JP2003215188A - Method and instrument for measuring temperature characteristic of piezoelectric oscillator - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a measuring method and a measuring instrument suitable for practical use capable of enhancing the measuring speed for the temperature characteristic of an oscillator. <P>SOLUTION: A large number of quartz oscillators 1 are stored in a carrier 2 under the condition where terminals thereof are directed upwards, and a measuring terminal block 32 projected with measuring terminals 31 corresponding to the terminals of the quartz oscillators is moved downward from an upper side thereof, so as to bring electric connection between the respective terminals by contact. A substantially linear-function-like linear temperature change is executed in a temperature-variable vessel to measure the characteristic of the measured piezoelectric oscillator within a unit time. <P>COPYRIGHT: (C)2003,JPO

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a temperature characteristic measuring method and a temperature characteristic measuring device for a piezoelectric vibrator.

[0002]

2. Description of the Related Art Piezoelectric vibrators, for example, crystal vibrators using a rectangular AT-cut crystal diaphragm have been further miniaturized with the recent miniaturization of electronic parts. In terms of manufacturing, more severe conditions are required. For example, as miniaturization progresses, the main vibration of the desired thickness-sliding mode and the unnecessary vibration modes such as the higher-order modes of the contour system vibration are likely to be coupled, and when the coupling occurs, the crystal oscillator becomes an incompatible product. For this reason, it is necessary to strictly design the external dimensions of the crystal diaphragm,
At the time of manufacturing, the above coupling may occur due to variations in various conditions, leading to a decrease in yield. Although the coupling does not usually appear at room temperature, when the ambient temperature changes, the frequency or C
The I (crystal impedance) value may fluctuate. Such a phenomenon is called an activity dip, which is a non-conforming product for practical use.

It is necessary to exclude such nonconforming products in the middle of manufacturing or in the final stage, and in order to carry out this, conventionally, a predetermined temperature range (for example, -40 ° C to 90 ° C) is used.
The ambient temperature was varied at ℃) and the temperature characteristics of the crystal unit were examined to confirm the presence or absence of activity dips. Conventionally, such confirmation of the temperature characteristic is performed by creating a temperature condition for raising or lowering the ambient temperature in a very fine temperature step such as a step of 2 ° C., measuring the frequency and the CI value for each step, and making an activity dip. It was confirmed, and if there was a change in the characteristics more than a predetermined value, the crystal unit was excluded as an incompatible product.

The above-mentioned temperature characteristics are confirmed by the π-circuit method which is a category of the transmission method defined in JIS standard C6701 or IEC standard, and the inspection device according to the standard has one variable temperature. This is a configuration in which a tank, one or two π circuit jigs, and an electrical characteristic measuring instrument connected to the π circuit jigs are provided. Explaining with a specific example, 1
A total of 252 crystal units housed in a plurality of carriers (jigs) are installed in a variable temperature tank provided with one π circuit jig. First, raise the temperature from 25 ℃ (normal temperature) to 90 ℃,
After cooling to -40 ℃ in 2 ℃ steps, then 25 ℃
Up to. During this time, after preheating for thermal stability at each step, the temperature characteristics of each crystal unit are measured while moving the carrier. Then, the same measurement work is performed for each successive temperature step.

However, in the above example, the measurement work time in one temperature step including the preheating time is about 5 minutes, and it takes about 6 hours to complete all the work. If there are few items to be inspected, there is no problem. However, if there are a large number of items to be inspected, there is a problem that multiple measuring devices must be prepared and operated for a long time.

By the way, the above-mentioned temperature characteristic inspection is basically premised on highly accurate measurement of parameters such as frequency and CI value at each temperature step. However, for the purpose of confirming a specific characteristic, such as confirmation of an activity dip, it is sufficient to confirm the presence or absence of characteristic fluctuations above a specified amount without requiring the highly accurate inspection environment described above. A corresponding simple temperature characteristic measuring method and measuring apparatus have been demanded.

[0007]

SUMMARY OF THE INVENTION The present invention has been made to solve the above problems, and provides a practical measuring method and measuring apparatus capable of improving the measurement speed of the temperature characteristic of a piezoelectric vibrator. The purpose is to do.

[0008]

According to the present invention, in order to improve the temperature characteristic measurement processing speed, a measuring terminal is electrically connected to each terminal of a piezoelectric vibrator to be measured in advance, and the measuring terminal is switched. The basic configuration is to switch at high speed by using the above, and by further devising the temperature raising method and inspection timing, the temperature characteristics are measured at a much higher speed than in the past, and can be realized by the following configurations. it can.

That is, according to claim 1, a plurality of piezoelectric vibrators are housed in a variable temperature tank whose internal temperature can be adjusted to a predetermined temperature, and the temperature characteristics of the piezoelectric vibrators at a predetermined temperature are measured by an electrical characteristic measuring instrument. In the method, a measuring terminal electrically connected to each of a part or all of the plurality of piezoelectric vibrators housed in the variable temperature tank is provided, and each measuring terminal is electrically independent. , Characterized by having a switching means between each measuring terminal and the temperature characteristic measuring device for selectively switching a measuring terminal corresponding to an arbitrary piezoelectric vibrator, and successively measuring the temperature characteristic of each piezoelectric vibrator. .
The electrical connection between the piezoelectric vibrator and the measurement terminal can be exemplified by contact connection by pressing. The switching means may employ a method of switching mechanically or electrically by a switching unit (switching device).

According to the first aspect, since the measuring terminal is electrically connected to the piezoelectric vibrator to be measured in advance, it is not necessary to switch and connect the terminals of the piezoelectric vibrator one by one as in the conventional case. It is possible to perform high-speed sequential switching by switching operation.

According to a second aspect of the present invention, in the temperature characteristic measuring method for a piezoelectric vibrator according to the first aspect, the internal temperature is gradually changed at a predetermined rate of change per unit time,
The temperature characteristic detection may be completed for all the piezoelectric vibrators to be measured within the unit time, and the temperature characteristic detection may be sequentially performed every unit time.

For example, if the piezoelectric vibrator to be processed is 10
The measurement terminals are kept in contact with all the terminals of each piezoelectric vibrator, and the ambient environmental temperature is gradually raised or lowered in this state. The measurement order of each piezoelectric vibrator is determined in advance, and the measurement is performed in order from the first piezoelectric vibrator while the temperature changes. Here, if the temperature gradient is 5 seconds / ° C, there are 10 piezoelectric vibrators to be measured, so to capture the characteristics per 1 ° C, switching and measurement time of 0.5 seconds / piece are required. However, this is a sufficiently measurable time. Of course, it is possible to lengthen or shorten the measurement time per piece, and the measurement time can be set arbitrarily by adjusting the temperature gradient or the number of processed pieces.

If, for example, 20 piezoelectric vibrators are to be processed and there are only 10 measuring terminals, the group of measuring terminals is switched and connected for the remaining 10 terminals within a unit time. The temperature characteristic may be measured by Further, in this example, two cycles of the above-described gradual temperature increase or temperature decrease may be created, and the temperature characteristics of a total of 20 piezoelectric vibrators may be measured without opening and closing the variable temperature tank.

According to the second aspect, it is not necessary to create a precise and long-time temperature step environment as in the conventional case,
It is only necessary to set a linear temperature increase or decrease condition of a predetermined ratio. Then, it is only necessary to change the temperature at a predetermined rate within a unit time and measure desired characteristics of all the piezoelectric vibrators in order from the head piezoelectric vibrator. Then, at the start of the next unit time, the measurement is performed from the leading piezoelectric vibrator.

As described in claim 3, since the measuring terminals are electrically connected to the terminals of all the piezoelectric vibrators housed in the variable temperature tank, the piezoelectric vibrators and the measuring terminals are switched. There is no need, and the processing speed in measurement can be increased.

Further, as described in claim 4, when the temperature characteristic data of the piezoelectric vibrator is out of a predetermined range, the temperature characteristic measuring method of the piezoelectric vibrator has means for judging the piezoelectric vibrator as an incompatible product. It may be possible, and by adding such a means, it is possible to obtain only a conforming product with respect to predetermined electric characteristics.

Claim 5 discloses a specific measuring device according to the present invention. That is, a carrier that accommodates a plurality of piezoelectric vibrators, a variable temperature tank that accommodates the carrier inside and can adjust the internal temperature to a predetermined temperature, and a part or all of a plurality of capacitors that are accommodated in the variable temperature tank A measuring terminal electrically connected to each terminal of the piezoelectric vibrator independently, a switching device that sequentially switches each measuring terminal for each piezoelectric vibrator, and a temperature characteristic of the piezoelectric vibrator selected by the switching device is measured. A temperature characteristic measuring device and a device for measuring electric characteristics of a piezoelectric vibrator, wherein the internal temperature is gradually changed at a predetermined rate of change per unit time, and the temperature of all the piezoelectric vibrators is changed within the unit time. The configuration is characterized in that the characteristic detection is completed and the temperature characteristic detection is sequentially performed every unit time. A piezoelectric vibrator is installed on the carrier so that the terminals of the piezoelectric vibrator are located on the measurement terminal side. The carrier may be single or plural. The measurement data is stored in the memory, and the controller determines the comparison of the data in the memory. The control unit also controls the temperature of the variable temperature tank, the switching device, the measuring instrument, and the like.

According to the above configuration, the internal temperature of the variable temperature tank is set to a predetermined rate of change per unit time under the configuration in which the measurement terminals electrically connected to the terminals of the piezoelectric vibrator are installed independently. The temperature characteristic detection is completed for all the piezoelectric vibrators within the unit time by sequentially switching each measurement terminal for each piezoelectric vibrator by the switching device, and this is repeated sequentially. Therefore, unlike the conventional case, it is not necessary to create a precise and long-time temperature step environment, and a desired characteristic of the piezoelectric vibrator can be measured simply by setting a linear temperature increase or decrease condition of a predetermined ratio. .

Further, as described in claim 6, in the temperature characteristic measuring device for the piezoelectric vibrator according to claim 5, whether or not the temperature characteristic data output from the temperature characteristic measuring device is within a predetermined range is compared and determined. It may be configured to have a determination unit. For example, with respect to the memory in which the temperature characteristic measurement data is stored, the control unit compares and determines whether or not the data is within a predetermined range set in advance. By adding the determination means, it is possible to obtain a temperature characteristic measuring device for a piezoelectric vibrator in which only compatible products can be selected for predetermined electrical characteristics.

Further, according to a seventh aspect of the present invention, in the temperature characteristic measuring device for each piezoelectric vibrator, the measuring terminals are electrically connected to the terminals of all the piezoelectric vibrators housed in the variable temperature tank. May be With this configuration,
Since it is not necessary to switch between the piezoelectric vibrator and the measurement terminal, the processing speed in measurement can be increased.

Further, as described in claim 8, in the temperature characteristic measuring device for a piezoelectric vibrator according to claim 5, each measuring terminal to which the terminal of the piezoelectric vibrator is contact-connected is formed integrally with the carrier. The measurement terminals may be led to the outer circumference of the carrier, and the derived measurement terminals may be independently connected to the switching device.

Since the measuring terminal is formed on the carrier, by setting the piezoelectric vibrator on the carrier, it is possible to make a contact connection with the terminal of the piezoelectric vibrator, and the measuring terminal led to the outer periphery of the carrier and the switching device. Each piezoelectric vibrator and the switching device can be easily electrically connected by simply connecting.

[0023]

BEST MODE FOR CARRYING OUT THE INVENTION A first embodiment of the present invention will be described with reference to the drawings by taking the temperature characteristic measurement of an AT-cut quartz crystal resonator as an example. FIG. 1 is a diagram showing a configuration of a temperature characteristic measuring device, and FIG. 2 is a diagram showing an internal configuration of a variable temperature tank according to the present embodiment. Further, FIG. 3 is a schematic diagram showing a storage configuration of a crystal oscillator in a carrier, and FIG. 4 is a schematic graph showing an example of temperature change (temperature rise).

As shown in FIG. 1, the temperature characteristic measuring apparatus according to the present invention includes a variable temperature chamber 3, a temperature setting unit 46 connected to the variable temperature chamber 3, and a switching for switching each terminal of the crystal oscillator in the variable temperature chamber. Unit (switching device) 41 and the switching unit 4
1 receives the output from 1, the temperature characteristic measuring device 43 that measures the electrical characteristics of each crystal unit based on the output from the π circuit jig, and the memory 45 that stores the measurement data. Consists of. A control PC as a control unit
(Personal computer) 40 having the control P
The C40 also has a function of comparing and determining the measurement data stored in the memory, and also controls the temperature of the variable temperature tank 3, the switching unit 41, the temperature characteristic measuring instrument 43, and the like.

A plurality of crystal oscillators 1, 1, ... Are surface mount type crystal oscillators each having a rectangular AT-cut crystal oscillator housed therein. As shown in FIG. 1
The terminals 11 and 12 are installed on the carrier 2 with the terminals 11 and 12 facing upward. The carrier 2 is made of an insulating resin material or the like,
A plurality of storage units 21, 21 for storing each crystal unit 1 ...
・ ・ Is provided. .. corresponding to the terminals 11, 12 are provided on the respective accommodating portions 21, that is, on the crystal oscillators 1, and the measurement terminals are provided on all terminals of the crystal oscillators. 31, 31, ... Are associated with each other. Note that the measurement terminal is not limited to the probe shape (needle shape), and may be one that ensures electrical connection depending on the electrode material and shape of the terminal of the crystal unit. The measuring terminals 31, 31, ... Are integrated by a measuring terminal base 32 in a state where the measuring terminals are electrically independent, and the independent terminals are led out to the outside of the variable temperature tank. Accordingly, by operating the measurement terminal block 32 vertically or horizontally with respect to the crystal unit 1 arranged on the carrier, the measurement terminals can be brought into contact with the terminals of the crystal unit at once.

The variable temperature chamber 3 can change the internal temperature within the range necessary for measuring the temperature characteristics of the crystal unit, and can change the temperature from -40 ° C. to 90 ° C., for example. The setting of such temperature change is set for control P
The temperature is set by the temperature setting unit 46 based on the designation from C. The temperature change may be a linear temperature change (temperature gradient) having a substantially linear function, or a stepwise temperature change having a predetermined temperature step may be performed. However, since the latter function having the temperature step is difficult to control the temperature, the device cost becomes high.

Each measuring terminal 31 led out of the variable temperature tank
Is input to the switching unit 41. The switching unit 41 selectively outputs one set of terminal outputs by a switching operation with respect to a large number of sets of terminal inputs, and sets one crystal resonator as one set of measurement terminals at predetermined time intervals. It can be switched sequentially. The switching operation may be performed by mechanical switching of contacts or electrical non-contact switching by a thyristor or the like. In this embodiment, an electrical switching method capable of high-speed switching processing is adopted. The set of terminals selected by the switching unit 41 is π
It is output to the circuit jig. The π circuit jig is a jig for performing the measurement specified by the standard as described above. The π circuit jig is connected to an electrical characteristic measuring instrument such as a network analyzer to measure the characteristic of the crystal unit. Further, the measurement of the electrical characteristics may be performed by a known measuring device such as a device configuration including a frequency synthesizer and a vector voltmeter instead of the network analyzer.

The measured data is stored in the memory 45, and the comparison judgment is performed by the control PC. That is, control PC
Data for defining a conforming range is input in advance in 40, and the data is compared with the measurement data to determine conformity or nonconformity of the measurement data, that is, the crystal oscillator to be measured. For example, if the activity dip has a CI variation of a specified amount or more, it is determined as a nonconforming product. The determination result may be recorded in the memory as determination data. Although the memory is set as an independent storage device in the present embodiment, the control PC
The configuration included in 40 may be adopted. Further, a plurality of temperature characteristic measuring systems may be integratedly controlled by a single control PC, and further, it is possible to connect to a device for removing nonconforming products based on the above determination result through a network and incorporate them into an integrated system. .

The temperature inside the variable temperature tank 3 is controlled by the temperature setting unit 46, but in the present embodiment, the required temperature range is -40 ° C to 90 ° C with 25 ° C as the starting point. It suffices that the temperature change linearly changes at a predetermined ratio within a unit time and that the temperature can be maintained at room temperature, the maximum temperature, and the minimum temperature for a certain time. The temperature setting unit 46 is controlled by the control PC 40, and in connection with this, the switching unit 41 is also controlled by the control PC. That is, control is performed so that optimum measurement is performed in consideration of the situation of temperature change and the speed and timing of switching operation per unit time in the switching unit.

Next, the temperature characteristic measuring operation with the above configuration will be described. As shown in FIG. 1, a large number of crystal resonators 1 are housed in a carrier 2 with the terminals facing upward, and a measurement terminal block 32 is formed from which measurement terminals 31 corresponding to the terminals of the crystal resonator project. Lower it to make electrical connection between each terminal by contact. Then, the inside of the variable temperature tank is kept at 25 ° C., and the calibration, that is, the apparatus calibration is performed in this state. The measurement system including the π circuit jig and the network analyzer (temperature characteristic measuring instrument) is normally calibrated using three standards, and is performed based on the three standards of open (∞), short (0Ω), and load. A 50Ω standard resistor is generally used for the load.

After the calibration, the temperature is raised from 25 ° C. The rate of rise (rate of temperature change) is determined in consideration of the number of measurement targets, the switching speed, and other peripheral processing system capabilities.
Since the temperature rise per unit time is determined by this, the measurement processing time per unit is determined so that the measurement is completed in a predetermined order for all the crystal oscillators to be measured within the unit time. For example, when 30 crystal units (A0 to A29) are stored in the carrier as shown in FIG. 3, A0 is set within the unit time α1 as shown in FIG.
From A29 to A29, it is necessary to complete all measurements for all crystal units. Then, in the next unit time α2, the measurement is sequentially performed in the same measurement order, and the same work is performed in the next unit time α3. Of course, the unit times α1, α2, and α3 have the same time length, and it is preferable that the measurement time of each crystal oscillator is evenly distributed within the unit time. As a result, for example, the crystal oscillator A0 to be measured first is measured at the beginning of each unit time, so that the crystal oscillator A0 can be sequentially measured at substantially unit time intervals, and other crystal oscillators are also almost the same. It can be measured at time intervals. As an example of temperature change, 25 ° C → 90 ° C → 25 ° C →-
Although the temperature is gradually changed from 40 ° C. to 25 ° C., the presence or absence of a specific characteristic such as an activity dip can be checked by continuously performing the measurement work while gradually changing the temperature of the crystal unit in this manner.

The electrical characteristics are measured by measuring the response of the crystal oscillator when a current of a certain frequency is passed from the network analyzer. The frequency is switched stepwise, the response to each frequency is measured, and the characteristics of the crystal unit are confirmed. The measurement data is stored in the memory 45, and the comparison judgment is performed by the control PC. That is, the control PC 40 is preliminarily input with data defining a conforming range, compares the data with the measurement data, and measures data, that is, the conformity of the crystal oscillator to be measured,
Determine nonconformity.

As described above, the temperature change rate is determined by the number of objects to be measured and the like, and usually the processing is performed after being determined in advance so that the processing is continuously performed at equal intervals. However, when the measurement timing is deviated due to variations in processing conditions, the control unit may perform adjustment to change the process of the temperature setting unit or the switching unit.

Another embodiment of the carrier according to the present invention will be described with reference to FIGS. In each of the examples, only the carrier is shown, and the other structures are the same as those in the first embodiment, and the description thereof will be omitted.

FIG. 5 shows another example of the carrier structure and the crystal resonator holding structure. As shown in FIG. 5A, the carrier 5 is made of insulating resin or ceramics, and has a storage section 50 having a concave cross section for storing a plurality of crystal resonators 1. Measuring terminals 51 and 52 are provided on the bottom surfaces of the respective accommodating portions, and the measuring terminals are drawn out to the lower surface (outer peripheral surface) of the carrier to form external lead terminals 53 and 54. The surface mount type crystal unit is installed in the storage unit 50 so that the terminals 11 and 12 of the crystal unit are in contact with the measurement terminals. As shown in FIG. 5B, both terminals may be brought into close contact with each other by the pressing portion 55 to ensure the contact. One or a plurality of such carriers are stored in a variable temperature tank, and the temperature characteristics are measured by the procedure described above.

FIG. 6 shows an example of a carrier that holds a crystal unit with lead terminals. The carrier 6 is provided with a plurality of sets of sockets (measurement terminals) 61, 62 at predetermined intervals, and the sockets are drawn out to the lower surface (outer peripheral surface) of the carrier to form external lead-out terminals 63, 64. A crystal unit with a lead terminal is inserted into the socket,
The above-mentioned temperature characteristic measurement work is advanced.

Regarding the second embodiment according to the present invention,
A configuration example of the measuring device will be described with reference to FIG. 7. In the first embodiment, the signal (current of a specific frequency) is supplied to the piezoelectric vibrator (quartz vibrator) from the measuring instrument side.
In the present embodiment, a configuration is shown in which a signal source is separately provided and a drive signal and a measurement signal are supplied in parallel to the piezoelectric vibrator in an independent form.

The variable temperature bath 71 accommodates the piezoelectric vibrators to be measured, and the measurement terminals 72 are electrically connected to the respective piezoelectric vibrators. Each measuring terminal 72 is configured to be selectively connected to the π circuit jig by the switching unit 73. As described above, the characteristics of the piezoelectric vibrator are measured while gradually changing the temperature in the variable temperature tank according to a predetermined temperature change pattern. The piezoelectric vibrator is driven by supplying a drive signal from a signal source 75 such as a frequency synthesizer to the piezoelectric vibrator in the variable temperature tank 71 via the π circuit jig 74, the switching unit 73, and the measurement terminal 72, The response output is fetched into the memory 77 through the AD converter 76. Then, the measurement data in the memory is measured at a good timing with a measuring device 78 such as a network analyzer, and the measurement data is recorded in the control PC 70.

A configuration example of the measuring apparatus according to the third embodiment of the present invention will be described with reference to FIG. In each of the above-mentioned embodiments, the electrical characteristics of the piezoelectric vibrator (quartz vibrator) are measured by the π circuit method (transmission method), but in the present embodiment, a configuration example of measurement by the oscillation method is shown. ing.

The variable temperature tank 81 accommodates the piezoelectric vibrator which is the object to be measured, and the measuring terminal 82 is electrically connected to each piezoelectric vibrator. Each measurement terminal 82 is configured to be selectively connected to the oscillation circuit 84 by the switching unit 83. As described above, the characteristics of the piezoelectric vibrator are measured while gradually changing the temperature in the variable temperature tank according to a predetermined temperature change pattern. Oscillation circuit 84 for each temperature
The output from is sent to the memory 86 via the AD converter 85. In the case of the oscillation method, since the oscillator directly oscillates the oscillator, the oscillation frequency and the CI value of the crystal oscillator can be confirmed by monitoring the oscillation frequency and output of this oscillator. You can know the changes in the characteristics.

The measurement by the oscillation method as described above is not suitable for highly accurate characteristic measurement, but is characterized in that the device configuration is simple, it can be realized at a relatively low cost, and the response is fast. For example, the present invention can be sufficiently applied to a measurement that does not require strict accuracy, such as when checking the presence or absence of an activity dip.

The present invention is not limited to the above embodiments, but can be applied to a configuration in which the total number of measuring terminals is smaller than the total number of terminals of the piezoelectric vibrator. In such a case, for example, the measurement terminals should be in contact with all the terminals of some piezoelectric vibrators in the variable temperature tank at one time, and the measurement terminals should be moved for other piezoelectric vibrators to perform the measurement. You may In this case, the overall processing time becomes long, but it is possible to provide a measuring device capable of flexibly varying the quantity to be processed at a relatively low cost.

As for the temperature change method, it is also possible to measure not by a linear function change but by a stepwise temperature change having a temperature step. In this case, temperature control becomes difficult, but relatively accurate measurement can be made possible.

Further, it is possible to exclude the determination means for determining the conformity or nonconformity of the measured piezoelectric vibrator. In this case, the measurement data is written in the memory, but it is also possible to refer to the data stored in the memory by another device and determine the conformity or nonconformity later.

[0045]

According to the present invention, since the measuring terminals are electrically connected to all the piezoelectric vibrators to be measured in advance, it is necessary to switch and connect the terminals of the piezoelectric vibrators to the measuring terminals one by one as in the conventional case. Instead, high-speed sequential switching can be performed by the switching device that performs the switching operation. Therefore, it is possible to obtain a practical measuring method and measuring apparatus that can improve the measurement speed of the temperature characteristics of the piezoelectric vibrator.

According to the second aspect, in addition to the above effect, it is not necessary to create a precise and long-time temperature step environment as in the conventional case, and only a linear temperature rise or fall condition of a predetermined ratio is set. Therefore, a relatively simple temperature characteristic measuring method can be obtained.

According to the third or sixth aspect, by providing the means for determining the nonconforming product, only the conforming product can be easily obtained.

According to the fifth aspect of the present invention, the linear temperature rising or lowering condition of a predetermined ratio is set only under the structure in which the measuring terminals electrically connected to the terminals of the piezoelectric vibrator are installed independently. Thus, desired characteristics of the piezoelectric vibrator can be measured. Therefore, it is possible to obtain a practical measuring device capable of improving the measurement speed of the temperature characteristic of the piezoelectric vibrator.

Further, as described in claim 7, in the temperature characteristic measuring device for each of the piezoelectric vibrators, the measuring terminals are electrically connected to the terminals of all the piezoelectric vibrators housed in the variable temperature tank. May be With such a configuration, it is not necessary to switch between the piezoelectric vibrator and the measurement terminal,
The processing speed in measurement can be made faster.

Further, in addition to the above effects, since the measuring terminal is formed on the carrier, the piezoelectric vibrator is set on the carrier so as to make a contact connection with the terminal of the piezoelectric vibrator. Therefore, it is possible to obtain an effect that each piezoelectric vibrator and the switching device can be easily electrically connected by simply connecting the measurement terminal led to the outer periphery of the carrier and the switching device.

[Brief description of drawings]

FIG. 1 is a diagram showing a configuration of a temperature characteristic measuring device according to a first embodiment.

FIG. 2 is a diagram showing a configuration inside a variable temperature tank showing the first embodiment.

FIG. 3 is a schematic diagram showing a configuration of storing a crystal unit in a carrier.

FIG. 4 is a schematic graph showing an example of temperature change (temperature rise).

FIG. 5 is a diagram showing a configuration of a carrier showing another embodiment.

FIG. 6 is a diagram showing a structure of a carrier showing another embodiment.

FIG. 7 is a diagram showing a configuration of a temperature characteristic device according to a second embodiment.

FIG. 8 is a diagram showing a configuration of a temperature characteristic device showing a third embodiment. Crystal oscillator (piezoelectric oscillator) 2, 5, 6 Carrier 21 Storage part 3, 81, 81 Variable temperature tank 41, 73, 83 switching unit 42, 74 π circuit jig

Claims (8)

[Claims] 1. A method for accommodating a plurality of piezoelectric vibrators in a variable temperature tank capable of adjusting the internal temperature to a predetermined temperature, and measuring the temperature characteristics of the piezoelectric vibrators at a predetermined temperature with an electrical characteristic measuring instrument, A measuring terminal electrically connected to each of a part or all of the plurality of piezoelectric vibrators housed in the variable temperature tank is provided, and the respective measuring terminals are electrically independent,
Between each measurement terminal and the temperature characteristic measuring device, there is provided switching means for selectively switching the measurement terminal corresponding to an arbitrary piezoelectric vibrator, and the temperature characteristic of each piezoelectric vibrator is sequentially measured. Measuring method of temperature characteristics of oscillator. 2. The internal temperature is gradually changed at a predetermined rate of change in a unit time, temperature characteristic detection is completed for all the piezoelectric vibrators to be measured within the unit time, and the temperature is sequentially measured every unit time. The temperature characteristic measuring method for a piezoelectric vibrator according to claim 1, wherein characteristic detection is performed. 3. The temperature characteristic of the piezoelectric vibrator according to claim 1, wherein the measuring terminals are electrically connected to the terminals of all the piezoelectric vibrators housed in the variable temperature tank. Measuring method. 4. The piezoelectric device according to claim 1, further comprising means for determining the piezoelectric vibrator as an incompatible product when the temperature characteristic data of the piezoelectric vibrator at a specific temperature is out of a predetermined range. Measuring method of temperature characteristics of oscillator. 5. A carrier for accommodating a plurality of piezoelectric vibrators, a variable temperature tank for accommodating the carrier therein and capable of adjusting the internal temperature to a predetermined temperature, and a part or all of the variable temperature tank. Measurement terminals electrically connected to the terminals of each of the plurality of piezoelectric vibrators independently, a switching device that sequentially switches each measurement terminal for each piezoelectric vibrator, and a temperature characteristic of the piezoelectric vibrator selected by the switching device. A temperature characteristic measuring device for a piezoelectric vibrator, comprising: an electric characteristic measuring device for measuring the temperature of the piezoelectric vibrator, wherein the internal temperature is gradually changed at a predetermined change rate in a unit time, and all the piezoelectric vibrations are measured in the unit time. A temperature characteristic measuring device for a piezoelectric vibrator, wherein temperature characteristic detection is completed for each child, and temperature characteristic detection is sequentially performed every unit time. 6. The temperature characteristic measurement of the piezoelectric vibrator according to claim 5, further comprising a determination means for comparing and determining whether or not the temperature characteristic data output from the electric characteristic measuring device is within a predetermined range. apparatus. 7. The temperature characteristic of the piezoelectric vibrator according to claim 5, wherein the measuring terminals are electrically connected to the terminals of all the piezoelectric vibrators housed in the variable temperature tank. Measuring method. 8. The carrier is integrally formed with each measuring terminal to which a terminal of the piezoelectric vibrator is contact-connected, the measuring terminal is led to the outer periphery of the carrier, and the led measuring terminal is the switching device. 8. The temperature characteristic measuring device for a piezoelectric vibrator according to claim 5, wherein the temperature characteristic measuring device and the piezoelectric element are connected to each independently.