JP2003194608A5 - - Google Patents
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- Publication number
- JP2003194608A5 JP2003194608A5 JP2001395007A JP2001395007A JP2003194608A5 JP 2003194608 A5 JP2003194608 A5 JP 2003194608A5 JP 2001395007 A JP2001395007 A JP 2001395007A JP 2001395007 A JP2001395007 A JP 2001395007A JP 2003194608 A5 JP2003194608 A5 JP 2003194608A5
- Authority
- JP
- Japan
- Prior art keywords
- flow path
- sensor
- thermal
- bypass
- flow
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Claims (1)
- 流量を計測するための熱線が架設されたセンサ流路の他に、前記センサ流路に対するバイパス流路を備える熱式流量計において、
前記バイパス流路と前記センサ流路との間にフィルタを設けたことを特徴とする熱式流量計。
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2001395007A JP3715920B2 (ja) | 2001-12-26 | 2001-12-26 | 熱式流量計 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2001395007A JP3715920B2 (ja) | 2001-12-26 | 2001-12-26 | 熱式流量計 |
Related Child Applications (3)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2003139702A Division JP3637050B2 (ja) | 2003-05-19 | 2003-05-19 | 熱式流量計 |
| JP2004323486A Division JP3645899B2 (ja) | 2004-11-08 | 2004-11-08 | 熱式流量計 |
| JP2004323487A Division JP3645900B2 (ja) | 2004-11-08 | 2004-11-08 | 熱式流量計 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2003194608A JP2003194608A (ja) | 2003-07-09 |
| JP2003194608A5 true JP2003194608A5 (ja) | 2005-06-30 |
| JP3715920B2 JP3715920B2 (ja) | 2005-11-16 |
Family
ID=27601563
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2001395007A Expired - Fee Related JP3715920B2 (ja) | 2001-12-26 | 2001-12-26 | 熱式流量計 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP3715920B2 (ja) |
Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2003100358A1 (en) * | 2002-05-29 | 2003-12-04 | Ckd Corporation | Thermal flowmeter |
| US6928865B2 (en) | 2002-05-29 | 2005-08-16 | Ckd Corporation | Thermal flowmeter having a laminate structure |
| JP3905793B2 (ja) | 2002-06-04 | 2007-04-18 | 株式会社山武 | 吸着確認センサ |
| JP2005300365A (ja) * | 2004-04-13 | 2005-10-27 | Keyence Corp | 分流式流量センサ装置 |
| JP6819863B2 (ja) * | 2016-04-07 | 2021-01-27 | 日立金属株式会社 | バイパスユニット、流量計用ベース、流量制御装置用ベース、流量計、及び流量制御装置 |
-
2001
- 2001-12-26 JP JP2001395007A patent/JP3715920B2/ja not_active Expired - Fee Related
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