JP2003174080A - Container for housing/storing thin plate - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To enhance sealability between a cover 4 and a container body 2, and mountability/demountability of the cover. <P>SOLUTION: A cover 4 is provided with a double seal mechanism 65. The double seal mechanism 65 comprises an inner seal piece 66 for hermetically sealing the inside of a container body 2 while being held by an inner seal receiving part 15 and a seal pressing part 32, and an outer seal piece 67 for hermetically sealing the abutting part of the inner seal piece 66 and the inner seal receiving part 15. An inflating part 66C being fitted in a fitting groove 16 is provided at the forward end of the inner seal piece 66. Means 37 for securing the cover 4 comprises a latch shaft 41 projecting linearly and retractively from the cover 4, a latch roller 42 fixed to the forward end of the latch shaft 41, and a crank mechanism 39 for projecting the cover 4 retractively from the cover 4 through rotation. On the container body 2 side, a plane 22B for drawing the cover 4 to the container body 2 side is provided. <P>COPYRIGHT: (C)2003,JPO

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a thin plate storing / storing apparatus having improved sealing property between a lid and a container body and detachability of the lid.
Regarding storage containers.

[0002]

2. Description of the Related Art As a thin plate storage / storage container, a container in which a semiconductor silicon wafer is stored and transported is generally known. In such a wafer storage / transport container, it is important to transport the wafer while keeping the inside of the container clean in order to prevent contamination of the surface of the stored wafer. Therefore, the inside of the container is sealed. That is, the lid is fixed to the container body to seal the inside of the container body. The sealing between the lid and the container body is usually performed by providing a sealing material between the lid and the container body. The sealing material is attached to the peripheral portion of the lid body, and elastically abuts on the container body using the force of pressing the lid body against the container body to seal the inside.

[0003]

By the way, in the above-mentioned thin plate storage / storage container, since there is a certain amount of clearance between the lid and the container body, the sealing material is substantially external. Are exposed to. Therefore, dust may enter from the outside. This dust also enters the contact portion between the sealing material and the container body. In this case, there is no particular problem when the lid is attached to the container body, but a problem occurs when the lid is removed from the container body. That is,
When the lid is removed from the container body, the inside of the container body temporarily becomes negative pressure, and outside air may flow into the container body through the gap between the contact portion between the sealing material and the container body. Then, if dust has entered the contact portion between the sealing material and the container body, there is a problem that the dust enters the container body.

The present invention has been made in view of the above problems, and an object of the present invention is to provide a thin plate storage / storage container in which the sealing property between the lid and the container body and the detachability of the lid are improved. To do.

[0005]

In order to solve the above-mentioned problems, a thin plate storage / storage container according to a first aspect of the present invention includes a container main body for accommodating and supporting a plurality of thin plates, and a container main body that closes the inside of the container main body. A storage and storage container for thin plates configured with a lid body for keeping it clean, wherein the lid body is provided with a double seal mechanism for sealing the inside of the container body, and the double seal mechanism is a peripheral edge of the lid body. An inner seal piece attached to the container body to abut the container body side to seal the inside of the container body, and an outer seal piece attached to the outside of the inner seal piece in the peripheral portion of the lid body to abut the container body side. This is characterized by comprising the inner seal piece and an outer seal piece that seals the contact portion between the container body and the main body.

With the above construction, the lid is attached to the container body, and the inner seal piece is brought into contact with the container body side, whereby the inside and outside of the container body are sealed. At this time, the outer seal piece is brought into contact with the container body side, thereby covering and sealing the contact portion between the inner seal piece and the container body from the outside. This prevents dust from entering the contact portion between the inner seal piece that seals the inside and outside of the container body and the container body side from the outside. As a result, when the lid body is removed from the container body, even if the pressure inside the container body temporarily becomes negative, the outer seal piece covers the outside of the contact portion between the inner seal material and the container body. The outside air will not forcefully flow into the container body through the gap between the seal member and the container body. Furthermore, since no dust has entered between these, it is possible to reliably prevent dust from entering the container body when the lid is removed.

A thin plate storage / storage container according to a second aspect of the present invention is the thin plate storage / storage container according to the first aspect of the present invention.
The inner seal piece is formed in the shape of an annular flat plate, and its inner end in the normal direction is supported by the lid side and extends outward in the normal direction, and the inner seal piece is formed on the inner side surface of the peripheral portion of the lid body. A seal pressing portion that abuts and presses the outside of the inner sealing piece is formed in an annular shape, and abuts against the inner sealing piece from the inside with the lid body attached to the container main body to contact with the seal pressing portion. A seal receiving portion sandwiching the inner seal piece therebetween is formed in an annular shape so as to face the seal pressing portion.

With the above structure, when the lid is attached to the container body, the inner seal piece is sandwiched between the seal pressing portion and the seal receiving portion, and the inside of the container body is reliably sealed.

A thin plate storage / storage container according to a third aspect of the present invention is the thin plate storage / storage container according to the first aspect of the present invention.
A bulging portion is formed at the outer end in the normal direction of the inner sealing piece of the double sealing mechanism over the entire circumference, and a fitting groove into which the bulging portion fits in the seal receiving portion on the container body side. Is formed.

With the above structure, the bulging portion at the tip of the inner seal piece is fitted into the fitting groove of the seal receiving portion on the container body side by attaching the lid to the container body. This allows
The inside of the container body is reliably sealed.

A thin plate storage / storage container according to a fourth aspect of the present invention is provided with a container body for housing and supporting a plurality of thin plates, a lid body for closing the container body to keep the inside clean, and the lid body. In a thin plate storage / storage container configured to include a lid body fixing means for fixing the lid body to the container body side, the lid body fixing means is a latch shaft that linearly moves in and out of the lid body, And a latch roller rotatably attached to the tip of the latch shaft. The latch roller is formed on the container body side so as to be inclined so as to open outward toward the latch roller side. It is characterized in that a lid body pull-in surface is provided for pulling the lid body toward the container body side while abutting and rotating by the extension of the latch shaft.

With the above structure, the latch shaft of the lid fixing means is extended from the lid, so that the latch roller at the tip of the latch shaft abuts the lid drawing surface on the container body side. In this state, when the latch shaft is further extended, the latch roller comes into contact with the lid drawing surface and is pushed while rotating. As a result, the lid is pulled toward the container body and fixed.

A thin plate storage / storage container according to a fifth aspect of the present invention is provided with a container body for housing and supporting a plurality of thin plates, a lid body for closing the container body to keep the inside clean, and the lid body. In a thin plate storage / storage container configured to have a lid body fixing means for fixing the lid body to the container body side, the lid body fixing means rotates to move the locking piece out of the lid body. And a rotation plate configured to include a crank mechanism for rotating the rotation mechanism, the rotation mechanism directly engaging and locking the locking piece to rotate the locking piece in and out, and supporting the rotation of the rotation plate. A support piece, wherein the support piece individually fits and supports a plurality of locking pins provided on the rotary plate in a state where the locking piece is extended from the lid body; A plurality of pin receiving parts are elastically supported and the rotary plate is set at a set angle. Characterized in that it is constituted by an elastic support portion to match the fine setting position.

With the above structure, the pin receiving portions of the support pieces individually fit and support the locking pins provided on the rotary plate in a state where the locking pieces are extended from the lid. At this time, the pin receiving portion is elastically supported by the elastic supporting portion, and the rotating plate is aligned with the set angle and the set position and elastically supported. As a result, the T-shaped tip of the attaching / detaching arm of the lid attaching / detaching device,
Even if there is some misalignment with the thin plate storage / storage container,
The support piece elastically supports the rotating plate to absorb the deviation.

A thin plate storage / storage container according to a sixth invention is the thin plate storage / storage container according to any one of the first to fifth inventions, wherein the container main body is provided with small holes and It is characterized in that a filter is provided between the inside and outside of the main body to allow only air to flow in and out except for dust, and a cover is provided outside the filter.

With the above structure, when the thin plate storage / storage container is moved or placed at various places, the filter is prevented from coming into contact with and breaking.

A thin plate storage / storage container according to a seventh invention is the thin plate storage / storage container according to any one of the first to sixth inventions, wherein a plurality of thin plates are stored in the container body. In the thin plate supporting portion having comb teeth for supporting one by one at regular intervals, a comb tooth for one thin plate is further provided at the uppermost stage.

With the above structure, the comb teeth for one thin plate are further provided on the uppermost stage, and the unnecessary thin plate is used as a cover for the uppermost thin plate. As a result, it is possible to prevent dust and the like from adhering to the uppermost thin plate.

[0019]

BEST MODE FOR CARRYING OUT THE INVENTION Embodiments of the present invention will be described below with reference to the accompanying drawings.

In this embodiment, a semiconductor silicon wafer storage / storage container for storing and transporting a semiconductor silicon wafer as a thin plate will be described as an example.

As shown in FIGS. 2, 3 and 12, this semiconductor silicon wafer storage / storage container 1 has a container body 2 for storing and supporting a large number of semiconductor silicon wafers S therein.
And a large number of semiconductor silicon wafers S provided inside the container body 2 facing each other and housed therein.
A wafer support part 3 as a thin plate support part for holding one from each side at regular intervals, and a lid body 4 for hermetically closing the opening of the container body 2 to keep the inside clean. ing.

The container body 2 is formed into a substantially cubic shape as a whole. A wafer support 3 is attached to the inside of the side wall of the container body 2.

The end wall on one side (upper side in FIG. 12) of the container body 2 is for carrying by a carrying device (not shown) provided on a manufacturing line or the like, which is grasped by an arm thereof. A flange portion 7 is provided. As shown in FIG. 2, the other end wall of the container body 2 is provided with a positioning fitting portion 8 for accurately adjusting its mounting position.

Further, handles 9 are provided on both side walls so that an operator can carry the container body 2 by hand, and can vertically or horizontally lay it.

The front end of the container body 2 (the left end in FIG. 12)
A lid body receiving portion 11 for fitting the lid body 4 is provided in the. As shown in FIGS. 1, 4, 5, and 6, the lid body receiving portion 11 is formed by enlarging the end portion of the container body 2 to fit the lid body 4. This lid receiving portion 11
Are formed in two stages in accordance with a double seal mechanism 65 described later. Specifically, the inner step 12 and the outer step 13
It consists of and.

The inner step portion 12 is formed by expanding from the front end of the side wall of the container body 2 to the outer circumference. This inner step 1
Reference numeral 2 constitutes the inner seal receiving portion 15 against which the inner seal piece 66 of the double seal mechanism 65 abuts. The inner seal receiving portion 15 has a bulge portion 6 at the tip of the inner seal piece 66.
A fitting groove 16 into which 6C is fitted is formed. The inner step 12 is extended as it is to form a gripping flange 17. The gripping flange 17 is a flange that is gripped when the container body 2 is transported by the transport device.

The outer step portion 13 is formed outside the inner step portion 12 (on the right side in FIG. 1) by being displaced by the thickness of the lid body 4. The outer stepped portion 13 constitutes an outer seal receiving portion 18 against which the outer seal piece 67 of the double seal mechanism 65 abuts.

Between the inner step 12 and the outer step 13,
A roller receiving hole 21 is provided. The roller receiving holes 21 are provided at four locations corresponding to the latch rollers 42 described later. The roller receiving hole 21 is formed by the latch roller 4
The size is set so that 2 can be stored. Roller receiving hole 2
The outer surface 22 of No. 1 is composed of a lid support surface 22A and a lid pull-in surface 22B. The lid support surface 22A is
It is formed in a horizontal plane shape (vertical plane shape), and the latch roller 42 is brought into contact with the lid roller 4 in a completely fitted state, so that the lid 4
Is fixed to the container body 2 side and supported.
The lid body drawing surface 22B is formed to be inclined so as to open outward toward the latch roller 42 side. As a result, the lid pull-in surface 22B directly contacts the latch roller 4
The lid 4 is indirectly pressed by pushing 2 toward the container body 2. That is, when the latch roller 42 comes into the roller receiving hole 21 due to the extension of the latch shaft 41, which will be described later, the latch roller 42 causes the lid drawing surface 22B.
While advancing and rotating, the cover 4 advances toward the inside of the inclined surface, and the lid 4 is drawn toward the container body 2 side from the state of FIG. 1 to the state of FIG. An outer end surface 25 is formed around the outer step portion 13 with another step portion 24.
The outer end surface of the container body 2 is flush with the outer end surface of the lid body 4 with the latch roller 42 contacting the lid body supporting surface 22A of the roller receiving hole 21 and the lid body 4 attached to the container body 2. Is set to.

As shown in FIGS. 1 to 6, the lid 4 is formed in the shape of a hollow thick plate. Specifically, it is composed of a shallow dish-shaped main body portion 27 and a lid plate portion 28 that closes the main body portion 27. An inner gasket support groove 29 and an outer gasket support groove 30 are provided on the peripheral edge of the dish-shaped main body portion 27.

The inner gasket support groove 29 is formed in the main body portion 27.
It is formed in an annular shape on the inner side surface (the left side surface in FIG. 1) of the peripheral edge. The inner seal piece 66 having an L-shaped cross section, which will be described later, is extended outward in the normal direction in a state where the base end portion is fitted and supported in the inner gasket support groove 29. Of the inner side surface (left side surface in FIG. 1) of the peripheral edge of the main body 27, the outer side surface of the inner seal piece 66 is abutted on the outer side in the normal direction of the inner gasket support groove 29 (upper side in FIG. 1). The seal pressing portion 32 that presses by pressing is formed in an annular shape. The seal pressing portion 32 presses the outer side surface of the inner sealing piece 66, so that the seal pressing portion 3
The inner seal piece 66 is sandwiched between the container 2 and the inner seal receiving portion 15 on the container body 2 side.

The outer gasket support groove 30 is formed in the main body portion 27.
It is formed in an annular shape on the outer side portion (the right side portion in FIG. 1) of the peripheral edge. The outer gasket support groove 30 is formed as an annular groove that is open outward in the normal direction. The outer side wall 30A of the outer gasket support groove 30 has the outer seal piece 6
It is formed in an enlarged manner so as to cover and protect 7.

Between the inner gasket support groove 29 and the outer gasket support groove 30, the shaft holes 3 are provided at four positions.
4 are provided. The shaft hole 34 is a hole for slidably supporting a latch shaft 41 described later. A bearing 35 is attached to the shaft hole 34. The bearing 35 is set to have substantially the same size as that of the roller support portion 41B of the latch shaft 41, and is set so as not to have a large gap in the sliding portion. This is to prevent dust or the like from entering the inner seal piece 66 side even if dust or the like is generated in the main body portion 27.

Inside the main body 27, as shown in FIGS. 1 and 5 to 10, a lid fixing means 37 for fixing the lid 4 to the container body 2 side is provided. This lid fixing means 3
Reference numeral 7 is composed of a locking piece 38 and a crank mechanism 39.

The locking piece 38 is composed of a latch shaft 41 and a latch roller 42. The latch shaft 41 is a shaft that linearly moves in and out from the main body portion 27 of the lid body 4. The latch shaft 41 has a metal rod portion 41A.
And a roller support portion 41B and a crank locking portion 41C. The metal rod portion 41A is the latch shaft 4
It is a member for maintaining the strength of 1. Roller support 4
1B is molded of synthetic resin and has a bearing 35 of the main body 27.
The latch shaft 41 is slidably inserted into the latch shaft 41 to support the retracting movement of the latch shaft 41. The crank locking portion 41C is a rotary plate 4 described later.
5 is a member to be locked in the projecting / retracting elongated hole 47. An engaging pin 41D that fits into the projecting / retracting elongated hole 47 of the rotary plate 45 is provided at the tip of the crank locking portion 41C.

The latch roller 42 is a member for locking the lid body 4 to the container body 2 side by engaging with the container body 2 side without friction. The latch roller 42 is rotatably attached to the tip of the roller support portion 41B.

The crank mechanism 39 is a member for moving the locking piece 38 in and out of the lid 4 by rotating.
The crank mechanism 39 includes a rotating plate 45 and a support piece 46.

The rotating plate 45 is engaged with the locking piece 38,
It is a member for moving the locking piece 38 in and out by rotating. The rotary plate 45 is formed in a disk shape, and is provided with two projecting / retracting elongated holes 47 spirally extending toward the center. The crank locking portion 41C of the latch shaft 41 is locked in the projecting / retracting slot 47, and the rotation of the rotating plate 45 causes the crank locking portion 41C to be pulled toward the center of the rotating plate 45 or pushed to the peripheral edge. The stopper 38 is retracted. A fitting recess 49 is provided at the center of the surface of the rotary plate 45. The fitting recess 49 is formed by bulging the periphery to form a recess. The fitting concave portion 49 is a portion into which the T-shaped tip of the attaching / detaching arm portion of the lid attaching / detaching device (not shown) is fitted.

Locking pins 51 are attached to the back surface of the rotary plate 45 at three positions. This locking pin 51
Is a member for engaging with a support piece 46 described later and adjusting the position and angle of the rotary plate 45. A rotary shaft 52 is provided at the center of the back surface of the rotary plate 45.

The support piece 46 is a member for supporting the rotation of the rotary plate 45. The support piece 46 includes a U-shaped fixing portion 54, a pin receiving portion 55, an elastic supporting portion 56, and a rotary shaft hole 57.

The U-shaped fixing portion 54 is a member for fixing the supporting piece 46 itself to the lid body 4 side. U-shaped fixing part 54
Are provided at three locations around the rotary shaft hole 57 and are attached to fixing members 59 on the lid 4 side, respectively, to fix the support piece 46 to the lid 4 side.

The pin receiving portion 55 is a member for supporting the rotary plate 45 at a set angle. That is, it is a member for fitting and supporting the locking pin 51 of the rotary plate 45 in a state where the locking piece 38 is extended from the lid body 4 to support the rotary plate 45 at a set angle and a set position. . The pin receiving portion 55 is formed in a V shape and fits into the locking pin 51. Pin receiving part 5
Reference numerals 5 are provided at three locations corresponding to the locking pins 51 provided at three locations on the back surface of the rotary plate 45.

The elastic support portion 56 is a member for elastically supporting each pin receiving portion 55. The elastic support portion 56 is composed of a rod member that is stretched between the tips of the adjacent U-shaped fixing portions 54. This elastic support portion 56
Has elasticity and elastically supports the pin receiving portion 55 at the tip end portion in a state where the base end portion is supported by each U-shaped fixing portion 54. As a result, the elastic support portion 56 has the pin receiving portions 5
5 is elastically supported at the set position, and the pin receiving portion 55
The rotary plate 45 is supported by being aligned with a set angle and a set position via a locking pin 51 fitted to the. Incidentally, reference numerals 60 and 61 are stoppers for restricting the rotation of the rotary plate 45. When the locking pin 51 abuts on the stoppers 60 and 61, the rotary plate 45 is restricted from rotating more than necessary.

The rotary shaft hole 57 is a member for supporting the rotation of the rotary plate 45. The inner diameter of the rotary shaft hole 57 is set to be slightly larger than the outer diameter of the rotary shaft 52 of the rotary plate 45, and the rotary plate 45 is provided with a play. By this play, even if the position of the semiconductor silicon wafer storage / storage container 1 and the T-shaped tip of the attachment / detachment arm of the lid attachment / detachment device are slightly deviated, it can be absorbed.

The lid fixing means 37 is provided at two positions in the main body 27 so that the four locking pieces 38 can be retracted from the vicinity of the four corners of the lid 4.

The lid plate portion 28 is a member for covering and closing the body portion 27 having the lid body fixing means 37 built therein. The lid plate portion 28 is formed in a rectangular flat plate shape, and is provided with an elongated hole 63 into which the T-shaped tip portion of the attachment / detachment arm portion of the lid attachment / detachment device is inserted. The long holes 63 are provided at two locations corresponding to the respective locking pieces 38 of the lid fixing means 37 provided in the main body 27. As a result, the two T-shaped tips of the attaching / detaching arms of the lid attaching / detaching device are inserted from the elongated holes 63 and fitted into the fitting recesses 49 of the lid fixing means 37 in the main body 27, respectively. It has become.

A double sealing mechanism 65 for sealing the inside of the container body 2 is provided on the peripheral portion of the lid 4. The double seal mechanism 65 includes an inner seal piece 66 and an outer seal piece 6.
7 and 7.

The inner seal piece 66 is a member for sealing the inside of the container body 2. The inner seal piece 66 is used for the lid 4
The inside of the container body 2 is hermetically sealed by being attached to the peripheral portion of the container and contacting the container body 2 side. The inner sealing piece 66 has an L-shaped cross section and is formed into a substantially annular flat plate shape.
Support part 6 that fits into the inner gasket support groove 29 of the lid body 4
6A, and an extending portion 66B that is sandwiched between the container body 2 side and the lid body 4 side to seal the inside of the container body 2 from each other. The inner seal piece 66 is supported on the lid body 4 side by fitting the support portion 66A into the inner gasket support groove 29 of the lid body 4. The support portion 66A is the inner gasket support groove 2 of the lid 4.
The extension portion 66 </ b> B is provided so as to extend outward in the normal direction in a state of being fitted to the connector 9. The extending portion 66B is provided so as to cover the seal pressing portion 32 in a state of being provided so as to extend outward in the normal direction. A bulge portion 66C that fits into the fitting groove 16 is formed at the tip of the extending portion 66B. The bulging portion 66C is formed by bulging the tip of the extending portion 66B into a circular cross section.

The outer seal piece 67 is a member for sealing the contact portion between the inner seal piece 66 and the container body 2. The outer seal piece 67 is formed in a substantially annular flat plate shape, and is fitted into the outer gasket support groove 30 of the lid 4. As a result, the inner sealing piece 66 is attached so as to cover the outside. The outer seal piece 67 includes a base end fitting portion 67A and a tip end contact portion 67B. Base end fitting part 67
A is fitted into the outer gasket support groove 30 of the lid body 4 and supports the outer seal piece 67 on the lid body 4 side. The tip contact portion 67B seals the contact portion between the inner seal piece 66 and the inner seal receiving portion 15 on the container body 2 side by contacting the outer step portion 13 on the container body 2 side.

On the inner surface of the lid 4, as shown in FIG.
A wafer retainer 71 is attached.

The mounting surface of the container body 2 is shown in FIGS.
As shown in FIG. 3, a small hole (not shown) is provided and a filter 72 is attached. The filter 72 is a member for allowing only air to flow in and out between the inside and outside of the container body 2 except dust. A cover 73 for protecting the filter 72 is provided outside the filter 72. The cover 73 includes an annular portion 74 that covers the periphery of the filter 72, and a radial protection arm portion 75 that extends from the annular portion 74 toward the center and covers the filter 72.

As shown in FIG. 12, a large number of wafer supporting portions 3 mounted in the container body 2 are arranged in parallel at regular intervals so that each semiconductor silicon wafer S is spaced at regular intervals. It is configured by including the comb teeth 5 that are supported. Semiconductor silicon wafer S supported in the container body 2
Since the number of the comb teeth 5 is determined by the standard, the number of the comb teeth 5 is set according to the standard. Further, the comb teeth 5 for one semiconductor silicon wafer S are provided on the uppermost one of the comb teeth 5. This is to protect the uppermost semiconductor silicon wafer S. That is, since dust or the like is often attached to the upper side surface of the uppermost semiconductor silicon wafer S among the plurality of semiconductor silicon wafers S stored, unnecessary semiconductor silicon on the upper side surface of the uppermost semiconductor silicon wafer S is often used. This is because, if the wafer S is stored, dust and the like can be attached to the unnecessary semiconductor silicon wafer S to prevent the dust and the like from being attached to the uppermost semiconductor silicon wafer S.

[Operation] The semiconductor silicon wafer storage / storage container 1 constructed as described above is used as follows.

When the semiconductor silicon wafer S is to be stored in the container body 2, first, the two T-shaped tip portions of the attachment / detachment arm portions of the lid attachment / detachment device are inserted through the respective elongated holes 63 and the lid fixing means 37 is inserted. They are fitted into the fitting recesses 49 of the rotary plate 45, respectively. At this time, since the rotary plate 45 is elastically supported by the support piece 46 and aligned with the set angle and the set position,
The T-shaped tip portion fits smoothly without contacting the fitting recess 49. In this state, the T-shaped tip portion is rotated, and the latch roller 42 is drawn into the lid body 4 via the latch shaft 41. As a result, the latch roller 42
Is released from the roller receiving hole 21 and the lid 4 is unfixed, and the lid attaching / detaching device removes the lid 4 from the container body 2.

Next, the semiconductor silicon wafer S is mounted in the container body 2 by the transfer device. At this time, after the set number of semiconductor silicon wafers S are mounted, unnecessary semiconductor silicon wafers S that may be contaminated with dust or the like are mounted on the uppermost stage.

Then, the lid attaching / detaching device attaches the lid 4 to the container body 2. Specifically, first, the lid 4 is attached to the container body 2
Then, the rotary plate 45 of the lid fixing means 37 is rotated. As a result, the latch shaft 41 extends outward from the lid body 4, and the latch roller 42 contacts the lid body drawing surface 22B of the roller receiving hole 21. Furthermore, it is pushed in while abutting. The latch roller 42 is in pressure contact with the lid pull-in surface 22B and the lid support surface 22A.
Is pushed in, and the lid body 4 is pulled in from the state of FIG. 1 to the state of FIG. 6 and fixed. As a result, the inner seal piece 66 of the double seal mechanism 65 abuts on the inner seal receiving portion 15, and the outer seal piece 67 contacts the outer seal receiving portion 18.
Abut. Further, the bulge portion 66 of the inner seal piece 66
C is fitted in the fitting groove 16, and the extending portion 66B is sandwiched between the inner seal receiving portion 15 and the seal pressing portion 32, so that the container main body 2
The inside is securely sealed. In addition, since the outer seal piece 67 and the outer seal receiving portion 18 contact each other, the inner seal piece 66
The contact portion between the inner seal receiving portion 15 and the inner seal receiving portion 15 is sealed, and dust and the like do not enter the contact portion between the inner seal piece 66 and the inner seal receiving portion 15 from the outside during transportation.

In this state, the fitting recess 49 of the rotary plate 45 is aligned with the elongated hole 63, and the T-shaped tip portion is pulled out as it is. The semiconductor silicon wafer storage / storage container 1 is transported to a predetermined place.

At this time, even if dust or the like floats around the semiconductor silicon wafer storage / storage container 1, the outer sealing piece 6
Since 7 is in contact with the outer seal receiving portion 18, it does not enter the contact portion between the inner seal piece 66 and the inner seal receiving portion 15.

When the lid 4 is removed at the destination, the two T-shaped tips of the detachable arms of the lid attaching / detaching device are inserted through the slots 63 to fit the rotary plate 45 of the lid fixing means 37. The fitting recess 49 is fitted. At this time, since the rotary plate 45 is elastically supported by the support piece 46 and is aligned with the set angle and the set position, the T-shaped tip portion fits smoothly without contacting the fitting recess 49. To meet. In this state, the T-shaped tip portion is rotated, the latch roller 42 is removed from the roller receiving hole 21, the fixation of the lid body 4 is released, and the lid body attaching / detaching device removes the lid body 4 from the container body 2.

At this time, when the lid body 4 is removed from the container body 2, the inside of the container body 2 momentarily becomes a negative pressure and the inner seal piece 6
Even if the air outside the container 6 flows into the container body 2, there is almost no dust or the like in the contact portion between the inner seal piece 66 and the inner seal receiving portion 15, and the dust or the like in the container body 2 may enter. Disappear.

Although the semiconductor silicon wafer storage / storage container 1 is placed at various places during transportation, it is not damaged because the filter 72 is provided with the cover 73.

[Effect] As described above, the double seal mechanism 6
Since it is provided with 5, it is possible to reliably prevent dust from entering the container body 2 when the lid 4 is removed.

Since the inner seal piece 66 is sandwiched between the inner seal receiving portion 15 and the seal pressing portion 32, the inside of the container body 2 can be reliably sealed.

A bulge portion 66C at the tip of the inner seal piece 66
Is the fitting groove 16 of the inner seal receiving portion 15 on the container body 2 side.
Since it is fitted into the container body 2, the inside of the container body 2 can be reliably sealed.

The latch shaft 41 of the lid fixing means 37 is extended from the lid 4 so that the latch roller 42 at the tip of the latch shaft 41 is moved to the roller receiving hole 2 on the container body 2 side.
Since the lid body 4 is pulled toward the container body 2 side by coming into contact with the lid body pulling surface 22B of 1 and being pushed in while rotating, the lid body 4 can be reliably fixed to the container body 2.

Since the support piece 46 elastically supports the rotary plate 45 and aligns the rotary plate 45 with the set angle and the set position, the T-shaped tip of the detachable arm of the lid attaching / detaching device and the storage for thin plates. Even if the storage container is slightly displaced, the displacement can be absorbed and the lid 4 can be smoothly attached and detached.

Since the cover 73 is provided on the outer side of the filter 72, even when the thin plate storage / storage container is moved or placed in various places, the filter 72 does not come into contact with something and break.

Since the unnecessary semiconductor silicon wafer S is used as a cover for the uppermost semiconductor silicon wafer S,
It is possible to prevent dust and the like from adhering to the uppermost semiconductor silicon wafer S.

[Modification] (1) Although the semiconductor silicon wafer S has been described as an example of the thin plate in the above embodiment, the thin plate is not limited to this, and adverse effects of gas, fine particles, etc. on the glass plate for liquid crystal, storage disk, etc. The thin plate storage / storage container of the present invention can be applied to any thin plate that may be received.

(2) In the above embodiment, the elastic support portions 56 of the support pieces 46 are connected to the adjacent U-shaped fixing portions 54, but other shapes may be used to ensure the required elasticity. For example, as shown in FIG. 13, the elastic support portion 56A may be cut midway to obtain greater elasticity.

[0070]

As described in detail above, the thin plate storage / storage container of the present invention has the following effects.

Since the double sealing mechanism is provided, it is possible to reliably prevent dust from entering the container body when the lid is removed.

Further, since the inner seal piece is sandwiched between the inner seal receiving portion and the seal pressing portion, the inside of the container body can be reliably sealed.

Since the bulge at the tip of the inner seal piece fits into the fitting groove of the inner seal receiving portion on the container body side, the inside of the container body can be reliably sealed.

When the latch shaft of the lid fixing means is extended from the lid, the latch roller at the tip of the latch shaft comes into contact with the lid drawing surface of the roller receiving hole on the container body side and is pushed in while rotating. Since the lid body is pulled toward the container body side, the lid body can be securely fixed to the container body.

Since the supporting piece elastically supports the rotating plate and aligns the rotating plate with the set angle and the set position, the T-shaped tip of the attaching / detaching arm portion of the lid attaching / detaching device and the thin plate storing / storing container. Even if there is some misalignment between
The lid can be attached and detached smoothly.

Since the cover is provided on the outside of the filter, even when the thin plate storage / storage container is moved or placed in various places, the filter does not come into contact with anything and break.

Since the unnecessary semiconductor silicon wafer is used as a cover of the uppermost semiconductor silicon wafer, it is possible to prevent dust and the like from adhering to the uppermost semiconductor silicon wafer.

[Brief description of drawings]

FIG. 1 is a sectional view of an essential part showing a lid receiving portion of a semiconductor silicon wafer storage / storage container according to the present invention.

FIG. 2 is a perspective view showing a semiconductor silicon wafer storage / storage container according to the present invention.

FIG. 3 is a perspective view showing a semiconductor silicon wafer storage / storage container according to the present invention.

FIG. 4 is a perspective view of essential parts showing a lid receiving portion of a semiconductor silicon wafer storage / storage container according to the present invention.

FIG. 5 is a perspective view of a main part showing a lid receiving portion of a semiconductor silicon wafer storage / storage container according to the present invention.

FIG. 6 is a cross-sectional view of essential parts showing a lid receiving portion of a semiconductor silicon wafer storage / storage container according to the present invention.

FIG. 7 is a perspective view of a main part showing a crank mechanism of a lid fixing means.

FIG. 8 is a perspective view of a main part showing a crank mechanism of a lid fixing means.

FIG. 9 is a perspective view showing a support piece of a crank mechanism of a lid fixing means.

FIG. 10 is a perspective view of essential parts showing a crank mechanism of a lid fixing means.

FIG. 11 is a perspective view showing a filter.

FIG. 12 is a sectional view showing a semiconductor silicon wafer storage / storage container.

FIG. 13 is a perspective view showing a modified example.

[Explanation of symbols]

1: Semiconductor silicon wafer storage / storage container, 2: Container body, 3: Wafer support part, 4: Lid body, 7: Transfer flange part, 8: Positioning fitting part, 9: Handle, 11: Lid body receiver Part, 12: inner step part, 13: outer step part, 15: inner seal receiving part, 16: fitting groove, 17: gripping flange:
18: outer seal receiving portion, 21: roller receiving hole, 22:
Outer side surface, 22A: lid support surface, 22B: lid pull-in surface, 24: step portion, 25: outer end surface, 27: body portion, 2
8: Lid plate portion, 29: Inner gasket supporting groove, 30: Outer gasket supporting groove, 32: Seal pressing portion, 34: Shaft hole, 35: Bearing, 37: Lid fixing means, 38: Locking piece, 39: Crank mechanism, 41: Latch shaft, 4
2: Latch roller, 45: Rotating plate, 46: Support piece, 4
7: Elongate hole for retracting, 49: Fitting recess, 51: Locking pin, 5
2: rotating shaft, 54: U-shaped fixing portion, 55: pin receiving portion,
56: elastic support part, 57: rotary shaft hole, 59: fixture, 6
3: elongated hole, 65: double sealing mechanism, 66: inner sealing piece, 67: outer sealing piece, 72: filter, 73: cover, 74: annular portion, 75: radial protective arm portion.

   ─────────────────────────────────────────────────── ─── Continued front page    F-term (reference) 3E084 AA05 AA14 AB10 BA02 CA03                       DA03 DB14 FA09 GA01 GB01                       GB26 HA05 HB04 HD01 HD04                       LA15                 3E096 AA05 AA06 BA16 BA20 BA30                       BB04 CA02 CA08 CB03 DA02                       DA17 DA18 DB06 DB08 DC01                       FA03 FA09 FA20 FA22 FA31                       GA01 GA07                 5F031 CA02 DA08 EA12 EA14 EA18                       NA14 NA18 NA20

Claims (7)

[Claims] 1. A container for storing and storing thin plates, comprising: a container body for accommodating and supporting a plurality of thin plates; and a lid body for closing the container body to keep the inside clean. A double sealing mechanism for hermetically sealing the inside of the container body, the double sealing mechanism being attached to a peripheral portion of the lid body, and an inner sealing piece for sealing the inside of the container body by contacting the container body side; It is composed of an outer seal piece that is attached to the outside of the inner seal piece of the peripheral portion of the lid body and abuts against the container body side to seal the abutting portion between the inner seal piece and the container body. Characteristic storage and storage container for thin plates. 2. The thin plate storage / storage container according to claim 1, wherein the inner seal piece is formed in an annular flat plate shape, and an inner end portion in the normal direction is supported by the lid body side. A seal pressing portion that extends outward in the direction and is formed in an annular shape on the inner side surface of the peripheral portion of the lid body to abut and press the outside of the inner seal piece, and the lid body is attached to the container body. In the state, a seal receiving portion, which abuts the inner seal piece from the inside and sandwiches the inner seal piece between the inner seal piece and the inner seal piece, is formed annularly so as to face the seal press portion. Storage / storage container for. 3. The thin plate storage / storage container according to claim 1, wherein a bulge portion is formed over the entire circumference at the outer end in the normal direction of the inner seal piece of the double seal mechanism, A storage / storage container for thin plates, wherein a fitting groove into which the bulge is fitted is formed in a seal receiving portion on the container body side. 4. A container body for accommodating and supporting a plurality of thin plates, a lid body for closing the container body to keep the inside clean, and a lid body provided on the lid body for fixing the lid body to the container body side. In a thin plate storage / storage container configured to include fixing means, the lid fixing means is rotatably attached to a latch shaft that linearly extends and retracts from the lid and a tip of the latch shaft. The latch roller is formed on the container body side so as to be inclined so as to open outward toward the latch roller side, and the latch roller comes into contact with the extension of the latch shaft to rotate. A storage / storage container for thin plates, which is provided with a lid drawing-in surface for drawing the lid toward the container body. 5. A container body for accommodating and supporting a plurality of thin plates, a lid body for closing the container body to keep the inside clean, and a lid body provided on the lid body for fixing the lid body to the container body side. In a thin plate storage / storage container configured to include a fixing unit, the lid fixing unit includes a crank mechanism for moving the locking piece into and out of the lid by rotating the lid mechanism. Includes a rotating plate that directly engages and rotates the locking piece to move the locking piece in and out, and a supporting piece that supports rotation of the rotating plate, wherein the supporting piece is A pin receiving portion for individually fitting and supporting a plurality of locking pins provided on the rotary plate with the locking piece extended from the lid body, and elastically supporting the plurality of pin receiving portions. Elastic support that aligns the rotating plate with the set angle and position. A storage / storage container for thin plates, which is configured by including. 6. The container for storing and storing thin plates according to claim 1, wherein the container body is provided with a small hole, and dust is removed between the inside and outside of the container body, and only air is provided. A storage / storage container for thin plates, which is provided with a filter that allows entry and exit of the sheet, and a cover provided on the outside of the filter. 7. The thin plate storage / storage container according to claim 1, wherein the plurality of thin plates housed in the container body are supported one by one at regular intervals. A container for storing and storing thin plates, characterized in that, among the thin plate supporting portions provided with teeth, comb teeth for one thin plate are further provided on the uppermost stage.