JP2003179002A - Dicing machine - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To obtain a dicing machine capable of greatly improving dicing efficiency by aligning a plurality of mounted workpieces for them to be processed in a single operation with the operation not made complicate or damage inflicted on the workpieces. <P>SOLUTION: In the processing unit, work tables 28, 28 for suctioning and retaining workpieces W are rotatably arranged on a θ-table 30. The tables 28, 28 are rotated for the X-direction streets 60 to be parallel to each other for workpieces W1, W2, and then the θ-table 30 is rotated for the X-direction streets 60 for the workpieces W1, W2 to be parallel to the cutter travelling direction (X-direction) of a rotary blade 50. The X-direction streets 60 for the workpieces W1, W2 are cut during the X-direction travelling of the X-table. Since the X-direction streets 60 for the workpieces W1, W2 are on the same straight line, the workpiece W2 may be cut upon completion of the cutting of the workpiece W1. <P>COPYRIGHT: (C)2003,JPO

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a dicing machine, and more particularly to a dicing machine for cutting a work such as a semiconductor wafer.

[0002]

2. Description of the Related Art A conventional dicing machine 10 is shown in FIG. The dicing machine 10 mainly includes a housing 12 and a processing unit 9.
0, a microscope 16, an operation unit 18, a monitor unit 20 and the like. The housing 12 is provided with a processing unit 90 and a microscope 16, and the microscope 16 captures an image of the work W in the processing unit 90. The microscope 16 is provided with an objective lens at the bottom, and a CCD that captures an image of the upper surface of the work W and converts it into an electric signal
It is composed of a camera and the like. On the monitor unit 20, the work W imaged by the microscope 16 is displayed. While confirming the state of the imaged work W on the monitor unit 20, the operation unit 18 is operated to perform alignment of the work W described later. Further, the processing quality of the processed work W can be confirmed on the monitor unit 20.

FIG. 4 shows a detailed view of a processing section 90 of a conventional dicing machine. The processing unit 90 is composed of a work table 80 on which a work W is placed, a rotary blade 82, a spindle 84 with a built-in high frequency motor, and the like.

A rotary blade 82 for cutting the work W placed on the work table 80 is attached to the tip of a spindle 84. A microscope (not shown) is provided in the vicinity of the spindle 84, and the work W can be imaged.

At the time of cutting, from the image taken with the microscope,
The worker has a specified cutting line (street) 86 for the work W.
The rotary blade 82 is accurately guided until the cutting process is started. All the X-direction streets 86 of the work W are cut (CH1 cutting) by the cutting (X direction) feed of the work table 80 by the rotary blade 82 rotating at high speed and the index (Y direction) feed of the rotary blade 82. Next, the work W is rotated by the work table 80 and similarly cut (X
(Direction) feed and index (Y direction) feed, all the Y direction streets 88 of the work W are cut (CH2 cutting).

In addition to the above-mentioned conventional technique, a dicing machine for placing a plurality of works W on a large work table 80 and cutting them is also known.

[0007]

In the dicing machine in which a plurality of works W are placed on the work table 80 as described above, a predetermined cutting line is imaged with a microscope for each work W and the rotary blade 82 is used. And cut. Therefore, since the position detection and the cutting process are repeated for each individual work W, the work efficiency is poor and the operation becomes complicated.
Further, since the individual works W are placed adjacent to each other and the rotary blade 82 approaches the adjacent another work W at the start or end of the cutting process, the rotary blade may be attached to another work W in some cases. There is a drawback that they interfere with each other and damage the work W.

The present invention has been made in view of the above circumstances, and the workability is greatly improved by aligning a plurality of workpieces that can be cut by a single operation.
The object is to obtain a dicing machine that does not require complicated operations and does not damage the work.

[0009]

The invention according to claim 1 is
In order to achieve the above object, in a dicing machine for cutting a work with a rotary blade, the work is placed so that it can be cut, and a work table rotatably provided and at least two work tables are placed. And a θ table rotatably provided.

According to a second aspect of the present invention, in the dicing machine according to the first aspect, storage means for storing the rotational position of each of the work table and the θ table is provided. .

Further, in the invention according to claim 3, in the dicing machine according to claim 1 or 2, the predetermined cutting line of each of the works is aligned by the work table, and each of the works is prepared by the θ table. The predetermined cutting line of, the control means for aligning on the same straight line in the cutting direction of the rotary blade, and the predetermined cutting line of the plurality of workpieces aligned by the control means, once by the rotary blade It is characterized by cutting by motion.

According to a fourth aspect of the present invention, in the dicing machine according to any one of the first to third aspects, four work tables are placed on the θ table, and among the four work tables. By the rotation of the two work tables and the rotation of the θ table, the predetermined cutting lines of the respective works placed on the two work tables are aligned on the same straight line in the cutting direction of the rotary blade. At the same time, the rotational direction position of each rotary table at that time is stored in the storage means, then the combination of the two work tables is sequentially changed to perform similar alignment, and the rotation of each rotary table at that time is performed. The direction position is stored in the storage unit, and the workpiece is loaded using the rotation direction position of each rotary table in each combination stored in the storage unit. It is characterized in that it has control means for sequentially aligning two pieces at a time, and simultaneously cuts a plurality of works aligned by the control means.

According to the present invention, four work tables on which the work is placed are provided on the θ table, and the predetermined cutting lines of each work are aligned by the work table and the θ table, so that each operation can be performed by one operation by the rotary blade. The work can be cut, and damage to the work can be prevented.

[0014]

BEST MODE FOR CARRYING OUT THE INVENTION Preferred embodiments of a dicing machine according to the present invention will be described below with reference to the accompanying drawings. The appearance of the dicing machine according to the present invention is the same as that shown in FIG. 3 except for the processing section 90, and therefore its description is omitted.

FIG. 1 shows a dicing machine 1 according to the present invention.
The internal structure of the processing unit 14 of 0 is shown.

Inside the processing section 14, the Y guide base 22, Y
Table 24, Z table 25, spindle 26, rotary blade 50, work tables 28, 28 ..., Theta table 3
0, and an X table 32 and the like on which the θ table 30 is mounted are provided.

A Y guide base 22 is provided on the body side of the dicing machine 10. A Y table 24, which is guided by the guides 40 and 40 and is driven in the Y direction of FIG. 1, is provided on the side surface of the Y guide base 22. Also,
The Y table 24 is provided with a Z table 25 which is guided by guides 42 and 42 and is moved up and down in the Z direction of FIG. Both the Y table 24 and the Z table 25 are driven by a stepping motor and a ball screw (not shown) housed in the Y guide base 22 and the Y table 24.

A spindle 26 with a built-in high frequency motor is fixed to the Z table 25. Also, spindle 2
A rotary blade 50 is attached to 6 so that it can be rotated at high speed. Note that FIG. 1 shows a state in which the rotary blade 50 is removed.

Workpiece tables 28, 28, ... Which adsorb and hold the work W are provided below the spindle 26, and are rotatably arranged on a θ table 30. In this embodiment, the four work tables 28, 28 ...
They are arranged at equal intervals around the 0 rotation center. The θ table 30 is mounted on the X table 32 and is rotatably arranged in the θ direction. Further, the X table 32 is guided by a guide 44 provided on the body side of the dicing machine 10 and is driven by a linear motor (not shown) so as to be able to move back and forth in the X direction of FIG.

Since the structure of the processing section 14 is as described above, the rotary blade 50 is index-fed in the Y direction by the Y table 24, and the X table 32 moves the X axis.
It is cut and fed in the direction.

A cleaning unit for spin-cleaning the processed work W, a load port for mounting a cassette containing a large number of works W, and the like are provided near the processing unit 14 as necessary. . These figures are omitted.

Next, the structure around the rotary blade 50 will be described with reference to FIG. As shown in FIG.
The rotary blade 50 attached to the tip of is covered with a flange cover 58 having openings on the front surface and the lower portion. The flange cover 58 includes a cutting water nozzle 48 and a cooling water nozzle 5.
2, 52 are provided. The cutting water nozzle 48 communicates with the cutting water supply pipe 54 in the flange cover 58, and the cutting water is ejected from the cutting water nozzle 48 to the tip of the rotary blade 50. Further, the cooling water nozzles 52, 52 are arranged so as to sandwich the rotary blade 50 between the front side and the rear side (spindle 26 side) of the rotary blade 50, and communicate with the cooling water supply pipe 56 and the flange cover 58 for cooling. Cooling water is ejected from the water nozzles 52, 52 to both side surfaces of the rotary blade 50.

Work table 28, 28 ... A suction device (not shown) is provided on the upper surface of the work table 28.
The workpieces W1, W2, W3, W4 placed on (below:
By sucking W1 to W4), the works W1 to W4 are suction-held on the work tables 28, 28 ...

Further, the work tables 28, 28 ... And θ.
A rotary encoder (not shown) for detecting the rotational direction position is provided inside the table 30, and a storage means (not shown) for storing the detection result is provided. A semiconductor memory such as a RAM is used as this storage means.

The cutting process of the processing portion 14 constructed as described above will be described with reference to FIGS. 1 and 2.

From the load port (not shown) accommodating the work W, the works W1 to W4 are transferred to the work table 2
After being placed on 8, 28, ..., It is guided by the guide 44 and conveyed to the processing section 14 by the X table 32. Work table 28, 28 ... Work W by a suction device on the upper surface
1 to W4 are adsorbed and held.

First, the work table 2 is prepared prior to cutting.
Work pieces W1 to W depending on 8, 28 ...
Alignment 4 is performed. Workpiece W by microscope 16
The X-direction street 60 and the Y-direction street 62 on 1 to W4 are imaged, and the operator operates the operation unit 18 while checking the monitor unit 20 (see FIG. 3) to perform the alignment as described below.

That is, the work tables 28, 28 ... Are rotated to align the predetermined cutting lines of the works W1, W2 so that the X-direction streets 60 of the works W1, W2 are aligned, and then the θ table 30 is rotated. The predetermined cutting line of the works W1 and W2 is rotated so that the X-direction streets 60 of the works W1 and W2 are on the same straight line in the cutting feed direction (X direction) of the rotary blade 50. At this time, the cutting lines of the works W1 and W2 deviate from the X direction,
The work tables 28, 28 ... Are rotated again to make corrections.
As a result, all the X-direction streets 60 on the works W1 and W2 are aligned parallel to the cutting feed direction (X direction) of the rotary blade 50. The rotational direction position of each table is detected by a rotary encoder (not shown), and the rotational direction position of each table is stored by a storage unit (not shown) (memory 1).

Next, the work tables 28, 28 ... Are rotated to align the predetermined cutting lines of the works W3 and W4 so that the X-direction streets 60 of the works W3 and W4 are parallel, and then the θ table 30 is rotated. Work W
Workpiece W such that X direction streets 60 of 3 and W4 are on the same straight line in the cutting feed direction (X direction) of rotary blade 50
Rotate the predetermined cutting line of 3, W4. At this time as well, the cutting lines of the works W3 and W4 deviate from the X direction, so the work tables 28, 28 ... As a result, all the X-direction streets 60 on the works W3 and W4 are aligned parallel to the cutting feed direction (X direction) of the rotary blade 50. The rotation direction position of each table due to these alignments is also stored by the storage means (storage 2).

Further, the θ table 30 is rotated counterclockwise in FIG. 2 so that the Y-direction streets 62 of the works W1 to W4 are oriented substantially in the cutting feed direction (X direction). Rotate 28 ... and work W2
The predetermined cutting lines of the works W2 and W3 are aligned so that the Y-direction streets 62 of W3 are parallel, and the θ table 30 is rotated so that the Y-direction streets 62 of the works W2 and W3 are in the cutting feed direction (X The predetermined cutting line of the works W2 and W3 is rotated so as to be on the same straight line (direction). Also at this time, the work tables 28, 28 ...
Is rotated again to correct the deviation in the X direction from the cutting lines of the works W2 and W3. As a result, all the Y-direction streets 62 on the works W2 and W3 are aligned parallel to the cutting feed direction (X direction) of the rotary blade 50. The rotation direction position of each table due to these alignments is also stored by the storage means (storage 3).

Further, similarly, the workpieces W1 and W4 are also aligned, and all the Y-direction streets 62 on the workpieces W1 and W4 are fed in the cutting feed direction (X direction) of the rotary blade 50.
Align by rotating so that they are on the same straight line. The rotation direction position of each table due to the alignment at this time is also stored in the storage means (storage 4).

After aligning all the works W1 to W4 as described above and storing the rotational direction position in the storage means, the operator guides the rotary blade 50 to a predetermined cutting line to start CH1 cutting.

CH1 cutting is a cutting process performed on the X-direction streets 60 of the works W1 to W4.

The work tables 28, 28 ... And the θ table 30 are aligned to the rotational direction positions stored in the memory 1. Next, the X-direction street 60 of the works W1 and W2 is cut by cutting (X-direction) feed of the X-table 32 shown by arrow A. At this time, X on the works W1 and W2
Since the direction streets 60 are aligned on the same straight line, the work W1 can be cut after the work W1 is cut, and the work W2 can be cut continuously in a single cutting feed operation. Street 60
Can be cut (Fig. 2, thick dotted line).

After the first cutting work is performed on the street 60 in the X direction of both the works W1 and W2, the Z table 25 is moved in the Y direction by one pitch of the street (see FIG. 1).
The next X-direction street 60 is cut. The Z table 25 can be moved up and down in the Z direction, and the Y table 24
This prevents interference between the rotary blade 50 and the work W during movement in the Y direction.

By repeating the above-described work, the cutting work is performed on all the X-direction streets 60 of both the works W1 and W2 (CH1-1 cutting).

Next, the X-direction streets 60 of the works W3 and W4 are cut. After CH1-1 cutting, the work tables 28, 28 ... And the θ table 30 are aligned up to the rotational direction position stored in the memory 2. Then CH1-
As in the case of one cutting, the X direction street 60 of the works W3 and W4 is cut by the cutting (X direction) feed of the X table 32 shown by the arrow A. Also at this time, the works W3, W
Since the X-direction street 60 on 4 is aligned on the same straight line, the work W3 can be cut after the work W3 is cut, and both works W3 and W4 can be cut by one cutting feed operation. The X-direction street 60 can be cut. Work W3, W
After performing the first cutting on both X-direction streets 60, move the Z table 25 in the Y direction by one pitch of the street in the same manner as when cutting CH1-1, and perform the next X-direction streets 60 cutting. To do. By repeating these operations, the cutting work is performed on all the X-direction streets 60 of both the works W3 and W4 (CH1-2 cutting).

The CH2 cutting is performed after the CH1 cutting and is performed on the Y-direction streets 62 of the works W1 to W4.

After the work tables 28, 28 ... And the θ table 30 are aligned to the rotational direction positions stored in the memory 3, the X table 32 shown by arrow A is cut (X
(Direction) The Y-direction street 62 of the works W3 and W4 is cut by the feed. Also in this case, since the Y-direction streets 62 on the works W2 and W3 are aligned on the same straight line, after the work W2 is cut, the work W3 can be continuously cut, and the cutting feed is performed once. By motion, both streets W2 and W3 in Y direction 6
2 can be cut. After performing the first cutting work on the Y-direction streets 62 of both the works W2 and W3,
Similar to the case of CH1-2 cutting, the Z table 25 is moved in the Y direction by one street pitch, and the next Y direction street 62 is cut. By repeating these operations, both the works W2 and W3 are cut (CH2-1 cutting).

Further, the work tables 28, 28 ... And θ.
After the table 30 is aligned to the rotational direction position stored in the memory 4, the Y-direction street 62 of the works W3 and W4 is cut. Also in this case, the works W1 and W4
Since the upper Y-direction streets 62 are aligned on the same straight line, after the work W4 is cut, the work W1 can be continuously cut. After this, the Y-direction streets 62 on the other works W1 and W4 are also cut in the same manner as the CH2-1 cutting (CH2-2 cutting).

As a result, the works W1 to W4 are finally cut into chips and divided.

The divided works W1 to W4 are conveyed from the processing section 14 to the cleaning section by the X table 32, cleaned with cleaning water, and then dried by air blow.

According to the cutting process as described above, the predetermined cutting line of each work W is set to the work table 28, 2.
By performing alignment with 8 ... And by aligning the predetermined cutting line of each work W with the θ table 30 in the cutting direction of the rotary blade, it is possible to cut a plurality of works with one operation by the rotary blade 50. Therefore, it is possible to prevent the adjacent work W from being damaged.

The present invention is not limited to the above-mentioned embodiment, and in the above-mentioned embodiment, the alignment of the work tables 28, 28 ... Was carried out immediately before the cutting work on the work W, but it is not limited to this. Instead, it may be performed in parallel with the cutting process by the rotary blade 50. Further, the work tables 28, 28 ... May be separately provided with alignment detection means and alignment control means for the work tables 28, 28 ... And .theta.

Further, the alignment of the memory 1 was performed when the CH1 cutting was performed after the rotation direction position was stored by the memory 4, but the present invention is not limited to this, and the CH2 cutting is started while the rotational direction position of the memory 4 is maintained. You may. In this case, the working time can be shortened.

Further, in the present embodiment, the work table 2
An example in which four works W are placed using 8, 28, ... And two works W are cut in one operation has been shown, but the present invention is not limited to this, and the work table 2 is placed on the θ table 30.
8 and 28 may be provided more.

Further, θ during CH1 cutting and CH2 cutting
By separately setting the rotation angle of the table 30, it is possible to increase the degree of freedom in the shape of the chip. Specifically, it becomes possible to form a diamond-shaped chip, or a chip having a hexagonal shape, an octagonal shape, or another polygonal shape.

[0048]

As described above, according to the dicing machine of the present invention, four work tables for mounting the work are provided on the θ table, and the predetermined cutting line of each work is aligned by the work table and the θ table. By doing so, it is possible to cut two workpieces with one operation by the rotary blade, workability can be greatly improved, operation is not complicated, and a dicing machine that does not damage the workpiece W is obtained. It becomes possible.

[Brief description of drawings]

FIG. 1 is a perspective view showing an internal configuration of a processing unit of a dicing machine according to an embodiment of the present invention.

FIG. 2 is a perspective view showing a configuration around a rotary blade of a dicing machine according to an embodiment of the present invention.

FIG. 3 is a perspective view showing an appearance of a dicing machine according to an embodiment of the present invention (the same as a conventional dicing machine).

FIG. 4 is a perspective view showing a processed portion of a conventional dicing machine.

[Description of Reference Signs] 10 ... Dicing machine, 14 ... Machining section, 28 ... Work table, 30 ... θ table, 50 ... Rotating blade, W (W1
~ W4) ... work

   ─────────────────────────────────────────────────── ─── Continued front page    (72) Inventor Noriaki Ebisu             9-7 Shimorenjaku, Mitaka City, Tokyo Stocks             Company Tokyo Seimitsu (72) Inventor Takayuki Asano             9-7 Shimorenjaku, Mitaka City, Tokyo Stocks             Company Tokyo Seimitsu

Claims (4)

[Claims] 1. A dicing machine for cutting a work with a rotary blade, wherein the work is rotatably placed on the work table, and at least two work tables are placed on the work table. A dicing machine having a θ table freely provided. 2. The dicing machine according to claim 1, further comprising storage means for storing the rotational position of each of the work table and the θ table. 3. The predetermined cutting line of each of the works is aligned by the work table, and the predetermined cutting line of each of the works is set by the θ table.
And a control means for aligning on the same straight line in the cutting direction of the rotary blade, wherein a predetermined cutting line of the plurality of workpieces aligned by the control means is cut by a single operation by the rotary blade. The dicing machine according to claim 1, wherein the dicing machine is a dicing machine. 4. The θ table has four of the work tables mounted thereon, and two of the four work tables are rotated and the θ table is rotated.
By rotating the table, the predetermined cutting lines of the respective works placed on the two work tables are aligned on the same straight line in the cutting direction of the rotary blade,
The rotation direction position of each rotary table at that time is stored in the storage means, then the combination of the two work tables is sequentially changed to perform the same alignment, and the rotation direction position of each rotary table at that time. Is stored in the storage unit, and the control unit has a control unit that sequentially aligns two workpieces by using the rotational direction position of each rotary table in each combination stored in the storage unit. The dicing machine according to any one of claims 1 to 3, wherein a plurality of aligned works are simultaneously cut and processed.