JP2003251562A - Working solution preparing device for slice machine - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a working solution preparing device for a slice machine for constantly preparing and feeding the solution of the predetermined mixing ratio. <P>SOLUTION: This working solution preparing device for the slice machine comprises a working solution stirring tank 1 comprising at least a stirrer 1a, solution composition inlets 1b and 1c, and an electromagnetic flow meter 1d for measuring the specific gravity of the working solution, a solvent tank 2 for the working solution disposed adjacent to the working solution stirring tank 1, and has a solvent feeding means 3 to feed the solvent for the working solution to the working solution stirring tank 1, an abrasive grain feed conveyor 4 to feed the abrasive grain for the working solution to the working solution stirring tank 1, an abrasive grain storage tank 5 having an outlet 5a facing an abrasive grain feed port of the abrasive grain feed conveyor 4, an inversion type supporting mechanism 7 which supports and fits the outlet 5a of the abrasive grain storage tank 5 in a positioning manner to the abrasive grain feed port of the abrasive grain feed conveyor 4, and a control mechanism 8 to control the supply of the solvent for the working solution, the supply of the abrasive grain for the working solution, and the drive of the stirrer 1a in response to the measured specific gravity or temperature by the electromagnetic flow meter 1d. <P>COPYRIGHT: (C)2003,JPO

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a working fluid preparation device for a slice machine, and more particularly to a working fluid preparation device for a slice machine that always exhibits appropriate performance.

[0002]

2. Description of the Related Art A slicing machine (or wire saw) is known as a cutting device for cutting a workpiece such as a semiconductor ingot or ceramics into a large number of thin plates.
That is, by pressing a work piece against a traveling wire, and supplying a working liquid formed by dispersing and mixing abrasive grains to a solvent to a contact portion between the wire and the work piece, the grinding liquid contained in the working liquid is supplied. Means for cutting the work piece by the lapping action of the grains have already been implemented.

Working fluid (slurry) used for the above cutting
Is an oil-based working liquid prepared by mixing abrasives with oils, or an aqueous working liquid prepared by mixing abrasives with a water-soluble solvent. Further, this type of working liquid has different physical properties such as specific gravity and viscosity depending on the type of solvent, the mixing ratio with the abrasive grains, etc., and an appropriate one is selected and used according to the application or usage mode. . Incidentally, the mixing ratio of the working liquid generally has a great influence on the cutting property, and is therefore controlled so as to be an appropriate mixing ratio.

[0004]

Control of the mixing ratio of the working fluid is generally carried out by means of immersing a hydrometer in the working fluid so that the operator can read the scale. However, with this manual means, the measurement work is complicated, the measured values are likely to vary, and the scale becomes difficult to read due to the adhesion of the working liquid, which may lead to a decrease in the measurement accuracy.

As a solution to the above problem, a hydrometer is immersed in the working fluid, and the amount of the hydrometer protruding from the surface of the machining fluid is automatically detected, and the hydrometer pops out relative to the specific gravity value of the machining fluid. A method of managing the working fluid based on the correlation of the amounts has been proposed (JP-A-9-26387). In addition, during use in cutting, the physical properties such as the specific gravity and viscosity of the working fluid are measured.If the measured values exceed the thresholds for judgment, it is judged that the usage limit has been reached and new A means for exchanging the working fluid has also been proposed (Japanese Patent Laid-Open No. 2000-14).
1362).

The above-mentioned processing liquid control means can be said to be effective in the case of a so-called batch system, but there are still the following problems in the case of continuous slice machine operation. That is, it can be said that there is no particular problem when the mixed and prepared working fluid is used within a relatively short time, or when the working environment is not affected by temperature changes. However, the working fluid in the storage tank requires an agitation operation by hand, as it causes the deposition or deposition of the abrasive grain component when the storage fluid is stored for a long time. Also, when the mixing ratio of the solvent components changes due to the influence of temperature, the specific gravity value exceeds the threshold value, so each time,
The working fluid will be replaced, resulting in an increase in cost.

Incidentally, there is a means for manually replenishing the solvent component or the abrasive grain component selectively and in the released state with respect to the change in the mixing ratio of the working fluid, but the working environment is easily damaged ( It is easily polluted). In particular, the problem of the composition change of the working liquid and the change of the environmental temperature tend to influence the quality of the wafer cut and separated from the workpiece. In any case, for the composition change of the working fluid in the wafer processing by the slicing machine, a more effective improvement measure, in other words, the storage / supply of the working fluid having a predetermined mixing ratio at all times, and the adjustment of the predetermined mixing ratio even during the use process can be performed. It is expected to be possible.

The present invention has been made in consideration of the above circumstances, and provides a working fluid preparation device for a slice machine capable of constantly preparing and supplying a working fluid of a predetermined mixing ratio without requiring complicated operations. With the goal.

[0009]

The invention of claim 1 is a working fluid stirring tank comprising at least a stirrer, a working fluid composition inlet, and an electromagnetic flow meter for measuring the specific gravity of the working fluid, and the working fluid stirring tank. A working liquid solvent tank provided with a solvent supply means arranged adjacent to the tank for supplying the working liquid solvent to the working liquid stirring tank,
An abrasive grain supply conveyor that supplies the abrasive grains for the processing liquid to the machining fluid stirring tank, an abrasive grain storage tank having an outlet that can face the abrasive grain supply port of the abrasive grain supply conveyor, and the abrasive grain storage tank The reversing type support mechanism that supports and mounts the abrasive grain storage tank so that the outlet of the can be aligned with the abrasive grain supply port of the abrasive grain supply conveyor, and the supply of the working fluid solvent in response to the specific gravity value measured by the electromagnetic flow meter. A processing liquid preparation apparatus for a slice machine, comprising: a control mechanism for controlling the supply of the processing liquid abrasive grains and the drive of the stirrer.

According to a second aspect of the present invention, in the working fluid preparation apparatus for a slicing machine according to the first aspect, the abrasive grain supply conveyor has a secondary abrasive grain with respect to the abrasive grain outlet of the abrasive grain storage tank. It is characterized in that it is arranged via the receiving portion.

According to a third aspect of the invention, there is provided a working fluid preparation device for a slice machine according to the first or second aspect,
The control mechanism is configured to drive the stirrer and control the temperature of the working fluid in response to the temperature change of the working fluid.

According to a fourth aspect of the present invention, in the working fluid preparation device for a slicing machine according to any one of the first to third aspects, the working fluid stirring tank is supported by a load cell so that mass measurement is possible. To do.

According to a fifth aspect of the present invention, in the working fluid preparation device for a slicing machine according to any one of the first to fourth aspects, the working fluid stirring tank and the working fluid solvent tank are installed on a common support base. It is characterized by

In the invention according to any one of claims 1 to 5, the working fluid stirring tank is, for example, a production apparatus for stirring and mixing an oily or aqueous working fluid solvent and abrasive grains at a predetermined composition ratio to prepare a required working fluid. It is the main body. Therefore, the working fluid stirring tank has a configuration that includes a stirrer for stirring and mixing raw material components (composition), a working fluid solvent inlet, and a working fluid abrasive grain inlet, as well as the stirring and prepared processing. It is equipped with an electromagnetic flow meter for measuring specific gravity for liquid quality evaluation and control.

Here, in the working liquid stirring tank, the stirring tank main body and the attached members such as a stirrer are made of a material which does not cause corrosion or wear damage due to the working liquid to be prepared. It should be noted that a change in composition or a change in physical property value of the working fluid to be prepared / stored due to environmental temperature or the like can be detected by the electromagnetic flow meter for measuring specific gravity. That is, since the specific gravity and temperature of the working fluid can be continuously measured by the electromagnetic flow meter, analog outputs of these measurements can be input to the control mechanism to replenish and stir the working fluid composition.

In the invention of claims 1 to 5, the solvent for working fluid stores the solvent for working fluid (solvent as a raw material), which saves space, makes the apparatus compact, and simplifies the operation. From the viewpoint, it is arranged adjacent to the working fluid stirring tank. The supply of the processing liquid solvent to the processing liquid agitation tank is performed by, for example, a system of pumping a pipe by a pump or the like. Further, the supply of the working liquid abrasive grains to the working liquid stirring tank is performed, for example, by a conveyor system which is set to be capable of intermittent driving and traveling. That is, an abrasive grain supply conveyor is used to connect the abrasive grain inlet of the working fluid stirring tank and the abrasive grain storage tank to enable intermittent driving / traveling.

Here, the supply and transfer of the abrasive grains to the abrasive grain supply conveyor may be carried out by directly arranging the supply port of the abrasive grain supply conveyor so as to face the abrasive grain outlet of the abrasive grain storage tank.
If a configuration is adopted in which a secondary abrasive grain receiving portion is interposed between the abrasive grain storage tank and the abrasive grain storage tank, more accurate operation becomes possible. That is, instead of disposing the outflow port of the abrasive grain storage tank facing the abrasive grain supply conveyor supply port, a level sensor that detects the remaining amount of abrasive grains in the abrasive grain storage tank and issues an alarm, and rotationally drive the motor. By inserting and arranging a secondary abrasive grain receiving part equipped with an abrasive grain agitator as the source, the abrasive grains that fall and are supplied from the abrasive grain outlet of the abrasive grain storage tank are kneaded (solid phase etc. In addition, since the supply accuracy is improved, the specific gravity of the working fluid to be prepared and stored can be more easily managed. In the case of automatic driving, the operation is temporarily stopped with the alarm of the level sensor.

In the invention of claims 1 to 5, the outflow port of the abrasive grain storage tank is arranged so that it can be aligned with the abrasive grain supply port of the abrasive grain supply conveyor or the receiving port of the secondary abrasive grain receiving section. It In other words, the abrasive grain storage tank is arranged to be able to supply the required abrasive grains as appropriate, while being supported by the reversing type support mechanism so as to easily face and position the secondary abrasive grain receiving portion or the like. .

In the invention according to any one of claims 1 to 5, the control mechanism has a working fluid stirring tank in response to a measured specific gravity value of the working fluid by an electromagnetic flow meter attached to the working fluid stirring tank or a temperature change of the working fluid. On the other hand, it controls the replenishment of the working liquid solvent and the working liquid abrasive grains, and the drive of the stirrer. That is, the control mechanism automatically adjusts the working fluid (normal), replenishes the working fluid components (specific gravity adjustment), adjusts the specific gravity of the prepared working fluid (specific gravity measurement), and supplies only the abrasive grains (specific gravity adjustment). Operation mode (operation parameter) such as replenishment of solvent for use only (specific gravity adjustment) and measurement of the amount of processing liquid (remaining amount) in the processing liquid stirring tank
Is set and built in. Then, in general, it is provided with a means or a function for controlling each of these functions, and when the corresponding physical properties or conditions such as temperature are compared and determined to be outside the preset threshold range, automatic It is equipped with a structure that can be operated and driven automatically.

According to the first to fifth aspects of the present invention, the working fluid for the slice machine having appropriate physical properties can be automatically prepared and supplied by driving and operating with preset parameters.
In other words, the working fluid for a slice machine has a required physical property value (mixture composition ratio of solvent and abrasive grains) outside the appropriate range at the time of preparation / storage and the time of supply to the slice machine (during supply), The required amount of solvent or abrasive grains, which is the composition of the working fluid, is replenished, and operations such as stirring are automatically performed. Therefore, since the proper working fluid for the slice machine is constantly prepared and supplied, the slice processing can be performed efficiently and with a high yield.

[0021]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS An embodiment will be described below with reference to FIGS.

FIG. 1 and FIG. 2 show the essential structure of a working fluid preparation device for a slicing machine according to an embodiment. FIG. 1 is a top view and FIG. 2 is a side view. 1 and 2,
1 is at least a stirrer 1a, a working fluid solvent inlet 1b,
A working fluid stirring tank equipped with a working fluid abrasive grain inlet 1c and an electromagnetic flow meter 1d for measuring the specific gravity of the working fluid, and 2 are arranged adjacent to the working fluid stirring tank 1 to agitate the working fluid solvent. Tank 1
It is a solvent tank for a working fluid, which is equipped with a solvent supply means 3 for supplying to Here, the working fluid stirring tank 1 has, for example, an inner diameter of 900 m.
The container is a lidded container having a depth of about m and a depth of about 900 mm, and the stirrer 1a is installed so as to be oblique to the central axis of the container.
On the other hand, the working liquid solvent tank 2 is, for example, a lid type drum can having an inner diameter of about 550 mm and a depth of about 850 mm, and is connected by a pipe-shaped solvent supply means 3 equipped with a pump 3a. Then, during the supply of the working fluid accompanying the automatic operation, the weight change of the working fluid stirring tank 1 and the working fluid solvent tank 2 per unit time is monitored, and an alarm is issued when the value is below the set value.

Further, 4 is an abrasive grain supply conveyor for supplying the abrasive grains for the machining fluid to the machining fluid agitation tank 1, and 5 is an outlet 5a which can face the abrasive grain supply port of the abrasive grain supply conveyor 4. Abrasive storage tank. In this embodiment, a secondary abrasive grain receiving portion 6 having an abrasive grain agitator and a level sensor for issuing an alarm is interposed between the abrasive grain storage tank 5 and the secondary abrasive grain. The configuration is such that the abrasive grains are supplied / transferred to / from the abrasive grain supply conveyor 4 via the receiving portion 6. That is,
A secondary abrasive grain receiving section 6 provided with an abrasive grain agitator 6a is connected to the abrasive grain outlet 5a of the abrasive grain storage tank 5, and the secondary abrasive grain receiving section 6 is connected to the abrasive grain supply conveyor 4. The configuration is such that the supply ports face each other and are arranged.

Further, 7 is an outlet 5 of the abrasive grain storage tank 5.
a reversing type support mechanism for supporting and mounting the abrasive grain storage tank 5 so that a can be aligned with the abrasive grain supply port side of the abrasive grain supply conveyor 4;
Is a control mechanism for controlling the injection (replenishment) of the working liquid solvent, the injection (replenishment) of the working liquid abrasive grains, and the drive of the stirrer 1a in response to the specific gravity value measured by the electromagnetic flow meter 1d. Here, the control mechanism 8 automatically adjusts the amount of the working fluid (normal), replenishes the components of the working fluid (specific gravity adjustment), adjusts the specific gravity of the prepared working fluid (measures specific gravity), replenishes only the abrasive grains (specific gravity adjustment), It has a built-in operation mode such as replenishment of the working fluid solvent (specific gravity adjustment). In FIG. 2, 1
Reference numeral e is a pipe for sending the prepared and stored working fluid, 9 is a load cell for measuring the total weight of the working fluid stirring tank 1, and 10 is a support base on which the load cell 9 and the working fluid tank 2 are mounted.

Next, an operation example of the above manufacturing apparatus will be described.

First, the amount of processing liquid (slurry) to be prepared,
Target specific gravity, specific gravity allowable range, specific gravity of machining fluid solvent, specific gravity of machining fluid abrasive grains, total amount of machining fluid abrasive grains, divided dose of machining fluid abrasive grains, stirring after machining fluid abrasive grains Set operating parameters such as time, and input them to the control mechanism to set them. It should be noted that the abrasive grains for the working fluid are separately charged in the working fluid stirring tank 1
This is to prevent the dispersion system from becoming non-uniform due to the accumulation of abrasive grains on the bottom of the.

According to the above parameters, the working fluid stirring tank 1 whose interior has been cleaned in advance is added to the working fluid solvent supply means 3.
While the processing liquid solvent is supplied from the processing liquid solvent tank 2, the processing liquid abrasive grains are dividedly supplied by the abrasive grain supply conveyor 4. At this time, by measuring the weight of the working fluid stirring tank 1 by the load cell 10, the supply amounts of the working fluid solvent and the working fluid abrasive grains are adjusted and controlled to secure a required set composition ratio. Then, the stirrer 1a is rotated and driven to stir and mix the supplied working fluid solvent and working fluid abrasive grains to prepare a slurry working fluid. When the working fluid remaining in the working fluid stirring tank 1 is prepared by supplementing the components for the working fluid, the supplement amount is similarly supplied.

The specific gravity value of the prepared and mixed slurry-like working fluid is continuously detected by the electromagnetic flow meter 1d attached to the working fluid stirring tank 1. When the specific gravity value is outside the preset threshold range, the solvent for the working fluid is supplied by the solvent supply means 3, or the abrasive grains for the working fluid are replenished by the abrasive grain supply conveyor 4, and automatically, An appropriate component ratio or specific gravity value (quality) can be secured. The electromagnetic flow meter 1d can detect the temperature of the working fluid in addition to the continuous detection of the specific gravity value.

As described above, in the operation of preparing the working fluid, the working fluid having an appropriate component ratio can be easily mixed and prepared automatically. Then, during the subsequent use process or storage process, the uniform dispersibility of the abrasive grain component in the working liquid collapses, or the component ratio collapses due to volatilization of the solvent component, etc. When the specific gravity value changes, the composition change can be easily detected by the electromagnetic flow meter 1d attached to the working liquid stirring tank 1.

Here, the detected value detected is compared with a preset reference value to determine whether the composition ratio is proper or not, and when it is determined to be incorrect, the solvent for the working fluid or the processing liquid is used. Abrasive grains for liquid are replenished. That is, the working fluid (slurry for slice machine) in the working fluid agitating tank 1 is set in accordance with the parameters set and built in the control mechanism 8 in advance.
Always maintains the required composition ratio or specific gravity value automatically. In other words, when slicing with a slicing machine, a working liquid suitable for a workpiece can be easily provided / supplied, and a high-quality sliced product can always be obtained with good yield.

In addition, after the working fluid (slurry) is prepared, it is practically desired to keep the temperature of the stored slurry within the fluctuation range (about 28 ° C. or less). In response to these demands, low-speed agitation that contributes to lowering the working fluid temperature,
In addition, a combination of high speed stirring and variable speed stirring was performed in consideration of prevention of accumulation of the working fluid abrasive grains on the bottom of the working fluid stirring tank 1. According to this, it was possible to suppress the temperature of the slurry to within 0.5 ° C. even after 15 hours, without causing the accumulation of abrasive grains.

In the above embodiment, the composition ratio of the working fluid was adjusted and corrected only by measuring the specific gravity value by the electromagnetic flow meter 1d attached to the working fluid stirring tank 1. May be measured by the electromagnetic flow meter 1d, and the composition ratio of the working fluid may be adjusted / corrected based on the temperature change. Further, the abrasive grain supply / driving by the abrasive grain supply conveyor 4 may be performed on the abrasive grain injection port 1c side of the working liquid stirring tank 1.

The present invention is not limited to the above embodiments, but various modifications can be made without departing from the gist of the invention. For example, the shape, size, material, etc. of the working fluid stirring tank are appropriately selected and set according to the scale, performance, etc. of the slice machine to which the working fluid is supplied.

[0034]

According to the invention of claims 1 to 5, when the required parameters are set in advance for the working fluid to be mixed / prepared in the working fluid stirring tank, the replenishment of the working fluid components in accordance with these parameters, Drive / operation such as stirring is performed,
It is possible to automatically prepare and supply a working fluid for slice machines having appropriate physical properties. Therefore, since the proper working fluid for the slicing machine is constantly prepared and supplied, the slicing can be performed efficiently and with a high yield.

[Brief description of drawings]

FIG. 1 is a top view showing a configuration of a main part of a manufacturing apparatus according to an embodiment.

FIG. 2 is a side view showing a main configuration of a manufacturing apparatus according to an embodiment.

[Explanation of symbols]

1 ... Processing liquid stirring tank 1a ... Stirrer 1b ... Processing liquid inlet 1c ... Abrasive injection port 1d ... Electromagnetic flow meter 1e ... Processing liquid supply pipe 2 ... Processing liquid solvent tank 3 ... Solvent supply means 3a ... pump 4 ... Abrasive supply conveyor 5 ... Abrasive storage tank 5a ... tooth outlet 6 ... Secondary abrasive grain receiving part 6a ... Grinding flow supply means 7 ... Inverted support mechanism 8 ... Control mechanism 9 ... Load cell 10 ... Support base

Claims (5)

[Claims] 1. A working fluid stirring tank equipped with at least a stirrer, a working fluid composition inlet, and an electromagnetic flow meter for measuring the specific gravity of the working fluid, and a working fluid stirring tank disposed adjacent to the working fluid stirring tank. A working liquid solvent tank equipped with a solvent supply means for supplying a working liquid solvent to the tank, an abrasive grain supply conveyor for supplying the processing liquid agitation tank with processing liquid abrasive grains, and abrasive grains for the abrasive grain supply conveyor Supports an abrasive grain storage tank with an abrasive grain outlet that can face the supply port and an abrasive grain outlet so that the abrasive grain outlet of the abrasive grain storage tank can be aligned with the abrasive grain supply port of the abrasive grain supply conveyor. Reversing type supporting mechanism to be mounted, supply of the working liquid solvent in response to the specific gravity value measured by the electromagnetic flow meter, supply of the working liquid abrasive grains,
A machining liquid preparation device for a slice machine, comprising: a control mechanism for controlling the drive of the stirrer. 2. The abrasive grain supply port of the abrasive grain supply conveyor is arranged with respect to the abrasive grain outlet of the abrasive grain storage tank via a secondary abrasive grain receiving portion. Processing fluid preparation device for slice machines. 3. The slice machine according to claim 1, wherein the control mechanism is configured to drive the stirrer and control the temperature of the working fluid in response to the temperature change of the working fluid. Processing fluid preparation device. 4. The working fluid preparation device for a slice machine according to claim 1, wherein the working fluid stirring tank is supported by a load cell so that the mass can be measured. 5. The working liquid preparation apparatus for a slice machine according to claim 1, wherein the working liquid stirring tank and the working liquid solvent tank are installed on a common support base. .