JP2003156318A - Highly accurate directivity controller - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a highly accurate directivity controller whose directivity control characteristic is not deteriorated, even if a movable mirror is tilted by a large amount due to a disturbance or the like. SOLUTION: The highly accurate directivity controller is composed of a reference-beam position detection sensor 4-1, which is fixed to a fixation part and by which the relative displacement of a movable part to the fixation part is detected in a wide range on the basis of a beam from a light-emitting body fixed to the movable part holding the movable mirror, local-beam position detection sensors 4-1 to 4-9 by which the relative displacement of the movable part to the fixation part is detected locally and with high accuracy, on the basis of the beam from the light-emitting body or a spectral beam and which are composed of the reference-beam position detection sensor and a plurality of sensors arranged around the detection sensor, local-sensor changeover parts 18, 24, 25 by which the optimum local-beam position detection sensors are selected and changed over automatically, on the basis of the deviation amount of the relative position of the movable part to the fixation part and mirror- tilting mechanisms 19 to 23, by which the movable part is tilted at a desired angle by a compensation control amount based on the deviation amount.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a high precision pointing control device for a movable mirror control device or the like which is installed on the ground or mounted on an artificial satellite, a spacecraft, an aircraft or the like.

[0002]

2. Description of the Related Art FIG. 14 shows, for example, Japanese Patent Laid-Open No. 2000-1871.
A high precision pointing control device for the conventional movable mirror control device shown in Japanese Patent No. 50 is shown. In this type of high-precision pointing control device, one light emitting diode 1003 for referencing the positional relationship between the movable portion 1001 and the fixed portion 1002 is provided in the movable portion 10.
01, and one fixed quadrant photodiode 1004 for detecting the displacement of the movable part 1001 is fixed part 1
002, and the relative displacement of the one set of the light emitting diode 1003 and the four-division element photodiode 1004,
The tilt angle of the movable mirror 1005 is detected.

[0003]

Since the conventional high-accuracy pointing control device is constructed as described above, the beam from the light emitting diode is divided into four quadrants by the movable mirror largely tilting due to disturbance or the like. However, there is a problem that the directivity control characteristic is deteriorated by receiving the light outside the linear region. In addition, there is a problem that the dynamic range of the movable mirror cannot be increased due to the small linear region of the four-division element photodiode in order to improve the pointing control accuracy. Further, if the light emitting diode fails, it is impossible to control the direction of the movable mirror. Further, there is a problem that if the four-division element photodiode fails, it becomes impossible to control the orientation of the movable mirror. Further, the light emitting diode and the four-divided element photodiode must be arranged on a straight line passing through the center of the movable mirror, and there is a problem that the installation locations of the light emitting diode and the four-divided element photodiode are restricted.

The present invention has been made to solve the above problems, and provides a high-precision pointing control device in which the pointing control characteristics do not deteriorate even when the movable mirror (mirror) tilts largely due to disturbance or the like. The purpose is to do.

[0005]

In view of the above object, the present invention is a high precision pointing control device for controlling the posture of a mirror by a mirror tilting mechanism to guide a received light beam to a desired position with high precision. , A movable part for fixedly holding a mirror for guiding a received light beam to a desired position, a fixed part for swingably supporting the movable part, and a rotation for swingably connecting the movable part and the fixed part. An oscillating joint, a light-emitting body that is fixed to the movable section and refers to a positional relationship with the fixed section, a spectroscopic section that divides a beam from the light-emitting body into a plurality of beams, and a fixed section that is fixed to the fixed section. A reference beam position detection sensor for broadly detecting the relative displacement of the movable part with respect to the fixed part based on the beam from the light emitter, and the light emission fixed on the surface of the fixed part facing the beam from the light emitter. The beam from the body From the reference beam position detection sensor and a plurality of sensors arranged around the reference beam position detection sensor for locally and highly accurately detecting the relative displacement of the movable portion with respect to the fixed portion based on the beam split by the splitting portion. A plurality of local beam position detection sensors, a local sensor changeover switch that selectively switches the plurality of local beam position detection sensors, and an optimal local beam position detection sensor based on the relative position displacement amount of the movable portion with respect to the fixed portion. Is selected to automatically switch the local sensor changeover switch, and the tilt angle of the movable part is determined from the relative positional deviation between the local light sensor and the light emitter detected by the selected local beam position detection sensor. And a movable mirror tilt angle calculator for calculating the movable mirror tilt angle. A tilting angle and a command value to calculate a compensation control amount of the tilting angle of the movable part, and a mirror tilting mechanism for tilting the moving part to a desired angle by the output of the compensator. It is a characteristic high-precision pointing control device.

Further, the local sensor switching unit is
A beam position deviation amount determiner that selects an optimal local beam position detection sensor from the relative position deviation amount of the movable portion with respect to the fixed portion, and a local sensor switching switch that automatically switches the local sensor changeover switch from the output of the beam position deviation amount determination device. And an automatic sensor switching device.

Further, a local sensor light receiving amount detector for detecting the amount of light received by the local beam position detecting sensor is further provided, and the beam position deviation amount judging device receives light based on the detection result of the local sensor light receiving amount detector. It is characterized in that the local beam position detection sensor having a small light quantity is removed from the selection frame.

Further, a backup sensor having a function equivalent to that of the reference beam position detection sensor, and a reference beam position detection sensor for detecting the presence or absence of an abnormality by detecting the amount of light received by the reference beam position detection sensor. And a reference sensor switching unit for switching to the backup sensor.

Further, a plurality of the above-mentioned light-emitting bodies are provided, and a light-collecting portion for combining a plurality of beams from the above-mentioned plurality of light-emitting bodies into a single light-collecting portion, and the amount of light received by the reference beam position detection sensor are detected. And a light emitter switching unit that switches the light emitter by determining whether or not there is an abnormality in the light emitter.

In addition, the mirror tilting mechanism controls the attitude of the mirror to guide the received light beam to a desired position with high accuracy, and is a high precision directivity control device in which the mirror that guides the received light beam to a desired position is fixed. A movable portion to be held, a fixed portion for swingably supporting the movable portion, a rotary swing joint for swingably coupling the movable portion and the fixed portion, and the fixed portion fixed to the movable portion. And a spectroscopic unit that divides the beam from the luminous unit into a plurality of beams, and the spectroscopic unit fixed on the surface of the fixing unit facing the beam from the luminous unit. A plurality of two-dimensional array sensors for detecting the relative displacement of the movable part with respect to the fixed part in a wide range and with high accuracy based on the beam dispersed by
A two-dimensional array sensor changeover switch that selectively switches the plurality of two-dimensional array sensors, and a two-dimensional array sensor changeover switch that detects the light amount of a light beam received by the two-dimensional array sensor to determine whether there is an abnormality. Movable mirror that calculates a movable mirror tilt angle, which is the tilt angle of the movable part, based on the relative displacement between the reference sensor switching part that automatically switches and the light emitter detected by the selected two-dimensional array sensor. A tilt angle calculator, a compensator that calculates a compensation control amount of the tilt angle of the movable part from the movable mirror tilt angle and a command value, and a mirror tilt that tilts the movable part to a desired angle by the output of the compensator. Mechanism,
A high-accuracy pointing control device characterized by comprising:

Further, the mirror tilting mechanism controls the attitude of the mirror to guide the received light beam to a desired position with high accuracy, and is a high precision directivity control device, wherein the mirror for guiding the received light beam to a desired position is fixed. A movable portion to be held, a fixed portion for swingably supporting the movable portion, a rotary swing joint for swingably coupling the movable portion and the fixed portion, and the fixed portion fixed to the movable portion. A plurality of light emitters for referring to the positional relationship between the light emitters, a light condensing unit that combines a plurality of beams from the plurality of light emitters into one, and a light emitting unit that is fixed to the fixing unit. A reference beam position detection sensor for detecting the relative displacement of the movable part with respect to the fixed part based on the beam, a light emitter changeover switch for selectively switching the plurality of light emitters, and a light reception by the reference beam position detection sensor. Beam intensity A light emitter switching unit that automatically detects the abnormalities of the light emitters by detecting and selects the most suitable light emitters and automatically switches the light emitter switch, and the light emission detected by the reference beam position detection sensor. A movable mirror tilt angle calculator that calculates a movable mirror tilt angle, which is the tilt angle of the movable portion, based on a relative displacement with the body, and compensation control of the tilt angle of the movable portion from the movable mirror tilt angle and a command value. A high-precision pointing control device comprising: a compensator for calculating a quantity; and a mirror tilting mechanism for tilting the movable part to a desired angle by the output of the compensator.

[0012]

BEST MODE FOR CARRYING OUT THE INVENTION The present invention will be described below according to each embodiment. Embodiment 1. FIG. 1 is a diagram mainly showing an example of the configuration of a movable mechanism portion of a high precision pointing control device according to the present invention. In FIG. 1, 1 is a mirror, 6-1 is a pair of first flexible pivots as a rotary oscillating joint that connects the fixed part 14 and the outer movable part 10, and 6-2 is the outer movable part 10 and the inner movable part. A pair of second flexural pivots 2 serving as a rotary oscillating joint connecting the parts 9 are three or more electromagnet type actuators for tilting the movable part 5 to a desired angle.

Reference numeral 3 is a first light emitting diode for referring to the positional relationship between the movable portion 5 and the fixed portion 14, and 4-1 is the fixed portion 1.
4 is a reference beam position detection sensor for detecting a relative displacement of the movable portion 5 with respect to 4 in a wide range, and a local beam position detection sensor for locally and highly accurately detecting a relative displacement of the movable portion 5 with respect to the fixed portion 14. Is a first four-division element photodiode, and 4-2 is a second four-division element as a local beam position detection sensor for locally and highly accurately detecting the relative displacement of the movable portion 5 with respect to the fixed portion 14. A photodiode 4-3 is a third four-division element photodiode as a local beam position detection sensor for locally and highly accurately detecting the relative displacement of the movable portion 5 with respect to the fixed portion 14, and 7 is a first. A beam splitter for splitting the beam 11 emitted from the light emitting diode 3, 8 is a reflecting mirror for reflecting the beam 11 emitted from the first light emitting diode, 2 incident beam 13 is reflected beam.

FIG. 2 is a top view of the movable mechanism portion shown in FIG. In FIG. 2, reference numeral 15 is a flange. Although the light emitting diode is used to refer to the positional relationship between the movable portion 5 and the fixed portion 14, a laser may be used. Further, the number of electromagnet type actuators 2 is three or more in order to control the tilt of two degrees of freedom, but it may be four or more in order to provide redundancy. Further, in FIG. 1, the local beam position detection sensor is composed of three,
By using a plurality of beam splitters 7 and a plurality of reflecting mirrors 8 according to the required detection angle range, four or more local beam position detection sensors may be configured.

An example of using nine local beam position detection sensors is shown in FIG. 3 as an example of the configuration of the local position beam detection sensor. In FIG. 3, 4-4 to 4-9 are fourth to ninth quadrant elements as local beam position detection sensors for locally and highly accurately detecting the relative displacement of the movable part 5 with respect to the fixed part 14. Photodiode, 4
-10 is each four-division element photodiode 4-1 to 4
-9 is a linear region for detecting a 4-divided element photodiode capable of detecting the beam displacement with high accuracy, and 4-11 is a detection region for the first 4-divided element photodiode 4-1 which also serves as a reference beam detection sensor.

FIG. 4 shows the configuration of a high precision pointing control apparatus according to the first embodiment of the present invention which detects the tilt angle of the mirror mechanism movable portion 5 and corrects it to a desired angle. In FIG. 4, 18 is an appropriate local beam position detection sensor based on the information of the first quadrant element photodiode 4-1 which is a reference beam position detection sensor.
A local sensor changeover switch for selecting the split element photodiodes 4-1 to 4-9, and 24 is a first light emitting diode 3 and a reference beam position detection sensor.
1st to 9th four-divided element photodiodes 4-1 to 4-9, which are the respective local beam position detection sensors, from the relative positional deviation amount of the four-divided element photodiode 4-1 A beam position deviation amount determiner for estimating the spot position and selecting an optimum local beam position detection sensor from those within the detection linear region, 25 is a local sensor changeover switch 18 based on a signal from the beam position deviation amount determiner 24. A local sensor automatic switcher for switching between 20 and 20 is a command value for setting the mirror tilting mechanism 23 including the electromagnet type actuator 2 to a desired angle, and 21 is compensation for calculating a tilt angle compensation control amount to the mirror tilting mechanism 23. Device (including subtractor), 2
Reference numeral 2 is a distributor for distributing the output of the compensator 21 to the mirror tilting mechanism 23 composed of the electromagnet type actuator 2.

Next, the operation will be described. The high-accuracy pointing control device is, for example, a device incorporated in a telescope mounted on an artificial satellite and used for highly accurately stabilizing and tracking a sun image, an earth image, a star image, and the like. Such a high precision pointing control device requires a very high pointing precision of the order of 1/10000 [deg] or less in order to stabilize and track solar images, earth images, star images, etc. Is.
Therefore, when the movable part 5 provided with the mirror 1 stabilizes and tracks a solar image, an earth image, a star image, etc., the movable part 5 and the fixed part 1 are disturbed by the disturbance of the satellite (spacecraft) mounted on the movable part 5.
When the arrangement position of 4 is displaced, the four-division element photodiode 4-1 which is the reference beam position detection sensor causes
The displacement of the light emitting diode 3 is detected.

The beam position deviation amount determiner 24 detects that the incident beam spot from the first light emitting diode 3 detected by the 4-division element photodiode 4-1 is the 4-division element photodiode detection linear region 4-10 (see FIG. If it exists within 3), the 4-division element photodiode 4-1 is selected as the local beam position detection sensor. Further, if the incident beam spot from the first light emitting diode 3 detected by the 4-division element photodiode 4-1 is outside the 4-division-element photodiode detection linear region, the 4-division element photodiode 4-1 is detected. Based on the information, the local sensor changeover switch 18 selects an appropriate one of the four-divided element photodiodes 4-2 to 4-9 as the local beam position detection sensor which is closest to the origin in the detection linear region.

Further, the beam position deviation amount determining device 24 has a first
Light emitting diode 3 and reference beam position detection sensor 4-1
The position of the light-receiving beam spot from the first light emitting diode 3 in each of the local beam position detection sensors 4-1 to 4-9 is estimated from the relative position deviation amount of The optimum local beam position detection sensor closest to the origin, that is, the four-division element photodiodes 4-1 to 4-9 may be directly discriminated and selected. In addition, the beam position deviation amount determination device 2
4 It is assumed that the threshold value for determining the switching of the local beam position detection sensor has hysteresis.
This eliminates unstable operation. The output signal of the beam position deviation amount determiner 24 is used as the local sensor automatic switcher 2
By inputting to 5, the local sensor changeover switch 18 is automatically changed over to select an appropriate local beam position detection sensor among 4-1 to 4-9.

By inputting the output signal of the beam position deviation amount determiner 24 to the local sensor automatic selector 25, the local sensor changeover switch 18 is automatically changed over, and an appropriate local beam of 4-1 to 4-9 is selected. Select the position detection sensor.

The relative displacement (relative positional deviation) with the first light emitting diode 3 detected by the selected four-division element photodiode is input to the movable mirror tilt angle calculator 19 to input the tilt angle of the movable portion 5. Then, the tilt angle of the biaxial movable mirror is calculated. In the compensator 21, the difference between the tilt angle of the movable mirror and the command value 20 is calculated by the subtractor (on the input side), and the control error amount of the two axes is obtained.
The biaxial compensation control amount is calculated according to the control law, and the biaxial compensation control amount as the calculation result is further input to the distributor 22 and distributed to the three or more electromagnet type actuators 2 which are the mirror tilting mechanism 23. It Each electromagnet-type actuator 2 attracts a magnetic pole plate (not shown) arranged on the side surface of the movable portion 5 based on the calculated control amount, so as to cancel the positional deviation of the fixed portion 14, the movable portion 5 is moved. To the desired position.

With the above-described structure, the deviation of the tilt angle of the movable part from the reference by the mirror tilt mechanism can be detected in a broad range, and the optimum local beam position detection sensor according to the tilt angle. Can be selected, the tilt angle of the movable part by the mirror tilt mechanism can be detected in a wide range and with high accuracy, and the incident beam from the outside can be guided to a desired position in a wide range and with high accuracy. A wide-angle incident beam from the outside can be directed to a desired position with high accuracy, and the degree of freedom of the installation locations of the reference and local beam position detection sensors can be increased.
In addition, the optimum local beam position detection sensor can be automatically switched when the movable part, that is, the mirror is tilted to a desired angle according to the command value, and the selected local beam position is detected by a large swing of the mirror due to disturbance or the like. Even when the sensor deviates from the linear region, it is possible to immediately and automatically switch to another optimum local beam position detection sensor.

Embodiment 2. 5 is a diagram showing a configuration of a high precision pointing control device according to a second embodiment of the present invention.
In FIG. 5, reference numeral 26 denotes the amount of light received from the first light emitting diode 3 in the sensor selected by the local sensor changeover switch 18 from the four-division element photodiodes 4-1 to 4-9 which are local beam position detection sensors. It is a local sensor for detecting the amount of light received.

Next, the operation will be described. When the positions where the movable portion 5 and the fixed portion 14 are arranged are displaced due to disturbance or the like, the displacement of the first light emitting diode 3 is detected by the four-division element photodiode 4-1 which is the reference beam position detection sensor. This signal is input to the beam position deviation amount determiner 24, and based on the relative positional deviation amount between the first light emitting diode 3 and the reference beam position detection sensor 4-1, the local beam position detection sensors 4-1 to 4-9 can detect the relative position deviation. First light emitting diode 3
The position of the received beam spot from is estimated and the optimum local beam position detection sensor closest to the origin is automatically discriminated among the local beam position detection sensors in the detection linear region. Note that the threshold value for automatically switching the local beam position detection sensor inside the beam position shift amount determination device 24 has a hysteresis, thereby eliminating an unstable operation. By inputting the output signal of the beam position shift amount determination device 24 to the local sensor automatic switching device 25, the local sensor switching switch 1
8 is switched to select the optimum local beam position detection sensor from 4-1 to 4-9.

The received light beam from the first light emitting diode 3 detected by the selected local beam position detection sensor is input to the local sensor received light amount detector 26, and the received light amount is set to a threshold value having a hysteresis characteristic set. If it is smaller, it is determined that the selected local beam position detection sensor is out of order, and the result is fed back to the beam position deviation amount determiner 24, and the sub-optimum that is the second closest to the origin from those in the detection linear region. A local position detection sensor is automatically discriminated, and the output signal thereof is input to the local sensor automatic switcher 25 to automatically switch the local sensor changeover switch 18, thereby 4-1 to 4-9.
A sub-optimal local beam position detection sensor is selected from among these. The subsequent steps are the same as in the above embodiment.

With the above configuration, further,
Abnormality can be detected when any of a plurality of local beam position detection sensors other than the local beam position detection sensor that also serves as the reference beam position detection sensor fails, and the faulty local beam position detection sensor is disconnected and other conditions are detected. Therefore, it is possible to select a sub-optimal local beam position detection sensor among normal ones, and it is possible to provide the local beam position detection sensor with redundancy.

Embodiment 3. 6 is a diagram showing the configuration of a high precision pointing control device according to a third embodiment of the present invention.
In FIG. 6, 27 is a reference beam position detection sensor 4-1.
The backup sensor having the same function as the 10th
4 division element photodiode, 28 is a reference sensor changeover switch for switching between the reference beam position detection sensor 4-1 and the backup sensor 27, and 29 is from the first light emitting diode 3 to the reference beam position detection sensor 4-1 or the backup sensor. A reference sensor received light amount detector that detects the amount of received light beam incident on 27, and a reference sensor automatic switcher 30 that automatically switches the reference sensor changeover switch 28 in response to a signal from the reference sensor received light amount detector 29. The reference beam position detection sensor 4-1 and the backup sensor 27 are combined with the beam splitter 7 and the reflection mirror 8 at an appropriate angle, so that
The detection area and the detection linear area are configured to coincide with each other as indicated by.

Next, the operation will be described. When the positions where the movable portion 5 and the fixed portion 14 are arranged are displaced due to disturbance or the like, the displacement of the first light emitting diode 3 is detected by the four-division element photodiode 4-1 which is the reference beam position detection sensor. The detected signal is input to the reference sensor received light amount detector 29 to detect the received light amount, and when the received light amount is smaller than the threshold value having the set hysteresis characteristic, the reference beam position detection sensor 4-1. It is determined that the first four-division-element photodiode 4-1 is out of order, and a signal for switching the reference beam position detection sensor is output, and this signal is input to the reference sensor automatic switcher 30 to be used as the reference sensor. The changeover switch 28 is automatically changed over and the backup sensor 27 is selected as the reference beam position detection sensor.

Next, a signal from the selected reference sensor is input to the beam position deviation amount determination unit 24 to input the relative position deviation amount between the first light emitting diode 3 and the reference beam position detection sensor 4-1 or the backup sensor 27. The light receiving beam spot position from the first light emitting diode 3 in each of the local beam position detecting sensors 4-1 to 4-9 is estimated, and the position is closest to the origin among the local beam position detecting sensors in the detection linear region. Automatically determine the optimum local beam position detection sensor. In addition, the beam position deviation amount determination device 2
(4) The threshold value for automatically switching the internal local beam position detection sensor has a hysteresis, thereby eliminating unstable operation. By inputting the output signal of the beam position deviation amount determiner 24 to the local sensor automatic switcher 25, the local sensor changeover switch 18 is automatically switched, and the optimum local beam position detection sensor of 4-1 to 4-9 is selected. Select.
The subsequent steps are the same as those in the second embodiment.

With the above configuration, further,
When the reference beam position detection sensor fails, an abnormality can be detected, the failed reference beam position detection sensor can be switched to the backup sensor, and the reference beam position detection sensor can have redundancy.

Fourth Embodiment FIG. 8 is a diagram showing an example of a configuration of mainly a movable mechanism portion of a high precision pointing control device according to a fourth embodiment of the present invention. In FIG. 8, parts that are the same as or correspond to those in the above embodiment are denoted by the same reference numerals. Reference numeral 34 is a first two-dimensional array sensor as a beam position detection sensor for detecting the relative displacement of the movable portion 5 with respect to the fixed portion 14 in a wide range and with high accuracy, and 35 is the relative displacement of the movable portion 5 with respect to the fixed portion 14. It is a second two-dimensional array sensor as a beam position detection sensor for detecting a wide range with high accuracy. Here, the first two-dimensional array sensor 34 and the second two-dimensional array sensor 35 are CCD or CMO.
S-sensor shall be used. Further, two two-dimensional array sensors are arranged here to provide redundancy, but a case where three or more two-dimensional array sensors are configured is also included.

FIG. 9 shows the configuration of a high precision pointing control apparatus according to the fourth embodiment of the present invention which detects the tilt angle of the mirror mechanism movable portion 5 and corrects it to a desired angle. In FIG. 9, parts that are the same as or correspond to those in the above embodiment are denoted by the same symbols. Reference numeral 36 is a two-dimensional array sensor changeover switch for switching the two-dimensional array sensor, 37 is a two-dimensional array sensor light receiving amount detector for detecting the light receiving beam light amount from the first light emitting diode 3, and 38 is a two-dimensional array sensor light receiving amount. This is a two-dimensional array sensor automatic switching device that automatically switches the two-dimensional array sensor changeover switch 36 in response to a signal from the detector 37.

Next, the operation will be described. When the arrangement positions of the movable portion 5 and the fixed portion 14 are displaced due to disturbance or the like, the first two-dimensional array sensor 34 which is a beam position detection sensor.
Thus, the displacement of the first light emitting diode 3 is detected. The detected signal is input to the two-dimensional array sensor received light amount detector 37 to detect the received light amount. If the received light amount is smaller than the threshold value having the set hysteresis characteristic, the first two-dimensional array sensor It is determined that 34 is out of order, and a signal for switching the first two-dimensional array sensor 34 to the second two-dimensional array sensor 35 is output, and this signal is set to 2
Inputting to the dimensional array sensor automatic switch 38, the two-dimensional array sensor changeover switch 36 is automatically changed over.

Next, the relative displacement with the first light emitting diode 3 detected by the selected two-dimensional array sensor is input to the movable mirror tilt angle calculator to calculate the biaxial movable mirror tilt angle, and the command is issued. The two-axis control error amount is calculated by taking the difference from the value 20. By inputting this to the compensator 21, for example, the biaxial compensation control amount is calculated according to the PID control law, and the biaxial compensation control amount as the calculation result is further input to the distributor 22 to drive the mirror tilting mechanism 23. Make up 3
The control amount is distributed to one or more electromagnet type actuators 2. Each electromagnet-type actuator 2 attracts a magnetic pole plate (not shown) arranged on the side surface of the movable portion 5 based on the calculated control amount, so as to cancel the positional deviation of the fixed portion 14, the movable portion 5 is moved. To the desired position.

With the above structure, the deviation of the tilt angle of the movable part from the reference by the mirror tilt mechanism can be detected in a wide range and with high accuracy, and the tilt angle of the movable part can be detected in a wide range and with high accuracy. It is possible to detect, to guide an incident beam from the outside to a desired position in a wide range with high precision, and to direct a wide-angle incident beam from the outside to a desired position with high precision. It is possible to detect that an abnormality has occurred in the two-dimensional array sensor, and when an abnormality occurs in the two-dimensional array sensor, it is possible to automatically switch to a normal two-dimensional array sensor. Since the number of sensors can be increased, the size and weight of the device can be reduced by reducing the number of sensors.

Embodiment 5. FIG. 10 is a diagram mainly showing an example of the configuration of a movable mechanism portion of a high precision pointing control device according to a fifth embodiment of the present invention. In FIG. 10, parts that are the same as or correspond to those in the above embodiment are denoted by the same symbols. 1
Reference numerals 5 and 16 denote second and third light emitting diodes for referring to the positional relationship between the movable portion 5 and the fixed portion 14, and 17 denotes a beam emitted from the first to third light emitting diodes 3, 15, and 16. A polarizing beam splitter for coupling to a book.

FIG. 11 shows the structure of a high precision pointing control apparatus according to the fifth embodiment of the present invention, which detects the tilt angle of the mirror mechanism movable portion 5 and corrects it to a desired angle. In FIG. 11, parts that are the same as or correspond to those in the above embodiment are denoted by the same symbols. In FIG. 11, 31 is a light emitting diode changeover switch for switching the light emitting diode, and 3
Reference numeral 2 is a light emitting diode light emission amount detector for detecting the light emission amount of the light emitting diode selected by the light emitting diode changeover switch 31, and 33 is light emission for automatically changing over the light emitting diode changeover switch 31 in response to a signal from the light emitting diode light emission amount detector 32. It is an automatic diode switching device.

Next, the operation will be described. When the arrangement positions of the movable portion 5 and the fixed portion 14 are displaced due to disturbance or the like, the four-division element photodiode 4-1 which is the reference beam position detection sensor causes the light emitting diode changeover switch 3
The displacement of the light emitting diode selected in 1 such as the first light emitting diode 3 is detected. The received light beam from the light emitting diode 3 detected by the first 4-division element photodiode 4-1 which is the reference beam position detection sensor is input to the light emitting diode light emission amount detector 32 to detect the light emission amount. When it is smaller than the threshold value having the set hysteresis characteristic, it is determined that the selected light emitting diode is out of order, and the first light emitting diode 3 is replaced by the second light emitting diode 15 or the third light emitting diode 16. A switching signal is output, and this signal is input to the light emitting diode automatic switching device 33 to automatically switch the light emitting diode changeover switch 31 so that the first light emitting diode 3
A normal one is selected from the second and third light emitting diodes 15 and 16 which are polarized by 180 degrees.

The relative displacement with the selected light emitting diode detected by the reference beam position detection sensor 4-1 is input to the movable mirror tilt angle calculator 19 to calculate the biaxial movable mirror tilt angle, and the command value 20. The two-axis control error amount is calculated by taking the difference between and. By inputting this to the compensator 21, for example, the biaxial compensation control amount is calculated according to the PID control law, and the biaxial compensation control amount as the calculation result is further input to the distributor 22 to configure the mirror tilting mechanism 23. Do 3
The control amount is distributed to one or more electromagnet type actuators 2. Each electromagnet-type actuator 2 attracts a magnetic pole plate (not shown) arranged on the side surface of the movable portion 5 based on the calculated control amount, and the movable portion 5 is offset in order to cancel the positional deviation of the fixed portion 14. To the desired position.

With the above configuration, it is possible to grasp the state of the light emitter for referring to the positional relationship between the movable portion and the fixed portion, and it is possible to detect that an abnormality has occurred in the light emitter. When an abnormality occurs in the light emitting body, the light emitting body can be automatically switched to the normal light emitting body, and the light emitting body can be provided with redundancy.

Sixth Embodiment FIG. 12 is a diagram mainly showing an example of the configuration of a movable mechanism portion of a high precision pointing control device according to a sixth embodiment of the present invention. FIG. 13 is a diagram showing the configuration of a high precision pointing control device according to the sixth embodiment of the present invention which detects the tilt angle of the mirror mechanism movable part 5 and corrects it to a desired angle. In both figures, the same or corresponding parts as those of the above embodiment are designated by the same reference numerals. This embodiment is a combination of the above embodiments.

Next, the operation will be described. When the arrangement positions of the movable portion 5 and the fixed portion 14 are displaced due to disturbance or the like, the four-division element photodiode 4-1 which is the reference beam position detection sensor causes the light emitting diode changeover switch 3
The displacement of the light emitting diode selected in 1 such as the first light emitting diode 3 is detected. The light-receiving beam from the light-emitting diode 3 detected by the reference beam position detection sensor 4-1 is input to the light-emitting diode light-emission amount detector 32 to detect the light-emission amount, and the light-emission amount is set to a threshold value having a hysteresis characteristic. If it is smaller, it is determined that the selected light emitting diode is out of order, a signal for switching the first light emitting diode 3 to the second light emitting diode 15 or the third light emitting diode 16 is output, and this signal is emitted. It is input to the automatic diode switch 33 to automatically switch the light emitting diode changeover switch 31 so that the second light emitting diode 15 and the second light emitting diode 15, 16 which are 180 degrees in phase with the first light emitting diode are normal. Choose the right one.

The displacement of the selected light emitting diode, for example, the first light emitting diode 3 is detected by the four-division element photodiode 4-1 which is the reference beam position detecting sensor. This detected signal is used as a reference sensor received light amount detector 2
9 to detect the amount of received light, and when the amount of received light is smaller than a threshold value having a set hysteresis characteristic, it is determined that the reference beam position detection sensor has failed, and the reference beam position detection sensor is switched. Output the signal for
This signal is input to the reference sensor automatic switcher 30,
The reference sensor changeover switch 28 is automatically changed over,
10th 4 which is a backup sensor as a reference sensor
The split element photodiode 27 is selected.

Next, the signal from the selected reference beam position detection sensor is input to the beam position deviation amount determination unit 24 to input the first light emitting diode 3 and the reference beam position detection sensor 4 to each other.
−1 or the relative position displacement amount of the backup sensor 27, the light receiving beam spot position from the first light emitting diode 3 in each of the local beam position detecting sensors 4-1 to 4-9 is estimated, and the local beam position detecting sensor 4-1 to 4-9 detects a local light beam within the detection linear region. Among the beam position detection sensors, the optimum local beam position detection sensor closest to the origin is automatically determined.

The threshold value for automatically switching the local beam position detection sensor inside the beam position shift amount determining unit 24 is assumed to have a hysteresis, thereby eliminating unstable operation. The output signal of the beam position deviation amount determiner 24 is set to the local sensor automatic switcher 25.
The local sensor change-over switch 18 is automatically changed over by inputting to, and the optimum local beam position detection sensor is selected from 4-1 to 4-9.

The received light beam from the first light emitting diode 3 detected by the selected local beam position detection sensor is input to the local sensor received light amount detector 26, and the received light amount is set to a threshold value having a hysteresis characteristic set. If it is smaller, it is determined that the selected local beam position detection sensor is out of order, and the result is fed back to the beam position deviation amount determiner 24, and the sub-optimum that is the second closest to the origin from those in the detection linear region. A local position detection sensor is automatically discriminated, and the output signal thereof is input to the local sensor automatic switcher 25 to automatically switch the local sensor changeover switch 18, thereby 4-1 to 4-9.
A sub-optimal local beam position detection sensor is selected from among these.

First detected by the selected local beam position detection sensor, that is, the four-division element photodiode
The relative displacement with respect to the light emitting diode 3 is input to the movable mirror tilt angle calculator 19 to calculate the biaxial movable mirror tilt angle, and the difference from the command value 20 is calculated to calculate the biaxial control error amount. By inputting this to the compensator 21,
For example, the two-axis compensation control amount is calculated according to the PID control law,
The biaxial compensation control amount as the calculation result is further input to the distributor 22 and distributed to the three or more electromagnet type actuators 2 constituting the mirror tilting mechanism 23. Each electromagnet type actuator 2 is based on the calculated control amount,
The magnetic pole plate (not shown) disposed on the side surface of the movable portion 5 is attracted, and the movable portion 5 is controlled to a desired position in order to cancel the positional deviation of the fixed portion 14.

With the above-described structure, the deviation of the tilt angle of the movable part from the reference by the mirror tilt mechanism can be detected in a broad range, and the optimum local beam position detection sensor according to the tilt angle. Can be selected, the tilt angle of the movable part by the mirror tilt mechanism can be detected in a wide range and with high accuracy, and the incident beam from the outside can be guided to a desired position in a wide range and with high accuracy. A wide-angle incident beam from the outside can be directed to a desired position with high accuracy, and the degree of freedom of the installation locations of the reference and local beam position detection sensors can be increased.
In addition, the optimum local beam position detection sensor can be automatically switched when the movable part, that is, the mirror is tilted to a desired angle according to the command value, and the selected local beam position is detected by a large swing of the mirror due to disturbance or the like. Even when the sensor deviates from the linear region, it is possible to immediately and automatically switch to another optimum local beam position detection sensor.

Further, when any one of the plurality of local beam position detecting sensors other than the local beam position detecting sensor also serving as the reference beam position detecting sensor fails, an abnormality can be detected, and the failed local beam position detecting sensor can be detected. It is possible to select a sub-optimal local beam position detection sensor that is normal, and
The local beam position detection sensor can have redundancy.

Further, when the reference beam position detection sensor fails, an abnormality can be detected, the failed reference beam position detection sensor can be switched to the backup sensor, and the reference beam position detection sensor has redundancy. be able to.

Furthermore, the state of the light emitting body can be grasped for referring to the positional relationship between the movable portion and the fixed portion of the mirror tilting mechanism, and it is possible to detect that an abnormality has occurred in the light emitting body. When an abnormality occurs in the body, it can be automatically switched to a normal light emitting body, and the light emitting body can be provided with redundancy.

The combination of the above-described embodiments is not limited to this, and it goes without saying that the present invention includes all possible combinations of the above-described embodiments.

[0053]

As described above, according to the present invention, the mirror tilting mechanism controls the attitude of the mirror to guide the received light beam to a desired position with high accuracy. A movable part for fixedly holding a mirror that guides light to a desired position, a fixed part for swingably supporting the movable part, and a rotary swing joint for swingably connecting the movable part and the fixed part. A light emitting body fixed to the movable portion for referring to a positional relationship with the fixed portion; a spectroscopic unit for dividing a beam from the light emitting body into a plurality of beams; and a light emitting body fixed to the fixed portion from the light emitting body. A reference beam position detection sensor for broadly detecting the relative displacement of the movable part with respect to the fixed part based on the beam, and a beam from the light emitter fixed on the surface of the fixed part facing the beam from the light emitter. Or in the above spectroscopic section A plurality of reference beam position detection sensors for locally and more accurately detecting the relative displacement of the movable part with respect to the fixed part based on the light beam and a plurality of sensors arranged around the reference beam position detection sensor. A local beam position detection sensor, a local sensor changeover switch that selectively switches the plurality of local beam position detection sensors, and an optimum local beam position detection sensor are selected from the relative positional displacement amount of the movable part with respect to the fixed part. A movable mirror having a tilt angle of the movable portion based on a relative positional shift between the local sensor switching portion that automatically switches the local sensor changeover switch and the light emitter detected by the selected local beam position detection sensor. A movable mirror tilt angle calculator for calculating a tilt angle, and the movable mirror tilt angle A compensator for calculating a compensation control amount of the tilt angle of the movable part from the command value, and a mirror tilt mechanism for tilting the movable part to a desired angle by the output of the compensator. Since the precision pointing control device is used, it is possible to detect the deviation of the tilt angle of the movable part by the mirror tilt mechanism from the reference in a broad range, and to select the optimum local beam position detection sensor according to the tilt angle. It is possible to detect the tilt angle of the movable part by the mirror tilt mechanism in a wide range and with high accuracy, and it is possible to guide the incident beam from the outside to a desired position with a wide range and with high accuracy. Since various incident beams can be directed to a desired position with high accuracy, it is possible to increase the degree of freedom of the installation locations of the reference and local beam position detection sensors.

Further, the local sensor switching section is
A beam position deviation amount determiner that selects an optimal local beam position detection sensor from the relative position deviation amount of the movable portion with respect to the fixed portion, and a local sensor switching switch that automatically switches the local sensor changeover switch from the output of the beam position deviation amount determination device. Since it is characterized by including an automatic sensor switching device, it is possible to automatically switch the optimum local beam position detection sensor when the movable part, that is, the mirror is tilted to a desired angle according to the command value, Even when the mirror largely swings and deviates from the linear region of the selected local beam position detecting sensor, it is possible to immediately and automatically switch to another optimum local beam position detecting sensor.

Further, a local sensor light receiving amount detector for detecting the amount of light received by the local beam position detecting sensor is further provided, and the beam position deviation amount judging device receives light based on the detection result of the local sensor light receiving amount detector. The feature is that the local beam position detection sensor with a small beam intensity is removed from the selection frame, so if any of the local beam position detection sensors other than the local beam position detection sensor that also functions as the reference beam position detection sensor fails. It is possible to detect an abnormality in the local beam position detection sensor, disconnect the defective local beam position detection sensor, and select a sub-optimal local beam position detection sensor other than the normal one. You can have it.

Further, a backup sensor having a function equivalent to that of the reference beam position detection sensor, and an amount of light received by the reference beam position detection sensor are detected to determine whether or not there is an abnormality, and the reference beam position detection sensor is detected. Since it is characterized by including a reference sensor switching unit for switching to the backup sensor, it is possible to detect an abnormality when the reference beam position detection sensor fails,
The failed reference beam position detection sensor can be switched to the backup sensor, and the reference beam position detection sensor can be provided with redundancy.

Further, a plurality of the above-mentioned light emitters are provided, and a light collecting portion for combining a plurality of beams from the above-mentioned plurality of light emitters into one and a received light amount of light by the reference beam position detection sensor are detected. And a light emitter switching unit that switches the light emitter by determining whether there is an abnormality in the light emitter. Therefore, the light emitter for referring to the positional relationship between the movable portion and the fixed portion. It is possible to grasp the state of, and to detect that an abnormality has occurred in the light emitter, and when an abnormality occurs in the light emitter, it can automatically switch to a normal light emitter, and it is redundant to the light emitter You can have sex.

Further, the mirror tilting mechanism controls the attitude of the mirror and guides the received light beam to the desired position with high accuracy. This is a high precision directivity control device, and the mirror for guiding the received light beam to the desired position is fixed. A movable portion to be held, a fixed portion for swingably supporting the movable portion, a rotary swing joint for swingably coupling the movable portion and the fixed portion, and the fixed portion fixed to the movable portion. And a spectroscopic unit that divides the beam from the luminous unit into a plurality of beams, and the spectroscopic unit fixed on the surface of the fixing unit facing the beam from the luminous unit. A plurality of two-dimensional array sensors for detecting the relative displacement of the movable part with respect to the fixed part in a wide range and with high accuracy based on the beam dispersed by
A two-dimensional array sensor changeover switch that selectively switches the plurality of two-dimensional array sensors, and a two-dimensional array sensor changeover switch that detects the light amount of a light beam received by the two-dimensional array sensor to determine whether there is an abnormality. Movable mirror that calculates a movable mirror tilt angle, which is the tilt angle of the movable part, based on the relative displacement between the reference sensor switching part that automatically switches and the light emitter detected by the selected two-dimensional array sensor. A tilt angle calculator, a compensator that calculates a compensation control amount of the tilt angle of the movable part from the movable mirror tilt angle and a command value, and a mirror tilt that tilts the movable part to a desired angle by the output of the compensator. Mechanism,
Since the high-accuracy pointing control device is characterized by including, it is possible to detect a deviation from the reference of the tilt angle of the movable portion by the mirror tilt mechanism in a wide range and with high accuracy, and to determine the tilt angle of the movable portion. Can detect a wide range with high accuracy,
An incident beam from the outside can be guided to a desired position in a wide range with high accuracy, and a wide-angle incident beam from the outside can be directed to the desired position with high accuracy, and the two-dimensional array sensor has no abnormality. It can detect that it has occurred,
When an abnormality occurs in the two-dimensional array sensor, it can be automatically switched to a normal two-dimensional array sensor, the two-dimensional array sensor can be provided with redundancy, and the number of sensors can be reduced to reduce the size of the device. It can be made lighter and lighter.

Further, the mirror tilting mechanism controls the attitude of the mirror to guide the received light beam to a desired position with high accuracy, and is a high precision directivity control device, wherein the mirror for guiding the received light beam to a desired position is fixed. A movable portion to be held, a fixed portion for swingably supporting the movable portion, a rotary swing joint for swingably coupling the movable portion and the fixed portion, and the fixed portion fixed to the movable portion. A plurality of light emitters for referring to the positional relationship between the light emitters, a light condensing unit that combines a plurality of beams from the plurality of light emitters into one, and a light emitting unit that is fixed to the fixing unit. A reference beam position detection sensor for detecting the relative displacement of the movable part with respect to the fixed part based on the beam, a light emitter changeover switch for selectively switching the plurality of light emitters, and a light reception by the reference beam position detection sensor. Beam intensity A light emitter switching unit that automatically detects the abnormalities of the light emitters by detecting and selects the most suitable light emitters and automatically switches the light emitter switch, and the light emission detected by the reference beam position detection sensor. A movable mirror tilt angle calculator that calculates a movable mirror tilt angle, which is the tilt angle of the movable portion, based on a relative displacement with the body, and compensation control of the tilt angle of the movable portion from the movable mirror tilt angle and a command value. Since the compensator for calculating the quantity and the mirror tilting mechanism for tilting the movable part to a desired angle by the output of the compensator are provided as the high precision pointing control device, the movable part and the fixed part are fixed. It is possible to grasp the state of the light emitter for referring to the positional relationship of the parts, it is possible to detect that an abnormality has occurred in the light emitter, and when the abnormality occurs in the light emitter, the normal light emitter is automatically detected. Cut into pieces Obtain it possible, can Motas redundancy emitters.

[Brief description of drawings]

FIG. 1 is a diagram mainly showing an example of a configuration of a movable mechanism portion of a high precision pointing control device according to the present invention.

FIG. 2 is a top view of a movable mechanism portion of FIG.

FIG. 3 is a diagram showing an example of a local position beam detection sensor configuration according to the present invention.

FIG. 4 is a diagram showing a configuration of a high precision pointing control device according to the first embodiment of the present invention.

FIG. 5 is a diagram showing a configuration of a high precision pointing control device according to a second embodiment of the present invention.

FIG. 6 is a diagram showing a configuration of a high precision pointing control device according to a third embodiment of the present invention.

FIG. 7 is a diagram showing an example of a beam detection sensor configuration of a high precision pointing control device according to a third embodiment of the present invention.

FIG. 8 is a diagram mainly showing a configuration example of a movable mechanism portion of a high precision pointing control device according to a fourth embodiment of the present invention.

FIG. 9 is a diagram showing a configuration of a high precision pointing control device according to a fourth embodiment of the present invention.

FIG. 10 is a diagram mainly showing a configuration example of a movable mechanism portion of a high precision pointing control device according to a fifth embodiment of the present invention.

FIG. 11 is a diagram showing a configuration of a high precision pointing control device according to a fifth embodiment of the present invention.

FIG. 12 is a diagram mainly showing a configuration example of a movable mechanism portion of a high precision pointing control device according to a sixth embodiment of the present invention.

FIG. 13 is a diagram showing a configuration of a high precision pointing control device according to a sixth embodiment of the present invention.

FIG. 14 is a diagram showing a configuration of a conventional high precision pointing control device.

[Explanation of symbols]

1 mirror 2 electromagnet type actuator 3 first
Light emitting diode, 4-1 first four-divided element photodiode, 4-2 second four-divided element photodiode, 4-3 third four-divided element photodiode, 4-
4 4th 4-division element photodiode, 4-5 5th
4-division element photodiode, 4-6 6th 4-division element photodiode, 4-7 7th 4-division element photodiode, 4-8 8th 4-division element photodiode, 4-9 9th 4 Split element photodiode, 5
Movable part, 6-1 First flex pivot, 6-2
2nd flex pivot, 7 beam splitter,
8 reflective mirror, 9 inner movable part, 10 outer movable part,
11 light emitting diode outgoing beam, 12 incoming beam,
13 is a reflected beam, 14 is a fixed part, 15 is a flange, 1
9 Movable mirror tilt angle calculator, 20 Command value, 21
Compensator, 22 Distributor, 23 Mirror tilting mechanism, 24
Beam position deviation amount discriminator, 25 local sensor automatic switcher.

Continued front page    F term (reference) 2F065 AA19 AA35 BB29 CC21 DD14                       EE00 FF23 GG07 GG12 GG13                       JJ01 JJ05 JJ22 JJ26 LL12                       LL46 NN01 NN11 NN20 PP13                       QQ25 QQ28                 2H043 AA08 AD01 AD10 BB00 BC01

Claims (7)

[Claims] 1. A high-precision pointing control device for controlling the attitude of a mirror by a mirror tilting mechanism to guide a received light beam to a desired position with high accuracy, wherein the mirror for guiding the received light beam to a desired position is fixed. A movable part to be held, a fixed part for swingably supporting the movable part, a rotary swing joint for swingably connecting the movable part and the fixed part, and the fixed part fixed to the movable part. And a spectroscopic unit that divides the beam from the light emitter into a plurality of beams, and a movable unit that is fixed to the fixed unit and is movable relative to the fixed unit based on the beam from the light emitter. A reference beam position detection sensor for detecting relative displacement in a wide range, and a beam fixed from the light emitting body of the fixing unit facing the beam from the light emitting body or a beam dispersed by the spectroscopic unit. Based on A plurality of local beam position detection sensors composed of the reference beam position detection sensor and a plurality of sensors arranged around the reference beam position detection sensor for locally and highly accurately detecting the relative displacement of the movable part with respect to the fixed part; The local sensor changeover switch that selectively switches the plurality of local beam position detection sensors and the optimum local beam position detection sensor is selected from the relative positional displacement amount of the movable portion with respect to the fixed portion, and the local sensor changeover switch is automatically operated. A movable mirror that calculates a tilt angle of a movable mirror, which is a tilt angle of the movable portion, based on a relative positional deviation between a local sensor switching portion that is switched to a desired position and the light-emitting body detected by the selected local beam position detection sensor. The tilt angle calculator and the tilt of the movable part from the tilt angle of the movable mirror and the command value. A compensator for calculating a compensation control amount of angular, high-precision pointing control device being characterized in that and a mirror tilting mechanism for tilting the movable portion to a desired angle by the output of the compensator. 2. A beam position deviation amount determiner for selecting the optimum local beam position detection sensor from the relative position deviation amount of the movable portion with respect to the fixed portion by the local sensor switching unit, and the beam position deviation amount determination unit. The high-precision pointing control device according to claim 1, further comprising a local sensor automatic switcher that automatically switches a local sensor changeover switch from an output. 3. A local sensor light receiving amount detector for detecting the amount of light received by the local beam position detecting sensor, wherein the beam position deviation amount judging device receives light based on a detection result of the local sensor light receiving amount detector. The high-precision pointing control device according to claim 2, wherein the local beam position detection sensor having a small beam light amount is removed from the selection frame. 4. A backup sensor having a function equivalent to that of the reference beam position detection sensor, and a reference beam position detection sensor for detecting whether or not there is an abnormality by detecting a light amount of a received light beam at the reference beam position detection sensor. A reference sensor switching unit for switching the backup sensor to
The high-accuracy pointing control device according to any one of claims 1 to 3, further comprising: 5. A light condensing unit comprising a plurality of the light emitters, combining a plurality of beams from the plurality of light emitters into one, and detecting a light amount of a received light beam by the reference beam position detection sensor. 5. The high precision pointing control device according to claim 1, further comprising: a light emitter switching unit that switches the light emitters by determining whether the light emitters are abnormal. 6. A high-accuracy pointing control device that guides a received light beam to a desired position with high accuracy by controlling the attitude of the mirror by a mirror tilting mechanism, wherein the mirror that guides the received light beam to a desired position is fixed. A movable part to be held, a fixed part for swingably supporting the movable part, a rotary swing joint for swingably connecting the movable part and the fixed part, and the fixed part fixed to the movable part. And a spectroscopic unit that divides the beam from the luminous unit into a plurality of beams, and the spectroscopic unit fixed on the surface of the fixing unit facing the beam from the luminous unit. A plurality of two-dimensional array sensors for detecting the relative displacement of the movable part with respect to the fixed part in a wide range and with high accuracy based on the beam dispersed by Dimensional array A changeover switch, a reference sensor changeover unit for automatically detecting the light quantity received by the two-dimensional array sensor to determine whether or not there is an abnormality, and automatically changing over the two-dimensional array sensor changeover switch, and the selected two-dimensional array. A movable mirror tilt angle calculator for calculating a movable mirror tilt angle, which is a tilt angle of the movable portion, based on a relative displacement between the movable body and the light emitting body detected by a sensor, and the movable mirror tilt angle and a command value for moving the movable mirror tilt angle. A high-accuracy pointing control device comprising: a compensator for calculating a compensation control amount of a tilting angle of a part; and a mirror tilting mechanism for tilting the movable part to a desired angle by the output of the compensator. 7. A high-accuracy directivity control device that guides a received light beam to a desired position with high accuracy by controlling the attitude of the mirror by a mirror tilting mechanism, wherein the mirror that guides the received light beam to a desired position is fixed. A movable part to be held, a fixed part for swingably supporting the movable part, a rotary swing joint for swingably connecting the movable part and the fixed part, and the fixed part fixed to the movable part. A plurality of light emitters for referring to a positional relationship between the light emitters, a light condensing unit that combines a plurality of beams from the plurality of light emitters into one, and a light emitting unit that is fixed to the fixing unit. A reference beam position detection sensor for detecting the relative displacement of the movable part with respect to the fixed part based on the beam, a light emitter changeover switch for selectively switching the plurality of light emitters, and a light reception by the reference beam position detection sensor. Beam intensity A light emitter switching unit that automatically detects the abnormalities of the light emitters by detecting and selects the most suitable light emitter and automatically switches the light emitter switch, and the light emission detected by the reference beam position detection sensor. A movable mirror tilt angle calculator that calculates a movable mirror tilt angle, which is the tilt angle of the movable portion, based on a relative displacement with the body, and a compensation control of the tilt angle of the movable portion from the movable mirror tilt angle and a command value. A high-precision pointing control device comprising: a compensator for calculating a quantity; and a mirror tilting mechanism for tilting the movable part to a desired angle by the output of the compensator.