JP2003254953A - Ultrasonic image inspection device - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To improve measurement accuracy by heightening adhesion between a polymer membrane and a sample, and to heighten serviceability, when performing ultrasonic inspection measurement by pressing the polymer membrane onto the sample on the water tank bottom part. <P>SOLUTION: In this ultrasonic image inspection device, an electric signal generated in a flaw detector circuit 22 is converted into an ultrasonic wave by an ultrasonic probe 13, and the ultrasonic wave is allowed to enter the sample 20 through water 18, and an ultrasonic reflection echo returned from the sample inside is converted into the electric signal by the ultrasonic probe, to thereby visualize the sample inside. The device is equipped with the water tank 17 storing the water inside and equipped on the bottom part with the polymer membrane 26 to be pressed onto the surface of the sample at the measuring time, and a water supply device 31, 32, 33 for interposing water between pressing face of the polymer membrane and the sample surface. The device is constituted so that the polymer membrane pressed at the measuring time and the sample adhere to each other by the water interposed between both materials. <P>COPYRIGHT: (C)2003,JPO

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an ultrasonic image inspection apparatus and, more particularly, to an ultrasonic image inspection apparatus capable of performing 100% inspection in a large amount of product inspection flowing on a production line while minimizing damage to a precision sample such as an electronic component due to a medium. The present invention relates to a sonic image inspection device.

[0002]

2. Description of the Related Art An ultrasonic image inspection apparatus is known as a non-contact type inspection apparatus for detecting and evaluating a material defect. An ultrasonic image inspection apparatus generally puts a sample in water (liquid medium) stored in a water tank, and causes ultrasonic waves emitted from an ultrasonic probe to enter the sample through water. The ultrasonic wave reflected echo from the inside of the sample is received by the ultrasonic probe, converted into an electric signal, and then the received electric signal is processed. With the above configuration, the ultrasonic probe is supported by the three-axis scanner and provided so as to scan the measurement surface of the sample. An electric signal related to the ultrasonic wave reflection echo from the inside of the sample is input to the flaw detector circuit, and the signal processing is performed. The control device including a computer controls the operations of the three-axis scanner and the flaw detector circuit, creates a flaw detection image based on the signal obtained at each measurement point on the measurement surface of the sample, and displays it on the display device. The ultrasonic image inspection apparatus mainly uses ultrasonic waves of 1 MHz or higher. Ultrasonic waves of 1 MHz or more have large attenuation in air and are difficult to propagate. Therefore, the sample is held in a water tank containing a medium for ultrasonic flaw detection. Water is generally used as the medium.

On the other hand, electronic parts such as semiconductor packages are
Since the internal peeling of the adhesive and the bubbles in the sealing resin cause defects, they are subject to inspection by the ultrasonic image inspection apparatus.
Many of such electronic components generally deteriorate in function when wet with water, and a problem arises in that once measured, they cannot be treated as normal products. For surface mount electronic boards and the like, defects such as heat during solder reflow are expected to occur in the mounting process, and it is important to inspect the board as it is after mounting. However, putting the substrate as it is into the medium for inspection causes a lot of damage to other components. Therefore, it is desired that the inspection can be performed without being damaged by the medium.

Therefore, in recent years, the following two inspection methods have been proposed as a method for inspecting a sample, which is an electronic component, without being affected by a liquid medium.

The first example is the inspection method disclosed in "New audiovisual method for material evaluation" (announced on April 19, 1990 by the Japanese Society for Nondestructive Inspection 007 Special Research Committee). The audiovisual method according to this document is an imaging method including an ultrasonic image inspection apparatus and an ultrasonic microscope. In the acoustic imaging method disclosed in the above document, a polyethylene bag is arranged above a sample (unsintered ceramics), water is stored in the polyethylene bag, and an adhesive tape is attached to the sample between the polyethylene bag and the sample and A gel agent is provided on the adhesive tape to bring the sample into close contact with the polyethylene bag. The ultrasonic probe is placed in water in a polyethylene bag.
When the unsintered ceramics as a sample is brought into contact with water, it is deteriorated due to its water absorption. Therefore, according to the above apparatus configuration, the sample and water are prevented from coming into contact with each other.

The second example is "A Dry-Contact Method for
Transmitting Higher Frequency Components of Ultra
sound ”(Proc. Int. Conf. on Mechatronics and Info
rmation Technology 2001, Yamaguchi, (2001), 272-277)
The inspection method disclosed in. Also in this inspection method, as shown in FIG. 1, an ultrasonic probe is arranged in a water tank containing water for propagating ultrasonic waves, and an opening is formed at the bottom of the water tank to form a membrane. It is provided so that the film is brought into contact with the sample outside the water tank to perform ultrasonic flaw detection. Further, when the film is in contact with the sample, a vacuum evacuation mechanism is provided to evacuate and reduce the pressure of the airtight space formed between the water tank and the sample to enhance the adhesion between the film and the sample. As a film to be used, films of various materials such as a plastic film and a rubber film have been tried.

[0007]

In the inspection method according to the first example, in which the sample is coated with the gel agent and the polyethylene water bag is applied for the purpose of avoiding contact between the electronic component and the medium, wrinkles are generated in the polyethylene bag. , There may be an air layer in the gap between the polyethylene bag and the sample. When an air layer is generated between the sample and the film due to the wrinkles, the ultrasonic wave is totally reflected by the air layer and is not transmitted to the inside of the sample, so that an ultrasonic image inside the sample cannot be obtained. Therefore, it is necessary to apply a large amount of gel agent to fill the gap, or to apply a polyethylene water bag to the sample and then press it from the water bag side to ensure uniform adhesion with the sample. .

A second example of a dry contact type in which a water tank having a bottom such as a plastic film or a rubber film is used and a polymer film bulging downward at the bottom of the water tank is pressed against the measurement surface of a sample In the inspection method, the required adhesion may not be obtained due to fine irregularities on the sample surface.Therefore, the space at the contact portion between the film and the sample surface is formed as an airtight space, and the inside thereof is evacuated by a vacuum exhaust device. I try to exhaust it. Therefore, the structure becomes complicated and the device cost becomes high. Further, when the sample is an electronic circuit board on which a large number of electronic parts are mounted, and when inspecting each electronic part on the electronic circuit board, it is difficult to provide the above-mentioned configuration related to the airtight space and the vacuum exhaust at each measurement point. Yes, it is inconvenient to change the position of the film and the sample, and to quickly change the measurement point of the sample where the pressing contact relationship is formed between the film and the ultrasonic wave. It is not a video inspection device.

A first object of the present invention is to solve the above-mentioned problems. A polymer film is provided at the bottom of a container containing a medium, and when the polymer film is pressed against a sample to perform an inspection measurement,
It is an object of the present invention to provide an ultrasonic image inspection apparatus in which the adhesion between a polymer film and a sample is enhanced to improve the measurement accuracy, the practicality is enhanced, and the configuration for enhancing the adhesion is easily realized.

A second object of the present invention is suitable for inspecting and measuring a circuit board on which a plurality of electronic components are mounted, the electronic components can be inspected without getting wet, and it is intended to eliminate damage to the electronic components due to the inspection. An object is to provide a sonic image inspection device.

[0011]

In order to achieve the above-mentioned object, an ultrasonic image inspection apparatus according to the present invention comprises:
It is constructed as follows.

In a first ultrasonic image inspection apparatus (corresponding to claim 1), an ultrasonic probe converts an electric signal generated by a flaw detector circuit into an ultrasonic wave, and the ultrasonic wave is passed through a liquid medium. This is a device that visualizes the inside of the sample by converting the ultrasonic reflection echo that enters the sample and returns from the inside of the sample into an electrical signal with an ultrasonic probe. A container (water tank, etc.) having a polymer film at the bottom that is pressed against the surface of the polymer, and a liquid medium supply device for interposing a liquid medium (water, etc.) between the pressing surface of the polymer film and the surface of the sample, The polymer film pressed at the time of measurement and the sample are configured to be brought into close contact with each other by the liquid medium interposed therebetween.

In the above-mentioned ultrasonic image inspection apparatus, a polymer film is provided at the bottom of a water tank containing water which is a liquid medium for propagating ultrasonic waves, and the polymer film is pressed from the ultrasonic probe while being pressed against the sample. Make ultrasonic waves incident on the sample. Since the sample is placed on the outside of the water tank, the sample can avoid damage caused by water. Further, by providing a liquid medium supply device in which a liquid medium such as water is interposed between the polymer film and the sample, the adhesion between the polymer film and the sample is enhanced by the liquid medium, and the damage to the sample is suppressed. Meanwhile, it is possible to improve the measurement performance.

According to the second ultrasonic image inspection apparatus (corresponding to claim 2), in the first configuration, preferably, the liquid medium supply device is a spraying device for spraying the liquid medium on the surface of the sample. Characterize. With this configuration, the surface of the sample is wetted by the liquid medium before the polymer film bulging downward from the bottom of the water tank is pressed against the sample, and the adhesion between the polymer film and the sample is enhanced.

According to a third ultrasonic image inspection apparatus (corresponding to claim 3), in the first configuration, preferably, the liquid medium supply device is a device for wetting the pressing surface of the polymer film with the liquid medium. Characterize. With this configuration, the lower surface of the polymer film is wet before the polymer film is pressed against the sample.

In a fourth ultrasonic image inspection apparatus (corresponding to claim 4), in each of the above constitutions, preferably, a plurality of windows for the polymer film are formed at the bottom of the container. Contract. With this configuration, for example, when a plurality of samples are placed on a tray and these samples are measured simultaneously, a window corresponding to each sample is provided, and a polymer film is provided for each window to measure all the samples. It becomes possible.

In a fifth ultrasonic image inspection apparatus (corresponding to claim 5), an electric signal generated by a flaw detector circuit is converted into an ultrasonic wave by an ultrasonic probe, and the ultrasonic wave is passed through a liquid medium. This is a device that visualizes the inside of the sample by converting the ultrasonic reflection echo that enters the sample and returns from the inside of the sample into an electrical signal with an ultrasonic probe. It is configured to include a container (water tank or the like) having a polymer film at the bottom that is pressed against the surface of the container, and a three-axis scanner unit that presses the polymer film of the container onto an arbitrary portion of the sample.

In the above-mentioned ultrasonic image inspection apparatus, the sample to be inspected is placed outside the water tank, the polymer film provided at the bottom of the water tank is pressed against the sample, and the ultrasonic wave is applied to the sample via the water in the water tank. In a configuration in which an inspection is performed by applying a sample, a sample such as a surface-mounted substrate on which a large number of electronic components are mounted is provided as an electronic component by providing a three-axis scanner unit that enables a polymer film to be pressed against an arbitrary position of the sample. It is possible to perform an inspection that damages the water with water, etc., and perform a practical ultrasonic image inspection suitable for the inspection process of the manufacturing line.

The sixth ultrasonic image inspection apparatus (corresponding to claim 6) preferably has a structure of the above fifth structure.
The axis scanner unit is characterized by moving either one of the container and the sample. This configuration causes a relative change in position between the container and the sample.

In a seventh ultrasonic image inspection apparatus (corresponding to claim 7), in each of the above-mentioned constitutions, preferably a liquid medium supply in which a liquid medium is interposed between the pressing surface of the polymer film and the surface of the sample. It is characterized in that it is provided with a device, and the polymer film and the sample pressed at the time of measurement are brought into close contact with each other by a liquid medium interposed therebetween. With this configuration, it is possible to enhance the adhesion between the polymer film and the sample and enhance the measurement performance.

In the eighth ultrasonic image inspection apparatus (corresponding to claim 8), in the seventh configuration, preferably the liquid medium supply device is a spraying device for spraying the liquid medium on the surface of the sample. It is characterized by

In a ninth ultrasonic image inspection apparatus (corresponding to claim 9), in the seventh configuration, preferably, the liquid medium supply device is a device for wetting the pressing surface of the polymer film with the liquid medium. It is characterized by

[0023]

Preferred embodiments of the present invention will be described below with reference to the accompanying drawings.

The configurations, shapes, sizes, and arrangement relationships described in the embodiments are merely shown to the extent that the present invention can be understood and put into practice, and the numerical values and the compositions (materials) of the respective constituent elements. Is only an example. Therefore, the present invention is not limited to the embodiments described below, and can be modified into various forms without departing from the scope of the technical idea shown in the claims.

FIG. 1 shows a first embodiment of the present invention. Figure 1
The configuration shown in (1) shows the state at the time of measurement by the ultrasonic image inspection apparatus of this embodiment. In FIG. 1, the base 11
A three-axis scanner 12 is provided on the above. The triaxial scanner 12 has a moving mechanism that allows the ultrasonic probe (ultrasonic probe) 13 to move in the X, Y, and Z axis directions shown in FIG. The three-axis scanner 12 includes at least two columns 14 standing on the base 11, a rod-shaped frame 15 spanned between the two columns 14, and a frame 1.
5 and a support portion 16 attached so as to move on the carriage 5. The ultrasonic probe 13 has a supporting portion 16
It is attached to the lower part of so as to be movable in the Z-axis direction. The ultrasonic probe 13 is arranged with the emission surface of ultrasonic waves facing downward. A water tank 17 is placed on the base 11. Water (liquid medium) 18 that propagates ultrasonic waves is stored in the water tank 17.

The probe 13 is moved by the three-axis scanner 12 to
The ultrasonic wave emission surface at the lower end of the probe 13 which is moved in the axial direction is in the water 18. The probe 13 scans the measurement surface (XY plane) of the sample or is moved in the Z-axis direction based on the movement operation of the triaxial scanner 12. The computer 21 controls the operations of the flaw detector circuit 22 and the triaxial scanner 12. The flaw detector circuit 22 outputs a pulsed electric signal and supplies it to the probe 13. The probe 13 converts the electric signal into ultrasonic waves and emits the ultrasonic waves into the water 18.
The ultrasonic wave emitted from the probe 13 is incident on the set sample 20 based on the structure described later. The ultrasonic reflection echo returned from the sample 20 is converted into an electric signal by the probe 13 and received by the flaw detector circuit 22. The defect state inside the sample can be known from the reflected echo signal. The computer 21 controls the operation of the flaw detector circuit 22 and the movement of the triaxial scanner 12. As a result, electric signals related to the reflection echo are acquired at each point on the measurement surface on the sample 20. A flaw detection image is created based on the electric signal relating to the obtained reflection echo, and the flaw detection image is displayed on the screen of the display device 23.

Further, a characteristic configuration of the ultrasonic image inspection apparatus will be described. The water tank 17 is supported by a water tank supporting portion 24, and a space 25 is formed below the water tank 17. The water tank support 24 moves the water tank 17 up and down,
The height position of can be changed. The operation of the aquarium support 24 is controlled by the computer 21. Space 2
5 is a place for arranging the sample 20. The sample 20 is a single electronic component such as a semiconductor device chip, and is placed on the base 11. The shape of the water tank 17 is arbitrary. For example, a circular opening is formed by hollowing out the center of the bottom portion 17a of the water tank 17, and a polymer film 26 (another rubber film or a film similar thereto) is attached so as to close the opening. . The polymer membrane 26 is integrated with the mounting unit. The lower surface of the polymer film 26 is in contact with and pressed against the upper measurement surface of the sample 20 when measuring the sample 20. Since the water tank 17 contains water 18, the polymer film 26 is adapted to extend downward due to its weight. The lower surface of the polymer film 26 is pressed against the measurement surface of the sample 20 by the weight of the water 18. In this state, the ultrasonic probe 13 scans the measurement surface of the sample 20 in the water 18 of the water tank 17,
Measure the ultrasound image inside.

A water injection nozzle 31 is provided on the lower surface of the bottom 17a of the water tank 17. It is located at the edge of the opening facing obliquely downward of the discharge part 31a at the tip of the water injection nozzle 31.
The water injection nozzle 31 is connected to a water injection device 33 via a hose 32. The water injection operation of the water injection device 33 is controlled by the computer 21. As shown in FIG. 2, before the measurement is started and before the lower surface of the polymer film 26 bulging downward is pressed against the upper surface of the sample 20, the water 34 is discharged from the discharge portion 31 a of the water injection nozzle 31. Then, it is sprayed on the upper surface of the sample 20, and only the upper surface (measurement surface) of the sample 20 is wetted. In this state, the water tank 17 descends and the lower surface of the polymer film 26 is pressed against the upper surface of the sample 20. As a result, the adhesiveness between the lower surface of the polymer film 26 and the upper surface of the sample 20 is extremely enhanced.

In the above structure, water 34, which is a medium, is supplied from the water injection nozzle 31 to the upper surface of the sample 20 when the polymer film 26 and the sample 20 are brought into contact with each other, but isopropyl alcohol or the like is used instead of water. Can be used. As a medium provided between the polymer film 26 and the sample 20, a medium having a low viscosity is more likely to enter the gap than a gelling agent having a high viscosity, which is preferable because the propagation of ultrasonic waves is improved. The amount of water (medium) supplied between the polymer film 26 and the sample 20 by the water injection nozzle 31 may be a small amount that spreads to the contact interface, and is an amount that does not damage the sample 20 which is a precision electronic component. Is preferred.

FIG. 3 shows the water tank 17 with no water therein, and FIG. 4 shows the water tank 17 with water 18 therein. When the water 18 enters the water tank 17 to which the polymer film 26 is attached, the central portion of the water tank 17 lowers due to the weight of the water and swells from the opening 41 of the bottom 17a. When the polymer film 26 is applied to the sample 20, the polymer film 2 is gradually contacted with the sample 26 from the center of the swollen polymer film 26 toward the outside.
Both 6 and the sample 20 can be brought into close contact with each other without bubbles or wrinkles.

FIG. 5 shows a structure for attaching / removing the polymer film. The polymer film 26 provided on the bottom portion 17a of the water tank 17 is easily deteriorated by repeated contact with the sample, and an appropriate polymer film material and thickness depend on the sample and the frequency of the ultrasonic probe 13 used. Since it is different, replacement is required. Therefore, the polymer film 26 includes the support frame 51 having the opening 41 and the holding frame 5 having the opening 52.
It is attached so that it is sandwiched between 3 and. The planar shapes of the support frame 51 and the pressing frame 53 are preferably ring-shaped. The support frame 51 and the pressing frame 53 can be freely assembled or disassembled by a plurality of screws 54. The support frame 51, the pressing frame 53, and the polymer film 53 are unitized, and the polymer film unit is attached to the opening 55 of the bottom portion 17a of the water tank 17 with a structure in which the sealing property is maintained by using a screw 54. As described above, the polymer film 26 can be easily replaced in the water tank 17.

FIG. 6 shows a modification of the first embodiment. This figure shows a vertical sectional view of the water tank portion. In this modification, the state of the water tank 17 is shown when a material having a high elastic modulus such as a rubber film such as latex is used as the material of the polymer film 26. According to this modification, the bottom of the membrane is bent more roundly than in the case of using polyethylene or the like due to the weight of water 18, and the sample 2
When contacting with 0, wrinkles are less likely to occur, and the generation of an air layer can be reduced.

Next, a second embodiment of the present invention will be described with reference to FIG. In this embodiment, the water tank 17 and the polymer membrane 2
Only 6 and the part of the water injection nozzle are shown. The rest of the configuration of the ultrasonic image inspection apparatus is the same as the configuration described in the first embodiment, so the illustration is omitted. In the configuration shown in FIG. 6, the discharge portion 55a at the tip of the water injection nozzle 55 is
The polymer film 2 is formed upward along the edge of the opening 41.
It is configured to approach the lower surface of 6. With the above structure, the water 56 as a medium flows along the lower surface of the polymer film 26. The amount of water 56 is the same as in the previous embodiment.

Next, a third embodiment of the ultrasonic image inspection apparatus according to the present invention will be described with reference to FIG. In FIG.
Elements that are substantially the same as the elements shown in FIG. 1 are assigned the same reference numerals. Also, the computer 21 described in FIG.
Illustrations of the structures of the flaw detector circuit 22, the display device 23, the water injection nozzle 31, and the like are omitted.

In FIG. 8, 17 is the above-mentioned water tank, and 26 is a polymer membrane. In this embodiment, the water tank 17 is fixed to the position shown in FIG. 8 in the ultrasonic image inspection apparatus. This fixed position is approximately the center of the device. A water tank fixing shaft 61 for fixing the water tank 17 is provided.

The sample is a surface mount board 63 to which a large number of electronic components 62 are attached. The surface-mounted substrate 63 is mounted on a triaxial sample stage 64 for moving the substrate. The sample stage 64 is a Y fixed on the base 11.
The shaft stage 65 includes an X-axis stage 66 mounted on the Y-axis stage 65, and a Z-axis stage 67 mounted on the X-axis stage 66. Z
The sample stage 67 uses the surface mount board 63 for the X axis, Y axis, and Z axis.
Arbitrarily move in each direction of the axis. Such sample stage 6
4 allows the water tank 1 to be placed at an arbitrary position on the surface mount board 63.
The polymer film 26 of No. 7 can be applied, and the ultrasonic image of the location can be measured. The operation of the sample stage 64 is controlled by the computer 21 described above.

Next, a fourth embodiment of the ultrasonic image inspection apparatus according to the present invention will be described with reference to FIG. In FIG.
Elements that are substantially the same as the elements shown in FIGS. 1 and 8 are given the same reference numerals. Further, the illustration of the computer 21, the flaw detector circuit 22, the display device 23 and the like described in FIG. 1 is omitted.

In FIG. 9, 17 is a water tank and 26 is a polymer membrane. In this embodiment, the water tank 17 is not fixed in a stationary state and is attached to the triaxial water tank stage 71. The water tank stage 71 moves the water tank 17 in any of the three axes. On the other hand, the surface mount board 63, which is a sample, is placed on the base 11 and its position is fixed so as not to move. The movement operation of the water tank stage 71 is controlled by the computer 21.

A fifth embodiment of the ultrasonic image inspection apparatus according to the present invention will be described with reference to FIG. In FIG. 10, only the structural part of the water tank is shown, and other configurations are the same as those in the above-described embodiment. In this embodiment, in order to keep the adhesion between the sample and the polymer film 26 uniform, a configuration capable of appropriately maintaining the bulging amount or the bending amount of the polymer film 26 is attached. That is, a water supply / drainage tube 72 is attached to the lower part of the side wall of the water tank 17 so that the water level of the water tank 17 can be varied. Water 18 in the water tank 17 is connected to the water supply / drain tube 72.
By making the water level of the variable, the amount of deflection can be changed according to the material of the polymer film 26, the shape of the sample, and the like. Water supply / drainage by the water supply / drainage tube 72 may be performed manually or by an automatic device.

A sixth embodiment of the ultrasonic image inspection apparatus according to the present invention will be described with reference to FIG. In FIG. 11, the aquarium 1
7 and a plurality of samples 74 placed on the tray 73 are shown. Other configurations are the same as those in the above-described embodiment. Tray 73 for inspection on the production line
It is necessary to simultaneously measure a plurality of samples 74 placed on it. In such a case, in addition to controlling one or both of the positions of the water tank and the sample as in the above-described embodiment, a window frame 76 that forms a plurality of windows of the polymer film 75 on the lower surface of the water tank 17 is provided. It can also be configured to be installed. According to this configuration, a large amount of sample 74 can be processed at high speed without being affected by being wet by the medium.

[0041]

As is apparent from the above description, the present invention has the following effects.

A polymer film is provided at the bottom of a container containing an ultrasonic medium such as water, and when the polymer film is pressed against a sample to perform ultrasonic image inspection measurement, before contacting the polymer film with the sample. Since the constitution is such that the surface of the sample or the surface of the polymer film is wetted with an appropriate amount of water or the like at the stage, the adhesion between the polymer film and the sample can be enhanced, and the measurement accuracy can be improved. Further, it is effective from the viewpoint of practical ultrasonic image inspection, and a configuration for enhancing the adhesion can be realized easily and at low cost.

Since the water tank having the polymer film on the lower surface is used in the ultrasonic image inspection apparatus, it is possible to perform the ultrasonic image inspection to reduce the damage to the sample by the medium.
Therefore, when the sample is a precision electronic component such as an IC chip, the sample can be protected and the flaw detection inspection can be performed accurately at any place. According to the present invention, it is possible to perform a 100% inspection of semiconductor devices to be manufactured in the semiconductor device manufacturing process, and it is effective for shipping inspection of electronic components.

Further, according to the present invention, it is possible to carry out an ultrasonic image inspection at any place on an IC chip on a surface-mounted substrate that has already been mounted, with less damage to other parts. Etc. is effective.

[Brief description of drawings]

FIG. 1 is a configuration diagram of a first embodiment of an ultrasonic image inspection apparatus according to the present invention.

FIG. 2 is a diagram showing an operation state of wetting the sample surface in the first embodiment.

FIG. 3 is a vertical cross-sectional view of the water tank showing an empty state in the first embodiment.

FIG. 4 is a vertical cross-sectional view of the aquarium with water in the first embodiment.

FIG. 5 is a vertical cross-sectional view showing a disassembled state of the polymer membrane unit provided at the bottom of the water tank in the first embodiment.

FIG. 6 is a vertical cross-sectional view showing another example of the polymer film provided at the bottom of the water tank in the first embodiment.

FIG. 7 is a vertical sectional view showing a second embodiment of the ultrasonic image inspection apparatus according to the present invention.

FIG. 8 is a configuration diagram showing an ultrasonic image inspection apparatus according to a third embodiment of the present invention.

FIG. 9 is a configuration diagram showing a fourth embodiment of an ultrasonic image inspection apparatus according to the present invention.

FIG. 10 is a vertical cross-sectional view showing a fifth embodiment of the ultrasonic image inspection apparatus according to the present invention.

FIG. 11 is a vertical cross-sectional view showing an ultrasonic image inspection apparatus according to a sixth embodiment of the present invention.

[Explanation of symbols]

11 bases 12 3-axis scanner 13 Ultrasonic probe 16 Support 17 aquarium 18 water 20 samples 24 Water tank support 26 Polymer membrane 31 Water injection nozzle 55 Water injection nozzle 61 Water tank fixed shaft 62 electronic components 63 Surface mount board 64 sample stage 71 aquarium stage 72 Water supply / drainage tube

   ─────────────────────────────────────────────────── ─── Continued front page    (72) Inventor Noboru Yamamoto             Hitachi Construction Machinery F, 650 Kintatemachi, Tsuchiura City, Ibaraki Prefecture             Inside Vinetech Co., Ltd. (72) Inventor Toshiyuki Megumi             Hitachi Construction Machinery F, 650 Kintatemachi, Tsuchiura City, Ibaraki Prefecture             Inside Vinetech Co., Ltd. (72) Inventor Makoto Ishijima             Hitachi Construction Machinery F, 650 Kintatemachi, Tsuchiura City, Ibaraki Prefecture             Inside Vinetech Co., Ltd. (72) Inventor Naoya Kawakami             Hitachi Construction Machinery F, 650 Kintatemachi, Tsuchiura City, Ibaraki Prefecture             Inside Vinetech Co., Ltd. F term (reference) 2G047 AC10 AD08 BA03 BB01 BB05                       BC07 CA01 DB12 EA10 EA14                       EA16 EA20 GE01 GE02 GE04

Claims (9)

[Claims] 1. An ultrasonic wave reflected by converting an electric signal generated by a flaw detector circuit into an ultrasonic wave by an ultrasonic probe, causing the ultrasonic wave to enter a sample through a liquid medium, and returning from the inside of the sample. In an ultrasonic image inspection apparatus for converting an echo into an electric signal by the ultrasonic probe to visualize the inside of the sample, in the ultrasonic image inspection apparatus, the liquid medium is housed inside and a high pressure applied to the surface of the sample at the time of measurement. A container provided with a molecular film at the bottom, and a liquid medium supply means for interposing a liquid medium between the pressing surface of the polymer film and the surface of the sample, the polymer film pressed at the time of measurement and the sample The ultrasonic image inspection apparatus is characterized in that it is brought into close contact with the liquid medium interposed therebetween. 2. The ultrasonic image inspection apparatus according to claim 1, wherein the liquid medium supply unit is a spraying unit that sprays the liquid medium onto the surface of the sample. 3. The ultrasonic image inspection apparatus according to claim 1, wherein the liquid medium supply means is means for wetting the pressing surface of the polymer film with the liquid medium. 4. The ultrasonic image inspection apparatus according to claim 1, wherein a plurality of windows for the polymer film are formed on the bottom of the container. 5. An ultrasonic wave reflection, which converts an electric signal generated by a flaw detector circuit into an ultrasonic wave by an ultrasonic probe, makes the ultrasonic wave incident on a sample through a liquid medium, and returns from the inside of the sample. In an ultrasonic image inspection apparatus for converting an echo into an electric signal by the ultrasonic probe to visualize the inside of the sample, in the ultrasonic image inspection apparatus, the liquid medium is housed inside and a high pressure applied to the surface of the sample at the time of measurement. An ultrasonic image inspection apparatus comprising: a container having a molecular film on a bottom portion thereof; and a three-axis scanner unit for pressing the polymer film of the container to an arbitrary portion of the sample. 6. The ultrasonic image inspection apparatus according to claim 5, wherein the triaxial scanner unit moves either one of the container and the sample. 7. A liquid medium supply means for interposing a liquid medium between the pressing surface of the polymer film and the surface of the sample is provided, and the polymer film and the sample pressed at the time of measurement are placed between them. The ultrasonic image inspection apparatus according to claim 5, wherein the ultrasonic image inspection apparatus is brought into close contact with the interposing liquid medium. 8. The ultrasonic image inspection apparatus according to claim 7, wherein the liquid medium supply unit is a spraying unit that sprays the liquid medium onto the surface of the sample. 9. The ultrasonic image inspection apparatus according to claim 7, wherein the liquid medium supply means is means for wetting the pressing surface of the polymer film with the liquid medium.