JP2003178426A - Method for manufacturing magnetic recording medium - Google Patents
Method for manufacturing magnetic recording mediumInfo
- Publication number
- JP2003178426A JP2003178426A JP2001376273A JP2001376273A JP2003178426A JP 2003178426 A JP2003178426 A JP 2003178426A JP 2001376273 A JP2001376273 A JP 2001376273A JP 2001376273 A JP2001376273 A JP 2001376273A JP 2003178426 A JP2003178426 A JP 2003178426A
- Authority
- JP
- Japan
- Prior art keywords
- lubricating layer
- substrate
- protective film
- magnetic
- layer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Manufacturing Of Magnetic Record Carriers (AREA)
Abstract
Description
【０００１】[0001]
【発明の属する技術分野】本発明は、ハードディスク装
置を構成するハードディスク磁気記録媒体の製造方法に
関し、より詳細には、真空蒸着法により潤滑層を形成す
る磁気記録媒体の製造方法に関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method for manufacturing a hard disk magnetic recording medium constituting a hard disk device, and more particularly to a method for manufacturing a magnetic recording medium having a lubricating layer formed by a vacuum evaporation method.
【０００２】[0002]
【従来の技術】ハードディスク装置は、コンピューター
の主要な外部記録装置であり、マルチメディアの進行と
ともに急速に高記録密度化・高転送速度化・小型化が進
んでいる。これにともなって、ハードディスク装置主要
部品である磁気記録媒体に対しても、記録密度の向上と
ともにトライポロジー的な機械強度の維持が要求されて
いる。2. Description of the Related Art A hard disk device is a main external recording device of a computer, and its recording density, transfer rate and size are rapidly increasing with the progress of multimedia. Along with this, it is required for the magnetic recording medium, which is a main component of the hard disk drive, to improve the recording density and maintain the mechanical strength in a tribological manner.
【０００３】磁気記録媒体は、情報を磁気的に記録する
部品であり、基板上に下地膜と磁性膜と保護膜とが積層
され、さらに潤滑剤が塗布されている。通常、基板はＡ
ｌ合金よりなり、ＮｉＰメッキ層を施すことにより基板
表面は保護されている。対衝撃性を向上させるために、
ガラス基板が用いられている。A magnetic recording medium is a component for magnetically recording information, in which a base film, a magnetic film and a protective film are laminated on a substrate, and a lubricant is further applied. Usually the substrate is A
The substrate surface is protected by applying a NiP plating layer. In order to improve impact resistance,
A glass substrate is used.
【０００４】情報を記録する磁性膜は、Ｃｏ系の強磁性
体からなり、その磁気的な特性を向上させるためにＣｒ
下地膜が挿入される。また、磁性膜を保護するために、
潤滑性に優れ、摩耗し難いダイヤモンドライクカーボン
（ＤＬＣ）といわれる硬いカーボン系保護膜がコートさ
れる。通常、カーボン保護膜はＣｒ下地膜や磁性膜と同
様にスパッタ法で蒸着される。The magnetic film for recording information is made of a Co type ferromagnetic material, and Cr is used to improve its magnetic characteristics.
The base film is inserted. Also, to protect the magnetic film,
A hard carbon-based protective film called diamond-like carbon (DLC), which has excellent lubricity and is hard to wear, is coated. Usually, the carbon protective film is vapor-deposited by the sputtering method like the Cr base film and the magnetic film.
【０００５】保護膜の上に塗布される潤滑層は、パーフ
ルオロポリエーテル（ＰＦＰＥ）が主に用いられる。こ
れを溶媒で希釈し、ディッピングやスピンコートにより
形成される。その潤滑層の厚さは１ｎｍから数ｎｍ程度
となっている。Perfluoropolyether (PFPE) is mainly used for the lubricating layer applied on the protective film. This is diluted with a solvent and formed by dipping or spin coating. The thickness of the lubricating layer is about 1 nm to several nm.
【０００６】保護膜上の潤滑層は、２種の層に分けられ
る。一方は保護膜と結合した層（結合潤滑層）であり、
他方は結合していない層（自由潤滑層）である。自由潤
滑層が厚いとヘッドへ付着してヘッド浮上量に影響を与
えたり、ディスク媒体とヘッドが吸着してディスクが回
転しなくなったりする。また、ディスク媒体は高速で回
転するため、自由潤滑層が遠心力で外周側へ移動し、磨
耗し易くなる。このため、自由潤滑層を薄く、従って、
結合潤滑層を厚くすることが望まれている。The lubricating layer on the protective film is divided into two types. One is a layer combined with the protective film (combined lubrication layer),
The other is an unbonded layer (free lubricating layer). If the free lubrication layer is thick, it adheres to the head and affects the flying height of the head, or the disk medium and the head are attracted to each other to prevent the disk from rotating. Further, since the disk medium rotates at a high speed, the free lubricating layer is moved toward the outer peripheral side by centrifugal force and is easily worn. For this reason, the free lubricating layer is thin, and therefore
It is desired to thicken the bonded lubricating layer.
【０００７】カーボン保護膜の表面を大気に晒すことな
く、潤滑層を形成することによって、保護膜と結合する
潤滑剤の成分を増やすことができる。その手法として、
保護膜と潤滑層を真空一貫プロセスで形成する方法が報
告されている。カーボン系の保護膜を作製するにはスパ
ッタ法やプラズマＣＶＤ法が用いられ、液体である潤滑
剤については真空蒸着法が用いられる。By forming the lubricating layer without exposing the surface of the carbon protective film to the atmosphere, it is possible to increase the component of the lubricant that binds to the protective film. As a method,
A method of forming a protective film and a lubricating layer by a vacuum integrated process has been reported. A sputtering method or a plasma CVD method is used to form a carbon-based protective film, and a vacuum vapor deposition method is used for a liquid lubricant.
【０００８】[0008]
【発明が解決しようとする課題】真空中で保護膜と潤滑
層を連続して形成するプロセスにおいて、潤滑剤を真空
蒸着する際、図５に示すように、蒸着された潤滑層の総
膜厚により結合潤滑層の膜厚は決まり、潤滑層の総膜厚
に対する結合潤滑層の割合を制御することができないと
いう問題がある。In the process of continuously forming a protective film and a lubricating layer in a vacuum, when the lubricant is vacuum-deposited, as shown in FIG. 5, the total thickness of the deposited lubricating layer is reduced. Therefore, the film thickness of the combined lubricating layer is determined, and there is a problem that the ratio of the combined lubricating layer to the total film thickness of the lubricating layer cannot be controlled.
【０００９】本発明は、このような問題に鑑みてなされ
たもので、その目的とするところは、一定温度に加熱し
た基板に潤滑剤を蒸着する、もしくは蒸着させる基板を
蒸着前に酸素雰囲気に暴露した状態で潤滑剤を蒸着する
ことにより、カーボン保護膜と液体潤滑剤分子の結合率
を制御するようにした磁気記録媒体の製造方法を提供す
ることにある。The present invention has been made in view of the above problems. An object of the present invention is to vapor-deposit a lubricant on a substrate heated to a constant temperature, or to place the vapor-deposited substrate in an oxygen atmosphere before vapor deposition. It is another object of the present invention to provide a method of manufacturing a magnetic recording medium in which a bonding rate between a carbon protective film and a liquid lubricant molecule is controlled by depositing a lubricant in an exposed state.
【００１０】[0010]
【課題を解決するための手段】本発明は、このような目
的を達成するために、請求項１に記載の発明は、非磁性
基板上に、それぞれ少なくとも１層の順次積層された磁
性膜とカーボン保護膜と液体潤滑層とから構成され、前
記カーボン保護膜を形成した後に、前記液体潤滑層を真
空中で連続形成する磁気記録媒体の製造方法において、
前記カーボン保護膜と前記液体潤滑層の液体潤滑剤分子
の結合割合を制御することを特徴とする。In order to achieve such an object, the present invention according to claim 1 provides a non-magnetic substrate, and at least one magnetic film which is sequentially laminated. A method for manufacturing a magnetic recording medium, comprising a carbon protective film and a liquid lubricating layer, wherein after forming the carbon protective film, the liquid lubricating layer is continuously formed in vacuum,
The bonding ratio of the liquid lubricant molecules in the carbon protective film and the liquid lubricant layer is controlled.
【００１１】また、請求項２に記載の発明は、請求項１
に記載の発明において、前記液体潤滑層を真空蒸着法に
より形成する際、前記非磁性基板を加熱することによ
り、前記カーボン保護膜と前記液体潤滑剤分子の結合割
合を、加熱なしと比べて高くしたことを特徴とする。The invention described in claim 2 is the same as claim 1.
In the invention described in, in forming the liquid lubricating layer by a vacuum deposition method, by heating the non-magnetic substrate, the bonding ratio of the carbon protective film and the liquid lubricant molecule is higher than that without heating. It is characterized by having done.
【００１２】また、請求項３に記載の発明は、請求項２
に記載の発明において、前記非磁性基板の温度を８０℃
以上とすることを特徴とする。The invention described in claim 3 is the same as that of claim 2
In the invention described in [1], the temperature of the non-magnetic substrate is 80 ° C.
The above is characterized.
【００１３】また、請求項４に記載の発明は、請求項１
に記載の発明において、前記液体潤滑層の蒸着前に、前
記カーボン保護膜の表面を酸素雰囲気中に一定圧力で一
定時間暴露することにより、前記カーボン保護膜と前記
液体潤滑剤分子の結合割合を、暴露なしと比べて低くで
きることを特徴とする。The invention according to claim 4 is the same as claim 1.
In the invention according to, the vapor deposition of the liquid lubricating layer, by exposing the surface of the carbon protective film in an oxygen atmosphere for a certain period of time at a constant pressure, the bonding ratio of the carbon protective film and the liquid lubricant molecules. The feature is that it can be lower than that without exposure.
【００１４】つまり、本発明は、一定温度に加熱した基
板上に潤滑剤を蒸着させる、もしくは蒸着される基板を
蒸着前に酸素雰囲気に暴露した状態で潤滑剤を蒸着させ
て、カーボン保護膜と液体潤滑剤分子の結合率を制御す
るようにしたものである。That is, according to the present invention, a lubricant is vapor-deposited on a substrate heated to a constant temperature, or a lubricant is vapor-deposited in a state where the vapor-deposited substrate is exposed to an oxygen atmosphere before vapor deposition to form a carbon protective film. It is designed to control the binding rate of liquid lubricant molecules.
【００１５】このような構成により、加熱した基板に蒸
着された潤滑層は、加熱なしと比べて潤滑層の総膜厚に
対する結合潤滑層の割合が高く、その割合は加熱温度に
よって制御できる。蒸着前に酸素雰囲気に暴露した基板
に蒸着された潤滑層は、暴露なしと比べて潤滑層の総膜
厚に対する結合潤滑層の割合が低く、その割合は暴露圧
力・暴露時間によって制御できる。With such a structure, the lubricating layer deposited on the heated substrate has a higher ratio of the combined lubricating layer to the total thickness of the lubricating layer than that without heating, and the ratio can be controlled by the heating temperature. The lubricating layer deposited on the substrate exposed to the oxygen atmosphere before the deposition has a lower ratio of the combined lubricating layer to the total thickness of the lubricating layer than that without the exposure, and the ratio can be controlled by the exposure pressure and the exposure time.
【００１６】[0016]
【発明の実施の形態】以下、図面を参照して本発明の実
施の形態について説明する。図１は、本発明の磁気記録
媒体の製造方法によって作成された磁気記録媒体の断面
図で、図中符号１は、磁気記録媒体で、この磁気記録媒
体１は、非磁性基板２上に順次積層された磁性膜５とカ
ーボン保護膜６と液体潤滑層７とを有している。非磁性
基板２は、アルミ合金、ガラス、プラスチック基板な
ど、慣用のいかなる非磁性基板でもよい。具体的なプラ
スチック基板としては、ポリカーボネート、ポリオレフ
ィン、ポリエチレンテレフタレート、ポリエチレンナフ
タレート、ポリイミドなどから成る基板を挙げることが
できる。BEST MODE FOR CARRYING OUT THE INVENTION Embodiments of the present invention will be described below with reference to the drawings. FIG. 1 is a cross-sectional view of a magnetic recording medium manufactured by the method for manufacturing a magnetic recording medium of the present invention. In the figure, reference numeral 1 is a magnetic recording medium, and the magnetic recording medium 1 is sequentially arranged on a non-magnetic substrate 2. It has a laminated magnetic film 5, a carbon protective film 6, and a liquid lubricating layer 7. The non-magnetic substrate 2 may be any conventional non-magnetic substrate such as an aluminum alloy, glass or plastic substrate. Specific examples of plastic substrates include substrates made of polycarbonate, polyolefin, polyethylene terephthalate, polyethylene naphthalate, polyimide and the like.
【００１７】また、非磁性基板２は、２．５インチ、３
インチ、３．３インチ、３．５インチ、５インチ、のい
ずれかの大きさのディスク基板であってもよく、またそ
の形態も、ディスク状に限らず、カード状、帯状などい
かなる形態でもよい。なお、ここで示した大きさは公称
値であり、当該技術において汎用されているものである
と理解されるべきである。The non-magnetic substrate 2 is 2.5 inches, 3
The disk substrate may have any size of inch, 3.3 inch, 3.5 inch, 5 inch, and the shape thereof is not limited to the disk shape, and may be any shape such as a card shape or a band shape. . It should be understood that the sizes shown here are nominal values and are generally used in the art.
【００１８】磁性膜５は、記録層として使用できる強磁
性金属を含み、具体的には、ＣｏＣｒＴａＰｔ、ＣｏＣ
ｒＴａＰｔ−Ｃｒ２Ｏ３、ＣｏＣｒＴａＰｔ−Ｓｉ
Ｏ２、ＣｏＣｒＴａＰｔ−ＺｒＯ２、ＣｏＣｒＴａＰｔ
−ＴｉＯ２、ＣｏＣｒＴａＰｔ−Ａｌ２Ｏ３などを成分
とする磁性膜である。The magnetic film 5 contains a ferromagnetic metal that can be used as a recording layer, and specifically, CoCrTaPt, CoC.
rTaPt-Cr 2 O 3, CoCrTaPt -Si
O 2 , CoCrTaPt-ZrO 2 , CoCrTaPt
It is a magnetic film containing —TiO 2 , CoCrTaPt—Al 2 O 3, etc. as its components.
【００１９】磁性膜５の厚さは、２０ｎｍ以下であり、
好ましくは１０〜２０ｎｍである。磁性膜を複数用いて
多層構造の記録層としてもよい。The thickness of the magnetic film 5 is 20 nm or less,
It is preferably 10 to 20 nm. A plurality of magnetic films may be used to form a multi-layered recording layer.
【００２０】また、磁性膜５と基板２の間に下地膜４を
形成してもよい。下地膜４は、下地膜を形成する慣用の
いかなる成分から形成されてもよく、特に限定されな
い。具体的には、Ｃｒ、Ｃｒ−Ｗ、Ｃｒ−Ｖ、Ｃｒ−Ｍ
ｏ、Ｃｒ−Ｓｉ、Ｎｉ−Ａｌ、Ｃｏ−Ｃｒ、Ｍｏ、Ｗ、
Ｐｔなどから成る。下地膜の厚さは、２０ｎｍ以下であ
り、好ましくは１０〜２０ｎｍである。Further, the base film 4 may be formed between the magnetic film 5 and the substrate 2. The base film 4 may be formed from any of the components commonly used for forming a base film, and is not particularly limited. Specifically, Cr, Cr-W, Cr-V, Cr-M
o, Cr-Si, Ni-Al, Co-Cr, Mo, W,
It consists of Pt and the like. The thickness of the base film is 20 nm or less, preferably 10 to 20 nm.
【００２１】カーボン保護膜６は、記録層を形成する磁
性膜をヘッドの衝撃、外界の腐食性物質などの腐食から
保護する機能を有する。保護膜の厚さは８ｎｍ以下であ
り、好ましくは２〜８ｎｍである。成膜方法はスパッタ
法やプラズマＣＶＤ法などいかなる方法でもよい。カー
ボン膜質は水素添加アモルファスカーボンや窒素添加ア
モルファスカーボンなど慣用のいかなる成分から形成さ
れてもよい。The carbon protective film 6 has a function of protecting the magnetic film forming the recording layer from the impact of the head and the corrosion of corrosive substances in the outside. The thickness of the protective film is 8 nm or less, preferably 2 to 8 nm. The film forming method may be any method such as a sputtering method or a plasma CVD method. The carbon film quality may be formed from any conventional component such as hydrogenated amorphous carbon or nitrogen added amorphous carbon.
【００２２】潤滑剤は、パーフルオロ・ポリエーテルで
あり、Ｚ−ｄｏｌ，Ｚ−ｔｅｔｒａｏｌ，Ｚ−ｄｏｌＴ
Ｘ，ＡＭなど、いずれの液体潤滑剤でもよい。潤滑層の
膜厚は赤外線分光法により測定し、−ＣＦ振動に伴う１
２７０ｃｍ−１付近の吸収から求めた。結合潤滑層の膜
厚は、フルオロカーボン溶剤中で超音波洗浄し自由潤滑
層を除去して、赤外線分光法による同様な測定により求
めた。The lubricant is perfluoropolyether, Z-dol, Z-tetraol, Z-dolT.
Any liquid lubricant such as X and AM may be used. The thickness of the lubricating layer was measured by infrared spectroscopy, and it was 1
It was determined from the absorption around 270 cm -1 . The film thickness of the bonded lubricating layer was determined by the same measurement by infrared spectroscopy after removing the free lubricating layer by ultrasonic cleaning in a fluorocarbon solvent.
【００２３】潤滑剤の蒸着時に、基板を８０〜１４０℃
に加熱保持することによって、加熱なしと比べて結合潤
滑層を厚く、すなわち潤滑層の総膜厚に対する結合潤滑
層の割合を高くすることができた。図２は、本発明にお
ける基板温度と結合潤滑層の膜厚の関係を示す図であ
る。During vapor deposition of the lubricant, the substrate is kept at 80 to 140 ° C.
By heating and holding at 0 ° C., it was possible to increase the thickness of the combined lubricating layer, that is, to increase the ratio of the combined lubricating layer to the total film thickness of the lubricating layer, as compared with the case without heating. FIG. 2 is a diagram showing the relationship between the substrate temperature and the film thickness of the coupling lubricating layer in the present invention.
【００２４】基板温度が８０℃以下であると、加熱なし
と比べて結合潤滑層の膜厚はほとんど変わらず、基板温
度が１４０℃以上であると、蒸着された潤滑剤が再蒸着
させてしまう。When the substrate temperature is 80 ° C. or lower, the film thickness of the combined lubricating layer is almost the same as that without heating, and when the substrate temperature is 140 ° C. or higher, the vaporized lubricant is redeposited. .
【００２５】また、潤滑剤の蒸着前に、基板を酸素雰囲
気に暴露することによって、暴露なしと比べて結合潤滑
層を薄く、すなわち潤滑層の総膜厚に対する結合潤滑層
の割合を低くすることができた。図３は、本発明におけ
る酸素暴露時の圧力と結合潤滑層の膜厚の関係を示す図
である。Further, by exposing the substrate to an oxygen atmosphere before the vapor deposition of the lubricant, the combined lubricating layer is made thinner, that is, the ratio of the combined lubricating layer to the total film thickness of the lubricating layer is lower than that in the case without exposure. I was able to. FIG. 3 is a diagram showing the relationship between the pressure at the time of oxygen exposure and the film thickness of the combined lubricating layer in the present invention.
【００２６】以下に実施例を挙げて本発明を説明する
が、本発明は本実施例にのみ限定されるものではない。The present invention is described below with reference to examples, but the present invention is not limited to these examples.
【００２７】[実施例１]図１に示すように、アルミ合金
基板上２に、Ｎｉ−Ｐメッキ３を施し、その上にスパッ
タ法で２０ｎｍのＣｒ下地層４、２０ｎｍのＣｏ磁性層
５および８ｎｍの窒素添加アモルファスカーボン保護膜
６を成膜した。さらに、以下に詳細に説明する蒸着法に
より液体潤滑剤（Ｚ−ｄｏｌ：商品名Ａｕｓｉｍｏｎｔ
社）をカーボン膜上に成膜した。Example 1 As shown in FIG. 1, Ni—P plating 3 was applied on an aluminum alloy substrate 2, and a Cr underlayer 4 of 20 nm, a Co magnetic layer 5 of 20 nm, and a Co magnetic layer 5 of 20 nm were formed thereon by sputtering. An 8 nm nitrogen-doped amorphous carbon protective film 6 was formed. Furthermore, a liquid lubricant (Z-dol: trade name Ausimont) is formed by a vapor deposition method described in detail below.
Co., Ltd.) was formed on the carbon film.
【００２８】図４は、本実験に用いた成膜装置の模式図
である。潤滑剤の原液を加熱するルツボ１５、シャッタ
ー１７と基板１１から構成され、ルツボと基板の間の距
離は２００ｍｍである。一定量の潤滑剤をルツボに入
れ、カーボン保護膜の成膜後、真空搬送した基板に、圧
力３×１０−４Ｐａ以下で液体潤滑剤を蒸着した。この
際、基板は加熱され１４０℃に保たれていた。FIG. 4 is a schematic view of the film forming apparatus used in this experiment. It is composed of a crucible 15 that heats the stock solution of the lubricant, a shutter 17 and the substrate 11, and the distance between the crucible and the substrate is 200 mm. A certain amount of lubricant was placed in the crucible, and after forming a carbon protective film, a liquid lubricant was vapor-deposited on a substrate that had been vacuum-conveyed at a pressure of 3 × 10 −4 Pa or less. At this time, the substrate was heated and kept at 140 ° C.
【００２９】得られた磁気記録媒体の潤滑層の総膜厚と
結合潤滑層の膜厚を測定したところ、総膜厚が約２ｎｍ
で、結合潤滑層は約１．４ｎｍであり、潤滑層の総膜厚
に対する結合潤滑層の割合は約７０％となった。基板加
熱をしない従来の製造方法では、総膜厚が約２ｎｍのと
き結合潤滑層は約１．１ｎｍで、潤滑層の総膜厚に対す
る結合潤滑層の割合は約５５％であり、基板を１４０℃
に加熱保持したことにより、潤滑層の総膜厚に対する結
合潤滑層の割合を高くすることができた。When the total film thickness of the lubricating layer and the combined lubricating layer of the obtained magnetic recording medium was measured, the total film thickness was about 2 nm.
The combined lubricating layer had a thickness of about 1.4 nm, and the ratio of the combined lubricating layer to the total thickness of the lubricating layer was about 70%. In the conventional manufacturing method in which the substrate is not heated, the combined lubricating layer is about 1.1 nm when the total film thickness is about 2 nm, and the ratio of the combined lubricating layer to the total film thickness of the lubricating layer is about 55%. ℃
By heating and holding at 1, the ratio of the combined lubricating layer to the total thickness of the lubricating layer could be increased.
【００３０】[実施例２]実施例１と同様に、アルミ合金
基板２上に、Ｎｉ−Ｐメッキ３を施し、その上にスパッ
タ法で２０ｎｍのＣｒ下地層４、２０ｎｍのＣｏ磁性層
５および８ｎｍの窒素添加アモルファスカーボン保護膜
６を成膜した。さらに、以下に詳細に説明する蒸着法に
より液体潤滑剤（Ｚ−ｄｏｌ：商品名Ａｕｓｉｍｏｎｔ
社）をカーボン膜上に成膜した。[Example 2] Similar to Example 1, Ni-P plating 3 was applied on an aluminum alloy substrate 2, and a Cr underlayer 4 of 20 nm, a Co magnetic layer 5 of 20 nm and An 8 nm nitrogen-doped amorphous carbon protective film 6 was formed. Furthermore, a liquid lubricant (Z-dol: trade name Ausimont) is formed by a vapor deposition method described in detail below.
Co., Ltd.) was formed on the carbon film.
【００３１】カーボン保護膜の成膜後、真空搬送した基
板を、圧力１００００Ｐａで２時間、酸素雰囲気に暴露
した。このときの基板温度はＲＴであった。After forming the carbon protective film, the vacuum-conveyed substrate was exposed to an oxygen atmosphere at a pressure of 10000 Pa for 2 hours. The substrate temperature at this time was RT.
【００３２】得られた磁気記録媒体の潤滑層の総膜厚と
結合潤滑層の膜厚を測定したところ、総膜厚が約２ｎｍ
で、結合潤滑層は約０．８２ｎｍであり、潤滑層の総膜
厚に対する結合潤滑層の割合は約４０％となった。基板
加熱をしない従来の製造方法では、総膜厚が約２ｎｍの
とき結合潤滑層は約１．１ｎｍで、潤滑層の総膜厚に対
する結合潤滑層の割合は約５５％であり、基板を酸素雰
囲気に暴露したことにより、潤滑層の総膜厚に対する結
合潤滑層の割合を低くすることができた。When the total film thickness of the lubricating layer and the combined lubricating layer of the obtained magnetic recording medium was measured, the total film thickness was about 2 nm.
The combined lubricating layer had a thickness of about 0.82 nm, and the ratio of the combined lubricating layer to the total thickness of the lubricating layer was about 40%. In the conventional manufacturing method in which the substrate is not heated, the combined lubricating layer is about 1.1 nm when the total film thickness is about 2 nm, and the ratio of the combined lubricating layer to the total film thickness of the lubricating layer is about 55%. By exposing to the atmosphere, the ratio of the combined lubricating layer to the total thickness of the lubricating layer could be reduced.
【００３３】[0033]
【発明の効果】以上説明したように本発明によれば、カ
ーボン保護膜と液体潤滑層を真空中で連続形成する製造
方法において、一定温度に加熱した基板に潤滑剤を蒸着
する、酸素雰囲気に暴露してから潤滑剤を蒸着すること
により、カーボン保護膜と液体潤滑剤分子の結合率を制
御することを特徴とする。これにより、いかなる設計の
磁気記録媒体にも対応する潤滑層を形成できる。As described above, according to the present invention, in a manufacturing method for continuously forming a carbon protective film and a liquid lubricating layer in a vacuum, a lubricant is vapor-deposited on a substrate heated to a constant temperature, and an oxygen atmosphere is used. It is characterized in that the bond ratio between the carbon protective film and the liquid lubricant molecule is controlled by depositing the lubricant after the exposure. This makes it possible to form a lubricating layer compatible with magnetic recording media of any design.
【図１】本発明の磁気記録媒体の製造方法によって作成
された磁気記録媒体の断面図である。FIG. 1 is a cross-sectional view of a magnetic recording medium manufactured by a method of manufacturing a magnetic recording medium of the present invention.
【図２】本発明における基板温度と結合潤滑層の膜厚の
関係を示す図である。FIG. 2 is a diagram showing a relationship between a substrate temperature and a film thickness of a coupling lubricating layer in the present invention.
【図３】本発明における酸素暴露時の圧力と結合潤滑層
の膜厚の関係を示す図である。FIG. 3 is a diagram showing the relationship between the pressure at the time of oxygen exposure and the film thickness of the coupling lubricating layer in the present invention.
【図４】本発明で用いた成膜装置の模式図である。FIG. 4 is a schematic diagram of a film forming apparatus used in the present invention.
【図５】従来の蒸着法における潤滑層の総膜厚と結合潤
滑層の関係を示す図である。FIG. 5 is a diagram showing a relationship between a total thickness of a lubricating layer and a combined lubricating layer in a conventional vapor deposition method.
１ 磁気記録媒体 ２ 非磁性基板 ３ めっき層 ４ 下地層 ５ 磁性層 ６ カーボン保護膜 ７ 液体潤滑層 ８ 保護膜成膜室 ９ 潤滑層蒸着室 １０ 搬送室 １１ 基板 １２ カーボンターゲット １３ 直流電源 １４ 潤滑剤 １５ ルツボ １６ ヒータ １７ シャッター １８ ガス導入部 1 Magnetic recording medium 2 Non-magnetic substrate 3 plating layer 4 Underlayer 5 Magnetic layer 6 Carbon protective film 7 Liquid lubrication layer 8 Protective film deposition chamber 9 Lubrication layer deposition chamber 10 Transport room 11 board 12 carbon target 13 DC power supply 14 Lubricants 15 crucibles 16 heater 17 shutter 18 Gas introduction section
───────────────────────────────────────────────────── フロントページの続き (72)発明者 永田 徳久 神奈川県川崎市川崎区田辺新田１番１号 富士電機株式会社内 Ｆターム(参考） 5D112 AA07 BC02 BC05 FA02 FA04 FA10 GA05 ─────────────────────────────────────────────────── ─── Continued front page (72) Inventor Tokuhisa Nagata 1-1 Tanabe Nitta, Kawasaki-ku, Kawasaki-shi, Kanagawa Within Fuji Electric Co., Ltd. F-term (reference) 5D112 AA07 BC02 BC05 FA02 FA04 FA10 GA05
Claims (4)
層の順次積層された磁性膜とカーボン保護膜と液体潤滑
層とから構成され、前記カーボン保護膜を形成した後
に、前記液体潤滑層を真空中で連続形成する磁気記録媒
体の製造方法において、前記カーボン保護膜と前記液体
潤滑層の液体潤滑剤分子の結合割合を制御することを特
徴とする磁気記録媒体の製造方法。1. A non-magnetic substrate, at least 1 of each of which is provided.
In the method for producing a magnetic recording medium, which comprises a magnetic film, a carbon protective film, and a liquid lubricating layer, which are sequentially laminated in layers, and after the carbon protective film is formed, the liquid lubricating layer is continuously formed in a vacuum. A method of manufacturing a magnetic recording medium, which comprises controlling a bonding ratio of liquid lubricant molecules in a carbon protective film and the liquid lubricating layer.
する際、前記非磁性基板を加熱することにより、前記カ
ーボン保護膜と前記液体潤滑剤分子の結合割合を、加熱
なしと比べて高くしたことを特徴とする請求項１に記載
の磁気記録媒体の製造方法。2. When the liquid lubricating layer is formed by a vacuum deposition method, the non-magnetic substrate is heated to increase the bonding ratio between the carbon protective film and the liquid lubricant molecule as compared with that without heating. The method of manufacturing a magnetic recording medium according to claim 1, wherein.
ることを特徴とする請求項２に記載の磁気記録媒体の製
造方法。3. The method of manufacturing a magnetic recording medium according to claim 2, wherein the temperature of the non-magnetic substrate is 80 ° C. or higher.
ン保護膜の表面を酸素雰囲気中に一定圧力で一定時間暴
露することにより、前記カーボン保護膜と前記液体潤滑
剤分子の結合割合を、暴露なしと比べて低くできること
を特徴とする請求項１に記載の磁気記録媒体の製造方
法。4. The deposition ratio of the carbon protective film and the liquid lubricant molecule is controlled by exposing the surface of the carbon protective film to an oxygen atmosphere at a constant pressure for a certain time before vapor deposition of the liquid lubricating layer. The method of manufacturing a magnetic recording medium according to claim 1, wherein the magnetic recording medium can be made lower than that without exposure.
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| Publication number | Priority date | Publication date | Assignee | Title |
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| JP2014203473A (en) * | 2013-04-02 | 2014-10-27 | 昭和電工株式会社 | Manufacturing method of magnetic recording medium |
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