JP7125588B2 - Sensor assembly, stylus pen, handwriting input system, and work drawing technique instruction system - Google Patents

Description

The present invention relates to a sensor assembly, a stylus pen, a handwriting input system, and a work drawing technique guidance system using a 6-axis force sensor.

2. Description of the Related Art Conventionally, an input device equipped with a force sensor device for detecting force and moment has been known. For example, a pen-type input device having a pen tip as an input unit is known, and is called a stylus pen or the like.

A three-axis detection type is generally used as a force sensor device, but Patent Document 1 discloses time-series data of contact force obtained when a handwritten signature is made with a pen in order to improve the security of personal authentication. A force sensor (also referred to as a 6-axis sensor or a 6-axis force sensor) using (four-dimensional data) has been proposed. The four-dimensional data is not only the pen pressure, which is the pressure in the vertical direction of the touch panel, but also a force vector having a three-dimensional component acting on the contact point. In Patent Document 1, four-dimensional data detected by a force sensor is compared with time-series data of contact force of an individual to be authenticated who has been registered in advance, and personal authentication is performed to identify whether the individual is a handwritten signature individual. Certification is proposed.

In recent years, with the development of medical technology, a telesurgery system including a patient surgery robot and an operator-operated robot connected to the patient surgery robot by wire or via a network has become widespread. However, even if the scalpel or scissors gripped by the arm of the patient surgery robot touches an organ or abdominal wall, the operator cannot perceive it as a response, and it has been reported that mechanical problems such as pressure on the arm occur. ing.

Therefore, for the purpose of analyzing human gripping operations and using the data in robots, we developed a 6-axis force sensor that detects contact force data when a human fingertip is being worn and is operating. Patent document 2 is proposed.

JP 2008-46781 A Patent No. 427344

However, in the configuration shown in Patent Document 1, the distance between the pen tip 92 and the 6-axis sensor 95 is long as shown in FIG. 1(a). As a result, the moment as an input to the 6-axis sensor 95 becomes large, which increases noise sources such as vibration of the pen tip, making it difficult to detect minute forces, resulting in low detection accuracy.

Further, in the configurations of Patent Document 1 shown in FIG. 1(a) and Patent Document 2 shown in FIG. Since it is provided, the 6-axis sensor (95, 903) narrows the field of view of the operator and interferes with the operation of the distal end (92, 902+904).

Therefore, in view of the above circumstances, the present invention provides a sensor including a 6-axis force sensor that can improve the accuracy of detecting the pressure of contact with an object and the tilt of the sensor assembly without interfering with the field of view and operation. Provide assembly.

In order to solve the above problems, in one aspect of the present invention,
a tubular casing;
a tip member capable of coming into contact with an object while partially protruding from one end of the housing;
a 6-axis force sensor provided in the housing and provided with a power point input section protruding toward the tip side;
a tip member mounting portion connected to the force point input portion of the six-axis force sensor and capable of mounting the tip member;
The 6-axis force sensor has a strain body and a sensor chip attached to a surface on the tip side of the strain body,
The strain generating body has four power point input portions protruding toward the distal end side from the sensor chip so as to surround the sensor chip on the surface on the distal end side,
The tip member attachment portion has an attachment standing portion surrounding the rear end side of the tip member, and a planar receiving portion to which the tips of the four power point input portions are adhered,
The tip member mounting portion and the tip member are provided on the inner peripheral side of the housing so that a space gap exists between them and the inner peripheral surface of the housing ,
The strain-generating body is
a base, which is a surface on the rear end side;
Four first pillars extending from the four corners of the base to the tip side;
four central first beams that connect adjacent pillars on the tip side;
four second beams protruding from the central side surfaces of the four first beams;
and four protrusions projecting from the tip side surfaces of the four second beams to the tip side, and the tips of which are located on the rear end side of the four power point input parts,
The four power point input parts protrude from the center of the front end side surfaces of the four first beams to the front end side,
The sensor chip is joined to the four protrusions,
When a force is applied to the four force input units, the four first beams, the four first pillars, the four second beams, and the four projections deform to transmit force to the sensor chip
A sensor assembly characterized by:

According to one aspect, in a sensor assembly including a 6-axis force sensor, it is possible to improve the accuracy of detecting the pressure of contact with an object and the tilt of the sensor assembly without obstructing the field of view and operation.

It is a configuration example of a sensor assembly including a conventional force sensor. It is a configuration example of a sensor assembly according to an embodiment of the present invention. FIG. 4 is a perspective view illustrating a 6-axis sensor provided in a sensor assembly; It is explanatory drawing of the sensor chip in a 6-axis sensor, (a) is the figure seen from the Z-axis direction upper side, (b) is the figure seen from the Z-axis direction upper side. FIG. 4 is a diagram for explaining symbols indicating forces and moments applied to respective axes in a sensor chip of a 6-axis sensor; 4 is a diagram illustrating an arrangement of piezoresistive elements of the sensor chip 10; FIG. 3 is a perspective view illustrating a strain body 20; FIG. It is a simulation result (part 1) of deformation (strain) when force and moment are applied to the strain generating body. FIG. 10 is a simulation result (part 2) of deformation (strain) when force and moment are applied to the strain generating body; FIG. FIG. 10 is a simulation result (part 1) of the stress generated in the sensor chip 10 when the forces and moments shown in FIGS. 8 and 9 are applied; FIG. FIG. 10 is a simulation result (part 2) of the stress generated in the sensor chip 10 when the forces and moments shown in FIGS. 8 and 9 are applied; FIG. FIG. 10 is a simulation result (part 3) of the stress generated in the sensor chip 10 when the forces and moments shown in FIGS. 8 and 9 are applied; FIG. Fig. 10 is an example of another connection between an attachment and a tip member in a sensor assembly; It is another configuration example of the 6-axis sensor. It is a structural example in the case of mounting a sensor assembly on a stylus pen. 16 is a diagram showing a state in which the tip of the stylus pen of FIG. 15 is in contact with the touch panel; FIG. It is a figure which shows a mode that it is inputting to a touch panel with the stylus pen of this embodiment. This is an example of specifying the type of pen tip of a stylus pen using the resonance frequency. This is an example of specifying the type of pen tip of a stylus pen using impedance and a microcomputer. This is an example of receiving guidance regarding the writing pressure and orientation of the stylus pen while writing characters using the stylus pen of the present embodiment. FIG. 21 is a block diagram of a work drawing technique guidance system that implements FIG. 20; It is a structural example in the case of mounting a sensor assembly on a dental laboratory instrument. 22 is an example of a dental laboratory method display system using the dental laboratory instrument of FIG. 21; FIG. 22 is a block diagram of the dental technique display system of FIG. 21; It is a structural example in the case of mounting a sensor assembly on a surgical scalpel. Fig. 25 is an example of a telesurgery system using the medical scalpel and/or medical tentacle of Fig. 24; FIG. 27 is a block diagram of the telesurgery system of FIG. 26; FIG. 26 is an example of a surgical technique display system using the medical scalpel and/or medical tentacle of FIG. 25. FIG. FIG. 29 is a block diagram of the surgical technique display system of FIG. 28; It is a structural example in the case of mounting a sensor assembly on a shoe sole.

EMBODIMENT OF THE INVENTION Hereinafter, the form for implementing this invention is demonstrated with reference to drawings. In each drawing, the same components are denoted by the same reference numerals, and redundant description may be omitted.

<Common configuration example>
First, an example configuration of a sensor assembly common to a plurality of embodiments will be described below with reference to FIG. FIG. 2 shows a configuration example of a sensor assembly according to an embodiment of the present invention.

The assembly 100 shown in FIG. 2 includes a 6-axis force sensor 1 , an attachment (tip member mounting portion) 3 , a housing 4 and a tip member 5 .

The tip member 5 is a contact member including a contact portion 51 with an object. A male screw 53 is formed on a fitting portion 52 that is inserted into the inside of the housing 4 and is not the contact portion 51 of the tip member 5 .

The tip member 5 is, for example, a pen tip, a brush pen-like conductive fiber, a dental laboratory instrument (drill or the like), a medical blade (scalpel), a medical tentacle, a sole sensor, or the like.

The housing 4 is a cylindrical housing and is a portion that is held by a user, an engineer, a robot, or the like. The tip member 5 may be knocked into the housing 4 , but when used, the tip member 5 contacts an object while at least a portion protrudes from one end of the housing 4 .

The attachment 3 is connected to the effort input portion 24 of the 6-axis force sensor 1, and can be attached with the tip member 5 described above.

The attachment 3 has a receiving portion 31 and a mounting upright portion 32 having an inner wall formed with a female screw 33 .

In the example of FIG. 2 , the male thread 53 of the tip member 5 is engaged with the female thread 33 formed on the inner wall of the attachment rising portion 32 of the attachment 3 .

Here, the attachment 3 and the tip member 5 are provided on the inner peripheral side (inner peripheral surface side) of the housing 4 so that a spatial gap G exists between them and the inner peripheral surface 4 i of the housing 4 . Therefore, the 3-axis force applied to the tip member 5 and the moment about the axis are effectively transmitted to the 6-axis sensor.

The 6-axis sensor 1 is provided with four power point input portions 24 protruding toward the distal end side, and the power point input portions 24 are adhered to the receiving portion 31 of the attachment 3 .

<6-axis sensor>
A 6-axis sensor will now be described.
FIG. 3 is a perspective view illustrating a 6-axis force sensor (force sensor) included in the sensor assembly of multiple embodiments of the present invention. Referring to FIG. 3, the 6-axis force sensor 1 has a sensor chip 10 and a strain body 20. As shown in FIG.

The sensor chip 10 is adhered to the upper surface of the strain-generating body 20 so as not to protrude from the strain-generating body 20 . The strain body 20 is provided with four force input portions 24 protruding toward the distal end side so as to surround the sensor chip 10 .

In this embodiment, for the sake of convenience, the side of the force sensor 1 to which the attachment of the strain generating body 20 is attached is referred to as the upper side or one side, and the opposite side is referred to as the lower side or the other side. In addition, the surface on the side where the attachment 3 of the strain-generating body 20 of each part is provided is defined as one surface or upper surface, and the surface on the opposite side thereof is defined as the other surface or lower surface. However, the 6-axis force sensor 1 (force sensor device) can be used upside down, or can be arranged at any angle. Planar view means viewing an object from the normal direction (Z-axis direction) of the upper surface of the sensor chip 10, and planar shape means viewing the object from the normal direction (Z-axis direction) of the upper surface of the sensor chip 10. ) shall refer to the shape viewed from

(Sensor chip 10)
4A and 4B are explanatory diagrams of the sensor chip 10. FIG. 4A is a top perspective view of the sensor chip 10 viewed from above in the Z-axis direction, and FIG. 1 is a bottom perspective view as seen from above; FIG.

The direction parallel to one side of the upper surface of the sensor chip 10 is defined as the X-axis direction, the vertical direction is defined as the Y-axis direction, and the thickness direction of the sensor chip 10 (normal direction to the upper surface of the sensor chip 10) is defined as the Z-axis direction. . The X-axis direction, Y-axis direction, and Z-axis direction are orthogonal to each other.

The sensor chip 10 shown in FIGS. 3 and 4 is a MEMS (Micro Electro Mechanical Systems) sensor chip capable of detecting up to six axes with one chip, and is formed from a semiconductor substrate such as an SOI (Silicon On Insulator) substrate. The planar shape of the sensor chip 10 can be, for example, a square of about 3 mm square.

The sensor chip 10 has five columnar support portions 11a to 11e. The planar shape of the support portions 11a to 11e can be, for example, a square of about 500 μm square. The support portions 11a to 11d, which are the first support portions, are arranged at the four corners of the sensor chip 10. As shown in FIG. The support portion 11e, which is the second support portion, is arranged in the center of the support portions 11a to 11d.

The support portions 11a to 11e can be formed, for example, from an active layer, a BOX layer, and a support layer of an SOI substrate, and each can have a thickness of, for example, about 500 μm.

A reinforcing beam 12a for reinforcing the structure is provided between the supporting portion 11a and the supporting portion 11b, and both ends thereof are fixed to the supporting portion 11a and the supporting portion 11b (connecting the adjacent supporting portions). It is Reinforcing beams 12b are provided between the supporting portions 11b and 11c to reinforce the structure, the both ends of which are fixed to the supporting portions 11b and 11c (the adjacent supporting portions are connected to each other). It is

Between the support portion 11c and the support portion 11d, there is provided a reinforcing beam 12c for reinforcing the structure, which is fixed at both ends to the support portion 11c and the support portion 11d (connects the adjacent support portions). It is A reinforcing beam 12d for reinforcing the structure is provided between the supporting portion 11d and the supporting portion 11a, and has both ends fixed to the supporting portion 11d and the supporting portion 11a (connects adjacent supporting portions). It is

In other words, four reinforcing beams 12a, 12b, 12c, and 12d, which are the first reinforcing beams, are formed in a frame shape, and corners forming intersections of the reinforcing beams are support portions 11b, 11c, and 11d. , 11a.

The inner corner of the support portion 11a and the opposite corner of the support portion 11e are connected by reinforcing beams 12e for reinforcing the structure. The inner corner of the support portion 11b and the opposite corner of the support portion 11e are connected by reinforcing beams 12f for reinforcing the structure.

The inner corner of the support portion 11c and the opposite corner of the support portion 11e are connected by a reinforcing beam 12g for reinforcing the structure. The inner corner of the support portion 11d and the opposite corner of the support portion 11e are connected by reinforcing beams 12h for reinforcing the structure. The reinforcing beams 12e to 12h, which are the second reinforcing beams, are arranged obliquely with respect to the X-axis direction (Y-axis direction). That is, the reinforcing beams 12e to 12h are arranged non-parallel to the reinforcing beams 12a, 12b, 12c, and 12d.

The reinforcing beams 12a-12h can be formed, for example, from an active layer, a BOX layer and a support layer of an SOI substrate. The thickness (width in the lateral direction) of the reinforcing beams 12a to 12h can be, for example, approximately 140 μm. The top surfaces of the reinforcing beams 12a to 12h are substantially flush with the top surfaces of the support portions 11a to 11e.

On the other hand, the lower surfaces of the reinforcing beams 12a to 12h are recessed upward by several tens of micrometers from the lower surfaces of the support portions 11a to 11e and the lower surfaces of the power points 14a to 14d. This is to prevent the lower surfaces of the reinforcing beams 12a to 12h from coming into contact with the opposite surfaces of the strain body 20 when the sensor chip 10 is adhered to the strain body 20. FIG.

In this manner, by arranging the stiffening reinforcing beams which are thicker than the sensing beams and have high rigidity, separately from the sensing beams for sensing strain, the rigidity of the sensor chip 10 as a whole can be increased. This makes it difficult for the beams other than the detection beams to deform with respect to the input, so that good sensor characteristics can be obtained.

Both ends of the reinforcing beam 12a between the supporting portion 11a and the supporting portion 11b are fixed to the supporting portion 11a and the supporting portion 11b in parallel with the reinforcing beam 12a at a predetermined interval (adjacent to the supporting portion 11b). The support portions are connected to each other), and a detection beam 13a for detecting strain is provided.

Between the detection beam 13a and the support portion 11e, a detection beam 13b is provided parallel to the detection beam 13a with a predetermined gap from the detection beam 13a and the support portion 11e. The detection beam 13b connects the end of the reinforcing beam 12e on the support portion 11e side and the end of the reinforcing beam 12f on the support portion 11e side.

A substantially central portion in the longitudinal direction of the detection beam 13a and a substantially central portion in the longitudinal direction of the opposing detection beam 13b are arranged so as to be perpendicular to the detection beams 13a and 13b. They are connected by a detection beam 13c for detection.

Both ends of the reinforcing beam 12b between the supporting portion 11b and the supporting portion 11c are fixed to the supporting portion 11b and the supporting portion 11c in parallel with the reinforcing beam 12b at a predetermined interval (adjacent to each other). The support portions are connected to each other), and a detection beam 13d for detecting strain is provided.

Between the detection beam 13d and the support portion 11e, a detection beam 13e is provided parallel to the detection beam 13d with a predetermined gap from the detection beam 13d and the support portion 11e. The detection beam 13e connects the end of the reinforcing beam 12f on the support portion 11e side and the end of the reinforcing beam 12g on the support portion 11e side.

A substantially central portion in the longitudinal direction of the detection beam 13d and a substantially central portion in the longitudinal direction of the opposing detection beam 13e are arranged so as to be perpendicular to the detection beams 13d and 13e. They are connected by a detection beam 13f for detection.

Inside the reinforcing beam 12c between the supporting portion 11c and the supporting portion 11d, both ends are fixed to the supporting portion 11c and the supporting portion 11d in parallel with the reinforcing beam 12c with a predetermined interval (adjacent to the supporting portion 11c). The supporting portions are connected to each other), and a detection beam 13g for detecting strain is provided.

Between the detection beam 13g and the support portion 11e, a detection beam 13h is provided parallel to the detection beam 13g with a predetermined gap from the detection beam 13g and the support portion 11e. The detection beam 13h connects the end portion of the reinforcing beam 12g on the support portion 11e side and the end portion of the reinforcing beam 12h on the support portion 11e side.

A substantially central portion in the longitudinal direction of the detection beam 13g and a substantially central portion in the longitudinal direction of the opposing detection beam 13h are arranged so as to be orthogonal to the detection beams 13g and 13h. They are connected by a detection beam 13i for detection.

Inside the reinforcing beam 12d between the supporting portion 11d and the supporting portion 11a, both ends are fixed (adjacent to the supporting portion 11d and the supporting portion 11a) parallel to the reinforcing beam 12d with a predetermined interval. The support portions are connected to each other), and a detection beam 13j for detecting strain is provided.

Between the detection beam 13j and the support portion 11e, a detection beam 13k is provided parallel to the detection beam 13j with a predetermined gap from the detection beam 13j and the support portion 11e. The detection beam 13k connects the end of the reinforcing beam 12h on the support portion 11e side and the end of the reinforcing beam 12e on the support portion 11e side.

A substantially central portion in the longitudinal direction of the detection beam 13j and a substantially central portion in the longitudinal direction of the opposing detection beam 13k are arranged so as to be perpendicular to the detection beams 13j and 13k. They are connected by a detection beam 13l for detection.

The detection beams 13a to 13l are provided on the upper end side in the thickness direction of the supporting portions 11a to 11e, and can be formed from an active layer of an SOI substrate, for example. The thickness (the width in the lateral direction) of the detection beams 13a to 13l can be set to, for example, about 75 μm. The top surfaces of the detection beams 13a to 13l are substantially flush with the top surfaces of the support portions 11a to 11e. The thickness of each of the detection beams 13a to 13l can be, for example, approximately 0.5 μm.

A power point 14a is provided on the lower surface side (intersection point of the detection beam 13a and the detection beam 13c) of the central portion of the detection beam 13a in the longitudinal direction. The detection beams 13a, 13b and 13c and the force point 14a form a set of detection blocks.

A power point 14b is provided on the lower surface side of the longitudinal central portion of the detection beam 13d (the intersection of the detection beam 13d and the detection beam 13f). The detection beams 13d, 13e, and 13f and the force point 14b form a set of detection blocks.

A force point 14c is provided on the lower surface side of the detection beam 13g in the longitudinal central portion (the intersection of the detection beam 13g and the detection beam 13i). The detection beams 13g, 13h and 13i and the force point 14c form a set of detection blocks.

A force point 14d is provided on the lower surface side (the intersection of the detection beam 13j and the detection beam 13l) of the longitudinal central portion of the detection beam 13j. The detection beams 13j, 13k, and 13l and the power point 14d form a set of detection blocks.

The force points 14a to 14d are locations to which an external force is applied, and can be formed, for example, from the BOX layer and support layer of the SOI substrate. The lower surfaces of the power points 14a-14d are substantially flush with the lower surfaces of the support portions 11a-11e.

In this way, by taking in force or displacement from the four force points 14a to 14d, different deformations of the beam can be obtained for each type of force, so a sensor with good six-axis separability can be realized.

In addition, in the sensor chip 10, from the viewpoint of suppressing stress concentration, it is preferable that the portion forming the internal angle be rounded.

FIG. 5 is a diagram for explaining symbols indicating forces and moments applied to each axis. As shown in FIG. 5, let Fx be the force in the X-axis direction, Fy be the force in the Y-axis direction, and Fz be the force in the Z-axis direction. Let Mx be the moment of rotation about the X axis, My be the moment of rotation about the Y axis, and Mz be the moment of rotation about the Z axis.

FIG. 6 is a diagram illustrating the arrangement of piezoresistive elements of the sensor chip 10. As shown in FIG. A piezoresistive element is arranged at a predetermined position of each detection block corresponding to the four power points 14a to 14d.

Specifically, referring to FIGS. 5 and 6, in the sensing block corresponding to the force point 14a, the piezoresistive elements MxR3 and MxR4 are on a line that bisects the sensing beam 13a in the longitudinal direction, and They are arranged at symmetrical positions with respect to a line that bisects the detection beam 13c in the longitudinal direction. In addition, the piezoresistive elements FyR3 and FyR4 are located on the detection beam 13a side of the line that bisects the detection beam 13b in the longitudinal direction and on the line that bisects the detection beam 13c in the longitudinal direction. are arranged symmetrically to each other.

In the detection block corresponding to the force point 14b, the piezoresistive elements MyR3 and MyR4 are on a line that bisects the detection beam 13d in the longitudinal direction and bisects the detection beam 13f in the longitudinal direction. They are arranged symmetrically with respect to the line. In addition, the piezoresistive elements FxR3 and FxR4 are located on the detection beam 13d side of the line that bisects the detection beam 13e in the longitudinal direction and on the line that bisects the detection beam 13f in the longitudinal direction. are arranged symmetrically to each other.

Further, MzR3 and MzR4 are closer to the detection beam 13e than the line that bisects the detection beam 13f in the widthwise direction, and also with respect to the line that bisects the detection beam 13f in the lengthwise direction. placed symmetrically. In addition, FzR3 and FzR4 are arranged on a line that bisects the detection beam 13f in the longitudinal direction and at symmetrical positions with respect to the line that bisects the detection beam 13f in the lateral direction. there is

In the detection block corresponding to the force point 14c, the piezoresistive elements MxR1 and MxR2 are on a line that bisects the detection beam 13g in the longitudinal direction and bisects the detection beam 13i in the longitudinal direction. They are arranged symmetrically with respect to the line. Further, the piezoresistive elements FyR1 and FyR2 are located on the detection beam 13g side of the line that bisects the detection beam 13h in the longitudinal direction, and on the line that bisects the detection beam 13i in the longitudinal direction. are arranged symmetrically to each other.

In the detection block corresponding to the force point 14d, the piezoresistive elements MyR1 and MyR2 are on a line that bisects the detection beam 13j in the longitudinal direction and bisects the detection beam 13l in the longitudinal direction. They are arranged symmetrically with respect to the line. In addition, the piezoresistive elements FxR1 and FxR2 are located on the detection beam 13j side of the line that bisects the detection beam 13k in the longitudinal direction, and on the line that bisects the detection beam 13l in the longitudinal direction. are arranged symmetrically to each other.

Moreover, MzR1 and MzR2 are located on the detection beam 13k side of the line that bisects the detection beam 13l in the lateral direction, and with respect to the line that bisects the detection beam 13l in the longitudinal direction. placed symmetrically. In addition, FzR1 and FzR2 are arranged on a line that bisects the detection beam 13l in the longitudinal direction and at symmetrical positions with respect to the line that bisects the detection beam 13l in the lateral direction. there is

Here, piezoresistive elements FxR1 to FxR4 detect force Fx, piezoresistive elements FyR1 to FyR4 detect force Fy, and piezoresistive elements FzR1 to FzR4 detect force Fz. The piezoresistive elements MxR1 to MxR4 detect the moment Mx, the piezoresistive elements MyR1 to MyR4 detect the moment My, and the piezoresistive elements MzR1 to MzR4 detect the moment Mz.

In this way, in the sensor chip 10, a plurality of piezoresistive elements are separately arranged in each detection block. As a result, based on changes in outputs of a plurality of piezoresistive elements arranged on a predetermined beam according to the direction (axial direction) of the force or displacement applied (transmitted) to the points of force 14a to 14d, a predetermined axis can be generated. Directional displacement can be detected in up to six axes.

Specifically, in the sensor chip 10, the displacement (Mx, My, Fz) in the Z-axis direction can be detected based on the deformation of predetermined detection beams. That is, the moments (Mx, My) in the X-axis direction and the Y-axis direction can be detected based on the deformation of the first detection beams 13a, 13d, 13g, and 13j. Also, the force (Fz) in the Z-axis direction can be detected based on the deformation of the detection beams 13f and 13l, which are the third detection beams.

In addition, in the sensor chip 10, displacements (Fx, Fy, Mz) in the X-axis direction and the Y-axis direction can be detected based on the deformation of predetermined detection beams. That is, the forces (Fx, Fy) in the X-axis direction and the Y-axis direction can be detected based on the deformation of the second detection beams 13b, 13e, 13h, and 13k. Also, the moment (Mz) in the Z-axis direction can be detected based on the deformation of the detection beams 13f and 13l, which are the third detection beams.

By varying the thickness and width of each detection beam, it is possible to make adjustments such as making the detection sensitivity uniform and improving the detection sensitivity.

However, it is also possible to reduce the number of piezoresistive elements and make a sensor chip that detects displacement in a predetermined axial direction of five axes or less. A piezoresistive element is a representative example of the strain sensing element according to the present invention.

(Strain generating body 20)
FIG. 7 is a perspective view illustrating the strain body 20. FIG.
As shown in FIG. 7, four pillars 22a to 22d, which are first pillars, are arranged at the four corners of the base 21 of the strain body 20, and the first beams connecting the adjacent pillars are arranged. Four beams 23a to 23d are provided in a frame shape. In addition, a pillar 22e, which is a second pillar, is arranged in the center of the base 21. As shown in FIG. The pillar 22e is a pillar for fixing the sensor chip 10, and is formed thicker and shorter than the pillars 22a to 22d. The sensor chip 10 is fixed on the pillar 22e so as not to protrude from the upper surfaces of the pillars 22a to 22d.

The general shape of the strain generating body 20 can be, for example, a rectangular parallelepiped with a length of about 500 μm, a width of about 500 μm, and a height of about 700 μm. The cross-sectional shape of the pillars 22a to 22d can be, for example, a square of about 100 μm square. The cross-sectional shape of the column 22e can be, for example, a square of about 200 μm square.

At the center of the upper surface of each of the beams 23a to 23d in the longitudinal direction, a protrusion projecting upward from the center in the longitudinal direction of the beams 23a to 23d is provided. Effort input units) 24a to 24d are provided. The input portions 24a to 24d are portions to which force is applied from the outside, and when force is applied to the input portions 24a to 24d, the beams 23a to 23d and the columns 22a to 22d are deformed accordingly.

Note that the column 22e is separated from the beams 23a to 23d that are deformed by the applied force and the columns 22a to 22d that are deformed by the applied force. It is not movable (does not deform with applied force).

By providing the four input portions 24a to 24d in this manner, the load resistance of the beams 23a to 23d can be improved compared to the structure of one input portion, for example.

Four pillars 25a to 25d, which are the third pillars, are arranged at the four corners of the upper surface of the pillar 22e, and a pillar 25e, which is the fourth pillar, is arranged at the central portion of the upper surface of the pillar 22e. The pillars 25a-25e are formed at the same height.

That is, the upper surfaces of the columns 25a to 25e are located on the same plane. The upper surface of each of the pillars 25a-25e serves as a joint to be adhered to the lower surface of the sensor chip 10. As shown in FIG. Since the pillars 25a-25e are separated from the beams 23a-23d that are deformed by the applied force and the pillars 22a-22d that are deformed by the applied force, they are movable even if the force is applied to the input portions 24a-24d. (does not deform with applied force).

Beams 26a to 26d projecting inward in the horizontal direction from the inner surfaces of the beams 23a to 23d are provided at the longitudinal central portions of the inner surfaces of the beams 23a to 23d, respectively. The beams 26a-26d are second beams that transmit the deformation of the beams 23a-23d and the columns 22a-22d to the sensor chip 10. FIG. Protrusions 27a to 27d projecting upward from the tip sides of the upper surfaces of the beams 26a to 26d are provided on the tip sides of the upper surfaces of the beams 26a to 26d, respectively.

The protrusions 27a to 27d are formed at the same height. That is, the upper surfaces of the protrusions 27a to 27d are positioned on the same plane. The upper surface of each of the protrusions 27a to 27d serves as a joint portion to be adhered to the lower surface of the sensor chip 10. As shown in FIG. The beams 26a to 26d and the projections 27a to 27d are connected to the beams 23a to 23d, which are movable parts, so that when a force is applied to the input parts 24a to 24d, they deform accordingly.

Note that when no force is applied to the input portions 24a-24d, the upper surfaces of the columns 25a-25e and the upper surfaces of the protrusions 27a-27d are positioned on the same plane.

In the strain generating body 20, the base 21, the columns 22a to 22e, the beams 23a to 23d, the input portions 24a to 24d, the columns 25a to 25e, the beams 26a to 26d, and the protrusions 27a to 27d ensure rigidity. In addition, from the viewpoint of manufacturing with high accuracy, it is preferable that they are integrally formed. As a material of the strain generating body 20, for example, a hard metal material such as SUS (stainless steel) can be used. Among them, SUS630, which is particularly hard and has high mechanical strength, is preferably used.

In this way, like the sensor chip 10, the strain-generating body 20 also has a structure including columns and beams, so that different deformations are exhibited in each of the six axes depending on the applied force. Good deformation can be transmitted to the sensor chip 10 .

That is, the forces applied to the input portions 24a to 24d of the strain generating body 20 are transmitted to the sensor chip 10 via the columns 22a to 22d, the beams 23a to 23d, and the beams 26a to 26d. detect. In the sensor chip 10, an output of each axis can be obtained from a bridge circuit formed for each axis.

From the viewpoint of suppressing stress concentration in the strain generating body 20, it is preferable that the portion forming the internal angle be R-shaped.

(stress simulation)
8 and 9 are simulation results of deformation (strain) when force and moment are applied to the strain generating body 20. FIG. The force and moment were applied from the input portions 24a to 24d (see FIG. 9, etc.) of the strain generating body 20. FIG. 10 to 12 are simulation results of stress generated in the sensor chip 10 when the forces and moments shown in FIGS. 8 and 9 are applied. 10 to 12, the tensile normal stress is indicated by "+" and the compressive normal stress is indicated by "-".

When a force Fx is applied along the X-axis in the direction from X1 to X2, the strain body 20 is deformed as shown in FIG. 8, and a stress is generated in the sensor chip 10 as shown in FIG. do. Specifically, the application of the force Fx distorts the sensing beams 13k and 13e in the direction of the force Fx.

Here, since the piezoresistive elements FxR1 and FxR2 are located on the X1 side of the center of the sensing beam 13k in the longitudinal direction, tensile vertical stress is generated and the resistance value increases. On the other hand, since the piezoresistive elements FxR3 and FxR4 are located on the X2 side of the longitudinal center of the sensing beam 13e, vertical compressive stress is generated and the resistance value is reduced. As a result, the balance of the piezoresistive elements FxR1 to FxR4 is lost, so that a voltage is output from the bridge circuit shown in FIG. 10(a), and the force Fx can be detected.

Although the sensing beams 13d and 13j are also distorted in the direction of the force Fx, almost no stress or stress in the same direction is generated at the positions of the piezoresistive elements MyR1 and MyR2 and the piezoresistive elements MyR3 and MyR4. Therefore, the balance of the bridge is maintained, and no voltage is output from the bridge circuit of the moment My shown in FIG. 12(a).

When a force Fy is applied along the Y-axis in the direction from Y1 to Y2, stress occurs in the sensor chip 10 as shown in FIG. 10(b). Specifically, the application of the force Fy causes the detection beams 13b and 13h to be distorted in the direction of the force Fy.

Here, since the piezoresistive elements FyR3 and FyR4 are located on the Y1 side of the center of the sensing beam 13b in the longitudinal direction, tensile vertical stress is generated and the resistance value increases. On the other hand, since the piezoresistive elements FyR1 and FyR2 are located on the Y2 side of the longitudinal center of the sensing beam 13h, vertical compressive stress is generated and the resistance value is reduced. As a result, the balance of the piezoresistive elements FyR1 to FyR4 is lost, so that a voltage is output from the bridge circuit shown in FIG. 10(b) and the force Fy can be detected.

For the same reason as for the moment My, the voltage is not output from the bridge circuit for the moment Mx shown in FIG. 11(b).

When a force Fz is applied along the Z axis in the direction from Z2 to Z1, the strain-generating body 20 is deformed as shown in FIG. 14, and stress as shown in FIG. do. Specifically, the application of the force Fz causes the sensing beams 13a, 13b, 13g, 13h, 13d, 13e, 13j, 13k, 13c, 13f, 13l, and 13i to distort in the direction of the force Fz.

Here, tensile vertical stress is generated in the piezoresistive elements FzR1 and FzR4, and the resistance value increases. In addition, vertical compressive stress is generated in the piezoresistive elements FzR2 and FzR3, and the resistance value decreases. As a result, the balance of the piezoresistive elements FzR1 to FzR4 is lost, so the force Fz can be detected by the bridge circuit shown in FIG. 11(a).

For the same reason as above, the force Fx bridge circuit shown in FIG. 10(a), the force Fy bridge circuit shown in FIG. 10(b), the moment Mx bridge circuit shown in FIG. No voltage is output from the bridge circuit of the moment My shown in 12(a) and the bridge circuit of the moment Mz shown in FIG. 12(b).

When a moment Mx is applied in the direction of Y2-Z2-Y1 with the X-axis as the rotation axis, stress as shown in FIG. Specifically, the application of the moment Mx causes the sensing beams 13g and 13a to be distorted in the direction of the moment Mx. Therefore, a vertical tensile stress is generated in the piezoresistive elements MxR1 and MxR2, increasing the resistance value. Also, a compressive vertical stress is generated in the piezoresistive elements MxR3 and MxR4, and the resistance value decreases. As a result, the balance of the piezoresistive elements MxR1 to MxR4 is lost, so the moment Mx can be detected by the bridge circuit shown in FIG. 11(b).

For the same reason as above, no voltage is output from the force Fy bridge circuit shown in FIG. 10(b).

When a moment My is applied in the direction of X1-Z2-X2 with the Y axis as the rotation axis, the strain body 20 is deformed as shown in FIG. Stress is generated. Specifically, the application of the moment My causes the sensing beams 13j and 13d to be distorted in the direction of the moment My.

Here, tensile vertical stress is generated in the piezoresistive elements MyR1 and MyR2, and the resistance value increases. In addition, vertical compressive stress is generated in the piezoresistive elements MyR3 and MyR4, and the resistance value decreases. As a result, the balance of the piezoresistive elements MyR1 to MyR4 is lost, so the moment My can be detected by the bridge circuit shown in FIG. 12(a).

For the same reason as described above, no voltage is output from the force Fx bridge circuit shown in FIG. 10(a).

When a moment Mz is applied in the direction of X2-Y2-X1 with the Z axis as a rotation axis, the strain body 20 is deformed as shown in FIG. Stress is generated. Specifically, the application of the moment Mz distorts the sensing beams 13a, 13b, 13g, 13h, 13d, 13e, 13j, 13k, 13c, 13f, 13l, and 13i in the direction of the moment Mz.

Here, tensile vertical stress is generated in the piezoresistive elements MzR1 and MzR4, increasing the resistance value. In addition, vertical compressive stress is generated in the piezoresistive elements MzR2 and MzR3, and the resistance value decreases. As a result, the balance of the piezoresistive elements MzR1 to MzR4 is lost, so the moment Mz can be detected by the bridge circuit shown in FIG. 12(b).

For the same reason as above, the force Fx bridge circuit shown in FIG. 10(a), the force Fy bridge circuit shown in FIG. 10(b), the moment Mx bridge circuit shown in FIG. No voltage is output from the bridge circuit of the moment My shown in (a).

In this way, in the sensor chip 10, when a displacement (force or moment) is input to the force point, bending and twisting stress corresponding to the input is generated in the predetermined detection beam. The generated stress changes the resistance value of the piezoresistive element arranged at a predetermined position of the sensing beam, and the output voltage from each bridge circuit formed on the sensor chip 10 can be obtained from the electrode 15 . Furthermore, the output voltage of electrode 15 can be obtained externally via input/output substrate 30 .

Moreover, since one bridge circuit is formed for each axis in the sensor chip 10, the output of each axis can be obtained without synthesizing the outputs. This makes it possible to detect and output multiaxial displacements by a simple method that does not require complicated calculations or signal processing.

Also, the piezoresistive elements are divided into different sensing beams depending on the type of input. Accordingly, by changing the rigidity (thickness and width) of the corresponding sensing beam, the sensitivity of any axis can be independently adjusted.

For the detailed configuration of the 6-axis sensor, Japanese Patent Application No. 2016-199486 is referred to and used as appropriate. With such a 6-axis sensor, multi-axis (at least 4-axis) displacement can be detected and output by a simple method.

<Another example of engagement between the attachment and the tip member>
FIG. 13 shows another example of engagement between the attachment 3-1 and the tip member 5-1 in the sensor assembly.

The attachment of the tip member 5 to the attachment is not limited to screw fitting using the male screw 53 and the female screw 33 as shown in FIG. 2, and any other method can be employed.

For example, as shown in FIG. 13, a groove 34 may be provided on the side of the attachment 3-1, and a pin 54 of the tip member 5-1 may be fitted and fixed. Also in this configuration, the attachment 3 - 1 and the tip member 5 - 1 are provided on the inner peripheral side of the housing 4 so that the spatial gap G exists between them and the inner peripheral surface of the housing 4 . Therefore, the 3-axis force applied to the tip member 5-1 and the moment about the axis are effectively transmitted to the 6-axis sensor 1. FIG.

Moreover, the configuration of the 6-axis sensor 1 provided in the sensor assembly 100 is not limited to those shown in FIGS. 3 to 12, and may be the following configuration.

<Another configuration example of the 6-axis sensor>
FIG. 14 shows another configuration example of the 6-axis sensor. In this configuration example, the strain body 20α of the 6-axis force sensor 1α has a substantially truncated cone shape.

Specifically, as shown in FIG. 14, in this configuration, the columns 201a to 201d are arranged around the column 202 at approximately equal intervals. The pillars 201a to 201d are obliquely arranged so that the center position of each upper surface is closer to the center side of the pedestal section 204 than the center position of each lower surface in plan view. In other words, the pillars 201a to 201d are obliquely arranged so as to approach the pillar 202 the farther away from the base portion 204 (toward the contact portion 20 side).

Further, in the present embodiment, the columns 201a to 201d are shaped so that the cross-sectional area (the area of the cross section perpendicular to the Z-axis) becomes smaller the farther away from the pedestal 204 (toward the attachment 3α side). . Other configurations and functions are the same as those of the strain body shown in FIG. 7, and the strain body 20α of this configuration is also provided with the sensor chip 10 in the vicinity of the attachment 3α.

In this configuration, the tip (the tip member side) of the housing 4α is formed with an inwardly bent annular edge. In this configuration, a stopper may be provided on the tip side of the edge and contacted when the pen tip is deformed.

Next, specific configuration examples in which the above sensor assembly is applied to members including tip members in various fields will be described.

<First Embodiment: Stylus Pen>
First, as a first embodiment, an example of applying the sensor assembly to a stylus pen will be described in detail with reference to FIGS. 15 to 20. FIG.

FIG. 15 shows a configuration example when the sensor assembly is the stylus pen 100A.

A stylus pen (also called electronic pen or digitizer pen) 100A has a pen tip 5A as the tip member 5 described above.

Further, the stylus pen 100A has a position transmitter 6 in addition to the six-axis force sensor 1A, the attachment (pen tip mounting portion) 3A, the housing 4A, and the pen tip (tip member) 5A. there is

Also in this configuration, there is a spatial gap between the attachment (pen tip mounting portion) 3A and the inner surface of the housing 4A. Therefore, the tilt (rotation) of the pen corresponding to the 3-axis force applied to the pen tip 5A and the moment about the axis, and the writing pressure are effectively transmitted to the 6-axis sensor 1A.

That is, the 6-axis sensor 1A can detect the contact pressure of the pen tip 5A with respect to the touch panel (panel) 210 (see FIG. 20) and the inclination and/or rotation of the pen tip 5A on the panel.

The position transmitter 6 includes a magnetic body 61 , a magnetic core 62 and a magnetic coil 63 . As shown in FIG. 15, the magnetic material 61 is included in the pen tip 5A. The magnetic coil 63 is provided behind the 6-axis force sensor 1 . The magnetic core 62 connects the magnetic body 61 and the magnetic coil 63 through the 6-axis force sensor 1A and the attachment 3A.

This stylus pen 100A is a pen for an electromagnetic induction system. As the electronic pen moves in the magnetic field (electromagnetic) created on the surface by the digitizer 212 (see FIG. 21) of the touch panel (panel surface, display unit) on the surface of the tablet 200, the magnetic coil 63 built into the stylus pen 100A is activated. The tablet receives an induction signal generated by the stylus pen 100A using the electricity (induction). By repeating this process at high speed, a smooth stylus trajectory is read by the tablet.

Further, in the stylus pen 100A shown in FIG. 15, the 6-axis sensor 1 has a function of detecting pen pressure, tilt, rotation, and the like, so that the strength and weakness of drawn lines and color densities can be expressed on the touch panel 100A.

Here, it is known that a magnetic coil used in a general electromagnetic induction stylus pen is relatively large in size. Therefore, when a magnetic coil is provided on the pen tip side and a 6-axis sensor is provided behind it, the distance between the pen tip, which is the point of contact with the touch panel, and the 6-axis sensor, which is the power point, increases, and the pen pressure, tilt, and rotation are increased. Sensing sensitivity such as is lowered.

On the other hand, in the case of this configuration, as shown in FIG. Size does not affect the distance between the nib 5A and the 6-axis sensor 1A. Therefore, since the 6-axis sensor 1A can be provided close to the pen tip 5A, it is possible to avoid a decrease in the sensing sensitivity of the 6-axis sensor 1A.

FIG. 16 shows a state in which pen tip 5A of stylus pen 100A of FIG. 15 is in contact with touch panel 210 (see FIG. 20). FIG. 17 shows a state in which the user O is inputting to the touch panel 210 with the stylus pen 100A of this embodiment.

As shown in FIG. 16, it is preferable that the pen tip 5A according to the present embodiment be deformable by pressure when it contacts the panel. At this time, the magnetic core 62 has elasticity and follows the deformation of the pen tip 5A.

Therefore, for example, it is preferable that the material of the pen tip 5A is resin, fiber, or the like. Moreover, it is preferable that the magnetic core 62 is made of, for example, a piano wire that allows deformation to some extent.

If the pen tip 5A of the stylus pen 100A of the present application were hard, it would slide on the hard panel surface, making writing difficult. On the other hand, if it is made too soft like a brush, the sensation of rebounding from the applied force will not be transmitted well to the 6-axis sensor 1A.

As described above, by imparting elasticity to the pen tip 5A and the magnetic core 62, when inputting using the stylus pen on the touch panel, the user grasps the stylus pen 100A following the deformation of the pen tip 5A. It is possible for O to obtain a response close to the tactile sensation (force feedback, texture) when drawing on paper.

By setting the coefficient of friction within a desired range using resin, silicon, polyester fiber, or the like, the 6-axis force sensor 1A detects the pressure (writing pressure) of the pen tip that is in contact with the panel 22A. Therefore, even if the touch panel does not detect the contact area, the thickness of the line can be changed as shown in FIG.

(Replacing stylus pen tip type)
FIG. 18 shows an example of specifying the type of pen tip of the stylus pen using the resonance frequency.

The stylus pen 100A may have an interchangeable pen tip type. The example of FIG. 18 shows an example in which the pen tip is equipped with a different resonant circuit made up of a coil and a capacitor for each type. For example, the resonance frequency of the resonance circuit 64A of the pen tip 5A-1 having the contact portion 51A in FIG. 18A is ω1, and the resonance circuit 64B of the pen tip 5A-2 having the contact portion 51B in FIG. is ω2.

When replacing the pen tip, the digitizer 212 (see FIG. 21) of the touch panel 210 changes the resonance frequencies (ω1, ω2 ) to make the type of pen tip recognizable.

In the above example, the resonance circuit 64 is used to recognize the replacement of the type of pen tip, but other methods may be used to recognize the replacement of the pen tip.

FIG. 19 shows an example of specifying the type of pen tip of a stylus pen using impedance and a microcomputer.

When a microcomputer is provided in the stylus pen 100A-1, the microcomputer 65 is provided behind the 6-axis sensor 1A.

The pen tips 5A-3 and 5A-4 are provided with a detection mechanism 66 for detecting the connection state with the stylus pen 100A-1. It has a predetermined impedance Z for each type. For example, the impedance of the RLC series circuit 66C of the pen tip 5A-3 having the contact portion 51C of FIG. 19(a) is Z1, and the RLC series circuit of the pen tip 5A-4 having the contact portion 51D of FIG. 19(b) is Z1. The impedance of 66D is Z2.

When exchanging the pen tip in this configuration, the microcomputer 65 of the stylus pen 100A-1 specifies the type of the pen tip 5A-3, 5A-4 via the detection mechanism 66 (66C, 66D) and wirelessly transmits the information to the touch panel 210. Then, the device having the touch panel 210 (for example, the tablet 200) recognizes the type of the pen tip.

By recognizing the type of pen tip using the above method, characters and lines can be drawn on the touch panel with thickness and texture corresponding to each of the plurality of recognized pen tips.

<Application example of stylus pen>
FIG. 20 shows an example of receiving guidance regarding the writing pressure and orientation of the stylus pen while writing characters using the stylus pen of this embodiment. FIG. 21 is a block diagram of a work drawing technique instruction system 1000 using the stylus pen 100A shown in FIG.

A work drawing technique instruction system 1000 shown in FIG.

In FIG. 21, it is assumed that the tablet 200 is connected to an external storage medium 290 such as USB (Universal Serial Bus). The external storage medium 290 may be connected to the tablet 200 via a USB adapter 295 (see FIG. 20).

The external storage medium 290 stores a sample handwriting table, a sample pen tilt table, a sample writing pressure table, standard advice data (for display), standard advice data (for voice), and the like.

The example of FIG. 21 shows an example in which the necessary data is stored in the external storage medium 290. For example, by downloading, the data necessary for teaching drawing techniques can be stored in the internal memory of the tablet 200. may be stored.

The stylus pen 100A has a communication section 7A in addition to the six-axis sensor 1A and the position transmission section 6A described above.

The tablet 200 has an LCD (Liquid Cristal Display) 211 and a touch panel 210 having the functions of a position detection section (digitizer) 212 .

Furthermore, the tablet 200 has a control unit 220, a display control unit 230, an audio control unit 240, a speaker 250, a storage unit 260, a communication unit 270, a data input/output unit 280, and the like.

The stylus pen 100A and the tablet 200 are paired (wirelessly connected) in advance by the above-described method of FIG. 18 or 19 so as to be detectable by the electromagnetic induction method. A position detection unit (digitizer) 212 in a touch panel 210 of a tablet 200 detects the position transmitted from the position transmission unit 6 of the stylus pen 100A, whereby the touch panel 210 recognizes the position, and the stylus pen 100A touches the screen. Detect location.

Then, the detected position of stylus pen 100 A on touch panel 210 is displayed on LCD 211 and sent to detection result storage area 261 of storage unit 260 .

In addition, information on the tilt of the pen tip and writing pressure detected by the 6-axis sensor 1A of the stylus pen 100A is sent to the communication unit 270 of the tablet 200 via the communication unit 7A, and temporarily stored in the detection result storage area 261. stored in

The control unit 220 has a comparison unit 221 and an instruction information setting unit 222 .

The comparison unit 221 stores the handwriting, pen tilt, and writing pressure of the stylus pen 100</b>A stored in the detection result storage area 261 in real time in the external storage medium 290 , and outputs the data input/output unit (acquisition unit) 280 . The table is compared with the sample handwriting table, sample pen tilt table, and sample writing pressure table acquired through the above. In this example, an example is shown in which the detected pen tip position information, the inclination of the pen tip 5A of the stylus pen 100A, and the pen pressure information are temporarily stored in the detection result storage area 261, but they are not saved. Alternatively, the detection result may be directly input to the comparison unit 221 without the input.

Then, the instruction information is set by the instruction information setting unit 222 according to the comparison result. Specifically, according to the result of the comparison, standardized advice data for display or voice is referred to, and the advice is selected as instruction information.

That is, the control unit 220 generates advice information regarding the traveling direction of the stylus pen 100A, how to apply force, and the inclination of the pen tip while the user is creating a work such as calligraphy or painting.

When instructions by voice are set, the instruction content set by the instruction information setting unit 222 is sent to the voice control unit 240, and as shown in FIG. do.

When an instruction by display is set, the instruction content set by the instruction information setting unit 222 is sent to the display control unit 230, and the LCD 211 displays the instruction content on the touch panel 210 to advise the user.

In the conventional teaching system using a touch panel, only handwriting was taught, but by using the 6-axis sensor of this application, characters, paintings, drawings, etc. can be taught in real time by pen tilt and writing pressure, etc. can be compared and evaluated.

Note that in this example, the tablet 200 paired with the stylus pen 100A displays by voice or on the touch panel 210 the handwriting of the pen tip of the stylus pen 100A, the strength of the force, or the inclination, and then the pen tip. 10 shows an example of advising the position to which the is heading.

However, by providing the stylus pen 100A with a speaker function, the stylus pen 100A itself paired with the tablet 200 is configured to give advice on the direction of travel, how to apply force, the inclination of the pen tip, and the like. may

Although FIG. 20 shows an example of receiving instruction in calligraphy, the subject may be other works such as drawings, paintings, and comics.

Conventional touch panels were only capable of teaching handwriting. Pressure and the like can also be evaluated in real time by comparing with a sample.

<Second embodiment>
Next, as a second embodiment, an example in which the sensor assembly is applied to dental technical instruments will be described in detail with reference to FIGS. 22 to 24. FIG.

FIG. 22 shows a configuration example when the sensor assembly is a dental laboratory instrument 100B.
A dental laboratory instrument (dental laboratory tool) 100B, which is a dental laboratory tool, has a tip tool 5B as a tip member.

Note that FIG. 22 shows an example of a push carbide bar for shape correction as an example of the tip tool. Paper cones, cross cones, silicon points, margin points, grindstones, and other tip tools may also be used.

The tip tool 5B processes (shape correction such as grinding, excavation, and finishing) the technical object AT (see FIG. 23) by coming into contact with the technical object AT such as a denture or a prosthesis.

The dental laboratory instrument 100B further includes a 6-axis force sensor 1B that detects the tilt and pressure of the tip tool 5B, a tip tool mounting section 3B as an attachment, and a housing 4B.

Also in this configuration shown in FIG. 22, there is a spatial gap between the tip tool mounting portion 3B and the inner surface of the housing 4B. Therefore, the 3-axis force applied to the tip tool 5B, which is the tip member, and the moment about the axis are effectively transmitted to the 6-axis sensor 1B. That is, the 6-axis sensor 1B detects information on the direction and pressure in which the force is applied to the laboratory work object when the tip tool 5B comes into contact with the laboratory work object.

Further, the dental laboratory instrument 100B may have a storage unit for storing the direction in which the force is applied to the contacting laboratory object, pressure information, and information on the duration of the pressure and direction.

<Application example of the second embodiment>
FIG. 23 is an example of a dental technique display system that displays the contact angle and pressure of the dental laboratory instrument with respect to the laboratory object AT during the technique using the dental laboratory instrument 100B of this embodiment. FIG. 24 is an example block diagram of the dental technique display system 2000 of FIG.

A dental laboratory method display system 2000 shown in FIG. 24 has a dental laboratory instrument 100B, a PC 300, and a camera 400.

A PC 300, which is an example of an information processing device, is connected to the dental technical instrument 100B via a wired or wireless network. The camera 400 is connected to the PC 300 via a wired or wireless network.

The PC 300 includes a display unit 310, a control unit 320, a display control unit 330, an audio control unit 340, a speaker 350, a storage unit 360, a communication unit 370, and the like.

The storage unit 360 has a completed shape storage area, a tooth profile storage area, and a detection result storage area. Data is set in advance in the completed shape storage area and the tooth pattern storage area based on the patient's tooth profile, which is the object of laboratory work.

The storage unit 360 stores information on the direction and pressure in which the force was applied to the laboratory object AT when the dental laboratory instrument 100B came into contact with it.

The cutting information accumulation unit 321 of the control unit 320 accumulates and counts, for example, the duration of the contact time at the same angle and the same pressure during the execution of the technique.

The PC 300 associates the image captured by the camera 400 with the pressure and tilt information of the tip tool 5B that the technician O is currently working on and displays them together on the screen of the display unit 310. do.

In the dental laboratory method display system 2000 of this configuration, the method of using the dental laboratory instrument 100B by the skilled technician O is displayed together with the image, and the method of applying pressure and the direction of the pressure are displayed in numerical form, thereby helping students and the like to learn about the technique. , It is possible to learn more specific techniques using tools.

In this example, an example of dental technology is shown, but it is also possible to apply the present technology to fields that require skill acquisition using electric tools. For example, it can be applied to woodworking techniques, metal processing, and the like.

<Third Embodiment>
FIG. 25 shows a configuration example when the sensor assembly is mounted on medical equipment. In FIG. 25, (a) is a configuration example when the sensor assembly is mounted on the medical scalpel 100C, and (b) is a configuration example when the sensor assembly is mounted on the medical tentacle 100D. The medical scalpel 100C and the medical tentacle 100D are examples of medical instruments.

A medical scalpel 100C shown in FIG. 25(a) has a medical blade 5C as a tip member. The medical blade 5C corresponds to the cutting edge of a medical scalpel. Although the medical blade (cutting edge) 5C shown in FIG. 25(a) shows an example of a replaceable knife, the applicable medical blade 5C is a replaceable knife of other shape or a replaceable knife for a microscope. or a scalpel.

The medical scalpel 100C further includes a 6-axis force sensor 1C that detects the inclination and pressure of the medical blade 5C, an attachment (blade mounting portion) 3C, and a housing 4C.

Also in this configuration, there is a spatial gap between the blade mounting portion 3C, which is an attachment, and the inner surface of the housing 4C. Therefore, the 3-axis force applied to the medical blade 5C, which is the tip member, and the moment about the axis are effectively transmitted to the 6-axis sensor 1C.

A medical tentacle 100D shown in FIG. 25(b) has a medical tentacle 5D as a tip member. The tentacle 5D is, for example, a soft rounded elastic body, and when an operator such as a surgeon O or a veterinarian performs an operation, instead of a finger, the tentacle 5D slowly comes into contact with the patient's (or patient's) surgical site and its surroundings. Thus, the tactile sensation is detected using the tentacles 5D in the same manner as the affected area and the other parts are discriminated by the tactile sensation.

The medical tentacle 100D further includes a 6-axis force sensor 1D that detects the inclination and pressure of the tentacle 5D, an attachment (tentacle mounting portion) 3D, and a housing 4D.

Also in this configuration, there is a spatial gap between the tentacle attachment portion 3D, which is an attachment, and the inner surface of the housing 4D. Therefore, the 3-axis force applied to the tentacle 5D, which is the tip member, and the moment about the axis are effectively transmitted to the 6-axis sensor 1D.

In this embodiment, the 6-axis force sensors 1C and 1D detect the softness of the surgical object (patient or patient) with which the medical blade 5C and/or the tentacle 5D is in contact and the direction in which pressure is applied to the surgical object. To detect.

<Application example 1 of the third embodiment>
FIG. 26 is an example of a telesurgery system using the medical scalpel and/or medical tentacle of FIG. FIG. 27 is a block diagram of the telesurgical system 3000 of FIG.

A telesurgery system 3000 shown in FIG. 27 has a surgical robot (patient surgical robot) 500 and an operating console 600 . The surgical robot 500 operably holds a medical scalpel 100C and a medical tentacle 100D.

The surgical robot 500 and the operating console 600 are connected via a network (wired, short-range wireless, specified wireless).

The surgical robot 500 has robot arms 510 and 520 , an information processing section 530 , a camera 540 , a microphone 550 and a speaker 560 . The information processing section 530 includes a 6-axis information acquisition section 531, an audio processing section 532, a video processing section 533, a communication section 534, and the like.

The operating-side console 600 has input devices 610 and 620 , an information processing section 630 , a display 640 , a microphone 650 , a speaker 660 and leg pedals 670 . The information processing unit 630 includes movement information acquisition units 631 and 632, a 6-axis information conversion unit 633, an audio processing unit 634, an image processing unit 635, a pedal information acquisition unit 636, a communication unit 637, and the like.

The surgical robot 500 is a device that receives instructions from the operating console 600 and directly performs surgery on a patient.

In the surgical robot 500, the robot arms (slave manipulators) 510 and 520 acquire the position information of the manipulation by the movement information acquisition units 631 and 632 as the surgeon manipulates the operation-side console 600, and the movement information transmission drive is performed. By being transmitted to the units 511 and 521, the input devices 610 and 620 are steered to move in conjunction with each other.

In this embodiment, the distal ends of robot arms (slave manipulators) 510 and 520 detachably hold a medical scalpel 100C and/or a medical tentacle 100D. The inclination and pressure of the scalpel/tentacles detected by the medical scalpel 100C and/or the medical tentacles 100D are transmitted to the 6-axis information acquisition unit 531 of the information processing unit 530 via the robot arms 510 and 520 or wirelessly. , the detected quantity is quantified.

Camera 540 images the patient's surgical site. Camera 540 is more preferably a camera capable of three-dimensional imaging.

A microphone 550 receives voice commands from surgical assistants and surgical nurses attending the surgery. The speaker 560 outputs the surgeon's voice command input to the operating-side console 600 as voice information.

The operating console 600 is the device operated by the surgeon.

Input devices (master manipulators) 610, 620 may include any one or more of a variety of input devices such as joysticks, gloves, trigger guns, manual controllers, and the like. In this embodiment, the scalpel input device 610 is an input device corresponding to the operation of the medical scalpel 100C shown in FIG. Here is an example of an input device that corresponds to .

Note that the leg pedal 670 is also an input device for legs that performs instructions different from the input devices 610 and 620 that input using hands.

In this embodiment, the input devices 610 and 620 are provided with vibration generators 611 and 621 . It should be noted that the leg pedal 670 may also be provided with a vibration generating section as necessary.

A microphone 650 receives voice commands from the surgeon.

A display (master display) 640 displays one or more images of the surgical site within the patient and other information for the surgeon, such as the tilt and pressure of the surgical scalpel 100C and medical tentacle 100D. etc. are also displayed.

In the above configuration, the inclination/pressure of the scalpel/tentacle detected by the medical scalpel 100C and/or the medical tentacle 100D is transmitted to the information processing unit 530 of the surgical robot 500 via the robot arms 510 and 520 or wirelessly. is transmitted to Then, the softness of the surgical object and the direction in which pressure is applied to the surgical object are transmitted to the operating console 600 via the communication units 534 and 637, and converted into vibration amounts by the 6-axis information conversion unit 633. , the vibration generators 611 and 621 provided in the input devices 610 and 620 vibrate, so that the vibration can be transmitted.

As a result, in the telesurgery system, when the medical scalpel 100C and/or the medical tentacle 100D gripped by the robot arms 510 and 520 are in contact with an organ, an abdominal wall, or the like other than the surgical site, the operation-side console 600 , the surgeon can perceive the vibration as a response.

<Application example 2 of the third embodiment>
FIG. 28 is an example of a three-dimensional surgical technique display system using the medical scalpel 100C and/or the medical tentacle 100D of FIG. FIG. 29 is a block diagram of the three-dimensional surgical technique display system 4000 of FIG.

A three-dimensional surgical technique display system 4000 shown in FIG. The three-dimensional position detection device 800 and camera 900 function as a three-dimensional camera that measures the position of the medical blade 5C or tentacle 5D of the medical instruments (100C, 100D).

In addition, when the camera 900 is provided two-dimensionally, it is preferable that the surgical site to be operated by the surgical scalpel 100C is photographed so as to be visually recognizable. Therefore, the camera 900 may be installed directly above, or may move in conjunction with the medical scalpel 100C. Alternatively, the camera 900 and the medical scalpel 100C may be integrated.

The PC 700 includes a display section 710 , a control section 720 , a display control section 730 , an audio control section 740 , a speaker 750 and a storage section 760 .

The storage unit 760 has a three-dimensional information storage area, an image information storage area, a 6-axis detection result storage area, and the like.

The control unit 720 has an information synthesizing unit 721, and combines the image of the surgical site from the camera 900 and the medical scalpel 100C and/or the medical knife 100C detected by the three-dimensional position detection device 800, which are acquired via the communication unit. The position of the tentacle 100D is synthesized and displayed on the display unit 710. FIG.

Furthermore, by detecting the inclination and pressure of the 6-axis sensor detected by the medical scalpel 100C and/or the medical tentacle 100D, the softness of the surgical object (patient or sick animal) and pressure are applied to the surgical object. Detect direction.

The PC 700 displays on the screen of the display unit 710 the photographed image, the position information, the pressure of the tip tool 5B currently in operation, and the inclination information.

In the surgical technique display system 4000 having this configuration, the method of using a scalpel by an expert and the method of identifying an affected area (tumor area, etc.) are digitized and displayed together with images, so that students can learn surgical techniques in a more concrete manner. In addition, it is possible to learn how to use a scalpel during surgery and how to find the affected area.

<Fourth Embodiment>
FIG. 30 shows a configuration example in which the sensor assembly is mounted on the shoe sole.

This embodiment is a configuration example in which the sensor assembly is a balance detection shoe 100E provided on the sole.

The balance detection shoe 100 has a sensor 5E provided on the sole as the tip member.

Furthermore, the balance detection shoe 100E has the six-axis force sensor 5E and an attachment. Note that the housing 4E corresponds to the hole portion of the shoe because the sensor is provided by making a hole in the sole of the shoe.

As shown in FIG. 30, even in this configuration, there is a spatial gap between the sensor, the sensor mounting portion, and the inner surface of the housing 4E. Therefore, the weight shift movement and application corresponding to the three-axis force and the moment about the three-axis force applied to the sensor 5E arranged on the shoe sole are effectively transmitted to the six-axis sensor.

The results of the 6-axis sensor detected in this way are transmitted to, for example, the mobile phone or smart phone 5100 of the user wearing the shoes, and, similarly to the application example of the first embodiment shown in FIG. It is preferable that advice on walking or jogging can be received from the smart phone 5100 by registering the .

Although the sensor assembly has been described above using a plurality of exemplary embodiments, the present invention is not limited to the above exemplary embodiments. Various modifications and improvements such as combination or replacement with part or all of other embodiments are possible within the scope of the present invention.

1 6-axis sensor (6-axis force sensor, force sensor)
3, 3-1 Attachment (end member mounting part)
3A Pen tip mounting part (attachment)
3B Tool mounting part (attachment)
3C blade mounting part (attachment)
3D tentacle mounting part (attachment)
3E Shoe bottom detector mounting part (attachment)
4, 4A, 4B, 4C, 4D, 4E Case 4i Inner peripheral surface 5, 5-1 Tip member 5A, 5A-1, 5A-2, 5A-3, 5A-4 Pen tip 5B Tip tool 5C Medical blade 5D tentacle 5E sole sensor 6 position transmitter 10 sensor chip (6-axis force sensor)
20 Strain body (6-axis force sensor)
31 receiving portion 32 mounting upright portion 33 female screw 34 groove 51 contact portion 52 fitting portion 53 male screw 54 pin 61 magnetic body 62 magnetic core 63 magnetic coil 100 sensor assembly 100A stylus pen 100B dental laboratory instrument 100C medical knife (medical equipment)
100D medical tentacle (medical instrument)
100E Balance detection shoe 200 Tablet 210 Touch panel (panel)
212 digitizer (position detector)
270 communication unit 280 data input/output unit (acquisition unit)
300 PC (information processing device)
400 camera 500 surgical robot (patient surgical robot)
540 Camera 600 Operation Console 610, 620 Input Device 640 Display 700 PC (Information Processing Device)
800 three-dimensional position detection device (three-dimensional camera)
900 camera (three-dimensional camera)
1000 Work Drawing Method Guidance System 2000 Dental Technician Method Display System 3000 Remote Surgery System 4000 Surgical Method Display System 5000 Walking State Display System

Claims (12)

a tubular casing;
a tip member capable of coming into contact with an object while partially protruding from one end of the housing;
a 6-axis force sensor provided in the housing and provided with a power point input section protruding toward the tip side;
a tip member mounting portion connected to the force point input portion of the six-axis force sensor and capable of mounting the tip member;
The 6-axis force sensor has a strain body and a sensor chip attached to a surface on the tip side of the strain body,
The strain generating body has four power point input portions protruding toward the distal end side from the sensor chip so as to surround the sensor chip on the surface on the distal end side,
The tip member attachment portion has an attachment standing portion surrounding the rear end side of the tip member, and a planar receiving portion to which the tips of the four power point input portions are adhered,
The tip member mounting portion and the tip member are provided on the inner peripheral side of the housing so that a space gap exists between them and the inner peripheral surface of the housing ,
The strain-generating body is
a base, which is a surface on the rear end side;
Four first pillars extending from the four corners of the base to the tip side;
four central first beams that connect adjacent pillars on the tip side;
four second beams protruding from the central side surfaces of the four first beams;
and four protrusions projecting from the tip side surfaces of the four second beams to the tip side, and the tips of which are located on the rear end side of the four power point input parts,
The four power point input parts protrude from the center of the front end side surfaces of the four first beams to the front end side,
The sensor chip is joined to the four protrusions,
When force is applied to the four force input units, the four first beams, the four first pillars, the four second beams, and the four protrusions deform to transmit force to the sensor chip
A sensor assembly characterized by: The sensor chip has four detection blocks each provided with four force points to which an external force is input,
The four force points of the sensor chip are provided in contact with a portion that deforms accordingly when force is applied to the four force point input portions of the strain body,
2. The sensor assembly according to claim 1, wherein each sensing block of said four sensing blocks is provided with at least one or more piezoresistive elements. The sensor chip is
four corner support portions provided at the four corners;
four first reinforcing beams connecting adjacent corner support portions of the four corner support portions to form an outer shape of the sensor chip;
a centrally located central support;
four second reinforcing beams that diagonally connect the four corner support portions and the central support portion;
Both ends are connected to the adjacent corner support portions, extend parallel to the first reinforcing beams with a gap therebetween, are deformable by external force, and are provided with the four power points projecting at the center. four first sensing beams, and
four second sensing beams connected at both ends to adjacent second reinforcing beams, extending parallel to and spaced from the central support, and deformable by an external force;
Four third detection beams that connect the centers of the four first detection beams and the centers of the four second detection beams and are deformable by an external force. and further comprising
each of the sensing blocks has one first sensing beam, one second sensing beam, one third sensing beam, and one force point;
The piezoresistive elements are arranged on four first detection beams, four second detection beams, and two third detection beams extending in the same straight line. 3. The sensor assembly of claim 2, wherein: A stylus pen capable of inputting characters and lines on a position-detectable touch panel,
a tubular casing;
a pen tip that encloses a magnetic body and can contact the touch panel in a state that a part protrudes from one end of the housing;
a 6-axis force sensor provided in the housing and provided with an effort input unit protruding toward the pen tip;
a pen tip mounting portion connected to the force point input portion of the six-axis force sensor and capable of mounting the pen tip;
a magnetic core passing through the 6-axis force sensor and the pen tip mounting portion;
a magnetic coil connected to the magnetic core and provided behind the six-axis force sensor;
The pen tip mounting portion and the pen tip are provided on the inner peripheral side of the housing so that a space gap exists between them and the inner peripheral surface of the housing,
The 6-axis force sensor detects contact pressure of the pen tip with respect to the touch panel and inclination and/or rotation of the pen tip on the touch panel,
the magnetic core is connectable to the magnetic body contained in the pen tip,
A stylus pen, wherein the position of the pen tip on the touch panel can be detected by an electromagnetic induction method in which the magnetic body and the magnetic core are detected and current flows through the magnetic coil. The 6-axis force sensor has a strain body and a sensor chip attached to the surface of the strain body on the pen tip side,
The strain generating body has four power point input portions protruding toward the pen tip side from the sensor chip so as to surround the sensor chip on the surface on the pen tip side,
5. The pen tip attachment portion has an attachment upright portion surrounding the rear end side of the pen tip, and a planar receiving portion to which tips of the four power point input portions are adhered. The stylus pen described in . The pen tip is deformable by pressure when contacting the touch panel,
The stylus pen according to claim 4 or 5 , wherein the magnetic core has elasticity and follows the deformation of the pen tip to give force feedback to the user. The stylus pen according to any one of claims 4 to 6 , wherein the strain generating body of the 6-axis force sensor has a truncated cone shape. An annular edge bent inward is formed at the tip of the housing,
8. The stylus pen according to claim 7 , further comprising a stopper that is provided on the tip side of the edge and contacts when the pen tip is deformed. a stylus pen according to any one of claims 4 to 8 ;
A handwriting input system comprising a device comprising a position-detectable touch panel,
The handwriting input system, wherein the touch panel forms a magnetic field to detect the position of the pen tip by the electromagnetic induction method. the type of the pen tip of the stylus pen is replaceable;
The pen tip is equipped with a resonance circuit consisting of a coil and a capacitor,
The handwriting input system according to claim 9 , wherein the touch panel can recognize the type of the pen tip by scanning the resonance frequency of the resonance circuit mounted on the pen tip. A microcomputer provided behind the 6-axis force sensor in the housing,
the type of the pen tip is replaceable,
The pen tip is provided with a detection mechanism for detecting a connection state with the stylus pen,
11. The handwriting input system according to claim 10 , wherein the microcomputer identifies the type of the pen tip via the detection mechanism and transmits the information to the touch panel to cause the touch panel to recognize the type of the pen tip. . a stylus pen according to any one of claims 4 to 8 ;
a tablet with a position-detectable touch panel;
The tablet is characterized by being capable of giving advice on the direction of movement of the pen tip, how to apply force, and the inclination of the pen tip when inputting calligraphy, drawing, painting, or comics with the stylus pen. Work drawing method guidance system.

Images