JP2003232781A - Apparatus for inspecting vibration inside solid - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To heighten the inspection accuracy by exciting an object from a direction controlled at all times and analyzing or listening to vibration sound with satisfactory reproducibility obtained as the result of the excitation. <P>SOLUTION: The apparatus for inspecting vibrations inside a solid is provided with an excitation part for generating vibrations inside the solid to be inspected, a reception part for receiving the vibrations inside the solid and converting them into an electric signal, an inspecting part for analyzing the characteristics of the vibrations received by the reception part and outputting them as inspection results, and a control part for controlling each part. The excitation part is provided with a moving means for moving the excitation part and the reception part over the solid, a means for measuring a location on the solid to be moved by the moving means, and a means for detecting the location of movement. The apparatus is provided with a matching mechanism for opposing the excitation part to a surface of the solid. <P>COPYRIGHT: (C)2003,JPO

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an apparatus for inspecting vibration in a solid used for diagnosis of a concrete structure.

[0002]

2. Description of the Related Art In recent years, deterioration of a concrete structure has become a problem, and an internal diagnosis is required. Conventionally, various methods using ultrasonic waves have been proposed as a diagnostic method inside a concrete. JP-A-7-20097
Japanese Patent Application Laid-Open Publication No. H11-139,086 discloses a method of tapping a concrete product with a hammer using an air cylinder and detecting the sound pressure level of the sound wave generated at this time with a sound level meter to determine whether the product is good or defective. ing.

Japanese Patent Application Laid-Open No. 2000-2692 discloses that an ultrasonic wave is incident inside a concrete structure, and the propagating ultrasonic wave is received using an accelerometer in contact with the surface of the structure. A method for inspecting the presence or absence of a cavity inside a concrete structure by analyzing the frequency spectrum of the received ultrasonic wave is disclosed. In this method, ultrasonic waves are made to fall by dropping a steel ball from a predetermined height onto the surface of the inspection object.

[0004]

SUMMARY OF THE INVENTION The above conventional concrete
The diagnostic method inside the girder does not have means for controlling the impact angle of the hammer driven by the air cylinder on the concrete surface. Accordingly, when the shape or the like of the concrete surface changes, the hammer hits the concrete surface from an oblique direction.

According to the results of studies by the present inventors, when hitting from an oblique direction in this way, the loudness of the hitting sound does not change much from that of hitting from the front, but the timbre may be completely different. Was found.

On the other hand, in the quality judgment based on the elastic wave, a difference in timbre is one of the key clues for the judgment. Therefore, the configuration in which the impact direction changes has a significant problem that the determination accuracy is reduced.

Accordingly, one object of the present invention is to increase the inspection accuracy by always exciting an object from a controlled direction and analyzing or listening to the resulting reproducible vibration sound. To solve it.

Further, in the conventional diagnosis method, it is not possible to add a mark to a diagnosis object by using a diagnosis device. For this reason, there is a problem that a diagnosis result is marked near a diagnosis location of a diagnosis target.

[0009]

SUMMARY OF THE INVENTION In order to solve the above-mentioned problems of the prior art, a vibration inspection apparatus in a solid according to the present invention is provided with an exciting section for generating vibration in a solid to be inspected, and receiving the vibration in the solid. A receiving unit that converts the characteristics of the vibration received by the receiving unit into an electric signal, and outputs a test result as a test result; and a control unit that controls the respective units. The moving unit further moves the exciting unit or the exciting unit and the receiving unit on the solid, a unit for measuring a position on the solid moved by the moving unit, and a unit for detecting the moved position. In addition, an alignment mechanism is provided for causing the excitation unit to face the solid surface.

Further, the excitation unit of the vibration inspection apparatus inside the solid according to the present invention has a drive unit that collides with the solid surface by using a magnetic force and separates from the solid surface by a reaction, and the collision separation of the drive unit is performed. It is configured to include a means for exciting free vibration inside the solid by operation.

Further, the excitation section of the vibration inspection apparatus inside the solid according to the present invention is configured such that a contact section made of steel or the like strikes the solid to excite a free vibration therein.

[0012]

BEST MODE FOR CARRYING OUT THE INVENTION The inspection section of the present invention includes a means for analyzing a vibration received by a receiving section by a linear prediction method and inspecting a vibration characteristic based on a resonance frequency and a resonance Q value. It is configured to take advantage of the feature of the linear prediction method that the calculation of the resonance frequency and Q is easy.

The inspection result is output as a diagnosis result including at least one of a non-defective product and a defective product, thereby enabling an automatic inspection that does not require manual intervention.

The inspection is performed by comparing the vibration characteristics of the non-defective and defective products extracted and registered in advance with the vibration characteristics analyzed by the inspection unit.

The receiver is characterized in that it receives vibration of a solid to be inspected while interposing a liquid, solid, semi-solid or gas layer.

The excitation section includes at least a permanent magnet and an excitation coil, and the permanent magnet constitutes a magnetic force section of the driving section. The driving current for driving the excitation coil is a DC pulse current having a single pulse waveform.

The alignment mechanism includes an optical camera. Further, the alignment mechanism is provided with means for adding a mark of the inspection result on the solid.

The means for adding is provided with an ink discharge section, and the ink to be used is made of a material which is hardly visible to the naked eye.

[0019]

FIG. 1 is a functional block diagram showing an overall configuration of a vibration inspection apparatus inside a solid body according to one embodiment of the present invention, together with an inspection object indicated by diagonal lines, 10 is an excitation unit, and 20 is an excitation unit. A receiving unit, 30 is a signal processing unit, 40 is a signal analysis unit, 50 is a diagnostic output unit, 60 is a control unit, 70 is an inspection unit, 80 is a moving grip unit, 90 is an automatic alignment mechanism, and 120 is an ink discharge unit. .

FIG. 2 is a sectional view showing an embodiment of the excitation unit 10 in FIG. 1, wherein 11 is a driving unit, 12 is a driving unit holding cap, 13 is a tension spring, 14 is a lead wire, and 11A.
Is a magnetic force portion, 11B is a drive member portion, 11C is a compression portion,
0 is an excitation coil.

The driving section 11 is provided with the magnetic force section 11 as described above.
A, a drive member 11B and a compression unit 11C. A permanent magnet can be used as a preferred example of the magnetic force portion 11A, and an electromagnet can be used as another preferred example.
The driving member 11B and the pressing portion 11C are made of a steel material or the like that is harder than the inspection object.

FIG. 3 shows that the lead wire 1 is connected to the exciting coil 100 when the magnetic force portion 11A is constituted by a permanent magnet.
FIG. 4 is a waveform diagram showing an example of a drive current waveform supplied via the power supply 4. This drive current has a single pulse waveform. As the one that performs the strongest drive, as illustrated in FIG.
It is optimal to excite with a DC pulse current having a time length t corresponding to the time during which the permanent magnet travels in the excitation coil 100. The pulse width t of the drive current waveform is t = 1 / v.
Here, l is the distance that the permanent magnet travels in the excitation coil 100, and v is the traveling speed of the permanent magnet.

In the initial state as shown in FIG. 2A, the apparatus is stopped at a distance from the solid surface to be diagnosed, and the excitation coil 100 has the waveform shown in FIG. When the drive current is supplied, the drive unit 11 rapidly advances toward the diagnosis target solid surface, and the diagnosis target solid is pushed by the drive unit 11. Thereby, as shown in FIG. 2B, the solid to be diagnosed is deformed by the driving unit 11.

Subsequently, as shown in FIG. 2 (C), the driving unit 11 is raised by a repulsive force from the solid to be diagnosed,
Next, by the pressure of the extension of the tension spring 13, FIG.
The initial state is restored as shown in FIG. Drive unit 11
Moves away from the solid surface to be diagnosed in a short time,
This does not act as a load of the vibration excited in the inspection target solid, and free vibration that is not affected by the load is excited in the inspection target solid.

The principle that the drive unit 11 advances toward the diagnosis target solid surface by the drive current applied to the excitation coil 100 will be described with reference to FIG. Here, reference numeral 104 denotes a magnetic line of force generated by the permanent magnet (magnetic part 11A). At point A,
Since the magnetic field is in the HA direction and the current flowing through the excitation coil 100 is in a downward direction perpendicular to the plane of the drawing, the force acting on this current is in the direction of arrow 101. On the other hand, at the point B, the magnetic field is in the HB direction, and the current flowing through the excitation coil 100 is in the upward direction perpendicular to the plane of the drawing. Therefore, the force acting on this current acts on the current at the point A in the direction of the arrow 102. The direction of the force 101 is the same.

The reaction of the forces acting on these currents is
Since this becomes the driving force for moving A, the direction of this driving force is the direction of arrow 103. Thereby, the magnetic force portion 11A
Advances toward the solid surface to be diagnosed. Here, as shown in FIG. 4, the magnetic force portion 11 </ b> A (permanent magnet) is arranged such that the N extreme surface substantially matches the end surface of the excitation coil 100.
In addition, the magnetic force portion 11A (permanent magnet) is arranged such that the S extreme surface is included in the excitation coil 100.

As described above, the excitation coil 100 and the magnetic force portion 1
1A and the magnetic force portion 11A
The magnetic lines of force 104 coming out of the N extreme surface of the (permanent magnet) do not pass through the excitation coil 100, but only the magnetic lines of force entering the S extreme surface pass through the excitation coil 100. Accordingly, only the driving force that advances toward the diagnosis target solid surface acts on the magnetic force portion 11A (permanent magnet), and an effective impact can be applied to the diagnosis target solid surface.

From the driving force generation principle described above, it is effective to excite the excitation coil 100 with a DC current having a pulse length corresponding to the time during which the magnetic force portion 11A travels in the excitation coil 100. Drive.

The vibration excited in the solid to be inspected as described above is received by the receiving unit 20. FIG. 5 is a cross-sectional view illustrating an example of the configuration of the receiving unit 20, which includes a piezoelectric ceramic 21 sandwiched between electrode layers and a vibration coupling layer 22. As the piezoelectric ceramic 21, a thickness resonance mode configuration having a resonance frequency of 10 kHz or more, which is the highest frequency of vibration to be extracted, is selected. In addition, the vibration coupling layer 22
It is composed of liquid, solid or semi-solid layers such as oil, water, soft plastic and slime. The vibration in the solid is received by the piezoelectric ceramic 21 via the vibration coupling body 22 and is converted into an electric signal.

As another embodiment, an aerial sound receiver such as a condenser microphone (not shown) can be used instead of the piezoelectric ceramic 21 of the receiving unit 20. In this case, a gas such as air is used for the vibration coupling layer 22.

As described above, since the aerial sound receiving device such as the piezoelectric ceramic 21 or the condenser microphone does not directly contact the surface of the solid and the soft vibration coupling layer 22 or the gas such as air is interposed therebetween, the receiving unit A relative movement between 20 and the surface of the solid to be tested is possible.

The vibration waveform received by the receiving unit 20 and converted into an electric signal is supplied to the signal processing unit 30. FIG.
3 is a functional block diagram showing an example of the configuration of the signal processing unit 30. The signal processing unit 30 includes a front-stage amplification unit 31 and a rear-stage filtering unit 3.
And 2. In the amplifying section 31 at the preceding stage, the amplifying function is enabled for a fixed time in synchronization with the synchronization signal supplied from the control section 60. As a result, unnecessary signal processing due to vibration that may occur later due to re-contact by the excitation unit 10 or the like is eliminated.

The amplifying section 31 needs a high input impedance in order to faithfully amplify the low frequency signal output from the piezoelectric ceramic 21, and is usually 1 MΩ, preferably 10 MΩ.
It has an input impedance of Ω or more. The free vibration frequency in a solid such as concrete for diagnosis is usually 10 k
Since the frequency is less than or equal to Hz, the filtering unit 32 has a low-pass characteristic that passes only a signal having a frequency of 10 kHz or less. The filtering section 32 also has a function of preventing the hum of 50 Hz from being mixed. The output of the filtering unit 32 is output as an acoustic signal by a speaker or headphones.

The signal from the signal processing unit 30 is also supplied to the signal analysis unit 40 and processed at the same time. As shown in FIG. 7, the signal analysis unit 40 includes an A / D conversion unit 41, a signal storage unit 42, and a calculation unit 43. The analog signal supplied to the A / D conversion unit 41 is converted into a digital signal at a sampling frequency of 100 kHz or less, and stored in the signal storage unit 42. The A / D conversion unit 41 starts the A / D conversion process over a certain period of time in synchronization with the synchronization signal supplied from the control unit 60, so that the excitation unit 1
This eliminates digitization of unnecessary signals due to vibrations that occur later due to re-contact with zero. Arithmetic unit 43
Performs signal analysis on the digital signal read from the signal storage unit 42. Fourier transform is used for this signal analysis.

The present inventor has found that a linear prediction method is suitable as another method for analyzing vibration characteristics.
This linear prediction method is an all-pole model, in which a received signal is decomposed into each resonance mode. This linear prediction method is an optimal analysis method for analyzing vibration characteristics in a solid formed by combining a plurality of natural vibrations such as free vibrations in a concrete, and extracting the characteristics.

The present inventor has also noted that the maximum order of this linear prediction analysis is usually 20 in the diagnosis of concrete.
It has been found that the 0th order is sufficient. Further, the estimation of the order of the diagnosis target is automatically determined by Akaike's Information Standard (AIC), and in a normal concrete diagnosis,
The present invention also revealed that the average was about 50.

In the linear prediction method, the past received signal X
_n-MFrom the current received signal X_nPredicted value ofX _n Is calculated
You. here,     X _n = X_n+ Ε_n        = A₁X_n-1+ A₂X_n-2+ ... + a_MX_n-M      … (1) And ε_nIs the prediction error noise.

This relationship is expressed in matrix form as

The following equation is obtained by multiplying both sides of the equation (1) by the X matrix. And the following relationship regarding the correlation matrix R and the correlation vector r is obtained.

[0040]

[0041] (4) By solving the equation, the prediction coefficients _{a n} is determined is unknown. FIG. 8 shows the entire processing of the spectrum analysis using such linear prediction. The transfer function of the process of converting an input signal _{X n} with the output signal epsilon _n shown F (z) is the z-transform FIG _{8, F (z) = 1-} (a 1 z -1 + a 2 z -2 + ·· ₊ a ^{M z} -M) is given as a ... (5). Here, the output ε _n is a prediction error noise and a uniform distribution spectrum.
(Z) has an inverse characteristic of the frequency characteristic of the input signal _Xn .

Therefore, the frequency characteristic X (z) of the input signal _Xn
Is given as X (z) = 1 / F (z) = 1 / ^{_{[1- (a 1 z -1 + a}} 2 z -2 + ··· + a M z -M) ] ... (6).

As described above, when the linear prediction method is used, the frequency characteristic X (z) of the received signal is obtained. By calculating the root of the denominator of this function, the frequency of each natural frequency and its frequency can be obtained. The Q value at the time of resonance can be obtained. X
When the roots of the equation the denominator to zero (z) and _{b n, X (z) =} 1 / ^{_{[(1-b 1 z -1)}} (1-b 1 * z -1) (1-b 2 ^{_{z -1) (1-b 2}} * z -1) ··· (1-b M / 2 z -1) (1-b M / 2 * z -1) ] ... is (7), respectively The roots correspond to the respective resonance points.

From the relationship of b _n = z, the frequency of each natural frequency and the Q value at its resonance are calculated.
These values correspond directly to the situation in the solid,
This is the most useful index for determining the quality of a solid object.
Such a resonance analysis process is also performed by the calculation unit 43 in the signal analysis unit 40.

As illustrated in FIG. 9, the control section 60 is composed of a control signal generation section 61 and a position measurement section 62. The control signal generation unit 61 generates a control signal for controlling the synchronous operation of the excitation unit 10 and the signal analysis unit 40 in FIG. 1 and supplies the control signal to the excitation unit 10 and the signal analysis unit 40. Position measurement unit 62
Measures the positions of the excitation unit 10 and the reception unit 20.

FIG. 10 is a block diagram showing the configuration of the diagnostic output unit 50. The diagnostic output unit 50 includes a determination unit 51,
Judgment condition setting unit 52, image output unit 53, audio output unit 54
And a position display unit 55. In the determination unit 51,
A signal analysis result supplied from the signal analysis unit 40 at the preceding stage;
The quality of the pass / fail judgment is made by comparing the setting contents being set by the judgment condition setting section 52. This determination is made by the control unit 60
This is performed in synchronization with the control signal from.

The determination result of the determination section 51 is output from the image output section 53 and the audio output section 54. In addition, the determination unit 51 displays the result of the quality determination, the information on the position of the excitation unit 10 received from the control unit 60, and the structural drawing of the solid object on the position display unit 55 in a superimposed manner.

FIG. 11 shows the movable grip portion 80 and the automatic alignment mechanism 90.
Is shown. Here, the operation unit 80 has a rotating bearing 81.
On the other hand, in the automatic alignment mechanism 90, reference numeral 91 denotes a center axis of rotation, which is held by a rotary bearing 81. Reference numeral 92 denotes wheels. The balance weight 93 moves the center of gravity of the entire automatic alignment mechanism 90 to the center of the rotary bearing 81,
It is a weight for keeping the attitude of the driving unit 11 in balance with gravity. With such an equilibrium state, even when the test object has an arbitrary positional relationship as shown in FIG. 12, the movable grip portion 80 is automatically driven by pressing the movable grip portion 80 toward the test object. The unit 11 can be directly opposed.

FIG. 13A is a conceptual diagram of an elastic vibration waveform that is generated when the excitation unit 10 excites the inspection object from a direction directly facing the inspection object, and has a rapidly rising waveform. On the other hand, FIG. 13B is a conceptual diagram of an elastic vibration waveform generated when the excitation unit 10 excites the inspection object from an oblique direction that is not directly opposed. Since the direction of excitation to the inspection target is oblique, a slow rise characteristic is shown. The difference between the two waveforms is the difference between the vibrating sounds, and is received as different vibrating sounds in spite of the same inspection object, which causes erroneous determination. According to the configuration of the present invention, the excitation unit 10 can always excite the object to be inspected from the direction directly facing the inspection object by the automatic matching mechanism 90. Therefore, the elastic vibration waveform is shown in FIG. As a result, the same vibration sound can be given to the inspection object in the same situation, and accurate determination can be made. In the present embodiment, the excitation unit 10 automatically faces the inspection object. However, the present invention is not limited to this embodiment, and it is also possible to manually face the inspection object.

The characteristic spectra extracted by the various signal analyzes are registered in the judging section 51 through the judging condition setting section 52 for both good and defective products. Judgment unit 5
1 compares the spectrum extracted from the diagnosis target according to the linear prediction method with the spectrum being registered, and if the spectrum is similar to the spectrum of a registered good product, outputs a result of determination of a good product, and outputs the result of the non-registered good product. If it is similar to that of a non-defective product, the result of the defective product is output.

FIG. 14 is a configuration diagram in the case where the optical camera 110 and the ink discharge unit 120 are provided in the automatic alignment mechanism 90. By arranging the optical camera 110, it is possible to simultaneously observe or record the surface state of the inspection object. In addition, by controlling the ink discharge unit 120 automatically or manually by an inspector, it is possible to add a mark near the inspection target portion of the inspection target. Thus, the determination result of the inspection target portion can be easily determined after the inspection is completed. As this ink, besides ordinary ink, an ultraviolet light-emitting paint which is invisible to the naked eye can be used. In this case, there is an effect that the object to be inspected is not stained in appearance.

In this embodiment, the configuration is mainly exemplified in which the characteristics of the received vibration are analyzed, the quality is automatically determined, and the diagnosis result is output. However, such an effect of the direct excitation is also effective for a basic inspection apparatus that automatically applies the vibration and that the inspector listens to and determines the vibration sound.

[0053]

As described above in detail, the vibration inspection apparatus for the inside of a solid according to the present invention is constructed so as to have an automatic alignment mechanism with the movable gripping portion, so that the inspection object having an arbitrary positional relationship can be obtained. , The drive unit can be directly opposed to this, and the effect of improving the inspection accuracy is achieved.

Further, the vibration inspection apparatus of the present invention has a configuration in which free vibration is excited inside the solid surface to be inspected by using a magnetic force to contact and strike the solid surface for a short time. There is an advantage that a highly accurate diagnosis that is not affected by the excitation mechanism can be performed, as compared with the case where excitation is performed using a low-speed hitting unit that uses such a means.

Further, according to the preferred embodiment of the present invention, since the configuration is such that the result of the pass / fail judgment is output by comparing the vibration characteristics of the registered non-defective product with the non-defective product extracted in advance. , Without requiring the skill of the worker,
There is an advantage that objective judgment can be made.

According to another preferred embodiment of the present invention, the inspection unit is configured to analyze the vibration received by the receiving unit using a linear prediction method or the like and output the result as an inspection result. There is an advantage that the feature of the linear prediction method that the resonance frequency and the Q value of the resonance can be easily calculated can be utilized.

Further, by arranging the optical camera, it is possible to simultaneously observe or record the inspection surface condition.

In addition, it is possible to arrange the ink discharging section and to add a mark to the inspection object by the automatic determination result or manually by the inspector. As this ink, in addition to ordinary ink, an ultraviolet light-emitting paint that is invisible to the naked eye can be used. In this case, there is an effect that the inspection target is not stained in appearance.

[Brief description of the drawings]

FIG. 1 is a functional block diagram showing a configuration of a vibration inspection apparatus inside a solid according to an embodiment of the present invention, together with a solid to be diagnosed.

FIG. 2 is a cross-sectional view illustrating an example of a configuration of an excitation unit in FIG.

FIG. 3 is a waveform diagram showing an example of a drive current waveform supplied to an excitation unit in FIG.

FIG. 4 is a diagram illustrating an operation of a driving unit.

FIG. 5 is a functional block diagram illustrating an example of a configuration of a receiving unit in FIG. 1;

FIG. 6 is a functional block diagram illustrating an example of a configuration of a signal processing unit in FIG. 1;

FIG. 7 is a functional block diagram illustrating an example of a configuration of a signal analyzer of FIG. 1;

FIG. 8 is a diagram expressing, by a circuit, signal processing based on a linear prediction method performed by the signal analysis unit of FIG. 1;

9 is a functional block diagram illustrating an example of a configuration of a control unit in FIG.

FIG. 10 is a functional block diagram illustrating an example of a configuration of a diagnosis output unit in FIG. 1;

11 is a configuration diagram illustrating an example of an operation unit and an automatic alignment mechanism of FIG. 1;

FIG. 12 is a diagram illustrating a facing operation when the excitation unit is inclined with respect to the inspection target.

FIG. 13 is a diagram illustrating an outline of an elastic vibration waveform generated when the excitation unit excites the inspection object from a direction facing the inspection object and from an oblique direction not facing the inspection object.

FIG. 14 is a configuration diagram illustrating an example in which an optical camera and an ink ejection unit are provided in an automatic alignment mechanism.

[Explanation of symbols]

10 Exciter 11 Driver 11A Magnetic force part 11B drive member 11C Compression part 12 Drive unit holding cap 13 Extension spring 14 Lead wire 20 Receiver 21 Piezoelectric ceramic 22 Vibration coupling layer 30 signal processing unit 31 Amplifier 32 Filtering section 40 signal analyzer 41 A / D converter 42 signal storage unit 43 Arithmetic unit 50 Diagnostic output unit 51 Judgment unit 52 Judgment condition setting section 53 Image output unit 54 Audio output unit 55 Position display section 60 control unit 61 Control signal generator 62 Position control unit 70 Inspection unit 80 Moving grip 81 Rotary bearing 90 Automatic alignment mechanism 91 center axis 92 wheels 93 Weight for balance 100 excitation coil 110 Optical Camera 120 Ink ejection section

Continuation of front page    F-term (reference) 2G047 AA10 AD11 BA04 BC04 BC11                       CA01 CA03 CA07 EA10 EA11                       GA21 GD02 GF06 GG09 GG12                       GG19 GG37 GH01 GH12 GJ02

Claims (13)

[Claims] 1. An excitation unit for generating vibration in a solid to be inspected, a receiving unit for receiving the vibration in the solid and converting the vibration into an electric signal, and analyzing characteristics of the vibration received by the receiving unit. An inspection unit that outputs an inspection result; and a control unit that controls each unit. The excitation unit, or the excitation unit and the reception unit, are moved by the moving unit that moves on the solid, and the moving unit is moved by the moving unit. A device for inspecting the inside of a solid, comprising: means for measuring a position on the solid; and means for detecting the moved position. 2. The inspection apparatus according to claim 1, further comprising an alignment mechanism for directing the exciting section to the surface of the solid. 3. The device according to claim 1, wherein the excitation unit has a driving unit that collides with the solid surface using magnetic force and separates from the solid surface by a reaction.
A device for inspecting vibration inside a solid, comprising means for exciting free vibration inside the solid by a collision separating operation of the driving unit. 4. The vibration inside a solid body according to claim 1, wherein the excitation section excites free vibration inside the contact section such as a steel material by hitting the solid body. Inspection equipment. 5. The apparatus according to claim 1, wherein the inspection unit analyzes the vibration received by the reception unit by a linear prediction method, and inspects a vibration characteristic based on a resonance frequency and a resonance Q value. A device for inspecting vibration inside a solid body, comprising: 6. The vibration inspection apparatus according to claim 1, wherein the inspection result is output as a diagnosis result including at least one of a non-defective product and a defective product. 7. The inspection according to claim 1, wherein the inspection is performed by comparing the vibration characteristics of a non-defective product and a defective product extracted and registered in advance with the vibration characteristics analyzed by the inspection unit. A vibration inspection device for the inside of a solid, characterized in that: 8. The solid interior according to claim 1, wherein the receiving unit receives vibration of the inspection target solid with a liquid, solid, semi-solid, or gas layer interposed therebetween. Vibration inspection equipment. 9. The solid interior according to claim 1, wherein the excitation unit includes at least a permanent magnet and an excitation coil, and the permanent magnet forms a magnetic unit of the driving unit. Vibration inspection equipment. 10. The apparatus according to claim 9, wherein the drive current for driving the excitation coil is a DC pulse current having a single pulse waveform. 11. The apparatus according to claim 1, wherein the alignment mechanism includes an optical camera. 12. An apparatus according to claim 1, wherein said alignment mechanism includes means for adding a mark of said inspection result on said solid. 13. The vibration inspection apparatus according to claim 12, wherein the adding unit includes an ink discharge unit, and the ink to be used is a material that is difficult to visually recognize with the naked eye.