JP2003188077A5 - - Google Patents

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Publication number
JP2003188077A5
JP2003188077A5 JP2001386424A JP2001386424A JP2003188077A5 JP 2003188077 A5 JP2003188077 A5 JP 2003188077A5 JP 2001386424 A JP2001386424 A JP 2001386424A JP 2001386424 A JP2001386424 A JP 2001386424A JP 2003188077 A5 JP2003188077 A5 JP 2003188077A5
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JP
Japan
Prior art keywords
substrate
main body
hot air
apparatus main
drying
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2001386424A
Other languages
English (en)
Japanese (ja)
Other versions
JP2003188077A (ja
JP4224235B2 (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2001386424A priority Critical patent/JP4224235B2/ja
Priority claimed from JP2001386424A external-priority patent/JP4224235B2/ja
Publication of JP2003188077A publication Critical patent/JP2003188077A/ja
Publication of JP2003188077A5 publication Critical patent/JP2003188077A5/ja
Application granted granted Critical
Publication of JP4224235B2 publication Critical patent/JP4224235B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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JP2001386424A 2001-12-19 2001-12-19 基板乾燥装置 Expired - Fee Related JP4224235B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2001386424A JP4224235B2 (ja) 2001-12-19 2001-12-19 基板乾燥装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2001386424A JP4224235B2 (ja) 2001-12-19 2001-12-19 基板乾燥装置

Publications (3)

Publication Number Publication Date
JP2003188077A JP2003188077A (ja) 2003-07-04
JP2003188077A5 true JP2003188077A5 (enrdf_load_html_response) 2005-07-28
JP4224235B2 JP4224235B2 (ja) 2009-02-12

Family

ID=27595580

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2001386424A Expired - Fee Related JP4224235B2 (ja) 2001-12-19 2001-12-19 基板乾燥装置

Country Status (1)

Country Link
JP (1) JP4224235B2 (enrdf_load_html_response)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3718688B2 (ja) 2003-06-17 2005-11-24 東京エレクトロン株式会社 加熱装置
JP4662479B2 (ja) * 2006-05-30 2011-03-30 東京エレクトロン株式会社 熱処理装置
JP5144299B2 (ja) * 2008-02-12 2013-02-13 光洋サーモシステム株式会社 減圧乾燥装置
JP5786487B2 (ja) * 2011-06-22 2015-09-30 東京エレクトロン株式会社 熱処理装置及び熱処理方法
CN104681402B (zh) * 2015-03-16 2018-03-16 京东方科技集团股份有限公司 基板加热装置和基板加热方法
KR102426224B1 (ko) * 2017-11-15 2022-07-28 주식회사 케이씨텍 기판 가열 장치 및 이를 구비한 기판 처리 시스템
CN110207470A (zh) * 2019-05-27 2019-09-06 武汉华星光电半导体显示技术有限公司 干燥装置
JP7571684B2 (ja) 2021-07-30 2024-10-23 三浦工業株式会社 医療器具乾燥器

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