JP2003225850A - Polishing method and polishing machine - Google Patents

Polishing method and polishing machine

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Publication number
JP2003225850A
JP2003225850A JP2002027749A JP2002027749A JP2003225850A JP 2003225850 A JP2003225850 A JP 2003225850A JP 2002027749 A JP2002027749 A JP 2002027749A JP 2002027749 A JP2002027749 A JP 2002027749A JP 2003225850 A JP2003225850 A JP 2003225850A
Authority
JP
Japan
Prior art keywords
polishing
longitudinal direction
cylindrical
tool
polishing surface
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2002027749A
Other languages
Japanese (ja)
Other versions
JP3875897B2 (en
Inventor
Masaki Shimizu
正樹 清水
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Pentax Corp
Original Assignee
Pentax Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Pentax Corp filed Critical Pentax Corp
Priority to JP2002027749A priority Critical patent/JP3875897B2/en
Publication of JP2003225850A publication Critical patent/JP2003225850A/en
Application granted granted Critical
Publication of JP3875897B2 publication Critical patent/JP3875897B2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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  • Grinding And Polishing Of Tertiary Curved Surfaces And Surfaces With Complex Shapes (AREA)

Abstract

<P>PROBLEM TO BE SOLVED: To provide a polishing method and a polishing machine capable of polishing the polishing surface of a work having different curvature radii in a longitudinal direction and in a short side direction crossing the longitudinal direction at right angles and having a concave surface in the short side direction without waviness and not requiring an auxiliary tool such as a polishing protector in polishing. <P>SOLUTION: This invention relates to the method for polishing the polishing surface having different curvature radii in the longitudinal direction and the short side direction crossing the longitudinal direction at right angles and having the concave surface in the short side direction. A column-shaped polishing wheel having a larger diameter than the total width of the polishing surface in the short side direction is employed. The column-shaped polishing wheel is rotated around an axial line while the axial line is set toward the longitudinal direction. The column-shaped polishing wheel and the polishing surface are relatively moved in the longitudinal direction to simultaneously polish the whole width in the short side direction of the polishing surface. <P>COPYRIGHT: (C)2003,JPO

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【技術分野】本発明は、例えばfθレンズ用金型のトー
リック面のような研磨面を研磨するための研磨方法及び
研磨機に関する。
TECHNICAL FIELD The present invention relates to a polishing method and a polishing machine for polishing a polishing surface such as a toric surface of a mold for an fθ lens.

【0002】[0002]

【従来技術およびその問題点】fθレンズ(ミラー)
は、その表面(研磨面)の長手方向(主走査方向)とこ
の長手方向に直交する短手方向(副走査方向)の曲率半
径が異なる、いわゆるトーリック面からなっている。最
近はさらに、副走査方向の曲率半径が主走査方向に異な
る特殊トーリック形状が採用されつつある。
2. Prior Art and its Problems: fθ lens (mirror)
Is a so-called toric surface having different radii of curvature in the longitudinal direction (main scanning direction) of its surface (polishing surface) and the lateral direction (sub scanning direction) orthogonal to this longitudinal direction. Recently, a special toric shape whose radius of curvature in the sub-scanning direction differs in the main-scanning direction is being adopted.

【0003】このようなfθレンズは通常合成樹脂材料
の成形品で構成されるため、その金型はfθレンズの凹
凸を逆にしたトーリック面(特殊トーリック面)からな
る。このようなトーリック形状をなしている金型の研磨
面を研磨する研磨機としては、例えば次のようなものが
ある。
Since such an fθ lens is usually formed by molding a synthetic resin material, its mold has a toric surface (special toric surface) in which the irregularities of the fθ lens are reversed. Examples of a polishing machine for polishing the polishing surface of a mold having such a toric shape include the following.

【0004】一例としては、軸線回りに高速回転する回
転部材の先端に、球状の研磨具を固着し、この研磨具を
研磨面に接触させながら高速回転させて長手方向に往復
移動させ、かつ研磨面との接触位置を短手方向に徐々に
ずらすことにより、研磨面全体を研磨するものである。
As an example, a spherical polishing tool is fixed to the tip of a rotary member that rotates at high speed around an axis, and the polishing tool is rotated at high speed while contacting the polishing surface to reciprocate in the longitudinal direction, and polishing is performed. The entire polishing surface is polished by gradually shifting the contact position with the surface in the lateral direction.

【0005】しかし、この研磨機では、研磨具と研磨面
の接触位置を短手方向にずらしながら研磨を行うので、
金型の研磨面に小さなうねりが生じてしまい、そのた
め、レンズ表面にうねりがない理想的なfθレンズを製
造することができない。
However, in this polishing machine, since polishing is performed while shifting the contact position between the polishing tool and the polishing surface in the lateral direction,
A small waviness is generated on the polished surface of the mold, which makes it impossible to manufacture an ideal fθ lens having no waviness on the lens surface.

【0006】また、その他の例としては、金型を、金型
保持部材である研磨ヤトイ(治具)の嵌合用凹部に嵌合
して、金型の研磨面と研磨ヤトイの上面を連続させ、軸
線回りに高速回転する回転部材の先端に、金型の研磨面
の短手方向の幅より直径の大きい軟質材料からなる研磨
具(弾性球ポリッシャー)を固着し、この研磨具を、高
速回転させながら研磨面と研磨ヤトイの上面とに接触さ
せ、研磨面の長手方向に往復移動させることにより、研
磨面全体を研磨するものがある。
As another example, a die is fitted in a fitting recess of a polishing tool (a jig) which is a die holding member so that the polishing surface of the die and the upper surface of the polishing tool are continuous. , A polishing tool (elastic ball polisher) made of a soft material with a diameter larger than the width of the polishing surface of the mold in the lateral direction is fixed to the tip of the rotating member that rotates around the axis at high speed, and this polishing tool is rotated at high speed. There is one in which the entire polishing surface is polished by bringing the polishing surface and the upper surface of the polishing toy into contact with each other while reciprocating in the longitudinal direction of the polishing surface.

【0007】しかし、この研磨機は、研磨具が柔らかい
うえに、研磨具と研磨面の摩擦抵抗が大きいために研磨
具は高速回転しながら研磨面を研磨できないので、前加
工において生じた研磨面の微少な残存うねり、特に短手
方向のうねりを完全に除去することができない。さら
に、研磨時に研磨ヤトイを必要としているので、研磨ヤ
トイの製作、取り付けに要するコストが負担になってい
た。
However, in this polishing machine, since the polishing tool is soft and the frictional resistance between the polishing tool and the polishing surface is large, the polishing tool cannot polish the polishing surface while rotating at a high speed. It is impossible to completely remove the slight residual undulations, especially in the lateral direction. Furthermore, since a polishing toy is required for polishing, the cost of manufacturing and installing the polishing toy is a burden.

【0008】[0008]

【発明の目的】本発明は、研磨面の長手方向と長手方向
と直交する短手方向との曲率半径が異なり、短手方向が
凹面であるワークの研磨面を、うねりを生じることなく
研磨できるとともに、研磨時に研磨ヤトイ等の補助具を
必要としない研磨方法と研磨機を提供することを目的と
する。
It is an object of the present invention to polish a polishing surface of a work, which has a concave surface in the lateral direction and a radius of curvature different in the longitudinal direction of the polishing surface and in the lateral direction orthogonal to the longitudinal direction, without causing waviness. At the same time, it is an object of the present invention to provide a polishing method and a polishing machine that do not require auxiliary tools such as a polishing tool during polishing.

【0009】[0009]

【発明の概要】本発明の研磨方法は、長手方向と該長手
方向と直交する短手方向との曲率半径が異なり、該短手
方向が凹面である研磨面の研磨方法であって、上記研磨
面の短手方向の全幅より大きい直径を有する円柱形研磨
具を用い、該円柱形研磨具をその軸線を上記長手方向に
向けて該軸線を中心に回転させ、かつ該円柱形研磨具と
研磨面とを相対的に上記長手方向に移動させて、研磨面
の短手方向の全幅を同時に研磨することを特徴としてい
る。
SUMMARY OF THE INVENTION The polishing method of the present invention is a method for polishing a polishing surface in which the radius of curvature of the longitudinal direction is different from that of the transverse direction orthogonal to the longitudinal direction, and the transverse direction is concave. A cylindrical polishing tool having a diameter larger than the entire width in the lateral direction of the surface is used, and the cylindrical polishing tool is rotated about the axis with its axis oriented in the longitudinal direction, and polishing is performed with the cylindrical polishing tool. The surface is relatively moved in the longitudinal direction, and the entire width of the polishing surface in the lateral direction is polished at the same time.

【0010】円柱形研磨具の軸線の研磨面の法線に対す
る傾きを変化させることで、該円柱形研磨具によって研
磨される短手方向の研磨面の曲率半径を異ならせるのが
好ましい。
By changing the inclination of the axis of the cylindrical polishing tool with respect to the normal to the polishing surface, it is preferable to change the radius of curvature of the polishing surface in the lateral direction that is polished by the cylindrical polishing tool.

【0011】本発明の研磨機は、長手方向と該長手方向
と直交する短手方向との曲率半径が異なり、該短手方向
が凹面である研磨面を有するワークの研磨機であって、
上記研磨面の短手方向の全幅より大きい直径を有する円
柱形研磨具と;この円柱形研磨具を軸線回りに回転駆動
する研磨具回転手段と;該円柱形研磨具と上記ワーク研
磨面とを相対的に接離移動させる接離手段と:上記円柱
形研磨具と上記ワーク研磨面を、上記研磨面の長手方向
に相対的に往復移動させる往復移動手段と;上記接離手
段による接離方向と往復移動手段による移動方向とを含
む平面内ににおいて、上記円柱形研磨具の軸線と研磨面
の法線とのなす傾斜角を調整する角度調整手段と;上記
接離手段と往復移動手段と角度調整手段とを制御して、
上記円柱形研磨具の先端面の周縁部による研磨面の研磨
を制御する制御手段と;を備えることを特徴としてい
る。
The polishing machine of the present invention is a polishing machine for a work having a polishing surface in which the longitudinal direction and the lateral direction orthogonal to the longitudinal direction are different from each other in curvature radius and the lateral direction is concave.
A cylindrical polishing tool having a diameter larger than the entire width of the polishing surface in the lateral direction; polishing tool rotating means for rotating the cylindrical polishing tool around an axis; and the cylindrical polishing tool and the work polishing surface. Contacting / separating means for relatively moving in and out: Reciprocating moving means for relatively reciprocating the cylindrical polishing tool and the work polishing surface in the longitudinal direction of the polishing surface; Contacting / separating direction by the contacting / separating means And an angle adjusting means for adjusting an inclination angle formed by the axis of the cylindrical polishing tool and the normal to the polishing surface in a plane including the moving direction of the reciprocating moving means; By controlling the angle adjustment means,
Control means for controlling the polishing of the polishing surface by the peripheral portion of the tip surface of the cylindrical polishing tool.

【0012】また、上記制御手段が、上記接離手段を制
御することにより、上記研磨具を研磨面に常時一定の圧
力で押し付けるのが好ましい。
Further, it is preferable that the control means controls the contacting / separating means to constantly press the polishing tool against the polishing surface with a constant pressure.

【0013】さらに、上記制御手段が、上記接離手段を
制御することにより、上記研磨具を研磨面に常時一定の
圧力で押し付けるのが好ましい。
Further, it is preferable that the control means controls the contacting / separating means to constantly press the polishing tool against the polishing surface at a constant pressure.

【0014】また、上記ワークがfθレンズ製造用の金
型であるのが好ましい。
Further, it is preferable that the work is a mold for manufacturing an fθ lens.

【0015】[0015]

【発明の実施の形態】以下、本発明の一実施形態につい
て添付図面を参照しながら説明する。床面上には、平面
視長方形をなす基板1が固定されており、この基板1の
上面には、基板1の長手方向に往復移動可能なスライダ
3が装着されている。このスライダ3は図示を省略した
移動用モータ(往復移動手段)に、この移動用モータの
回転運動を直線運動に変換する駆動力伝達機構を介して
連係されており、移動用モータが正逆両方向に回転する
ことにより、基板1上を直線的に往復移動する。
BEST MODE FOR CARRYING OUT THE INVENTION An embodiment of the present invention will be described below with reference to the accompanying drawings. A substrate 1 having a rectangular shape in a plan view is fixed on the floor surface, and a slider 3 capable of reciprocating in the longitudinal direction of the substrate 1 is mounted on the upper surface of the substrate 1. The slider 3 is linked to a moving motor (reciprocating moving means) (not shown) through a driving force transmission mechanism that converts the rotational movement of the moving motor into a linear movement. By rotating the substrate 1, the substrate 1 linearly reciprocates.

【0016】スライダ3の上面には、図示を省略したf
θレンズを製造するための金型(ワーク)5が固定され
ている。この金型5の上面である研磨面(ワーク研磨
面)5aは、金型5の長手方向Xとこの長手方向に直交
する短手方向Yの断面がともに凹状の曲線をなしてお
り、さらに上記長手方向Xと短手方向Yの曲率半径が互
いに異なる、いわゆるトーリック形状をなしている。
On the upper surface of the slider 3, f (not shown) is shown.
A mold (work) 5 for manufacturing the θ lens is fixed. The polishing surface (work polishing surface) 5a, which is the upper surface of the die 5, has a concave curve both in the longitudinal direction X of the die 5 and in the lateral direction Y orthogonal to the longitudinal direction. It has a so-called toric shape in which the radii of curvature in the longitudinal direction X are different from those in the lateral direction Y.

【0017】研磨機7は、上記のスライダ3と、図示を
省略したマシニングセンタに研磨装置を取り付けたもの
からなり、研磨装置は以下のような構成である。スライ
ダ3上には、マシニングセンタに設けられた上下方向を
向く支持部材9が備えられている。この支持部材9は、
図示を省略した昇降用モータ(接離手段)が正逆両方向
に回転することによりZ方向に昇降するものであり、そ
の下端には横向きの円柱部9aが連設されており、円柱
部9aの一方の側面には円形の回転板11が、円柱部9
aの中心軸(B軸)回りに回転可能に装着されている。
円柱部9aの内部には角度調整用モータ(角度調整手
段)(図示略)が内臓されており、この角度調整用モー
タは回転板11に連係され、角度調整用モータが正逆両
方向に回転することにより回転板11が時計回りと反時
計回りに回転する。
The polishing machine 7 comprises the slider 3 and a machining center (not shown) to which a polishing device is attached. The polishing device has the following structure. On the slider 3, a support member 9 provided in the machining center and directed in the up-down direction is provided. This support member 9
An elevating motor (contacting / separating means) (not shown) rotates in both forward and reverse directions to ascend and descend in the Z direction. A horizontal columnar portion 9a is continuously provided at the lower end of the columnar portion 9a. A circular rotary plate 11 is provided on one side surface of the cylindrical portion 9
It is mounted rotatably around the central axis (B axis) of a.
An angle adjusting motor (angle adjusting means) (not shown) is incorporated inside the columnar portion 9a. The angle adjusting motor is linked to the rotary plate 11 so that the angle adjusting motor rotates in both forward and reverse directions. As a result, the rotary plate 11 rotates clockwise and counterclockwise.

【0018】回転板11の側面には、回転板11の放射
方向を向くとともに、大径部13aと小径部13bとか
らなる円柱形の腕部13が固着されており、この腕部1
3の内部には回転駆動用モータ(研磨具回転手段)(図
示略)が内臓されている。腕部13は平面視において金
型5の長手方向Xと同方向を向くとともに、同一直線上
に位置している。腕部13の内部には、腕部13と同方
向を向くスピンドル15がその軸線回りに回転自在に取
り付けられており、スピンドル15の先端部は腕部13
の先端から突出している。このスピンドル15は回転駆
動用モータに連係されており、回転駆動用モータが回転
することにより高速回転、例えば毎分数百乃至数千、あ
るいは数万回転で回転する。
On the side surface of the rotary plate 11, a columnar arm 13 having a large-diameter portion 13a and a small-diameter portion 13b is fixed while facing the radial direction of the rotary plate 11, and the arm portion 1
A rotation driving motor (polishing tool rotating means) (not shown) is built in the inside of the unit 3. The arm portion 13 faces the same direction as the longitudinal direction X of the mold 5 in a plan view and is positioned on the same straight line. Inside the arm portion 13, a spindle 15 oriented in the same direction as the arm portion 13 is attached rotatably around its axis, and the tip end of the spindle 15 has an arm portion 13
Protruding from the tip of. The spindle 15 is linked to a rotation driving motor, and when the rotation driving motor rotates, the spindle 15 rotates at high speed, for example, several hundreds to several thousands or tens of thousands of revolutions per minute.

【0019】スピンドル15の先端には円柱形の円柱形
研磨具17が固着されている。円柱形研磨具17の断面
の直径は、金型5の研磨面5aの短手方向Yの幅より大
きく、かつ、その半径は研磨面5aの短手方向Yの断面
の最小曲率半径より小さい。この円柱形研磨具17は、
例えばフェルトを固めたり、硬質ゴムを研磨シートで覆
ったり、塩化ビニールを固めることにより製造され、バ
フなどより硬質なものである。
A cylindrical cylindrical polishing tool 17 is fixed to the tip of the spindle 15. The diameter of the cross section of the cylindrical polishing tool 17 is larger than the width of the polishing surface 5a of the mold 5 in the lateral direction Y, and the radius thereof is smaller than the minimum radius of curvature of the cross section of the polishing surface 5a in the lateral direction Y. This cylindrical polishing tool 17
For example, it is manufactured by hardening felt, covering hard rubber with an abrasive sheet, or hardening vinyl chloride, and is harder such as buff.

【0020】金型5の上方には、研磨液19を研磨面5
aに常時供給する研磨液供給装置21が配設されてい
る。
Above the mold 5, a polishing liquid 19 is placed on the polishing surface 5.
A polishing liquid supply device 21 that constantly supplies a is provided.

【0021】上記の角度調整用モータと移動用モータと
昇降用モータは、マシニングセンタに内蔵された制御回
路(制御手段)(図示略)に接続されている。この制御
回路は、上記の角度調整用モータと移動用モータと昇降
用モータを、予め入力されたNCデータに基づいてNC
制御(数値制御)することにより、研磨作業の開始から
終了までの間、円柱形研磨具17の先端面17aの周縁
部を常時研磨面5aに隙間無く、かつ一定の圧力で密接
させるものである。具体的には、移動用モータの回転方
向と回転速度を制御するとともに、移動用モータの回転
によって変化する長手方向X及び上下方向の研磨面5a
と円柱形研磨具17の位置関係に応じて、昇降用モータ
と角度調整用モータの回転速度と回転方向を制御し、円
柱形研磨具17の上下方向位置を微調整して、円柱形研
磨具17の先端面17aの周縁部を研磨面5aに常時一
定圧力で接触させるとともに、図2に示すように水平面
H(図2参照)とスピンドル15のなす角度θを微調整
し、図3に示すようにX方向から見たときの円柱形研磨
具17の先端面17aの周縁部の近似的な曲率半径を変
化させることにより、円柱形研磨具17の先端面17a
の周縁部を研磨面5aに常時隙間無く密接させる。
The angle adjusting motor, the moving motor, and the elevating motor are connected to a control circuit (control means) (not shown) built in the machining center. This control circuit controls the angle adjusting motor, the moving motor, and the lifting motor based on NC data input in advance.
By controlling (numerical control), the peripheral edge of the tip surface 17a of the cylindrical polishing tool 17 is always brought into close contact with the polishing surface 5a at a constant pressure with no pressure from the start to the end of the polishing operation. . Specifically, the rotation direction and the rotation speed of the moving motor are controlled, and the polishing surface 5a in the longitudinal direction X and the up-down direction that changes according to the rotation of the moving motor.
According to the positional relationship between the cylindrical polishing tool 17 and the cylindrical polishing tool 17, the rotation speed and rotation direction of the lifting motor and the angle adjusting motor are controlled, and the vertical position of the cylindrical polishing tool 17 is finely adjusted. The peripheral edge of the front end surface 17a of 17 is constantly brought into contact with the polishing surface 5a at a constant pressure, and the angle θ between the horizontal plane H (see FIG. 2) and the spindle 15 is finely adjusted as shown in FIG. By changing the approximate radius of curvature of the peripheral edge of the tip surface 17a of the cylindrical polishing tool 17 when viewed from the X direction as described above, the tip surface 17a of the cylindrical polishing tool 17 is changed.
The peripheral edge of is always brought into close contact with the polishing surface 5a without any gap.

【0022】上記構成からなる研磨機7のマシニングセ
ンタの電源をONにしてサイクルスイッチ(図示略)を
押すと、角度調整用モータ、移動用モータ、昇降用モー
タ、回転駆動用モータが作動し、金型5が長手方向Xに
沿って直線的に往復移動し、円柱形研磨具17の先端面
17aの周縁部が常時一定圧力で研磨面5aに回転接触
することにより、研磨面5a全体が研磨される。この
間、研磨液供給装置21から研磨面5aに研磨液19が
常時供給される。サイクルスイッチを押してから所定時
間が経過すると、円柱形研磨具17が研磨面5aから上
方に離れ、スライダ3の直線移動と、円柱形研磨具17
の回転動作、回転板11の回転動作が停止し、研磨作業
が終了する。
When the power of the machining center of the polishing machine 7 having the above structure is turned on and a cycle switch (not shown) is pressed, the angle adjusting motor, the moving motor, the lifting motor, and the rotary driving motor are activated, and The mold 5 linearly reciprocates along the longitudinal direction X, and the peripheral edge of the tip surface 17a of the cylindrical polishing tool 17 is constantly in rotary contact with the polishing surface 5a at a constant pressure, whereby the entire polishing surface 5a is polished. It During this period, the polishing liquid supply device 21 constantly supplies the polishing liquid 19 to the polishing surface 5a. When a predetermined time has elapsed after pressing the cycle switch, the cylindrical polishing tool 17 moves upward from the polishing surface 5a, and the linear movement of the slider 3 and the cylindrical polishing tool 17 are performed.
Then, the rotating operation of the rotating plate 11 and the rotating operation of the rotating plate 11 are stopped, and the polishing operation is completed.

【0023】このように、円柱形研磨具17は高速回転
しながら研磨面5aを研磨でき、さらに、円柱形研磨具
17が常時一定圧力で研磨面5aを研磨し、かつ、研磨
時に研磨面5aは円柱形研磨具17に対して長手方向X
にのみ移動し短手方向Yには移動しないので、金型5の
研磨面5a全体をうねりのないように研磨することがで
きる。特に本実施形態では、比較的硬い円柱形研磨具1
7が軸線回りに高速回転しながら研磨面5aに接触する
ので、研磨面5aの短手方向Yのうねりの発生を効果的
に防止でき、前加工において生じたうねりも除去でき
る。さらに、移動用モータを高速回転させて、スライダ
3を高速で直線移動させることにより、研磨面5aの長
手方向Xのうねりの発生も効果的に防止できるようにな
る。
As described above, the cylindrical polishing tool 17 can polish the polishing surface 5a while rotating at a high speed. Further, the cylindrical polishing tool 17 always polishes the polishing surface 5a with a constant pressure, and at the time of polishing, the polishing surface 5a. Is the longitudinal direction X with respect to the cylindrical polishing tool 17.
Since it moves only in the direction Y and does not move in the lateral direction Y, the entire polishing surface 5a of the die 5 can be polished without waviness. Particularly in the present embodiment, a relatively hard cylindrical polishing tool 1
Since 7 contacts the polishing surface 5a while rotating around the axis at a high speed, it is possible to effectively prevent the generation of undulations in the latitudinal direction Y of the polishing surface 5a, and it is possible to remove the undulations generated in the pre-processing. Furthermore, by rotating the moving motor at a high speed to move the slider 3 linearly at a high speed, it is possible to effectively prevent the occurrence of waviness in the longitudinal direction X of the polishing surface 5a.

【0024】また、研磨時に研磨ヤトイのような補助具
を要しないので、研磨ヤトイの製作、取り付けが不要で
あり、コスト的にも有利である。
Further, since an auxiliary tool such as a polishing toy is not required at the time of polishing, it is not necessary to manufacture and attach the polishing toy, which is advantageous in cost.

【0025】なお、本実施形態の円柱形研磨具17の断
面の直径は金型5の研磨面5aの短手方向Yの幅より大
きいが、研磨面5aの短手方向Yの幅と同じ寸法として
もよい。また、研磨面の長手方向Xの断面形状が直線ま
たは凸面をなす金型であっても、研磨機7により研磨す
ることができる。さらに、研磨機7は、fθレンズを製
造するための金型5以外のトーリック形状のワークの研
磨にも用いることができる。また、支持部材9を矢印A
方向(Yと平行な方向)に往復移動させる水平移動用モ
ータ(図示略)を設け、これをマシニングセンタの制御
回路に接続して、支持部材9の矢印A方向の位置を調整
できるようにしてもよい。
The diameter of the cross section of the cylindrical polishing tool 17 of this embodiment is larger than the width of the polishing surface 5a of the mold 5 in the lateral direction Y, but is the same as the width of the polishing surface 5a in the lateral direction Y. May be Further, even if the die has a straight or convex sectional shape in the longitudinal direction X of the polishing surface, it can be polished by the polishing machine 7. Further, the polishing machine 7 can be used also for polishing a toric work other than the mold 5 for manufacturing the fθ lens. Further, the support member 9 is indicated by an arrow A.
A horizontal movement motor (not shown) for reciprocating in the direction (direction parallel to Y) is provided and connected to the control circuit of the machining center so that the position of the support member 9 in the direction of arrow A can be adjusted. Good.

【0026】[0026]

【発明の効果】以上のように本発明は、研磨面の長手方
向と長手方向と直交する短手方向との曲率半径が異な
り、短手方向が凹面であるワークの研磨面を、前加工に
おいて生じたうねりを除去し、かつ、うねりを生じるこ
となく研磨できる。さらに、研磨時に研磨ヤトイ等の補
助具を必要としないので、コスト的にも有利である。
As described above, according to the present invention, in the pre-processing, the polishing surface of a workpiece having a concave surface in which the radius of curvature is different between the longitudinal direction of the polishing surface and the lateral direction orthogonal to the longitudinal direction. The generated waviness can be removed, and polishing can be performed without causing waviness. Further, since auxiliary tools such as a polishing toy are not required at the time of polishing, it is advantageous in cost.

【図面の簡単な説明】[Brief description of drawings]

【図1】本発明の一実施形態を示す斜視図である。FIG. 1 is a perspective view showing an embodiment of the present invention.

【図2】同じく、研磨具と金型の接触状態を示す側面図
である。
FIG. 2 is likewise a side view showing a contact state between a polishing tool and a mold.

【図3】同じく、研磨具と金型の研磨面との接触状態の
変化を示す正面図である。
FIG. 3 is likewise a front view showing a change in the contact state between the polishing tool and the polishing surface of the mold.

【符号の説明】[Explanation of symbols]

1 基板 3 スライダ 5 金型(ワーク) 5a 研磨面(ワーク研磨面) 7 研磨機 9 支持部材 9a 円柱部 11 回転板 13 腕部 13a 大径部 13b 小径部 15 スピンドル 17 円柱形研磨具 17a 先端面 19 研磨液 21 研磨液供給装置 H 水平面 X 金型の長手方向 Y 金型の短手方向 Z 上下方向 1 substrate 3 slider 5 Mold (work) 5a Polishing surface (work polishing surface) 7 polishing machine 9 Support members 9a cylindrical part 11 rotating plate 13 arms 13a large diameter part 13b Small diameter part 15 spindles 17 Cylindrical polishing tool 17a Tip surface 19 polishing liquid 21 Polishing liquid supply device H horizontal plane X Mold longitudinal direction Y die short side direction Z vertical direction

Claims (5)

【特許請求の範囲】[Claims] 【請求項1】 長手方向と該長手方向と直交する短手方
向との曲率半径が異なり、該短手方向が凹面である研磨
面の研磨方法であって、 上記研磨面の短手方向の全幅より大きい直径を有する円
柱形研磨具を用い、該円柱形研磨具をその軸線を上記長
手方向に向けて該軸線を中心に回転させ、かつ該円柱形
研磨具と研磨面とを相対的に上記長手方向に移動させ
て、研磨面の短手方向の全幅を同時に研磨することを特
徴とする研磨方法。
1. A method for polishing a polishing surface in which the radius of curvature of the longitudinal direction is different from that of the lateral direction orthogonal to the longitudinal direction, and the lateral direction is a concave surface, and the entire width of the polishing surface in the lateral direction. A cylindrical polishing tool having a larger diameter is used, the cylindrical polishing tool is rotated about the axis with its axis directed in the longitudinal direction, and the cylindrical polishing tool and the polishing surface are relatively moved to each other. A polishing method comprising moving in the longitudinal direction and polishing the entire width of the polishing surface in the lateral direction at the same time.
【請求項2】 請求項1記載の研磨方法において、円柱
形研磨具の軸線の研磨面の法線に対する傾きを変化させ
ることで、該円柱形研磨具によって研磨される短手方向
の研磨面の曲率半径を異ならせる研磨方法。
2. The polishing method according to claim 1, wherein the inclination of the axis of the cylindrical polishing tool with respect to the normal to the polishing surface changes the polishing surface in the lateral direction to be polished by the cylindrical polishing tool. Polishing method with different radii of curvature.
【請求項3】 長手方向と該長手方向と直交する短手方
向との曲率半径が異なり、該短手方向が凹面である研磨
面を有するワークの研磨機であって、 上記研磨面の短手方向の全幅より大きい直径を有する円
柱形研磨具と;この円柱形研磨具を軸線回りに回転駆動
する研磨具回転手段と;該円柱形研磨具と上記ワーク研
磨面とを相対的に接離移動させる接離手段と:上記円柱
形研磨具と上記ワーク研磨面を、上記研磨面の長手方向
に相対的に往復移動させる往復移動手段と;上記接離手
段による接離方向と往復移動手段による移動方向とを含
む平面内ににおいて、上記円柱形研磨具の軸線と研磨面
の法線とのなす傾斜角を調整する角度調整手段と;上記
接離手段と往復移動手段と角度調整手段とを制御して、
上記円柱形研磨具の先端面の周縁部による研磨面の研磨
を制御する制御手段と;を備えることを特徴とする研磨
機。
3. A polishing machine for a work having a polishing surface in which the radius of curvature differs between the longitudinal direction and the lateral direction orthogonal to the longitudinal direction, and the lateral direction is a concave surface. Cylindrical polishing tool having a diameter larger than the entire width in the direction; polishing tool rotating means for rotating the cylindrical polishing tool around the axis; moving the cylindrical polishing tool and the work polishing surface relative to each other. Contacting / separating means: reciprocating moving means for relatively reciprocating the cylindrical polishing tool and the workpiece polishing surface in the longitudinal direction of the polishing surface; contacting / separating direction by the contacting / separating means and movement by the reciprocating means. Angle adjusting means for adjusting the inclination angle formed by the axis of the cylindrical polishing tool and the normal to the polishing surface within a plane including the direction; and controlling the contacting / separating means, the reciprocating means, and the angle adjusting means. do it,
And a control means for controlling the polishing of the polishing surface by the peripheral portion of the tip surface of the cylindrical polishing tool.
【請求項4】 請求項3記載の研磨機において、上記制
御手段が、上記接離手段を制御することにより、上記研
磨具を研磨面に常時一定の圧力で押し付ける研磨機。
4. The polishing machine according to claim 3, wherein the control means controls the contacting / separating means to constantly press the polishing tool against a polishing surface at a constant pressure.
【請求項5】 請求項3または4記載の研磨機におい
て、上記ワークがfθレンズ製造用の金型である研磨
機。
5. The polishing machine according to claim 3, wherein the work is a mold for manufacturing an fθ lens.
JP2002027749A 2002-02-05 2002-02-05 Polishing machine Expired - Fee Related JP3875897B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2002027749A JP3875897B2 (en) 2002-02-05 2002-02-05 Polishing machine

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2002027749A JP3875897B2 (en) 2002-02-05 2002-02-05 Polishing machine

Publications (2)

Publication Number Publication Date
JP2003225850A true JP2003225850A (en) 2003-08-12
JP3875897B2 JP3875897B2 (en) 2007-01-31

Family

ID=27749165

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2002027749A Expired - Fee Related JP3875897B2 (en) 2002-02-05 2002-02-05 Polishing machine

Country Status (1)

Country Link
JP (1) JP3875897B2 (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005342875A (en) * 2004-06-07 2005-12-15 Ricoh Co Ltd Curved surface machining device, optical element and optical element mold formed by using the device, and calibration method of parallel link mechanism
CN102601702A (en) * 2011-01-24 2012-07-25 宝山钢铁股份有限公司 Processing method for internal sphere of split bearing seat
CN110052916A (en) * 2019-04-22 2019-07-26 中国工程物理研究院激光聚变研究中心 Heavy caliber wedge optical element ultraprecise combined shaping grinding attachment and processing method

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005342875A (en) * 2004-06-07 2005-12-15 Ricoh Co Ltd Curved surface machining device, optical element and optical element mold formed by using the device, and calibration method of parallel link mechanism
JP4662018B2 (en) * 2004-06-07 2011-03-30 株式会社リコー Curved surface processing apparatus and parallel link mechanism calibration method
CN102601702A (en) * 2011-01-24 2012-07-25 宝山钢铁股份有限公司 Processing method for internal sphere of split bearing seat
CN110052916A (en) * 2019-04-22 2019-07-26 中国工程物理研究院激光聚变研究中心 Heavy caliber wedge optical element ultraprecise combined shaping grinding attachment and processing method

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