【主要元件對照表】 1 雷射振盪裝置 4 脈衝雷射 5 被照射物 10 平台 20 移動裝置 24 速度檢測手段（平台之移動檢測手段） 26 位置優先模式設定手段 28 頻率一定模式設定手段 34 基準値設定手段（平台之移動檢測手段） 3 6 比較手段（平台之移動檢測手段） 3 9 檢測手段 5 0，51 限制開關 52，5 3 固定構件 G 訊號 I 訊號 V 檢測 V0 基準値 X 預定方向 S W 開關Fig. 6 is a diagram showing the constituent elements of a laser driving device having a detection means for detecting that the object to be irradiated on the platform is in a pulse / laser irradiation possible position, as in other structural examples. FIG. 7 shows the structure of the other example of the structure of the laser-driven device having a detection means for detecting the possible positions of the pulses and lasers on the platform. Front view of the state of irradiation pulse and laser. Figure 8 shows the speed-time characteristic of the irradiated object placed on the platform at a time of -20- (16) 1222249. [Comparison table of main components] 1 Laser oscillating device 4 Pulse laser 5 Irradiated object 10 Platform 20 Mobile device 24 Speed detection means (platform movement detection means) 26 Position priority mode setting means 28 Frequency constant mode setting means 34 References 値Setting means (platform movement detection means) 3 6 Comparison means (platform movement detection means) 3 9 Detection means 5 0, 51 Limit switch 52, 5 3 Fixed member G signal I signal V detection V0 reference 値 X predetermined direction SW switch
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