JP4078220B2 - Ultrasonic image inspection equipment - Google Patents

Description

[0001]
BACKGROUND OF THE INVENTION
The present invention relates to an ultrasonic image inspection apparatus, and in particular, performs measurement without placing a precise sample such as an electronic component in the medium, reduces damage to the sample by the medium, and is suitable for inspection of a large amount of products flowing on a production line. The present invention relates to an ultrasonic image inspection apparatus.
[0002]
[Prior art]
2. Description of the Related Art An ultrasonic image inspection apparatus is known as a non-contact type inspection apparatus that detects and evaluates material defects. In general, an ultrasonic image inspection apparatus places a sample in water (liquid medium) stored in a water tank, and makes an ultrasonic wave emitted from an ultrasonic probe enter the sample through water, An ultrasonic reflection echo from the inside of the sample is received by an ultrasonic probe, converted into an electric signal, and then the received electric signal is processed. With the above configuration, the ultrasonic probe is supported by the triaxial scanner and is provided so as to scan the measurement surface of the sample. An electric signal related to the ultrasonic reflected echo from the inside of the sample is input to the flaw detector circuit, and the signal processing is performed. A control device comprising a computer controls the operations of the three-axis scanner and the flaw detector circuit, creates a flaw detection image based on signals obtained at each measurement point on the measurement surface of the sample, and displays it on the display device. In the ultrasonic image inspection apparatus, ultrasonic waves of 1 MHz or higher are mainly used. Ultrasonic waves of 1 MHz or higher are greatly attenuated in air and are difficult to propagate. Therefore, the sample is held in a water tank containing a medium and subjected to ultrasonic flaw detection. As a medium, water is generally used.
[0003]
On the other hand, an electronic component such as a semiconductor package is a target of inspection by an ultrasonic image inspection apparatus because internal adhesive peeling or bubbles in the sealing resin cause defects. Such electronic parts generally have a function that deteriorates when wetted with water, and there is a problem in that what has been measured once cannot be handled as a normal product. In addition, surface mount electronic boards and the like are expected to generate defects in the mounting process such as heat during solder reflow, and it is important to inspect them as they are after mounting. However, putting the substrate in the medium for inspection causes much damage to other parts. Therefore, it is desirable to be able to inspect so as not to damage the medium.
[0004]
Therefore, in recent years, the following two inspection methods have been proposed as a method for inspecting a sample that is an electronic component not affected by the liquid medium.
[0005]
The first example is an inspection method disclosed in the following first document (Non-Patent Document 1). The acoustic image method according to this document is an image method including an ultrasonic image inspection apparatus and an ultrasonic microscope. In the acoustic image method disclosed in the above document, a polyethylene bag is placed above a sample (unsintered ceramics), water is stored in the polyethylene bag, and an adhesive tape is applied to the sample between the polyethylene bag and the sample. A gel agent is provided on the adhesive tape to bring the polyethylene bag and the sample into close contact with each other. The ultrasonic probe is placed in water in a polyethylene bag. Since the unsintered ceramic as a sample is altered by water absorption when brought into contact with water, according to the above apparatus configuration, the sample and the water are prevented from coming into contact with each other.
[0006]
The second example is an inspection method disclosed in the following second document (Non-Patent Document 2). Also in this inspection method, as shown in FIG. 1, an ultrasonic probe is placed in a water tank containing water for propagating ultrasonic waves, and an opening is formed at the bottom of the water tank to form a film. An ultrasonic flaw inspection is performed by bringing a film into contact with a sample outside the water tank. Further, in a state where the membrane is in contact with the sample, an evacuation mechanism for evacuating and depressurizing an airtight space formed between the water tank and the sample is provided to improve the adhesion between the membrane and the sample. Various films such as plastic films and rubber films have been tried for use.
[0007]
[Non-Patent Document 1]
Kazuji Yamanaka et al., “A new acoustic imaging method for material evaluation”, Japan Nondestructive Inspection Association, 007 Special Research Committee, published on April 19, 1990
[Non-Patent Document 2]
Yamaguchi, “A Dry-Contact Method for Transmitting Higher Frequency Components of Ultrasound”, Proc. Int. Conf. On Mechatronics and Information Technology 2001, (2001), 272-277)
[0008]
[Problems to be solved by the invention]
In the inspection method according to the first example in which the sample is coated with a gel and the polyethylene water bag is applied to avoid contact between the electronic component and the medium, wrinkles are generated in the polyethylene bag, and the gap between the polyethylene bag and the sample is There is a risk that an air layer will form. When an air layer is generated between the sample and the film due to wrinkles, the ultrasonic waves are totally reflected by the air layer and are not transmitted to the inside of the sample, so that an ultrasonic image inside the sample cannot be obtained. For this reason, it is necessary to apply a large amount of gel so as to fill in the gaps, or after applying a polyethylene water bag to the sample and then pressing it from the water bag side to provide uniform adhesion to the sample. . However, the pressing pressure is low and the pressure becomes unstable, so that image unevenness and image loss due to bubbles tend to occur.
[0009]
Furthermore, according to the conventional inspection method described above, the water level fluctuates greatly when pressing is performed. As a result, there is a risk of water leakage, and further hinders the speed of desorption of the membrane and the sample.
[0010]
In the test method according to the second example of the dry contact type, which uses a water tank provided with a film such as a plastic film or a rubber film at the bottom, and presses a polymer film swelled downward at the bottom of the water tank against the measurement surface of the sample. Because the required adhesion may not be obtained due to fine irregularities on the sample surface, the space between the film and the sample surface is formed in an airtight space, and the inside is exhausted by a vacuum exhaust device. I have to. This complicates the configuration and increases the device cost. In addition, when the sample is an electronic circuit board on which a large number of electronic components are mounted and each electronic component on the electronic circuit board is inspected, it is difficult to provide the above-described configuration relating to the airtight space and the vacuum exhaust at each measurement location. Yes, it is an inconvenient configuration to change the position of the membrane and the sample and quickly change the measurement location of the sample where the pressing contact relationship is formed between the membrane and ultrasonic waves with high practicality It is not a video inspection device.
[0011]
The object of the present invention is to solve the above-mentioned problems. When a container is provided with a polymer film or the like at the bottom of a container containing a medium and the polymer film or the like is pressed against the sample for measurement, the adhesion between the film and the sample is achieved. Is to improve the measurement accuracy and improve the practicality, and to provide an ultrasonic image inspection apparatus capable of easily and accurately inspecting a sample that dislikes a liquid medium.
[0012]
[Means and Actions for Solving the Problems]
In order to achieve the above object, an ultrasonic image inspection apparatus according to the present invention is configured as follows.
[0013]
  The first ultrasonic image inspection apparatus (corresponding to claim 1) converts an electric signal generated by a flaw detector circuit into an ultrasonic wave by an ultrasonic probe, and enters the ultrasonic wave into a sample through a liquid medium. Is a device that converts the ultrasonic reflected echo returning from the inside of the sample into an electrical signal with an ultrasonic probe and visualizes the inside of the sample,The sample is an electronic component, this electronic component is placed on the base of the sample lifting device that performs the lifting operation, and the height position of the electronic component is adjusted by the sample lifting device,Part of a container (water tank, etc.) that contains a liquid medium (water, etc.)LiquidEquipped with an ultrasonic wave propagator made by sealing a body medium with multiple polymer filmsAs,Due to the lifting operation of the sample lifting devicePlaced outside the containerElectronic componentsMeasuring surfaceThePolymer film located outside by ultrasonic wave propagatorIn close contact withConfigured to take measurements.
[0014]
  In the above-described ultrasonic image inspection apparatus, for example, at the bottom of a water tank that stores water, which is a liquid medium for propagating ultrasonic waves, there are two polymer films located on the inner side and the outer side, for example. An ultrasonic wave propagator having a structure in which a liquid medium is contained is attached. Ultrasonic waves are made to enter the sample from the ultrasonic probe in a state where the polymer film positioned outside is pressed against the sample by the ultrasonic wave propagator. Sample is outside the tankInSince the sample is placed, the sample can avoid water damage. Also, the pressure applied to the sample is given by the liquid medium in the water tank and the liquid medium contained in the ultrasonic wave propagator, and the resistance of the polymer film located inside the ultrasonic wave propagator is applied. The pressure applied to the sample is high, and the adhesion of the film can be improved. As a result, it is possible to improve the measurement performance while maintaining the suppression of damage to the sample.
  In particular, the sample is an electronic component, and the electronic component is disposed on a base of a sample lifting device that performs a lifting operation, and the height position of the electronic component is adjusted by the sample lifting device. By the ascending operation of the sample elevating device, the measurement surface of the electronic component arranged outside the container can be pressed and brought into close contact with the polymer film located outside by the ultrasonic wave transmitter.
[0015]
In the second ultrasonic image inspection apparatus (corresponding to claim 2), in the first configuration described above, it is preferable that the deformation rate of the polymer film positioned on the inner side of the plurality of polymer films of the ultrasonic wave propagator Is characterized by being smaller than the deformation rate of the polymer film located outside. With this configuration, the resistance due to deformation of the inner polymer film can be increased, and the pressure applied to the sample can be increased.
[0016]
  In the third ultrasonic image inspection apparatus (corresponding to claim 3), preferably, in each of the above-described configurations, the ultrasonic wave propagator includes a supply / discharge mechanism that changes the amount of the liquid medium sealed therein., Super soundThe pressure is changed by changing the amount of the liquid medium inside the wave propagator. According to this configuration, it is possible to adjust the pressing pressure of the film against the sample according to the sample, and it is possible to set an optimal pressing pressure in measurement.
[0017]
A fourth ultrasonic image inspection apparatus (corresponding to claim 4) is preferably configured to use a plate material in place of the polymer film positioned inside by the ultrasonic wave propagator in each of the above-described configurations. As the plate material, for example, an acrylic plate is used.
[0018]
A fifth ultrasonic image inspection apparatus (corresponding to claim 5) is characterized in that, in each of the above configurations, a gel film is preferably provided on the surface of the polymer film pressed against the sample of the ultrasonic wave propagator. To do. With this configuration, it is possible to improve the adhesion between the outer polymer film and the measurement surface of the sample.
[0019]
  The sixth ultrasonic image inspection device (corresponding to claim 6) is preferably an ultrasonic wave propagator in each of the above configurations.Electronic componentsA liquid medium supply mechanism for supplying the liquid medium to the surface of the film pressed against the liquid is provided. In this configuration, the outer polymer membrane andElectronic componentsIt is possible to improve the adhesion of the measurement surface.
[0020]
DETAILED DESCRIPTION OF THE INVENTION
Preferred embodiments of the present invention will be described below with reference to the accompanying drawings.
[0021]
The configurations, shapes, sizes, and arrangement relationships described in the embodiments are merely schematically shown to the extent that the present invention can be understood and implemented, and the numerical values and the composition (materials) of each component are illustrated. Only. Therefore, the present invention is not limited to the embodiments described below, and can be modified in various forms without departing from the scope of the technical idea shown in the claims.
[0022]
FIG. 1 shows a first embodiment of the present invention. The configuration shown in FIG. 1 shows a state at the time of measurement by the ultrasonic image inspection apparatus of the present embodiment. In FIG. 1, a support frame 12 is provided on a base 11. In the support frame 12, a step 12 a is formed on the inner side from the center in the height direction. A water tank 13 is placed using the step 12. Further, a triaxial scanner 14 is disposed on the upper end portion of the support frame 12 by using, for example, a rail guide mechanism.
[0023]
The triaxial scanner 14 includes a guide mechanism that allows the ultrasonic probe (or ultrasonic probe: hereinafter referred to as “probe”) 15 to move in the X, Y, and Z axial directions shown in FIG. It has a moving mechanism. The triaxial scanner 14 includes a rail mechanism 14a disposed on the upper end of a support frame 12 provided on the base 11, a rod-shaped frame 14b spanned between the rail mechanisms 14a on both sides, and a frame 14b. It is comprised from the moving part 14c and the support part 14d attached to the moving mechanism 14c. The ultrasonic probe 15 is attached to the lower portion of the support portion 14d so as to be movable in the Z-axis direction. The probe 15 is disposed with the ultrasonic wave emission surface facing downward.
[0024]
The water tank 13 disposed in the inner space above the support frame 12 is located below the ultrasonic probe 15. The arrangement position of the water tank 13 is fixed. In the water tank 13, water (liquid medium) 16 that propagates ultrasonic waves is stored.
[0025]
The probe 15 is moved in the three-axis direction by the three-axis scanner 14, and the ultrasonic wave emission surface at the lower end of the probe 15 is in water 16 in the illustrated example. The probe 15 scans the measurement surface (XY plane) of the sample based on the moving operation of the three-axis scanner 14 or is moved in the Z-axis direction.
[0026]
  The computer 21 includes a flaw detector circuit 22 and a three-axis scanner 14To control the operation. The flaw detector circuit 22 outputs a pulse-like electric signal and applies it to the probe 15. The probe 15 converts the electric signal into an ultrasonic wave.InThe ultrasonic waves are emitted into the water 16 after being converted. The ultrasonic wave emitted from the probe 15 is incident on the set sample 23 based on the structure described later. The ultrasonic reflected echo returned from the sample 23 is converted into an electric signal by the probe 15 and received by the flaw detector circuit 22. Information related to the defect state inside the sample can be obtained from the reflected echo signal. The computer 21 controls the operation of the flaw detector circuit 22 and the moving operation of the triaxial scanner 14. As a result, an electrical signal related to the reflected echo is obtained at each point on the measurement surface on the sample 23. A flaw detection video is created based on the obtained electrical signal relating to the reflected echo, and the flaw detection video is displayed on the screen of the display device 24.
[0027]
The sample 23 to be measured is arranged using the lower part of the inner space of the support frame 12. The sample 23 is placed on a pedestal 25 a of the sample lifting device 25. The sample elevating device 25 is configured using a link mechanism, and its height can be adjusted appropriately by operating the adjustment knob 25b. The sample 23 is a single electronic component such as a semiconductor device chip.
[0028]
Next, a characteristic configuration of the ultrasonic image inspection apparatus will be described.
[0029]
The shape of the water tank 13 in which water that is an ultrasonic propagation medium is accommodated is arbitrary. For example, the center of the bottom 13a of the water tank 13 is cut out to form, for example, a circular opening. An ultrasonic wave propagator 31 having a structure as shown in the figure is attached to the opening at the bottom of the water tank 13. The ultrasonic wave propagator 31 includes a polymer film 32 located on the outer side (lower side in the figure), a polymer film 33 located on the inner side (upper side in the figure), and a central plate fitted into the opening of the bottom 13 a of the water tank 13. 34, a presser plate 35 that fixes the outer polymer film 32, and a presser plate 36 that fixes the inner polymer film 33. The planar shape of the center plate 34 and the presser plates 35 and 36 is preferably a circular or rectangular ring shape. The polymer film 32 is sandwiched between the center plate 34 and the presser plate 35, and the polymer film 33 is sandwiched between the center plate 34 and the presser plate 36. In the ultrasonic wave propagator 31, a liquid medium 37 that propagates ultrasonic waves is enclosed between the two polymer films 32 and 33. The liquid medium 37 is not connected to the water 16 in the water tank 13. As shown in FIG. 2, in the state where no pressing pressure is applied, the outer polymer film 32 is in a state of bulging downward due to the weight of the liquid medium 37 sealed inside.
[0030]
In the state of FIG. 1, the sample elevating device 25 is raised, the upper surface (measurement surface) of the sample 23 is in contact with the polymer film 32, and the pressing force of the sample 23 is applied to the polymer film 32. In such a case, more precisely, as shown in FIG. 3, when a pressing pressure is applied to the polymer film 32, the polymer film 33 positioned inside is deformed as it swells upward. When the inner polymer film 33 is deformed, the resistance due to the polymer film 33 affects the pressing pressure between the outer polymer film 32 and the measurement surface of the sample 23, and the pressing pressure increases.
[0031]
FIG. 4 shows an attachment / detachment structure of the polymer films 32 and 33. The outer polymer film 32 provided on the bottom 13a of the water tank 13 is easily deteriorated by repeated contact with the sample 23, and the two polymer films 32 and 33 are formed on the sample and the probe 15 to be used. Since the appropriate material and thickness of the polymer film differ depending on the frequency, replacement is necessary. Therefore, as described above, the polymer film 32 is sandwiched between the center plate 34 having the opening 34a and the holding plate 35 having the opening 35a, and the polymer film 33 is formed by the center plate 34 and the holding plate 36 having the opening 36a. It is pasted as if sandwiched. The central plate 34 and the presser plates 35 and 36 can be freely assembled or disassembled by a plurality of screws 38. The polymer films 32 and 33, the center plate 34, and the presser plates 35 and 36 are unitized and configured as the ultrasonic wave transmitter 31. The assembled ultrasonic wave propagator 31 is attached to the opening 13b of the bottom 13a of the water tank 13 with a structure in which a sealing property is further maintained using screws 39. As described above, the polymer films 32 and 33 can be easily replaced in the water tank 13.
[0032]
The operation of the ultrasonic image inspection apparatus having the above configuration will be described. In a state where the ultrasonic wave propagator 31 is attached to the bottom 13 a of the water tank 13, the sample 23 to be measured is placed on the pedestal 25 a and the sample lifting device 25 is moved up, and the measurement surface of the sample 23 is placed on the ultrasonic wave transmitter 31. Press against the polymer film 32. When the measurement surface of the sample 23 is pressed against the polymer film 32, the liquid medium 37 is pushed up, but resistance is received by the inner polymer film 33. By such an action, the pressing pressure generated between the measurement surface of the polymer film 32 and the sample 23 is increased, and the polymer film 32 and the sample 23 can be brought into close contact with high adhesion. In this state, the probe 15 scans in the water tank 13, measures the ultrasonic image in the sample 23, and performs an inspection.
[0033]
Based on the measurement by the ultrasonic image inspection apparatus described above, a close contact state is formed at a constant high pressure. Therefore, the combination of the sample 23 and the polymer film 32 causes no mixing of bubbles and wrinkles and causes image unevenness. Difficult measurement can be performed. In particular, it is not necessary to put an intermediate ultrasonic propagation medium between the polymer film 32 and the sample 23.
[0034]
In the above, the liquid medium 37 inside the ultrasonic wave propagator 31 and the liquid medium (water 16) in the water tank 13 do not have to be the same type. As the liquid medium, water, silicone oil, alcohol, glycerin, or the like, or a gel material can be used.
[0035]
Regarding the types of the polymer films 32 and 33 of the ultrasonic wave propagator 31, it is not always necessary to use the same material and the same thickness on the outside and the inside. As the type of polymer film, polyethylene, polyvinyl chloride, polyvinylidene chloride, silicone rubber, nylon, or the like can be used. Further, the thickness is preferably 0.01 mm or more because strength by the material is required. By adjusting the thickness of the polymer film to the resonance frequency of the ultrasonic wave to be used, the influence on the ultrasonic wave during propagation can be reduced. A composite membrane may be used as the polymer membrane. Further, the film attached to the ultrasonic wave propagator 31 is not limited to the polymer film, and a similar film can be used, and the number of the films can be arbitrarily determined.
[0036]
In the ultrasonic wave propagator 31, the pressing pressure of the polymer films 32 and 33 can be changed by a combination of film type and film thickness. However, the above-described pressing pressure can be increased when the polymer film 33 located on the inner side is more difficult to deform than the polymer film 32 located on the outer side. Further, the lower the deformation rate of the inner polymer film 33, the smaller the fluctuation of the water level of the water 16 in the water tank 13 when pressed, the less likely it is to leak, and the higher the speed, the easier it is to respond to control.
[0037]
Next, a second embodiment of the ultrasonic image inspection apparatus according to the present invention will be described with reference to FIG. In this embodiment, only the ultrasonic wave propagator 31 is shown. Other configurations are the same as those described in the first embodiment. In FIG. 5, the same elements as those described in FIG. In the ultrasonic wave propagator 31 according to the second embodiment, a passage 41 connected to the liquid medium 37 filled therein is formed in the central plate 34, and a nozzle 42 and a tube 43 are connected to the passage 41. The base of the tube 43 is connected to the liquid medium supply / discharge mechanism 44. According to the liquid medium supply / discharge mechanism 44, the amount of the liquid medium 37 can be adjusted by supplying and discharging the liquid medium 37 contained in the ultrasonic wave propagator 31. it can. According to the configuration of the second embodiment, the pressing pressure of the polymer film 32 can be adjusted as appropriate.
[0038]
A third embodiment of the ultrasonic image inspection apparatus according to the present invention will be described with reference to FIG. In this embodiment, only the ultrasonic wave propagator 31 is shown. Other configurations are the same as those described in the first embodiment. In FIG. 6, the same elements as those described in FIG. In the ultrasonic wave propagator 31 according to the second embodiment, the inner polymer film is not used and does not have a related structure. In the plate member 51 corresponding to the center plate, an acrylic thin plate is used in place of the inner polymer film. By using a hard plate material for the member corresponding to the inner membrane, the contact pressure between the outer polymer membrane 32 and the sample can be further increased.
[0039]
Next, a fourth embodiment of the ultrasonic image inspection apparatus according to the present invention will be described with reference to FIG. In this embodiment, only the ultrasonic wave propagator 31 is shown. Other configurations are the same as those described in the first embodiment. In FIG. 7, the same elements as those described in FIG. In the ultrasonic wave propagator 31 according to the fourth embodiment, the gel film 52 is attached to the outer surface of the polymer film 32 located outside in the configuration described in the first embodiment. According to this configuration, the degree of adhesion between the polymer film 32 and the measurement surface of the sample 23 can be increased.
[0040]
A fifth embodiment of the ultrasonic image inspection apparatus according to the present invention will be described with reference to FIG. In this embodiment, only the ultrasonic wave propagator 31 is shown. Other configurations are the same as those described in the first embodiment. In FIG. 8, the same elements as those described in FIG. In the ultrasonic wave propagator 31 according to the fifth embodiment, in the configuration described in the first embodiment, a liquid is supplied as an intermediate medium 54 by a medium supply mechanism 53 that supplies a liquid medium to the outer surface of the polymer film 32 positioned outside. A medium is supplied. According to this configuration, the degree of adhesion between the polymer film 32 and the measurement surface of the sample 23 can be increased.
[0041]
A sixth embodiment of the ultrasonic image inspection apparatus according to the present invention will be described with reference to FIG. In this embodiment, only the component part of the water tank 61 provided with the ultrasonic wave propagation device 31 of the first embodiment on the side wall portion is shown. Other configurations are the same as those described in the first embodiment. In FIG. 9, the same elements as those described in FIG. 1 and FIG. According to the ultrasonic image inspection apparatus according to the sixth embodiment, the ultrasonic wave propagator 31 is provided on the side wall 61 a of the water tank 61, and the probe 15 is attached to the lateral direction by the support frame 62. The support frame 62 is fixed to the triaxial scanner. With such a configuration, it is possible to measure and inspect the internal defect 64 by applying it to the DUT 63 having a vertical surface.
[0042]
【The invention's effect】
As is apparent from the above description, the present invention has the following effects.
[0043]
  According to the first aspect of the present invention, an ultrasonic wave propagation device including a plurality of polymer films and containing a liquid medium is provided on the bottom or side of a container containing an ultrasonic medium such as water, Since the ultrasonic film inspection measurement is performed by pressing the polymer film against the sample, the pressing pressure between the outer polymer film and the sample can be increased, and the adhesion between the polymer film and the sample can be further increased. Measurement accuracy can be improved. It is also effective from the viewpoint of practical ultrasonic image inspection.
  In particular, the sample is an electronic component, and this electronic component is placed on the base of the sample lifting device that performs the lifting operation, and the height position of the electronic component can be appropriately adjusted by the sample lifting device. By the ascending operation of the apparatus, measurement can be performed by appropriately pressing the measurement surface of the electronic component arranged outside the container against the polymer film located outside with an ultrasonic wave propagator and sufficiently adhering it.
[0044]
  In addition, since an ultrasonic wave propagation apparatus using a water tank and having a polymer film provided on the lower surface is used in the ultrasonic image inspection apparatus, an ultrasonic image inspection can be performed with less damage to the sample due to the medium. Therefore,For samples that are precision electronic components such as IC chips,A sample can be protected, and a flaw detection inspection at an arbitrary place can be performed accurately. According to the present invention, the total number of semiconductor devices to be manufactured can be checked in the manufacturing process of the semiconductor device, which is effective for inspection of electronic parts before shipment.
[0045]
  According to the second aspect of the present invention, the deformation rate of the polymer film located on the inner side is smaller than the deformation rate of the polymer film located on the outer side.TheTherefore, the pressing pressure between the outer polymer film and the sample can be further increased.
[0046]
According to the third aspect of the present invention, since the supply / discharge mechanism for changing the amount of the liquid medium in the ultrasonic wave propagation device is provided, the amount of the liquid medium in the ultrasonic wave propagation device is made variable and pressed according to the sample. The pressure can be changed.
[0047]
According to the fourth aspect of the present invention, since an acrylic plate or the like is used in the ultrasonic wave propagator, the pressing pressure between the outer polymer film and the sample can be increased.
[0048]
According to the fifth aspect of the present invention, since the gel film is provided on the surface of the polymer film pressed against the sample of the ultrasonic wave propagator, the adhesion between the outer polymer film and the measurement surface of the sample can be improved. .
[0049]
According to the sixth aspect of the present invention, since the liquid medium supply mechanism for supplying the liquid medium to the surface of the polymer film pressed against the sample is provided in the ultrasonic wave propagation device, the adhesion between the outer polymer film and the sample is improved. Can be increased.
[Brief description of the drawings]
FIG. 1 is a longitudinal sectional view showing the overall configuration of a first embodiment of an ultrasonic image inspection apparatus according to the present invention.
FIG. 2 is a longitudinal sectional view showing a state where the ultrasonic wave transmitter according to the first embodiment is not in contact with a sample.
FIG. 3 is a longitudinal sectional view showing a case where an outer polymer film is in contact with a sample in the ultrasonic wave propagation device according to the first embodiment.
FIG. 4 is a longitudinal sectional view showing an exploded state of the ultrasonic wave propagator according to the first embodiment.
FIG. 5 is a longitudinal sectional view of an ultrasonic wave propagator according to a second embodiment of the ultrasonic image inspection apparatus according to the present invention.
FIG. 6 is a longitudinal sectional view of an ultrasonic wave propagator according to a third embodiment of the ultrasonic image inspection apparatus according to the present invention.
FIG. 7 is a longitudinal sectional view of an ultrasonic wave propagator according to a fourth embodiment of the ultrasonic image inspection apparatus according to the present invention.
FIG. 8 is a longitudinal sectional view of an ultrasonic wave propagator according to a fifth embodiment of the ultrasonic image inspection apparatus according to the present invention.
FIG. 9 is a longitudinal sectional view showing a configuration of a water tank portion of a sixth embodiment of the ultrasonic image inspection apparatus according to the present invention.
[Explanation of symbols]
11 base
12 Support frame
13 Aquarium
14 3-axis scanner
15 Ultrasonic probe
16 water
23 samples
25 Sample lifting device
31 Ultrasonic wave propagator
32 Polymer membrane (outside)
33 Polymer membrane (inside)
37 Liquid media
44 Liquid medium supply / discharge mechanism
51 Acrylic board
52 Gel membrane
53 Medium supply mechanism
54 Intermediate medium

Claims (6)

An electrical signal generated by the flaw detector circuit is converted into an ultrasonic wave by an ultrasonic probe, the ultrasonic wave is incident on the sample through a liquid medium, and an ultrasonic reflected echo returning from the inside of the sample is converted into the ultrasonic wave. In an ultrasonic image inspection apparatus that converts an electrical signal with a probe to visualize the inside of the sample,
The sample is an electronic component;
The electronic component is disposed on a base of a sample lifting device that performs a lifting operation, and the height position of the electronic component is adjusted by the sample lifting device,
Rutotomoni comprising an ultrasonic propagator comprising sealing the liquid body medium in a part of the container containing the liquid medium in a plurality of polymer films, wherein disposed on the outside of the container by the upward movement of the sample lifting device An ultrasonic image inspection apparatus characterized in that measurement is performed by bringing a measurement surface of an electronic component into close contact with the polymer film positioned outside by the ultrasonic wave propagation device.   2. The ultrasonic image according to claim 1, wherein, for the plurality of polymer films of the ultrasonic wave propagator, the deformation rate of the polymer film located inside is smaller than the deformation rate of the polymer film located outside. Inspection device.   The ultrasonic wave propagator is provided with a supply / discharge mechanism for changing the amount of the liquid medium sealed inside, and the pressing pressure is changed by changing the amount of the liquid medium inside the ultrasonic wave propagator. The ultrasonic image inspection apparatus according to claim 1 or 2.   The ultrasonic image inspection apparatus according to any one of claims 1 to 3, wherein a plate material is used instead of the film positioned inside by the ultrasonic wave propagator.   The ultrasonic image inspection apparatus according to claim 1, wherein a gel film is provided on a surface of the polymer film pressed against the sample of the ultrasonic wave propagator. 5. The liquid medium supply mechanism for supplying a liquid medium to a surface of the polymer film pressed against the electronic component by the ultrasonic wave propagator is provided. Ultrasound image inspection device.

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