JP2003229610A5 - - Google Patents

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Publication number
JP2003229610A5
JP2003229610A5 JP2002025398A JP2002025398A JP2003229610A5 JP 2003229610 A5 JP2003229610 A5 JP 2003229610A5 JP 2002025398 A JP2002025398 A JP 2002025398A JP 2002025398 A JP2002025398 A JP 2002025398A JP 2003229610 A5 JP2003229610 A5 JP 2003229610A5
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JP
Japan
Prior art keywords
oxide superconducting
film
interlayer insulating
insulating film
substrate
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Pending
Application number
JP2002025398A
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Japanese (ja)
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JP2003229610A (en
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Priority to JP2002025398A priority Critical patent/JP2003229610A/en
Priority claimed from JP2002025398A external-priority patent/JP2003229610A/en
Publication of JP2003229610A publication Critical patent/JP2003229610A/en
Publication of JP2003229610A5 publication Critical patent/JP2003229610A5/ja
Pending legal-status Critical Current

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Claims (2)

基板表面上にｃ軸配向の下部電極用酸化物超電導膜を形成し、パターニングした後に層間絶縁膜を形成し、下部電極用酸化物超電導膜上の層間絶縁膜の一部をエッチングし層間絶縁膜の孔明け部分を形成し、その後、障壁層用薄膜と、ｃ軸配向の上部電極用酸化物超電導膜とを形成して、基板に接合部を形成する酸化物超電導接合基板の製造方法。  A c-axis oriented oxide superconducting film for the lower electrode is formed on the surface of the substrate, and after patterning, an interlayer insulating film is formed, and a part of the interlayer insulating film on the oxide superconducting film for the lower electrode is etched to form an interlayer insulating film The oxide superconducting junction substrate is formed by forming a perforated portion, and then forming a barrier layer thin film and a c-axis oriented oxide superconducting film for the upper electrode to form a junction on the substrate. 層間絶縁膜の孔明け部分を形成する際に下部電極用酸化物超電導膜の表面のエッチングを行ない、熱処理し、障壁層用薄膜を形成する請求項１に記載の酸化物超電導接合基板の製造方法。2. The method of manufacturing an oxide superconducting junction substrate according to claim 1, wherein when forming the perforated portion of the interlayer insulating film, the surface of the oxide superconducting film for the lower electrode is etched and heat-treated to form a barrier layer thin film. .
JP2002025398A 2002-02-01 2002-02-01 Method for manufacturing oxide superconducting junction substrate Pending JP2003229610A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2002025398A JP2003229610A (en) 2002-02-01 2002-02-01 Method for manufacturing oxide superconducting junction substrate

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2002025398A JP2003229610A (en) 2002-02-01 2002-02-01 Method for manufacturing oxide superconducting junction substrate

Publications (2)

Publication Number Publication Date
JP2003229610A JP2003229610A (en) 2003-08-15
JP2003229610A5 true JP2003229610A5 (en) 2005-07-21

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ID=27747562

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2002025398A Pending JP2003229610A (en) 2002-02-01 2002-02-01 Method for manufacturing oxide superconducting junction substrate

Country Status (1)

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JP (1) JP2003229610A (en)

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