JP2003166979A - Apparatus for inspecting vibration of solid interior - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To exclude the reception of an unnecessary vibration and to enhance the inspecting accuracy by synchronizing a time point of exciting with the period of the reception of the excited vibration. <P>SOLUTION: The apparatus for inspecting the vibration of a solid interior comprises an exciting unit for generating the vibration in the solid to be inspected, a receiver for detecting the vibration in the solid to convert the vibration into an electric signal, an inspecting unit for analyzing the characteristics of the vibration received by the receiver and outputting the inspected result, and a controller for controlling the operation of the respective units. The controller has a means for synchronizing the time point of exciting by the exciting unit with the period of receiving the vibration by the receiver. Thus, the reception of the unnecessary vibration due to twice striking or the like brought about at the time of striking or the like by the exciting unit is avoided, and the inspecting accuracy is improved. <P>COPYRIGHT: (C)2003,JPO

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an apparatus for inspecting vibration in a solid used for diagnosis of a concrete structure.

[0002]

2. Description of the Related Art In recent years, deterioration of a concrete structure has become a problem, and an internal diagnosis is required. Conventionally, various methods using ultrasonic waves have been proposed as a diagnostic method inside a concrete. JP-A-7-20097
Japanese Patent Application Laid-Open Publication No. H11-139,086 discloses a method of tapping a concrete product with a hammer using an air cylinder and detecting the sound pressure level of the sound wave generated at this time with a sound level meter to determine whether the product is good or defective. ing.

Japanese Patent Application Laid-Open No. 2000-2692 discloses that an ultrasonic wave is incident inside a concrete structure, and the propagating ultrasonic wave is received using an accelerometer in contact with the surface of the structure. A method for inspecting the presence or absence of a cavity inside a concrete structure by analyzing the frequency spectrum of the received ultrasonic wave is disclosed. In this method, ultrasonic waves are made to fall by dropping a steel ball from a predetermined height onto the surface of the inspection object.

[0004]

SUMMARY OF THE INVENTION The above conventional concrete
In the diagnostic method inside the board, the surface of the concrete is hit with a hammer using an air cylinder. However,
Since the hammer is slowly moved by the air cylinder, the hammer stays on the concrete surface for a long time, and may hit the surface more than once. As a result, the received vibration is disturbed by the subsequent impact, and a problem arises that the inspection accuracy is reduced.

Accordingly, one object of the present invention is to synchronize the time of excitation with the period of reception of the excited vibration, thereby eliminating unnecessary vibration reception and improving inspection accuracy. ing.

When the contact time of the hammer driven by the air cylinder with the surface of the concrete is prolonged, the hammer acts as a load for the vibration excited in the concrete. As a result, there is a problem that the mass of the hammer or the like affects the characteristics of the excited vibration, thereby lowering the inspection accuracy. The method of dropping the steel ball from a predetermined height does not have the problem of prolonging the contact time, but it is difficult to control the position after the steel ball collides with the surface, and therefore, at a constant speed by a transport mechanism such as a belt conveyor. In an automatic inspection of a flowing product or the like, there is a problem that it is difficult to generate vibration in a product to be inspected at a constant cycle.

Therefore, another object of the present invention is that the excitation mechanism does not act as a load for the vibration excited in the solid to be diagnosed, that is, free vibration can be excited in the solid and at a constant period. An object of the present invention is to provide a diagnostic device capable of generating vibrations.

If the impact angle of the hammer driven by the air cylinder on the surface of the concrete is different, the impact force will change even if the interior of the concrete is the same. Further, when the surface of the concrete to be inspected is rough, the contact area between the hammer and the concrete surface varies depending on the difference in the roughness of the concrete surface. Furthermore, when diagnosing a minute abnormal portion inside the concrete, if the contact area is larger than the area (cross-sectional area) of the abnormal portion, there is a problem that it is difficult to find the minute abnormal portion.

Therefore, another object of the present invention is to provide an excitation section which is hardly influenced by the state of the impact angle and the shape of the surface of the inspection object by changing the shape of the contact section of the excitation section with the solid surface. It is in.

[0010]

SUMMARY OF THE INVENTION In order to solve the above-mentioned problems of the prior art, a vibration inspection apparatus in a solid according to the present invention is provided with an exciting section for generating vibration in a solid to be inspected, and detecting the vibration in the solid. A receiving unit that converts the characteristics of the vibration received by the receiving unit into an electrical signal, and outputs the result as an inspection result; and a control unit that controls the operation of each unit. The control unit includes means for synchronizing the time of the excitation by the excitation unit and the period of the vibration reception by the reception unit, thereby avoiding the reception of unnecessary vibrations such as a double strike caused by a hit or the like by the excitation unit. And improve the inspection accuracy.

The excitation section of the vibration inspection apparatus inside the solid according to the present invention has a movable section that collides with the solid surface by using a magnetic force and separates from the solid surface by a reaction, and the movable section collides and separates. By providing a means for exciting free vibration inside the solid, it is configured to excite free vibration inside the solid and enable periodic excitation.

[0012] In the vibration inspection apparatus for the inside of a solid according to the present invention, the pressing part on the solid surface of the driving part is made of a material harder than the inspection object such as steel, and has a larger area than the driving member part of the driving part. It has a flat or spherical shape. Further, a configuration is provided in which a minute abnormal portion is diagnosed by exciting a minute area of the solid surface. When the solid surface is rough due to having a surface narrower than the drive member of the drive unit, when the angle of contact with the compression unit is large, or when a small abnormal area is diagnosed by exciting a small area of the solid surface To improve the inspection accuracy.

[0013]

According to a preferred embodiment of the present invention, the exciting section has a movable section that collides with a solid surface by using a magnetic force and separates from the solid surface by a reaction of the movable section. Means for exciting free vibration inside the solid by the collision separation operation.

The inspection unit analyzes the vibration received by the receiving unit by a linear prediction method, and includes means for inspecting the vibration characteristics based on the resonance frequency and the resonance Q value. It is configured to take advantage of the feature of the linear prediction method that it is easy.

The inspection result is output as a diagnosis result including at least one of a non-defective product and a defective product, thereby enabling an automatic inspection that does not require manual intervention.

The inspection is performed by comparing the vibration characteristics of the non-defective product and the defective product extracted and registered in advance with the vibration characteristics analyzed by the inspection unit.

The apparatus further comprises means for controlling the positions of the excitation unit and the receiving unit on the solid, and means for detecting these positions, so that the inspection location on the solid can be automatically changed. .

The receiving section receives the vibration of the solid to be inspected while interposing a liquid, solid, semi-solid or gas layer.

The excitation section includes at least a permanent magnet and an excitation coil, and the permanent magnet constitutes the magnetic member of the movable section. The driving current for driving the excitation coil is a DC pulse current having a single pulse waveform.

[0020]

FIG. 1 is a functional block diagram showing an overall configuration of a vibration inspection apparatus inside a solid body according to one embodiment of the present invention, together with an inspection object indicated by diagonal lines, 10 is an excitation unit, and 20 is an excitation unit. A receiving unit, 30 is a signal processing unit, 40 is a signal analyzing unit, 50 is a diagnostic output unit, 60 is a control unit, and 70 is an inspection unit.

FIG. 2 is a sectional view showing an embodiment of the excitation unit 10 in FIG. 1, wherein 11 is a driving unit, 12 is a driving unit holding cap, 13 is a tension spring, 14 is a lead wire, and 11A.
Is a magnetic force portion, 11B is a drive member portion, 11C is a compression portion,
0 is an excitation coil.

The driving section 11 is provided with the magnetic force section 11 as described above.
A, a drive member 11B and a compression unit 11C. A permanent magnet can be used as a preferred example of the magnetic force portion 11A, and an electromagnet can be used as another preferred example.

The driving member 11B and the pressing portion 11C are made of steel or the like, which is harder than the inspection object. FIG. 12 shows a compression unit 1 in contact with a solid surface to be inspected.
This is an example in which the shape of 1C is configured to be a planar shape having an area larger than the driving member 11B. FIG. 13 is an example in which the shape of the pressing portion 11C that contacts the solid surface to be inspected is spherical. FIG. 14 shows that the shape of the pressing portion 11C that contacts the solid surface to be inspected is the driving member portion 11B.
This is an example in which it is configured with a narrower surface. A blank portion in the inspection object indicated by hatching indicates a minute abnormal portion.

FIG. 3 shows that the lead wire 1 is connected to the exciting coil 100 when the magnetic force portion 11A is constituted by a permanent magnet.
FIG. 4 is a waveform diagram showing an example of a drive current waveform supplied via the power supply 4. This drive current has a single pulse waveform. As the one that performs the strongest drive, as illustrated in FIG.
It is optimal to excite with a DC pulse current having a time length t corresponding to the time that the permanent magnet travels in the excitation coil. The pulse width t of the drive current waveform is t = 1 / v. Where l
Is the distance traveled by the permanent magnet in the excitation coil, and v is the traveling speed of the permanent magnet.

In the initial state as shown in FIG. 2A, the apparatus is stopped at a distance from the solid surface to be diagnosed, and the excitation coil 100 is connected to the excitation coil 100 via the lead wire 14 and has a waveform as shown in FIG. When the driving current is supplied, the driving unit 11 rapidly advances toward the surface of the solid to be diagnosed, and the solid to be diagnosed is pushed by the driving unit 11. Thereby, as shown in FIG. 2B, the solid to be diagnosed is deformed by the driving unit 11.

Subsequently, as shown in FIG. 2 (C), the driving unit 11 is raised by a repulsive force from the object to be diagnosed,
Next, by the pressure of the extension of the tension spring 13, FIG.
The initial state is restored as shown in FIG. Drive unit 11
Moves away from the solid surface to be diagnosed in a short time,
This does not act as a load of the vibration excited in the inspection target solid, and free vibration that is not affected by the load is excited in the inspection target solid.

The principle that the drive unit 11 advances toward the diagnosis target solid surface by the drive current applied to the excitation coil 100 will be described with reference to FIG. Here, reference numeral 104 denotes a magnetic line of force generated by the permanent magnet (magnetic part) 11A. At the point A, the magnetic field is in the HA direction, and the current flowing through the excitation coil 100 is in the downward direction perpendicular to the plane of the paper. Therefore, the force acting on this current is in the direction of arrow 101. On the other hand, at the point B, the magnetic field is in the HB direction, and the current flowing through the excitation coil 100 is in the upward direction perpendicular to the plane of the drawing. Therefore, the force acting on this current acts on the current at the point A in the direction of the arrow 102. The direction of the force 101 is the same.

The reaction of the force acting on these currents is
Since this becomes the driving force for moving A, the direction of this driving force is the direction of arrow 103. Thereby, the magnetic force portion 11A
Advances toward the solid surface to be diagnosed. Here, FIG.
As shown in (2), the magnetic force portion 11A (permanent magnet) is disposed such that the N extreme surface thereof substantially coincides with the end surface of the excitation coil 100. In addition, the magnetic force portion 11A (permanent magnet) is arranged such that the S extreme surface is included in the excitation coil 100.

As described above, the excitation coil 100 and the magnetic force portion 1
1A and the magnetic force portion 11A
The magnetic field lines 104 coming out of the N extreme surface of the (permanent magnet) do not pass through the excitation coil 100, but only the magnetic force lines entering the S extreme surface pass through the excitation coil 100. Accordingly, only the driving force that advances toward the diagnosis target solid surface acts on the magnetic force portion 11A (permanent magnet), and an effective impact can be applied to the diagnosis target solid surface.

From the driving force generation principle described above, it is effective to excite the excitation coil 100 with a DC current having a pulse length corresponding to the time during which the magnetic force portion 11A travels in the excitation coil 100. Drive.

The vibration excited in the solid to be inspected as described above is received by the receiver 20. FIG. 4 is a cross-sectional view illustrating an example of the configuration of the receiving unit 20, which includes a piezoelectric ceramic 21 sandwiched between electrode layers and a vibration coupling layer 22. As the piezoelectric ceramic 21, a thickness resonance mode configuration having a resonance frequency of 10 kHz or more, which is the highest frequency of vibration to be extracted, is selected. In addition, the vibration coupling layer 22
It is composed of liquid, solid or semi-solid layers such as oil, water, soft plastic and slime. The vibration in the solid is received by the piezoelectric ceramic 21 via the vibration coupling body 22 and is converted into an electric signal.

As another embodiment, an aerial sound receiver such as a condenser microphone (not shown) can be used in place of the piezoelectric ceramic 21 of the receiver 20. At this time, a gas such as air is used for the vibration coupling layer 22.

As described above, since the aerial sound receiver such as the piezoelectric ceramic 21 or the condenser microphone does not directly contact the surface of the solid and the soft vibration coupling layer 22 or the gas such as air is interposed therebetween, the receiving unit A relative movement between 20 and the surface of the solid to be tested is possible. In this embodiment, the exciting unit 10 and the receiving unit 20 are moved together on a solid surface such as a concrete structure to be inspected by a moving mechanism (not shown). Thereby, vibration characteristics are extracted for different portions of the solid to be inspected.

The vibration waveform received by the receiving unit 20 and converted into an electric signal is supplied to the signal processing unit 30. FIG.
3 is a functional block diagram showing an example of the configuration of the signal processing unit 30. The signal processing unit 30 includes a front-stage amplification unit 31 and a rear-stage filtering unit 3.
And 2. In the amplifying section 31 at the preceding stage, the amplifying function is enabled for a fixed time in synchronization with the synchronization signal supplied from the control section 60. As a result, unnecessary signal processing due to vibration that may occur later due to re-contact by the excitation unit 10 or the like is eliminated.

The amplifying section 31 requires a high input impedance in order to faithfully amplify the low-frequency signal output from the piezoelectric ceramic 21, and is usually 1 MΩ, preferably 10 MΩ.
It has an input impedance of Ω or more. The free vibration frequency in a solid such as concrete for diagnosis is usually 10 k
Since the frequency is less than or equal to Hz, the filtering unit 32 has a low-pass characteristic that passes only a signal having a frequency of 10 kHz or less. The filtering section 32 also has a function of preventing the hum of 50 Hz from being mixed.

As shown in FIG. 6, the signal analyzer 40 for processing the signal supplied from the signal processor 30 comprises an A / D converter 41, a signal storage unit 42, and a calculation unit 43.
The analog signal supplied to the A / D converter 41 is 100
The signal is converted into a digital signal at a sampling frequency of less than kHz and stored in the signal storage unit 42. The A / D conversion unit 41 starts the A / D conversion process for a certain period of time in synchronization with the synchronization signal supplied from the control unit 60, so that the vibration generated later due to re-contact by the excitation unit 10 or the like. Eliminates unnecessary digitization of signals.
The operation unit 43 performs signal analysis on the digital signal read from the signal storage unit 42. Fourier transform is used for this signal analysis.

The present inventor has found that a linear prediction technique is suitable as another technique for analyzing vibration characteristics.
This linear prediction method is an all-pole model, in which a received signal is decomposed into each resonance mode. This linear prediction method is an optimal analysis method for analyzing vibration characteristics in a solid formed by combining a plurality of natural vibrations such as free vibrations in a concrete, and extracting the characteristics.

The present inventor has also noted that the maximum order of this linear prediction analysis is usually 20 in the diagnosis of concrete.
It has been found that the 0th order is sufficient. Further, the estimation of the order of the diagnosis target is automatically determined by Akaike's Information Standard (AIC), and in a normal concrete diagnosis,
The present invention also revealed that the average was about 50.

In the linear prediction method, the past received signal X
_n-MFrom the current received signal X_nPredicted value ofX _n Is calculated
You. here,     X _n = X_n+ Ε_n        = A₁X_n-1+ A₂X_n-2+ ... + a_MX_n-M      … (1) And ε_nIs the prediction error noise.

This relationship is expressed in matrix form as

The following equation is obtained by multiplying both sides of equation (1) by the X matrix. And the following relationship regarding the correlation matrix R and the correlation vector r is obtained.

[0042]

[0043] (4) By solving the equation, the prediction coefficients _{a n} is determined is unknown. FIG. 9 shows the entire spectrum analysis process using such linear prediction. The transfer function of the process of converting an input signal _{X n} with the output signal epsilon _n shown F (z) is the z-transform FIG _{9, F (z) = 1-} (a 1 z -1 + a 2 z -2 + ·· ₊ a ^{M z} -M) is given as a ... (5). Here, the output ε _n is a prediction error noise and a uniform distribution spectrum.
(Z) has an inverse characteristic of the frequency characteristic of the input signal _Xn .

Therefore, the frequency characteristic X (z) of the input signal _Xn
Is given as X (z) = 1 / F (z) = 1 / ^{_{[1- (a 1 z -1 + a}} 2 z -2 + ··· + a M z -M) ] ... (6).

As described above, when the linear prediction method is used, the frequency characteristic X (z) of the received signal is obtained. By calculating the root of the denominator of this function, the frequency of each natural frequency and its frequency are further calculated. The Q value at the time of resonance can be obtained. X
When the roots of the equation the denominator to zero (z) and _{b n, X (z) =} 1 / ^{_{[(1-b 1 z -1)}} (1-b 1 * z -1) (1-b 2 ^{_{z -1) (1-b 2}} * z -1) ··· (1-b M / 2 z -1) (1-b M / 2 * z -1) ] ... is (7), respectively The roots correspond to the respective resonance points.

From the relationship of b _n = z, the frequency of each natural frequency and the Q value at its resonance are calculated.
These values correspond directly to the situation in the solid,
This is the most useful index for determining the quality of a solid object.
Such a resonance analysis process is also performed by the calculation unit 43 in the signal analysis unit 40.

As shown in FIG. 8, the control section 60 shown in FIG. 1 comprises a control signal generating section 61 and a position measuring section 62. The control signal generation unit 61 is provided with the excitation unit 1 shown in FIG.
0, generate a control signal for controlling the synchronous operation of the signal analyzer 40 and supply it to the excitation unit 10 and the signal analyzer 40. The position control unit 62 supplies a control signal for controlling the positions of the excitation unit 10 and the reception unit 20 to the excitation unit 10 and the reception unit 20.

FIG. 7 is a block diagram showing the configuration of the diagnostic output unit 50. The diagnosis output unit 50 includes a determination unit 51, a determination condition setting unit 52, an image output unit 53, an audio output unit 54, and a position display unit 55. The determination unit 51 determines pass / fail by comparing the signal analysis result supplied from the signal analysis unit 40 at the preceding stage with the setting content being set by the determination condition setting unit 52. This determination is made in synchronization with a control signal from the control unit 60.

The determination result of the determination unit 51 is output from the image output unit 53 and the audio output unit 54. In addition, the determination unit 51 displays the result of the quality determination, the information on the position of the excitation unit 10 received from the control unit 60, and the structural drawing of the solid object on the position display unit 55 in a superimposed manner.

FIG. 10 shows that a concrete plate having a size of 30 cm × 30 cm and a thickness of 5 cm is selected as an object to be diagnosed, and the configuration of this embodiment allows the excitation unit to be separated from the solid surface during the measurement period. The compression unit 11C is re-compressed by changing the configuration of the excitation unit 10 with the waveform (A) when a signal is received in synchronization with the excitation.
The signal processing unit 3 is excited so as to come into contact with the control board, and after a lapse of a predetermined time from the synchronization signal supplied from the control unit.
0 and the signal waveform when the signal analysis unit 40 functions (B)
Are exemplified.

FIG. 11A shows a frequency spectrum when the waveform of FIG. 10A is subjected to FFT (high-speed Fourier transform).
, And a characteristic sharp spectrum is clearly observed. On the other hand, the frequency spectrum when the waveform of FIG. 10B is FFT is as shown in FIG.
The result is a complex spectrum that does not clearly show the features of the object. From this, according to the configuration of the present invention, during the measurement period, the excitation unit excites free vibration so as to separate from the surface of the solid, and receives the free vibration in synchronization with this excitation, thereby extracting the characteristics of the target solid. Will be done.

The characteristic spectrum extracted by the signal analysis as shown in FIG. 11A is applied to the judgment unit 51 through the judgment condition setting unit 52 for both good and defective products.
Registered in. The determination unit 51 compares the spectrum extracted from the diagnosis target according to the linear prediction method with the spectrum being registered, and if this is similar to the spectrum of a good product being registered, outputs a good determination result. If it is similar to that of the defective product, the judgment result of the defective product is output.

The result of the configuration using the FFT has been described above. However, this FFT uses a linear prediction method or a similar maximum entropy method, ARMA.
It is of course possible to substitute other methods such as the method and the parkor analysis method.

Further, the configuration in which the characteristics of the received vibration are analyzed and the result of the pass / fail diagnosis is output has been exemplified. However,
It is also possible to adopt a configuration in which the analysis result of the vibration characteristics such as the frequency spectrum is directly output to a display device or the like, and the display data is visually inspected by an inspection operator to determine the quality.

[0055]

As described above in detail, the vibration inspection apparatus in the solid body according to the present invention controls the excitation unit and the reception unit in synchronization with each other by the control unit so that unnecessary signals generated by re-contact can be generated. Since the configuration is excluded, the effect that the inspection accuracy is improved is exerted.

The vibration inspection apparatus of the present invention has a configuration in which free vibration is excited inside the solid surface to be inspected for a short period of time by using a magnetic force to contact the solid surface to be inspected. There is an advantage that a highly accurate diagnosis that is not affected by the excitation mechanism can be performed, as compared with the case where excitation is performed using a low-speed hitting unit that uses such a means.

Further, according to the preferred embodiment of the present invention, the result of the pass / fail judgment is outputted by, for example, comparing the vibration characteristics of the registered good and defective products extracted in advance. , Without requiring the skill of the worker,
There is an advantage that objective judgment can be made.

Further, according to another preferred embodiment of the present invention, the inspection unit is configured to analyze the vibration received by the reception unit using a linear prediction method or the like and output the result as an inspection result. There is an advantage that the feature of the linear prediction method that the resonance frequency and the Q value of the resonance can be easily calculated can be utilized.

Further, the contact portion between the excitation section and the surface of the solid in the vibration inspection apparatus inside the solid according to the present invention is made of a material harder than the object to be inspected, such as steel. The configuration of this contact is
It has a spherical shape, a flat shape having an area larger than the driving member portion in the excitation portion, or a surface having a surface narrower than the driving member portion. By configuring such a contact part, the inspection accuracy when the angle of contact with the excitation part is large, when the solid surface is rough, or when a minute abnormal part is diagnosed by exciting a small area of the solid surface Can be improved.

[Brief description of the drawings]

FIG. 1 is a functional block diagram showing a configuration of a vibration inspection apparatus inside a solid according to an embodiment of the present invention, together with a solid to be diagnosed.

FIG. 2 is a cross-sectional view illustrating an example of a configuration of an excitation unit in FIG.

FIG. 3 is a waveform diagram showing an example of a drive current waveform supplied to an excitation unit in FIG.

FIG. 4 is a functional block diagram illustrating an example of a configuration of a receiving unit in FIG. 1;

FIG. 5 is a functional block diagram illustrating an example of a configuration of a signal processing unit in FIG. 1;

FIG. 6 is a functional block diagram illustrating an example of a configuration of a signal analysis unit in FIG. 1;

FIG. 7 is a functional block diagram illustrating an example of a configuration of a diagnosis output unit in FIG. 1;

FIG. 8 is a functional block diagram illustrating an example of a configuration of a control unit in FIG. 1;

FIG. 9 is a diagram illustrating, by a circuit, signal processing based on a linear prediction method performed by the signal analysis unit in FIG. 1;

FIG. 10 is a waveform diagram showing an example of a vibration waveform excited by the excitation unit of FIG.

FIG. 11 is a frequency spectrum obtained by performing an FFT on the waveform of FIG. 1;

FIG. 12 is a cross-sectional view showing an example of details of a drive unit in the excitation unit of FIG.

FIG. 13 is a cross-sectional view illustrating an example of details of a drive unit in the excitation unit of FIG.

FIG. 14 is a cross-sectional view illustrating an example of details of a drive unit in the excitation unit of FIG. 1;

FIG. 15 is a diagram illustrating the operation of the driving unit.

[Explanation of symbols]

10 Exciter 11 Driver 11A Magnetic force part 11B drive member 11C Compression part 12 Drive unit holding cap 13 Extension spring 14 Lead wire 20 Receiver 21 Piezoelectric ceramic 22 Vibration coupling layer 30 signal processing unit 31 Amplifier 32 Filtering section 40 signal analyzer 41 A / D converter 42 signal storage unit 43 Arithmetic unit 50 Diagnostic output unit 51 Judgment unit 52 Judgment condition setting section 53 Image output unit 54 Audio output unit 55 Position display section 60 control unit 61 Control signal generator 62 Position control unit 70 Inspection unit 100 excitation coil

Claims (13)

[Claims] 1. An excitation unit for generating vibration in a solid to be inspected, a receiving unit for receiving the vibration in the solid and converting the vibration into an electric signal, and analyzing characteristics of the vibration received by the receiving unit. An inspection unit that outputs an inspection result, and a control unit that controls each of the units, the control unit includes a unit that synchronizes a time point of excitation by the excitation unit and a period of reception of vibration by the reception unit. A vibration inspection device for the inside of a solid, characterized in that: 2. An excitation unit for generating vibration in a solid to be inspected, a receiving unit for receiving the vibration in the solid and converting the vibration into an electric signal, and analyzing characteristics of the vibration received by the receiving unit. An inspection unit that outputs an inspection result, and a control unit that controls each unit, the excitation unit has a movable unit that collides with the solid surface using a magnetic force and separates from the solid surface by a reaction thereof. ,
A device for inspecting vibration inside a solid body, comprising means for exciting free vibration inside the solid body by the collision separating operation of the movable part. 3. The vibration inside a solid body according to claim 1, wherein the excitation section excites free vibration inside the contact section such as a steel material by hitting the solid body. Inspection equipment. 4. The apparatus according to claim 1, wherein the inspection unit analyzes the vibration received by the reception unit by a linear prediction method, and inspects a vibration characteristic based on a resonance frequency and a resonance Q value. A device for inspecting vibration inside a solid body, comprising: 5. The apparatus according to claim 1, wherein the inspection result is output as a diagnosis result including at least one of a non-defective product and a defective product. 6. The inspection according to claim 1, wherein the inspection is performed by comparing vibration characteristics of a non-defective product and a defective product extracted and registered in advance with characteristics of the vibration analyzed by the inspection unit. A vibration inspection device for the inside of a solid, characterized in that: 7. The solid according to claim 1, further comprising: means for controlling positions of the excitation unit and the receiving unit on the solid; and means for detecting these positions. Internal vibration inspection device. 8. The solid interior according to claim 1, wherein the receiving unit receives vibration of the inspection target solid with a liquid, solid, semi-solid, or gas layer interposed therebetween. Vibration inspection equipment. 9. The plane according to claim 1, wherein the movable section of the excitation section includes a magnetic member, a drive member, and a compression section, and the compression section has a larger area than the drive member section. A device for inspecting vibration inside a solid, characterized in that the device is configured in a shape. 10. The apparatus according to claim 1, wherein the movable portion of the excitation unit includes a magnetic member, a driving member, and a compression unit, and the compression unit is configured to have a spherical shape. Inspection equipment inside the solid. 11. The apparatus according to claim 1, wherein the movable section of the excitation section includes a magnetic member, a drive member, and a compression section, and the compression section has a surface narrower than the drive member section. Characteristic vibration inspection equipment inside solids. 12. The apparatus according to claim 1, wherein the excitation unit includes at least a permanent magnet and an excitation coil, and the permanent magnet constitutes the magnetic member of the movable unit. Vibration inspection equipment inside solids. 13. The vibration inspection apparatus according to claim 12, wherein the drive current for driving the excitation coil is a DC pulse current having a single pulse waveform.