JP2003218176A5 - - Google Patents
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- JP2003218176A5 JP2003218176A5 JP2002016060A JP2002016060A JP2003218176A5 JP 2003218176 A5 JP2003218176 A5 JP 2003218176A5 JP 2002016060 A JP2002016060 A JP 2002016060A JP 2002016060 A JP2002016060 A JP 2002016060A JP 2003218176 A5 JP2003218176 A5 JP 2003218176A5
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Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2002016060A JP3874667B2 (ja) | 2002-01-24 | 2002-01-24 | プローブ装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2002016060A JP3874667B2 (ja) | 2002-01-24 | 2002-01-24 | プローブ装置 |
Publications (3)
Publication Number | Publication Date |
---|---|
JP2003218176A JP2003218176A (ja) | 2003-07-31 |
JP2003218176A5 true JP2003218176A5 (ja) | 2005-08-11 |
JP3874667B2 JP3874667B2 (ja) | 2007-01-31 |
Family
ID=27652244
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2002016060A Expired - Fee Related JP3874667B2 (ja) | 2002-01-24 | 2002-01-24 | プローブ装置 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JP3874667B2 (ja) |
Families Citing this family (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2007183193A (ja) * | 2006-01-10 | 2007-07-19 | Micronics Japan Co Ltd | プロービング装置 |
JP4911355B2 (ja) * | 2007-05-25 | 2012-04-04 | 横河電機株式会社 | テストシステム |
KR101388674B1 (ko) | 2007-09-07 | 2014-04-25 | 삼성전자주식회사 | 고속 원 샷 웨이퍼 테스트를 위한 무선 인터페이스 프로브카드 및 이를 구비한 반도체 테스트 장치 |
JP5086983B2 (ja) * | 2008-12-15 | 2012-11-28 | 株式会社東芝 | プローブ装置、処理装置及びウェハプローブテストの処理方法 |
JP5299089B2 (ja) * | 2009-05-28 | 2013-09-25 | 富士電機株式会社 | 半導体チップの試験装置および試験方法 |
US20120074974A1 (en) * | 2009-06-02 | 2012-03-29 | Yohei Sato | Test Unit and Test System |
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2002
- 2002-01-24 JP JP2002016060A patent/JP3874667B2/ja not_active Expired - Fee Related