JP2003254843A5 - - Google Patents

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Publication number
JP2003254843A5
JP2003254843A5 JP2002059447A JP2002059447A JP2003254843A5 JP 2003254843 A5 JP2003254843 A5 JP 2003254843A5 JP 2002059447 A JP2002059447 A JP 2002059447A JP 2002059447 A JP2002059447 A JP 2002059447A JP 2003254843 A5 JP2003254843 A5 JP 2003254843A5
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2002059447A
Other languages
Japanese (ja)
Other versions
JP3970640B2 (en
JP2003254843A (en
Filing date
Publication date
Application filed filed Critical
Priority to JP2002059447A priority Critical patent/JP3970640B2/en
Priority claimed from JP2002059447A external-priority patent/JP3970640B2/en
Priority to EP03000457.6A priority patent/EP1327870B1/en
Priority to US10/339,496 priority patent/US6823744B2/en
Publication of JP2003254843A publication Critical patent/JP2003254843A/en
Priority to US10/972,354 priority patent/US6951142B2/en
Publication of JP2003254843A5 publication Critical patent/JP2003254843A5/ja
Application granted granted Critical
Publication of JP3970640B2 publication Critical patent/JP3970640B2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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JP2002059447A 2002-01-11 2002-03-05 6-axis force sensor Expired - Lifetime JP3970640B2 (en)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP2002059447A JP3970640B2 (en) 2002-03-05 2002-03-05 6-axis force sensor
EP03000457.6A EP1327870B1 (en) 2002-01-11 2003-01-10 Six-axis force sensor
US10/339,496 US6823744B2 (en) 2002-01-11 2003-01-10 Six-axis force sensor
US10/972,354 US6951142B2 (en) 2002-01-11 2004-10-26 Six-axis force sensor chip and six-axis force sensor using the same

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2002059447A JP3970640B2 (en) 2002-03-05 2002-03-05 6-axis force sensor

Publications (3)

Publication Number Publication Date
JP2003254843A JP2003254843A (en) 2003-09-10
JP2003254843A5 true JP2003254843A5 (en) 2007-03-22
JP3970640B2 JP3970640B2 (en) 2007-09-05

Family

ID=28669136

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2002059447A Expired - Lifetime JP3970640B2 (en) 2002-01-11 2002-03-05 6-axis force sensor

Country Status (1)

Country Link
JP (1) JP3970640B2 (en)

Families Citing this family (27)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4203051B2 (en) 2005-06-28 2008-12-24 本田技研工業株式会社 Force sensor
CN100387952C (en) * 2006-04-18 2008-05-14 燕山大学 Parellel 6-UPUR hexa-dimensional force-measuring platform
JP5243704B2 (en) 2006-08-24 2013-07-24 本田技研工業株式会社 Force sensor
JP4210296B2 (en) 2006-08-24 2009-01-14 本田技研工業株式会社 Method for manufacturing force sensor
JP2008058110A (en) 2006-08-30 2008-03-13 Honda Motor Co Ltd Chip for force sensor and force sensor
JP4958501B2 (en) 2006-08-30 2012-06-20 本田技研工業株式会社 Force sensor chip and external force transmission mechanism
JP4909104B2 (en) 2007-01-31 2012-04-04 本田技研工業株式会社 Force sensor
CN100523753C (en) * 2007-02-07 2009-08-05 燕山大学 Upper and lower prefastening parallel connection structure six-dimensional force sensor
JP2009079948A (en) * 2007-09-26 2009-04-16 Oki Semiconductor Co Ltd Semiconductor acceleration sensor and its manufacturing method
JP5604035B2 (en) 2008-07-18 2014-10-08 本田技研工業株式会社 Force sensor unit
JP4929257B2 (en) * 2008-09-11 2012-05-09 本田技研工業株式会社 Force sensor
JP4929256B2 (en) * 2008-09-11 2012-05-09 本田技研工業株式会社 Force sensor
JP2011200943A (en) * 2010-03-24 2011-10-13 Canon Inc Force control robot
WO2011145713A1 (en) * 2010-05-20 2011-11-24 Canon Kabushiki Kaisha Force control robot
US9459173B2 (en) * 2011-10-14 2016-10-04 Advanced Mechanical Technology, Inc. System and method for three dimensional calibration of force plates
KR101326546B1 (en) * 2012-03-15 2013-11-08 전자부품연구원 Force sensor
JP6050133B2 (en) * 2013-01-30 2016-12-21 京セラ株式会社 Input device and electronic device
US9995644B2 (en) 2015-04-07 2018-06-12 Wacoh Corporation Force sensor and structure body used therein
JP6940037B2 (en) * 2017-04-26 2021-09-22 ミネベアミツミ株式会社 Force sensor device
JP7125588B2 (en) * 2018-01-30 2022-08-25 ミツミ電機株式会社 Sensor assembly, stylus pen, handwriting input system, and work drawing technique instruction system
WO2020084980A1 (en) * 2018-10-26 2020-04-30 ソニー株式会社 Detection device
CN111426421B (en) * 2018-12-20 2022-01-04 财团法人工业技术研究院 Multi-axis force sensing device
TWI716789B (en) * 2018-12-20 2021-01-21 財團法人工業技術研究院 Multi-axis force sensor
JP2022101139A (en) 2020-12-24 2022-07-06 ミネベアミツミ株式会社 Sensor chip and inner force sensor device
JP2022101140A (en) 2020-12-24 2022-07-06 ミネベアミツミ株式会社 Distortion-generating body and force sensor device
JP2022142116A (en) 2021-03-16 2022-09-30 ミネベアミツミ株式会社 Strain body and force sensor device
CN115112286A (en) 2021-03-19 2022-09-27 美蓓亚三美株式会社 Strain body and force sensor device

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