CN116839768A - Miniature piezoresistive stress sensor based on tungsten diselenide - Google Patents

Miniature piezoresistive stress sensor based on tungsten diselenide Download PDF

Info

Publication number
CN116839768A
CN116839768A CN202310798721.0A CN202310798721A CN116839768A CN 116839768 A CN116839768 A CN 116839768A CN 202310798721 A CN202310798721 A CN 202310798721A CN 116839768 A CN116839768 A CN 116839768A
Authority
CN
China
Prior art keywords
plate
tungsten diselenide
layer
stress sensor
conductive sheet
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
CN202310798721.0A
Other languages
Chinese (zh)
Other versions
CN116839768B (en
Inventor
逄金波
侯崇洋
刘瑞
刘宏
周伟家
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
University of Jinan
Original Assignee
University of Jinan
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by University of Jinan filed Critical University of Jinan
Priority to CN202310798721.0A priority Critical patent/CN116839768B/en
Publication of CN116839768A publication Critical patent/CN116839768A/en
Application granted granted Critical
Publication of CN116839768B publication Critical patent/CN116839768B/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01LMEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L1/00Measuring force or stress, in general
    • G01L1/18Measuring force or stress, in general using properties of piezo-resistive materials, i.e. materials of which the ohmic resistance varies according to changes in magnitude or direction of force applied to the material
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01LMEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L5/00Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes
    • G01L5/0028Force sensors associated with force applying means

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Force Measurement Appropriate To Specific Purposes (AREA)

Abstract

The invention relates to the technical field of piezoresistive stress sensors, and provides a miniature piezoresistive stress sensor based on tungsten diselenide, which comprises a base, wherein a tungsten diselenide layer is arranged above the base, electrodes are connected to the left side and the right side of the bottom of the tungsten diselenide layer, a ceramic insulating layer is arranged above the tungsten diselenide layer, a bearing layer is arranged at the top of the ceramic insulating layer, first conducting plates are arranged on the left side and the right side of the bearing layer, a power supply is arranged in the middle of the bearing layer, conducting plates are connected to the left side and the right side of the power supply, and one side of the conducting plates, far away from the power supply, is connected with the first conducting plates, and a first side plate is fixedly connected to the right side of the top of the base. Through above-mentioned technical scheme, solved current present piezoresistance type stress sensor can not extend the top and support the scope when not influencing the supporting effect, can not send out the police dispatch newspaper or the problem that the wholeness sent out the police dispatch newspaper in the time of receiving the side direction force in addition.

Description

Miniature piezoresistive stress sensor based on tungsten diselenide
Technical Field
The invention relates to the technical field of piezoresistive stress sensors, in particular to a miniature piezoresistive stress sensor based on tungsten diselenide.
Background
Piezoresistive stress sensors are a common type of mechanical sensor that are used to measure the stress or pressure to which an object is subjected. Piezoresistive stress sensors operate on the principle that the resistance of a material changes slightly with force. Piezoresistive stress sensors are typically constructed of an elastic material coated with a thin film resistive element. When an object is stressed or pressed, the elastic material in the sensor is slightly deformed, so that the resistance value of the thin film resistor element is changed.
For example, the piezoresistive soil stress sensor disclosed in publication number CN100465599C adopts a full-bridge chip made of monocrystalline silicon as a sensitive element of the piezoresistive soil stress sensor, and the stability of the piezoresistive soil stress sensor is improved through special design; the sensor shell and the stress-sensing elastomer are assembled into a whole by a method called leveling welding, in order to reduce the influence of temperature change on the characteristics of the sensor, the temperature compensation is carried out on the sensitive element, the stress area of the sensor can be enlarged, the measurement accuracy of the sensor can be improved by filling a pressure transmission medium, and a signal conditioning circuit can be assembled at the rear part of the shell to form standardized output. Although the stress sensor can improve the measurement accuracy, in use, if the weighing area is subjected to lateral force, the measurement result of the piezoresistive stress sensor is inaccurate. Lateral forces acting on the sensor may cause displacement or deformation between the sensor components, resulting in errors. The existing piezoresistive stress sensor cannot give an alarm when receiving lateral force, can not give an alarm in different areas or give an alarm integrally when receiving lateral force, can not extend the top supporting range while not affecting the supporting effect, and cannot adapt to objects with different bottom surface sizes to carry out stress measurement.
Disclosure of Invention
The invention provides a miniature piezoresistive stress sensor based on tungsten diselenide, which solves the problems that the existing piezoresistive stress sensor cannot extend the top supporting range while the supporting effect is not affected, and can not give an alarm in different areas or give an alarm integrally when receiving lateral force.
The technical scheme of the invention is as follows:
the utility model provides a miniature piezoresistive stress sensor based on tungsten diselenide, includes the base, the top of base is provided with the tungsten diselenide layer, the left and right sides of tungsten diselenide layer bottom is connected with the electrode, the top on tungsten diselenide layer is provided with ceramic insulation layer, the supporting layer is installed at the top of ceramic insulation layer, the left and right sides of supporting layer is provided with first conducting strip, the mid-mounting of supporting layer has the power, the left and right sides of power is connected with the conducting plate, the conducting plate keep away from one side of power with first conducting strip links to each other, the right side fixedly connected with first curb plate at base top, fixedly connected with second conducting strip on the inner wall of first curb plate, the right side of second conducting strip is connected with first warning light, the left side fixedly connected with second curb plate at base top, fixedly connected with third conducting strip on the inner wall of second curb plate, the left side of third conducting strip is connected with second warning light, third conducting strip and second conducting strip are provided with the connecting rod, the top fixedly connected with half-bridge groove all around is provided with the connecting rod, the top is provided with the connecting rod fixedly connected with the connecting rod all around the top, the top is connected with the connecting rod fixedly connected with the top half-bridge.
As a preferential scheme of the invention, a damping sleeve is fixedly arranged in the middle of the top of the bearing layer, and the damping sleeve is in interference fit with the connecting shaft.
As a preferred embodiment of the present invention, the first conductive sheet and the conductive plate are symmetrically disposed on the left and right sides of the bearing layer, and the positions of the first conductive sheet and the second conductive sheet correspond to each other.
As a preferential scheme of the invention, the switching component comprises a fixed plate fixedly arranged at the top of the third conductive sheet, a rotary plate is rotatably arranged at the rear side of the fixed plate, an insulating plate is fixedly arranged at the outer side of the middle part of the rotary plate, the length of the rotary plate is larger than the minimum distance between the third conductive sheet and the second conductive sheet, and the fixed plate and the rotary plate are made of conductive metal.
As a preferential scheme of the invention, the connecting rods are distributed at equal angles on the outer side of the connecting shaft, the positions and the number of the connecting rods are in one-to-one correspondence with those of the extending plates, and the extending plates form a telescopic structure through the connecting shaft and between the connecting rods and the bearing layer.
As a preferential scheme of the invention, the elastic rope is fixedly connected to the extension plate, the top surface of the bearing layer is provided with a chute for the extension plate to move, one side of the elastic rope, which is far away from the extension plate, is fixedly connected to the inner wall of the chute, and the extension plate forms an elastic structure through the elastic rope and the bearing layer.
As a preferential scheme of the invention, the adjusting frame comprises a fixed shaft fixedly arranged at the top of the extending plate, a connecting plate is fixedly connected above the fixed shaft, a lining plate is arranged on the surface of the connecting plate in a laminating mode, a movable groove is formed in the lining plate, a protruding rod is connected in the movable groove in a sliding mode, and the protruding rod is fixedly connected with the connecting plate.
As a preferred embodiment of the present invention, the lining board and the engagement board are provided with four groups, and the four groups of lining boards and the engagement board are connected end to end.
As a preferential scheme of the invention, the rubber plate and the supporting plate are distributed at equal angles on the outer side of the connecting shaft, the supporting plate is made of spring steel, and the head end and the tail end of the rubber plate and the supporting plate are respectively connected with the connecting shaft and the connecting plate.
As a preferred embodiment of the present invention, the upper surfaces of the rubber plate and the support plate are flush with the upper surface of the adjusting frame, and the lower surfaces of the rubber plate and the support plate are attached to the top surface of the bearing layer.
The working principle and the beneficial effects of the invention are as follows:
1. through the spandrel layer, first curb plate, second curb plate, first conducting strip and second conducting strip and third conducting strip that set up for the device can make first conducting strip and second conducting strip or third conducting strip contact when the spandrel layer takes place to incline when carrying out stress measurement, makes the device can be when the lateral force is used for the sensor automatic switch-on with power and warning light, the realization is sent out the function of alarm voluntarily when producing the lateral force, has solved the defect that current piezoresistive stress sensor can not send out the alarm when receiving the lateral force when using, and the device has the higher advantage of measurement accuracy.
2. Through the switch module on the device for the device can be adjusted the on-state of second conducting strip and third conducting strip, through with the commentaries on classics board overlap joint between first conducting strip and second conducting strip, make the device when receiving left side lateral force or receive right side lateral force, can trigger the warning light of left and right sides simultaneously, also can rotate anticlockwise with the commentaries on classics board, make the device when receiving left side lateral force or receive right side lateral force, the warning light of corresponding one side can be automatic the light, the defect that current piezoresistive stress sensor can not send out the police dispatch newspaper in the time of receiving side force minute region or wholly send out and switch between the police dispatch newspaper is solved, the device has the advantage that adjustable degree is higher, can switch the mode that the side force sent out the police dispatch newspaper.
3. Through the regulating frame on the device and the extending plate of equiangular distribution for connecting axle on the device can stir the extending plate through connecting rod all around when rotating, make the extending plate can adjust the extension length of self, and then make the holistic size increase of regulating frame or reduce, thereby adapt to the object of different bottom surface sizes and carry out stress measurement work, the device has the advantage that adaptability is stronger, has solved current piezoresistive stress sensor and can not adapt to the object of different bottom surface sizes and carry out stress measurement ground defect.
4. Through rubber slab and backup pad on the device for adjust the frame and can adjust the degree of bending of rubber slab and backup pad at flexible in-process, thereby make the regulation frame on the device still can keep the stability of whole support when expanding, solved current piezoresistive stress sensor and can not extend the defect of top supporting range when not influencing the supporting effect, the device has the advantage that the functionality is stronger.
Drawings
The invention will be described in further detail with reference to the drawings and the detailed description.
FIG. 1 is a schematic diagram of the overall structure of a miniature piezoresistive stress sensor based on tungsten diselenide;
FIG. 2 is a schematic view of the structure of FIG. 1 at A;
FIG. 3 is a schematic view of the bearing layer and power connection structure of the present invention;
FIG. 4 is a schematic view of the structure at B in FIG. 3;
FIG. 5 is a schematic view of the connection structure of the connecting shaft and the connecting rod of the present invention;
FIG. 6 is a schematic diagram of the overall structure of the adjusting frame of the present invention;
fig. 7 is a schematic view showing the connection structure of the extension plate and the fixed shaft of the present invention.
Reference numerals: 1. a base; 2. a tungsten diselenide layer; 3. a ceramic insulating layer; 4. a bearing layer; 5. a first conductive sheet; 6. a first side plate; 7. a second conductive sheet; 8. a first warning light; 9. an electrode; 10. a power supply; 11. a conductive plate; 12. a second side plate; 13. a third conductive sheet; 14. a second warning light; 15. a switching assembly; 1501. a fixing plate; 1502. a rotating plate; 1503. an insulating plate; 16. a damping sleeve; 17. a connecting shaft; 18. a connecting rod; 19. an extension plate; 20. an elastic rope; 21. a limit groove; 22. an adjusting frame; 2201. a lining plate; 2202. a movable groove; 2203. a protruding rod; 2204. a splice plate; 2205. a fixed shaft; 23. a chute; 24. a rubber plate; 25. and a support plate.
Detailed Description
The technical solutions of the embodiments of the present invention will be clearly and completely described below in conjunction with the embodiments of the present invention, and it is apparent that the described embodiments are only some embodiments of the present invention, not all embodiments. All other embodiments, which can be made by one of ordinary skill in the art based on the embodiments of the invention without making any inventive effort, are intended to be within the scope of the invention.
Example 1
As shown in fig. 1-7, the embodiment provides a micro piezoresistive stress sensor based on tungsten diselenide, which comprises a base 1, wherein a tungsten diselenide layer 2 is arranged above the base 1, the left side and the right side of the bottom of the tungsten diselenide layer 2 are connected with electrodes 9, a ceramic insulating layer 3 is arranged above the tungsten diselenide layer 2, a bearing layer 4 is arranged at the top of the ceramic insulating layer 3, a first conducting plate 5 is arranged at the left side and the right side of the bearing layer 4, a power supply 10 is arranged in the middle of the bearing layer 4, the left side and the right side of the power supply 10 are connected with conducting plates 11, one side of the conducting plates 11 far away from the power supply 10 is connected with the first conducting plate 5, the right side of the top of the base 1 is fixedly connected with a first side plate 6, the inner wall of the first side plate 6 is fixedly connected with a second conducting plate 7, the right side of the second conducting plate 7 is connected with a first alarm lamp 8, the left side of the top of the base 1 is fixedly connected with a second side plate 12, the inner wall of the second side plate 12 is fixedly connected with a third conducting plate 13, the left side of the third conducting plate 13 is connected with a second alarm lamp 14, when the bearing layer 4 receives lateral force, the whole bearing layer 4 and the ceramic insulating layer 3 incline above the tungsten diselenide layer 2, so that the first conducting plate 5 at the left side and the right side of the bearing layer 4 are contacted with the second conducting plate 7 on the first side plate 6 or the third conducting plate 13 on the second side plate 12, the power supply 10 is connected with the first alarm lamp 8 at the right side of the second conducting plate 7 through the conducting plate 11 at the right side and the first conducting plate 5 at the left side of the conducting plate, or the first conducting plate 5 at the left side of the conducting plate is connected with the third conducting plate 13 and the second alarm lamp 14 at the left side of the conducting plate, the area is lighted when receiving different lateral forces are received, a switching component 15 is arranged between the third conducting plate 13 and the second conducting plate 7, the switching component 15 can be used as the connecting conductor of the third conducting strip 13 and the second conducting strip 7, when the device receives left side lateral force or right side lateral force, can make the alarm lamp of left and right sides light simultaneously, connecting axle 17 is installed in the centre rotation at spandrel layer 4 top, spacing groove 21 has all been seted up around spandrel layer 4 top, the inside slidable mounting of spacing groove 21 has extension board 19, all fixedly connected with connecting rod 18 around the lower half of connecting axle 17, the top of extension board 19 is provided with regulating frame 22, regulating frame 22 can rotate and stir extension board 19 through connecting rod 18 and expand, thereby support the object of different bottom surface sizes, the outside fixedly connected with rubber slab 24 of connecting axle 17, the inside fixedly provided with backup pad 25 of rubber slab 24, rubber slab 24 and backup pad 25 can play the function of auxiliary support when regulating frame 22 expands or contracts, the whole supporting effect that still can not influence when guaranteeing that the device has the adjustable function of supporting range.
Example 2
As shown in fig. 1 to 7, based on the same concept as that of the above-described embodiment 1, this embodiment also proposes a micro piezoresistive stress sensor based on tungsten diselenide.
In this embodiment, the damping sleeve 16 is fixedly arranged in the middle of the top of the bearing layer 4, and the damping sleeve 16 and the connecting shaft 17 are in interference fit, so that the connecting shaft 17 can be kept fixed after rotating to a proper position at the top of the bearing layer 4, and the supporting range of the device can be adjusted and fixed subsequently, so that the overall stability of the device is ensured.
In this embodiment, the first conductive sheet 5 and the conductive plate 11 are symmetrically distributed on the left and right sides of the bearing layer 4, the positions of the first conductive sheet 5 and the positions of the second conductive sheet 7 and the third conductive sheet 13 correspond to each other, when the bearing layer 4 receives a lateral force, a circuit between the first conductive sheet 5 and the second conductive sheet 7 or the third conductive sheet 13 is completed, so that an alarm can be sent out by using the completed circuit when the lateral force is generated later.
In this embodiment, the switching component 15 includes a fixing plate 1501 fixedly mounted on the top of the third conductive sheet 13, a rotating plate 1502 is rotatably mounted on the rear side of the fixing plate 1501, an insulating plate 1503 is fixedly mounted on the outer side of the middle portion of the rotating plate 1502, the length of the rotating plate 1502 is greater than the minimum distance between the third conductive sheet 13 and the second conductive sheet 7, the fixing plate 1501 and the rotating plate 1502 are made of conductive metal, and a worker can toggle the rotating plate 1502 on the fixing plate 1501 through the insulating plate 1503, so that the device can use the rotating plate 1502 as a bridging conductor between the third conductive sheet 13 and the second conductive sheet 7, and the left side and the right side of the device are simultaneously lighted when different lateral forces are generated, so that the subsequent lighting modes of the alarm lamp can be switched.
In this embodiment, the connecting rods 18 are distributed at the outer side of the connecting shaft 17 at equal angles, the positions and the number of the connecting rods 18 and the positions and the number of the extending plates 19 are in one-to-one correspondence, the extending plates 19 form a telescopic structure through the connecting shaft 17 and between the connecting rods 18 and the bearing layer 4, and the extending plates 19 can be stirred by the connecting rods 18 when the connecting shaft 17 rotates through the telescopic structure on the device, so that the extending plates 19 at all positions can be synchronously expanded, the function of adjusting the supporting range is realized, and the practicability of the device is improved.
In this embodiment, fixedly connected with bungee cord 20 on the extension board 19, spout 23 that supplies extension board 19 to remove has been seted up to the top surface of spandrel layer 4, one side fixed connection that bungee cord 20 kept away from extension board 19 is on the inner wall of spout 23, the extension board 19 passes through between bungee cord 20 and spandrel layer 4 and constitutes elastic structure, through the elastic structure on the device for the extension board 19 can subsequently reset automatically, has promoted the convenience when the device was used, and spout 23 can lead to the extension board 19, makes the extension board 19 can stably stretch out and draw back.
In this embodiment, the adjusting frame 22 includes a fixed shaft 2205 fixedly mounted on the top of the extension plate 19, a connecting plate 2204 is fixedly connected above the fixed shaft 2205, a lining plate 2201 is provided on the surface of the connecting plate 2204, a movable groove 2202 is provided inside the lining plate 2201, a protruding rod 2203 is slidably connected inside the movable groove 2202, the protruding rod 2203 and the connecting plate 2204 are fixedly connected, the extension plate 19 on the device stretches synchronously, the fixed shaft 2205 and the connecting plate 2204 at each position are driven to stretch synchronously, and therefore the four groups of lining plates 2201 and the connecting plate 2204 can stretch or shrink synchronously, so that the size of the supporting surface can be adjusted subsequently.
In this embodiment, the lining board 2201 and the linking board 2204 are provided with four groups, the four groups of lining boards 2201 and the linking board 2204 are connected end to end, and the four groups of lining boards 2201 and the linking board 2204 are connected end to end, so that when one lining board 2201 or the linking board 2204 moves outwards, the rest lining boards 2201 and the linking board 2204 can move synchronously, so as to change the size of the whole supporting surface of the device, and keep the length-width ratio of the frame formed by the lining boards 2201 and the linking board 2204 unchanged.
In this embodiment, the rubber plate 24 and the support plate 25 are distributed at equal angles on the outer side of the connecting shaft 17, the support plate 25 is made of spring steel, the head end and the tail end of the rubber plate 24 and the support plate 25 are respectively connected with the connecting shaft 17 and the connecting plate 2204, the connecting plate 2204 on the device can bend the rubber plate 24 and the support plate 25 in a self-adaptive manner in the shrinkage or expansion process, so that the device can fill the gap between the connecting shaft 17 and the connecting plate 2204 as much as possible, and the supporting surface is not too small during supporting.
In this embodiment, the upper surfaces of the rubber plate 24 and the supporting plate 25 are flush with the upper surface of the adjusting frame 22, the lower surfaces of the rubber plate 24 and the supporting plate 25 are mutually attached to the top surface of the bearing layer 4, stability of the device during supporting is guaranteed, and the adjusting frame 22, the rubber plate 24 and the supporting plate 25 with flush upper surfaces enable the supporting surface area to be large enough when the device is subjected to stress measurement.
Specifically, the invention relates to a miniature piezoresistive stress sensor based on tungsten diselenide, which is characterized in that firstly, as shown in fig. 1-4, the whole device is supported by a base 1, the resistance value of a tungsten diselenide layer 2 changes when being pressed, and resistance tests are carried out by electrodes 9 on the left side and the right side of the tungsten diselenide layer 2, so that the stress measurement function is realized, and a ceramic insulating layer 3 can play an insulating protection function, so that the stability during measurement is ensured. In the case of stress measurement, if the bearing layer 4 is inclined by a lateral force, the first conductive sheet 5 is in contact with the second conductive sheet 7 or the third conductive sheet 13, so that the device can automatically turn on the power supply 10 through the circuit between the first conductive sheet 5 and the conductive plate 11 and the first warning lamp 8 on the right side of the second conductive sheet 7 or the circuit between the second warning lamp 14 on the left side of the third conductive sheet 13 when a lateral force acts on the sensor, so that the device can automatically give an alarm when a problem occurs in measurement accuracy due to the lateral force, and can turn on the lamp alarm in the direction of the lateral force. Meanwhile, a worker can toggle the insulating plate 1503 in the switching assembly 15 to enable the fixed plate 1501 and the rotating plate 1502 to rotate, at this time, the rotating plate 1502 serves as a connecting conductor to connect a circuit between the second conducting strip 7 on the first side plate 6 and the third conducting strip 13 on the second side plate 12, so that a conducting function is realized, and the alarm lamps on the left side and the right side can be simultaneously turned on when lateral forces in different directions are generated by the device, so that the switching function of changing the lighting conditions of the alarm lamps is realized.
As shown in fig. 1, fig. 2 and fig. 5-fig. 7, when the device is used, after the connecting shaft 17 is rotated to a proper position by rotating the connecting shaft 17, the damping sleeve 16 can enable the connecting shaft 17 to be kept fixed, when the connecting shaft 17 is rotated, the extending plates 19 in the limiting grooves 21 can be stirred through the connecting rods 18, the extending plates 19 in each position synchronously expand outwards, the fixing shafts 2205 and the connecting plates 2204 in each position are driven to synchronously expand and contract, so that the four groups of lining plates 2201 and the connecting plates 2204 can synchronously expand or contract, when one connecting plate 2204 moves outwards, the movable grooves 2202 and the protruding rods 2203 can limit the lining plates 2201 and the connecting plates 2204, so that the four groups of lining plates 2201 and the connecting plates 2204 which are connected end to end can synchronously move outwards, further, the whole size of the adjusting frame 22 can be adjusted under the condition that the length-width ratio is unchanged, and meanwhile the rubber plates 24 and the supporting plates 25 can adaptively adjust the bending degree of the device, so that the device can guarantee the adjusting function of the supporting range under the condition that the supporting surface is not influenced.
The foregoing description of the preferred embodiments of the invention is not intended to be limiting, but rather is intended to cover all modifications, equivalents, alternatives, and improvements that fall within the spirit and scope of the invention.

Claims (10)

1. Miniature piezoresistive stress sensor based on tungsten diselenide, including base (1), its characterized in that: the utility model discloses a high-voltage power supply, including base (1) and base, the top of base (1) is provided with tungsten diselenide layer (2), the left and right sides of tungsten diselenide layer (2) bottom is connected with electrode (9), the top of tungsten diselenide layer (2) is provided with ceramic insulating layer (3), spangle (4) are installed at the top of ceramic insulating layer (3), the left and right sides of spangle (4) is provided with first conducting strip (5), power (10) are installed in the centre of spangle (4), the left and right sides of power (10) are connected with conducting plate (11), one side that conducting plate (11) kept away from power (10) with first conducting strip (5) link to each other, the right side fixedly connected with first curb plate (6) at base (1) top, fixedly connected with second conducting strip (7) on the inner wall of first curb plate (6), the right side of second conducting strip (7) is connected with first warning light (8), the left and right side of base (1) is connected with conducting strip (12), second conducting strip (13) are connected with third conducting strip (13) on the inner wall (13), the middle of spandrel layer (4) top rotates installs connecting axle (17), spacing groove (21) have all been seted up around spandrel layer (4) top, the inside slidable mounting of spacing groove (21) has extension board (19), all fixedly connected with connecting rod (18) around the latter half of connecting axle (17), the top of extension board (19) is provided with regulating frame (22), the outside fixedly connected with rubber slab (24) of connecting axle (17) top, the inside fixedly provided with backup pad (25) of rubber slab (24).
2. The miniature piezoresistive stress sensor based on tungsten diselenide according to claim 1, wherein a damping sleeve (16) is fixedly arranged in the middle of the top of the bearing layer (4), and the damping sleeve (16) is in interference fit with the connecting shaft (17).
3. The miniature piezoresistive stress sensor based on tungsten diselenide according to claim 1, wherein the first conductive sheet (5) and the conductive plate (11) are symmetrically distributed on the left and right sides of the bearing layer (4), and the positions of the first conductive sheet (5) and the second conductive sheet (7) and the third conductive sheet (13) correspond to each other.
4. The miniature piezoresistive stress sensor based on tungsten diselenide according to claim 1, wherein the switching component (15) comprises a fixed plate (1501) fixedly mounted on the top of the third conductive sheet (13), a rotating plate (1502) is rotatably mounted on the rear side of the fixed plate (1501), an insulating plate (1503) is fixedly mounted on the outer side of the middle part of the rotating plate (1502), the length of the rotating plate (1502) is larger than the minimum distance between the third conductive sheet (13) and the second conductive sheet (7), and the materials of the fixed plate (1501) and the rotating plate (1502) are both conductive metals.
5. The tungsten diselenide-based miniature piezoresistive stress sensor according to claim 1, wherein the connecting rods (18) are distributed at equal angles on the outer side of the connecting shaft (17), the positions and the number of the connecting rods (18) are in one-to-one correspondence with those of the extending plates (19), and the extending plates (19) form a telescopic structure through the connecting shaft (17) and between the connecting rods (18) and the bearing layer (4).
6. The miniature piezoresistive stress sensor based on tungsten diselenide according to claim 1, wherein an elastic rope (20) is fixedly connected to the extension plate (19), a chute (23) for the movement of the extension plate (19) is formed in the top surface of the bearing layer (4), one side, away from the extension plate (19), of the elastic rope (20) is fixedly connected to the inner wall of the chute (23), and an elastic structure is formed between the extension plate (19) and the bearing layer (4) through the elastic rope (20).
7. The tungsten diselenide-based miniature piezoresistive stress sensor according to claim 1, wherein the adjusting frame (22) comprises a fixed shaft (2205) fixedly mounted on the top of the extension plate (19), a connecting plate (2204) is fixedly connected above the fixed shaft (2205), a lining plate (2201) is attached to the surface of the connecting plate (2204), a movable groove (2202) is formed in the lining plate (2201), a protruding rod (2203) is slidably connected in the movable groove (2202), and the protruding rod (2203) is fixedly connected with the connecting plate (2204).
8. The tungsten diselenide-based miniature piezoresistive stress sensor of claim 7, wherein said liner plate (2201) and said adapter plate (2204) are provided with four sets, four sets of said liner plate (2201) and said adapter plate (2204) being connected end to end.
9. The tungsten diselenide-based miniature piezoresistive stress sensor according to claim 7, wherein the rubber plate (24) and the supporting plate (25) are distributed at equal angles on the outer side of the connecting shaft (17), the supporting plate (25) is made of spring steel, and the head end and the tail end of the rubber plate (24) and the supporting plate (25) are respectively connected with the connecting shaft (17) and the connecting plate (2204).
10. The tungsten diselenide-based miniature piezoresistive stress sensor according to claim 9, characterized in that the upper surfaces of said rubber plate (24) and said support plate (25) are flush with the upper surface of said adjustment frame (22), the lower surfaces of said rubber plate (24) and said support plate (25) being mutually conformed to the top surface of said bearing layer (4).
CN202310798721.0A 2023-06-30 2023-06-30 Miniature piezoresistive stress sensor based on tungsten diselenide Active CN116839768B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN202310798721.0A CN116839768B (en) 2023-06-30 2023-06-30 Miniature piezoresistive stress sensor based on tungsten diselenide

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN202310798721.0A CN116839768B (en) 2023-06-30 2023-06-30 Miniature piezoresistive stress sensor based on tungsten diselenide

Publications (2)

Publication Number Publication Date
CN116839768A true CN116839768A (en) 2023-10-03
CN116839768B CN116839768B (en) 2024-02-20

Family

ID=88159401

Family Applications (1)

Application Number Title Priority Date Filing Date
CN202310798721.0A Active CN116839768B (en) 2023-06-30 2023-06-30 Miniature piezoresistive stress sensor based on tungsten diselenide

Country Status (1)

Country Link
CN (1) CN116839768B (en)

Citations (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
SE7502686L (en) * 1975-03-11 1976-09-13 Asea Ab LOAD CELL CONSTRUCTION
WO2003016954A2 (en) * 2001-08-08 2003-02-27 Sensor Line Gmbh Fibre-optic load sensor with complex support structure
CN1987385A (en) * 2005-12-23 2007-06-27 昆山双桥传感器测控技术有限公司 Pressure resistance type soil stress sensor
CN102944343A (en) * 2012-11-09 2013-02-27 辽宁工业大学 Overload protection device for tension and pressure sensor
WO2014048824A1 (en) * 2012-09-26 2014-04-03 Siemens Aktiengesellschaft Displacement sensor module and load cell
CN107505088A (en) * 2017-09-20 2017-12-22 南京艾峰科技有限公司 A kind of pressure sensor with warning function
CN108845017A (en) * 2018-05-31 2018-11-20 清华大学 A kind of flexible ion transducer based on two tungsten selenides
CN208366907U (en) * 2018-05-31 2019-01-11 清华大学 Flexible ion transducer based on two tungsten selenides
CN109297622A (en) * 2018-11-08 2019-02-01 清华大学 A kind of miniature piezoresistive strain gauge based on two tungsten selenides
CN109870254A (en) * 2019-03-01 2019-06-11 厦门大学 A kind of sliding touch sensor of the condenser type of high sensitivity
WO2020084980A1 (en) * 2018-10-26 2020-04-30 ソニー株式会社 Detection device
US20210088391A1 (en) * 2019-09-20 2021-03-25 Measurement Specialties, Inc. Sensor Assembly Having An Overload Stop
CN113804335A (en) * 2021-09-24 2021-12-17 李明杰 Non-detachable is sealing joint for sensor
CN218384234U (en) * 2022-07-15 2023-01-24 南通四建集团有限公司 Open caisson sinking deviation alarm device

Patent Citations (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
SE7502686L (en) * 1975-03-11 1976-09-13 Asea Ab LOAD CELL CONSTRUCTION
WO2003016954A2 (en) * 2001-08-08 2003-02-27 Sensor Line Gmbh Fibre-optic load sensor with complex support structure
CN1987385A (en) * 2005-12-23 2007-06-27 昆山双桥传感器测控技术有限公司 Pressure resistance type soil stress sensor
WO2014048824A1 (en) * 2012-09-26 2014-04-03 Siemens Aktiengesellschaft Displacement sensor module and load cell
CN102944343A (en) * 2012-11-09 2013-02-27 辽宁工业大学 Overload protection device for tension and pressure sensor
CN107505088A (en) * 2017-09-20 2017-12-22 南京艾峰科技有限公司 A kind of pressure sensor with warning function
CN108845017A (en) * 2018-05-31 2018-11-20 清华大学 A kind of flexible ion transducer based on two tungsten selenides
CN208366907U (en) * 2018-05-31 2019-01-11 清华大学 Flexible ion transducer based on two tungsten selenides
WO2020084980A1 (en) * 2018-10-26 2020-04-30 ソニー株式会社 Detection device
CN109297622A (en) * 2018-11-08 2019-02-01 清华大学 A kind of miniature piezoresistive strain gauge based on two tungsten selenides
CN109870254A (en) * 2019-03-01 2019-06-11 厦门大学 A kind of sliding touch sensor of the condenser type of high sensitivity
US20210088391A1 (en) * 2019-09-20 2021-03-25 Measurement Specialties, Inc. Sensor Assembly Having An Overload Stop
CN113804335A (en) * 2021-09-24 2021-12-17 李明杰 Non-detachable is sealing joint for sensor
CN218384234U (en) * 2022-07-15 2023-01-24 南通四建集团有限公司 Open caisson sinking deviation alarm device

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
马以武, 宋箭, 常慧敏: "基于压阻效应的厚膜力敏材料及传感器", 电子元件与材料, no. 05, 28 October 1999 (1999-10-28) *

Also Published As

Publication number Publication date
CN116839768B (en) 2024-02-20

Similar Documents

Publication Publication Date Title
CN1307406C (en) Capacitive displacement sensor
CN116839768B (en) Miniature piezoresistive stress sensor based on tungsten diselenide
JP2010169665A (en) Electrostatic capacitance type diaphragm vacuum gage, and vacuum device
CN106482888A (en) There is the pressure gauge of the temperature-compensating of switching output
BR112020021793A2 (en) method for improving accuracy of gas density relay and a high precision gas density relay
CN1996197A (en) Temperature indicating controller for use in transformer
CN211479939U (en) Adjustable thermal expansion temperature controller
CN206546255U (en) A kind of mobile phone multipoint pressure test structure
CN211479942U (en) Temperature control distance adjustable thermal expansion temperature controller
CN100586374C (en) Method and system for regulating pressure measurement range of two force bodies in small space
CN210089818U (en) Waterproof sealing member and electronic scale
CN103434026B (en) For powder weighing device and the mixing plant of mixing plant
CN212907553U (en) Liquid expansion type temperature controller
CN201955187U (en) Pressing force measuring device
CN206671407U (en) A kind of thermoelectric material test device
US2737811A (en) Retard pressure gauge
CN220543806U (en) Liquid expanding type temperature controller
JP2744778B2 (en) Weight detector for cooking device
CN216624097U (en) Temperature controller with good temperature consistency
CN220079696U (en) Node structure of arch bridge
CN112683317B (en) Auxiliary adjustment area array, linear array detector mounting device and mounting method
CN220306163U (en) High-precision temperature controller
CN218160176U (en) Antifreeze expansion type temperature controller
CN215266090U (en) Liquid expansion type temperature controller
CN211624714U (en) Level correcting device

Legal Events

Date Code Title Description
PB01 Publication
PB01 Publication
SE01 Entry into force of request for substantive examination
SE01 Entry into force of request for substantive examination
GR01 Patent grant
GR01 Patent grant