WO2020084980A1 - Detection device - Google Patents

Detection device Download PDF

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Publication number
WO2020084980A1
WO2020084980A1 PCT/JP2019/037247 JP2019037247W WO2020084980A1 WO 2020084980 A1 WO2020084980 A1 WO 2020084980A1 JP 2019037247 W JP2019037247 W JP 2019037247W WO 2020084980 A1 WO2020084980 A1 WO 2020084980A1
Authority
WO
WIPO (PCT)
Prior art keywords
detection
axis direction
elastic member
detection device
force
Prior art date
Application number
PCT/JP2019/037247
Other languages
French (fr)
Japanese (ja)
Inventor
康久 神川
将也 木下
鈴木　裕之
良 寺澤
亘 小久保
Original Assignee
ソニー株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by ソニー株式会社 filed Critical ソニー株式会社
Publication of WO2020084980A1 publication Critical patent/WO2020084980A1/en

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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J19/00—Accessories fitted to manipulators, e.g. for monitoring, for viewing; Safety devices combined with or specially adapted for use in connection with manipulators
    • B25J19/02—Sensing devices
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L1/00—Measuring force or stress, in general
    • G01L1/26—Auxiliary measures taken, or devices used, in connection with the measurement of force, e.g. for preventing influence of transverse components of force, for preventing overload
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L5/00—Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes
    • G01L5/16—Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes for measuring several components of force

Definitions

  • the present disclosure relates to a detection device.
  • An operating body to which an external force is applied an elastic body that is displaced according to the magnitude of the external force applied to the operating body, a driving body to which the external force is transmitted by the displacement of the elastic body, and a pressure-sensitive portion that is pressed by the driving body.
  • a diaphragm having a diaphragm is known.
  • the external force applied to the operating body is transmitted to the pressure-sensitive portion of the diaphragm via the elastic body and the driving body, so that even if an unexpected impact load occurs on the operating body, the overload is pressure-sensitive. Protect the pressure sensitive part without transmitting it directly to the part.
  • the timing of force detection is delayed, the external force cannot be accurately detected, and the detection accuracy deteriorates.
  • the present disclosure proposes a detection device capable of protecting against overload and ensuring detection accuracy.
  • a detection device includes an output member that receives an external force, a detection member that includes a force sensor that detects the force received by the output member, and the detection member that moves. And an elastic member for supporting the same.
  • FIG. 2 is a block diagram showing a configuration example of a detection device according to the first embodiment of the present disclosure.
  • FIG. 5 is a cross-sectional view showing an operation of the detection device according to the first embodiment of the present disclosure.
  • FIG. 5 is a cross-sectional view showing an operation of the detection device according to the first embodiment of the present disclosure.
  • FIG. 1 is a cross-sectional view showing a configuration example of a detection device 1 according to the first embodiment of the present disclosure.
  • FIG. 2 is an exploded perspective view showing a configuration example of the detection device 1 according to the first embodiment of the present disclosure.
  • the detection device 1 includes an output member 2, a detection member 3, an elastic member 4, a housing 5, a stopper mechanism 6, and an auxiliary elastic member 7.
  • the output member 2 receives an external force and transmits this external force to the detection member 3.
  • the output member 2 has a tip portion 2A and an output shaft plate 2B.
  • the tip portion 2A is formed in a hemispherical shape, and is made of a material capable of absorbing impact, such as rubber.
  • the tip portion 2A has a hemispherical shape and has a spherical tip surface 2Aa and a flat attachment surface 2Ab.
  • the tip portion 2A has a plurality of screws 2Ac that penetrate the attachment surface 2Ab from the tip surface 2Aa side.
  • the output shaft plate 2B is formed in a disc shape and is made of a material such as plastic that is harder than the tip 2A.
  • the output shaft plate 2B has a disk shape, and has one surface 2Ba facing the mounting surface 2Ab of the tip portion 2A and the other surface 2Bb facing the side opposite to the one surface 2Ba.
  • the output shaft plate 2B has a plurality of screw holes 2Bc penetrating from one surface 2Ba to the other surface 2Bb.
  • the output shaft plate 2B has a coupling recess 2Bd to which the detection member 3 is coupled, on the other surface 2Bb.
  • the tip portion 2A and the output shaft plate 2B are screwed into the screw hole 2Bc of the output shaft plate 2B with the screw 2Ac of the tip portion 2A so that the mounting surface 2Ab and the one surface 2Ba are in contact with each other and are integrally coupled.
  • the detection member 3 is coupled to the coupling recess 2Bd of the output shaft plate 2B.
  • the center of the hemispherical shape of the tip portion 2A and the center of the disk shape of the output shaft plate 2B substantially coincide with each other, and the alternate long and short dash line in FIGS. 1 and 2 passes through each center. It is the center line 8.
  • the coupling recess 2Bd of the output shaft plate 2B is provided at the center of the disc shape of the output shaft plate 2B, and is arranged on the center line 8.
  • the center line 8 is referred to as the Z axis, and its extending direction is referred to as the Z axis direction.
  • the detection member 3 has a detection unit 3A and a base unit 3B.
  • the detection unit 3A internally includes a force sensor 3Aa made of a strain generating body and serves as a base of the force sensor 3Aa.
  • a force sensor 3Aa is a triaxial force sensor.
  • the three axes are a Z axis 8, an X axis 9 orthogonal to the Z axis 8, and a Y axis 10 orthogonal to the Z axis 8 and the X axis 9.
  • the X axis 9 and the Y axis 10 lie in a plane orthogonal to the Z axis 8.
  • the extending direction of the X-axis 9 is called the X-axis direction
  • the extending direction of the Y-axis 10 is called the Y-axis direction.
  • the force sensor 3Aa of the present embodiment detects a force received along the Z axis 8, the X axis 9, and the Y axis 10.
  • the force sensor 3Aa is a uniaxial force sensor that detects a force received only along the Z-axis 8 or a multi-axis force sensor that detects a force received along another axis other than the Z-axis 8, the X-axis 9 and the Y-axis 10. It may be an axial force sensor.
  • the detection unit 3A has an output shaft 3Ab extending along the Z-axis direction on the Z-axis 8.
  • the output shaft 3Ab is directly coupled to the force sensor 3Aa without any other member, and projects toward the output member 2.
  • the output shaft 3Ab serves as a location where force is detected by the force sensor 3Aa.
  • the output shaft 3Ab is directly coupled to the coupling recess 2Bd of the output shaft plate 2B without any other member.
  • the detection unit 3A has a plurality of screws 3Ac penetrating in the Z-axis direction. Further, the detection unit 3A is provided on its side with a cylindrical member 3Ad projecting through which a cable including a power supply line and a signal line of the force sensor 3Aa is inserted.
  • the base portion 3B has a detection portion fixing portion 3Ba to which the detection portion 3A is fixed, and an elastic member engagement portion 3Bb with which the elastic member 4 is engaged.
  • the detection portion fixing portion 3Ba and the elastic member engagement portion 3Bb are integrally and continuously formed via a shaft portion 3Bc extending in the Z-axis direction.
  • the detection part fixing part 3Ba has a plurality of screw holes 3Bd formed in a disk shape centering on the Z axis 8 and into which the respective screws 3Ac of the detection part 3A are screwed. Therefore, the detection unit 3A and the detection unit fixing unit 3Ba are integrally coupled by screwing the screw 3Ac of the detection unit 3A into the screw hole 3Bd of the detection unit fixing unit 3Ba.
  • the elastic member engaging portion 3Bb is used to attach the elastic member 4 or to contact the elastic member 4.
  • the elastic member 4 is formed in a plurality of ring shapes, and the elastic member engaging portion 3Bb has a ring-shaped fitting groove 3Be for fitting the ring-shaped elastic member 4 or a ring-shaped elastic member. It has a flat contact surface 3Bf with which the member 4 contacts.
  • the elastic member engaging portion 3Bb is formed in a columnar shape with the Z axis 8 as the center.
  • the elastic member engaging portion 3Bb has an annular fitting groove 3Be formed so as to surround the shaft portion 3Bc on the circular surface on the detection portion fixing portion 3Ba side to which the detection portion 3A is fixed.
  • the elastic member engaging portion 3Bb has an annular fitting groove 3Be formed along the circumferential surface thereof. Further, the elastic member engaging portion 3Bb has a circular surface facing the opposite side to the circular surface on which the fitting groove 3Be is formed as the contact surface 3Bf. Further, the elastic member engaging portion 3Bb is provided with a fitting concave portion 3Bg in which the auxiliary elastic member 7 is fitted so as to be recessed about the Z axis 8 on the surface on which the contact surface 3Bf is formed.
  • the elastic member 4 is made of an elastic material such as rubber, is formed in a link shape, and is provided in plural. Specifically, the elastic member 4 is formed on the circumferential surface of the elastic member engaging portion 3Bb and the first elastic member 4A that fits into the fitting groove 3Be formed on the circular surface of the elastic member engaging portion 3Bb. The second elastic member 4B that fits in the fitted groove 3Be and the third elastic member 4C that contacts the contact surface 3Bf in the elastic member engaging portion 3Bb are included.
  • the ring-shaped elastic members 4A, 4B, 4C are arranged with the Z axis 8 as the center.
  • the housing 5 is a case that houses the output member 2, the detection member 3, and the elastic member 4.
  • the housing 5 is formed in a bottomed cylindrical shape centered on the Z axis 8.
  • the housing 5 is divided into two in the Z-axis direction, and has a first housing 5A and a second housing 5B.
  • the first housing 5A is formed in a cylindrical shape so as to surround the output member 2 and the detection portion 3A of the detection member 3.
  • a contact piece 5Aa with which the first elastic member 4A of the elastic member 4 comes into contact is formed continuously from the inner surface toward the Z axis 8 in an annular shape in the circumferential direction.
  • the inside of the contact piece 5Aa which is on the Z-axis 8 side, is formed as a circular through hole, and when the first housing 5A and the second housing 5B are coupled, the detection portion of the base portion 3B of the detection member 3 is fixed.
  • the portion 3Ba can be penetrated.
  • the first housing 5A has an annular coupling piece 5Ab formed on the outer peripheral edge on the second housing 5B side.
  • the first housing 5A has a plurality of screws 5Ac that penetrate the coupling piece 5Ab along the Z-axis direction.
  • first housing 5A is provided with a cutout portion 5Ad on a side portion thereof for extending the tubular member 3Ad in the detection portion 3A of the detection member 3 to the outside of the first housing 5A and passing a cable therethrough. There is.
  • the second housing 5B is formed in a bottomed cylindrical shape so as to surround the base portion 3B of the detection member 3 and the elastic member 4.
  • the second elastic member 4B of the elastic member 4 contacts the inner peripheral surface 5Ba of the second housing 5B.
  • An annular fitting groove 5Bb into which the third elastic member 4C of the elastic member 4 is fitted is formed on the bottom surface of the second housing 5B.
  • the second housing 5B has a fitting recess 5Bc on the bottom surface thereof, into which the auxiliary elastic member 7 is fitted, inside the fitting groove 5Bb.
  • the second housing 5B has an annular coupling piece 5Bd formed on the outer peripheral edge on the first housing 5A side.
  • the second housing 5B has a plurality of screw holes 5Be into which the respective screws 5Ac are screwed into the coupling piece 5Ab. Therefore, the first housing 5A and the second housing 5B are integrally coupled by screwing the screw 5Ac into the screw hole 5Be.
  • the stopper mechanism 6 is composed of a step portion formed on the inner peripheral surface of the first casing 5A in the casing 5.
  • the stopper mechanism 6 includes a first contact surface 6A facing the edge of the other surface 2Bb of the output shaft plate 2B of the output member 2, and an inner peripheral surface of the first housing 5A that is a peripheral surface of the output shaft plate 2B.
  • the auxiliary elastic member 7 is made of an elastic material such as elastomer.
  • the auxiliary elastic member 7 is formed in a cylindrical shape, and is formed in the fitting concave portion 3Bg formed in the elastic member engaging portion 3Bb of the base portion 3B of the detection member 3 and the second casing 5B of the casing 5. It is fitted to the fitting recessed portion 5Bc and is arranged around the Z axis 8.
  • the auxiliary elastic member 7 is fitted into the fitting recess 5Bc formed in the second housing 5B of the housing 5 to form the second housing 5B.
  • the third elastic member 4C is fitted in the fitted groove 5Bb.
  • the first elastic member 4A and the second elastic member 4B are fitted into the fitting grooves 3Be formed in the elastic member engaging portion 3Bb of the base portion 3B of the detection member 3, respectively.
  • the base portion 3B is inserted into the second housing 5B, and the auxiliary elastic member 7 is fitted into the fitting concave portion 3Bg formed in the elastic member engaging portion 3Bb.
  • the second elastic member 4B contacts the inner peripheral surface 5Ba of the second housing 5B, and the third elastic member 4C contacts the contact surface 3Bf of the elastic member engaging portion 3Bb.
  • the first housing 5A is joined to the second housing 5B.
  • the contact piece 5Aa of the first housing 5A comes into contact with the first elastic member 4A.
  • the base portion 3B of the detection member 3 is housed inside the second housing 5B together with the first elastic member 4A, the second elastic member 4B, the third elastic member 4C, and the auxiliary elastic member 7, and the first elastic member 4A.
  • the elastic force of the second elastic member 4B, the third elastic member 4C, and the auxiliary elastic member 7 is movably supported inside the second housing 5B.
  • the detection unit 3A is joined and fixed to the base portion 3B. Then, the output shaft 3Ab of the detection unit 3A and the output shaft plate 2B are coupled. Further, the output shaft plate 2B and the tip portion 2A are connected.
  • the output member 2 receives an external force in each axial direction along the Z axis 8, the X axis 9, and the Y axis 10 by the tip portion 2A, and the external force is transmitted via the output shaft plate 2B. The signal is transmitted to the detection unit 3A of the detection member 3. 3 A of detection parts detect the external force of each axial direction.
  • FIG. 3 is a diagram showing an example of a leg robot 100 to which the technology according to the present disclosure is applied.
  • FIG. 4 is a block diagram showing a configuration example of the detection device 1 according to the first embodiment of the present disclosure.
  • the leg robot 100 is a support device that supports a robot body (not shown), and in FIG. 3, a mounting portion 101 to which the leg robot 100 is attached is shown in the robot body.
  • the legged robot 100 has a link mechanism 102, a drive motor 103, and a pair of non-circular gears 104.
  • the legged robot 100 includes a robot control unit 105 (see FIG. 6), and is configured to control the drive of the drive motor 103 based on an operation instruction output from the robot control unit 105.
  • the power output from the drive motor 103 is output to the link mechanism 102 via the pair of non-circular gears 104.
  • the pair of non-circular gears 104 outputs the power output from the drive motor 103 to the link mechanism 102 at a speed reduction ratio according to the attitude of the link mechanism 102.
  • the pair of non-circular gears 104 has an input gear 104A and an output gear 104B.
  • the input side gear 104A is directly or indirectly coupled to the rotary shaft 103A of the drive motor 103.
  • the output side gear 104B meshes with the input side gear 104A. Since the rotation angle of the output side gear 104B has nonlinearity with respect to the rotation angle of the input side gear 104A, the reduction ratio can be changed according to the attitude of the link mechanism 102.
  • the link mechanism 102 includes a link 102A, a link 102B that is a part of the output gear 104B, a link 102C, a link 102D, a link 102E, and a link 102F.
  • the link 102A is provided with a pair of non-circular gears 104 and a drive motor 103.
  • the link 102A is relatively rotatable around the rotation shaft 103A with respect to the mounting portion 101 at one end side, and is provided with an input side gear 104A and a drive motor 103.
  • the output side gear 104B is provided near the one end of the link 102A.
  • the input side gear 104A is connected to the link 102A via the rotary shaft 103A of the drive motor 103 and is rotatable relative to the link 102A.
  • the output side gear 104B is connected to the link 102A via the rotating shaft 106 and is rotatable relative to the link 102A.
  • the drive motor 103 is fixed to the link 102A.
  • the link 102A is rotatably connected to the center side of the link 102D around the shaft portion 106A at the other end.
  • the link 102A is rotatably connected to the one end side of the link 102E around the shaft portion 106B near the other end side.
  • the link 102B is composed of a part of the output side gear 104B.
  • the link 102B is relatively rotatably connected to one end of the link 102C and around the shaft portion 106C.
  • the link 102C is relatively rotatably connected to the one end of the link 102D and the shaft 106D at the other end.
  • the link 102D is rotatably connected to the center side of the link 102F around the shaft portion 106E at the other end.
  • the link 102E is rotatably connected to the one end of the link 102F around the shaft 106F at the other end.
  • the other end of the link 102F is the tip of the leg robot 100, and the detection device 1 is attached to the tip of the leg.
  • the housing 5 is fixed to the other end side of the link 102F, and the output member 2 is attached to the tip of the other end side of 102F so as to face the output member 2.
  • the power output from the drive motor 103 is output to the link mechanism 102 via the pair of non-circular gears 104.
  • the link mechanism 102 expands and contracts according to the power output from the drive motor 103.
  • the detection device 1 grounds on the floor as the link mechanism 102 expands and contracts, and detects the ground pressure at this time as an external force.
  • the detection device 1 has a processing unit 11, as shown in FIG.
  • the processing unit 11 is configured to include a CPU (Central Processing Unit) and the like, and calculates the force detection results along the Z-axis 8, X-axis 9, and Y-axis 10 by the force sensor 3Aa of the detection unit 3A as force information. It is processed and output to the robot control unit 105 of the leg robot 100.
  • the robot control unit 105 is configured to include a CPU (Central Processing Unit) and the like, and outputs an operation instruction to the drive motor 103 based on the force information input from the processing unit 11.
  • leg robot 100 described above, and may be applied to other robots such as a manipulator, for example.
  • FIG. 5 and 6 are cross-sectional views showing the operation of the detection device 1 according to the first embodiment of the present disclosure.
  • FIG. 5 shows the operation when an external force is applied in the Z-axis direction
  • FIG. 6 shows the operation when an external force is applied in the Z-axis direction and the X-axis direction.
  • the output member 2 that receives the external force moves in the Z-axis direction.
  • the force sensor 3Aa of the detection unit 3A of the detection member 3 detects the force in the Z-axis direction as the output member 2 moves.
  • the force sensor 3Aa of the detection unit 3A of the detection member 3 is coupled to the output member 2 and directly detects the external force received by the output member 2. As a result, the detection device 1 can ensure the detection accuracy.
  • the output member 2 and the detection member 3 resist the elastic force of the third elastic member 4C as shown in FIG. Move further in the direction. 4 C of 3rd elastic members are crushed by the contact surface 3Bf of the elastic member engagement part 3Bb, and the whole compressively deforms.
  • the third elastic member 4C buffers the impact load applied from the output member 2 to the force sensor 3Aa of the detection member 3 by its own elastic force.
  • the housing 5 receives the load from the third elastic member 4C.
  • the detection device 1 can protect the force sensor 3Aa of the detection unit 3A of the detection member 3 against overload.
  • the auxiliary elastic member 7 when the output member 2 receives an unexpected impact load in the Z-axis direction, the auxiliary elastic member 7 also changes from the output member 2 to the force sensor 3Aa of the detection member 3 by its own elastic force, as shown in FIG. The shock load applied is buffered.
  • the auxiliary elastic member 7 suppresses elastic deformation by the third elastic member 4C.
  • the detection device 1 can adjust the amount of deformation of the third elastic member 4C by the auxiliary elastic member 7, and can increase the load limit of the force sensor 3Aa in the Z-axis direction.
  • the output member 2 When the output member 2 receives an unexpected impact load in the Z-axis direction, the output member 2 that moves in the Z-axis direction against the elastic force of the third elastic member 4C and the auxiliary elastic member 7 is the output shaft.
  • the edge of the other surface 2Bb of the plate 2B contacts the first contact surface 6A that is the stopper mechanism 6.
  • the first contact surface 6A regulates the movement of the output member 2 in the Z-axis direction when the output shaft plate 2B contacts. That is, the output member 2 is prevented from further moving in the Z-axis direction due to the interference in the stopper mechanism 6.
  • the detection device 1 prevents and limits the impact load applied from the output member 2 to the force sensor 3Aa of the detection member 3, and protects the force sensor 3Aa of the detection unit 3A of the detection member 3 against overload. it can.
  • FIG. 6 shows an example in which the output member 2 has moved in the lower left direction in the drawing.
  • the force sensor 3Aa of the detection unit 3A of the detection member 3 detects forces in the Z-axis direction and the X-axis direction (Y-axis direction) as the output member 2 moves.
  • the force sensor 3Aa of the detection unit 3A of the detection member 3 is coupled to the output member 2 and directly detects the external force received by the output member 2. As a result, the detection device 1 can ensure the detection accuracy.
  • the output member 2 and the detection member 3 are, as shown in FIG. It further moves so as to incline in the X-axis direction (Y-axis direction) with respect to the Z-axis direction against the elastic forces of 4B and 4C.
  • the first elastic member 4A is crushed by the contact piece 5Aa of the first housing 5A and partially deformed by compression.
  • the second elastic member 4B is crushed by the inner peripheral surface 5Ba of the second housing 5B and partially deformed by compression.
  • 4 C of 3rd elastic members are crushed by the contact surface 3Bf of the elastic member engagement part 3Bb, and a part compressively deforms.
  • Each elastic member 4A, 4B, 4C that has been compressed and deformed absorbs the impact load applied from the output member 2 to the force sensor 3Aa of the detection member 3 by its own elastic force.
  • the housing 5 receives the load from each elastic member 4A, 4B, 4C that is compressed and deformed.
  • the detection device 1 can protect the force sensor 3Aa of the detection unit 3A of the detection member 3 against overload.
  • the auxiliary elastic member 7 is also output by the elastic force of its own, as shown in FIG.
  • the shock load applied to the force sensor 3Aa of the detection member 3 from the above is buffered.
  • the auxiliary elastic member 7 increases the load limit of each elastic member 4A, 4B, 4C.
  • the detection device 1 can adjust the amount of deformation of each elastic member 4A, 4B, 4C by the auxiliary elastic member 7, and greatly limits the load of the force sensor 3Aa in the Z-axis direction and the X-axis direction (Y-axis direction). it can.
  • the elastic force of each elastic member 4A, 4B, 4C and the auxiliary elastic member 7 is resisted by Z.
  • the edge portion of the other surface 2Bb of the output shaft plate 2B is the first contact surface 6A that is the stopper mechanism 6.
  • the peripheral surface 2Be of the output shaft plate 2B abuts on the second abutting surface 6B which is the stopper mechanism 6.
  • the first contact surface 6A regulates the movement of the output member 2 in the Z-axis direction when the output shaft plate 2B contacts.
  • the second contact surface 6B restricts the movement of the output member 2 in the X-axis direction (Y-axis direction) when the output shaft plate 2B abuts. That is, the output member 2 is prevented from further moving in the Z-axis direction and the X-axis direction (Y-axis direction) due to the interference in the stopper mechanism 6.
  • the detection device 1 prevents and limits the impact load applied from the output member 2 to the force sensor 3Aa of the detection member 3, and protects the force sensor 3Aa of the detection unit 3A of the detection member 3 against overload. it can.
  • the first elastic member 4A is an elastic body that is deformed mainly by the upper side in the drawing in the Z-axis direction and a moment load.
  • the second elastic member 4B is an elastic body that is deformed mainly by the X-axis direction, the Y-axis direction, and a moment load.
  • the third elastic member 4C is an elastic body that deforms under the Z-axis direction in the drawing and a moment load.
  • Each of the ring-shaped elastic members 4A, 4B, 4C determines the set value of the overload for protecting the force sensor 3Aa according to its cross-sectional shape and size.
  • the ring-shaped elastic members 4A, 4B, and 4C By arranging the ring-shaped elastic members 4A, 4B, and 4C with the Z axis 8 as the center, when they are overloaded, they are deformed with symmetry about the Z axis 8 and in the Z axis direction. A cushioning effect corresponding to the impact load in the X-axis direction and the Y-axis direction can be obtained. Moreover, by dividing each of the elastic members 4A, 4B, 4C in the ring shape, the action of the shearing force can be reduced as compared with the case where all the elastic members 4 are made into one block.
  • the auxiliary elastic member 7 is an elastic body that is deformed mainly by the lower side in the Z-axis direction in the drawing and a moment load, and adjusts the deformation amount of each elastic member 4A, 4B, 4C, and the force sensor 3Aa. Increase the load limit in the Z-axis direction and the X-axis direction (Y-axis direction).
  • the auxiliary elastic member 7 By arranging the auxiliary elastic member 7 in a cylindrical shape with the Z axis 8 as the center, when it is overloaded, the auxiliary elastic member 7 is deformed symmetrically with respect to the Z axis 8 and is deformed in the Z axis direction and the X axis direction. Also, the amount of deformation of each elastic member 4A, 4B, 4C can be adjusted according to the impact load in the Y-axis direction.
  • the stopper mechanism 6 is provided in the housing 5 and limits the load on the force sensor 3Aa by colliding with the output shaft plate 2B of the output member 2 to reduce the clearance between the housing 5 and the output shaft plate 2B. Adjust the overload setting value with.
  • the load limitation on the force sensor 3Aa is determined in advance as a design value depending on the shape and elastic force of each elastic member 4A, 4B, 4C, and the clearance amount between the housing 5 of the stopper mechanism 6 and the output shaft plate 2B. It The clearance amount is preferably about 1 mm to 2 mm, for example.
  • FIG. 7 is a cross-sectional view showing a configuration example of the detection device 1 according to the modified example (1) of the first embodiment of the present disclosure.
  • FIG. 8 is a partial perspective view showing a configuration example of the detection device 1 according to the modified example (1) of the first embodiment of the present disclosure.
  • the modified example (1) of the first embodiment is different from the above-described first embodiment in the configuration of the elastic member 4 and the base portion 3B of the detection member 3, and the other configurations are the same. Therefore, in the modified example (1) of the first embodiment, the same parts as those of the first embodiment are designated by the same reference numerals and the description thereof will be omitted.
  • the elastic member 4 has a plurality of angular elastic members 4D formed in a rectangular shape and a plurality of cylindrical elastic members 4E formed in a cylindrical shape.
  • the angular elastic member 4D is formed in a quadrangular prism shape, and has two outer surfaces 4Da facing the opposite sides in the X-axis direction and two outer surfaces 4Da facing the opposite sides in the Y-axis direction. It consists of a total of four.
  • Each angular elastic member 4D is attached to the elastic member engaging portion 3Bb of the base portion 3B.
  • the elastic member engaging portion 3Bb is formed in a quadrangular prism shape, and has a mounting surface 3Bh facing opposite sides in the X-axis direction and a mounting surface 3Bh facing opposite sides in the Y-axis direction.
  • Each angular elastic member 4D is fitted and attached to each mounting surface 3Bh by a pair of key-shaped fixing portions 3Bi provided in the elastic member engaging portion 3Bb.
  • the outer surface 4Da of each angular elastic member 4D attached to the elastic member engaging portion 3Bb contacts the inner peripheral surface 5Ba of the second housing 5B in the housing 5.
  • the outer surface 4Da of each angular elastic member 4D may be a flat surface as shown in FIG. 8, or may be an arcuate surface in conformity with the inner peripheral surface 5Ba of the cylindrical second housing 5B. Good.
  • the cylindrical elastic member 4E is arranged such that the circular ends of the cylindrical shape face the opposite sides in the Z-axis direction.
  • Four cylindrical elastic members 4E are provided, and are attached to the corners of the elastic member engaging portion 3Bb formed in a quadrangular prism shape so that two cylindrical elastic members 4E are arranged in the X-axis direction and two in the Y-axis direction.
  • Each tubular elastic member 4E is inserted into and attached to each circular fixing portion 3Bj provided at the corner of the quadrangular prism shape of the elastic member engaging portion 3Bb.
  • Each tubular elastic member 4E attached to the elastic member engaging portion 3Bb has one end contacting the contact piece 5Aa of the first housing 5A and the other end fitting into the fitting groove 5Bb of the second housing 5B.
  • the fitting groove 5Bb here is not limited to the annular shape, and may be formed in a circular shape in accordance with the other end of each tubular elastic member 4E.
  • the output member 2 when an external force is applied in the Z-axis direction, the output member 2 that receives the external force moves in the Z-axis direction.
  • the force sensor 3Aa of the detection unit 3A of the detection member 3 detects the force in the Z-axis direction as the output member 2 moves.
  • the force sensor 3Aa of the detection unit 3A of the detection member 3 is coupled to the output member 2 and directly detects the external force received by the output member 2. As a result, the detection device 1 can ensure the detection accuracy.
  • each tubular elastic member 4E is crushed toward the fitting groove 5Bb side and compressed and deformed as the detection member 3 moves.
  • Each cylindrical elastic member 4E buffers the impact load applied from the output member 2 to the force sensor 3Aa of the detection member 3 by its own elastic force.
  • the housing 5 receives the load from each tubular elastic member 4E.
  • the detection device 1 can protect the force sensor 3Aa of the detection unit 3A of the detection member 3 against overload.
  • the auxiliary elastic member 7 When the output member 2 receives an unexpected shock load in the Z-axis direction, the auxiliary elastic member 7 also buffers the shock load applied from the output member 2 to the force sensor 3Aa of the detection member 3 by its own elastic force. The auxiliary elastic member 7 suppresses elastic deformation by each tubular elastic member 4E. As a result, the detection device 1 can adjust the amount of deformation of each tubular elastic member 4E by the auxiliary elastic member 7, and can increase the load limit of the force sensor 3Aa in the Z-axis direction.
  • the output member 2 When the output member 2 receives an unexpected impact load in the Z-axis direction, the output member 2 that moves in the Z-axis direction against the elastic force of each tubular elastic member 4E and the auxiliary elastic member 7 outputs the output.
  • the edge of the other surface 2Bb of the shaft plate 2B contacts the first contact surface 6A that is the stopper mechanism 6.
  • the first contact surface 6A regulates the movement of the output member 2 in the Z-axis direction when the output shaft plate 2B contacts. That is, the output member 2 is prevented from further moving in the Z-axis direction due to the interference in the stopper mechanism 6.
  • the detection device 1 prevents and limits the impact load applied from the output member 2 to the force sensor 3Aa of the detection member 3, and protects the force sensor 3Aa of the detection unit 3A of the detection member 3 against overload. it can.
  • the output member 2 When an external force is applied in the Z-axis direction and the X-axis direction (Y-axis direction), the output member 2 that receives the external force moves so as to incline in the X-axis direction (Y-axis direction) with respect to the Z-axis direction.
  • the force sensor 3Aa of the detection unit 3A of the detection member 3 detects forces in the Z-axis direction and the X-axis direction (Y-axis direction) as the output member 2 moves.
  • the force sensor 3Aa of the detection unit 3A of the detection member 3 is coupled to the output member 2 and directly detects the external force received by the output member 2. As a result, the detection device 1 can ensure the detection accuracy.
  • the output member 2 and the detection member 3 move in the X-axis direction (Y-axis direction) with respect to the Z-axis direction. Move further so that it tilts in the direction).
  • the cylindrical elastic member 4E on the side opposite to the inclined side is crushed by the contact piece 5Aa of the first housing 5A and is compressed and deformed.
  • the cylindrical elastic member 4E on the inclined side is crushed toward the fitting groove 5Bb side and is compressed and deformed.
  • the angled elastic member 4D on the inclined side is crushed by the inner peripheral surface 5Ba of the second housing 5B and is compressed and deformed.
  • the elastic members 4D and 4E that have been compressed and deformed absorb the impact load applied from the output member 2 to the force sensor 3Aa of the detection member 3 by the elastic force of the elastic members 4D and 4E.
  • the housing 5 receives the load from the elastic members 4D and 4E that are compressed and deformed. As a result, the detection device 1 can protect the force sensor 3Aa of the detection unit 3A of the detection member 3 against overload.
  • the auxiliary elastic member 7 when the output member 2 receives an unexpected impact load in the Z-axis direction and the X-axis direction (Y-axis direction), the auxiliary elastic member 7 also receives a force sensor from the output member 2 to the detection member 3 by its own elastic force. It buffers the impact load applied to 3Aa.
  • the auxiliary elastic member 7 increases the load limit of each elastic member 4D, 4E.
  • the detection device 1 can adjust the deformation amount of each elastic member 4D, 4E by the auxiliary elastic member 7, and can increase the load limitation of the force sensor 3Aa in the Z-axis direction and the X-axis direction (Y-axis direction).
  • the output member 2 when the output member 2 receives an unexpected impact load in the Z-axis direction and the X-axis direction (Y-axis direction), the output member 2 resists the elastic force of each elastic member 4D, 4E and the auxiliary elastic member 7 in the Z-axis direction.
  • the edge of the other surface 2Bb of the output shaft plate 2B contacts the first contact surface 6A that is the stopper mechanism 6.
  • the peripheral surface 2Be of the output shaft plate 2B contacts the second contact surface 6B that is the stopper mechanism 6.
  • the first contact surface 6A regulates the movement of the output member 2 in the Z-axis direction when the output shaft plate 2B contacts.
  • the second contact surface 6B restricts the movement of the output member 2 in the X-axis direction (Y-axis direction) when the output shaft plate 2B abuts. That is, the output member 2 is prevented from further moving in the Z-axis direction and the X-axis direction (Y-axis direction) due to the interference in the stopper mechanism 6.
  • the detection device 1 prevents and limits the impact load applied from the output member 2 to the force sensor 3Aa of the detection member 3, and protects the force sensor 3Aa of the detection unit 3A of the detection member 3 against overload. it can.
  • Each of the tubular elastic members 4E is an elastic body that deforms mainly in the Z-axis direction and moment load.
  • Each angular elastic member 4D is an elastic body that is deformed mainly by the X-axis direction, the Y-axis direction, and a moment load.
  • Each elastic member 4E, 4D determines a set value of overload for protecting the force sensor 3Aa according to its cross-sectional shape and size. Since each elastic member 4E, 4D is divided into a plurality around the Z-axis direction, the number of design parameters of the set value is changed more than that of each elastic member 4A, 4B, 4C in the above-described first embodiment. It's easy to do.
  • each elastic member 4E, 4D is divided into a plurality around the Z-axis direction, it is possible to take a large amount of deformation as compared with each elastic member 4A, 4B, 4C in the above-described first embodiment, Manufacturing error can be reduced.
  • the elastic members 4E and 4D are symmetrically arranged about the Z-axis 8 so that when they are overloaded, they are deformed symmetrically about the Z-axis 8 so that the Z-axis direction and the X-axis direction are changed. A cushioning effect corresponding to the impact load in the Y-axis direction can be obtained. Further, by dividing the elastic members 4D and 4E, the action of the shearing force can be reduced as compared with the case where all the elastic members 4 are made into one block.
  • FIG. 9 is a cross-sectional view showing a configuration example of the detection device 1 according to the modified example (2) of the first embodiment of the present disclosure.
  • FIG. 10 is a partial perspective view showing a configuration example of the detection device 1 according to the modified example (2) of the first embodiment of the present disclosure.
  • the modified example (2) of the first embodiment is different from the above-described first embodiment in the configurations of the elastic member 4 and the base portion 3B of the detection member 3, and the other configurations are the same. Therefore, in the modified example (2) of the first embodiment, the same parts as those of the first embodiment are designated by the same reference numerals and the description thereof will be omitted.
  • the elastic member 4 has a plurality of spherical elastic members 4F formed in a spherical shape, as shown in FIGS. 9 and 10.
  • the spherical elastic members 4F are attached to the elastic member engaging portions 3Bb of the base portion 3B on opposite sides in the Z-axis direction.
  • the elastic member engaging portion 3Bb is formed with an annular fitting groove 3Bk into which a plurality of spherical elastic members 4F are aligned and fitted on one side (the upper side in the drawing) in the Z-axis direction.
  • the elastic member engaging portion 3Bb is formed with an annular fitting groove 3Bm into which the plurality of spherical elastic members 4F are aligned and fitted on the other side (lower side in the drawing) in the Z-axis direction.
  • the plurality of spherical elastic members 4F are fitted in the fitting groove 3Bk and attached to the elastic member engaging portion 3Bb.
  • the plurality of spherical elastic members 4F fitted in the fitting groove 3Bk come into contact with the contact pieces 5Aa of the first housing 5A.
  • the plurality of spherical elastic members 4F are fitted into the fitting groove 3Bm and attached to the elastic member engaging portion 3Bb.
  • the plurality of spherical elastic members 4F fitted in the fitting groove 3Bm are fitted in the fitting groove 5Bb of the second housing 5B.
  • the output member 2 when an external force is applied in the Z-axis direction, the output member 2 that receives the external force moves in the Z-axis direction.
  • the force sensor 3Aa of the detection unit 3A of the detection member 3 detects the force in the Z-axis direction as the output member 2 moves.
  • the force sensor 3Aa of the detection unit 3A of the detection member 3 is coupled to the output member 2 and directly detects the external force received by the output member 2. As a result, the detection device 1 can ensure the detection accuracy.
  • each spherical elastic member 4F is crushed toward the fitting groove 5Bb side by the movement of the detection member 3 on the other side (lower side in the drawing) of the elastic member engaging portion 3Bb in the Z-axis direction, and is compressed and deformed.
  • Each spherical elastic member 4F buffers the impact load applied from the output member 2 to the force sensor 3Aa of the detection member 3 by its own elastic force.
  • the housing 5 receives the load from each spherical elastic member 4F.
  • the detection device 1 can protect the force sensor 3Aa of the detection unit 3A of the detection member 3 against overload.
  • the auxiliary elastic member 7 When the output member 2 receives an unexpected shock load in the Z-axis direction, the auxiliary elastic member 7 also buffers the shock load applied from the output member 2 to the force sensor 3Aa of the detection member 3 by its own elastic force.
  • the auxiliary elastic member 7 suppresses elastic deformation by each spherical elastic member 4F.
  • the amount of deformation of each spherical elastic member 4F can be adjusted by the auxiliary elastic member 7, and the load limitation of the force sensor 3Aa in the Z-axis direction can be increased.
  • the output member 2 When the output member 2 receives an unexpected impact load in the Z-axis direction, the output member 2 that moves in the Z-axis direction against the elastic force of each spherical elastic member 4F and the auxiliary elastic member 7 is the output shaft.
  • the edge of the other surface 2Bb of the plate 2B contacts the first contact surface 6A that is the stopper mechanism 6.
  • the first contact surface 6A regulates the movement of the output member 2 in the Z-axis direction when the output shaft plate 2B contacts. That is, the output member 2 is prevented from further moving in the Z-axis direction due to the interference in the stopper mechanism 6.
  • the detection device 1 prevents and limits the impact load applied from the output member 2 to the force sensor 3Aa of the detection member 3, and protects the force sensor 3Aa of the detection unit 3A of the detection member 3 against overload. it can.
  • the output member 2 When an external force is applied in the Z-axis direction and the X-axis direction (Y-axis direction), the output member 2 that receives the external force moves so as to incline in the X-axis direction (Y-axis direction) with respect to the Z-axis direction.
  • the force sensor 3Aa of the detection unit 3A of the detection member 3 detects forces in the Z-axis direction and the X-axis direction (Y-axis direction) as the output member 2 moves.
  • the force sensor 3Aa of the detection unit 3A of the detection member 3 is coupled to the output member 2 and directly detects the external force received by the output member 2. As a result, the detection device 1 can ensure the detection accuracy.
  • the output member 2 When the output member 2 receives an unexpected impact load in the Z-axis direction and the X-axis direction (Y-axis direction), the output member 2 and the detection member 3 move in the X-axis direction (Y-axis direction) with respect to the Z-axis direction. Move further so that it tilts in the direction).
  • the spherical elastic member 4F on one side (upper side in the drawing) of the elastic member engaging portion 3Bb in the Z-axis direction is crushed by the contact piece 5Aa of the first housing 5A and compressed and deformed.
  • the spherical elastic member 4F on the other side (lower side in the figure) of the elastic member engaging portion 3Bb in the Z-axis direction is crushed toward the fitting groove 5Bb side and compressed and deformed.
  • the base portion 3B does not contact the inner peripheral surface 5Ba of the second housing 5B in the housing 5 within the range of the compression deformation of the spherical elastic member 4F.
  • Each spherical elastic member 4F that has been compressed and deformed buffers the impact load applied from the output member 2 to the force sensor 3Aa of the detection member 3 by its own elastic force.
  • the housing 5 receives a load from each spherical elastic member 4F that has been compressed and deformed.
  • the detection device 1 can protect the force sensor 3Aa of the detection unit 3A of the detection member 3 against overload.
  • the auxiliary elastic member 7 when the output member 2 receives an unexpected impact load in the Z-axis direction and the X-axis direction (Y-axis direction), the auxiliary elastic member 7 also receives a force sensor from the output member 2 to the detection member 3 by its own elastic force. It buffers the impact load applied to 3Aa.
  • the auxiliary elastic member 7 increases the load limit of each spherical elastic member 4F.
  • the detection device 1 can adjust the deformation amount of each spherical elastic member 4F by the auxiliary elastic member 7, and can increase the load limitation of the force sensor 3Aa in the Z-axis direction and the X-axis direction (Y-axis direction).
  • the output member 2 When the output member 2 receives an unexpected impact load in the Z-axis direction and the X-axis direction (Y-axis direction), the output member 2 resists the elastic force of each spherical elastic member 4F and the auxiliary elastic member 7 in the Z-axis direction.
  • the edge portion of the other surface 2Bb of the output shaft plate 2B abuts on the first abutting surface 6A which is the stopper mechanism 6.
  • the peripheral surface 2Be of the output shaft plate 2B contacts the second contact surface 6B that is the stopper mechanism 6.
  • the first contact surface 6A regulates the movement of the output member 2 in the Z-axis direction when the output shaft plate 2B contacts.
  • the second contact surface 6B restricts the movement of the output member 2 in the X-axis direction (Y-axis direction) when the output shaft plate 2B abuts. That is, the output member 2 is prevented from further moving in the Z-axis direction and the X-axis direction (Y-axis direction) due to the interference in the stopper mechanism 6.
  • the detection device 1 prevents and limits the impact load applied from the output member 2 to the force sensor 3Aa of the detection member 3, and protects the force sensor 3Aa of the detection unit 3A of the detection member 3 against overload. it can.
  • Each spherical elastic member 4F is an elastic body that is deformed by a Z-axis direction, an X-axis direction, a Y-axis direction, and a moment load. Each spherical elastic member 4F determines a set value of overload for protecting the force sensor 3Aa according to its sectional shape and size. Since each spherical elastic member 4F is divided into a plurality of parts around the Z-axis direction, the number of design parameters of the set value is changed more than that of each elastic member 4A, 4B, 4C in the above-described first embodiment. Cheap.
  • each spherical elastic member 4F is divided into a plurality around the Z-axis direction, it is possible to take a large amount of deformation as compared with each elastic member 4A, 4B, 4C in the above-described first embodiment, and manufacturing The error can be reduced.
  • Each spherical elastic member 4F can be a unit provided side by side and can reduce the spring constant as compared with each elastic member 4A, 4B, 4C in the above-described first embodiment, and can cope with a small load limitation. .
  • the spherical elastic members 4F By symmetrically arranging the spherical elastic members 4F about the Z axis 8, when they are overloaded, they are symmetrically deformed about the Z axis 8 and are deformed in the Z axis direction and the Y axis direction. A cushioning effect corresponding to an axial impact load is obtained. Moreover, by dividing each of the spherical elastic members 4F, the action of the shearing force can be reduced as compared with the case where all the elastic members 4 are made into one block.
  • FIG. 11 is a cross-sectional view showing a configuration example of the detection device 1 according to the modified example (3) of the first embodiment of the present disclosure.
  • the modification (3) of the first embodiment is different from the above-described first embodiment in the configuration of the elastic member 4, and the other configurations are the same. Therefore, in the modified example (3) of the first embodiment, the same parts as those of the first embodiment are designated by the same reference numerals and the description thereof will be omitted.
  • the elastic member 4 includes a first elastic member 4A, a second elastic member 4B, and a third elastic member 4C which are continuously and integrally formed by a connecting elastic member 4G.
  • the connecting elastic member 4G connects between the first elastic member 4A and the second elastic member 4B, and contacts the contact piece 5Aa of the first housing 5A and the inner peripheral surface 5Ba of the second housing 5B. Further, the connecting elastic member 4G connects the second elastic member 4B and the third elastic member 4C, and contacts the inner peripheral surface 5Ba of the second housing 5B and the inside of the enlarged fitting groove 5Bb.
  • the first elastic member 4A is an elastic body that is deformed mainly by the upper side in the drawing in the Z-axis direction and a moment load.
  • the second elastic member 4B is an elastic body that is deformed mainly by the X-axis direction, the Y-axis direction, and a moment load.
  • the third elastic member 4C is an elastic body that deforms under the Z-axis direction in the drawing and a moment load.
  • Each of the ring-shaped elastic members 4A, 4B, 4C determines the set value of the overload for protecting the force sensor 3Aa according to its cross-sectional shape and size.
  • the connecting elastic member 4G continuously and integrally connects the elastic members 4A, 4B, 4C, and can suppress the movement of the elastic members 4A, 4B, 4C during compression deformation, and the movement of the output member 2 and the detection member 3 Therefore, the detection accuracy of the force sensor 3Aa of the detection unit 3A of the detection member 3 can be further increased.
  • FIG. 12 is a cross-sectional view showing a configuration example of the detection device 1 according to the second embodiment of the present disclosure.
  • FIG. 12 illustrates the configuration of the first embodiment as an example.
  • the stopper mechanism 6 is formed as a curved surface that connects the first contact surface 6A and the second contact surface 6B in the above-described first embodiment and modification examples (1) to (3) of the first embodiment. It has a curved contact surface 6C.
  • the curved contact surface 6C is provided along the Z axis 8 on the inner peripheral surface of the first housing 5A in the housing 5.
  • the output shaft plate 2B which can be brought into contact with the curved contact surface 6C, has, on the peripheral portion thereof, the other surface 2Bb in the first embodiment and the modified examples (1) to (3) of the first embodiment described above. And a peripheral curved surface 2Bf formed as a curved surface connecting the peripheral surface 2Be. The curved surfaces of the circumferential curved surface 2Bf may contact the curved contact surface 6C.
  • the elastic members 4A, 4B, 4C and the auxiliary members are assisted.
  • the circumferential curved surface 2Bf of the output shaft plate 2B is the stopper mechanism 6. It contacts a certain curved contact surface 6C.
  • the curved contact surface 6C restricts the movement of the output member 2 in a plurality of axial directions in the Z-axis direction and the X-axis direction (Y-axis direction) when the peripheral curved surface 2Bf of the output shaft plate 2B abuts. That is, the output member 2 is prevented from further moving in the Z-axis direction and the X-axis direction (Y-axis direction) in the plural axis directions due to the interference in the stopper mechanism 6.
  • the detection device 1 prevents and limits the impact load applied from the output member 2 to the force sensor 3Aa of the detection member 3, and protects the force sensor 3Aa of the detection unit 3A of the detection member 3 against overload. it can.
  • the stopper mechanism 6 is provided in the housing 5 and limits the load on the force sensor 3Aa by colliding with the output shaft plate 2B of the output member 2 to reduce the clearance between the housing 5 and the output shaft plate 2B. Adjust the overload setting value with.
  • the load limitation on the force sensor 3Aa is determined in advance as a design value depending on the shape and elastic force of each elastic member 4A, 4B, 4C, and the clearance amount between the housing 5 of the stopper mechanism 6 and the output shaft plate 2B. It The clearance amount is preferably about 1 mm to 2 mm, for example.
  • the curved contact surface 6C and the peripheral curved surface 2Bf are in contact with each other, so that mutual deformation can be suppressed, and a stronger load restriction can be dealt with. Further, in the stopper mechanism 6, the curved contact surface 6C and the peripheral curved surface 2Bf have the same or similar curvatures to make surface contact with each other in the Z-axis direction and the X-axis direction (Y-axis direction) of the output member 2. Movement can be controlled appropriately.
  • FIG. 13 is a block diagram showing a configuration example of the detection device 1 according to the third embodiment of the present disclosure.
  • 14 and 15 are cross-sectional views showing a configuration example of the detection device 1 according to the third embodiment of the present disclosure.
  • the configuration of the above-described first embodiment, modification examples (1) to (3) of the first embodiment and the configuration of the second embodiment can be applied to the third embodiment.
  • the third embodiment is different from the above-described first embodiment, modification examples (1) to (3) of the first embodiment, and the second embodiment in that a contact detection unit 12 is provided, and The configuration is the same. Therefore, in the third embodiment, the same parts as those in the first embodiment, the modified examples (1) to (3) of the first embodiment, and the second embodiment will be denoted by the same reference numerals and will not be described. Omit it.
  • FIG. 14 illustrates the configuration of the first embodiment as an example.
  • the contact detector 12 detects the contact between the output shaft plate 2B of the output member 2 and the housing 5 in the stopper mechanism 6. By detecting the contact between the output member 2 and the housing 5, the processing unit 11 can detect that the stopper mechanism 6 is functioning and is in the overloaded state. The processing unit 11 presents to the user the detected overload and the number of times the overload has occurred. In addition, the processing unit 11 may output the overload and the number of times the overload has occurred to the robot control unit 105 of the leg robot 100. The robot control unit 105 can perform control so that the output of the drive motor 103 is suppressed so that overload does not occur.
  • the contact detection unit 12 includes the first contact surface 6A and the second contact surface 6B of the first housing 5A in the housing 5, and the first contact surface 6A and the second contact surface 6B. Electrodes 12A and 12B are provided on the other surface 2Bb of the output shaft plate 2B and the peripheral surface 2Be of the output member 2 that abut on the surface 6B, and the abutting portions of the electrodes 12A and 12B are configured as conductors. Then, the contact detector 12 detects the contact between the output member 2 and the housing 5 based on the resistance value between the conductors due to the energization of the electrodes 12A and 12B. In the case of the second embodiment, the electrodes 12A and 12B are provided on the curved contact surface 6C and the peripheral curved surface 2Bf.
  • the contact detection unit 12 provides a pressure detection sheet 12C on the first contact surface 6A and the second contact surface 6B of the first housing 5A in the housing 5. Then, the contact detection unit 12 detects the contact pressure between the output member 2 and the housing 5 by detecting the pressure of the pressure detection sheet 12C.
  • the pressure detection sheet 12C may be provided on the other surface 2Bb and the peripheral surface 2Be of the output shaft plate 2B of the output member 2 that contacts the first contact surface 6A and the second contact surface 6B. In the case of the second embodiment, the pressure detection sheet 12C is provided on either the curved contact surface 6C or the circumferential curved surface 2Bf.
  • FIG. 16 is a block diagram showing a configuration example of a detection device according to the fourth embodiment of the present disclosure. 17 to 20 are cross-sectional views showing configuration examples of the detection device according to the fourth embodiment of the present disclosure.
  • the fourth embodiment can apply the configurations of the above-described first embodiment, modified examples (1) to (3) of the first embodiment, the second embodiment, and the third embodiment. .
  • the fourth embodiment is different from the above-described first embodiment, the modified examples (1) to (3) of the first embodiment, the second embodiment and the third embodiment in that the inclination acquisition unit 13 is provided.
  • the other configurations are the same, except that they have. Therefore, in the fourth embodiment, the same parts as those in the first embodiment, the modifications (1) to (3) of the first embodiment, the second embodiment and the third embodiment have the same reference numerals. Is attached and the description is omitted. 15 to 20, the configuration of the first embodiment is taken as an example.
  • the inclination acquisition unit 13 acquires the inclination of the force sensor 3Aa with respect to the Z axis 8 as the detection member 3 moves. Since the force sensor 3Aa detects the inclination of the force in the axial direction while the detection member 3 moves, an error may occur between the inclination of itself and the detected inclination.
  • the processing unit 11 corrects the inclination of the force detected by the force sensor 3Aa in the state where the detection member 3 is moved, based on the inclination obtained from the inclination acquisition unit 13. To do. As a result, the inclination of the force detected by the force sensor 3Aa is obtained as the inclination with respect to the Z-axis 8, so that the detection accuracy can be ensured.
  • the inclination acquired by the inclination acquisition unit 13 may be output to the robot control unit 105 of the leg robot 100.
  • the robot control unit 105 can obtain the inclination obtained from the inclination acquisition unit 13 as a variation value. As a result, the robot controller 105 can accurately control the position where the detection device 1 is attached.
  • the inclination acquisition unit 13 can acquire and store the inclination of the force sensor 3Aa with respect to the Z axis 8 in advance by simulation.
  • the load applied to the elastic member 4 when the detection member 3 is tilted in the X-axis direction with respect to the Z-axis 8 and the X-axis direction with reference to the Z-axis 8 of the detection member 3 at this load load The result of having calculated the correlation with the amount of displacement to The elastic member 4 is, for example, the left side portion in FIG. 6 in which the third elastic member 4C is compressed and deformed in FIG.
  • the position indicating the amount of displacement in the X-axis direction with reference to the Z-axis 8 is, for example, the position of the Z-axis 8 on the detection surface to which the output shaft 3Ab of the force sensor 3Aa is connected in FIG.
  • the third elastic member 4C is applied with a load load in the X-axis direction represented by ⁇ and a load load in the Z-direction represented by ⁇ , and the displacement amount in the X-axis direction under each load load is calculated. Correlation has been calculated.
  • the inclination acquisition unit 13 acquires and stores this correlation in advance.
  • the processing unit 11 when the processing unit 11 obtains the Z-axis direction force and the X-axis direction force detected by the force sensor 3Aa, the processing unit 11 applies the Z-axis direction force to the displacement amount in the Z-axis direction in FIG.
  • the processing unit 11 applies the Z-axis direction force to the displacement amount in the Z-axis direction in FIG.
  • the axial force to the displacement amount in the X-axis direction in FIG. 16
  • the displacement amount in the X-axis direction is acquired, and the inclination of the force detected by the force sensor 3Aa is corrected based on this displacement amount.
  • the inclination acquisition unit 13 that acquires and stores this simulation result in advance does not need to add a sensor that acquires the inclination separately, and can downsize the device and reduce the manufacturing cost.
  • the inclination acquisition unit 13 may have a configuration including a laser emitting unit 13Aa and a photo interrupter 13Ab as a laser receiving unit, as shown in FIG.
  • the laser emitting section 13Aa emits a laser and is arranged in the detecting section 3A of the detecting member 3.
  • the photo interrupter 13Ab receives the laser emitted by the laser emitting section 13Aa, and is arranged at the bottom of the second housing 5B in the housing 5.
  • the arrangement of the laser emitting unit 13Aa and the photo interrupter 13Ab may be reversed.
  • the detection member 3 is a moving part that moves, and the housing 5 is a fixed part that is fixed. By detecting the laser emitted from the laser emission part 13Aa as the position of the photo interrupter 13Ab, the force sensor 3Aa of the detection part 3A is detected. The tilt can be detected.
  • the processing unit 11 detects the force based on the inclination of the force sensor 3Aa detected by the laser emission unit 13Aa and the photo interrupter 13Ab.
  • the inclination of the force detected by the force sensor 3Aa is corrected while the member 3 is moved. Since the laser emission unit 13Aa and the photo interrupter 13Ab detect the actual inclination of the force sensor 3Aa, accurate correction can be performed.
  • the inclination acquisition unit 13 may be configured as a capacitance type sensor having a pair of electrodes 13Ba and 13Bb as shown in FIG.
  • One electrode 13Ba is arranged in the detection portion 3A of the detection member 3.
  • the other electrode 13Bb is arranged at the bottom of the second casing 5B in the casing 5.
  • the detection member 3 is a moving part that moves, and the housing 5 is a fixed part that is fixed.
  • the force of the detection part 3A is measured by measuring the relative positional relationship between them by the change in the capacitance of the capacitance type sensor.
  • the inclination of the sensor 3Aa can be detected.
  • the processing unit 11 obtains the force in the Z-axis direction and the force in the X-axis direction detected by the force sensor 3Aa
  • the detection member 3 moves based on the inclination of the force sensor 3Aa detected by the capacitance sensor.
  • the inclination of the force detected by the force sensor 3Aa is corrected in this state. Since the capacitance type sensor detects the actual inclination of the force sensor 3Aa, it can be accurately corrected. Further, the capacitance type sensor has high easiness of manufacturing and can suppress the manufacturing cost.
  • the inclination acquisition unit 13 may be configured as an inertial measurement unit (IMU: Inertial Measurement Unit) 13C as shown in FIG.
  • IMU Inertial Measurement Unit
  • the inertial measurement device 13C is arranged in the detection unit 3A of the detection member 3 and measures the inclination of the force sensor 3Aa by the three-dimensional angular velocity and acceleration of the force sensor 3Aa.
  • the detection member 3 moves based on the inclination of the force sensor 3Aa detected by the inertial measurement device 13C.
  • the inclination of the force detected by the force sensor 3Aa in the state is corrected. Since the inertial measurement device 13C detects the actual inclination of the force sensor 3Aa, it can perform accurate correction.
  • An output member that receives an external force A detection member including a force sensor for detecting the force received by the output member, An elastic member that movably supports the detection member, A detection device having.
  • the force sensor is provided so as to detect a force in the multi-axis direction received by the output member, and the elastic member supports the detection member so as to be movable in the multi-axis direction.
  • the said elastic member is a detection apparatus as described in (2) comprised by the some ring shape elastically deformable with the movement of the said detection member.
  • the said elastic member is a detection apparatus as described in (2) comprised by the some spherical shape elastically deformable with the movement of the said detection member.
  • the said stopper mechanism is a detection apparatus as described in (7) comprised by the curved surface which contacts the said output member mutually.
  • the said stopper mechanism is a detection apparatus as described in (7) or (8) which has a contact detection part which detects the contact at the time of regulation of the movement of the said output member.
  • the said contact detection part is a detection apparatus as described in (9) which makes a contact part a conductor and detects the resistance value between each said conductor.
  • the said contact detection part is a detection apparatus as described in (9) which detects the contact pressure of a contact part.
  • An inclination acquisition unit that acquires an inclination based on a predetermined axis of the detection member, A processing unit that corrects the inclination of the force detected by the force sensor in the moved state based on the inclination obtained from the inclination acquisition unit;
  • the detection device according to any one of (1) to (11), which includes: (13)
  • the inclination acquisition unit acquires in advance information on a correlation between a load applied to a predetermined axis of the elastic member as a reference and a displacement amount of the detection member at the load with respect to a predetermined axis as a reference.
  • the detection unit according to (12) wherein the processing unit corrects a slope of force detected by the force sensor with reference to a predetermined axis based on the information on the correlation.
  • the said inclination acquisition part is a detection apparatus as described in (12) which acquires the inclination of the said detection member with the incident angle of the laser irradiated between the said detection member and a fixed part.
  • the said inclination acquisition part is a detection apparatus as described in (12) which acquires the inclination of the said detection member from the change of the electrostatic capacitance between the said detection member and a fixed part.
  • the said inclination acquisition part is a detection apparatus as described in (12) which acquires the inclination of the said detection member from the three-dimensional angular velocity and acceleration in the said detection member.
  • a robot having the detection device according to any one of (1) to (16) at its tip.

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Abstract

Provided is a detection device (1) that includes: an output member (2) which receives an external force; a detection member (3) which includes a force sensor (3Aa) for detecting the force received by the output member (2); and an elastic member (4) which moveably supports the detection member (3).

Description

検出装置Detector
　本開示は、検出装置に関する。 The present disclosure relates to a detection device.
　外力が加えられる操作体と、操作体に加えられた外力の大きさに応じて変位する弾性体と、弾性体の変位によって外力が伝達される駆動体と、駆動体により押圧される感圧部を有するダイヤフラムと、を有する装置が知られている。 An operating body to which an external force is applied, an elastic body that is displaced according to the magnitude of the external force applied to the operating body, a driving body to which the external force is transmitted by the displacement of the elastic body, and a pressure-sensitive portion that is pressed by the driving body. A diaphragm having a diaphragm is known.
特開２００４－２９９０４５号公報JP-A-2004-299045
　上記の従来技術では、操作体に加えられた外力が弾性体及び駆動体を介してダイヤフラムの感圧部に伝わることで、予期せぬ衝撃負荷が操作体に生じてもこの過負荷を感圧部に直接伝えず感圧部を保護する。しかしながら、上記の従来技術では、外力が弾性体により変位して感圧部に伝わるため、力検出のタイミングが遅れ、外力を正確に検出できず、検出精度が低下する問題がある。 In the above conventional technique, the external force applied to the operating body is transmitted to the pressure-sensitive portion of the diaphragm via the elastic body and the driving body, so that even if an unexpected impact load occurs on the operating body, the overload is pressure-sensitive. Protect the pressure sensitive part without transmitting it directly to the part. However, in the above-described conventional technique, since the external force is displaced by the elastic body and is transmitted to the pressure-sensitive portion, the timing of force detection is delayed, the external force cannot be accurately detected, and the detection accuracy deteriorates.
　そこで、本開示では、過負荷に対して保護し、かつ検出精度を確保することのできる検出装置を提案する。 Therefore, the present disclosure proposes a detection device capable of protecting against overload and ensuring detection accuracy.
　上記の課題を解決するために、本開示に係る一形態の検出装置は、外力を受ける出力部材と、前記出力部材が受けた力を検出する力センサを含む検出部材と、前記検出部材を移動可能に支持する弾性部材と、を有する。 In order to solve the above problems, a detection device according to one aspect of the present disclosure includes an output member that receives an external force, a detection member that includes a force sensor that detects the force received by the output member, and the detection member that moves. And an elastic member for supporting the same.
本開示の第１の実施形態に係る検出装置の構成例を示す断面図である。It is a sectional view showing an example of composition of a detecting device concerning a 1st embodiment of this indication. 本開示の第１の実施形態に係る検出装置の構成例を示す分解斜視図である。It is an exploded perspective view showing an example of composition of a detecting device concerning a 1st embodiment of this indication. 本開示に係る技術が適用される脚ロボットの一例を示す図である。It is a figure showing an example of a leg robot to which a technology concerning this indication is applied. 本開示の第１の実施形態に係る検出装置の構成例を示すブロック図である。FIG. 2 is a block diagram showing a configuration example of a detection device according to the first embodiment of the present disclosure. 本開示の第１の実施形態に係る検出装置の動作を示す断面図である。FIG. 5 is a cross-sectional view showing an operation of the detection device according to the first embodiment of the present disclosure. 本開示の第１の実施形態に係る検出装置の動作を示す断面図である。FIG. 5 is a cross-sectional view showing an operation of the detection device according to the first embodiment of the present disclosure. 本開示の第１の実施形態の変形例（１）に係る検出装置の構成例を示す断面図である。It is sectional drawing which shows the structural example of the detection apparatus which concerns on the modification (1) of 1st Embodiment of this indication. 本開示の第１の実施形態の変形例（１）に係る検出装置の構成例を示す部分斜視図である。It is a partial perspective view which shows the structural example of the detection apparatus which concerns on the modification (1) of 1st Embodiment of this indication. 本開示の第１の実施形態の変形例（２）に係る検出装置の構成例を示す断面図である。It is a sectional view showing an example of composition of a detecting device concerning modification (2) of a 1st embodiment of this indication. 本開示の第１の実施形態の変形例（２）に係る検出装置の構成例を示す部分斜視図である。It is a partial perspective view showing an example of composition of a detecting device concerning modification (2) of a 1st embodiment of this indication. 本開示の第１の実施形態の変形例（３）に係る検出装置の構成例を示す断面図である。It is sectional drawing which shows the structural example of the detection apparatus which concerns on the modification (3) of 1st Embodiment of this indication. 本開示の第２の実施形態に係る検出装置の構成例を示す断面図である。It is sectional drawing which shows the structural example of the detection apparatus which concerns on the 2nd Embodiment of this indication. 本開示の第３の実施形態に係る検出装置の構成例を示すブロック図である。It is a block diagram which shows the structural example of the detection apparatus which concerns on the 3rd Embodiment of this indication. 本開示の第３の実施形態に係る検出装置の構成例を示す断面図である。It is sectional drawing which shows the structural example of the detection apparatus which concerns on the 3rd Embodiment of this indication. 本開示の第３の実施形態に係る検出装置の構成例を示す断面図である。It is sectional drawing which shows the structural example of the detection apparatus which concerns on the 3rd Embodiment of this indication. 本開示の第４の実施形態に係る検出装置の構成例を示すブロック図である。It is a block diagram which shows the structural example of the detection apparatus which concerns on the 4th Embodiment of this indication. 本開示の第４の実施形態に係る検出装置の構成例を示す断面図である。It is sectional drawing which shows the structural example of the detection apparatus which concerns on the 4th Embodiment of this indication. 本開示の第４の実施形態に係る検出装置の構成例を示す断面図である。It is sectional drawing which shows the structural example of the detection apparatus which concerns on the 4th Embodiment of this indication. 本開示の第４の実施形態に係る検出装置の構成例を示す断面図である。It is sectional drawing which shows the structural example of the detection apparatus which concerns on the 4th Embodiment of this indication. 本開示の第４の実施形態に係る検出装置の構成例を示す断面図である。It is sectional drawing which shows the structural example of the detection apparatus which concerns on the 4th Embodiment of this indication.
　以下に、本開示の実施形態について図面に基づいて詳細に説明する。なお、以下の各実施形態において、同一の部位には同一の符号を付することにより重複する説明を省略する。 Hereinafter, an embodiment of the present disclosure will be described in detail with reference to the drawings. In addition, in each of the following embodiments, the same reference numerals are given to the same portions, and duplicate description will be omitted.
（第１の実施形態）
［第１の実施形態に係る検出装置の構成］
　図１は、本開示の第１の実施形態に係る検出装置１の構成例を示す断面図である。図２は、本開示の第１の実施形態に係る検出装置１の構成例を示す分解斜視図である。 (First embodiment)
[Configuration of the detection device according to the first embodiment]
FIG. 1 is a cross-sectional view showing a configuration example of a detection device 1 according to the first embodiment of the present disclosure. FIG. 2 is an exploded perspective view showing a configuration example of the detection device 1 according to the first embodiment of the present disclosure.
　図１及び図２に示すように、検出装置１は、出力部材２と、検出部材３と、弾性部材４と、筐体５と、ストッパ機構６と、補助弾性部材７と、を有する。 As shown in FIGS. 1 and 2, the detection device 1 includes an output member 2, a detection member 3, an elastic member 4, a housing 5, a stopper mechanism 6, and an auxiliary elastic member 7.
　出力部材２は、外力を受け、この外力を検出部材３に伝達するものである。出力部材２は、先端部２Ａと、出力軸プレート２Ｂと、を有する。先端部２Ａは、半球形状に形成され、ゴムのように衝撃を吸収し得る材料により構成されている。先端部２Ａは、半球形状において、球面をなす先端面２Ａａと、平坦面をなす取付面２Ａｂと、を有する。先端部２Ａは、先端面２Ａａ側から取付面２Ａｂに貫通する複数のネジ２Ａｃを有する。 The output member 2 receives an external force and transmits this external force to the detection member 3. The output member 2 has a tip portion 2A and an output shaft plate 2B. The tip portion 2A is formed in a hemispherical shape, and is made of a material capable of absorbing impact, such as rubber. The tip portion 2A has a hemispherical shape and has a spherical tip surface 2Aa and a flat attachment surface 2Ab. The tip portion 2A has a plurality of screws 2Ac that penetrate the attachment surface 2Ab from the tip surface 2Aa side.
　出力軸プレート２Ｂは、円盤形状に形成され、先端部２Ａよりも硬質なプラスチック等の材料により構成さている。出力軸プレート２Ｂは、円盤形状において、先端部２Ａの取付面２Ａｂに対向する一方の面２Ｂａと、一方の面２Ｂａとは反対側に向く他方の面２Ｂｂと、を有する。出力軸プレート２Ｂは、一方の面２Ｂａから他方の面２Ｂｂに貫通する複数のネジ孔２Ｂｃを有する。出力軸プレート２Ｂは、他方の面２Ｂｂにおいて、検出部材３が結合される結合凹部２Ｂｄを有する。先端部２Ａと出力軸プレート２Ｂとは、先端部２Ａのネジ２Ａｃを出力軸プレート２Ｂのネジ孔２Ｂｃに螺込むことで、取付面２Ａｂ及び一方の面２Ｂａが当接し、一体に結合される。また、出力軸プレート２Ｂは、結合凹部２Ｂｄに検出部材３が結合される。 The output shaft plate 2B is formed in a disc shape and is made of a material such as plastic that is harder than the tip 2A. The output shaft plate 2B has a disk shape, and has one surface 2Ba facing the mounting surface 2Ab of the tip portion 2A and the other surface 2Bb facing the side opposite to the one surface 2Ba. The output shaft plate 2B has a plurality of screw holes 2Bc penetrating from one surface 2Ba to the other surface 2Bb. The output shaft plate 2B has a coupling recess 2Bd to which the detection member 3 is coupled, on the other surface 2Bb. The tip portion 2A and the output shaft plate 2B are screwed into the screw hole 2Bc of the output shaft plate 2B with the screw 2Ac of the tip portion 2A so that the mounting surface 2Ab and the one surface 2Ba are in contact with each other and are integrally coupled. The detection member 3 is coupled to the coupling recess 2Bd of the output shaft plate 2B.
　ここで、出力部材２において、先端部２Ａの半球形状の中心と出力軸プレート２Ｂの円盤形状の中心とは、ほぼ一致しており、図１及び図２における一点鎖線は、各中心を通過する中心線８である。出力軸プレート２Ｂの結合凹部２Ｂｄは、出力軸プレート２Ｂの円盤形状の中心に設けられており、中心線８上に配置されている。本実施形態において、中心線８をＺ軸といい、その延在方向をＺ軸方向という。 Here, in the output member 2, the center of the hemispherical shape of the tip portion 2A and the center of the disk shape of the output shaft plate 2B substantially coincide with each other, and the alternate long and short dash line in FIGS. 1 and 2 passes through each center. It is the center line 8. The coupling recess 2Bd of the output shaft plate 2B is provided at the center of the disc shape of the output shaft plate 2B, and is arranged on the center line 8. In the present embodiment, the center line 8 is referred to as the Z axis, and its extending direction is referred to as the Z axis direction.
　検出部材３は、検出部３Ａと、土台部３Ｂと、を有する。検出部３Ａは、内部に起歪体からなる力センサ３Ａａを内蔵し、力センサ３Ａａのベースとなる。本実施形態において力センサ３Ａａは、３軸力センサが適用される。３軸は、Ｚ軸８、Ｚ軸８に直交するＸ軸９、及びＺ軸８及びＸ軸９に直交するＹ軸１０である。Ｘ軸９及びＹ軸１０は、Ｚ軸８に直交する平面に存在する。Ｘ軸９の延在方向をＸ軸方向といい、Ｙ軸１０の延在方向をＹ軸方向という。本実施形態の力センサ３Ａａは、Ｚ軸８、Ｘ軸９、Ｙ軸１０に沿って受ける力を検出する。なお、力センサ３Ａａは、Ｚ軸８のみに沿って受ける力を検出する１軸力センサや、Ｚ軸８、Ｘ軸９及びＹ軸１０以外の他の軸に沿って受ける力を検出する多軸力センサであってもよい。検出部３Ａは、Ｚ軸８上においてＺ軸方向に沿って延在する出力軸３Ａｂを有する。出力軸３Ａｂは、力センサ３Ａａに他部材を介さず直接的に結合され、出力部材２に向けて突出している。出力軸３Ａｂは、力センサ３Ａａにおいて力を検出する箇所となる。出力軸３Ａｂは、出力軸プレート２Ｂの結合凹部２Ｂｄに他部材を介さず直接的に結合される。また、検出部３Ａは、Ｚ軸方向に貫通する複数のネジ３Ａｃを有する。また、検出部３Ａは、その側部に、力センサ３Ａａの電源線や信号線を含むケーブルを通す筒部材３Ａｄが突出して設けられている。 The detection member 3 has a detection unit 3A and a base unit 3B. The detection unit 3A internally includes a force sensor 3Aa made of a strain generating body and serves as a base of the force sensor 3Aa. In this embodiment, a force sensor 3Aa is a triaxial force sensor. The three axes are a Z axis 8, an X axis 9 orthogonal to the Z axis 8, and a Y axis 10 orthogonal to the Z axis 8 and the X axis 9. The X axis 9 and the Y axis 10 lie in a plane orthogonal to the Z axis 8. The extending direction of the X-axis 9 is called the X-axis direction, and the extending direction of the Y-axis 10 is called the Y-axis direction. The force sensor 3Aa of the present embodiment detects a force received along the Z axis 8, the X axis 9, and the Y axis 10. The force sensor 3Aa is a uniaxial force sensor that detects a force received only along the Z-axis 8 or a multi-axis force sensor that detects a force received along another axis other than the Z-axis 8, the X-axis 9 and the Y-axis 10. It may be an axial force sensor. The detection unit 3A has an output shaft 3Ab extending along the Z-axis direction on the Z-axis 8. The output shaft 3Ab is directly coupled to the force sensor 3Aa without any other member, and projects toward the output member 2. The output shaft 3Ab serves as a location where force is detected by the force sensor 3Aa. The output shaft 3Ab is directly coupled to the coupling recess 2Bd of the output shaft plate 2B without any other member. Further, the detection unit 3A has a plurality of screws 3Ac penetrating in the Z-axis direction. Further, the detection unit 3A is provided on its side with a cylindrical member 3Ad projecting through which a cable including a power supply line and a signal line of the force sensor 3Aa is inserted.
　土台部３Ｂは、検出部３Ａが固定される検出部固定部３Ｂａと、弾性部材４が係わり合う弾性部材係合部３Ｂｂと、を有する。検出部固定部３Ｂａと弾性部材係合部３Ｂｂとは、Ｚ軸方向に延在する軸部３Ｂｃを介して一体に連続して形成されている。検出部固定部３Ｂａは、Ｚ軸８を中心とする円盤形状に形成されて検出部３Ａの各ネジ３Ａｃが螺込まれる複数のネジ孔３Ｂｄを有する。従って、検出部３Ａと検出部固定部３Ｂａとは、検出部３Ａのネジ３Ａｃを検出部固定部３Ｂａのネジ孔３Ｂｄに螺込むことで、一体に結合される。弾性部材係合部３Ｂｂは、弾性部材４が取り付けられたり、弾性部材４が接触したりするものである。本実施形態では、弾性部材４が複数のリング状に形成されており、弾性部材係合部３Ｂｂは、リング状の弾性部材４を嵌合する円環状の嵌合溝３Ｂｅや、リング状の弾性部材４が接触する平坦な接触面３Ｂｆを有する。具体的に、弾性部材係合部３Ｂｂは、Ｚ軸８を中心とする円柱形状に形成されている。そして、弾性部材係合部３Ｂｂは、検出部３Ａが固定される検出部固定部３Ｂａ側の円形状の面に、軸部３Ｂｃを囲むように円環状の嵌合溝３Ｂｅが形成されている。また、弾性部材係合部３Ｂｂは、その周面に沿って円環状の嵌合溝３Ｂｅが形成されている。また、弾性部材係合部３Ｂｂは、嵌合溝３Ｂｅが形成された円形状の面とは反対側に向く円形状の面が接触面３Ｂｆとして形成されている。また、弾性部材係合部３Ｂｂは、接触面３Ｂｆが形成された面においてＺ軸８を中心として凹んで設けられて補助弾性部材７が嵌合する嵌合凹部３Ｂｇが形成されている。 The base portion 3B has a detection portion fixing portion 3Ba to which the detection portion 3A is fixed, and an elastic member engagement portion 3Bb with which the elastic member 4 is engaged. The detection portion fixing portion 3Ba and the elastic member engagement portion 3Bb are integrally and continuously formed via a shaft portion 3Bc extending in the Z-axis direction. The detection part fixing part 3Ba has a plurality of screw holes 3Bd formed in a disk shape centering on the Z axis 8 and into which the respective screws 3Ac of the detection part 3A are screwed. Therefore, the detection unit 3A and the detection unit fixing unit 3Ba are integrally coupled by screwing the screw 3Ac of the detection unit 3A into the screw hole 3Bd of the detection unit fixing unit 3Ba. The elastic member engaging portion 3Bb is used to attach the elastic member 4 or to contact the elastic member 4. In the present embodiment, the elastic member 4 is formed in a plurality of ring shapes, and the elastic member engaging portion 3Bb has a ring-shaped fitting groove 3Be for fitting the ring-shaped elastic member 4 or a ring-shaped elastic member. It has a flat contact surface 3Bf with which the member 4 contacts. Specifically, the elastic member engaging portion 3Bb is formed in a columnar shape with the Z axis 8 as the center. The elastic member engaging portion 3Bb has an annular fitting groove 3Be formed so as to surround the shaft portion 3Bc on the circular surface on the detection portion fixing portion 3Ba side to which the detection portion 3A is fixed. Further, the elastic member engaging portion 3Bb has an annular fitting groove 3Be formed along the circumferential surface thereof. Further, the elastic member engaging portion 3Bb has a circular surface facing the opposite side to the circular surface on which the fitting groove 3Be is formed as the contact surface 3Bf. Further, the elastic member engaging portion 3Bb is provided with a fitting concave portion 3Bg in which the auxiliary elastic member 7 is fitted so as to be recessed about the Z axis 8 on the surface on which the contact surface 3Bf is formed.
　弾性部材４は、上述したように、ゴム等のような弾性材料により構成されており、リンク状に形成され、複数設けられている。具体的に、弾性部材４は、弾性部材係合部３Ｂｂにおいて円形状の面に形成された嵌合溝３Ｂｅに嵌合する第一弾性部材４Ａと、弾性部材係合部３Ｂｂにおいて周面に形成された嵌合溝３Ｂｅに嵌合する第二弾性部材４Ｂと、弾性部材係合部３Ｂｂにおいて接触面３Ｂｆに接触する第三弾性部材４Ｃと、を有している。リング状の各弾性部材４Ａ，４Ｂ，４Ｃは、Ｚ軸８を中心として配置される。 As described above, the elastic member 4 is made of an elastic material such as rubber, is formed in a link shape, and is provided in plural. Specifically, the elastic member 4 is formed on the circumferential surface of the elastic member engaging portion 3Bb and the first elastic member 4A that fits into the fitting groove 3Be formed on the circular surface of the elastic member engaging portion 3Bb. The second elastic member 4B that fits in the fitted groove 3Be and the third elastic member 4C that contacts the contact surface 3Bf in the elastic member engaging portion 3Bb are included. The ring-shaped elastic members 4A, 4B, 4C are arranged with the Z axis 8 as the center.
　筐体５は、出力部材２と、検出部材３と、弾性部材４と、を収容するケースである。筐体５は、Ｚ軸８を中心とする有底の円筒形状に形成されている。筐体５は、Ｚ軸方向で２分割して構成され、第一筐体５Ａと、第二筐体５Ｂと、を有する。第一筐体５Ａは、出力部材２及び検出部材３の検出部３Ａを囲むように円筒形状に形成されている。第一筐体５Ａは、弾性部材４の第一弾性部材４Ａが接触する接触片５Ａａが、内面からＺ軸８に向けて突出し周方向に円環状に連続して形成されている。接触片５ＡａのＺ軸８側となる内側は、円形状の貫通孔として形成されており、第一筐体５Ａと第二筐体５Ｂとの結合時に検出部材３における土台部３Ｂの検出部固定部３Ｂａが貫通できるようになっている。第一筐体５Ａは、図２に示すように、第二筐体５Ｂ側の外周縁に円環状の結合片５Ａｂが形成されている。第一筐体５Ａは、Ｚ軸方向に沿って結合片５Ａｂを貫通する複数のネジ５Ａｃを有する。また、第一筐体５Ａは、その側部に、検出部材３の検出部３Ａにおける筒部材３Ａｄを第一筐体５Ａの外部に延在させてケーブルを通すための切欠部５Ａｄが形成されている。 The housing 5 is a case that houses the output member 2, the detection member 3, and the elastic member 4. The housing 5 is formed in a bottomed cylindrical shape centered on the Z axis 8. The housing 5 is divided into two in the Z-axis direction, and has a first housing 5A and a second housing 5B. The first housing 5A is formed in a cylindrical shape so as to surround the output member 2 and the detection portion 3A of the detection member 3. In the first housing 5A, a contact piece 5Aa with which the first elastic member 4A of the elastic member 4 comes into contact is formed continuously from the inner surface toward the Z axis 8 in an annular shape in the circumferential direction. The inside of the contact piece 5Aa, which is on the Z-axis 8 side, is formed as a circular through hole, and when the first housing 5A and the second housing 5B are coupled, the detection portion of the base portion 3B of the detection member 3 is fixed. The portion 3Ba can be penetrated. As shown in FIG. 2, the first housing 5A has an annular coupling piece 5Ab formed on the outer peripheral edge on the second housing 5B side. The first housing 5A has a plurality of screws 5Ac that penetrate the coupling piece 5Ab along the Z-axis direction. Further, the first housing 5A is provided with a cutout portion 5Ad on a side portion thereof for extending the tubular member 3Ad in the detection portion 3A of the detection member 3 to the outside of the first housing 5A and passing a cable therethrough. There is.
　第二筐体５Ｂは、検出部材３の土台部３Ｂ及び弾性部材４を囲むように有底の円筒形状に形成されている。第二筐体５Ｂは、その内周面５Ｂａに弾性部材４の第二弾性部材４Ｂが接触する。第二筐体５Ｂは、その底面に弾性部材４の第三弾性部材４Ｃが嵌合する円環状の嵌合溝５Ｂｂが形成されている。第二筐体５Ｂは、その底面であって嵌合溝５Ｂｂの内側に補助弾性部材７が嵌合する嵌合凹部５Ｂｃが形成されている。第二筐体５Ｂは、図２に示すように、第一筐体５Ａ側の外周縁に円環状の結合片５Ｂｄが形成されている。第二筐体５Ｂは、結合片５Ａｂに各ネジ５Ａｃが螺込まれる複数のネジ孔５Ｂｅを有する。従って、第一筐体５Ａと第二筐体５Ｂとは、ネジ５Ａｃをネジ孔５Ｂｅに螺込むことで、一体に結合される。 The second housing 5B is formed in a bottomed cylindrical shape so as to surround the base portion 3B of the detection member 3 and the elastic member 4. The second elastic member 4B of the elastic member 4 contacts the inner peripheral surface 5Ba of the second housing 5B. An annular fitting groove 5Bb into which the third elastic member 4C of the elastic member 4 is fitted is formed on the bottom surface of the second housing 5B. The second housing 5B has a fitting recess 5Bc on the bottom surface thereof, into which the auxiliary elastic member 7 is fitted, inside the fitting groove 5Bb. As shown in FIG. 2, the second housing 5B has an annular coupling piece 5Bd formed on the outer peripheral edge on the first housing 5A side. The second housing 5B has a plurality of screw holes 5Be into which the respective screws 5Ac are screwed into the coupling piece 5Ab. Therefore, the first housing 5A and the second housing 5B are integrally coupled by screwing the screw 5Ac into the screw hole 5Be.
　ストッパ機構６は、筐体５における第一筐体５Ａの内周面に形成された段部により構成されている。ストッパ機構６は、出力部材２における出力軸プレート２Ｂの他方の面２Ｂｂの縁部に向く第一当接面６Ａと、第一筐体５Ａの内周面であって出力軸プレート２Ｂの周面２Ｂｅに向く第二当接面６Ｂと、を有する。即ち、ストッパ機構６は、出力軸プレート２Ｂが第一当接面６Ａや第二当接面６Ｂに当接することで出力部材２の移動を規制する。 The stopper mechanism 6 is composed of a step portion formed on the inner peripheral surface of the first casing 5A in the casing 5. The stopper mechanism 6 includes a first contact surface 6A facing the edge of the other surface 2Bb of the output shaft plate 2B of the output member 2, and an inner peripheral surface of the first housing 5A that is a peripheral surface of the output shaft plate 2B. The second contact surface 6B facing 2Be. That is, the stopper mechanism 6 regulates the movement of the output member 2 by the output shaft plate 2B coming into contact with the first contact surface 6A and the second contact surface 6B.
　補助弾性部材７は、エラストマ等のような弾性材料により構成されている。補助弾性部材７は、円筒形状に形成され、検出部材３における土台部３Ｂの弾性部材係合部３Ｂｂに形成されている嵌合凹部３Ｂｇと、筐体５における第二筐体５Ｂに形成されている嵌合凹部５Ｂｃと、に嵌合されてＺ軸８を中心として配置される。 The auxiliary elastic member 7 is made of an elastic material such as elastomer. The auxiliary elastic member 7 is formed in a cylindrical shape, and is formed in the fitting concave portion 3Bg formed in the elastic member engaging portion 3Bb of the base portion 3B of the detection member 3 and the second casing 5B of the casing 5. It is fitted to the fitting recessed portion 5Bc and is arranged around the Z axis 8.
　このような構成の検出装置１は、その組み立てに際し、筐体５における第二筐体５Ｂに形成されている嵌合凹部５Ｂｃに、補助弾性部材７を嵌合し、第二筐体５Ｂに形成されている嵌合溝５Ｂｂに、第三弾性部材４Ｃが嵌合する。また、検出部材３における土台部３Ｂの弾性部材係合部３Ｂｂに形成されている各嵌合溝３Ｂｅにそれぞれ第一弾性部材４Ａと第二弾性部材４Ｂとを嵌合する。そして、土台部３Ｂを第二筐体５Ｂに挿入し、弾性部材係合部３Ｂｂに形成されている嵌合凹部３Ｂｇに、補助弾性部材７を嵌合する。この時、第二筐体５Ｂの内周面５Ｂａに第二弾性部材４Ｂが接触し、弾性部材係合部３Ｂｂの接触面３Ｂｆに第三弾性部材４Ｃが接触する。その後、第二筐体５Ｂに第一筐体５Ａを結合する。この時、第一筐体５Ａの接触片５Ａａが第一弾性部材４Ａに接触する。これにより検出部材３における土台部３Ｂが、第一弾性部材４Ａ、第二弾性部材４Ｂ、第三弾性部材４Ｃ及び補助弾性部材７と共に第二筐体５Ｂの内部に収容され、第一弾性部材４Ａ、第二弾性部材４Ｂ、第三弾性部材４Ｃ及び補助弾性部材７の弾性力により第二筐体５Ｂの内部において移動可能に支持される。続いて、検出部材３において土台部３Ｂに検出部３Ａを結合して固定する。そして、検出部３Ａの出力軸３Ａｂと出力軸プレート２Ｂとを結合する。また、出力軸プレート２Ｂと先端部２Ａとを結合する。このように構成した検出装置１において、出力部材２は、先端部２ＡによりＺ軸８、Ｘ軸９、Ｙ軸１０に添う各軸方向の外力を受け、この外力を出力軸プレート２Ｂを介して検出部材３の検出部３Ａに伝達する。検出部３Ａは、各軸方向の外力を検出する。 When the detection apparatus 1 having such a configuration is assembled, the auxiliary elastic member 7 is fitted into the fitting recess 5Bc formed in the second housing 5B of the housing 5 to form the second housing 5B. The third elastic member 4C is fitted in the fitted groove 5Bb. Further, the first elastic member 4A and the second elastic member 4B are fitted into the fitting grooves 3Be formed in the elastic member engaging portion 3Bb of the base portion 3B of the detection member 3, respectively. Then, the base portion 3B is inserted into the second housing 5B, and the auxiliary elastic member 7 is fitted into the fitting concave portion 3Bg formed in the elastic member engaging portion 3Bb. At this time, the second elastic member 4B contacts the inner peripheral surface 5Ba of the second housing 5B, and the third elastic member 4C contacts the contact surface 3Bf of the elastic member engaging portion 3Bb. Then, the first housing 5A is joined to the second housing 5B. At this time, the contact piece 5Aa of the first housing 5A comes into contact with the first elastic member 4A. As a result, the base portion 3B of the detection member 3 is housed inside the second housing 5B together with the first elastic member 4A, the second elastic member 4B, the third elastic member 4C, and the auxiliary elastic member 7, and the first elastic member 4A. The elastic force of the second elastic member 4B, the third elastic member 4C, and the auxiliary elastic member 7 is movably supported inside the second housing 5B. Subsequently, in the detection member 3, the detection unit 3A is joined and fixed to the base portion 3B. Then, the output shaft 3Ab of the detection unit 3A and the output shaft plate 2B are coupled. Further, the output shaft plate 2B and the tip portion 2A are connected. In the detection device 1 configured as described above, the output member 2 receives an external force in each axial direction along the Z axis 8, the X axis 9, and the Y axis 10 by the tip portion 2A, and the external force is transmitted via the output shaft plate 2B. The signal is transmitted to the detection unit 3A of the detection member 3. 3 A of detection parts detect the external force of each axial direction.
［第１の実施形態に係る検出装置の適用例］
　図３は、本開示に係る技術が適用される脚ロボット１００の一例を示す図である。図４は、本開示の第１の実施形態に係る検出装置１の構成例を示すブロック図である。 [Application Example of Detection Device According to First Embodiment]
FIG. 3 is a diagram showing an example of a leg robot 100 to which the technology according to the present disclosure is applied. FIG. 4 is a block diagram showing a configuration example of the detection device 1 according to the first embodiment of the present disclosure.
　脚ロボット１００は、図示しないロボット本体を支持する支持装置であって、図３では、ロボット本体において、脚ロボット１００が取り付けられる取付け部分１０１が示されている。 The leg robot 100 is a support device that supports a robot body (not shown), and in FIG. 3, a mounting portion 101 to which the leg robot 100 is attached is shown in the robot body.
　脚ロボット１００は、リンク機構１０２と、駆動モータ１０３と、一対の非円形ギヤ１０４と、を有する。脚ロボット１００は、ロボット制御部１０５（図６参照）が備えられ、ロボット制御部１０５から出力される動作指示に基づいて、駆動モータ１０３の駆動が制御されるように構成される。駆動モータ１０３から出力される動力は、一対の非円形ギヤ１０４を介して、リンク機構１０２へ出力される。 The legged robot 100 has a link mechanism 102, a drive motor 103, and a pair of non-circular gears 104. The legged robot 100 includes a robot control unit 105 (see FIG. 6), and is configured to control the drive of the drive motor 103 based on an operation instruction output from the robot control unit 105. The power output from the drive motor 103 is output to the link mechanism 102 via the pair of non-circular gears 104.
　一対の非円形ギヤ１０４は、駆動モータ１０３から出力される動力を、リンク機構１０２の姿勢に応じた減速比で、リンク機構１０２へ出力する。一対の非円形ギヤ１０４は、入力側ギヤ１０４Ａと、出力側ギヤ１０４Ｂと、を有する。入力側ギヤ１０４Ａは、駆動モータ１０３の回転軸１０３Ａに直接的又は間接的に連結されている。出力側ギヤ１０４Ｂは、入力側ギヤ１０４Ａに噛み合っている。出力側ギヤ１０４Ｂの回動角が入力側ギヤ１０４Ａの回動角に対して非線形性を有することにより、リンク機構１０２の姿勢に応じた減速比の変更を実現することができる。 The pair of non-circular gears 104 outputs the power output from the drive motor 103 to the link mechanism 102 at a speed reduction ratio according to the attitude of the link mechanism 102. The pair of non-circular gears 104 has an input gear 104A and an output gear 104B. The input side gear 104A is directly or indirectly coupled to the rotary shaft 103A of the drive motor 103. The output side gear 104B meshes with the input side gear 104A. Since the rotation angle of the output side gear 104B has nonlinearity with respect to the rotation angle of the input side gear 104A, the reduction ratio can be changed according to the attitude of the link mechanism 102.
　リンク機構１０２は、リンク１０２Ａと、出力側ギヤ１０４Ｂの一部であるリンク１０２Ｂと、リンク１０２Ｃと、リンク１０２Ｄと、リンク１０２Ｅと、リンク１０２Ｆと、を含む。 The link mechanism 102 includes a link 102A, a link 102B that is a part of the output gear 104B, a link 102C, a link 102D, a link 102E, and a link 102F.
　リンク１０２Ａは、一対の非円形ギヤ１０４及び駆動モータ１０３が設けられる。リンク１０２Ａは、一端側において、取付け部分１０１に対し回転軸１０３Ａまわりに相対的に回転自在であり、入力側ギヤ１０４Ａ及び駆動モータ１０３が設けられる。リンク１０２Ａは、一端側寄りに、出力側ギヤ１０４Ｂが設けられる。入力側ギヤ１０４Ａは、駆動モータ１０３の回転軸１０３Ａを介してリンク１０２Ａと接続され、リンク１０２Ａに対して相対的に回動自在である。出力側ギヤ１０４Ｂは、回転軸１０６を介してリンク１０２Ａと接続され、リンク１０２Ａに対して相対的に回動自在である。駆動モータ１０３は、リンク１０２Ａに固定される。リンク１０２Ａは、他端側において、リンク１０２Ｄの中央側に対し軸部１０６Ａまわりに相対的に回転自在に接続されている。リンク１０２Ａは、他端側寄りにおいて、リンク１０２Ｅの一端側に対し軸部１０６Ｂまわりに相対的に回転自在に接続されている。 The link 102A is provided with a pair of non-circular gears 104 and a drive motor 103. The link 102A is relatively rotatable around the rotation shaft 103A with respect to the mounting portion 101 at one end side, and is provided with an input side gear 104A and a drive motor 103. The output side gear 104B is provided near the one end of the link 102A. The input side gear 104A is connected to the link 102A via the rotary shaft 103A of the drive motor 103 and is rotatable relative to the link 102A. The output side gear 104B is connected to the link 102A via the rotating shaft 106 and is rotatable relative to the link 102A. The drive motor 103 is fixed to the link 102A. The link 102A is rotatably connected to the center side of the link 102D around the shaft portion 106A at the other end. The link 102A is rotatably connected to the one end side of the link 102E around the shaft portion 106B near the other end side.
　リンク１０２Ｂは、出力側ギヤ１０４Ｂの一部によって構成される。リンク１０２Ｂは、リンク１０２Ｃの一端側と軸部１０６Ｃまわりに相対的に回転自在に接続される。リンク１０２Ｃは、他端側において、リンク１０２Ｄの一端部と軸部１０６Ｄまわりに相対的に回転自在に接続される。リンク１０２Ｄは、他端側において、リンク１０２Ｆの中央側に対し軸部１０６Ｅまわりに相対的に回転自在に接続される。リンク１０２Ｅは、他端側において、リンク１０２Ｆの一端側に対し軸部１０６Ｆまわりに相対的に回転自在に接続される。リンク１０２Ｆは、他端側が脚ロボット１００の足先となり、この足先に検出装置１が取り付けられている。検出装置１は、筐体５がリンク１０２Ｆの他端側に固定され、１０２Ｆの他端側の先に出力部材２が向くように取り付けられている。 The link 102B is composed of a part of the output side gear 104B. The link 102B is relatively rotatably connected to one end of the link 102C and around the shaft portion 106C. The link 102C is relatively rotatably connected to the one end of the link 102D and the shaft 106D at the other end. The link 102D is rotatably connected to the center side of the link 102F around the shaft portion 106E at the other end. The link 102E is rotatably connected to the one end of the link 102F around the shaft 106F at the other end. The other end of the link 102F is the tip of the leg robot 100, and the detection device 1 is attached to the tip of the leg. In the detection device 1, the housing 5 is fixed to the other end side of the link 102F, and the output member 2 is attached to the tip of the other end side of 102F so as to face the output member 2.
　従って、脚ロボット１００は、駆動モータ１０３から出力される動力が一対の非円形ギヤ１０４を介してリンク機構１０２へ出力される。リンク機構１０２は、駆動モータ１０３から出力される動力に応じて伸縮作動する。検出装置１は、リンク機構１０２の伸縮に伴い床に接地し、この時の接地圧を外力として検出する。 Therefore, in the leg robot 100, the power output from the drive motor 103 is output to the link mechanism 102 via the pair of non-circular gears 104. The link mechanism 102 expands and contracts according to the power output from the drive motor 103. The detection device 1 grounds on the floor as the link mechanism 102 expands and contracts, and detects the ground pressure at this time as an external force.
　検出装置１は、図４に示すように、処理部１１を有する。処理部１１は、ＣＰＵ（Central　Processing　Unit）等を含んで構成されており、検出部３Ａの力センサ３ＡａによるＺ軸８、Ｘ軸９、Ｙ軸１０に沿う力の検出結果を力情報として演算処理し、脚ロボット１００のロボット制御部１０５に出力する。ロボット制御部１０５は、ＣＰＵ（Central　Processing　Unit）等を含んで構成されており、処理部１１から入力した力情報に基づいて駆動モータ１０３に動作指示を出力する。 The detection device 1 has a processing unit 11, as shown in FIG. The processing unit 11 is configured to include a CPU (Central Processing Unit) and the like, and calculates the force detection results along the Z-axis 8, X-axis 9, and Y-axis 10 by the force sensor 3Aa of the detection unit 3A as force information. It is processed and output to the robot control unit 105 of the leg robot 100. The robot control unit 105 is configured to include a CPU (Central Processing Unit) and the like, and outputs an operation instruction to the drive motor 103 based on the force information input from the processing unit 11.
　なお、本開示に係る技術の適用は、上述した脚ロボット１００に限定されるものではなく、例えば、マニピュレータ等の他のロボットにも適用が可能である。 Note that the application of the technology according to the present disclosure is not limited to the leg robot 100 described above, and may be applied to other robots such as a manipulator, for example.
［第１の実施形態に係る検出装置の動作］
　図５及び図６は、本開示の第１の実施形態に係る検出装置１の動作を示す断面図である。図５は、Ｚ軸方向に外力を受けた場合の動作を示し、図６は、Ｚ軸方向及びＸ軸方向に外力を受けた場合の動作を示す。 [Operation of the detection device according to the first embodiment]
5 and 6 are cross-sectional views showing the operation of the detection device 1 according to the first embodiment of the present disclosure. FIG. 5 shows the operation when an external force is applied in the Z-axis direction, and FIG. 6 shows the operation when an external force is applied in the Z-axis direction and the X-axis direction.
　図５に示すように、Ｚ軸方向に外力を受けた場合、外力を受ける出力部材２は、Ｚ軸方向に移動する。検出部材３における検出部３Ａの力センサ３Ａａは、出力部材２の移動に伴いＺ軸方向の力を検出する。検出部材３における検出部３Ａの力センサ３Ａａは、出力部材２に結合されており出力部材２が受ける外力を直接的に検出する。この結果、検出装置１は、検出精度を確保できる。 As shown in FIG. 5, when an external force is applied in the Z-axis direction, the output member 2 that receives the external force moves in the Z-axis direction. The force sensor 3Aa of the detection unit 3A of the detection member 3 detects the force in the Z-axis direction as the output member 2 moves. The force sensor 3Aa of the detection unit 3A of the detection member 3 is coupled to the output member 2 and directly detects the external force received by the output member 2. As a result, the detection device 1 can ensure the detection accuracy.
　そして、出力部材２がＺ軸方向に予期せぬ衝撃負荷を受けた場合、出力部材２及び検出部材３は、図５に示すように、第三弾性部材４Ｃの弾性力に抗してＺ軸方向にさらに移動する。第三弾性部材４Ｃは、弾性部材係合部３Ｂｂの接触面３Ｂｆにより押し潰されて全体が圧縮変形する。第三弾性部材４Ｃは、自身の弾性力により出力部材２から検出部材３の力センサ３Ａａに加わる衝撃負荷を緩衝する。筐体５は、第三弾性部材４Ｃからの負荷を受け止める。この結果、検出装置１は、過負荷に対して検出部材３における検出部３Ａの力センサ３Ａａを保護できる。 Then, when the output member 2 receives an unexpected impact load in the Z-axis direction, the output member 2 and the detection member 3 resist the elastic force of the third elastic member 4C as shown in FIG. Move further in the direction. 4 C of 3rd elastic members are crushed by the contact surface 3Bf of the elastic member engagement part 3Bb, and the whole compressively deforms. The third elastic member 4C buffers the impact load applied from the output member 2 to the force sensor 3Aa of the detection member 3 by its own elastic force. The housing 5 receives the load from the third elastic member 4C. As a result, the detection device 1 can protect the force sensor 3Aa of the detection unit 3A of the detection member 3 against overload.
　また、出力部材２がＺ軸方向に予期せぬ衝撃負荷を受けた場合、図５に示すように、補助弾性部材７も、自身の弾性力により出力部材２から検出部材３の力センサ３Ａａに加わる衝撃負荷を緩衝する。補助弾性部材７は、第三弾性部材４Ｃによる弾性変形を抑制する。この結果、検出装置１は、補助弾性部材７により、第三弾性部材４Ｃの変形量を調整でき、力センサ３ＡａのＺ軸方向の負荷制限を大きくできる。 Further, when the output member 2 receives an unexpected impact load in the Z-axis direction, the auxiliary elastic member 7 also changes from the output member 2 to the force sensor 3Aa of the detection member 3 by its own elastic force, as shown in FIG. The shock load applied is buffered. The auxiliary elastic member 7 suppresses elastic deformation by the third elastic member 4C. As a result, the detection device 1 can adjust the amount of deformation of the third elastic member 4C by the auxiliary elastic member 7, and can increase the load limit of the force sensor 3Aa in the Z-axis direction.
　また、出力部材２がＺ軸方向に予期せぬ衝撃負荷を受けた場合、第三弾性部材４Ｃ及び補助弾性部材７の弾性力に抗してＺ軸方向に移動する出力部材２は、出力軸プレート２Ｂの他方の面２Ｂｂの縁部が、ストッパ機構６である第一当接面６Ａに当接する。第一当接面６Ａは、出力軸プレート２Ｂが当接することで、出力部材２のＺ軸方向への移動を規制する。即ち、出力部材２は、ストッパ機構６における干渉により、Ｚ軸方向へのさらなる移動が阻止される。この結果、検出装置１は、出力部材２から検出部材３の力センサ３Ａａに衝撃負荷が加わることを阻止して制限し、過負荷に対して検出部材３における検出部３Ａの力センサ３Ａａを保護できる。 When the output member 2 receives an unexpected impact load in the Z-axis direction, the output member 2 that moves in the Z-axis direction against the elastic force of the third elastic member 4C and the auxiliary elastic member 7 is the output shaft. The edge of the other surface 2Bb of the plate 2B contacts the first contact surface 6A that is the stopper mechanism 6. The first contact surface 6A regulates the movement of the output member 2 in the Z-axis direction when the output shaft plate 2B contacts. That is, the output member 2 is prevented from further moving in the Z-axis direction due to the interference in the stopper mechanism 6. As a result, the detection device 1 prevents and limits the impact load applied from the output member 2 to the force sensor 3Aa of the detection member 3, and protects the force sensor 3Aa of the detection unit 3A of the detection member 3 against overload. it can.
　図６に示すように、Ｚ軸方向及びＸ軸方向（Ｙ軸方向）に外力を受けた場合、外力を受ける出力部材２は、Ｚ軸方向に対してＸ軸方向（Ｙ軸方向）に傾くように移動する。図６では図中左下方向に出力部材２が移動した例を示している。検出部材３における検出部３Ａの力センサ３Ａａは、出力部材２の移動に伴いＺ軸方向及びＸ軸方向（Ｙ軸方向）の力を検出する。検出部材３における検出部３Ａの力センサ３Ａａは、出力部材２に結合されており出力部材２が受ける外力を直接的に検出する。この結果、検出装置１は、検出精度を確保できる。 As shown in FIG. 6, when an external force is applied in the Z-axis direction and the X-axis direction (Y-axis direction), the output member 2 that receives the external force tilts in the X-axis direction (Y-axis direction) with respect to the Z-axis direction. To move. FIG. 6 shows an example in which the output member 2 has moved in the lower left direction in the drawing. The force sensor 3Aa of the detection unit 3A of the detection member 3 detects forces in the Z-axis direction and the X-axis direction (Y-axis direction) as the output member 2 moves. The force sensor 3Aa of the detection unit 3A of the detection member 3 is coupled to the output member 2 and directly detects the external force received by the output member 2. As a result, the detection device 1 can ensure the detection accuracy.
　そして、出力部材２がＺ軸方向及びＸ軸方向（Ｙ軸方向）に予期せぬ衝撃負荷を受けた場合、出力部材２及び検出部材３は、図６に示すように、各弾性部材４Ａ，４Ｂ，４Ｃの弾性力に抗してＺ軸方向に対してＸ軸方向（Ｙ軸方向）に傾くようにさらに移動する。第一弾性部材４Ａは、第一筐体５Ａの接触片５Ａａにより押し潰されて一部が圧縮変形する。第二弾性部材４Ｂは、第二筐体５Ｂの内周面５Ｂａにより押し潰されて一部が圧縮変形する。第三弾性部材４Ｃは、弾性部材係合部３Ｂｂの接触面３Ｂｆにより押し潰されて一部が圧縮変形する。圧縮変形した各弾性部材４Ａ，４Ｂ，４Ｃは、自身の弾性力により出力部材２から検出部材３の力センサ３Ａａに加わる衝撃負荷を緩衝する。筐体５は、圧縮変形した各弾性部材４Ａ，４Ｂ，４Ｃからの負荷を受け止める。この結果、検出装置１は、過負荷に対して検出部材３における検出部３Ａの力センサ３Ａａを保護できる。 When the output member 2 receives an unexpected impact load in the Z-axis direction and the X-axis direction (Y-axis direction), the output member 2 and the detection member 3 are, as shown in FIG. It further moves so as to incline in the X-axis direction (Y-axis direction) with respect to the Z-axis direction against the elastic forces of 4B and 4C. The first elastic member 4A is crushed by the contact piece 5Aa of the first housing 5A and partially deformed by compression. The second elastic member 4B is crushed by the inner peripheral surface 5Ba of the second housing 5B and partially deformed by compression. 4 C of 3rd elastic members are crushed by the contact surface 3Bf of the elastic member engagement part 3Bb, and a part compressively deforms. Each elastic member 4A, 4B, 4C that has been compressed and deformed absorbs the impact load applied from the output member 2 to the force sensor 3Aa of the detection member 3 by its own elastic force. The housing 5 receives the load from each elastic member 4A, 4B, 4C that is compressed and deformed. As a result, the detection device 1 can protect the force sensor 3Aa of the detection unit 3A of the detection member 3 against overload.
　また、出力部材２がＺ軸方向及びＸ軸方向（Ｙ軸方向）に予期せぬ衝撃負荷を受けた場合、図６に示すように、補助弾性部材７も、自身の弾性力により出力部材２から検出部材３の力センサ３Ａａに加わる衝撃負荷を緩衝する。補助弾性部材７は、各弾性部材４Ａ，４Ｂ，４Ｃの負荷制限を大きくする。この結果、検出装置１は、補助弾性部材７により、各弾性部材４Ａ，４Ｂ，４Ｃの変形量を調整でき、力センサ３ＡａのＺ軸方向及びＸ軸方向（Ｙ軸方向）の負荷制限を大きくできる。 Further, when the output member 2 receives an unexpected impact load in the Z-axis direction and the X-axis direction (Y-axis direction), the auxiliary elastic member 7 is also output by the elastic force of its own, as shown in FIG. The shock load applied to the force sensor 3Aa of the detection member 3 from the above is buffered. The auxiliary elastic member 7 increases the load limit of each elastic member 4A, 4B, 4C. As a result, the detection device 1 can adjust the amount of deformation of each elastic member 4A, 4B, 4C by the auxiliary elastic member 7, and greatly limits the load of the force sensor 3Aa in the Z-axis direction and the X-axis direction (Y-axis direction). it can.
　また、出力部材２がＺ軸方向及びＸ軸方向（Ｙ軸方向）に予期せぬ衝撃負荷を受けた場合、各弾性部材４Ａ，４Ｂ，４Ｃ及び補助弾性部材７の弾性力に抗してＺ軸方向に対してＸ軸方向（Ｙ軸方向）に傾くようにさらに移動する出力部材２は、出力軸プレート２Ｂの他方の面２Ｂｂの縁部が、ストッパ機構６である第一当接面６Ａに当接し、出力軸プレート２Ｂの周面２Ｂｅが、ストッパ機構６である第二当接面６Ｂに当接する。第一当接面６Ａは、出力軸プレート２Ｂが当接することで、出力部材２のＺ軸方向への移動を規制する。第二当接面６Ｂは、出力軸プレート２Ｂが当接することで、出力部材２のＸ軸方向（Ｙ軸方向）の移動を規制する。即ち、出力部材２は、ストッパ機構６における干渉により、Ｚ軸方向及びＸ軸方向（Ｙ軸方向）へのさらなる移動が阻止される。この結果、検出装置１は、出力部材２から検出部材３の力センサ３Ａａに衝撃負荷が加わることを阻止して制限し、過負荷に対して検出部材３における検出部３Ａの力センサ３Ａａを保護できる。 Further, when the output member 2 receives an unexpected impact load in the Z-axis direction and the X-axis direction (Y-axis direction), the elastic force of each elastic member 4A, 4B, 4C and the auxiliary elastic member 7 is resisted by Z. In the output member 2 that further moves so as to tilt in the X-axis direction (Y-axis direction) with respect to the axial direction, the edge portion of the other surface 2Bb of the output shaft plate 2B is the first contact surface 6A that is the stopper mechanism 6. And the peripheral surface 2Be of the output shaft plate 2B abuts on the second abutting surface 6B which is the stopper mechanism 6. The first contact surface 6A regulates the movement of the output member 2 in the Z-axis direction when the output shaft plate 2B contacts. The second contact surface 6B restricts the movement of the output member 2 in the X-axis direction (Y-axis direction) when the output shaft plate 2B abuts. That is, the output member 2 is prevented from further moving in the Z-axis direction and the X-axis direction (Y-axis direction) due to the interference in the stopper mechanism 6. As a result, the detection device 1 prevents and limits the impact load applied from the output member 2 to the force sensor 3Aa of the detection member 3, and protects the force sensor 3Aa of the detection unit 3A of the detection member 3 against overload. it can.
　図５及び図６に示すように、第一弾性部材４Ａは、主にＺ軸方向の図中上側及びモーメント負荷を受けて変形する弾性体である。第二弾性部材４Ｂは、主にＸ軸方向やＹ軸方向及びモーメント負荷を受けて変形する弾性体である。第三弾性部材４Ｃは、Ｚ軸方向の図中下側及びモーメント負荷を受けて変形する弾性体である。リング状の各弾性部材４Ａ，４Ｂ，４Ｃは、その断面形状、大きさにより力センサ３Ａａの保護のための過負荷の設定値を決める。リング状の各弾性部材４Ａ，４Ｂ，４Ｃは、Ｚ軸８を中心として配置することで、過負荷を受けた場合に、Ｚ軸８を中心として対称性を有して変形し、Ｚ軸方向、Ｘ軸方向Ｙ軸方向の衝撃負荷に対応した緩衝効果が得られる。また、リング状の各弾性部材４Ａ，４Ｂ，４Ｃに分けることで、弾性部材４の全てを一塊とすることと比較してせん断力の作用を低減できる。 As shown in FIGS. 5 and 6, the first elastic member 4A is an elastic body that is deformed mainly by the upper side in the drawing in the Z-axis direction and a moment load. The second elastic member 4B is an elastic body that is deformed mainly by the X-axis direction, the Y-axis direction, and a moment load. The third elastic member 4C is an elastic body that deforms under the Z-axis direction in the drawing and a moment load. Each of the ring-shaped elastic members 4A, 4B, 4C determines the set value of the overload for protecting the force sensor 3Aa according to its cross-sectional shape and size. By arranging the ring-shaped elastic members 4A, 4B, and 4C with the Z axis 8 as the center, when they are overloaded, they are deformed with symmetry about the Z axis 8 and in the Z axis direction. A cushioning effect corresponding to the impact load in the X-axis direction and the Y-axis direction can be obtained. Moreover, by dividing each of the elastic members 4A, 4B, 4C in the ring shape, the action of the shearing force can be reduced as compared with the case where all the elastic members 4 are made into one block.
　また、補助弾性部材７は、主にＺ軸方向の図中下側及びモーメント負荷を受けて変形する弾性体であり、各弾性部材４Ａ，４Ｂ，４Ｃの変形量を調整し、力センサ３ＡａのＺ軸方向及びＸ軸方向（Ｙ軸方向）の負荷制限を大きくする。補助弾性部材７は、円筒形状でＺ軸８を中心として配置することで、過負荷を受けた場合に、Ｚ軸８を中心として対称性を有して変形し、Ｚ軸方向、Ｘ軸方向及びＹ軸方向の衝撃負荷に対応して各弾性部材４Ａ，４Ｂ，４Ｃの変形量を調整できる。 The auxiliary elastic member 7 is an elastic body that is deformed mainly by the lower side in the Z-axis direction in the drawing and a moment load, and adjusts the deformation amount of each elastic member 4A, 4B, 4C, and the force sensor 3Aa. Increase the load limit in the Z-axis direction and the X-axis direction (Y-axis direction). By arranging the auxiliary elastic member 7 in a cylindrical shape with the Z axis 8 as the center, when it is overloaded, the auxiliary elastic member 7 is deformed symmetrically with respect to the Z axis 8 and is deformed in the Z axis direction and the X axis direction. Also, the amount of deformation of each elastic member 4A, 4B, 4C can be adjusted according to the impact load in the Y-axis direction.
　また、ストッパ機構６は、筐体５に設けられて、出力部材２の出力軸プレート２Ｂと衝突することで力センサ３Ａａへの負荷を制限し、筐体５と出力軸プレート２Ｂとのすき間量で過負荷の設定値を調整する。ここで、力センサ３Ａａへの負荷制限は、各弾性部材４Ａ，４Ｂ，４Ｃの形状及び弾性力、ストッパ機構６の筐体５と出力軸プレート２Ｂとのすき間量により事前に設計値として決定される。すき間量は、例えば、１ｍｍから２ｍｍ程度が好ましい。 In addition, the stopper mechanism 6 is provided in the housing 5 and limits the load on the force sensor 3Aa by colliding with the output shaft plate 2B of the output member 2 to reduce the clearance between the housing 5 and the output shaft plate 2B. Adjust the overload setting value with. Here, the load limitation on the force sensor 3Aa is determined in advance as a design value depending on the shape and elastic force of each elastic member 4A, 4B, 4C, and the clearance amount between the housing 5 of the stopper mechanism 6 and the output shaft plate 2B. It The clearance amount is preferably about 1 mm to 2 mm, for example.
［第１の実施形態の変形例（１）］
　図７は、本開示の第１の実施形態の変形例（１）に係る検出装置１の構成例を示す断面図である。図８は、本開示の第１の実施形態の変形例（１）に係る検出装置１の構成例を示す部分斜視図である。 [Modification (1) of the first embodiment]
FIG. 7 is a cross-sectional view showing a configuration example of the detection device 1 according to the modified example (1) of the first embodiment of the present disclosure. FIG. 8 is a partial perspective view showing a configuration example of the detection device 1 according to the modified example (1) of the first embodiment of the present disclosure.
　第１の実施形態の変形例（１）は、上述した第１の実施形態に対し、弾性部材４、及び検出部材３における土台部３Ｂの構成が異なり、他の構成は同様である。従って、第１の実施形態の変形例（１）において、第１の実施形態と同等部分には同一の符号を付して説明を省略する。 The modified example (1) of the first embodiment is different from the above-described first embodiment in the configuration of the elastic member 4 and the base portion 3B of the detection member 3, and the other configurations are the same. Therefore, in the modified example (1) of the first embodiment, the same parts as those of the first embodiment are designated by the same reference numerals and the description thereof will be omitted.
　弾性部材４は、図７及び図８に示すように、角形状に形成された複数の角状弾性部材４Ｄと、円筒形状に形成された複数の筒状弾性部材４Ｅと、を有する。角状弾性部材４Ｄは、４角柱形状に形成されており、Ｘ軸方向の相反する側に向くそれぞれ外面４Ｄａを有する２箇と、Ｙ軸方向の相反する側に向くそれぞれ外面４Ｄａを有する２箇との計４個で構成されている。各角状弾性部材４Ｄは、土台部３Ｂの弾性部材係合部３Ｂｂに取り付けられる。弾性部材係合部３Ｂｂは、４角柱形状に形成され、Ｘ軸方向の相反する側に向く取付面３Ｂｈと、Ｙ軸方向の相反する側に向く取付面３Ｂｈを有している。各角状弾性部材４Ｄは、各取付面３Ｂｈに対し、弾性部材係合部３Ｂｂに設けられた鍵形状の１対の固定部３Ｂｉに嵌め込まれて取り付けられる。弾性部材係合部３Ｂｂに取り付けられた各角状弾性部材４Ｄは、筐体５における第二筐体５Ｂの内周面５Ｂａに外面４Ｄａが接触する。各角状弾性部材４Ｄの外面４Ｄａは、図８に示すように平坦面であってもよいが、円筒形状の第二筐体５Ｂの内周面５Ｂａに合わせて円弧面で形成されていてもよい。 As shown in FIGS. 7 and 8, the elastic member 4 has a plurality of angular elastic members 4D formed in a rectangular shape and a plurality of cylindrical elastic members 4E formed in a cylindrical shape. The angular elastic member 4D is formed in a quadrangular prism shape, and has two outer surfaces 4Da facing the opposite sides in the X-axis direction and two outer surfaces 4Da facing the opposite sides in the Y-axis direction. It consists of a total of four. Each angular elastic member 4D is attached to the elastic member engaging portion 3Bb of the base portion 3B. The elastic member engaging portion 3Bb is formed in a quadrangular prism shape, and has a mounting surface 3Bh facing opposite sides in the X-axis direction and a mounting surface 3Bh facing opposite sides in the Y-axis direction. Each angular elastic member 4D is fitted and attached to each mounting surface 3Bh by a pair of key-shaped fixing portions 3Bi provided in the elastic member engaging portion 3Bb. The outer surface 4Da of each angular elastic member 4D attached to the elastic member engaging portion 3Bb contacts the inner peripheral surface 5Ba of the second housing 5B in the housing 5. The outer surface 4Da of each angular elastic member 4D may be a flat surface as shown in FIG. 8, or may be an arcuate surface in conformity with the inner peripheral surface 5Ba of the cylindrical second housing 5B. Good.
　筒状弾性部材４Ｅは、円筒形状の円形端がＺ軸方向の相反する側に向くように配置される。筒状弾性部材４Ｅは、４個設けられ、それぞれがＸ軸方向とＹ軸方向に２個ずつ並ぶように、弾性部材係合部３Ｂｂの４角柱形状に形成された角部に取り付けられる。各筒状弾性部材４Ｅは、弾性部材係合部３Ｂｂの４角柱形状の角部に設けられた円形状の各固定部３Ｂｊに挿入して取り付けられる。弾性部材係合部３Ｂｂに取り付けられた各筒状弾性部材４Ｅは、一端が第一筐体５Ａの接触片５Ａａに接触し、他端が第二筐体５Ｂの嵌合溝５Ｂｂに嵌合する。ここでの嵌合溝５Ｂｂは円環状に限らず、各筒状弾性部材４Ｅの他端に合わせて円形状に形成されていてもよい。 The cylindrical elastic member 4E is arranged such that the circular ends of the cylindrical shape face the opposite sides in the Z-axis direction. Four cylindrical elastic members 4E are provided, and are attached to the corners of the elastic member engaging portion 3Bb formed in a quadrangular prism shape so that two cylindrical elastic members 4E are arranged in the X-axis direction and two in the Y-axis direction. Each tubular elastic member 4E is inserted into and attached to each circular fixing portion 3Bj provided at the corner of the quadrangular prism shape of the elastic member engaging portion 3Bb. Each tubular elastic member 4E attached to the elastic member engaging portion 3Bb has one end contacting the contact piece 5Aa of the first housing 5A and the other end fitting into the fitting groove 5Bb of the second housing 5B. . The fitting groove 5Bb here is not limited to the annular shape, and may be formed in a circular shape in accordance with the other end of each tubular elastic member 4E.
　このように構成された第１の実施形態の変形例（１）では、Ｚ軸方向に外力を受けた場合、外力を受ける出力部材２は、Ｚ軸方向に移動する。検出部材３における検出部３Ａの力センサ３Ａａは、出力部材２の移動に伴いＺ軸方向の力を検出する。検出部材３における検出部３Ａの力センサ３Ａａは、出力部材２に結合されており出力部材２が受ける外力を直接的に検出する。この結果、検出装置１は、検出精度を確保できる。 In the modified example (1) of the first embodiment configured as above, when an external force is applied in the Z-axis direction, the output member 2 that receives the external force moves in the Z-axis direction. The force sensor 3Aa of the detection unit 3A of the detection member 3 detects the force in the Z-axis direction as the output member 2 moves. The force sensor 3Aa of the detection unit 3A of the detection member 3 is coupled to the output member 2 and directly detects the external force received by the output member 2. As a result, the detection device 1 can ensure the detection accuracy.
　そして、出力部材２がＺ軸方向に予期せぬ衝撃負荷を受けた場合、出力部材２及び検出部材３は、各筒状弾性部材４Ｅの弾性力に抗してＺ軸方向にさらに移動する。各筒状弾性部材４Ｅは、検出部材３の移動に伴って嵌合溝５Ｂｂ側に押し潰されて圧縮変形する。各筒状弾性部材４Ｅは、自身の弾性力により出力部材２から検出部材３の力センサ３Ａａに加わる衝撃負荷を緩衝する。筐体５は、各筒状弾性部材４Ｅからの負荷を受け止める。この結果、検出装置１は、過負荷に対して検出部材３における検出部３Ａの力センサ３Ａａを保護できる。 When the output member 2 receives an unexpected shock load in the Z-axis direction, the output member 2 and the detection member 3 further move in the Z-axis direction against the elastic force of each tubular elastic member 4E. Each tubular elastic member 4E is crushed toward the fitting groove 5Bb side and compressed and deformed as the detection member 3 moves. Each cylindrical elastic member 4E buffers the impact load applied from the output member 2 to the force sensor 3Aa of the detection member 3 by its own elastic force. The housing 5 receives the load from each tubular elastic member 4E. As a result, the detection device 1 can protect the force sensor 3Aa of the detection unit 3A of the detection member 3 against overload.
　また、出力部材２がＺ軸方向に予期せぬ衝撃負荷を受けた場合、補助弾性部材７も、自身の弾性力により出力部材２から検出部材３の力センサ３Ａａに加わる衝撃負荷を緩衝する。補助弾性部材７は、各筒状弾性部材４Ｅによる弾性変形を抑制する。この結果、検出装置１は、補助弾性部材７により、各筒状弾性部材４Ｅの変形量を調整でき、力センサ３ＡａのＺ軸方向の負荷制限を大きくできる。 When the output member 2 receives an unexpected shock load in the Z-axis direction, the auxiliary elastic member 7 also buffers the shock load applied from the output member 2 to the force sensor 3Aa of the detection member 3 by its own elastic force. The auxiliary elastic member 7 suppresses elastic deformation by each tubular elastic member 4E. As a result, the detection device 1 can adjust the amount of deformation of each tubular elastic member 4E by the auxiliary elastic member 7, and can increase the load limit of the force sensor 3Aa in the Z-axis direction.
　また、出力部材２がＺ軸方向に予期せぬ衝撃負荷を受けた場合、各筒状弾性部材４Ｅ及び補助弾性部材７の弾性力に抗してＺ軸方向に移動する出力部材２は、出力軸プレート２Ｂの他方の面２Ｂｂの縁部が、ストッパ機構６である第一当接面６Ａに当接する。第一当接面６Ａは、出力軸プレート２Ｂが当接することで、出力部材２のＺ軸方向への移動を規制する。即ち、出力部材２は、ストッパ機構６における干渉により、Ｚ軸方向へのさらなる移動が阻止される。この結果、検出装置１は、出力部材２から検出部材３の力センサ３Ａａに衝撃負荷が加わることを阻止して制限し、過負荷に対して検出部材３における検出部３Ａの力センサ３Ａａを保護できる。 When the output member 2 receives an unexpected impact load in the Z-axis direction, the output member 2 that moves in the Z-axis direction against the elastic force of each tubular elastic member 4E and the auxiliary elastic member 7 outputs the output. The edge of the other surface 2Bb of the shaft plate 2B contacts the first contact surface 6A that is the stopper mechanism 6. The first contact surface 6A regulates the movement of the output member 2 in the Z-axis direction when the output shaft plate 2B contacts. That is, the output member 2 is prevented from further moving in the Z-axis direction due to the interference in the stopper mechanism 6. As a result, the detection device 1 prevents and limits the impact load applied from the output member 2 to the force sensor 3Aa of the detection member 3, and protects the force sensor 3Aa of the detection unit 3A of the detection member 3 against overload. it can.
　Ｚ軸方向及びＸ軸方向（Ｙ軸方向）に外力を受けた場合、外力を受ける出力部材２は、Ｚ軸方向に対してＸ軸方向（Ｙ軸方向）に傾くように移動する。検出部材３における検出部３Ａの力センサ３Ａａは、出力部材２の移動に伴いＺ軸方向及びＸ軸方向（Ｙ軸方向）の力を検出する。検出部材３における検出部３Ａの力センサ３Ａａは、出力部材２に結合されており出力部材２が受ける外力を直接的に検出する。この結果、検出装置１は、検出精度を確保できる。 When an external force is applied in the Z-axis direction and the X-axis direction (Y-axis direction), the output member 2 that receives the external force moves so as to incline in the X-axis direction (Y-axis direction) with respect to the Z-axis direction. The force sensor 3Aa of the detection unit 3A of the detection member 3 detects forces in the Z-axis direction and the X-axis direction (Y-axis direction) as the output member 2 moves. The force sensor 3Aa of the detection unit 3A of the detection member 3 is coupled to the output member 2 and directly detects the external force received by the output member 2. As a result, the detection device 1 can ensure the detection accuracy.
　そして、出力部材２がＺ軸方向及びＸ軸方向（Ｙ軸方向）に予期せぬ衝撃負荷を受けた場合、出力部材２及び検出部材３は、Ｚ軸方向に対してＸ軸方向（Ｙ軸方向）に傾くようにさらに移動する。傾く側の反対側の筒状弾性部材４Ｅは、第一筐体５Ａの接触片５Ａａにより押し潰されて圧縮変形する。傾く側の筒状弾性部材４Ｅは、嵌合溝５Ｂｂ側に押し潰されて圧縮変形する。傾く側の角状弾性部材４Ｄは、第二筐体５Ｂの内周面５Ｂａにより押し潰されて圧縮変形する。圧縮変形した各弾性部材４Ｄ，４Ｅは、自身の弾性力により出力部材２から検出部材３の力センサ３Ａａに加わる衝撃負荷を緩衝する。筐体５は、圧縮変形した各弾性部材４Ｄ，４Ｅからの負荷を受け止める。この結果、検出装置１は、過負荷に対して検出部材３における検出部３Ａの力センサ３Ａａを保護できる。 When the output member 2 receives an unexpected impact load in the Z-axis direction and the X-axis direction (Y-axis direction), the output member 2 and the detection member 3 move in the X-axis direction (Y-axis direction) with respect to the Z-axis direction. Move further so that it tilts in the direction). The cylindrical elastic member 4E on the side opposite to the inclined side is crushed by the contact piece 5Aa of the first housing 5A and is compressed and deformed. The cylindrical elastic member 4E on the inclined side is crushed toward the fitting groove 5Bb side and is compressed and deformed. The angled elastic member 4D on the inclined side is crushed by the inner peripheral surface 5Ba of the second housing 5B and is compressed and deformed. The elastic members 4D and 4E that have been compressed and deformed absorb the impact load applied from the output member 2 to the force sensor 3Aa of the detection member 3 by the elastic force of the elastic members 4D and 4E. The housing 5 receives the load from the elastic members 4D and 4E that are compressed and deformed. As a result, the detection device 1 can protect the force sensor 3Aa of the detection unit 3A of the detection member 3 against overload.
　また、出力部材２がＺ軸方向及びＸ軸方向（Ｙ軸方向）に予期せぬ衝撃負荷を受けた場合、補助弾性部材７も、自身の弾性力により出力部材２から検出部材３の力センサ３Ａａに加わる衝撃負荷を緩衝する。補助弾性部材７は、各弾性部材４Ｄ，４Ｅの負荷制限を大きくする。この結果、検出装置１は、補助弾性部材７により、各弾性部材４Ｄ，４Ｅの変形量を調整でき、力センサ３ＡａのＺ軸方向及びＸ軸方向（Ｙ軸方向）の負荷制限を大きくできる。 Further, when the output member 2 receives an unexpected impact load in the Z-axis direction and the X-axis direction (Y-axis direction), the auxiliary elastic member 7 also receives a force sensor from the output member 2 to the detection member 3 by its own elastic force. It buffers the impact load applied to 3Aa. The auxiliary elastic member 7 increases the load limit of each elastic member 4D, 4E. As a result, the detection device 1 can adjust the deformation amount of each elastic member 4D, 4E by the auxiliary elastic member 7, and can increase the load limitation of the force sensor 3Aa in the Z-axis direction and the X-axis direction (Y-axis direction).
　また、出力部材２がＺ軸方向及びＸ軸方向（Ｙ軸方向）に予期せぬ衝撃負荷を受けた場合、各弾性部材４Ｄ，４Ｅ及び補助弾性部材７の弾性力に抗してＺ軸方向に対してＸ軸方向（Ｙ軸方向）に傾くようにさらに移動する出力部材２は、出力軸プレート２Ｂの他方の面２Ｂｂの縁部が、ストッパ機構６である第一当接面６Ａに当接し、出力軸プレート２Ｂの周面２Ｂｅが、ストッパ機構６である第二当接面６Ｂに当接する。第一当接面６Ａは、出力軸プレート２Ｂが当接することで、出力部材２のＺ軸方向への移動を規制する。第二当接面６Ｂは、出力軸プレート２Ｂが当接することで、出力部材２のＸ軸方向（Ｙ軸方向）の移動を規制する。即ち、出力部材２は、ストッパ機構６における干渉により、Ｚ軸方向及びＸ軸方向（Ｙ軸方向）へのさらなる移動が阻止される。この結果、検出装置１は、出力部材２から検出部材３の力センサ３Ａａに衝撃負荷が加わることを阻止して制限し、過負荷に対して検出部材３における検出部３Ａの力センサ３Ａａを保護できる。 Further, when the output member 2 receives an unexpected impact load in the Z-axis direction and the X-axis direction (Y-axis direction), the output member 2 resists the elastic force of each elastic member 4D, 4E and the auxiliary elastic member 7 in the Z-axis direction. With respect to the output member 2 that further moves so as to incline in the X-axis direction (Y-axis direction), the edge of the other surface 2Bb of the output shaft plate 2B contacts the first contact surface 6A that is the stopper mechanism 6. The peripheral surface 2Be of the output shaft plate 2B contacts the second contact surface 6B that is the stopper mechanism 6. The first contact surface 6A regulates the movement of the output member 2 in the Z-axis direction when the output shaft plate 2B contacts. The second contact surface 6B restricts the movement of the output member 2 in the X-axis direction (Y-axis direction) when the output shaft plate 2B abuts. That is, the output member 2 is prevented from further moving in the Z-axis direction and the X-axis direction (Y-axis direction) due to the interference in the stopper mechanism 6. As a result, the detection device 1 prevents and limits the impact load applied from the output member 2 to the force sensor 3Aa of the detection member 3, and protects the force sensor 3Aa of the detection unit 3A of the detection member 3 against overload. it can.
　各筒状弾性部材４Ｅは、主にＺ軸方向及びモーメント負荷を受けて変形する弾性体である。各角状弾性部材４Ｄは、主にＸ軸方向やＹ軸方向及びモーメント負荷を受けて変形する弾性体である。各弾性部材４Ｅ，４Ｄは、その断面形状、大きさにより力センサ３Ａａの保護のための過負荷の設定値を決める。各弾性部材４Ｅ，４Ｄは、Ｚ軸方向まわりに複数に分割されているため、上述した第１の実施形態における各弾性部材４Ａ，４Ｂ，４Ｃと比較して設定値の設計パラメータ数が多く変更しやすい。各弾性部材４Ｅ，４Ｄは、Ｚ軸方向まわりに複数に分割されているため、上述した第１の実施形態における各弾性部材４Ａ，４Ｂ，４Ｃと比較して変形量を大きく取ることができ、製造誤差を軽減できる。各弾性部材４Ｅ，４Ｄは、Ｚ軸８を中心として対称配置することで、過負荷を受けた場合に、Ｚ軸８を中心として対称性を有して変形し、Ｚ軸方向、Ｘ軸方向Ｙ軸方向の衝撃負荷に対応した緩衝効果が得られる。また、各弾性部材４Ｄ，４Ｅに分けることで、弾性部材４の全てを一塊とすることと比較してせん断力の作用を低減できる。 Each of the tubular elastic members 4E is an elastic body that deforms mainly in the Z-axis direction and moment load. Each angular elastic member 4D is an elastic body that is deformed mainly by the X-axis direction, the Y-axis direction, and a moment load. Each elastic member 4E, 4D determines a set value of overload for protecting the force sensor 3Aa according to its cross-sectional shape and size. Since each elastic member 4E, 4D is divided into a plurality around the Z-axis direction, the number of design parameters of the set value is changed more than that of each elastic member 4A, 4B, 4C in the above-described first embodiment. It's easy to do. Since each elastic member 4E, 4D is divided into a plurality around the Z-axis direction, it is possible to take a large amount of deformation as compared with each elastic member 4A, 4B, 4C in the above-described first embodiment, Manufacturing error can be reduced. The elastic members 4E and 4D are symmetrically arranged about the Z-axis 8 so that when they are overloaded, they are deformed symmetrically about the Z-axis 8 so that the Z-axis direction and the X-axis direction are changed. A cushioning effect corresponding to the impact load in the Y-axis direction can be obtained. Further, by dividing the elastic members 4D and 4E, the action of the shearing force can be reduced as compared with the case where all the elastic members 4 are made into one block.
［第１の実施形態の変形例（２）］
　図９は、本開示の第１の実施形態の変形例（２）に係る検出装置１の構成例を示す断面図である。図１０は、本開示の第１の実施形態の変形例（２）に係る検出装置１の構成例を示す部分斜視図である。 [Modification (2) of the first embodiment]
FIG. 9 is a cross-sectional view showing a configuration example of the detection device 1 according to the modified example (2) of the first embodiment of the present disclosure. FIG. 10 is a partial perspective view showing a configuration example of the detection device 1 according to the modified example (2) of the first embodiment of the present disclosure.
　第１の実施形態の変形例（２）は、上述した第１の実施形態に対し、弾性部材４、及び検出部材３における土台部３Ｂの構成が異なり、他の構成は同様である。従って、第１の実施形態の変形例（２）において、第１の実施形態と同等部分には同一の符号を付して説明を省略する。 The modified example (2) of the first embodiment is different from the above-described first embodiment in the configurations of the elastic member 4 and the base portion 3B of the detection member 3, and the other configurations are the same. Therefore, in the modified example (2) of the first embodiment, the same parts as those of the first embodiment are designated by the same reference numerals and the description thereof will be omitted.
　弾性部材４は、図９及び図１０に示すように、球形状に形成された複数の球状弾性部材４Ｆを有する。各球状弾性部材４Ｆは、土台部３Ｂの弾性部材係合部３ＢｂにおいてＺ軸方向の相反する側に取り付けられる。弾性部材係合部３Ｂｂは、Ｚ軸方向の一方側（図中上側）に複数の球状弾性部材４Ｆを並べて嵌合する円環状の嵌合溝３Ｂｋが形成されている。弾性部材係合部３Ｂｂは、Ｚ軸方向の他方側（図中下側）に複数の球状弾性部材４Ｆを並べて嵌合する円環状の嵌合溝３Ｂｍが形成されている。複数の球状弾性部材４Ｆは、嵌合溝３Ｂｋに嵌合して弾性部材係合部３Ｂｂに取り付けられる。嵌合溝３Ｂｋに嵌合した複数の球状弾性部材４Ｆは、第一筐体５Ａの接触片５Ａａに接触する。複数の球状弾性部材４Ｆは、嵌合溝３Ｂｍに嵌合して弾性部材係合部３Ｂｂに取り付けられる。嵌合溝３Ｂｍに嵌合した複数の球状弾性部材４Ｆは、第二筐体５Ｂの嵌合溝５Ｂｂに嵌合する。 The elastic member 4 has a plurality of spherical elastic members 4F formed in a spherical shape, as shown in FIGS. 9 and 10. The spherical elastic members 4F are attached to the elastic member engaging portions 3Bb of the base portion 3B on opposite sides in the Z-axis direction. The elastic member engaging portion 3Bb is formed with an annular fitting groove 3Bk into which a plurality of spherical elastic members 4F are aligned and fitted on one side (the upper side in the drawing) in the Z-axis direction. The elastic member engaging portion 3Bb is formed with an annular fitting groove 3Bm into which the plurality of spherical elastic members 4F are aligned and fitted on the other side (lower side in the drawing) in the Z-axis direction. The plurality of spherical elastic members 4F are fitted in the fitting groove 3Bk and attached to the elastic member engaging portion 3Bb. The plurality of spherical elastic members 4F fitted in the fitting groove 3Bk come into contact with the contact pieces 5Aa of the first housing 5A. The plurality of spherical elastic members 4F are fitted into the fitting groove 3Bm and attached to the elastic member engaging portion 3Bb. The plurality of spherical elastic members 4F fitted in the fitting groove 3Bm are fitted in the fitting groove 5Bb of the second housing 5B.
　このように構成された第１の実施形態の変形例（２）では、Ｚ軸方向に外力を受けた場合、外力を受ける出力部材２は、Ｚ軸方向に移動する。検出部材３における検出部３Ａの力センサ３Ａａは、出力部材２の移動に伴いＺ軸方向の力を検出する。検出部材３における検出部３Ａの力センサ３Ａａは、出力部材２に結合されており出力部材２が受ける外力を直接的に検出する。この結果、検出装置１は、検出精度を確保できる。 In the modified example (2) of the first embodiment configured as described above, when an external force is applied in the Z-axis direction, the output member 2 that receives the external force moves in the Z-axis direction. The force sensor 3Aa of the detection unit 3A of the detection member 3 detects the force in the Z-axis direction as the output member 2 moves. The force sensor 3Aa of the detection unit 3A of the detection member 3 is coupled to the output member 2 and directly detects the external force received by the output member 2. As a result, the detection device 1 can ensure the detection accuracy.
　そして、出力部材２がＺ軸方向に予期せぬ衝撃負荷を受けた場合、出力部材２及び検出部材３は、各球状弾性部材４Ｆの弾性力に抗してＺ軸方向にさらに移動する。各球状弾性部材４Ｆは、弾性部材係合部３ＢｂのＺ軸方向の他方側（図中下側）において、検出部材３の移動に伴って嵌合溝５Ｂｂ側に押し潰されて圧縮変形する。各球状弾性部材４Ｆは、自身の弾性力により出力部材２から検出部材３の力センサ３Ａａに加わる衝撃負荷を緩衝する。筐体５は、各球状弾性部材４Ｆからの負荷を受け止める。この結果、検出装置１は、過負荷に対して検出部材３における検出部３Ａの力センサ３Ａａを保護できる。 When the output member 2 receives an unexpected impact load in the Z-axis direction, the output member 2 and the detection member 3 further move in the Z-axis direction against the elastic force of each spherical elastic member 4F. Each spherical elastic member 4F is crushed toward the fitting groove 5Bb side by the movement of the detection member 3 on the other side (lower side in the drawing) of the elastic member engaging portion 3Bb in the Z-axis direction, and is compressed and deformed. Each spherical elastic member 4F buffers the impact load applied from the output member 2 to the force sensor 3Aa of the detection member 3 by its own elastic force. The housing 5 receives the load from each spherical elastic member 4F. As a result, the detection device 1 can protect the force sensor 3Aa of the detection unit 3A of the detection member 3 against overload.
　また、出力部材２がＺ軸方向に予期せぬ衝撃負荷を受けた場合、補助弾性部材７も、自身の弾性力により出力部材２から検出部材３の力センサ３Ａａに加わる衝撃負荷を緩衝する。補助弾性部材７は、各球状弾性部材４Ｆによる弾性変形を抑制する。この結果、検出装置１は、補助弾性部材７により、各球状弾性部材４Ｆの変形量を調整でき、力センサ３ＡａのＺ軸方向の負荷制限を大きくできる。 When the output member 2 receives an unexpected shock load in the Z-axis direction, the auxiliary elastic member 7 also buffers the shock load applied from the output member 2 to the force sensor 3Aa of the detection member 3 by its own elastic force. The auxiliary elastic member 7 suppresses elastic deformation by each spherical elastic member 4F. As a result, in the detection device 1, the amount of deformation of each spherical elastic member 4F can be adjusted by the auxiliary elastic member 7, and the load limitation of the force sensor 3Aa in the Z-axis direction can be increased.
　また、出力部材２がＺ軸方向に予期せぬ衝撃負荷を受けた場合、各球状弾性部材４Ｆ及び補助弾性部材７の弾性力に抗してＺ軸方向に移動する出力部材２は、出力軸プレート２Ｂの他方の面２Ｂｂの縁部が、ストッパ機構６である第一当接面６Ａに当接する。第一当接面６Ａは、出力軸プレート２Ｂが当接することで、出力部材２のＺ軸方向への移動を規制する。即ち、出力部材２は、ストッパ機構６における干渉により、Ｚ軸方向へのさらなる移動が阻止される。この結果、検出装置１は、出力部材２から検出部材３の力センサ３Ａａに衝撃負荷が加わることを阻止して制限し、過負荷に対して検出部材３における検出部３Ａの力センサ３Ａａを保護できる。 When the output member 2 receives an unexpected impact load in the Z-axis direction, the output member 2 that moves in the Z-axis direction against the elastic force of each spherical elastic member 4F and the auxiliary elastic member 7 is the output shaft. The edge of the other surface 2Bb of the plate 2B contacts the first contact surface 6A that is the stopper mechanism 6. The first contact surface 6A regulates the movement of the output member 2 in the Z-axis direction when the output shaft plate 2B contacts. That is, the output member 2 is prevented from further moving in the Z-axis direction due to the interference in the stopper mechanism 6. As a result, the detection device 1 prevents and limits the impact load applied from the output member 2 to the force sensor 3Aa of the detection member 3, and protects the force sensor 3Aa of the detection unit 3A of the detection member 3 against overload. it can.
　Ｚ軸方向及びＸ軸方向（Ｙ軸方向）に外力を受けた場合、外力を受ける出力部材２は、Ｚ軸方向に対してＸ軸方向（Ｙ軸方向）に傾くように移動する。検出部材３における検出部３Ａの力センサ３Ａａは、出力部材２の移動に伴いＺ軸方向及びＸ軸方向（Ｙ軸方向）の力を検出する。検出部材３における検出部３Ａの力センサ３Ａａは、出力部材２に結合されており出力部材２が受ける外力を直接的に検出する。この結果、検出装置１は、検出精度を確保できる。 When an external force is applied in the Z-axis direction and the X-axis direction (Y-axis direction), the output member 2 that receives the external force moves so as to incline in the X-axis direction (Y-axis direction) with respect to the Z-axis direction. The force sensor 3Aa of the detection unit 3A of the detection member 3 detects forces in the Z-axis direction and the X-axis direction (Y-axis direction) as the output member 2 moves. The force sensor 3Aa of the detection unit 3A of the detection member 3 is coupled to the output member 2 and directly detects the external force received by the output member 2. As a result, the detection device 1 can ensure the detection accuracy.
　そして、出力部材２がＺ軸方向及びＸ軸方向（Ｙ軸方向）に予期せぬ衝撃負荷を受けた場合、出力部材２及び検出部材３は、Ｚ軸方向に対してＸ軸方向（Ｙ軸方向）に傾くようにさらに移動する。傾く側の反対側において、弾性部材係合部３ＢｂのＺ軸方向の一方側（図中上側）の球状弾性部材４Ｆは、第一筐体５Ａの接触片５Ａａにより押し潰されて圧縮変形する。傾く側において、弾性部材係合部３ＢｂのＺ軸方向の他方側（図中下側）の球状弾性部材４Ｆは、嵌合溝５Ｂｂ側に押し潰されて圧縮変形する。このとき、土台部３Ｂは、球状弾性部材４Ｆの圧縮変形の範囲内において筐体５における第二筐体５Ｂの内周面５Ｂａに接触しない。圧縮変形した各球状弾性部材４Ｆは、自身の弾性力により出力部材２から検出部材３の力センサ３Ａａに加わる衝撃負荷を緩衝する。筐体５は、圧縮変形した各球状弾性部材４Ｆからの負荷を受け止める。この結果、検出装置１は、過負荷に対して検出部材３における検出部３Ａの力センサ３Ａａを保護できる。 When the output member 2 receives an unexpected impact load in the Z-axis direction and the X-axis direction (Y-axis direction), the output member 2 and the detection member 3 move in the X-axis direction (Y-axis direction) with respect to the Z-axis direction. Move further so that it tilts in the direction). On the side opposite to the inclined side, the spherical elastic member 4F on one side (upper side in the drawing) of the elastic member engaging portion 3Bb in the Z-axis direction is crushed by the contact piece 5Aa of the first housing 5A and compressed and deformed. On the inclined side, the spherical elastic member 4F on the other side (lower side in the figure) of the elastic member engaging portion 3Bb in the Z-axis direction is crushed toward the fitting groove 5Bb side and compressed and deformed. At this time, the base portion 3B does not contact the inner peripheral surface 5Ba of the second housing 5B in the housing 5 within the range of the compression deformation of the spherical elastic member 4F. Each spherical elastic member 4F that has been compressed and deformed buffers the impact load applied from the output member 2 to the force sensor 3Aa of the detection member 3 by its own elastic force. The housing 5 receives a load from each spherical elastic member 4F that has been compressed and deformed. As a result, the detection device 1 can protect the force sensor 3Aa of the detection unit 3A of the detection member 3 against overload.
　また、出力部材２がＺ軸方向及びＸ軸方向（Ｙ軸方向）に予期せぬ衝撃負荷を受けた場合、補助弾性部材７も、自身の弾性力により出力部材２から検出部材３の力センサ３Ａａに加わる衝撃負荷を緩衝する。補助弾性部材７は、各球状弾性部材４Ｆの負荷制限を大きくする。この結果、検出装置１は、補助弾性部材７により、各球状弾性部材４Ｆの変形量を調整でき、力センサ３ＡａのＺ軸方向及びＸ軸方向（Ｙ軸方向）の負荷制限を大きくできる。 Further, when the output member 2 receives an unexpected impact load in the Z-axis direction and the X-axis direction (Y-axis direction), the auxiliary elastic member 7 also receives a force sensor from the output member 2 to the detection member 3 by its own elastic force. It buffers the impact load applied to 3Aa. The auxiliary elastic member 7 increases the load limit of each spherical elastic member 4F. As a result, the detection device 1 can adjust the deformation amount of each spherical elastic member 4F by the auxiliary elastic member 7, and can increase the load limitation of the force sensor 3Aa in the Z-axis direction and the X-axis direction (Y-axis direction).
　また、出力部材２がＺ軸方向及びＸ軸方向（Ｙ軸方向）に予期せぬ衝撃負荷を受けた場合、各球状弾性部材４Ｆ及び補助弾性部材７の弾性力に抗してＺ軸方向に対してＸ軸方向（Ｙ軸方向）に傾くようにさらに移動する出力部材２は、出力軸プレート２Ｂの他方の面２Ｂｂの縁部が、ストッパ機構６である第一当接面６Ａに当接し、出力軸プレート２Ｂの周面２Ｂｅが、ストッパ機構６である第二当接面６Ｂに当接する。第一当接面６Ａは、出力軸プレート２Ｂが当接することで、出力部材２のＺ軸方向への移動を規制する。第二当接面６Ｂは、出力軸プレート２Ｂが当接することで、出力部材２のＸ軸方向（Ｙ軸方向）の移動を規制する。即ち、出力部材２は、ストッパ機構６における干渉により、Ｚ軸方向及びＸ軸方向（Ｙ軸方向）へのさらなる移動が阻止される。この結果、検出装置１は、出力部材２から検出部材３の力センサ３Ａａに衝撃負荷が加わることを阻止して制限し、過負荷に対して検出部材３における検出部３Ａの力センサ３Ａａを保護できる。 When the output member 2 receives an unexpected impact load in the Z-axis direction and the X-axis direction (Y-axis direction), the output member 2 resists the elastic force of each spherical elastic member 4F and the auxiliary elastic member 7 in the Z-axis direction. On the other hand, in the output member 2 which further moves so as to be tilted in the X-axis direction (Y-axis direction), the edge portion of the other surface 2Bb of the output shaft plate 2B abuts on the first abutting surface 6A which is the stopper mechanism 6. The peripheral surface 2Be of the output shaft plate 2B contacts the second contact surface 6B that is the stopper mechanism 6. The first contact surface 6A regulates the movement of the output member 2 in the Z-axis direction when the output shaft plate 2B contacts. The second contact surface 6B restricts the movement of the output member 2 in the X-axis direction (Y-axis direction) when the output shaft plate 2B abuts. That is, the output member 2 is prevented from further moving in the Z-axis direction and the X-axis direction (Y-axis direction) due to the interference in the stopper mechanism 6. As a result, the detection device 1 prevents and limits the impact load applied from the output member 2 to the force sensor 3Aa of the detection member 3, and protects the force sensor 3Aa of the detection unit 3A of the detection member 3 against overload. it can.
　各球状弾性部材４Ｆは、Ｚ軸方向やＸ軸方向やＹ軸方向及びモーメント負荷を受けて変形する弾性体である。各球状弾性部材４Ｆは、その断面形状、大きさにより力センサ３Ａａの保護のための過負荷の設定値を決める。各球状弾性部材４Ｆは、Ｚ軸方向まわりに複数に分割されているため、上述した第１の実施形態における各弾性部材４Ａ，４Ｂ，４Ｃと比較して設定値の設計パラメータ数が多く変更しやすい。各球状弾性部材４Ｆは、Ｚ軸方向まわりに複数に分割されているため、上述した第１の実施形態における各弾性部材４Ａ，４Ｂ，４Ｃと比較して変形量を大きく取ることができ、製造誤差を軽減できる。各球状弾性部材４Ｆは、並べて設けたユニットして上述した第１の実施形態における各弾性部材４Ａ，４Ｂ，４Ｃと比較してバネ定数を低減することが可能となり、小さい負荷制限にも対応できる。各球状弾性部材４Ｆは、Ｚ軸８を中心として対称配置することで、過負荷を受けた場合に、Ｚ軸８を中心として対称性を有して変形し、Ｚ軸方向、Ｘ軸方向Ｙ軸方向の衝撃負荷に対応した緩衝効果が得られる。また、各球状弾性部材４Ｆに分けることで、弾性部材４の全てを一塊とすることと比較してせん断力の作用を低減できる。 Each spherical elastic member 4F is an elastic body that is deformed by a Z-axis direction, an X-axis direction, a Y-axis direction, and a moment load. Each spherical elastic member 4F determines a set value of overload for protecting the force sensor 3Aa according to its sectional shape and size. Since each spherical elastic member 4F is divided into a plurality of parts around the Z-axis direction, the number of design parameters of the set value is changed more than that of each elastic member 4A, 4B, 4C in the above-described first embodiment. Cheap. Since each spherical elastic member 4F is divided into a plurality around the Z-axis direction, it is possible to take a large amount of deformation as compared with each elastic member 4A, 4B, 4C in the above-described first embodiment, and manufacturing The error can be reduced. Each spherical elastic member 4F can be a unit provided side by side and can reduce the spring constant as compared with each elastic member 4A, 4B, 4C in the above-described first embodiment, and can cope with a small load limitation. . By symmetrically arranging the spherical elastic members 4F about the Z axis 8, when they are overloaded, they are symmetrically deformed about the Z axis 8 and are deformed in the Z axis direction and the Y axis direction. A cushioning effect corresponding to an axial impact load is obtained. Moreover, by dividing each of the spherical elastic members 4F, the action of the shearing force can be reduced as compared with the case where all the elastic members 4 are made into one block.
［第１の実施形態の変形例（３）］
　図１１は、本開示の第１の実施形態の変形例（３）に係る検出装置１の構成例を示す断面図である。 [Modification (3) of the first embodiment]
FIG. 11 is a cross-sectional view showing a configuration example of the detection device 1 according to the modified example (3) of the first embodiment of the present disclosure.
　第１の実施形態の変形例（３）は、上述した第１の実施形態に対し、弾性部材４の構成が異なり、他の構成は同様である。従って、第１の実施形態の変形例（３）において、第１の実施形態と同等部分には同一の符号を付して説明を省略する。 The modification (3) of the first embodiment is different from the above-described first embodiment in the configuration of the elastic member 4, and the other configurations are the same. Therefore, in the modified example (3) of the first embodiment, the same parts as those of the first embodiment are designated by the same reference numerals and the description thereof will be omitted.
　弾性部材４は、図１１に示すように、第一弾性部材４Ａ、第二弾性部材４Ｂ及び第三弾性部材４Ｃが、連結弾性部材４Ｇにより連続して一体に形成されている。連結弾性部材４Ｇは、第一弾性部材４Ａと第二弾性部材４Ｂとの間を連結し、第一筐体５Ａの接触片５Ａａ及び第二筐体５Ｂの内周面５Ｂａに接触する。また、連結弾性部材４Ｇは、第二弾性部材４Ｂと第三弾性部材４Ｃとの間を連結し、第二筐体５Ｂの内周面５Ｂａ及び拡大された嵌合溝５Ｂｂの内部に接触する。 As shown in FIG. 11, the elastic member 4 includes a first elastic member 4A, a second elastic member 4B, and a third elastic member 4C which are continuously and integrally formed by a connecting elastic member 4G. The connecting elastic member 4G connects between the first elastic member 4A and the second elastic member 4B, and contacts the contact piece 5Aa of the first housing 5A and the inner peripheral surface 5Ba of the second housing 5B. Further, the connecting elastic member 4G connects the second elastic member 4B and the third elastic member 4C, and contacts the inner peripheral surface 5Ba of the second housing 5B and the inside of the enlarged fitting groove 5Bb.
　このように構成された第１の実施形態の変形例（３）では、図５及び図６に参照するように、上述した第１の実施形態と同様に作用し、効果が得られる。 In the modified example (3) of the first embodiment configured in this way, as described with reference to FIGS. 5 and 6, the same operation and effects as the first embodiment described above can be obtained.
　図５及び図６に示すように、第一弾性部材４Ａは、主にＺ軸方向の図中上側及びモーメント負荷を受けて変形する弾性体である。第二弾性部材４Ｂは、主にＸ軸方向やＹ軸方向及びモーメント負荷を受けて変形する弾性体である。第三弾性部材４Ｃは、Ｚ軸方向の図中下側及びモーメント負荷を受けて変形する弾性体である。リング状の各弾性部材４Ａ，４Ｂ，４Ｃは、その断面形状、大きさにより力センサ３Ａａの保護のための過負荷の設定値を決める。リング状の各弾性部材４Ａ，４Ｂ，４Ｃは、Ｚ軸８を中心として配置することで、過負荷を受けた場合に、Ｚ軸８を中心として対称性を有して変形し、Ｚ軸方向、Ｘ軸方向Ｙ軸方向の衝撃負荷に対応した緩衝効果が得られる。連結弾性部材４Ｇは、各弾性部材４Ａ，４Ｂ，４Ｃを連続して一体に連結し、各弾性部材４Ａ，４Ｂ，４Ｃの圧縮変形時の移動を抑制でき、出力部材２及び検出部材３の移動を抑制するため、検出部材３における検出部３Ａの力センサ３Ａａの検出精度をより高めることができる。 As shown in FIGS. 5 and 6, the first elastic member 4A is an elastic body that is deformed mainly by the upper side in the drawing in the Z-axis direction and a moment load. The second elastic member 4B is an elastic body that is deformed mainly by the X-axis direction, the Y-axis direction, and a moment load. The third elastic member 4C is an elastic body that deforms under the Z-axis direction in the drawing and a moment load. Each of the ring-shaped elastic members 4A, 4B, 4C determines the set value of the overload for protecting the force sensor 3Aa according to its cross-sectional shape and size. By arranging the ring-shaped elastic members 4A, 4B, and 4C with the Z axis 8 as the center, when they are overloaded, they are deformed with symmetry about the Z axis 8 and in the Z axis direction. A cushioning effect corresponding to the impact load in the X-axis direction and the Y-axis direction can be obtained. The connecting elastic member 4G continuously and integrally connects the elastic members 4A, 4B, 4C, and can suppress the movement of the elastic members 4A, 4B, 4C during compression deformation, and the movement of the output member 2 and the detection member 3 Therefore, the detection accuracy of the force sensor 3Aa of the detection unit 3A of the detection member 3 can be further increased.
（第２の実施形態）
［第２の実施形態に係る検出装置の構成］
　図１２は、本開示の第２の実施形態に係る検出装置１の構成例を示す断面図である。 (Second embodiment)
[Configuration of the detection device according to the second embodiment]
FIG. 12 is a cross-sectional view showing a configuration example of the detection device 1 according to the second embodiment of the present disclosure.
　第２の実施形態は、上述した第１の実施形態及び第１の実施形態の変形例（１）から（３）の構成を適用することができる。第２の実施形態は、上述した第１の実施形態及び第１の実施形態の変形例（１）から（３）に対し、ストッパ機構６に係る構成が異なり、他の構成は同様である。従って、第２の実施形態において、第１の実施形態及び第１の実施形態の変形例（１）から（３）と同等部分には同一の符号を付して説明を省略する。なお、図１２では、第１の実施形態の構成を一例としている。 The configuration of the first embodiment and the modification examples (1) to (3) of the first embodiment described above can be applied to the second embodiment. The second embodiment is different from the above-described first embodiment and the modified examples (1) to (3) of the first embodiment in the configuration related to the stopper mechanism 6, and the other configurations are the same. Therefore, in the second embodiment, the same parts as those in the first embodiment and the modified examples (1) to (3) of the first embodiment are designated by the same reference numerals and the description thereof will be omitted. Note that FIG. 12 illustrates the configuration of the first embodiment as an example.
　ストッパ機構６は、上述した第１の実施形態及び第１の実施形態の変形例（１）から（３）における第一当接面６Ａと第二当接面６Ｂとを繋げた曲面として形成された曲当接面６Ｃを有する。曲当接面６Ｃは、筐体５における第一筐体５Ａの内周面にＺ軸８まわりに添って設けられている。 The stopper mechanism 6 is formed as a curved surface that connects the first contact surface 6A and the second contact surface 6B in the above-described first embodiment and modification examples (1) to (3) of the first embodiment. It has a curved contact surface 6C. The curved contact surface 6C is provided along the Z axis 8 on the inner peripheral surface of the first housing 5A in the housing 5.
　また、曲当接面６Ｃに当接し得る出力軸プレート２Ｂは、その周縁部分に、上述した第１の実施形態及び第１の実施形態の変形例（１）から（３）における他方の面２Ｂｂと周面２Ｂｅとを繋げた曲面として形成された周曲面２Ｂｆを有する。周曲面２Ｂｆは、曲当接面６Ｃに対して曲面同士が接触し得る。 Further, the output shaft plate 2B, which can be brought into contact with the curved contact surface 6C, has, on the peripheral portion thereof, the other surface 2Bb in the first embodiment and the modified examples (1) to (3) of the first embodiment described above. And a peripheral curved surface 2Bf formed as a curved surface connecting the peripheral surface 2Be. The curved surfaces of the circumferential curved surface 2Bf may contact the curved contact surface 6C.
　このように構成された第２の実施形態では、出力部材２がＺ軸方向及びＸ軸方向（Ｙ軸方向）に予期せぬ衝撃負荷を受けた場合、各弾性部材４Ａ，４Ｂ，４Ｃ及び補助弾性部材７の弾性力に抗してＺ軸方向に対してＸ軸方向（Ｙ軸方向）に傾くようにさらに移動する出力部材２は、出力軸プレート２Ｂの周曲面２Ｂｆが、ストッパ機構６である曲当接面６Ｃに当接する。曲当接面６Ｃは、出力軸プレート２Ｂの周曲面２Ｂｆが当接することで、出力部材２のＺ軸方向及びＸ軸方向（Ｙ軸方向）の複数軸方向の移動を規制する。即ち、出力部材２は、ストッパ機構６における干渉により、Ｚ軸方向及びＸ軸方向（Ｙ軸方向）の複数軸方向へのさらなる移動が阻止される。この結果、検出装置１は、出力部材２から検出部材３の力センサ３Ａａに衝撃負荷が加わることを阻止して制限し、過負荷に対して検出部材３における検出部３Ａの力センサ３Ａａを保護できる。 In the second embodiment configured as above, when the output member 2 receives an unexpected impact load in the Z-axis direction and the X-axis direction (Y-axis direction), the elastic members 4A, 4B, 4C and the auxiliary members are assisted. In the output member 2 that further moves so as to incline in the X-axis direction (Y-axis direction) with respect to the Z-axis direction against the elastic force of the elastic member 7, the circumferential curved surface 2Bf of the output shaft plate 2B is the stopper mechanism 6. It contacts a certain curved contact surface 6C. The curved contact surface 6C restricts the movement of the output member 2 in a plurality of axial directions in the Z-axis direction and the X-axis direction (Y-axis direction) when the peripheral curved surface 2Bf of the output shaft plate 2B abuts. That is, the output member 2 is prevented from further moving in the Z-axis direction and the X-axis direction (Y-axis direction) in the plural axis directions due to the interference in the stopper mechanism 6. As a result, the detection device 1 prevents and limits the impact load applied from the output member 2 to the force sensor 3Aa of the detection member 3, and protects the force sensor 3Aa of the detection unit 3A of the detection member 3 against overload. it can.
　また、ストッパ機構６は、筐体５に設けられて、出力部材２の出力軸プレート２Ｂと衝突することで力センサ３Ａａへの負荷を制限し、筐体５と出力軸プレート２Ｂとのすき間量で過負荷の設定値を調整する。ここで、力センサ３Ａａへの負荷制限は、各弾性部材４Ａ，４Ｂ，４Ｃの形状及び弾性力、ストッパ機構６の筐体５と出力軸プレート２Ｂとのすき間量により事前に設計値として決定される。すき間量は、例えば、１ｍｍから２ｍｍ程度が好ましい。また、ストッパ機構６において、曲当接面６Ｃと周曲面２Ｂｆとの当接により、相互の変形を抑制でき、より強い負荷制限に対応可能である。また、ストッパ機構６において、曲当接面６Ｃと周曲面２Ｂｆとは、同等又は近似する曲率であることが面接触をして出力部材２のＺ軸方向及びＸ軸方向（Ｙ軸方向）の移動を好適に規制できる。 In addition, the stopper mechanism 6 is provided in the housing 5 and limits the load on the force sensor 3Aa by colliding with the output shaft plate 2B of the output member 2 to reduce the clearance between the housing 5 and the output shaft plate 2B. Adjust the overload setting value with. Here, the load limitation on the force sensor 3Aa is determined in advance as a design value depending on the shape and elastic force of each elastic member 4A, 4B, 4C, and the clearance amount between the housing 5 of the stopper mechanism 6 and the output shaft plate 2B. It The clearance amount is preferably about 1 mm to 2 mm, for example. Further, in the stopper mechanism 6, the curved contact surface 6C and the peripheral curved surface 2Bf are in contact with each other, so that mutual deformation can be suppressed, and a stronger load restriction can be dealt with. Further, in the stopper mechanism 6, the curved contact surface 6C and the peripheral curved surface 2Bf have the same or similar curvatures to make surface contact with each other in the Z-axis direction and the X-axis direction (Y-axis direction) of the output member 2. Movement can be controlled appropriately.
（第３の実施形態）
［第３の実施形態に係る検出装置の構成］
　図１３は、本開示の第３の実施形態に係る検出装置１の構成例を示すブロック図である。図１４及び図１５は、本開示の第３の実施形態に係る検出装置１の構成例を示す断面図である。 (Third Embodiment)
[Configuration of the detection device according to the third embodiment]
FIG. 13 is a block diagram showing a configuration example of the detection device 1 according to the third embodiment of the present disclosure. 14 and 15 are cross-sectional views showing a configuration example of the detection device 1 according to the third embodiment of the present disclosure.
　第３の実施形態は、上述した第１の実施形態、第１の実施形態の変形例（１）から（３）及び第２の実施形態の構成を適用することができる。第３の実施形態は、上述した第１の実施形態、第１の実施形態の変形例（１）から（３）及び第２の実施形態に対し、接触検出部１２を有する点で異なり、他の構成は同様である。従って、第３の実施形態において、第１の実施形態、第１の実施形態の変形例（１）から（３）及び第２の実施形態と同等部分には同一の符号を付して説明を省略する。なお、図１４では、第１の実施形態の構成を一例としている。 The configuration of the above-described first embodiment, modification examples (1) to (3) of the first embodiment and the configuration of the second embodiment can be applied to the third embodiment. The third embodiment is different from the above-described first embodiment, modification examples (1) to (3) of the first embodiment, and the second embodiment in that a contact detection unit 12 is provided, and The configuration is the same. Therefore, in the third embodiment, the same parts as those in the first embodiment, the modified examples (1) to (3) of the first embodiment, and the second embodiment will be denoted by the same reference numerals and will not be described. Omit it. Note that FIG. 14 illustrates the configuration of the first embodiment as an example.
　接触検出部１２は、ストッパ機構６において出力部材２の出力軸プレート２Ｂと筐体５との接触を検出する。出力部材２と筐体５との接触を検出することで、処理部１１では、ストッパ機構６が機能して過負荷状態であることが検知することが可能となる。処理部１１は、検知した過負荷が生じたことや過負荷の生じた回数をユーザに提示する。また、処理部１１は、過負荷が生じたことや過負荷の生じた回数を脚ロボット１００のロボット制御部１０５に出力してもよい。ロボット制御部１０５では、過負荷が生じないように駆動モータ１０３の出力を抑えるように制御できる。 The contact detector 12 detects the contact between the output shaft plate 2B of the output member 2 and the housing 5 in the stopper mechanism 6. By detecting the contact between the output member 2 and the housing 5, the processing unit 11 can detect that the stopper mechanism 6 is functioning and is in the overloaded state. The processing unit 11 presents to the user the detected overload and the number of times the overload has occurred. In addition, the processing unit 11 may output the overload and the number of times the overload has occurred to the robot control unit 105 of the leg robot 100. The robot control unit 105 can perform control so that the output of the drive motor 103 is suppressed so that overload does not occur.
　接触検出部１２は、図１４に示すように、筐体５における第一筐体５Ａの第一当接面６Ａ及び第二当接面６Ｂと、この第一当接面６Ａ及び第二当接面６Ｂに当接する出力部材２における出力軸プレート２Ｂの他方の面２Ｂｂ及び周面２Ｂｅとに対し、それぞれ電極１２Ａ，１２Ｂを設け、互いの当接部分を導電体として構成する。そして、接触検出部１２は、各電極１２Ａ，１２Ｂが接触した通電による導電体間の抵抗値により出力部材２と筐体５との接触を検出する。各電極１２Ａ，１２Ｂは、第２の実施形態の場合は曲当接面６Ｃと周曲面２Ｂｆとに設ける。 As shown in FIG. 14, the contact detection unit 12 includes the first contact surface 6A and the second contact surface 6B of the first housing 5A in the housing 5, and the first contact surface 6A and the second contact surface 6B. Electrodes 12A and 12B are provided on the other surface 2Bb of the output shaft plate 2B and the peripheral surface 2Be of the output member 2 that abut on the surface 6B, and the abutting portions of the electrodes 12A and 12B are configured as conductors. Then, the contact detector 12 detects the contact between the output member 2 and the housing 5 based on the resistance value between the conductors due to the energization of the electrodes 12A and 12B. In the case of the second embodiment, the electrodes 12A and 12B are provided on the curved contact surface 6C and the peripheral curved surface 2Bf.
　また、接触検出部１２は、図１５に示すように、筐体５における第一筐体５Ａの第一当接面６Ａ及び第二当接面６Ｂに圧力検出シート１２Ｃを設ける。そして、接触検出部１２は、圧力検出シート１２Ｃの圧力検出により出力部材２と筐体５との接触圧力を検出する。圧力検出シート１２Ｃは、第一当接面６Ａ及び第二当接面６Ｂに当接する出力部材２における出力軸プレート２Ｂの他方の面２Ｂｂ及び周面２Ｂｅに設けてもよい。圧力検出シート１２Ｃは、第２の実施形態の場合は曲当接面６Ｃと周曲面２Ｂｆとのいずれか一方に設ける。接触圧力を検出することで、過負荷の量も推定でき、過負荷の量を定量的に把握できる。 Further, as shown in FIG. 15, the contact detection unit 12 provides a pressure detection sheet 12C on the first contact surface 6A and the second contact surface 6B of the first housing 5A in the housing 5. Then, the contact detection unit 12 detects the contact pressure between the output member 2 and the housing 5 by detecting the pressure of the pressure detection sheet 12C. The pressure detection sheet 12C may be provided on the other surface 2Bb and the peripheral surface 2Be of the output shaft plate 2B of the output member 2 that contacts the first contact surface 6A and the second contact surface 6B. In the case of the second embodiment, the pressure detection sheet 12C is provided on either the curved contact surface 6C or the circumferential curved surface 2Bf. By detecting the contact pressure, the amount of overload can also be estimated, and the amount of overload can be grasped quantitatively.
（第４の実施形態）
［第４の実施形態に係る検出装置の構成］
　図１６は、本開示の第４の実施形態に係る検出装置の構成例を示すブロック図である。図１７から図２０は、本開示の第４の実施形態に係る検出装置の構成例を示す断面図である。 (Fourth Embodiment)
[Configuration of the detection device according to the fourth embodiment]
FIG. 16 is a block diagram showing a configuration example of a detection device according to the fourth embodiment of the present disclosure. 17 to 20 are cross-sectional views showing configuration examples of the detection device according to the fourth embodiment of the present disclosure.
　第４の実施形態は、上述した第１の実施形態、第１の実施形態の変形例（１）から（３）、第２の実施形態及び第３の実施形態の構成を適用することができる。第４の実施形態は、上述した第１の実施形態、第１の実施形態の変形例（１）から（３）、第２の実施形態及び第３の実施形態に対し、傾き取得部１３を有する点で異なり、他の構成は同様である。従って、第４の実施形態において、第１の実施形態、第１の実施形態の変形例（１）から（３）、第２の実施形態及び第３の実施形態と同等部分には同一の符号を付して説明を省略する。なお、図１５から図２０では、第１の実施形態の構成を一例としている。 The fourth embodiment can apply the configurations of the above-described first embodiment, modified examples (1) to (3) of the first embodiment, the second embodiment, and the third embodiment. . The fourth embodiment is different from the above-described first embodiment, the modified examples (1) to (3) of the first embodiment, the second embodiment and the third embodiment in that the inclination acquisition unit 13 is provided. The other configurations are the same, except that they have. Therefore, in the fourth embodiment, the same parts as those in the first embodiment, the modifications (1) to (3) of the first embodiment, the second embodiment and the third embodiment have the same reference numerals. Is attached and the description is omitted. 15 to 20, the configuration of the first embodiment is taken as an example.
　傾き取得部１３は、検出部材３の移動に伴う力センサ３ＡａのＺ軸８に対する傾きを取得する。力センサ３Ａａでは、検出部材３が移動した状態で力の軸方向の傾きを検出しているため、自身の傾きと検出した傾きとで誤差が生じる可能性がある。力センサ３ＡａのＺ軸８に対する傾きを取得することで、処理部１１では、傾き取得部１３から得た傾きに基づき、検出部材３が移動した状態で力センサ３Ａａが検出した力の傾きを補正する。この結果、力センサ３Ａａが検出した力の傾きをＺ軸８に対する傾きとして得られるため、検出精度を確保することができる。 The inclination acquisition unit 13 acquires the inclination of the force sensor 3Aa with respect to the Z axis 8 as the detection member 3 moves. Since the force sensor 3Aa detects the inclination of the force in the axial direction while the detection member 3 moves, an error may occur between the inclination of itself and the detected inclination. By acquiring the inclination of the force sensor 3Aa with respect to the Z axis 8, the processing unit 11 corrects the inclination of the force detected by the force sensor 3Aa in the state where the detection member 3 is moved, based on the inclination obtained from the inclination acquisition unit 13. To do. As a result, the inclination of the force detected by the force sensor 3Aa is obtained as the inclination with respect to the Z-axis 8, so that the detection accuracy can be ensured.
　なお、傾き取得部１３で取得した傾きを脚ロボット１００のロボット制御部１０５に出力してもよい。ロボット制御部１０５では、傾き取得部１３から得た傾きを変動値として得ることができる。この結果、ロボット制御部１０５では、検出装置１を取り付けた位置を正確に制御できる。 The inclination acquired by the inclination acquisition unit 13 may be output to the robot control unit 105 of the leg robot 100. The robot control unit 105 can obtain the inclination obtained from the inclination acquisition unit 13 as a variation value. As a result, the robot controller 105 can accurately control the position where the detection device 1 is attached.
　傾き取得部１３は、図１７に示すように、力センサ３ＡａのＺ軸８に対する傾きをシミュレーションにより予め取得して記憶しておくことができる。図１７では、検出部材３がＺ軸８を基準としてＸ軸方向に傾いた場合の弾性部材４に生じる負荷荷重と、この負荷荷重時における検出部材３のＺ軸８を基準としたＸ軸方向への変位量との相関関係をシミュレーションにより算出した結果を示す。弾性部材４は、例えば、図６において、第三弾性部材４Ｃが圧縮変形した図中左側の部分とする。Ｚ軸８を基準としたＸ軸方向への変位量を示す位置は、例えば、図１において、力センサ３Ａａの出力軸３Ａｂが接続した検出面のＺ軸８の位置とする。第三弾性部材４Ｃは、図１７に示すように、●であらわすＸ軸方向の負荷荷重と、△であらわすＺ方向の負荷荷重とが加わり、それぞれの負荷荷重におけるＸ軸方向への変位量の相関関係が算出されている。傾き取得部１３は、この相関関係を予め取得して記憶している。 As shown in FIG. 17, the inclination acquisition unit 13 can acquire and store the inclination of the force sensor 3Aa with respect to the Z axis 8 in advance by simulation. In FIG. 17, the load applied to the elastic member 4 when the detection member 3 is tilted in the X-axis direction with respect to the Z-axis 8 and the X-axis direction with reference to the Z-axis 8 of the detection member 3 at this load load The result of having calculated the correlation with the amount of displacement to The elastic member 4 is, for example, the left side portion in FIG. 6 in which the third elastic member 4C is compressed and deformed in FIG. The position indicating the amount of displacement in the X-axis direction with reference to the Z-axis 8 is, for example, the position of the Z-axis 8 on the detection surface to which the output shaft 3Ab of the force sensor 3Aa is connected in FIG. As shown in FIG. 17, the third elastic member 4C is applied with a load load in the X-axis direction represented by ● and a load load in the Z-direction represented by Δ, and the displacement amount in the X-axis direction under each load load is calculated. Correlation has been calculated. The inclination acquisition unit 13 acquires and stores this correlation in advance.
　そして、処理部１１は、力センサ３Ａａが検出したＺ軸方向の力およびＸ軸方向の力を得た場合、Ｚ軸方向の力を図１７のＺ軸方向への変位量に当てはめると共に、Ｘ軸方向の力を図１６のＸ軸方向の変位量に当てはめることで、Ｘ軸方向への変位量を取得し、この変位量に基づいて力センサ３Ａａが検出した力の傾きを補正する。 Then, when the processing unit 11 obtains the Z-axis direction force and the X-axis direction force detected by the force sensor 3Aa, the processing unit 11 applies the Z-axis direction force to the displacement amount in the Z-axis direction in FIG. By applying the axial force to the displacement amount in the X-axis direction in FIG. 16, the displacement amount in the X-axis direction is acquired, and the inclination of the force detected by the force sensor 3Aa is corrected based on this displacement amount.
　このシミュレーション結果を予め取得して記憶する傾き取得部１３は、別途傾きを取得するセンサの付加が不要であり、装置の小型化を図り、かつ製造コストの低減化を図ることができる。 The inclination acquisition unit 13 that acquires and stores this simulation result in advance does not need to add a sensor that acquires the inclination separately, and can downsize the device and reduce the manufacturing cost.
　また、傾き取得部１３は、図１８に示すように、レーザ発光部１３Ａａと、レーザ受光部としてのフォトインタラプタ１３Ａｂと、を有する構成であってもよい。レーザ発光部１３Ａａは、レーザを発光するもので、検出部材３における検出部３Ａに配置される。フォトインタラプタ１３Ａｂは、レーザ発光部１３Ａａが発光するレーザを受光するもので、筐体５における第二筐体５Ｂの底部に配置される。レーザ発光部１３Ａａとフォトインタラプタ１３Ａｂとの配置は逆であってもよい。検出部材３は移動する移動部で、筐体５は固定される固定部であり、レーザ発光部１３Ａａから発光するレーザをフォトインタラプタ１３Ａｂの位置として検出することで、検出部３Ａの力センサ３Ａａの傾きを検出することができる。 Further, the inclination acquisition unit 13 may have a configuration including a laser emitting unit 13Aa and a photo interrupter 13Ab as a laser receiving unit, as shown in FIG. The laser emitting section 13Aa emits a laser and is arranged in the detecting section 3A of the detecting member 3. The photo interrupter 13Ab receives the laser emitted by the laser emitting section 13Aa, and is arranged at the bottom of the second housing 5B in the housing 5. The arrangement of the laser emitting unit 13Aa and the photo interrupter 13Ab may be reversed. The detection member 3 is a moving part that moves, and the housing 5 is a fixed part that is fixed. By detecting the laser emitted from the laser emission part 13Aa as the position of the photo interrupter 13Ab, the force sensor 3Aa of the detection part 3A is detected. The tilt can be detected.
　そして、処理部１１は、力センサ３Ａａが検出したＺ軸方向の力およびＸ軸方向の力を得た場合、レーザ発光部１３Ａａとフォトインタラプタ１３Ａｂとにより検出した力センサ３Ａａの傾きに基づき、検出部材３が移動した状態で力センサ３Ａａが検出した力の傾きを補正する。レーザ発光部１３Ａａとフォトインタラプタ１３Ａｂは、力センサ３Ａａの実際の傾きを検出するものであるから、正確な補正を行うことができる。 Then, when the processing unit 11 obtains the force in the Z-axis direction and the force in the X-axis direction detected by the force sensor 3Aa, the processing unit 11 detects the force based on the inclination of the force sensor 3Aa detected by the laser emission unit 13Aa and the photo interrupter 13Ab. The inclination of the force detected by the force sensor 3Aa is corrected while the member 3 is moved. Since the laser emission unit 13Aa and the photo interrupter 13Ab detect the actual inclination of the force sensor 3Aa, accurate correction can be performed.
　また、傾き取得部１３は、図１９に示すように、１対の電極１３Ｂａ，１３Ｂｂを有する静電容量式センサとして構成してもよい。一方の電極１３Ｂａは、検出部材３における検出部３Ａに配置される。他方の電極１３Ｂｂは、筐体５における第二筐体５Ｂの底部に配置される。検出部材３は移動する移動部で、筐体５は固定される固定部であり、これらの相対位置関係を静電容量式センサにおける静電容量の変化により測定することで、検出部３Ａの力センサ３Ａａの傾きを検出することができる。 The inclination acquisition unit 13 may be configured as a capacitance type sensor having a pair of electrodes 13Ba and 13Bb as shown in FIG. One electrode 13Ba is arranged in the detection portion 3A of the detection member 3. The other electrode 13Bb is arranged at the bottom of the second casing 5B in the casing 5. The detection member 3 is a moving part that moves, and the housing 5 is a fixed part that is fixed. The force of the detection part 3A is measured by measuring the relative positional relationship between them by the change in the capacitance of the capacitance type sensor. The inclination of the sensor 3Aa can be detected.
　そして、処理部１１は、力センサ３Ａａが検出したＺ軸方向の力およびＸ軸方向の力を得た場合、静電容量式センサで検出した力センサ３Ａａの傾きに基づき、検出部材３が移動した状態で力センサ３Ａａが検出した力の傾きを補正する。静電容量式センサは、力センサ３Ａａの実際の傾きを検出するものであるから、正確な補正を行うことができる。また、静電容量式センサは、製造容易性が高く、製造コストを抑えることができる。 Then, when the processing unit 11 obtains the force in the Z-axis direction and the force in the X-axis direction detected by the force sensor 3Aa, the detection member 3 moves based on the inclination of the force sensor 3Aa detected by the capacitance sensor. The inclination of the force detected by the force sensor 3Aa is corrected in this state. Since the capacitance type sensor detects the actual inclination of the force sensor 3Aa, it can be accurately corrected. Further, the capacitance type sensor has high easiness of manufacturing and can suppress the manufacturing cost.
　また、傾き取得部１３は、図２０に示すように、慣性計測装置（ＩＭＵ:Inertial　Measurement　Unit）１３Ｃとして構成してもよい。慣性計測装置１３Ｃは、検出部材３の検出部３Ａに配置され、力センサ３Ａａにおける３次元の角速度と加速度により力センサ３Ａａの傾きを計測する。 The inclination acquisition unit 13 may be configured as an inertial measurement unit (IMU: Inertial Measurement Unit) 13C as shown in FIG. The inertial measurement device 13C is arranged in the detection unit 3A of the detection member 3 and measures the inclination of the force sensor 3Aa by the three-dimensional angular velocity and acceleration of the force sensor 3Aa.
　そして、処理部１１は、力センサ３Ａａが検出したＺ軸方向の力およびＸ軸方向の力を得た場合、慣性計測装置１３Ｃで検出した力センサ３Ａａの傾きに基づき、検出部材３が移動した状態で力センサ３Ａａが検出した力の傾きを補正する。慣性計測装置１３Ｃは、力センサ３Ａａの実際の傾きを検出するものであるから、正確な補正を行うことができる。 When the processing unit 11 obtains the force in the Z-axis direction and the force in the X-axis direction detected by the force sensor 3Aa, the detection member 3 moves based on the inclination of the force sensor 3Aa detected by the inertial measurement device 13C. The inclination of the force detected by the force sensor 3Aa in the state is corrected. Since the inertial measurement device 13C detects the actual inclination of the force sensor 3Aa, it can perform accurate correction.
　なお、本明細書に記載された効果はあくまで例示であって限定されるものでは無く、また他の効果があってもよい。 It should be noted that the effects described in this specification are merely examples and are not limited, and there may be other effects.
　なお、本技術は以下のような構成も取ることができる。
（１）
　外力を受ける出力部材と、
　前記出力部材が受けた力を検出する力センサを含む検出部材と、
　前記検出部材を移動可能に支持する弾性部材と、
　を有する検出装置。
（２）
　前記力センサは、前記出力部材が受けた多軸方向の力を検出可能に設けられ、前記弾性部材は、前記多軸方向へ前記検出部材を移動可能に支持する（１）記載の検出装置。
（３）
　前記弾性部材は、前記検出部材の移動に伴って弾性変形可能な複数のリング状に構成されている（２）に記載の検出装置。
（４）
　前記弾性部材は、前記検出部材の移動に伴って弾性変形可能な複数の角形状と複数の筒形状に構成されている（２）に記載の検出装置。
（５）
　前記弾性部材は、前記検出部材の移動に伴って弾性変形可能な複数の球形状に構成されている（２）に記載の検出装置。
（６）
　前記検出部材の移動に伴う前記弾性部材の変形量を調整する補助弾性部材を有する（１）から（５）のいずれか１つに記載の検出装置。
（７）
　前記出力部材の移動を規制するストッパ機構を有する（１）から（６）のいずれか１つに記載の検出装置。
（８）
　前記ストッパ機構は、前記出力部材と互いに接触する曲面により構成されている（７）に記載の検出装置。
（９）
　前記ストッパ機構は、前記出力部材の移動の規制に際する接触を検出する接触検出部を有する（７）又は（８）に記載の検出装置。
（１０）
　前記接触検出部は、接触部分を導電体とし、各前記導電体間の抵抗値を検出する（９）に記載の検出装置。
（１１）
　前記接触検出部は、接触部分の接触圧力を検出する（９）に記載の検出装置。
（１２）
　前記検出部材の所定の軸を基準とした傾きを取得する傾き取得部と、
　移動した状態で前記力センサが検出する力の傾きを前記傾き取得部から得た傾きに基づき補正する処理部と、
　を有する（１）から（１１）のいずれか１つに記載の検出装置。
（１３）
　前記傾き取得部は、前記弾性部材に生じる所定の軸を基準とした負荷荷重と当該負荷荷重における前記検出部材の所定の軸を基準とした変位量との相関関係の情報を予め取得しており、前記処理部は、前記力センサが検出する所定の軸を基準とした力の傾きを前記相関関係の情報に基づき補正する（１２）に記載の検出装置。
（１４）
　前記傾き取得部は、前記検出部材と固定部との間で照射するレーザの入射角により前記検出部材の傾きを取得する（１２）に記載の検出装置。
（１５）
　前記傾き取得部は、前記検出部材と固定部との間の静電容量の変化により前記検出部材の傾きを取得する（１２）に記載の検出装置。
（１６）
　前記傾き取得部は、前記検出部材における３次元の角速度と加速度により前記検出部材の傾きを取得する（１２）に記載の検出装置。
（１７）
　（１）から（１６）のいずれか１つに記載の検出装置を先端に備えるロボット。 Note that the present technology may also be configured as below.
(1)
An output member that receives an external force,
A detection member including a force sensor for detecting the force received by the output member,
An elastic member that movably supports the detection member,
A detection device having.
(2)
The force sensor is provided so as to detect a force in the multi-axis direction received by the output member, and the elastic member supports the detection member so as to be movable in the multi-axis direction.
(3)
The said elastic member is a detection apparatus as described in (2) comprised by the some ring shape elastically deformable with the movement of the said detection member.
(4)
The detection device according to (2), wherein the elastic member is configured into a plurality of angular shapes and a plurality of tubular shapes that are elastically deformable as the detection member moves.
(5)
The said elastic member is a detection apparatus as described in (2) comprised by the some spherical shape elastically deformable with the movement of the said detection member.
(6)
The detection device according to any one of (1) to (5), further including an auxiliary elastic member that adjusts a deformation amount of the elastic member due to movement of the detection member.
(7)
The detection device according to any one of (1) to (6), including a stopper mechanism that restricts movement of the output member.
(8)
The said stopper mechanism is a detection apparatus as described in (7) comprised by the curved surface which contacts the said output member mutually.
(9)
The said stopper mechanism is a detection apparatus as described in (7) or (8) which has a contact detection part which detects the contact at the time of regulation of the movement of the said output member.
(10)
The said contact detection part is a detection apparatus as described in (9) which makes a contact part a conductor and detects the resistance value between each said conductor.
(11)
The said contact detection part is a detection apparatus as described in (9) which detects the contact pressure of a contact part.
(12)
An inclination acquisition unit that acquires an inclination based on a predetermined axis of the detection member,
A processing unit that corrects the inclination of the force detected by the force sensor in the moved state based on the inclination obtained from the inclination acquisition unit;
The detection device according to any one of (1) to (11), which includes:
(13)
The inclination acquisition unit acquires in advance information on a correlation between a load applied to a predetermined axis of the elastic member as a reference and a displacement amount of the detection member at the load with respect to a predetermined axis as a reference. The detection unit according to (12), wherein the processing unit corrects a slope of force detected by the force sensor with reference to a predetermined axis based on the information on the correlation.
(14)
The said inclination acquisition part is a detection apparatus as described in (12) which acquires the inclination of the said detection member with the incident angle of the laser irradiated between the said detection member and a fixed part.
(15)
The said inclination acquisition part is a detection apparatus as described in (12) which acquires the inclination of the said detection member from the change of the electrostatic capacitance between the said detection member and a fixed part.
(16)
The said inclination acquisition part is a detection apparatus as described in (12) which acquires the inclination of the said detection member from the three-dimensional angular velocity and acceleration in the said detection member.
(17)
A robot having the detection device according to any one of (1) to (16) at its tip.
　１　検出装置
　２　出力部材
　３　検出部材
　４　弾性部材
　５　筐体
　６　ストッパ機構
　７　補助弾性部材
　１１　処理部
　１２　接触検出部
　１２Ａ，１２Ｂ　電極
　１２Ｃ　圧力検出シート
　１３　傾き取得部
　１３Ａａ　レーザ発光部
　１３Ａｂ　フォトインタラプタ
　１３Ｂａ　電極
　１３Ｂｂ　電極
　１３Ｃ　慣性計測装置 DESCRIPTION OF SYMBOLS 1 detection device 2 output member 3 detection member 4 elastic member 5 housing 6 stopper mechanism 7 auxiliary elastic member 11 processing unit 12 contact detection unit 12A, 12B electrode 12C pressure detection sheet 13 inclination acquisition unit 13Aa laser emission unit 13Ab photointerrupter 13Ba electrode 13Bb electrode 13C inertial measurement device

Claims (16)

  1. 　外力を受ける出力部材と、
    　前記出力部材が受けた力を検出する力センサを含む検出部材と、
    　前記検出部材を移動可能に支持する弾性部材と、
    　を有する検出装置。     An output member that receives an external force,
    A detection member including a force sensor for detecting the force received by the output member,
    An elastic member that movably supports the detection member,
    A detection device having.
  2. 　前記出力部材の移動を規制するストッパ機構を有する請求項１に記載の検出装置。 The detection device according to claim 1, further comprising a stopper mechanism that restricts movement of the output member.
  3. 　前記力センサは、前記出力部材が受けた多軸方向の力を検出可能に設けられ、前記弾性部材は、前記多軸方向へ前記検出部材を移動可能に支持する請求項１に記載の検出装置。 The detection device according to claim 1, wherein the force sensor is provided so as to detect a force applied to the output member in a multi-axis direction, and the elastic member movably supports the detection member in the multi-axis direction. .
  4. 　前記弾性部材は、前記検出部材の移動に伴って弾性変形可能な複数のリング状に構成されている請求項３に記載の検出装置。 The detection device according to claim 3, wherein the elastic member is configured into a plurality of ring shapes that are elastically deformable as the detection member moves.
  5. 　前記弾性部材は、前記検出部材の移動に伴って弾性変形可能な複数の角形状と複数の筒形状に構成されている請求項３に記載の検出装置。 The detection device according to claim 3, wherein the elastic member is configured into a plurality of angular shapes and a plurality of tubular shapes that are elastically deformable as the detection member moves.
  6. 　前記弾性部材は、前記検出部材の移動に伴って弾性変形可能な複数の球形状に構成されている請求項３に記載の検出装置。 The detection device according to claim 3, wherein the elastic member is formed into a plurality of spherical shapes that are elastically deformable as the detection member moves.
  7. 　前記検出部材の移動に伴う前記弾性部材の変形量を調整する補助弾性部材を有する請求項１に記載の検出装置。 The detection device according to claim 1, further comprising an auxiliary elastic member that adjusts a deformation amount of the elastic member due to movement of the detection member.
  8. 　前記ストッパ機構は、前記出力部材と互いに接触する曲面により構成されている請求項２に記載の検出装置。 The detection device according to claim 2, wherein the stopper mechanism is configured by a curved surface that comes into contact with the output member.
  9. 　前記ストッパ機構は、前記出力部材の移動の規制に際する接触を検出する接触検出部を有する請求項２に記載の検出装置。 The detection device according to claim 2, wherein the stopper mechanism includes a contact detection unit that detects a contact when the movement of the output member is restricted.
  10. 　前記接触検出部は、接触部分を導電体とし、各前記導電体間の抵抗値を検出する請求項９に記載の検出装置。 The detection device according to claim 9, wherein the contact detection unit uses a conductor as a contact portion and detects a resistance value between the conductors.
  11. 　前記接触検出部は、接触部分の接触圧力を検出する請求項９に記載の検出装置。 The detection device according to claim 9, wherein the contact detection unit detects a contact pressure at a contact portion.
  12. 　前記検出部材の所定の軸を基準とした傾きを取得する傾き取得部と、
    　移動した状態で前記力センサが検出する力の傾きを前記傾き取得部から得た傾きに基づき補正する処理部と、
    　を有する請求項１に記載の検出装置。     An inclination acquisition unit that acquires an inclination based on a predetermined axis of the detection member,
    A processing unit that corrects the inclination of the force detected by the force sensor in the moved state based on the inclination obtained from the inclination acquisition unit;
    The detection device according to claim 1, further comprising:
  13. 　前記傾き取得部は、前記弾性部材に生じる所定の軸を基準とした負荷荷重と当該負荷荷重における前記検出部材の所定の軸を基準とした変位量との相関関係の情報を予め取得しており、前記処理部は、前記力センサが検出する所定の軸を基準とした力の傾きを前記相関関係の情報に基づき補正する請求項１２に記載の検出装置。 The inclination acquisition unit acquires in advance information on a correlation between a load applied to a predetermined axis of the elastic member and a displacement amount of the detection member based on a predetermined axis of the applied load. The detection device according to claim 12, wherein the processing unit corrects a slope of force detected by the force sensor with reference to a predetermined axis based on the information on the correlation.
  14. 　前記傾き取得部は、前記検出部材と固定部との間で照射するレーザの入射角により前記検出部材の傾きを取得する請求項１２に記載の検出装置。 The detection device according to claim 12, wherein the inclination acquisition unit acquires the inclination of the detection member based on an incident angle of laser emitted between the detection member and the fixed unit.
  15. 　前記傾き取得部は、前記検出部材と固定部との間の静電容量の変化により前記検出部材の傾きを取得する請求項１２に記載の検出装置。 The detection device according to claim 12, wherein the inclination acquisition unit acquires the inclination of the detection member based on a change in electrostatic capacitance between the detection member and the fixed unit.
  16. 　前記傾き取得部は、前記検出部材における３次元の角速度と加速度により前記検出部材の傾きを取得する請求項１２に記載の検出装置。 The detection device according to claim 12, wherein the inclination acquisition unit acquires the inclination of the detection member based on a three-dimensional angular velocity and acceleration of the detection member.
PCT/JP2019/037247 2018-10-26 2019-09-24 Detection device WO2020084980A1 (en)

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Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2021116995A1 (en) * 2019-12-12 2021-06-17 Nanyang Technological University Force sensing device with isotropic compliance
CN113525549A (en) * 2021-08-20 2021-10-22 深圳鹏行智能研究有限公司 Robot foot and robot with same
CN116839768A (en) * 2023-06-30 2023-10-03 济南大学 Miniature piezoresistive stress sensor based on tungsten diselenide

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001255216A (en) * 2000-03-10 2001-09-21 Kubota Corp Digital load cell unit and load cell type scale
JP2003254843A (en) * 2002-03-05 2003-09-10 Honda Motor Co Ltd Six axial force sensor
US20090259412A1 (en) * 2006-02-23 2009-10-15 Abb Ab system for controlling the position and orientation of an object in dependence on received forces and torques from a user
JP2011158469A (en) * 2010-01-05 2011-08-18 Cores:Kk Force gauge and load cell

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001255216A (en) * 2000-03-10 2001-09-21 Kubota Corp Digital load cell unit and load cell type scale
JP2003254843A (en) * 2002-03-05 2003-09-10 Honda Motor Co Ltd Six axial force sensor
US20090259412A1 (en) * 2006-02-23 2009-10-15 Abb Ab system for controlling the position and orientation of an object in dependence on received forces and torques from a user
JP2011158469A (en) * 2010-01-05 2011-08-18 Cores:Kk Force gauge and load cell

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2021116995A1 (en) * 2019-12-12 2021-06-17 Nanyang Technological University Force sensing device with isotropic compliance
CN113525549A (en) * 2021-08-20 2021-10-22 深圳鹏行智能研究有限公司 Robot foot and robot with same
CN116839768A (en) * 2023-06-30 2023-10-03 济南大学 Miniature piezoresistive stress sensor based on tungsten diselenide
CN116839768B (en) * 2023-06-30 2024-02-20 济南大学 Miniature piezoresistive stress sensor based on tungsten diselenide

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