JP2003166784A - Drying device for sheet - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To efficiently dry a sheet without causing turnups or creases. <P>SOLUTION: This drying device 1 is constituted of a lower side net conveyer 2, an upper side net conveyer 3 and a hot-air blowing nozzle 4 arranged above the upper side net conveyer 3 and/or below the lower side net conveyer 2 and blows hot air to the sheet S by the hot-air blowing nozzle 4 from upward and/or downward of the sheet S with pinching and carrying the sheet S by the lower side net conveyer 2 and the upper side net conveyer 3. Since the sheet S is pinched by the net conveyers 2, 3, turnups or creases are eliminated. <P>COPYRIGHT: (C)2003,JPO

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention
The present invention relates to a drying device applied when a sheet such as a substrate is dried with hot air.

[0002]

2. Description of the Related Art As shown in FIG. 5, a thin plastic sheet S such as an IC substrate is washed with water and then dried.
The upper and lower sides of the sheet S are nipped and conveyed by a roller type conveyor (21) having a large number of rollers (22), and hot air is blown from above.

The reason why such a roller type conveyor (21) is used is that hot air can pass through between the rollers (22), but it is a thin plastic sheet that is sandwiched between the upper and lower rollers (22). This is to prevent S from turning up due to wind pressure.

[0004]

However, when a flexible sheet such as a thin plastic sheet S is sandwiched by rollers, there is a problem that the traces of the rollers remain as streaks on the sheet.

[0005]

The present invention provides a lower net conveyor as a means for solving the above conventional problems.
(2), upper net conveyor (3), upper net conveyor (3) and / or lower net conveyor (2)
A hot air blowing nozzle (4) arranged below, and conveys the sheet S while sandwiching it between the lower net conveyor (2) and the upper net conveyor (3), and above and And / or a sheet drying device (1) for blowing hot air onto the sheet S from below by a hot air blowing nozzle (4). The material of the net conveyor (2, 3) is preferably made of a water repellent material, and the hot air blowing nozzle
(4) consists of a pipe-shaped body with a plurality of diagonal slit-shaped hot air blowing openings (5) on the blowing surface. It is desirable to incline to the left, incline to the right from the center toward the conveyor advancing direction, and to have the spraying area continuous over the entire width.

[0006]

Since the sheet S is sandwiched by the lower net conveyor (2) and the upper net conveyor (3), it is eliminated by the hot air pressure rather than curling up and wrinkles. The hot air blowing nozzle (4) is composed of a pipe-shaped body having a plurality of oblique slit-shaped hot air blowing ports (5) on the blowing surface, and the hot air blowing port (5) is located from the center to the left side. If the spraying area is set to be inclined to the right toward the direction C and the spraying area is continuous over the entire width, the cleaning liquid adhering to the front surface and / or the back surface of the sheet S is Five)
The hot air blown from the sheet orients it to the outside of the sheet S and removes it, and the sheet S is also pushed to the outside, so that it is more reliably eliminated from turning up and wrinkles.

[0007]

BEST MODE FOR CARRYING OUT THE INVENTION The present invention will be described with reference to an embodiment shown in FIGS. 1 to 4. In a sheet drying apparatus (1) shown in the drawing, (2) is a lower net conveyor and (3) is an upper net conveyor. The net conveyors are both net conveyors (2, 3), which are, for example, nets shown in FIG. 2A, turtles shown in B, or nets made of Gobang, and the material of the nets is polytetrafluoroethylene or nylon. It is desirable to use a water repellent material obtained by subjecting polyester or the like to a water repellent treatment.

On the upper side and the lower side of the middle part of the net conveyor (2, 3), there are a pair of square tubular hot air blowing nozzles (4) provided with hot air blowing ports (5) on the blowing surface. It is arranged.

The hot air blowing port (5) provided on the lower surface of the hot air blowing nozzle (4) has a slit-like shape as shown in FIG. It is inclined to the left (outside), and from the center to the right toward the conveyor traveling direction from the right side (outside), the left and right spray ports (5) overlap in an X shape in the center. There is. The hot air blowing width W ₁ of each blowing port (5) is set so that both ends thereof overlap with each other and the blowing area is not interrupted (continuous) over the entire width W.

In the case of the IC substrate drying device (1), for example, the width of the net conveyors (2, 3) is set to about 550 mm and the nozzle interval I is set to about 60 mm.
The distance between (2,3) and the nozzle spray surface is set to 10 mm or less.

When the sheet S is an IC substrate, for example, 3
It is a rectangle of 00 × 600 mm and a square of 500 × 500 mm, and after cleaning the sheet S, it is sandwiched between the upper and lower net conveyors (2, 3) and conveyed in the direction of arrow A in FIG. 3 and hot air not shown in the nozzle (4). Hot air is sent from the circuit, and hot air is blown to the front and back surfaces of the sheet S from the blowing port (5) of the nozzle (4) to dry.

At this time, since the slit-shaped spray port (5) of the nozzle (4) is inclined outwardly, the cleaning liquid adhering to the front and back surfaces of the sheet S is directed to the sheet S as shown by the arrow in FIG. Excluded to both outsides, effective drying is performed, and the sheet S
Is pushed outward and is more reliably stretched out than the curling up and wrinkles of the sheet S and eliminated.

The cleaning liquid on the front and back surfaces of the sheet S adheres to the net conveyor (2, 3), but when the material of the net conveyor is a water repellent material, the cleaning liquid adhered to the net is easily blown off by hot air, When the net goes around, it becomes almost completely dry.

When the sheet S is an IC substrate, the hot air temperature is usually set to about 40 to 100 ° C.

The above embodiment is not intended to limit the present invention. For example, when the sheet S is washed only on one side, the hot air blowing nozzle (4) is arranged on only one side. Further, the hot air blowing nozzle (4) may have a triangular cross section, a semi-cylindrical shape or the like.

[0016]

According to the present invention, the sheet is efficiently dried without causing curling up and wrinkling.

[Brief description of drawings]

1 to 4 show an embodiment of the present invention.

FIG. 1 is an explanatory side view.

[Fig. 2] Net conveyor explanatory diagram

FIG. 3 is a plan view of the nozzle spray surface.

FIG. 4 is an explanatory view of a hot air blowing state.

FIG. 5 is a perspective view of a conventional example.

[Explanation of symbols]

1 sheet dryer 2 Lower net conveyor 3 Upper net conveyor 4 Hot air blowing nozzle 5 Hot air outlet S sheet

[Procedure amendment]

[Submission date] November 30, 2001 (2001.11.
30)

[Procedure Amendment 1]

[Document name to be amended] Statement

[Correction target item name] 0006

[Correction method] Change

[Correction content]

[0006]

Since the sheet S is sandwiched by the lower net conveyor (2) and the upper net conveyor (3), it is eliminated by the hot air pressure rather than curling up and wrinkles. The hot air blowing nozzle (4) is composed of a pipe-shaped body having a plurality of oblique slit-shaped hot air blowing ports (5) on the blowing surface, and the hot air blowing port (5) is located from the center to the left side. If it is set so that it is inclined to the left toward the conveyor advancing direction, is inclined to the right from the center toward the conveyor advancing direction, and the spraying area is continuous over the entire width,
The cleaning liquid adhering to the front surface and / or the rear surface of the sheet S is directed to the outside of the sheet S by the hot air blown from the blowing port (5) and is removed, and the sheet S is also pushed to the outside and turned up. It is eliminated more reliably than wrinkles.

   ─────────────────────────────────────────────────── ─── Continued front page    F term (reference) 3L113 AA02 AA03 AB03 AC69 AC74                       BA34 DA24

Claims (3)

[Claims] 1. A lower net conveyer, an upper net conveyer, and a hot air blowing nozzle arranged above the upper net conveyer and / or below the lower net conveyer, wherein a sheet is transferred to the lower net conveyer. A sheet drying apparatus, characterized in that hot air is blown onto the sheet from above and / or below by a hot air blowing nozzle while being sandwiched between the upper net conveyor and the upper net conveyer. 2. The sheet drying apparatus according to claim 1, wherein the material of the net conveyor is a water repellent material. 3. The hot air blowing nozzle comprises a pipe-shaped main body having a plurality of oblique slit-shaped hot air blowing openings provided on the blowing surface, and the hot air blowing opening extends from the center to the left side in the traveling direction of the conveyor. 3. The structure is inclined to the left and to the right from the center toward the conveyor traveling direction from the center to the right, and the spraying area is continuous over the entire width.
Sheet drying device