JP2003215063A - Method for inspecting transfer mold, transfer mold and apparatus for inspecting transfer mold - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To efficiently implement an appearance inspection for a transfer mold formed from a translucent material such as glass, etc., without degrading a detection rate of defect locations. <P>SOLUTION: In the method for inspecting the transfer mold comprising the translucent material and having steps formed on one surface and forming a transfer shape of a wiring pattern, the transfer mold 1 comprises the translucent material such as glass and acrylic resin, etc. The surface 1a where a transfer pattern is formed, is provided with a plurality of transfer grooves 1b corresponding to a wiring layer to be formed on a substrate. The appearance inspection is applied to the downward surface 1a where the transfer pattern of the transfer mold 1 is formed and determines whether there are defective parts on the transfer mold 1 so as to prevent the defects of the wiring pattern prior to transferring to the substrate. <P>COPYRIGHT: (C)2003,JPO

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a transfer die inspection method, a transfer die and a transfer die inspection apparatus, and more particularly to a transfer die having a transfer pattern of a wiring pattern formed on a substrate. The inspection method, the transfer mold, and the transfer mold inspection apparatus.

[0002]

2. Description of the Related Art From the viewpoint of miniaturization of electronic equipment and high-density mounting of various electronic components on a wiring board, a laminated wiring board in which a plurality of wiring boards are stacked is widely used. In recent years, a thin sheet-like substrate made of resin or the like has been used for such a substrate.

When a wiring pattern is formed on such a substrate, a transfer mold having a groove corresponding to the wiring pattern to be formed on one surface is pressed against the substrate,
Transfer the groove to the substrate. Then, a wiring pattern is formed by filling the grooves with a conductive paste or the like.

In order to prevent defects in the wiring pattern formed on the substrate, the transfer die used at this time has an appearance before the transfer, whether or not there is a defective portion in the groove forming the transfer shape of the transfer die. Need to be inspected. The transfer mold is formed using a material that generally transmits light, such as glass or acrylic resin, as a material so that the transfer pattern formed thereon can be easily confirmed.

Generally, in the appearance inspection of the transfer mold, the surface thereof is inspected by using a high-magnification microscope to determine the presence or absence of the defective portion.

[0006]

However, the visual inspection of the transfer mold is necessary only for recognizing the detailed shape of the surface and checking the defective portion because the light transmittance of the material is damaged. It is difficult to obtain contrast.

Therefore, in the conventional visual inspection, the detection rate of the defective portion of the transfer mold is extremely low. In addition, in order to increase the detection rate in visual inspection, it was also done to increase the magnification of the microscope, but in that case, it was necessary to observe a very large number of fields of view, which required a great deal of time for inspection. ,
There is a problem that the efficiency of inspection work is reduced.

As described above, in the conventional visual inspection of the transfer mold, it is difficult to simultaneously increase the detection rate of the defective portion and the efficiency of the inspection work. The present invention has been made in view of such a point, in the appearance inspection of the transfer mold made of a material that transmits light such as glass, without lowering the detection rate of the defective portion, yet efficiently An object of the present invention is to provide a transfer mold inspection method, a transfer mold, and a transfer mold inspection device for performing an inspection.

[0009]

In order to achieve the above object, there is provided a method for inspecting a transfer mold which is made of a light-transmissive material and in which a step formed on one surface forms a transfer shape of a wiring pattern. To be done. In this transfer die inspection method, the transfer shape is inspected from the side opposite to the surface on which the step of the transfer die is formed.

According to this method, the mirror reflection light from the rear surface of the transfer mold is prevented from being generated, so that the detection rate of the defective portion is not lowered and the efficiency of the inspection is improved. Further, in the present invention, composed of a light-transmissive material,
A transfer mold in which a step formed on one surface has a transfer pattern of a wiring pattern, and the surface of the transfer mold on which the step is formed is subjected to a roughening process for increasing irregular reflection of light. What is provided is provided.

Further, according to the present invention, it is possible to provide a transfer type inspection device which is made of a light transmissive material and in which a step formed on one surface has a transfer pattern of a wiring pattern. This inspection apparatus includes a subject table on which the transfer mold is installed, a capturing device that captures reflected light from a step forming surface of the transfer mold, and a predetermined angle and emission intensity with respect to the transfer mold. Wiring formed on the transfer mold, which includes a light source for irradiating light with an image and an image determination device for comparing the inspection image captured by the capturing device with a reference image to determine the quality of the transfer shape. The transferred shape of the pattern can be inspected automatically.

[0012]

BEST MODE FOR CARRYING OUT THE INVENTION Embodiments of the present invention will be described below with reference to the drawings. FIG. 1 is a sectional view for explaining a method of inspecting a transfer mold according to an embodiment of the present invention. The transfer mold 1 is made of a light-transmissive material such as glass or acrylic resin. The transfer pattern forming surface 1a is provided with a plurality of transfer grooves 1b corresponding to the wiring layers to be formed on the substrate.

FIG. 2 is a diagram showing an example of the inspection apparatus. This inspection apparatus has an objective lens 2 of a microscope, and an object table 3 for holding an object to be inspected is provided at a position separated from the objective lens 2 by a predetermined distance.

When inspecting the transfer mold 1 which is the object to be inspected, first, the base sheet 4 is placed on the object table 3. For the base sheet 4, for example, a matte black synthetic rubber mat is used.

Next, as shown in FIG. 1, the transfer pattern 1 is placed on the base sheet 4 with the transfer pattern forming surface 1a facing downward. When installation of the transfer mold 1 is completed, FIG.
Light is radiated from the light source 5 such as a fluorescent lamp installed on the microscope side toward the back surface of the transfer mold 1. Here, an annular fluorescent lamp is used as the light source 5, and the objective lens 2 of the microscope is used.
It is arranged to surround the circumference of.

At this time, the angle between the light source 5 and the objective lens 2 and the positional relationship between them are adjusted so that the light reflected by the mirror from the back surface of the transfer mold 1 does not directly enter the objective lens 2. It is necessary to give due consideration. for that reason,
The fluorescent lamp of the light source 5 is arranged so as to be illuminated with a uniform light amount around the objective lens 2.

Further, the light incident from the back surface of the transfer mold 1 to the inside reaches the surface of the transfer mold 1 and is reflected only from the step portion of the transfer groove 1b formed therein.
The base sheet 4 is used. Moreover, since the mirror reflected light is not generated on the back surface of the transfer mold 1, it is possible to minimize the influence of unnecessary reflected light on the inspection image of the microscope.

That is, the light source 5 is arranged on the side opposite to the transfer pattern forming surface 1a of the transfer mold 1, and the transfer mold 1
By irradiating from the back surface of the, the light transmitted through the transfer mold 1 is refracted or reflected at the step portion of the transfer groove 1b. Therefore, in the inspection image, there is a difference in the brightness of the material surface of the transfer mold 1 depending on the undulation state of the transfer shape. By utilizing this difference in brightness, it is possible to enhance the contrast in inspecting the transfer shape and enhance the visibility of the inspection image.

In order to further emphasize the difference in brightness of the reflected light depending on the step, a dark color tone that sufficiently absorbs the light from the light source 5, for example, a mat (underlay) such as black is used as the base sheet 4. , A groove 1b having a transfer shape formed thereon
It is advisable to dispose the transfer mold 1, which is the object to be inspected, with the surface on which the mark is formed facing down. As a result, the reflection coefficient at the boundary surface of the transfer mold 1 is different between the part where the groove 1b is formed and the other part, so that the shape of the transfer pattern of the transfer mold 1 can be inspected. The contrast of the inspection image can be increased.

The surface of the transfer mold 1, that is, the groove 1b.
By performing a roughening process for increasing irregular reflection of light on the surface on which the mark is formed, the contrast of the inspection image can be further increased.

Furthermore, when a synthetic rubber mat is used as the base sheet 4 of the transfer die 1 to be inspected, the transfer die 1 is pressed against the base sheet 4 with a predetermined force when the transfer shape is inspected. It is preferable to do so. This is because a portion of the transfer die 1 other than the groove 1b comes into close contact with the base sheet 4 due to the elasticity of the base sheet 4, and the amount of reflected light from that portion becomes small, so that the inspection image of the transfer pattern is clearer. Becomes

In the above-described inspection method, not only visual inspection but also an image capturing device such as a microscope, a CCD camera, a scanner device or the like for capturing the reflected light from the step forming surface of the transfer mold, It can also be applied to an inspection device that automatically recognizes the transfer shape of a transfer mold.

FIG. 3 is a block diagram showing an example of the image determination device in the inspection device. Image determination device 10
Is connected to the scanner device 6 for taking in the inspection image, reads the reference image data of the wiring pattern stored in the flexible disk 7 or the like, and displays the comparison result with the inspection image. A disk drive 9 for reading CAD data is provided.

Further, the image judging device 10 has a data converting section 11 for converting the inspection image into binary data at a predetermined level, for example, and the inspection image converted into binary data by the data converting section 11 is provided. Is further subjected to a normalization process necessary for comparison with the reference image data.

The reference image data read from the flexible disk 7 is stored in the memory 13. Then, the image data comparison unit 14 determines the inspection image normalized by the normalization unit 12 based on the reference image data stored in the memory 13,
Compare with the original pattern design shape. By this comparison,
The quality determination standard setting unit 15 determines the quality of the inspected transfer mold based on a predetermined comparison standard set in advance, and displays the determination result on the display 8. This comparison standard can be adjusted appropriately by the operator.

As described above, by using the above-described transfer die inspection method, an appearance inspection is automatically performed based on a predetermined comparison standard to detect a defective portion of the transfer die.
It becomes possible to perform it efficiently with high reliability.

Further, since the complicated image processing is not involved in the identification / judgment program creation by the inspection device, the inspection device can be created at a relatively low cost. It should be noted that the present invention is not limited to the above-described embodiment and can be implemented with various modifications. For example, the material of the transfer mold and each component of the inspection device can be appropriately changed and implemented.

[0028]

As described above, according to the transfer die inspection method of the present invention, the defect detection rate is lowered in the appearance inspection of the transfer die made of a light transmitting material. It becomes possible to carry out the inspection efficiently without any need.

Further, according to the inspection apparatus of the present invention, it is possible to detect the defective portion of the transfer die efficiently with high reliability, and to provide the inspection apparatus of the transfer die at a relatively low cost. it can.

[Brief description of drawings]

FIG. 1 is a sectional view for explaining a method for inspecting a transfer mold according to an embodiment of the present invention.

FIG. 2 is a diagram showing an example of an inspection device.

FIG. 3 is a block diagram showing an example of an image determination device in the inspection device.

[Explanation of symbols]

1 ... Transfer type, 2 ... Objective lens, 3 ... Subject table,
4 ... Base sheet, 5 ... Light source, 6 ... Scanner device, 7 ...
Flexible disk, 8 ... Display, 9 ... Disk drive, 10 ... Image determination device, 11 ... Data conversion unit, 12 ... Normalization unit, 13 ... Memory, 14 ... Image data comparison unit, 15 ... Pass / fail judgment standard setting unit

[Procedure amendment]

[Submission date] February 1, 2002 (2002.2.1)

[Procedure Amendment 1]

[Document name to be amended] Statement

[Correction target item name] 0009

[Correction method] Change

[Correction content]

[0009]

In order to achieve the above object, there is provided a method for inspecting a transfer mold which is made of a light-transmissive material and in which a step formed on one surface forms a transfer shape of a wiring pattern. To be done. This transfer type inspection method, the
The transfer mold has a color tone that absorbs the light from the light source.
Placed on the table with the stepped surface facing down
The side opposite to the step-formed surface of the transfer mold.
From the transfer mold at a predetermined angle and emission intensity
By irradiating light, from the side of the opposite surface, depending on the transfer shape
Inspect the reflected light.

[Procedure Amendment 2]

[Document name to be amended] Statement

[Correction target item name] 0010

[Correction method] Change

[Correction content]

According to this method, the subject table is used as the light source.
By adjusting the color tone to absorb the light from the
Light incident inside from the side opposite to the side where the
Reaches the surface where the step is formed, and
I will shoot. Furthermore, at that time, the predetermined angle and
By irradiating light with emission intensity, a step of the transfer mold is formed
To prevent mirror reflection light from being generated on the surface opposite to the surface
And make the contrast stand out. As a result , the detection rate of defective portions does not decrease, and the efficiency of inspection is improved. Further, in the present invention, composed of a light-transmissive material,
A transfer die in which a step formed on one surface has a transfer pattern of a wiring pattern, and the surface of the transfer die on which the step is formed is subjected to a roughening process for increasing diffused reflection of light. What is provided is provided.

Claims (4)

[Claims] 1. A method for inspecting a transfer mold, which is made of a light-transmissive material and has a step formed on one surface thereof in a concavo-convex shape, wherein the transfer mold has a color tone that absorbs light from a light source. The stepped surface is placed on the subject table, and the surface of the transfer die opposite to the stepped surface has a predetermined angle and light emission from the transfer die. A method for inspecting a transfer mold, which comprises irradiating light with high intensity and inspecting reflected light according to a transfer shape from the opposite surface side. 2. A mat having elasticity is used for the subject table, and a transfer mold is pressed against the mat with a predetermined force when an inspection is performed. Of the transfer mold inspection method. 3. A transfer mold, which is made of a light-transmissive material and in which a step formed on one surface has a concave-convex shape, wherein diffused reflection of light is caused on the surface of the transfer mold on which the step is formed. A transfer mold characterized by being roughened to increase its length. 4. A transfer mold inspection apparatus, which is made of a light-transmissive material and has a step formed on one surface of the transfer mold, wherein the transfer mold is installed on the subject table and the transfer mold. A capturing device for capturing the reflected light from the surface on which the mold step is formed,
A light source for irradiating the transfer die with light at a predetermined angle and emission intensity; and an image determination device for determining the quality of the transfer shape by comparing an inspection image captured by the capturing device with a reference image. An inspection device for a transfer die, comprising: a transfer die inspection apparatus for inspecting an uneven shape formed on the transfer die.