JP2003185640A - Sample holder case, ultrasonic image inspecting apparatus, and its method - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide an easily handled sample holder case capable of fixing a sample in a water tank without contact with water, performing total examination on the sample, being utilized for delivery inspection on electronic components, etc., and being implemented without causing large alterations in the constitution of an apparatus side, an ultrasonic image inspecting apparatus, and its method. <P>SOLUTION: In the apparatus, electric signals from a flaw detector 22 are converted into ultrasonic waves by an ultrasonic probe 13, and the sample 20 is irradiated with the ultrasonic waves via the water 18. Then the ultrasonic waves returned from the sample are converted into electric signals by the ultrasonic probe to form the image of the inside of the sample. The apparatus is provided with the sample holder case 19 housing the sample inside and arranged in the water tank 17. The sample holder case is provided with a case main body 31 in which the sample is arranged in an internal space 35, a lid member 33 which is mounted to the case main body in such a way as to be freely opened and closed and in which an opening part 33a is formed, a high-molecular film 34 provided between them, and an exhaust hole part 37. The internal space is evacuated at measurement to bring the high-molecular film into close contact with the sample. <P>COPYRIGHT: (C)2003,JPO

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a sample holder case, an ultrasonic image inspection apparatus, and an ultrasonic image inspection method, and in particular, protects and reliably protects a precise sample such as an electronic component without bringing it into contact with a medium. The present invention relates to an ultrasonic image inspection apparatus and an ultrasonic image inspection method that enable 100% inspection of samples without changing the device side, and a sample holder case suitable for this.

[0002]

2. Description of the Related Art An ultrasonic image inspection apparatus is known as an inspection apparatus for detecting and evaluating a material defect. The ultrasonic image inspection device is a water (liquid medium) in which a sample is stored in a water tank.
The ultrasonic wave emitted from the probe is incident on the sample through the medium. The probe is supported by a three-axis stage and provided so as to scan the measurement surface of the sample. The ultrasonic waves reflected from the sample are received by the probe and converted into electric signals. The electrical signal is input to the flaw detector circuit and signal processing is performed. The control device composed of a computer controls the operations of the triaxial stage and the flaw detector circuit, creates a flaw detection image based on the signals obtained at each measurement point on the measurement surface of the sample, and displays it on the display device. As a measurement method using the ultrasonic image inspection apparatus, there are a reflection type measurement method in which transmission and reception is performed by one probe, and a transmission type measurement method in which transmission and reception are performed between two probes sandwiching a sample.

Also, as a technique similar to or related to the ultrasonic image inspection apparatus, "New acoustic image method for material evaluation" (Japan Nondestructive Inspection Association 007 Special Research Committee, 19
Announced on April 19, 1990). This acoustic imaging method is an imaging method including an ultrasonic image inspection device and an ultrasonic microscope, and is widely used for detecting and evaluating material defects. In the audio-visual method disclosed in the above-mentioned document, as shown in FIG. 1, a polyethylene sheet is arranged above a sample (unsintered ceramics), the polyethylene sheet is made into a container shape, and water is stored in the polyethylene sheet and the sample. Between the samples, an adhesive tape is attached to the sample, and a gel material is provided on the adhesive tape to bring the polyethylene sheet into close contact with the sample. The ultrasonic probe is placed in water in a polyethylene sheet. When the unsintered ceramics as a sample is brought into contact with water, it deteriorates because it has water absorbability. Therefore, according to the above device configuration, a configuration for preventing the sample and water from coming into contact is adopted. There is.

[0004]

In electronic parts such as semiconductor packages, internal peeling of adhesives and bubbles in the resin cause defects. Therefore, the cause of the defects should be inspected using the ultrasonic image inspection apparatus. There are many. When performing an ultrasonic image inspection using such an electronic component as a sample, the electronic component must be placed in the water of the water tank. In general, the function of many electronic components deteriorates when they get wet with water, so it is extremely rare to treat an electronic component once placed in a water tank by an ultrasonic image inspection as a normal product. Therefore, from the viewpoint of quality control of electronic parts, an image inspection device using ultrasonic flaw detection may be used in the sampling inspection, but it is rarely used for all shipment inspections on a regular basis.

Further, it is necessary to fix the sample contained in the water in the water tank so as not to move during the measurement. However, since the buoyancy acts in water and a water flow occurs during measurement, the sample is easy to move. If the sample moves during measurement, accurate measurement cannot be performed. Further, when the sample floats, there is a high possibility that it will come into contact with the probe. Therefore, conventionally, as a method of fixing the sample in the water tank of the ultrasonic image inspection apparatus, there is a method of arranging on a pressure-sensitive adhesive tape or a method of arranging a magnet plate on this. However, according to these methods, it cannot be used for non-metallic samples or fragile samples, and it takes time and effort to rearrange a large number of samples from the dedicated tray.

In the case where an ultrasonic image inspection apparatus is used as a sample to measure an electronic component as described above, it is possible to avoid contact between the electronic component and water by using the conventional technique using the polyethylene sheet. it can. However, according to the above-mentioned conventional technique, it is necessary to make large changes and improvements in the configuration on the device side, which is costly. Further, even when the sample is fixed in water, which is a medium, the configuration of the device must be changed / improved, which is a problem.

An object of the present invention is to solve the above problems, and it is possible to reliably fix a sample placed in a water tank in a water tank without contacting it with a medium such as water. When it is an electronic component, etc., it is possible to perform a 100% survey, it can be effectively used for shipping inspection of electronic components, and there is no major change in the configuration of the device side. An object of the present invention is to provide an ultrasonic image inspection device and an ultrasonic image inspection method.

A further object of the present invention is to provide a sample holder case suitable for realizing the above-mentioned ultrasonic image inspection apparatus and ultrasonic image inspection method.

[0009]

The sample holder case, the ultrasonic image inspection apparatus, and the ultrasonic image inspection method according to the present invention are configured as follows in order to achieve the above object.

The first sample holder case (corresponding to claim 1) includes a case main body in which a sample is placed in an internal space, and a lid member which is attached to the case main body so as to be openable and closable and has an opening formed therein. An elastic film provided between the case body and the lid member and an exhaust passage portion are provided, and the case body in which the sample is placed is closed by the lid member during measurement, and the elastic film is brought into close contact with the sample. .

In the sample holder case described above, when the sample is placed in the internal space and then set in the measurement state, the elastic film provided on the lid member comes into close contact with the sample. A polymer film or a rubber film is preferably used as the elastic film.
In the case of a polymer film, a vacuum pump is used to forcibly evacuate the internal space to a negative pressure. In the case of rubber film,
The internal space is connected to the outside via the exhaust passage portion, and the air in the internal space can freely escape to the outside.
When the elastic film is a polymer film, the sample holder case in which the elastic film is in close contact with the sample is held as it is and placed in the water tank of the ultrasonic image inspection apparatus. When the elastic film is a rubber film, when the sample holder case is arranged in the water tank of the ultrasonic image inspection apparatus, the elastic film stretches due to the weight of water (liquid medium), and the elastic film adheres to the sample. Since the sample holder case is held at a predetermined fixed position in the water tank, the position of the sample is held in a fixed state in the water tank. In the ultrasonic image inspection apparatus, the ultrasonic probe irradiates the sample with ultrasonic waves through the opening of the lid member and the elastic film. Based on the sample holder case having such a configuration, the sample placed in the water tank is prevented from coming into contact with water, and the position of the sample in the water tank is fixed.

Second sample holder case (corresponding to claim 2)
In the above configuration, preferably, the elastic film is a polymer film, and at the time of measurement, the internal space is evacuated by a vacuum pump through the exhaust passage while the case body is closed by the lid member. It is configured to adhere the molecular film to the sample. When the elastic film is a polymer film, it is forcibly evacuated using a vacuum pump,
Improves adhesion between the polymer film and the measurement surface of the sample.

The third sample holder case (corresponding to claim 3) preferably has an opening / closing valve in the exhaust passage portion, and the opening / closing valve is closed after the vacuum exhaust to remove it from the vacuum pump. Is characterized by. By providing an opening / closing valve and closing the opening / closing valve in a state where the internal space has a negative pressure, backflow can be prevented and the sample holder case can be handled as a single unit.

The fourth sample holder case (corresponding to claim 4) is preferably arranged such that the entire sample holder case is placed in the liquid medium and the exhaust passage portion is a three-way valve. One of the other two openings of the three-way valve is connected to a vacuum pump, and the other one is open to the outside. According to this configuration, the sample holder case can be held in a state where the vacuum pump is always connected, a large number of samples can be inspected for flaw detection, and 100% inspection can be performed. When a sample is put in or taken out from the sample holder case, the sample holder case is taken out from the water tank.

The fifth sample holder case (corresponding to claim 5) preferably has a structure in which the elastic film is a rubber film, and the case body is closed from the outside with a lid member during measurement. When the pressure of the liquid medium is applied to the membrane,
The air in the internal space is discharged to the outside through the exhaust passage,
It is configured to bring the rubber film into close contact with the sample. By using a rubber film as the elastic film, the configuration of forced exhaust using a vacuum pump can be omitted, and the rubber film can be brought into close contact with the measurement surface of the sample during measurement.

The sixth sample holder case (corresponding to claim 6) is characterized in that in the above construction, the exhaust passage portion is preferably open to the atmosphere through a ventilation pipe. According to this configuration, when the sample holder case is submerged in the water tank, when the rubber film stretches due to the weight of water, which is an ultrasonic medium, the air in the internal space escapes to the atmosphere through the exhaust passage and the ventilation pipe. The rubber film can be brought into close contact with the measurement surface of the sample.

The seventh sample holder case (corresponding to claim 7) is characterized in that, in the above structure, the exhaust passage portion is preferably connected to the preliminary chamber. According to this structure, the air in the internal space can be released to the outside by providing the auxiliary chamber.

The eighth sample holder case (corresponding to claim 8) is characterized in that, in the above structure, preferably a tray on which a plurality of samples are placed is arranged in the internal space. According to this configuration, it is possible to simultaneously perform flaw detection inspection on a plurality of samples. Further, there is an advantage that the carrier tray used in the semiconductor device manufacturing process can be used as a dedicated tray for mounting a plurality of samples.

In the above structure, the ninth sample holder case (corresponding to claim 9) preferably has a lattice shape for forming an opening corresponding to each of the plurality of samples in the opening of the lid member. It is characterized in that a frame portion is provided. According to this structure, the strength of the lid member can be increased, the elastic film can be reliably supported, and the elastic film can be protected.

The tenth sample holder case (corresponding to claim 10) is characterized in that, in the above construction, a medium film of an adhesive material or a gel material is preferably provided on the sample contact surface side of the elastic film. To do. According to this structure, the adhesiveness between the elastic film and the sample can be enhanced.

Ultrasonic image inspection apparatus (corresponding to claim 11)
Uses an ultrasonic probe to convert the electrical signal generated by the flaw detection signal generation circuit into ultrasonic waves, irradiates the sample through a liquid medium, and the ultrasonic waves returned from this sample are converted into electrical signals with the ultrasonic probe. It is a device for converting and visualizing the inside of a sample, and further comprises a sample holder case arranged in a container for accommodating the sample therein and storing a liquid medium. This sample holder case includes a case body in which a sample is placed in an internal space, a lid member that is openably and closably attached to the case body and has an opening formed therein, and an elastic member provided between the case body and the lid member. It has a film and an exhaust passage. In the sample holder case, at the time of measurement, the case body in which the sample is placed is closed by a lid member, and the internal space is evacuated through the exhaust passage portion to bring the elastic film into close contact with the sample.

According to the above-mentioned ultrasonic image inspection apparatus, when the sample is set in water which is a liquid medium, the sample is arranged and set in the case of the sample holder, so that the sample is directly attached to the liquid medium. It is possible to protect it from various contacts, and it is possible to fix and hold the set position. It is also effective for flaw detection inspection of precise samples such as electronic parts.

The ultrasonic image inspection method (corresponding to claim 12) is such that an electric signal generated by a flaw detection signal generating circuit is converted into ultrasonic waves by an ultrasonic probe, and the ultrasonic waves are irradiated onto a sample through a medium. It is applied to an ultrasonic image inspection device that converts the ultrasonic waves returned from the sample into an electric signal with an ultrasonic probe and visualizes the inside of the sample, placing the sample in the internal space of the case body outside the medium, The inner space of the case body is closed by a lid member having an elastic film inside and an opening is formed, and the inner space is evacuated by a vacuum pump through the exhaust passage part to bring the elastic film into close contact with the sample, and the exhaust passage In this method, a sample holder case is removed from the vacuum pump by closing an open / close valve provided in the section, and the sample holder case is put into a medium.

According to the above-mentioned ultrasonic image inspection method, ultrasonic flaw inspection can be performed without bringing a precision sample such as an electronic component into contact with water, which is a liquid medium, and in a water tank which is a medium container. The sample can be easily fixed.

In the above method, a plurality of samples are placed in a tray, and the tray is placed in the internal space of the case body (corresponding to claim 13). It is suitable for mass production because it can inspect many samples at the same time.

[0026]

Preferred embodiments of the present invention will be described below with reference to the accompanying drawings.

The configurations, shapes, sizes, and arrangement relationships described in the embodiments are merely shown to the extent that the present invention can be understood and put into practice, and the numerical values and the compositions (materials) of the respective constituent elements. Is only an example. Therefore, the present invention is not limited to the embodiments described below, and can be modified into various forms without departing from the scope of the technical idea shown in the claims.

A first embodiment of an ultrasonic image inspection apparatus according to the present invention will be described with reference to FIGS. The ultrasonic image inspection apparatus according to the first embodiment is characterized by the configuration of the sample holder case. 1 is a device configuration during measurement, FIG. 2 is a use state during vacuum suction, FIG. 3 is a perspective view of a sample holder case, and FIG. 4 is a vertical cross-sectional view of the sample holder case.

In FIG. 1, a triaxial scanner 12 is provided on a base 11. The triaxial scanner 12 has a moving mechanism that allows the ultrasonic probe (ultrasonic probe) 13 to move in the X, Y, and Z axis directions shown in FIG.
The 3-axis scanner 12 has at least two units that stand on the base 11.
It is composed of a book pillar 14, a bar-shaped frame 15 suspended between the two pillars 14, and a support portion 16 attached so as to move on the frame 15. The ultrasonic probe 13 is attached to the lower part of the support 16 so as to be movable in the Z-axis direction. Ultrasonic probe 13
Is disposed with the ultrasonic wave emitting surface facing downward. Base 1
A water tank 17 is placed above 1. Water (liquid medium) 18 that propagates ultrasonic waves is stored in the water tank 17. A sample holder case 19 is arranged in the water 18 in the water tank 17. Sample 20 in the sample holder case 19
Is housed.

The probe 13 is moved by the 3-axis scanner 12 to
The ultrasonic wave emitting surface which is moved in the axial direction and which is at the lower end of the probe 13 is buried in the water 18. The probe 13 moves the measurement surface (X
Scan (Y plane) or move in the Z-axis direction. The computer 21 controls the operations of the flaw detector circuit 22 and the triaxial scanner 12. The flaw detector circuit 22 outputs a pulsed electric signal and supplies it to the probe 13. The probe 13 converts the electric signal into ultrasonic waves and emits the ultrasonic waves into the water 18. The ultrasonic waves emitted from the probe 13 enter the sample 20 set in the sample holder case 19. Sample 2
Inside 0, reflected echoes of ultrasonic waves occur. The reflected echo generated inside the sample is converted into an electric signal by the probe 13 and received by the flaw detector circuit 22. The defect state inside the sample can be known from the reflected echo signal returned from the inside of the sample 20. The computer 21 is a flaw detector circuit 2
By controlling the operation of No. 2 and the moving operation of the three-axis scanner 12, the electric signal related to the reflection echo is acquired at each point of the measurement surface on the sample 20. A flaw detection image is created based on the obtained electric signal related to the reflection echo, and the display device 2
The flaw detection image is displayed on the screen of No. 3.

The sample holder case 19 is kept in a watertight state in the state shown in FIG. 1 at the time of measurement, in which the internal space is forcibly evacuated by a vacuum pump to be in a negative pressure state. ing. The sample 20 is a sample holder case 19
Protected by and fixed within it. The sample 20 is a precision sample such as an electronic component.

As shown in FIGS. 3 and 4, the sample holder case 19 has a case main body 31 having an open upper part, and a lid member 3 attached to the case main body 31 by a hinge mechanism 32 so as to be openable and closable.
3 and 3. The lid member 33 has a rectangular shape and a rectangular ring frame in which a rectangular opening 33a is formed. A sheet-shaped polymer film (polymer film) 34 having elasticity is attached to the lower surface of the lid member 33. The polymer film 34 is a film-shaped member made of a polymer material and has a required elasticity. As the polymer film 34, for example, a polyethylene film is used. The lid member 33 is the hinge mechanism 32.
When opened around, the case main body 31 has the inner space 3
5 is opened, and the sample 20 can be placed in the internal space 35 of the case main body 31. When the lid member 33 is closed, as shown in FIGS. 3 and 4, the polymer film 34 is sandwiched between the lid member 33 and the upper surface of the case body 31. By arranging the sheet-shaped polymer film 34 having elasticity, the internal space 35 of the case body 31 is kept watertight, and
Pressure is directly applied to the polymer film 34 from the outside through the rectangular opening 33a of the lid member 33.

In the sample holder case 19, the case body 31
When the sample 20 such as an electronic component is placed in the internal space 35 of the container and the lid member 33 is closed with respect to the case body 31, the clasp 36
Thus, the lid member 33 is fixed to the case body 31. 3 and 4 show this state.

An exhaust hole 37 is formed in the case body 31 of the sample holder case 19 as an exhaust passage portion connecting the internal space 35 and the outside, and an opening / closing valve 38 is provided in the exhaust hole 37. . When the outer knob 38a of the opening / closing valve 38 is opened, the exhaust hole 37 is vented,
When closed, the internal space 35 is cut off from the outside. A hose 39 is connected to the outer protrusion of the exhaust hole 37. The tip of the hose 39 is connected to an evacuation vacuum pump (40 shown in FIG. 2) not shown in FIGS. 3 and 4. The internal space 35 of the sample holder case 19 is evacuated by the vacuum pump 40. Internal space 35 of sample holder case 19
When the polymer film 34 is evacuated,
The negative pressure of 5 sucks it toward the inner space, and as a result, as shown in FIG. 4, the polymer film 34 comes into close contact with the surface (measurement surface) of the sample 20. The polymer film 34 has elasticity and functions as a sealing material. When the opening / closing valve 38 is opened, the exhaust hole 37 communicates with the external atmospheric pressure, so that the negative pressure state of the internal space 3 is released and the sample 2
The adhered state of the polymer film 34 to 0 is released.

Next, a method of using the ultrasonic image inspection apparatus and the sample holder case 19 will be described. When a flaw detection inspection is performed by using ultrasonic waves as a sample 20 of a precision electronic component such as a semiconductor chip, the lid member 3 of the sample holder case 19 is used.
3 is opened, and the sample 2 is placed in the internal space 35 of the case body 31.
Place 0. At this time, the measurement surface of the sample 20 is arranged so as to face upward. Then, the lid member 33 is closed and fixed with the clasp 36. The outer protrusion of the vent hole 37 is connected to a vacuum pump 40 via a hose 39. This state is shown in FIG. With the opening / closing valve 38 open, the internal space 35 of the sample holder case 19 is evacuated by the vacuum pump 40 to suck the internal space 35. As a result, the internal space 35 is in a negative pressure state. When a predetermined negative pressure is reached, the open / close valve 38 is closed and the hose 39 is removed from the sample holder case 19. After that, as shown in FIG. 1, the sample holder case 19 is placed in the water 18 in the water tank 17. In this state, the flaw detection inspection of the sample 20 is performed by the ultrasonic image inspection apparatus as described above. When the flaw inspection on the sample 20 is completed, the sample holder case 19 is placed in the water tank 17
Then, the lid member 33 of the sample holder case 19 is opened and the sample 20 is taken out. After that, the measurement is continued similarly for other samples.

According to the ultrasonic image inspection apparatus according to the first embodiment described above, ultrasonic flaw inspection can be performed without bringing a precision sample such as an electronic component into contact with the water 18, and the sample holder case 19 can be used. Since it can be stored in
The sample can be easily fixed in the water tank 17. In particular, since it is sufficient to prepare the sample holder case 19, and it is not necessary to change the configuration of the ultrasonic image inspection apparatus, it can be easily realized. During the measurement with ultrasonic flaw detection, the polymer film 34 is in close contact with the measurement surface of the sample 20, so that the ultrasonic waves emitted from the probe 13 are efficiently incident on the inside of the sample 20.

The polymer film 34 having elasticity is evacuated to a negative pressure inside the case body 31 for each sample 20 to be inspected so as to be brought into close contact with the sample 20. Therefore, if the inspection is continued for a long time, damage or damage will occur. . Therefore, the polymer film 34 is replaced at an appropriate timing.

Next, a second embodiment of the ultrasonic image inspection apparatus according to the present invention will be described with reference to FIGS. The ultrasonic image inspection apparatus according to the second embodiment is characterized in that all the precise samples such as electronic parts can be inspected by using the sample holder case described above. Figure 5 shows the device configuration during measurement,
FIG. 6 is a perspective view of the sample holder case, FIG. 7 is a vertical cross-sectional view of the sample holder case, and FIGS. 8 and 9 are diagrams showing the operating state of the three-way valve. In each figure, the elements substantially the same as the elements described in the first embodiment are designated by the same reference numerals.

In FIG. 5, a triaxial scanner 12 is attached on a base 11, and an ultrasonic probe 13 is attached to the triaxial scanner 12. Further, a water tank 17 in which water 18 is stored is placed on the base 11. Aquarium 17
A sample holder case 51 according to the present embodiment is arranged in the water 18 therein. The probe 13 has a flaw detector circuit 22.
Gives an electric signal for flaw detection. The computer 21 including the display device 23 controls each operation of the three-axis scanner 12 and the flaw detector circuit 22.

A vacuum pump 40 is arranged outside the ultrasonic image inspection apparatus. The suction / vacuum operation of the vacuum pump 40 is preferably controlled by the computer 21 and automated. The exhaust hole of the sample holder case 51 has a hose 52.
Also, it is connected to the vacuum pump 40 via a three-way valve 53. The three-way valve 53 includes a mouth portion connected to the sample holder case 51, a mouth portion connected to the vacuum pump 40, and a leak port 53a. The sample 20 is accommodated in the sample holder case 51 as indicated by the broken line. Probe 13
The ultrasonic wave is emitted from the sample 20 to the sample 20, and the reflected echo from the sample 20 is received by the probe 13.

As shown in FIGS. 6 and 7, the sample holder case 51 includes a case body 31 and a rectangular frame-shaped lid member 3.
3 and a hinge mechanism 32 connecting the two and a clasp 36. A polymer film 34 is provided between the case body 31 and the lid member 33. Polymer film 3
Reference numeral 4 makes a close contact with the sample 20 by a negative pressure based on the vacuum exhaust inside, and also functions as a sealing material for making the inside of the case watertight when the lid member 33 is closed. As shown in FIG. 7, an exhaust hole 37 is formed in a part of the wall of the case body 31 of the sample holder case 51. The outer protrusion of the exhaust hole 37 is connected to the hose 52 as described above.
Unlike the case of the first embodiment, the sample holder case 51 according to this embodiment is not provided with an opening / closing valve. Instead of the open / close valve, the above-described three-way valve 53
Will open and close the valve.

8 and 9 show the operating state of the three-way valve 53. FIG. 8 shows that the valve member 53b connects the vacuum pump 40 and the exhaust hole 37 of the case body 31. This state is the state during vacuum evacuation. Thereby, the sample holder case 51 in which the lid member 33 is closed
The internal space 35 is forcedly evacuated by the vacuum pump 40. FIG. 9 shows a state in which the valve member 53b connects the exhaust hole 37 of the sample holder case 51 to the leak port 53a and opens the internal space 35 of the sample holder case 51 to the outside air via the leak port 53a. ing. The above-mentioned connecting operation of the three-way valve 53 is similarly controlled by the computer 21 which is a control means.

According to the configuration of the ultrasonic image inspection apparatus according to the second embodiment, the computer 21 as the control means realizes the scanning operation by the flaw detector circuit 22 and the probe 13 for performing the ultrasonic flaw inspection operation. By controlling the operations of the three-axis scanner 12, the vacuum pump 40, and the connection operation of the three-way valve 53 with good timing, a large number of samples 20 can be obtained.
It is possible to automatically perform the flaw detection inspection. However, setting of the sample 20 in the sample holder case 51 is performed manually. Therefore, the operator takes out the sample holder case 51 in the water tank 17 to replace the sample 20, returns the sample holder case 51 to the water tank 17 again, performs vacuum exhaustion and flaw inspection, and then holds the sample holder. The inside of the tool case 51 is returned to atmospheric pressure, and the sample is exchanged again.

According to the apparatus configuration according to the second embodiment as described above, a large number of samples can be inspected for flaws, and 100% of electronic components can be inspected.

Next, another embodiment of the sample holder case will be described.

FIG. 10 has a structure in which a tray 62 for placing a plurality of samples 20 is provided inside a sample holder case 61. Originally, the tray 62 is composed of a plurality of samples 20.
Is a transport tray for simultaneously transporting. In the manufacturing process of electronic components, since it is usually transported by a dedicated tray, the transport tray is directly accommodated in the internal space of the sample holder case 61. Other configurations are the same as those of the sample holder case 51 of the second embodiment. Case body 31
When the gas is exhausted through the exhaust hole 37 formed in, the internal space becomes a negative pressure and the polymer film 34 becomes
It adheres to each of the 0 measurement surfaces. Thus, a large number of samples 20 can be simultaneously inspected for flaw detection. With the configuration using the tray 62 described above, it is not necessary to replace the samples 20, and it is possible to perform flaw detection inspection measurements on a large number of samples 20.

FIG. 11 shows a modification of the sample holder case shown in FIG. In this sample holder case 71, a grid-like frame 72 is formed as a crosspiece in the rectangular opening of the lid member 33. The formation positions of the plurality of rectangular openings (windows) 73 formed by the lattice-shaped frame 72 correspond to each sample 20 placed on the tray 62. Further, the polymer film 34 fixed to the inner surface of the lid member 33 is fixed to the inner surface of the lattice-shaped frame 72 by the holding frame body 74. Therefore, according to the sample holder case 71 according to the present embodiment, when a negative pressure state is created in the internal space of the sample holder case 71 by evacuation, the entire polymer film does not elastically deform downward, but has a lattice shape. The portion of the polymer film 34 corresponding to each small rectangular opening 73 formed by the frame 72 elastically deforms and comes into close contact with the measurement surface of the sample 20. Therefore, the deformation area and the deformation amount of the polymer film 34 are limited for each sample,
Improves handling and protects the polymer film 34,
Further, the adhesion between the polymer film 34 and each sample 20 and its adhesion uniformity are improved.

FIG. 12 shows a modified example in which the carrier tray in the manufacturing process of electronic parts is used as the dedicated tray 62 of the sample holder in the ultrasonic image inspection apparatus as described above. According to this embodiment, the case main body and the lid member in the above-described embodiments are unnecessary. That is, it is only necessary to prepare the bag 81 made of a polymer film and provide the exhaust hole member 82 at the inlet thereof. According to this configuration, if the tray 62 on which a plurality of samples 20 are mounted is put into the inside from the inlet of the bag 81, the exhaust hole member 82 is provided at the inlet, and exhaust is performed by the vacuum pump as in the above-described embodiment,
Can be used. According to the above configuration, the case body and the lid member can be omitted, so that the cost is reduced.

FIG. 13 shows an embodiment of a sample holder case suitable for an ultrasonic image inspection apparatus having a transmission type ultrasonic probe. In the sample holder case 91, the case main body 92 is a frame body having an opening space for setting and arranging the sample 20 and an exhaust hole portion 93. Rectangular frame-shaped lid members 96 and 97 formed by fixing polymer films 94 and 95 to the upper and lower sides of the case main body 92 are attached. Any means can be used for attaching the lid members 96 and 97 to the case body 92. When the lid members 96 and 97 are attached to the case main body 92 and vacuum exhaust is performed from the exhaust hole portion 93 by the above-described method, the upper and lower polymer films 94 and 95 are subjected to a negative pressure, and thus the sample 20
Adhere to the upper and lower surfaces of. The sample holder case 91 is placed in the water in the water tank in the state as shown in FIG. 13, and the flaw detection inspection is performed by the transmission type ultrasonic probe.

In each of the above embodiments, when the elastic film provided so as to cover the measurement surface of the sample 20 is the polymer film 34, a certain small amount of medium is used in order to prevent the sample from deteriorating. It is preferable. Therefore, as a first example, the polymer film 34 is applied to the sample 20 after the medium is applied to the measurement surface of the sample 20.
It is made to adhere so that the said measurement surface of may be covered. Further, as another example, a polymer film having a medium film of a gel material on the surface to be brought into close contact with the measurement surface of the sample can be used. Further, as the polymer film, a film having an adhesive (adhesive material) medium film on the surface to be brought into close contact with the measurement surface of the sample can be used. The composite type polymer film using the gel material on the contact surface of the sample also has an action of reducing damage to the sample when the polymer film is peeled from the sample.

In each of the above-described embodiments, the example of the polymer film is described as the elastic film brought into close contact with the sample 20, but a rubber film may be used as the elastic film that produces the above-mentioned action. As the rubber film, a lattice film, artificial rubber or the like is used. As the thickness of the rubber film,
For example, in a usage pattern as shown in FIG. 1, the thickness is a desirable thickness with which the ultrasonic waves emitted from the ultrasonic probe to the sample can sufficiently propagate to the sample.

In the case of the sample holder case using the rubber film as the elastic film, unlike the case of the above-described embodiment using the polymer film 34, forced evacuation by the vacuum pump is not performed. As a typical embodiment, the structure of the sample holder case is the same as the structure shown in FIG. 4 of the first embodiment except that a rubber film is used instead of the polymer film 34 and the exhaust hole 37 is formed. Cage, exhaust hole 37
A hose 39 having a required length is connected to the outer protruding portion of the. No vacuum pump is connected to the tip of the hose 39, and the hose 39 is open to the atmosphere. The on-off valve 38 may or may not be present. Basically, the internal space of the sample holder case is open to the atmosphere via the exhaust hole 37 and the hose 39. This open state to the atmosphere is the same when the sample 20 such as an electronic component is placed in the sample holder case, the lid member 33 is closed, and the sample holder case is put in the water 18 of the water tank 17. That is, the hose 39 is drawn out from the sample holder case in the water tank 17 so as to go out of the water 18, and the internal space of the sample holder case is opened to the atmosphere via the tip of the hose 39. become.

When the sample holder case in which the sample 20 is placed inside and the lid member 33 is closed is placed in the water tank 17, the sample holder case receives the weight of water 18 which is a liquid medium for ultrasonic wave propagation,
The rubber film, which is an elastic film, extends due to its weight, and the rubber film comes into close contact with the measurement surface of the sample 20. In this way, the ultrasonic inspection can be performed with the same operation and effect as the operation described in the first embodiment.

According to the sample holder case using the rubber film as the elastic film and the ultrasonic image inspection apparatus using this sample holder case, the internal space of the sample holder case using the vacuum pump is forcibly exhausted. It is only necessary to form the exhaust hole and connect it to the hose to open the internal space to the atmosphere without performing the above, and therefore, there is an advantage that the configuration is simplified and the cost can be reduced.

The sample holder case made of a rubber film as the elastic film is provided with a preliminary chamber for letting air in the internal space where the sample is placed through an exhaust hole instead of being constructed by using a hose. It can also be configured to do so. According to this structure, since an accessory such as a hose can be omitted, in addition to the above effects, the handleability is improved.

It is needless to say that the characteristic configurations of the above-described respective embodiments can be appropriately combined and configured. Even in the embodiment in which the rubber film is used as the elastic film, it is needless to say that the structures described in the first and second embodiments and the modified examples can be adopted as necessary. In each of the above-described embodiments, a polymer film or rubber film having elasticity is used as the film (film) that is in close contact with the wave sample, but the invention is not limited to this. Any other elastic film that produces a similar action / effect can be used.

[0057]

As is apparent from the above description, according to the present invention, the ultrasonic image inspection apparatus is provided with the dedicated sample holder case for the sample arranged in the liquid medium. The sample can be securely fixed in the medium container without coming into contact with the medium such as water.
According to the present invention, when the sample is a precision electronic component such as an IC chip, the sample can be protected and fixed at an accurate position for flaw detection inspection. According to the present invention, in a semiconductor device manufacturing process, it is possible to perform a 100% inspection of semiconductor devices to be manufactured, and it can be effectively used for shipping inspection of electronic components. In particular, the ultrasonic image inspection apparatus can be realized with a relatively simple configuration without causing a large change in the configuration on the device side.
When placing a sample in the sample holder case, when using a polymer film as the elastic film, the polymer film is in close contact with the measurement surface of the sample in order to forcibly evacuate with a vacuum pump to create a negative pressure in the internal space. However, the internal space of the sample holder case can be made watertight, and the flaw detection inspection by ultrasonic waves can be performed well. The sample holder case can be freely put in and taken out from the water tank of the ultrasonic image inspection apparatus, and the handling is easy.

According to the structure using the rubber film as the elastic film, the structure of forced evacuation by the vacuum pump can be omitted, so that the structure can be simplified, the cost can be reduced, and the handleability can be improved.

Further, a dedicated tray is prepared by using a transport tray, etc., a plurality of samples are placed on the dedicated tray, and the dedicated tray is arranged in the sample holder case, so that a large number of samples can be efficiently inspected for flaw detection. can do.

By providing an adhesive material or a gel material between the elastic film such as a polymer film and the sample, the adhesion can be further improved, the sample can be protected, and the sample can be easily removed. .

[Brief description of drawings]

FIG. 1 is a configuration diagram showing a measurement state of an ultrasonic image inspection apparatus according to a first embodiment of the present invention.

FIG. 2 is a diagram showing a usage state of the sample holder case according to the first embodiment during vacuum suction.

FIG. 3 is an external perspective view of a sample holder case according to the first embodiment.

FIG. 4 is a vertical cross-sectional view of the sample holder case according to the first embodiment during measurement.

FIG. 5 is a configuration diagram showing a state during measurement of the ultrasonic image inspection apparatus according to the second embodiment of the present invention.

FIG. 6 is an external perspective view of a sample holder case in the second embodiment.

FIG. 7 is a vertical sectional view of a sample holder case according to a second embodiment.

FIG. 8 is a diagram showing a connection state of a three-way valve in a second embodiment during vacuum.

FIG. 9 is a diagram showing a connection state of the three-way valve when leaking in the second embodiment.

FIG. 10 is a vertical cross-sectional view showing another configuration example of the sample holder case.

FIG. 11 is a vertical cross-sectional view showing another configuration example of the sample holder case.

FIG. 12 is a vertical cross-sectional view showing another configuration example of the sample holder case.

FIG. 13 is a vertical cross-sectional view showing another configuration example of the sample holder case.

[Explanation of symbols]

11 bases 12 3-axis scanner 13 Ultrasonic probe 17 aquarium 18 water 19 Sample holder case 20 samples 31 Case body 32 Hinge mechanism 33 Lid member 34 Polymer film 35 Internal space 37 Exhaust hole 38 Open / close valve 39,52 hose 40 vacuum pump 51 Sample holder case 53 three-way valve 61,71 Sample holder case 62 trays 72 Lattice frame 81 Polymer film bag 91 Sample holder case

Claims (13)

[Claims] 1. A case main body in which a sample is placed in an internal space, a lid member attached to the case main body so as to be openable and closable, and having an opening formed therein, and an elastic film provided between the case main body and the lid member. A sample holder case comprising an exhaust passage part, and the case body in which the sample is placed is closed by the lid member during measurement so that the elastic film is brought into close contact with the sample. 2. The elastic film is a polymer film, and the interior space is evacuated by a vacuum pump through the exhaust passage while the case body is closed by the lid member during measurement. The sample holder case according to claim 1, wherein a film is brought into close contact with the sample. 3. The sample holder case according to claim 2, wherein an opening / closing valve is provided in the exhaust passage portion, and the opening / closing valve is closed and removed from the vacuum pump after vacuum evacuation. 4. The sample holder case is entirely placed in a liquid medium, and the exhaust passage portion is connected to one opening of a three-way valve by a hose, and among the other two openings of the three-way valve. The sample holder case according to claim 2, wherein one is connected to the vacuum pump and the other is open to the outside. 5. The elastic film is a rubber film, and when a pressure of a liquid medium is applied to the rubber film from the outside while the case body is closed by the lid member at the time of measurement, the elastic film passes through the exhaust passage portion. The sample holder case according to claim 1, wherein the air in the internal space is discharged to the outside to bring the rubber film into close contact with the sample. 6. The sample holder case according to claim 5, wherein the exhaust passage portion is open to the atmosphere through a ventilation pipe. 7. The sample holder case according to claim 5, wherein the exhaust passage portion is connected to a preliminary chamber. 8. The sample holder case according to claim 1, wherein a tray holding a plurality of the samples is arranged in the internal space. 9. The sample holder case according to claim 8, wherein the opening portion of the lid member is provided with a lattice-shaped frame portion for forming an opening corresponding to each of the plurality of samples. . 10. The sample holder case according to claim 1, wherein a medium film made of an adhesive material or a gel material is provided on the sample contact surface side of the elastic film. 11. An ultrasonic probe converts an electric signal generated by a flaw detection signal generation circuit into ultrasonic waves, irradiates the sample through a liquid medium, and returns ultrasonic waves from the sample to the ultrasonic probe. An ultrasonic image inspection apparatus for converting the electric signal into an electric signal to visualize the inside of the sample, comprising a sample holder case arranged inside a container for accommodating the sample inside and accumulating the liquid medium. The holder case includes a case main body in which the sample is placed in the internal space, a lid member that is openably and closably attached to the case main body, and has an opening formed therein, and an elastic member provided between the case main body and the lid member. An ultrasonic image inspection apparatus comprising a film and an exhaust passage portion, wherein, at the time of measurement, the case main body in which the sample is placed is closed by the lid member, and the elastic film is brought into close contact with the sample. 12. An ultrasonic probe is used to convert an electric signal generated by a flaw detection signal generating circuit into ultrasonic waves, and the ultrasonic wave is radiated to a sample through a medium, and ultrasonic waves returning from the sample are ultrasonically reflected by the ultrasonic probe. An ultrasonic image inspection method applied to an ultrasonic image inspection apparatus for converting an electric signal into an image of the inside of the sample, wherein the sample is arranged in an internal space of a case body outside the medium, and inside The inner space of the case body is closed by a lid member having an elastic film on which an opening is formed, and the inner space is evacuated by a vacuum pump through an exhaust passage portion to adhere the elastic film to the sample. Then, the open / close valve provided in the exhaust passage is closed, the sample holder case is removed from the vacuum pump, and the sample holder case is put into the medium. 13. The ultrasonic image inspection method according to claim 12, wherein a plurality of the samples are arranged in a tray, and the tray is arranged in the internal space of the case body.