JP2003229610A5 - - Google Patents
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- Publication number
- JP2003229610A5 JP2003229610A5 JP2002025398A JP2002025398A JP2003229610A5 JP 2003229610 A5 JP2003229610 A5 JP 2003229610A5 JP 2002025398 A JP2002025398 A JP 2002025398A JP 2002025398 A JP2002025398 A JP 2002025398A JP 2003229610 A5 JP2003229610 A5 JP 2003229610A5
- Authority
- JP
- Japan
- Prior art keywords
- oxide superconducting
- film
- interlayer insulating
- insulating film
- substrate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000010408 film Substances 0.000 claims 8
- 239000011229 interlayer Substances 0.000 claims 4
- 239000000758 substrate Substances 0.000 claims 4
- 230000004888 barrier function Effects 0.000 claims 2
- 239000010410 layer Substances 0.000 claims 2
- 239000010409 thin film Substances 0.000 claims 2
- 238000004519 manufacturing process Methods 0.000 claims 1
- 238000000059 patterning Methods 0.000 claims 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2002025398A JP2003229610A (ja) | 2002-02-01 | 2002-02-01 | 酸化物超電導接合基板の製造方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2002025398A JP2003229610A (ja) | 2002-02-01 | 2002-02-01 | 酸化物超電導接合基板の製造方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2003229610A JP2003229610A (ja) | 2003-08-15 |
| JP2003229610A5 true JP2003229610A5 (OSRAM) | 2005-07-21 |
Family
ID=27747562
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2002025398A Pending JP2003229610A (ja) | 2002-02-01 | 2002-02-01 | 酸化物超電導接合基板の製造方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2003229610A (OSRAM) |
-
2002
- 2002-02-01 JP JP2002025398A patent/JP2003229610A/ja active Pending
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