JP2003207405A5 - - Google Patents
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- JP2003207405A5 JP2003207405A5 JP2002005334A JP2002005334A JP2003207405A5 JP 2003207405 A5 JP2003207405 A5 JP 2003207405A5 JP 2002005334 A JP2002005334 A JP 2002005334A JP 2002005334 A JP2002005334 A JP 2002005334A JP 2003207405 A5 JP2003207405 A5 JP 2003207405A5
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Priority Applications (4)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2002005334A JP4011345B2 (en) | 2002-01-11 | 2002-01-11 | Multi-axis force sensor chip |
| US10/339,496 US6823744B2 (en) | 2002-01-11 | 2003-01-10 | Six-axis force sensor |
| EP03000457.6A EP1327870B1 (en) | 2002-01-11 | 2003-01-10 | Six-axis force sensor |
| US10/972,354 US6951142B2 (en) | 2002-01-11 | 2004-10-26 | Six-axis force sensor chip and six-axis force sensor using the same |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2002005334A JP4011345B2 (en) | 2002-01-11 | 2002-01-11 | Multi-axis force sensor chip |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2003207405A JP2003207405A (en) | 2003-07-25 |
| JP2003207405A5 true JP2003207405A5 (en) | 2007-03-22 |
| JP4011345B2 JP4011345B2 (en) | 2007-11-21 |
Family
ID=27644409
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2002005334A Expired - Fee Related JP4011345B2 (en) | 2002-01-11 | 2002-01-11 | Multi-axis force sensor chip |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP4011345B2 (en) |
Families Citing this family (20)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4680566B2 (en) | 2004-10-26 | 2011-05-11 | 本田技研工業株式会社 | Multi-axis force sensor chip and multi-axis force sensor using the same |
| JP5303101B2 (en) * | 2006-05-02 | 2013-10-02 | 本田技研工業株式会社 | Force sensor chip |
| JP5007083B2 (en) | 2006-08-08 | 2012-08-22 | 本田技研工業株式会社 | Force sensor chip |
| JP5243704B2 (en) | 2006-08-24 | 2013-07-24 | 本田技研工業株式会社 | Force sensor |
| JP4210296B2 (en) | 2006-08-24 | 2009-01-14 | 本田技研工業株式会社 | Method for manufacturing force sensor |
| JP4958501B2 (en) | 2006-08-30 | 2012-06-20 | 本田技研工業株式会社 | Force sensor chip and external force transmission mechanism |
| JP2008058110A (en) | 2006-08-30 | 2008-03-13 | Honda Motor Co Ltd | Chip for force sensor and force sensor |
| KR100760123B1 (en) * | 2006-11-01 | 2007-09-18 | 경상대학교산학협력단 | 6-axis force/moment for intelligent robot's ankle |
| CN103994845B (en) | 2013-02-19 | 2019-09-10 | 精工爱普生株式会社 | Force checking device, manipulator and moving body |
| JP6760575B2 (en) | 2016-10-07 | 2020-09-23 | ミネベアミツミ株式会社 | Sensor chip, strain generator, force sensor device |
| WO2018066557A1 (en) | 2016-10-07 | 2018-04-12 | ミツミ電機株式会社 | Sensor chip, strain inducing body, and force sensor device |
| JP6940037B2 (en) * | 2017-04-26 | 2021-09-22 | ミネベアミツミ株式会社 | Force sensor device |
| US10634695B2 (en) | 2017-04-26 | 2020-04-28 | Minebea Mitsumi Inc. | Force sensor |
| EP3457103B1 (en) | 2017-09-19 | 2021-08-04 | Minebea Mitsumi Inc. | Force sensor device |
| JP6957367B2 (en) | 2018-01-18 | 2021-11-02 | 株式会社東芝 | Semiconductor chip inspection equipment, semiconductor chip inspection system, intelligent power module, semiconductor chip inspection method and program |
| JP6919964B2 (en) | 2018-01-29 | 2021-08-18 | ミネベアミツミ株式会社 | Sensor chip and force sensor device |
| JP7298092B2 (en) | 2019-01-30 | 2023-06-27 | ミネベアミツミ株式会社 | sensor device |
| JP2021071305A (en) | 2019-10-29 | 2021-05-06 | ミネベアミツミ株式会社 | Force sensor device |
| JP2022142118A (en) | 2021-03-16 | 2022-09-30 | ミネベアミツミ株式会社 | Sensor chip and force sensor device |
| JP2022142117A (en) | 2021-03-16 | 2022-09-30 | ミネベアミツミ株式会社 | Sensor chip, and force sensor device |
Family Cites Families (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS57169643A (en) * | 1981-04-13 | 1982-10-19 | Yamato Scale Co Ltd | Load cell for multiple components of force |
| JPS59151032A (en) * | 1983-02-18 | 1984-08-29 | Hitachi Ltd | Evaluating and calibrating jig of force sensor |
| JPH0640039B2 (en) * | 1985-09-10 | 1994-05-25 | オムロン株式会社 | Force detector |
| JPH02205077A (en) * | 1989-02-02 | 1990-08-14 | Ricoh Co Ltd | Power sensor |
| JP2767766B2 (en) * | 1991-11-26 | 1998-06-18 | 川崎重工業株式会社 | 6-axis force sensor |
| JPH09257612A (en) * | 1996-03-22 | 1997-10-03 | Olympus Optical Co Ltd | Force sensor |
| JP2001264198A (en) * | 2000-03-16 | 2001-09-26 | Olympus Optical Co Ltd | Method for manufacturing multiaxial tactile sensor and tactile sensor |
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2002
- 2002-01-11 JP JP2002005334A patent/JP4011345B2/en not_active Expired - Fee Related