JP2003218176A5 - - Google Patents

Download PDF

Info

Publication number
JP2003218176A5
JP2003218176A5 JP2002016060A JP2002016060A JP2003218176A5 JP 2003218176 A5 JP2003218176 A5 JP 2003218176A5 JP 2002016060 A JP2002016060 A JP 2002016060A JP 2002016060 A JP2002016060 A JP 2002016060A JP 2003218176 A5 JP2003218176 A5 JP 2003218176A5
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2002016060A
Other versions
JP3874667B2 (ja
JP2003218176A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2002016060A priority Critical patent/JP3874667B2/ja
Priority claimed from JP2002016060A external-priority patent/JP3874667B2/ja
Publication of JP2003218176A publication Critical patent/JP2003218176A/ja
Publication of JP2003218176A5 publication Critical patent/JP2003218176A5/ja
Application granted granted Critical
Publication of JP3874667B2 publication Critical patent/JP3874667B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

JP2002016060A 2002-01-24 2002-01-24 プローブ装置 Expired - Fee Related JP3874667B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2002016060A JP3874667B2 (ja) 2002-01-24 2002-01-24 プローブ装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2002016060A JP3874667B2 (ja) 2002-01-24 2002-01-24 プローブ装置

Publications (3)

Publication Number Publication Date
JP2003218176A JP2003218176A (ja) 2003-07-31
JP2003218176A5 true JP2003218176A5 (ja) 2005-08-11
JP3874667B2 JP3874667B2 (ja) 2007-01-31

Family

ID=27652244

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2002016060A Expired - Fee Related JP3874667B2 (ja) 2002-01-24 2002-01-24 プローブ装置

Country Status (1)

Country Link
JP (1) JP3874667B2 (ja)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007183193A (ja) * 2006-01-10 2007-07-19 Micronics Japan Co Ltd プロービング装置
JP4911355B2 (ja) * 2007-05-25 2012-04-04 横河電機株式会社 テストシステム
KR101388674B1 (ko) 2007-09-07 2014-04-25 삼성전자주식회사 고속 원 샷 웨이퍼 테스트를 위한 무선 인터페이스 프로브카드 및 이를 구비한 반도체 테스트 장치
JP5086983B2 (ja) * 2008-12-15 2012-11-28 株式会社東芝 プローブ装置、処理装置及びウェハプローブテストの処理方法
JP5299089B2 (ja) * 2009-05-28 2013-09-25 富士電機株式会社 半導体チップの試験装置および試験方法
US20120074974A1 (en) * 2009-06-02 2012-03-29 Yohei Sato Test Unit and Test System

Similar Documents

Publication Publication Date Title
BE2019C547I2 (ja)
BE2019C510I2 (ja)
BE2018C021I2 (ja)
BE2017C049I2 (ja)
BE2017C005I2 (ja)
BE2016C069I2 (ja)
BE2016C040I2 (ja)
BE2016C013I2 (ja)
BE2018C018I2 (ja)
BE2016C002I2 (ja)
BE2015C078I2 (ja)
BE2014C053I2 (ja)
BE2014C051I2 (ja)
BE2014C041I2 (ja)
DE60335752D1 (ja)
BE2015C068I2 (ja)
JP2003242011A5 (ja)
JP2003228967A5 (ja)
JP2003139617A5 (ja)
BRPI0215435A2 (ja)
JP2003192736A5 (ja)
JP2003172865A5 (ja)
JP2003221539A5 (ja)
JP2003051024A5 (ja)
JP2003182156A5 (ja)