JP2003156326A - Apparatus, method, and program for measuring surface properties - Google Patents

Abstract

PROBLEM TO BE SOLVED: To eliminate the need for preliminary measurement, since measurement and analysis conditions are automatically determined based on design value data, and to greatly relieve the burden on an operator, since the decisions as to the kinds of a figure element or the like is not required in the decision of the analysis conditions. SOLUTION: CAD data that are objects to be measured are read from a CAD system 29 for displaying a CAD data figure 30 on the screen of a CRT 5. Based on the CAD data, the measurement range of an apparatus 1 for measuring a contour shape is specified by a mouse 4 or the like. Based on the CAD data contained in the specified range, it is decided under what conditions measurement is to be made, and the measured result is analyzed.

Description

Detailed Description of the Invention

[0001]

TECHNICAL FIELD The present invention relates to a contour of an object to be measured,
The present invention relates to a surface texture measuring device for measuring a surface texture such as a two-dimensional shape, a three-dimensional shape and a surface roughness.

[0002]

2. Description of the Related Art When measuring surface properties such as roughness, waviness, contour, roundness, and three-dimensional shape of an object to be measured, it is necessary to select a measurement point on the object to be measured and set measurement conditions. . However, when the measurement location is minute or highly accurate processing is performed, precise measurement close to the performance limit of the measuring machine is required, and it is not easy to set measurement conditions and analysis conditions for measurement results. Instead, it was necessary to repeat measurement and analysis while fine-tuning various conditions by trial and error. In such a case, it takes a lot of time because the measurement is performed many times, and in the case of a stylus type measuring machine, the cause of fine scratches caused by tracing the same location many times It was also a very inefficient measurement work.

With respect to such a problem, Japanese Patent No. 2688030
In the publication, after the measurement range is set wide with a low measurement magnification and preliminary measurement of the DUT is performed, this measurement result is displayed on the screen and the measurement start point in the main measurement is specified with reference to this result. However, there is proposed a surface texture measuring machine having improved measurement efficiency by performing measurement at a predetermined measurement magnification. Further, in Japanese Patent No. 2902163, the result of preliminary measurement of the object to be measured is displayed on the screen, and a surface texture measuring machine for designating a measurement range from the result, or an optimum range is calculated from the designated measurement range. A surface texture measuring machine has been proposed.

On the other hand, when the main measurement is carried out in this manner and data (measured data point sequence) is obtained, surface property analysis such as roughness analysis or shape analysis is performed on each part of the data. There is. That is, it may be necessary to analyze whether the shape of each part of the measurement data point sequence is a straight line, a circle, an ellipse, a parabola, a hyperbola, or the roughness or waviness of each part. In this surface texture analysis, the operator has to display the measurement data point sequence on the screen and then perform analysis individually by specifying the analysis location and analysis conditions, which requires a lot of time and is inefficient. It was working.

To address this problem, Japanese Patent No. 3020081 proposes a contour shape measuring method for automatically discriminating the type of measurement data. This contour shape measuring method is
(A) Entering geometric shape determination conditions, (b) measuring the work to obtain shape data, (c) differentiating the shape data twice to temporarily set the geometric shape boundary of the shape data,
(D) The geometric shape calculation region of the shape data is set except for the vicinity of the temporarily set geometric shape boundary, the vicinity of the measurement start point, and the vicinity of the measurement end point, and (e) the set geometric shape calculation. For each region, the geometric shape value is calculated while determining the geometric shape of the shape data based on the geometric shape determination condition, and (f) the geometric shape boundary value is calculated from the calculated geometric shape value, ( G) The calculated geometric shape value and geometric shape boundary value are output.

[0006]

Even in the surface texture measuring machine disclosed in Japanese Patent No. 3020081, at least 1
Preliminary measurement needs to be performed once, and when the measurement location is fine, it may be necessary to perform multiple preliminary measurements to identify the measurement location. However, even in the case of such preliminary measurement, repeating many times requires a lot of time, and in the case of a stylus type measuring machine, it may cause the generation of minute scratches as described above. , There was room for improvement in measurement efficiency.

Further, even in the conventional improved contour shape measuring method, it is necessary for the operator to set and input the judgment condition for automatic judgment in advance. If this judgment condition is not appropriate, There was a possibility that the shape analysis would be wrong.
Further, since the shape boundary is automatically provisionally set by the second differentiation, for example, a minute discontinuity generated at a joint in a machining process may be mistaken as a shape boundary, and a shape analysis result different from that assumed at the time of design may be obtained. There was a case.

The present invention has been made in view of the above problems, and an object of the present invention is to provide a surface texture measuring device which does not require preliminary measurement and which can easily set measurement conditions and analysis conditions. .

[0009]

[Means for Solving the Problems] To achieve the above object,
A surface texture measuring method according to a first aspect of the present application, a step of acquiring design value data of an object to be measured, a step of displaying the design value data, based on the displayed design value data, When measuring a measurement object, a step of designating a measurement range, a step of extracting information of the design value data included in the designated measurement range, and a measurement condition in the measurement range is determined based on the information. And a step of displaying the determined measurement condition. According to the first aspect of the present invention, the acquired design value data is displayed.
The operator specifies the measurement range by looking at the displayed design value data. Information of the design value data included in the designated measurement range is extracted, and various measurement conditions are generated based on this information. The measurement result thus measured is displayed. That is, since the measurement conditions are generated from the design value data, it is not necessary to perform preliminary measurement.

In the first invention, in the step of extracting the information, the step of extracting the information on the height difference of the design value data included in the designated measurement range and determining the measurement condition include It is possible to determine the reference position when the object to be measured is measured based on the information regarding the height difference.

In the first aspect of the invention, the step of extracting the information includes the step of extracting information on the height difference of the design value data included in the designated measurement range and determining the measurement condition. It is possible to determine the measurement magnification when measuring the object to be measured based on the information regarding the height difference.

In the first invention, the method further comprises a step of designating a measurement pitch when the object to be measured is measured, and the step of determining the measurement condition includes determining the object to be measured based on the measurement pitch. When measuring, the measuring speed can be determined.

In the first aspect of the present invention, the step of determining the measurement condition may determine the inclination of the object to be measured which minimizes the height difference based on the information regarding the height difference.

The first aspect of the present invention may further include the step of editing the displayed measurement conditions.

A surface texture measuring method according to a second invention of the present application, the step of measuring the surface texture of the object to be measured, the step of acquiring design value data of the object to be measured, and displaying the design value data. And a step of designating an analysis range for analyzing the measurement result based on the displayed design value data, a step of extracting information of the design value data included in the designated analysis range, and an extraction It is characterized by comprising a step of determining an analysis condition for analyzing the measurement result based on the information of the determined design value data, and a step of displaying the determined analysis condition. According to the second invention, the acquired design value data is displayed. The operator designates the analysis range by looking at the displayed design value data. The information of the design value data included in the designated analysis range is extracted, and the analysis condition is generated based on this information. The analysis conditions thus determined are displayed. Since the analysis conditions are automatically determined based on the design value data, the operator's labor for seeing the measurement result and inputting the analysis conditions is reduced.

In the second aspect of the present invention, the step of determining the analysis condition may be such that the analysis condition is determined based on information regarding the type of basic figure forming the design value data. Further, in the step of determining the analysis condition, when the basic figures are included in the analysis range, the analysis condition may be determined based on the relationship between the basic figures. Further, in the step of determining the analysis condition, when a plurality of straight lines are included in the analysis range as the basic figure, the analysis condition for calculating an angle formed by the plurality of straight lines may be determined. it can. Alternatively, the step of determining the analysis condition may be such that, when straight lines parallel to each other are included as the basic figure in the analysis range, the analysis condition for calculating the distance between the parallel straight lines is determined. it can. Alternatively, the step of determining the analysis condition may be configured to determine the analysis condition for calculating the pitch between the basic figures when a plurality of basic figures of the same type are continuous.

Further, in the step of determining the analysis condition in the second invention, the vicinity of the boundary of the basic figure can be excluded from the analysis target in the analysis step. Further, in the step of determining the analysis condition in the second aspect of the invention, the analysis condition may be determined using information regarding the shape and size of the basic figure as reference data.

In the second invention, it is possible to further comprise a step of editing the displayed analysis conditions.

Further, in the step of acquiring the design value data of the object to be measured in the first or second invention, processing condition data for processing the object to be measured is further acquired and integrated into the design value data. You can also choose to do so.

The surface shape measuring method according to the first or second invention may be executed by a computer program.

A surface texture measuring apparatus according to a third aspect of the present application is a surface texture measuring means for measuring the surface texture of an object to be measured, and a design value data acquiring means for acquiring design value data of the object to be measured. Display means for displaying the design value data, measurement range designating means for designating a measurement range by the surface texture measuring means based on the design value data displayed on the display means, and included in the designated measurement range. Information extracting means for extracting information of the design value data, measurement condition determining means for determining measurement conditions by the surface texture measuring means in the measurement range based on the information, and the determination conditions determined by the measurement condition determining means And a measurement condition display means for displaying the measurement condition.

According to the third aspect of the invention, the acquired design value data is displayed by the display means. The operator
The design range data is displayed on the display means, and the measurement range is designated by the measurement range designating means. Information of the design value data included in the designated measurement range is extracted by the information extraction means, and various measurement conditions are generated by the measurement condition generation means based on this information. The measurement result thus measured is displayed on the display means. That is, since the measurement conditions are generated from the design value data, it is not necessary to perform preliminary measurement.

A surface texture measuring device according to a fourth aspect of the present application is a surface texture measuring means for measuring the surface texture of an object to be measured, and a design value data acquiring means for acquiring design value data of the object to be measured. Display means for displaying the design value data, and measurement range designating means for designating an analysis range for analyzing the measurement result obtained by the surface texture measuring means based on the design value data displayed on the display means, Information extraction means for extracting information of the design value data included in the specified measurement range, analysis means for analyzing the measurement result by the surface texture measurement means, and the information based on the information from the information extraction means It is characterized by further comprising: an analysis condition determination means for determining an analysis condition by the analysis means; and an analysis condition display means for displaying the analysis condition determined by the analysis condition determination means.

According to the fourth aspect of the invention, the acquired design value data is displayed by the display means. The operator
The analysis range is designated by looking at the design value data displayed on the display means. Information of the design value data included in the designated analysis range is extracted by the information extraction means, and analysis conditions are generated by the analysis condition generation means based on this information. The analysis condition thus determined is displayed on the display means. Since the analysis conditions are automatically determined based on the design value data, the operator's labor for seeing the measurement result and inputting the analysis conditions is reduced.

[0025]

BEST MODE FOR CARRYING OUT THE INVENTION [First Embodiment] Next, an embodiment of the present invention will be described in detail by taking as an example the case where the present invention is applied to a contour shape measuring apparatus. As shown in FIG. 1, the contour shape measuring apparatus 1 includes a probe 11. The probe 11 is held by the probe holding portion 12, and is rotatably supported by the probe holding portion 12 so as to draw an arc around a fulcrum. This probe 1
The rotation amount of 1 can be detected by a rotation sensor (not shown) and is output to the computer 2 as a detection signal. The probe holding part 12 is provided by the horizontal feeding device 13.
It is held slidably in the X-axis direction shown in FIG. The horizontal feeder 13 is configured to be movable in the Z-axis direction shown in FIG. 1 with respect to the column 15 by the vertical feeder 17.

A mounting table 14 for mounting the object 6 to be measured is arranged on the base 16, and the mounting table 14 is placed.
Is configured to be movable on the base 16 in the Y-axis direction shown in FIG. Further, the positions of the probe holder 12, the horizontal feeder 13, and the mounting table 14 are respectively determined by the position sensor 1
These position sensors 12S, 13 detected by the 2S, 13S, 14S and when the probe 11 contacts the object to be measured.
The outputs of S and 14S are output to the computer 2 as position data. The computer 2 executes information processing based on inputs from the keyboard 3 and the mouse 4, and outputs the result to the display 5.

FIG. 2 is a block diagram showing the configuration of the computer 2 and its peripherals. As shown in FIG. 2, after the detection signal of the probe 11 is amplified by the preamplifier 21,
Is converted into a digital value by the / D converter 21a and the CPU 22
Entered in. The amplification factor of the preamplifier 21 is determined based on the signal from the measurement magnification output circuit 21b. The measurement magnification is determined by the measurement condition generation program described later.

The probe 11 is moved in the X direction at a predetermined speed by the horizontal feeder 13. This moving speed is generated by the measurement condition generating program described later, and the value corresponding to the generated measured speed value is the measured speed output circuit 1
It is output from 3a. Then, this value is the DA converter 13
b is converted into an analog value and is PWM-modulated in the pulse width modulator 13c.
Sent to. Thereby, the horizontal feeder 13 is driven in the X direction at the generated speed.

Thus, the detection signal of the position sensor 12S,
Also, the detection signal from the probe 11 is input to the CPU 22, whereby the measurement data of the DUT 6 can be obtained. That is, each detection signal fetched by the CPU 22 is temporarily stored in the hard disk 24 via the interface 23, and the measurement data stored in the hard disk 24 is transferred to and stored in the RAM 27 as necessary, and the display control unit is also provided. 25, whereby the measurement data is displayed on the display 5.

The vertical feed device 17 includes a vertical movement output circuit 17a, a pulse generator 17b, and a pulse counter 17c.
It is connected to the CPU 22 via. The vertical movement output circuit 17a generates a vertical movement signal corresponding to the reference position of the probe 11 in the Z direction determined by the measurement condition generation program described later, and outputs the signal to the pulse generator 17b. Have a function. Pulse generator 1
7b generates a pulse signal corresponding to this vertical movement signal. Then, this pulse signal is applied to the pulse counter 17
Counted as c. As a result, the vertical feeding device 17 is driven in the Z direction by a predetermined distance, and the reference position of the probe 11 in the Z direction is determined.

The ROM 28 stores a measurement condition generation program and calculation contents / calculation procedure generation program, which will be described later. Further, the keyboard 3 and the mouse 4 are connected to the CPU 22 via the interface 26.

The CAD system 29 is connected to the CPU 22 via the interface 29a. After the CAD data from the CAD system 29 is fetched by the CPU 22, after receiving predetermined information processing by the display control unit 25,
It is displayed as a figure on the screen of the CRT 5. The contour shape measuring apparatus 1 is configured as described above. Normal measurement of the DUT 6 by the contour shape measuring apparatus 1 is performed as follows. First, after the object 6 to be measured is placed on the mounting table 14, the vertical feed device 17 is driven and the probe 11 is pulled up to a position where it does not interfere with the object 6 to be measured. Next, the horizontal feeder 13 is driven to move the probe 11 forward, and the probe 11 is positioned above the object to be measured.

After that, the position of the mounting table 14 is finely adjusted and Y
The measurement position in the direction is determined, and the vertical feed device 17 is further driven to lower the probe 11 so that the stylus at the tip of the probe 11 is brought into contact with the DUT 6 and the computer 2
Set the measurement distance, measurement pitch, measurement speed, measurement magnification, etc. to complete the measurement preparation. After this, computer 2
When the measurement start is instructed to, the horizontal feed device 13 starts driving the probe 11 in the X direction (right direction in FIG. 1) at the set measurement speed. When the stylus rotates up and down according to the unevenness of the surface of the DUT 6, the detection result is output, and the computer 2 amplifies the detection result according to the measurement magnification and then the amplification result for each measurement pitch. Is taken in and converted into digital data, and the result is stored / stored in the RAM 27 or the like. After that, when the probe 11 completes driving the preset measurement distance, it stops.

When the measurement is completed, the stored / stored measurement data is taken out, the measurement data is analyzed under separately set analysis conditions and the result is displayed on the display 5, or a peripheral device such as a printing device not shown. Is output to. In this normal measurement operation, the optimum measurement conditions and analysis conditions are unknown, so the measurement conditions of the object 6 are sought while performing several measurements.

For example, when the position of the probe 11 when the probe 11 is lowered by the vertical feed device 17 and the stylus is brought into contact with the DUT 6 is too high with respect to the DUT 6, Since 11 is in contact with the object to be measured 6 while rotating downward, the stylus may not reach the valley bottom portion of the object to be measured 6 during measurement. On the other hand, when the reference position is too low with respect to the object 6 to be measured, the probe 11 is in contact with the object 6 to be measured in a state of being rotated upward, so that the object 6 to be measured is measured. The probe 11 is excessively rotated upward at the mountain top portion of the above, which may cause damage to the probe 11. Therefore, the probe 1 is set at a reference position such that both the valley bottom and the peak in the measurement range of the DUT 6 are within the rotation range of the probe 11.
1 must be positioned. That is, there is an optimum rotation angle of the probe 11 at the measurement start position. The reference position indicates the value of the detection output of the probe 11 at this optimum rotation angle.

The posture of the probe 11 at the measurement start position shown here does not always coincide with the center of rotation (parallel to the X direction). Furthermore, when the DUT 6 at the measurement end position is too high or too low with respect to the measurement start position of the DUT 6, the measurement surface of the DUT 6 is in the measurement direction (X direction). Since there is a possibility that it is inclined with respect to it, it is necessary to adjust this inclination by the mounting table 14.

In the analysis of the measurement data, it is sometimes difficult to determine from the display result of the measurement data on the display 5 whether a certain portion should be analyzed as an arc having a large radius of curvature or a straight line. The setting of requires trial and error. On the other hand, in the present embodiment, design value data (usually CAD data is used for setting measurement conditions or analysis conditions, but if necessary, processing of CAM data etc. when the DUT 6 is processed is performed. Condition data is also used together.), Guidance can be given to the operator, and various conditions can be set automatically or semi-automatically depending on the machining shape of the workpiece 6. .

Next, specific processing when the measurement condition generation program and the analysis condition generation program are executed will be described.
This will be described with reference to the flowchart shown in FIG. First, the operator uses the keyboard 3 or the mouse 4 to instruct to read the CAD data of the DUT 6 (S1). Then, the CAD data is read from the CAD system 29 or the hard disk 24 and displayed as a CAD data graphic 30 on the display 5, as shown in FIG.

Then, a range to be measured is selected on the CAD data graphic 30 (S2). As shown in FIG. 4 (a), the line 3
The display positions of 1 and 32 are changed and confirmed by using the mouse 4 or the like. Pointer P of mouse 4 with line 31
Further, after adjusting to the vicinity of 32, the position of the line 31 or 32 can be moved by moving the mouse 4 left and right while pressing the left button of the mouse 4. Keyboard 3
The position may be adjusted with the cursor keys or the like.

When the designation of the lines 31 and 32 is completed, the data relating to the basic figure element of the CAD data contained in the lines 31 and 32 is extracted from the read CAD data. For example, CAD included in the lines 31 and 32
The coordinates of the highest height point and the coordinates of the lowest height point of the data are extracted. Next, the X coordinate Xo of the position where the measurement is started and the measurement pitch Δm are determined (S3). Figure 4 shows the determination of Xo.
As shown in (b), the position of the line 33 displayed on the CAD data graphic 30 can be adjusted by using the mouse 4 or the like. Further, the measurement pitch Δm can be input by the cursor key of the keyboard 3.

The step of designating the position of the line 33 may be omitted by setting the position of the line 31 as the measurement start position.

Next, various measurement conditions are automatically generated (S4). In the present embodiment, measurement conditions such as the reference position Zo of the probe 11 in the Z direction, the measurement magnification M, the measurement speed S, and the inclination T of the DUT 6 are automatically generated. Reference position Z
As described above, o is obtained from the coordinates of the highest height point, the coordinates of the lowest height point, and the position where the measurement is started in the CAD data extracted in S2. When the reference position Zo is generated, the vertical feed device 17 positions the probe 11 so that the detection output of the probe 11 matches the reference position Zo. Further, the measurement magnification M is determined based on the maximum value and the minimum value (height difference) of the Z axis in the measurement target range determined in S2. When the measurement magnification M is determined, the amplification factor of the preamplifier 21 is controlled by the measurement magnification output circuit 21b and reflected in the detection signal from the probe 11.
Further, the measurement speed S is determined based on the measurement pitch Δm.

Further, as the inclination T of the object 6 to be measured, the inclination of the object 6 to be measured is determined so that the height difference in the measurement object range determined in S2 is minimized. For example, FIG.
The minimum position of the linear element L2 position and the minimum value of the hyperbolic element H1 in FIG. On the other hand, when the entire profile (contour) indicated by the design value data (CAD data) is slightly raised on the right side (rotating the entire profile in the counterclockwise direction), the height difference decreases. The angle at which this height difference is the minimum is the tilt T of the DUT 6.
Becomes When the inclination T of the measured object 6 is determined, the inclination of the measured object mounting surface of the mounting table 14 is adjusted automatically or manually. Further, since the coordinate value of the design value data changes as the profile rotates, this inclination correction is performed and a new coordinate value is calculated. If the height difference of the measurement target range is reduced in this way, it is possible to select a higher measurement magnification, so that the measurement magnification M is redetermined as necessary.

Next, the analysis condition for analyzing the measurement data point sequence as the measurement result obtained under the above measurement conditions is determined. Here, within the measurement target range determined in S2, the measurement start position (line 33) to the measurement end position (line 32) are the analysis target range. However, the analysis target range can be determined independently of the measurement target range.

First, in the analysis target range, a range to be excluded from the analysis target is selected (S5). In the case of the contour shape measuring apparatus according to the present embodiment, the obtained measurement data point sequence is compared with CAD data and an analysis for obtaining the error is executed. At the time of the comparison, for example, FIG.
As shown in (a), two straight line graphic elements Lq and Lq +
When 1 and 2 are adjacent to each other, the data corresponding to before and after the point Pq at which Lq and Lq + 1 are connected are to be excluded from the comparison target. When the adjacent figures can be processed without causing a shape error, this exclusion range can be set to zero as shown in FIG. 5B.

On the other hand, depending on the type and conditions of the adjacent graphic elements, the corner portions may not be processed well, and in this case, the predetermined part adjacent to the graphic elements should be excluded from the analysis target. You can For example, since the tip of a turning tool (bite) is usually curved, an R shape (so-called corner R) is formed depending on the adjacent portion of the graphic element, resulting in a shape error. Further, depending on the processing machine, minute projections may occur due to the effect of backlash at the switching points of the cutting direction at the apex of an arc shape, for example. Therefore, in the analysis, it is possible to improve the accuracy of the analysis by excluding these portions.

Next, the analysis condition for analyzing the measurement data point sequence as the measurement result obtained under the above measurement condition is automatically generated (S6). That is, what kind of content is to be analyzed and in what procedure is determined.
As is well known, CAD data consists of a set of basic figures such as arcs, straight lines, and hyperbolas. FIG. 6 shows an example of CAD data together with its data structure. Figure 6
(A) is a display example when CAD data is expanded on the screen of the CRT 5, and a plurality of basic graphic elements including linear elements L1-L9, arc elements C1-C2, and hyperbolic elements H1-H3 are displayed. ing.

Each of these basic graphic elements (L1-L9, C
The data on 1-C2, H1-H3) is composed of data on the type of shape (arc, straight line, hyperbola) and data on its position and size. As shown in FIG. 6B, the data relating to the type of shape of these one basic graphic element and the data relating to its position and size are combined into one basic graphic element data set f1, f2.
... is stored in association with.

One basic figure data set fi is composed of a header portion 41 and a data portion 42. The header portion 41 stores data on the type of shape, and the data portion 42 stores data on position and size. . For example, the data regarding the linear element L1 shown in FIG.
As shown in (b), the symbol L1 indicating the type of the shape is stored in the header portion 41, and the data (x
0, y0, z0) and end point coordinate data (x1, y1, z)
The data of 1) is stored in the data section 42. The same applies to the other linear elements L2-L9.

Further, in the data regarding the circular arc element C1 shown in FIG. 6A, the symbol C1 indicating the type of the shape is stored in the header portion 41, and the circle center coordinate data (cx1, cz).
1), radius data r1, angle data θ (θ1 and θ2), etc. are stored in the data section 42. The same applies to the circular arc element C2.

Data relating to the hyperbolic element H1 is
The symbol H1 indicating the type of the shape is stored in the header section 41, and the focus coordinate data (Fx1, Fz1) and the tilt data g are stored.
1 is stored in the data section 42. Hyperbolic elements H2, H
3 is also the same.

In this embodiment, the CPU 22 controls the C
From the AD system 29, data regarding the type of shape and the data regarding the position and size of the basic graphic elements (L1-L9, C1, C2, H1, H3) included in the designated measurement range are extracted. Then, the extracted data is stored in the hard disk 24 as reference data for analyzing the measurement result.

Further, in this S6, what kind of calculation is to be performed on the measurement result is determined by the basic graphic elements (L1-L9, C1,
C2, H1-H3) based on the type information. An example of a method of determining the type of calculation content will be described with reference to FIG. 7. For example, as shown in FIG. 7A, when the straight line elements Ln and Ln + 1 intersect at an angle, the angle α formed by the adjacent graphic elements L1 and L2 is calculated.
In addition, as shown in FIG. 7B, adjacent linear elements Lm
And Lm + 1 are parallel to each other, the orthogonal distance (step Δh) between these two elements Lm and Lm + 1 is calculated.

When basic graphic elements of the same type having the same size appear continuously, for example, FIG. 7C.
, The hyperbolic elements Hm-1, H of the same size
When m and Hm + 1 appear consecutively, the interval P1-P2 (pitch) where the element H appears is calculated.

The measurement conditions and analysis conditions thus input and generated are displayed on the monitor 5 as shown in FIG. 8 (S
7). Measurement magnification M, measurement pitch Δm, measurement speed S, etc. are C
It is displayed as a numerical value in the upper right corner of the screen of RT5, and the range 35 to be excluded from the X coordinate Xo of the measurement start position and the analysis target.
Are displayed in a superimposed manner on the CAD data graphic 30. Further, the analysis procedure is indicated by the numeral 1-7 above each basic figure element, and the figure below the CAD data figure 30 corresponds to the numeral 1-7, and which figure is the reference for analysis. Whether or not it is displayed is displayed with characters L1-L5 and C1-C2.

The fact that the angle calculation is performed is displayed on the angle calculation display 36, and the fact that the step calculation is performed is displayed on the step calculation display 37. When the operator sees these displays and judges that the editing is necessary (S8), he or she performs the editing work on this screen (S9). For example, when it is considered that the angle calculation is unnecessary, the angle calculation display 36 can be double-clicked with the mouse 4 to delete the display.
If you decide that editing is not necessary, or if editing is complete,
Click the “OK” icon 34. This completes the generation of the measurement condition and the analysis condition (S10). Since the generated measurement conditions and analysis conditions are stored in the hard disk 24, thereafter, measurement or analysis can be performed using these conditions at any time.

In order to measure the workpiece 6 under these measurement conditions, it is necessary to match the coordinate system of CAD data with the coordinate system of the workpiece.
One or more standard points are provided on both the data and the object to be measured, and the coordinate points are set so that the standard point coordinate values of the CAD data when the probe is positioned at these standard points and the object coordinate values are matched. Should be done. Further, when the measurement data of the workpiece 6 is analyzed under this analysis condition, a standard point is similarly provided, and the standard point coordinate value of the CAD data at this standard point and the coordinate value of the workpiece are matched. In addition to the method of obtaining the measurement data from above, after obtaining the measurement data, the CAD data or the measurement data is coordinate-converted so that the coordinate value of the standard point of the CAD data at this standard point and the coordinate value of the measured object match. Good as a method. Further, a so-called best-fit method may be used in which the CAD data or the measurement data is positioned by the least square method so that the error is minimized and the coordinate conversion is performed.

The object 6 to be measured is measured by the surface texture measuring device 1 using the measurement conditions generated as described above.
The measurement data obtained by measuring the DUT 6 with the surface texture measuring device 1 is analyzed using the analysis conditions generated above, and the result is displayed on the display 5 or printed on a printer or plotter. Or store it in an internal or external storage device, or output it to an external device as needed.

According to the first embodiment, the following effects are obtained. (1) Read the CAD data, display the contents on the screen to specify the measurement range, and the operator interactively inputs the minimum necessary data such as the measurement start point, and the measurement conditions are automatically generated. To be done. Therefore, it is possible to easily generate the optimum measurement conditions for the main measurement without performing the preliminary measurement, so that the preliminary measurement does not cause scratches on the object to be measured, and the setup efficiency of the measurement and the efficiency of the measurement itself are improved. (2) Since the measurement conditions are automatically generated, it is possible to reduce the chances of human error due to operator's misunderstanding and the like, and improve the measurement reliability. (3) The height difference is calculated by extracting the coordinates of the highest height point and the lowest height point from the CAD data of the measurement range, and the reference position for probe positioning at the measurement start point is determined based on this information. Therefore, it is possible to prevent so-called overrange in which the detection output deviates from the measurable range in the measurement range. Therefore, damage to the probe can be prevented and the reliability of measurement is improved.

(4) Further, since the reference position is determined, the measurement can be performed using the most accurate range of the probe measurement range (usually, the central portion of the entire measurement range). The maximum performance of can be brought out and the measurement accuracy is improved. (5) Since the measurement magnification is determined based on the information about the height difference, the measurement does not become too large or too small in the measurement, and the measurement can be performed only once, so that the measurement efficiency is improved. (6) Since the measurement magnification is determined based on the information on the height difference, the measurement data can be amplified to the maximum extent, the S / N ratio of the signal is improved, and highly accurate measurement data can be obtained. .

(7) Since the measurement speed is determined based on the measurement pitch, the maximum measurement speed can be determined within the range not deviating from the structural or electrical response frequency of the probe, and the measurement time can be shortened. As a result, the measurement efficiency is improved, and the detection output is guaranteed to be equal to or lower than the response frequency, so that the measurement accuracy is improved. (8) Since the inclination of the object to be measured that minimizes the height difference is obtained based on the information on the height difference, the inclination adjustment in the measurement setup of the object to be measured is facilitated and the setup efficiency is improved. (9) Based on the information on the height difference, the inclination of the measured object that minimizes the height difference is obtained, and the inclination of the measured object is adjusted by this inclination, so that the measurement magnification can be maximized. Therefore, the measured data can be amplified to the maximum extent, the S / N ratio of the signal is improved, and the measured data with high accuracy can be obtained.

(10) Based on the information on the height difference,
The inclination of the object to be measured that minimizes this height difference is obtained, and the inclination of the object to be measured is adjusted by this inclination.Before the inclination is adjusted, the height difference may exceed the measurement range of the probe. Even for the object to be measured, the height difference may be minimized by adjusting the inclination, and the object may be measured within the measurement range of the probe. (11) By simply reading the CAD data, displaying the contents on the screen, and the operator interactively specifying the analysis range, the analysis conditions are automatically generated. Therefore, the optimum analysis condition of the measurement data can be easily generated, and the analysis efficiency of the measurement data is improved. (12) Since the analysis conditions are automatically generated, it is possible to reduce the chance of human error due to operator's misunderstanding and the like, and the reliability of measurement data analysis is improved.

(13) Since the analysis conditions are generated from the CAD data in the analysis range based on the information about the type of basic figure, the reliability of analysis is much higher than that when the basic figure is estimated from the displayed measurement data. Improve to. (14) Since a predetermined part of the CAD data in the analysis range can be excluded from the analysis target, the uncut portion at the end of the shape (basic figure) generated during processing can be excluded from the analysis target. Improves reliability. (15) When the CAD data in the analysis range includes a plurality of basic figures, the analysis condition can be generated based on the relative relationship between these basic figures, so that the positional relationship between the basic figures (step, interval, pitch, etc.) ), Tilt (angle etc.) relationship,
Even in complicated analysis, analysis conditions are easily generated, and analysis efficiency is improved.

(16) Using the information about the shape and size of the basic figure included in the CAD data of the analysis range as reference data, the measured data are compared and errors (shape error, step error, interval error, pitch error, angle error) are compared. Since it is possible to easily generate an analysis condition for obtaining (), etc., if the measurement data is analyzed using this analysis condition, it is possible to easily and surely estimate the accuracy of the object to be measured and determine whether it is acceptable or not. (17) Measurement conditions and analysis conditions are automatically generated and displayed on the screen for easy confirmation and interactive editing, and fine adjustment of condition details is extremely easy. , The performance of measuring devices and computers can be brought to the limit. Therefore, the measurement efficiency and the analysis efficiency are improved, and the accuracy and reliability of the entire measurement / analysis work are improved.

[Second Embodiment] The case where the present invention is used in the contour shape measuring apparatus has been described above, but the present invention is also applied to the surface roughness measuring apparatus for measuring the surface roughness of the object to be measured. It is possible. Also in the second embodiment, the basic processing flow is the same as that in FIG. 3 in the first embodiment, and therefore only the differences will be described below. In the CAD data capture in S1, the design finish roughness designation (type of roughness parameter and limit value of roughness) of each part is designated in the CAD data for each type of basic figure (example: Ra <0.5 μm or less) can generate roughness measurement conditions as described later according to the specification.

On the other hand, if the finish roughness is not specified in the CAD data, the roughness measuring condition cannot be generated. In this case, CAM data (Computer aid
ed Machining Data) and machining condition data used in actual machining (type of cutting tool, spindle rotation speed, cutting feed rate, material of DUT 6 etc.) and input data that can be used to estimate roughness Integrate with the data.

Next, in determining the measurement range (S2),
In the case of roughness measurement, unlike the case of contour measurement, it is decided not to continuously measure the types of a plurality of basic figures but to measure the types of a plurality of basic figures discontinuously. For example, in the profile of FIG. 6, the entire linear element L2,
A plurality of measurement points such as the central portion (bottom portion) of the circular arc element C2 is selected and determined on the screen. Alternatively, if the CAD data includes design finish roughness designations for each part for each type of basic figure, the designated shape (type of basic figure) location is automatically selected and determined. However, in this case, the measurement end point (line 32) is automatically determined in S4, which will be described later, and thus need not be determined here.

When a plurality of measurement ranges are determined, CAD data corresponding to those measurement ranges (if necessary, CAM
Information about each basic graphic element and roughness is extracted from the data etc.). After that, in the designation of the X coordinate Xo of the measurement start position (S3), it is determined for each measurement range. The measurement pitch Δm is automatically determined in the generation of measurement conditions (S4) described below. When the input of the conditions necessary for generating the roughness measurement condition is completed, the measurement condition is automatically generated (S4). Roughness measurement conditions are basically generated according to Japanese Industrial Standards (eg JIS B 0601-1994).
It is performed according to various standards such as. For example JIS B 0601
According to -1994, when obtaining the roughness Ra, the cutoff value and the evaluation length are determined by the range of the size of the "reference roughness Ra". As a specific example, the roughness R
When the size of a exceeds 0.1 μm and is 2.0 μm or less, the cutoff value is 0.8 mm and the evaluation length is 4 mm.
That is, the length of 4 mm from the X coordinate Xo of the measurement start position is the measurement range. The cutoff value indicates the cutoff length of the filter when the measurement data is filtered when the roughness analysis is performed. As this filter, a high-pass filter, a low-pass filter, or the like is used depending on the type of roughness or swell measurement, but in the case of roughness Ra, a high-pass filter is used. The information about the roughness extracted in S2 is used as the “reference roughness” for generating these roughness measurement conditions.

If measurement conditions such as an evaluation length and a reference length are specified in the CAD data, those values can be used. The measurement pitch Δm is determined from the evaluation length, the upper limit value of the sampling pitch (minimum sampling pitch) possible in the roughness measuring device, and the size of the storage device (RAM 27) used for storing the measurement data. At this time, if the measurement pitch Δm becomes small, a large storage device capacity is required. In addition to this, while satisfying these conditions, the number of measurement data is 2 such as 1024 and 4096.
A measurement pitch Δm that is a power of is determined. The power of 2 is used mainly for the purpose of optimizing the accuracy of the filter calculation process and the calculation speed.

When the measurement pitch Δm is determined in this way, the measurement pitch Δm is determined by the roughness measuring device.
The measurement speed at which m is possible is determined. These relationships generally show that a high measurement speed is possible if the measurement pitch Δm is large, but if the measurement pitch Δm is small, it is necessary to set a low measurement speed so that the measurement time interval is not excessively narrowed. Due to Here, the measurement pitch is the length in the X direction. In this embodiment, the measurement speed S is determined after the measurement pitch Δm is determined. However, as long as such a constraint relationship is satisfied, the measurement pitch Δm is determined after the measurement speed S is determined. Is also good.

The automatic generation of other measurement conditions for the reference position Zo, the measurement magnification M, and the inclination T of the DUT 6 is the same as in the first embodiment, but it is determined for each of a plurality of measurement points. Be different. The analysis target range is determined from the measurement start position Xo determined in S2 and the evaluation length automatically generated in S4, but the region in which the measurement data exists may be determined as the analysis target range as necessary. You can also In roughness measurement, the measurement range is generally limited, so the exclusion range of analysis is usually set to zero (S5).

In the analysis condition generation, a cutoff value based on the "reference roughness" extracted from the CAD data is determined, and after the cutoff value is filtered,
A predetermined roughness calculation condition is determined (S6). Depending on the type of roughness parameter, it may be necessary to give supplementary condition values, but typical values are assigned here,
These can be modified in S9. In the display of the measurement conditions and the analysis conditions, in addition to the header portion 41 and the data portion 42 of the first embodiment, roughness information (roughness parameter etc.) is additionally displayed as the data portion 43.

According to the second embodiment, in addition to (1) to (12) and (17) in the first embodiment, the following effects can be obtained. (18) Since the CAM data and the processing condition data of the object to be measured can be integrated with the CAD data even if the roughness information or the like is not included in the CAD data,
It is possible to generate measurement conditions and analysis conditions that cannot be generated only with D data. As a result, the efficiency of measurement and analysis can be improved for a wider range of objects to be measured. (19) Similar to roughness and waviness measurement, preliminary measurement should be performed even if the measurement conditions cannot be determined unless preliminary measurement of the object to be measured is performed to obtain the “reference roughness and waviness”. Instead, the measurement conditions can be generated from the CAD data, which improves the measurement efficiency. (20) Since measurement conditions and analysis conditions are generated according to various standards, measurement mistakes and analysis mistakes due to operator misunderstanding and misidentification can be prevented, and measurement efficiency improves. (21) Since different measurement conditions and analysis conditions can be generated over a plurality of ranges of the object to be measured, the measurement can be automated and the measurement efficiency is significantly improved.

In the above embodiment, both the measurement condition and the analysis condition are automatically generated. However, only one of them is automatically generated, and the other is manually input. But it doesn't matter. Alternatively, it may not have a function of automatically generating only one of the measurement condition and the analysis condition and generating the other. Further, in these embodiments, the contact-type measuring device provided with the stylus has been described, but the surface texture measurement provided with the non-contact type probe including a CCD camera, an image sensor, an ultrasonic sensor, or the like. It may be a device and is not limited to a particular probe format.

In the second embodiment, the roughness measuring condition and the roughness analyzing condition have been described, but it is also possible to measure the waviness in addition to the roughness, and further measure the roughness and the waviness. The surface texture measuring device may measure a minute contour shape. Furthermore, these surface texture measuring methods have been described only for the contour shape measuring device and the roughness measuring device, but in addition to the roundness measuring device, the image measuring device, the three-dimensional measuring device, a screw shape measuring device, etc. The measurement may be performed by a measuring device or a surface texture measuring device having a composite measuring function.

The CAD data and the measurement data are not limited to two-dimensional data, three-dimensional data, and the coordinate format is not limited to the rectangular coordinate system, and may be the polar coordinate system, and is not limited to a specific coordinate format. Further, the CAD data format and format may be arbitrary, and is not limited to a specific CAD data format or format. Also, regarding the screen display format of CAD data,
The three-dimensional shape is not limited to the profile, the contour shape, or the sectional curve shown in the first embodiment, and may be displayed by wire frame display, various mesh display, solid model display, or the like.

Further, the above-described various designation methods such as designation of the range of measurement conditions and analysis conditions and the method of editing various generated conditions include the method of screen display and keyboard and mouse, as well as special input devices such as rotary dials. May be used, and the interaction performance may be improved by using a sound wave input device or a sound wave output device in an audible frequency band such as voice.

Further, the surface texture measuring method according to the present invention may be such that a measuring condition or an analyzing condition is generated on the basis of CAD data on an independent computer which is not necessarily directly connected to the surface texture measuring apparatus. The number of computers is not limited to one, and may be, for example, a configuration in which a plurality of computers are combined in a network. Furthermore, the measurement conditions and analysis conditions generated by the computer may be input to the surface texture measuring device via a network or a floppy (registered trademark) disk, and the measurement and analysis may be performed under those conditions.
The measurement data in the surface texture measuring device may be similarly input to the computer, and the measurement data may be analyzed on the computer.

Further, by making the above-mentioned surface texture measuring method in the form of a program that can be executed by a computer, the method is portable and the executability of a plurality of computers of different models is improved, thus promoting the use of the present invention. It is also possible to significantly improve the above. Here, the number of computers is not limited to one, and includes, for example, a configuration in which a plurality of computers are combined in a network. Further, the form of this program may be a server client form in which the data processing unit and the user interface unit are separated. Further, the format of this program is not limited to language formats such as compiler format and interpreter format.
Further, this program may be stored in various portable media (storage means) such as a floppy disk or an optical disk in addition to the fixed storage means. Furthermore, a database may be constructed by accumulating the measurement conditions and analysis conditions of various measured objects generated by the present invention.

[0080]

As described above, according to the present invention, the measurement condition and the analysis condition are automatically determined based on the design value data, so that it is not necessary to perform the preliminary measurement, and the analysis condition is determined. In this case, it is not necessary to judge the type of graphic element, and the operator's burden is significantly reduced.

[Brief description of drawings]

FIG. 1 is a diagram showing an overall image of a contour shape measuring apparatus according to an embodiment of the present invention.

FIG. 2 is a block diagram centering on a computer 2 of the contour shape measuring apparatus shown in FIG.

FIG. 3 is a flowchart of a measurement condition generation program and an analysis condition generation program.

FIG. 4 is a diagram showing a display example of CAD data 30 on a screen of a CRT 5 and a method for determining a measurement range by the contour shape measuring apparatus 1.

FIG. 5 is a diagram showing a method for determining a data portion to be excluded from an analysis target.

FIG. 6 is a diagram showing a display example and data structure of CAD data.

FIG. 7 is a conceptual diagram for explaining how to determine analysis conditions.

FIG. 8 is a display example of measurement conditions and analysis conditions on the CRT 5.

[Explanation of symbols]

1 ... Contour shape measuring device, 2 ... Computer, 3
・ ・ ・ ・ Keyboard, 4 ・ ・ ・ ・ Mouse, 5 ・ ・ ・ ・ ・ ・ ・ ・ CRT, 6 ・ ・ ・ ・ DUT, 11
・ ・ ・ Probe, 12 ・ ・ ・ ・ ・ ・ Probe holding part, 13 ・ ・ ・
..Horizontal feeding device, 13a ... Measuring speed output circuit, 13
b ... DA converter, 13c ... Pulse width modulator, 1
4 ... Mounting table, 15 ... Column, 12S, 13S,
14S ··· Position sensor, 16 ··· Base, 17 ···
..Vertical feed device, 17a ..... Vertical movement output circuit, 17
b ... Pulse generator, 17c ... Pulse counter, 2
1 ... Preamplifier, 21a ... AD converter, 21b
・ ・ ・ ・ Measurement magnification output circuit, 22 ・ ・ ・ ・ ・ ・ CPU, 23 ・ ・ ・ ・
..Interface, 24 .... hard disk, 25
・ ・ ・ Display control unit, 26 ・ ・ ・ ・ ・ Interface, 27
··· ROM, 28 ··· RAM, 29 ··· CAD system, 29a · · · interface, IF · · · interface

   ─────────────────────────────────────────────────── ─── Continued front page    (72) Inventor Fumihiro Takemura             1-20-1 Sakado, Takatsu-ku, Kawasaki City, Kanagawa Prefecture               System Technology Inst Co., Ltd.             In the suite F term (reference) 2F069 AA57 AA61 DD25 GG01 GG11                       GG62 JJ07 JJ13 JJ27 NN02                       QQ05

Claims (19)

[Claims] 1. A step of acquiring design value data of an object to be measured, a step of displaying the design value data, and a measurement range in the case of measuring the object to be measured based on the displayed design value data. A step of specifying, a step of extracting information of the design value data included in the specified measurement range, a step of determining measurement conditions in the measurement range based on the information, the determined measurement conditions And a step of displaying. 2. The step of extracting the information extracts the information on the height difference of the design value data included in the designated measurement range, and the step of determining the measurement condition includes the information on the height difference. The surface texture measuring method according to claim 1, wherein a reference position of the object to be measured is determined based on the above. 3. The step of extracting the information extracts information on the height difference of the design value data included in the designated measurement range, and the step of determining the measurement condition includes the information on the height difference. The surface texture measuring method according to claim 1, wherein the measurement magnification of the object to be measured is determined based on the above. 4. The method further comprises the step of designating a measurement pitch when measuring the object to be measured, and the step of determining the measurement condition includes the step of measuring the object to be measured based on the measurement pitch. The surface property measuring method according to claim 1, wherein a measuring speed is determined. 5. The method according to claim 1, wherein the step of determining the measurement condition determines an inclination of the object to be measured which minimizes the height difference, based on information about the height difference. The method for measuring surface properties according to item 1. 6. The surface texture measuring method according to claim 1, further comprising a step of editing the displayed measurement conditions. 7. A step of obtaining design value data of an object to be measured, a step of displaying the design value data, and a measurement obtained by measuring the object to be measured based on the displayed design value data. A step of specifying an analysis range for analyzing the result, a step of extracting information of the design value data included in the specified analysis range, and an analysis of the measurement result based on the information of the extracted design value data A method for measuring a surface texture, comprising: a step of deciding an analysis condition for performing the above; and a step of displaying the decided analysis condition. 8. The surface texture measuring method according to claim 7, wherein the step of determining the analysis condition determines the analysis condition based on information about a type of a basic figure forming the design value data. 9. The step of determining the analysis condition is characterized in that, when a plurality of the basic figures are included in the analysis range, the analysis condition is determined based on a relationship between the basic figures. 8. The method for measuring surface properties according to item 8. 10. The step of determining the analysis condition comprises:
10. The surface texture measuring method according to claim 9, wherein when a plurality of straight lines are included as the basic figure in the analysis range, the analysis condition for calculating an angle formed by the plurality of straight lines is determined. 11. The step of determining the analysis condition comprises:
10. The surface texture measuring method according to claim 9, wherein, when straight lines parallel to each other are included as the basic figure in the analysis range, the analysis condition for calculating the distance between the parallel straight lines is determined. 12. The step of determining the analysis condition comprises:
When a plurality of basic figures of the same type are continuous,
The surface texture measuring method according to claim 9, wherein the analysis condition for calculating the pitch between the basic figures is determined. 13. The step of determining the analysis condition comprises:
13. The surface texture measuring method according to claim 7, wherein a predetermined portion of the basic figure is excluded from the analysis target in the analyzing step. 14. The step of determining the analysis condition comprises:
9. The surface texture measuring method according to claim 8, wherein the analysis condition is determined by using information on the shape and size of the basic figure as reference data. 15. The method according to claim 7, further comprising a step of editing the displayed analysis condition.
The method for measuring surface properties according to any one of 1. 16. The step of acquiring design value data of the object to be measured further acquires processing condition data for processing the object to be measured and integrates it into the design value data. 16. The surface texture measuring method according to any one of 1 to 15. 17. A surface texture measuring program that causes a computer to execute the surface texture measuring method according to claim 1. Description: 18. A surface texture measuring means for measuring the surface texture of an object to be measured, a design value data acquiring means for acquiring design value data of the object to be measured, a display means for displaying the design value data, and the display. Measuring range designating means for designating a measuring range by the surface texture measuring means based on the design value data displayed on the means, and information extracting means for extracting information of the design value data included in the designated measuring range. And a measurement condition determining means for determining a measurement condition by the surface texture measuring means in the measurement range based on the information, and a measurement condition displaying means for displaying the measurement condition determined by the measurement condition determining means. A surface texture measuring device characterized by the above. 19. A surface texture measuring means for measuring a surface texture of an object to be measured, a design value data acquiring means for acquiring design value data of the object to be measured, a display means for displaying the design value data, and the display. Analysis range designating means for designating an analysis range for analyzing the measurement result obtained by the surface texture measuring means based on the design value data displayed on the means, and the design value data included in the designated analysis range. Information extraction means for extracting the information of, the analysis means for analyzing the measurement result by the surface texture measuring means, the analysis condition determination means for determining the analysis conditions by the analysis means based on the information from the information extraction means, A surface texture measuring apparatus comprising: an analysis condition display means for displaying the analysis condition determined by the analysis condition determination means.