JP2003175498A5 - - Google Patents
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- Publication number
- JP2003175498A5 JP2003175498A5 JP2002317115A JP2002317115A JP2003175498A5 JP 2003175498 A5 JP2003175498 A5 JP 2003175498A5 JP 2002317115 A JP2002317115 A JP 2002317115A JP 2002317115 A JP2002317115 A JP 2002317115A JP 2003175498 A5 JP2003175498 A5 JP 2003175498A5
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- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Links
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US09/986107 | 2001-11-07 | ||
| US09/986,107 US7060522B2 (en) | 2001-11-07 | 2001-11-07 | Membrane structures for micro-devices, micro-devices including same and methods for making same |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2003175498A JP2003175498A (ja) | 2003-06-24 |
| JP2003175498A5 true JP2003175498A5 (enExample) | 2005-12-22 |
| JP4384844B2 JP4384844B2 (ja) | 2009-12-16 |
Family
ID=25532090
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2002317115A Expired - Fee Related JP4384844B2 (ja) | 2001-11-07 | 2002-10-31 | マイクロ素子のための膜構造，膜構造を含むマイクロ素子，及び膜構造を作るための方法 |
Country Status (2)
| Country | Link |
|---|---|
| US (1) | US7060522B2 (enExample) |
| JP (1) | JP4384844B2 (enExample) |
Families Citing this family (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7108354B2 (en) * | 2004-06-23 | 2006-09-19 | Xerox Corporation | Electrostatic actuator with segmented electrode |
| US7226146B2 (en) * | 2004-11-30 | 2007-06-05 | Xerox Corporation | Fluid ejection devices and methods for forming such devices |
| JP4907297B2 (ja) * | 2005-11-11 | 2012-03-28 | 株式会社半導体エネルギー研究所 | 微小構造体及び微小電気機械式装置の作製方法 |
| GB0605576D0 (en) * | 2006-03-20 | 2006-04-26 | Oligon Ltd | MEMS device |
| US7998775B2 (en) * | 2009-02-09 | 2011-08-16 | Taiwan Semiconductor Manufacturing Company, Ltd. | Silicon undercut prevention in sacrificial oxide release process and resulting MEMS structures |
| DE102017102545B4 (de) | 2017-02-09 | 2018-12-20 | Infineon Technologies Ag | Halbleitervorrichtung, Drucksensor, Mikrofon, Beschleunigungssensor und Verfahren zum Bilden einer Halbleitervorrichtung |
| CN114477072B (zh) * | 2020-11-12 | 2025-10-31 | 上海新微技术研发中心有限公司 | 一种微细结构的制造方法 |
Family Cites Families (13)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4740410A (en) * | 1987-05-28 | 1988-04-26 | The Regents Of The University Of California | Micromechanical elements and methods for their fabrication |
| DE4241045C1 (de) * | 1992-12-05 | 1994-05-26 | Bosch Gmbh Robert | Verfahren zum anisotropen Ätzen von Silicium |
| US5783340A (en) * | 1995-09-06 | 1998-07-21 | Sandia Corporation | Method for photolithographic definition of recessed features on a semiconductor wafer utilizing auto-focusing alignment |
| US5798283A (en) * | 1995-09-06 | 1998-08-25 | Sandia Corporation | Method for integrating microelectromechanical devices with electronic circuitry |
| US5963788A (en) * | 1995-09-06 | 1999-10-05 | Sandia Corporation | Method for integrating microelectromechanical devices with electronic circuitry |
| US5919548A (en) * | 1996-10-11 | 1999-07-06 | Sandia Corporation | Chemical-mechanical polishing of recessed microelectromechanical devices |
| US5804084A (en) * | 1996-10-11 | 1998-09-08 | Sandia Corporation | Use of chemical mechanical polishing in micromachining |
| US6610440B1 (en) * | 1998-03-10 | 2003-08-26 | Bipolar Technologies, Inc | Microscopic batteries for MEMS systems |
| US6127198A (en) * | 1998-10-15 | 2000-10-03 | Xerox Corporation | Method of fabricating a fluid drop ejector |
| JP3486124B2 (ja) * | 1998-12-28 | 2004-01-13 | 三菱電機株式会社 | 高圧燃料ポンプ装置 |
| US6472332B1 (en) * | 2000-11-28 | 2002-10-29 | Xerox Corporation | Surface micromachined structure fabrication methods for a fluid ejection device |
| US6587613B2 (en) * | 2001-07-24 | 2003-07-01 | Innovative Technology Licensing, Llc | Hybrid MEMS fabrication method and new optical MEMS device |
| US6936183B2 (en) * | 2001-10-17 | 2005-08-30 | Applied Materials, Inc. | Etch process for etching microstructures |
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2001
- 2001-11-07 US US09/986,107 patent/US7060522B2/en not_active Expired - Fee Related
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2002
- 2002-10-31 JP JP2002317115A patent/JP4384844B2/ja not_active Expired - Fee Related