JP2003144831A - Rotor type dehumidifier - Google Patents

Abstract

PROBLEM TO BE SOLVED: To miniaturize a rotor type dehumidifier and to reduce the apparatus cost. SOLUTION: This rotor type dehumidifier is provided with a preliminary treatment region 4 where air OA is sent into an adsorbent layer X to preliminarily dehumidify the air OA, a regeneration region 5 where a high temperature gas HA for regeneration is sent into the adsorbent layer X to regenerate the adsorbent layer X, a purge region 6 where a gas PA for a purge is sent into the adsorbent layer X to purge the adsorbent layer X, and a main treatment region 7 where preliminarily dehumidified air OA' having passed through the preliminary treatment region 4 is sent to the adsorbent layer X to mainly dehumidify the air OA', in this order in a rotor rotating direction and in the rotation route of the adsorption rotor 3. The ventilation direction of the air OA to the adsorbent layer X in the preliminary treatment region 4 and the ventilation direction of the air OA' to the adsorbent layer X in the main treatment region 7 are made into a reverse direction to each other.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a rotor type dehumidifying device used to form a low humidity environment (that is, a low dew point environment) in a manufacturing facility or an environmental test room for articles that dislike the presence of moisture in the air. More specifically, as shown in FIGS. 4 and 5, the adsorbent layer X of the rotor portion in the process of passing the air OA inside the zone is provided in the rotation path of the adsorption rotor 3 in which the adsorbent layer X is continuously arranged in the rotor rotation direction. And a pretreatment area 4 for pre-dehumidifying the air OA and a regeneration area 5 for regenerating the adsorbent layer X by ventilating the regeneration high-temperature gas HA to the adsorbent layer X of the rotor part in the process of passing through the zone. And a purging region for purging the adsorbent layer X by ventilating the purging gas PA to the adsorbent layer X in the rotor portion in the process of passing through the region, and the pretreatment region 4
The pre-dehumidified air OA 'that has passed through the air passage to the adsorbent layer X of the rotor portion in the process of passing through the zone to main dehumidify the pre-dehumidified air OA', and the main rotation region 7 in that order. The present invention relates to a rotor type dehumidifier arranged side by side in a direction.

[0002]

2. Description of the Related Art Conventionally, in this type of rotor type dehumidifier,
As shown in FIGS. 4 and 5, in the structure in which the pretreatment area 4, the regeneration area 5, the purge area 6, and the main treatment area 7 are arranged in the rotation path of the adsorption rotor 3 in that order in the rotor rotation direction, Ventilation direction of air OA to the adsorbent layer X in the treatment area 4 and air OA 'to the adsorbent layer X in the main treatment area 4
Of the adsorbent layer X on the same side in each of the pretreatment region 4 and the main treatment region 7 is the inlet face of the air OA, OA '. (JP-A-6-343819, JP-A-200)
0-240979).

[0003]

However, in the above-mentioned conventional apparatus, in order to guide the pre-dehumidified air OA 'which has passed through the pretreatment area 4 to the main treatment area 7, as shown in FIGS. The inter-zone air duct 10 in a state of straddling the rotor 3 must be formed, which causes a problem that the structure of the device becomes complicated, the device becomes large, and the device cost becomes high.

In view of this situation, the main problem of the present invention is to
The reason is that the above problems can be effectively solved by rational improvement.

[0005]

[1] The invention according to claim 1 relates to a rotor type dehumidifying device, which is characterized in that a rotation path of an adsorption rotor in which an adsorbent layer is continuously arranged in a rotor rotation direction, A pre-treatment area where air is ventilated to the adsorbent layer of the rotor part in the process of passing through the zone and pre-dehumidifying the air, and a high-temperature regeneration gas is ventilated to the adsorbent layer of the rotor part in the process of passing through the region and its adsorption A regeneration zone for regenerating the agent layer, a purge zone for purging the adsorbent layer by ventilating the purging gas to the adsorbent layer of the rotor part in the process of passing through the zone, and a pre-dehumidification area after passing through the pretreatment zone. In a configuration in which a main treatment area for ventilating air into the adsorbent layer of the rotor portion in the process of passing through the zone to mainly dehumidify the air after the pre-dehumidification is arranged side by side in that order in the rotor rotation direction, Direction of air flow to the adsorbent layer of Lies in that is the ventilation direction and an opposite direction to each other in the air for the adsorbent layer in the main treatment zone.

That is, according to this construction (see FIGS. 1 and 2), the inter-area air duct for that purpose is to guide the pre-dehumidified air OA 'that has passed through the pre-treatment area 4 to the main treatment area 7. As a result, it suffices to form a simple and short inter-area air duct 10 by simply changing the direction of the air OA 'after pre-dehumidification without straddling the adsorption rotor 3, and thus, compared with the above-mentioned conventional apparatus. The structure can be simplified, the device can be effectively downsized, and the device cost can be reduced.

[2] The invention according to claim 2 specifies the preferred embodiment for carrying out the invention according to claim 1, which is characterized in that air for the adsorbent layer in the pretreatment zone is The ventilation direction is opposite to the ventilation direction of the high temperature gas for regeneration with respect to the adsorbent layer in the regeneration zone.

That is (see FIG. 1 and FIG. 2), the adsorbent layer X in the air-ventilated state adsorbs faster at the portion on the inlet side of the air OA, OA 'than at the portion on the outlet side. Although the water content is high, compared to the main treatment area 7 that dehumidifies the low-humidity air OA 'after pre-dehumidifying in the pre-treatment area 4, the high-humidity air O
Since the pretreatment area 4 for dehumidifying A has a larger dehumidification amount (in other words, the adsorption amount) in the entire area, the ventilation direction of the air OA, OA ′ to the adsorbent layer X is set to the pretreatment area 4 and the main treatment. In the configuration of the invention according to claim 1 in which the areas 7 and 8 are opposite to each other, the adsorbent layer X that enters the regeneration area 5 through the main processing area 7 and the preprocessing area 4 is The water content in the part on the inlet side is higher than that on the part on the outlet side, and the water content is higher.

On the other hand, in the adsorbent layer X in the regeneration zone 5, the temperature of the portion on the inlet side of the high temperature gas for regeneration HA is higher than that on the outlet side by the heat applied from the high temperature gas for regeneration HA. Becomes fast and hot.

Therefore, as described above, the ventilation direction of the air OA to the adsorbent layer X in the pretreatment zone 4 and the ventilation direction of the high temperature gas HA for regeneration to the adsorbent layer X in the regeneration zone 5 are made opposite to each other. The portion of the adsorbent layer on the outlet side of the air OA in the pretreatment area 4 (that is, the portion having a low water content and requiring a high temperature for desorption of adsorbed moisture) is connected to the inlet side of the regeneration high temperature gas HA in the regeneration area 5. If it is positioned, compared with the opposite case, in the state where the temperature distribution is adapted to the distribution of the water content in the adsorbent layer X (in short, the state where waste of high temperature is avoided), It is possible to secure a higher desorption performance as a whole of 5, and the adsorption performance in the main treatment area 7 and the pretreatment area 4 can be improved by that much.
A high dehumidification performance can be obtained while the pre-treatment area 4 and the main treatment area 7 are configured so that the ventilation directions of the air OA and OA 'with respect to the adsorbent layer X are opposite to each other.

[3] The invention according to claim 3 specifies the preferred embodiment for carrying out the invention according to claim 1 or 2, which is characterized in that the adsorbent layer is purged in the purge area. The ventilation direction of the working gas is the same as the ventilation direction of air to the adsorbent layer in the main treatment area.

That is (see FIG. 1 and FIG. 2), the adsorbent layer X having a high temperature in the regeneration zone 5 has a purge gas P in the purge zone 6.
Although it is rapidly cooled by the ventilation of A, at this time, the temperature of the adsorbent layer X at the inlet side of the purging gas PA decreases faster than that at the outlet side thereof, so that the main part of the adsorbent layer X passes through the purge area 6. The adsorbent layer X entering the processing area 7 has a lower temperature in the purge area 6 on the inlet side of the purge gas PA than on the outlet side thereof.

On the other hand, since the adsorption is an exothermic reaction, the temperature of the adsorbent layer X in the main processing area 7 rises, but the temperature of the adsorbent layer X rises due to the gradual temperature rise of the passing air OA 'due to the heat generated. Of the air OA 'is larger on the outlet side than on the inlet side.

From these facts, the ventilation direction of the purging gas PA with respect to the adsorbent layer X in the purge area 6 and the main processing area 7
In the case where the ventilation directions of the air OA 'with respect to the adsorbent layer X are set to be opposite to each other, the purging gas P
Since the adsorbent layer portion on the inlet side of A (that is, the portion having a high adsorption efficiency at a low temperature) is located on the outlet side of the air OA ′ in the main processing area 7, the temperature becomes high, and the high adsorption efficiency of that portion. However, as described above, the purge area 6
If the ventilation direction of the purging gas PA with respect to the adsorbent layer X in (1) and the ventilation direction of the air OA 'with respect to the adsorbent layer X in the main processing area 7 are made to be the same direction, the adsorbent layer portion with high adsorption efficiency (purge It is possible to prevent the high temperature in the main processing area 7 in the area where the purge gas PA is on the inlet side in the area 6) and to effectively maintain the high adsorption efficiency in that area. As a result, the adsorption performance as a whole of the main treatment area 7 can be ensured higher and the dehumidification performance can be enhanced more effectively.

[0015]

BEST MODE FOR CARRYING OUT THE INVENTION In FIG. 1, reference numeral 1 denotes an article which does not like the presence of moisture in the air (for example, electronic parts, drugs, films, etc.).
Is a dry room as a low-humidity target area in which the manufacturing work of (1) is performed. To this dry room 1, extremely low humidity air SA (for example, air having a dew point temperature of −35 ° C.) generated by the dehumidifying device 2 using the adsorption rotor is provided. Is supplied to maintain the dry room 1 in a required low-humidity atmosphere.

The adsorbing rotor 3 of the dehumidifying device 2 comprises a gas-permeable adsorbent layer X made of an adsorbent such as silica gel, zeolite, or activated carbon, which is continuously arranged in the rotor rotating direction as a rotor constituent material. In the embodiment, as shown in FIG. 2, a disk-shaped adsorption rotor 3 that allows gas to pass in the direction of the rotor rotation axis P is used.

Further, the rotation path of the adsorption rotor 3 is such that the pretreatment area 4, the regeneration area 5, the purge area 6,
The main processing area 7 is divided into four areas, and these four areas 4 to 7 are arranged in the rotor rotation direction in the above-described order, so that each part of the rotor is pretreated along with the rotation of the adsorption rotor 3. 4, the regeneration area 5, the purge area 6, and the main processing area 7 are moved in this order.

Reference numeral 8 is an outside air introduction path for introducing outside air OA from the outside. The outside air introduction path 8 purifies the introduced outside air OA (for example, air having a dry-bulb temperature of 34 ° C. and an absolute humidity of 22.1 g / kg DA). Filter 9A and its filter 9
It is equipped with a precooler 9B that precools the outside air OA purified by A. 9C is an eliminator equipped on the precooler 9B.

In the pretreatment zone 4, the introduced outside air OA purified and precooled by the filter 9A and the precooler 9B is passed as air to be treated to the adsorbent layer X of the rotor portion which is in the process of passing through the zone, The outside air O
A is dehumidified (preliminary dehumidification) by adsorption of water by the adsorbent layer X.

In the main processing area 7, the inter-area air duct 1
Outside air O after pre-dehumidification led from the pretreatment area 4 through 0
With respect to the adsorbent layer X of the rotor portion in the process of passing through A ′ (that is, the adsorbent layer having a high adsorption capacity before use in the pretreatment region 4), the ventilation direction of the outside air OA in the pretreatment region 4 is Is ventilated in the opposite direction to further dehumidify the outside air OA ′ after the pre-dehumidification to the required humidity by the water adsorption by the adsorbent layer X (main dehumidification). After being cooled by, the low humidity air SA is supplied to the dry room 1 through the air supply passage 12.

On the other hand, 13 is a regeneration outside air introduction passage for introducing the regeneration outside air OA, and a filter 14 for purifying the introduced regeneration outside air OA is provided in the regeneration outside air introduction passage 13.
And the outside air OA for regeneration purified by the filter 14
Is equipped with a regeneration heater 15 for heating the same to a predetermined temperature to generate a high temperature regeneration gas HA.

In the regeneration zone 5, the high temperature regeneration gas HA produced by the regeneration heater 15 is used for the adsorbent layer X of the rotor portion in the process of passing through the zone (that is, after being used for main dehumidification and pre-dehumidification). The adsorbent layer) is ventilated in the direction opposite to the ventilation direction of the outside air OA in the pretreatment area 4, so that the adsorbed water in the main treatment area 7 and the pretreatment area 4 is desorbed from the adsorbent layer X. , The adsorbent layer X is regenerated.

In the purge area 6, the inter-area air duct 1
Part of the pre-dehumidified outside air OA ′, which has been split from 0 to the purging flow passage 16, is used as the purging gas PA with respect to the adsorbent layer X of the rotor portion that is in the process of passing through the outside air O in the main processing region 7.
By ventilating in the same direction as the ventilation direction of A ', the scavenging (purge) of the high temperature gas HA for regeneration remaining in the adsorbent layer X,
Further, the adsorbent layer X is cooled, and after the scavenging / cooling process in the purge region 6, the regenerated adsorbent layer X in the regeneration region 5 is followed by the main treatment region 7 and the subsequent treatment as the rotor 3 rotates. The pretreatment area 4 is re-transferred.

Reference numeral 17 denotes an exhaust passage for discharging the used high-temperature regeneration gas HA 'from the regeneration area 5 to the outside, and 18 denotes a part of the used high-temperature regeneration gas HA' split from the exhaust passage 17. Is a heat recovery mixing passage on the exhaust side for mixing the split gas HA ″ with the regeneration outside air OA of the regeneration outside air introduction passage 13, and 19 is a used purging gas sent from the purging area 6. This is a heat recovery mixing passage on the purge side for mixing PA ′ with the regeneration outside air OA of the regeneration outside air introduction passage 13.

Reference numeral 20 denotes a processing-side fan provided in the inter-zone air duct 10 upstream of the branching point of the purging branch passage 16. The processing-side fan 20 allows the outside air OA to flow through the outside air introduction passage 8. Ventilation of the outside air OA, OA 'to the adsorbent layer X in the introduction, pretreatment region 4 and main treatment region 7, and the purge gas P for the adsorbent layer X in the purge region 6.
Ventilate A.

Reference numeral 21 denotes a heat recovery mixing passage 18 on the exhaust side.
Is a regeneration side fan that is interposed in the exhaust passage 17 upstream of the branch point, and the regeneration side fan 21 introduces the regeneration outside air OA through the regeneration outside air introduction passage 13, and
Ventilation of the high temperature gas HA for regeneration through the adsorbent layer X in the regeneration zone 5 is performed.

Reference numeral 22 is a purge-side damper provided in the purging flow passage 16, and as described above, the treatment-side fan 20 ventilates the outside air OA 'to the adsorbent layer X in the main treatment area 7 and in the purge area 6. While also serving as ventilation of the purging gas PA to the adsorbent layer X, the main processing area 7 is maintained at a positive pressure with respect to the adjacent purging area 6 by adjusting the opening degree of the purging side damper 22. This surely prevents gas leakage from the purge area 6 to the main processing area 7 which causes deterioration of dehumidification performance.

The processing side fan 20 is connected to the inter-zone air duct 10.
The main treatment area 7 is maintained at a positive pressure with respect to the pretreatment area 4 on the opposite side by adopting the method of interposing on the front side of the main treatment area 4, which causes a decrease in dehumidification performance from the main treatment area 4 to the main treatment area 4. Gas leakage to 7 is also reliably prevented.

Reference numeral 23 is a regeneration side damper in which the regeneration high temperature gas HA generated by the regeneration heater 15 is interposed in a regeneration air guide passage 24 for guiding the regeneration high temperature gas HA to the regeneration zone 5.
However, by adjusting the opening of the reproduction side damper 23, the pretreatment area 4
Is maintained at a positive pressure with respect to the adjacent regeneration zone 5, thereby reliably preventing gas leakage from the regeneration zone 5 to the pretreatment zone 4, which also causes a decrease in dehumidification performance.

[Other Embodiments] Next, other embodiments will be listed.

In the above-described embodiment, an example of using a disk-shaped adsorption rotor that allows gas to pass in the direction of the rotor rotation axis P has been described, but as shown in FIG. 3, a cylindrical adsorption that allows gas to pass in the radial direction of rotation. In the rotor type dehumidifier using the rotor 3, the air flow direction of the air OA to the adsorbent layer X in the pretreatment area 4 and the air O to the adsorbent layer X in the main treatment area 7
The configuration of the invention according to claim 1 in which the ventilation directions of A'are opposite to each other (that is, the surfaces on the same side of the adsorbent layer X in each of the pretreatment region 4 and the main treatment region 7 are air OA, OA). ′
May be adopted).

Further, in contrast to the rotor type dehumidifying device using the cylindrical adsorption rotor 3 as described above, which employs the constitution of the invention according to claim 1, as shown in FIG. The configuration of the invention according to claim 2, wherein the ventilation direction of the air OA with respect to the agent layer X and the ventilation direction of the high temperature gas HA for regeneration with respect to the adsorbent layer X in the regeneration zone 5 are opposite to each other, and in the purge zone 6. Ventilation direction of the purging gas PA to the adsorbent layer X and air OA 'to the adsorbent layer X in the main processing area 7.
You may make it employ | adopt the structure of the invention which concerns on Claim 3 which makes the same ventilation direction as.

Further, the adsorption rotor 3 is not limited to the disc-shaped rotor or the cylindrical rotor, but may be an endless belt-shaped rotor that allows gas to pass in a direction orthogonal to the belt surface. The rotor type dehumidifier using a rotor may employ the configurations of the invention according to claims 1 to 3.

The high-temperature gas HA for regeneration may be any high-temperature gas, such as high-temperature air, high-temperature steam, combustion gas, etc., as long as it can desorb adsorbed moisture from the adsorbent layer X and purging. The gas PA for use is not limited to a part of the air OA ′ after the pre-dehumidification, but a scavenging / cooling process is performed on the adsorbent layer X after the regeneration such as a part of the air OA ″ after the main dehumidification and other gases. Any gas may be used as long as it can be obtained.

In the above-described embodiment, an example of a total outside air system in which 100% outside air is ventilated in the adsorbent layer X in the pretreatment area 4 has been shown, but the air to be treated in the pretreatment area 4 is limited to 100% outside air. Air mixed with a part of exhaust air from the dry room 1 or a part of air OA ″ after main dehumidification or a part of air OA ′ after pre-dehumidification, etc. May be pre-dehumidified in the pre-treatment area 4.

Regarding the main dehumidification in the main treatment area 7,
Instead of performing the main dehumidification only on the air OA ′ after the pre-dehumidification as in the above-described embodiment, a part of the exhaust air from the dry room 1 or after the main dehumidification is performed on the air OA ′ after the pre-dehumidification. The air mixed with a part of the air OA ″ may be dehumidified in the main treatment area 7.

The use of the low-humidity air OA ″ after main dehumidification and the use of the low-humidification target area 1 for supplying the low-humidity air OA ″ after main dehumidification may be any, and the rotor according to the present invention may be used. The dehumidifier can be used for various purposes in various fields.

[Brief description of drawings]

FIG. 1 is a diagram showing the overall configuration of the apparatus.

FIG. 2 is a perspective view of a suction rotor portion.

FIG. 3 is a perspective view of a suction rotor portion showing another embodiment.

FIG. 4 is a diagram showing the overall configuration of a conventional device.

FIG. 5 is a perspective view of a suction rotor portion in a conventional device.

[Explanation of symbols]

3 Adsorption rotor 4 pretreatment area 5 play area 6 Purge area 7 Main processing area High temperature gas for HA regeneration OA air OA 'Air after pre-dehumidification PA purging gas X adsorbent layer

Claims (3)

[Claims] 1. A pretreatment for ventilating the adsorbent layer of a rotor part, which is in the process of passing through a zone, through a rotating path of an adsorbing rotor in which an adsorbent layer is continuously arranged in a rotor rotating direction to pre-dehumidify the air. Area, a regeneration area for regenerating the adsorbent layer by ventilating high-temperature gas for regeneration to the adsorbent layer of the rotor section that is in the process of passing through the zone, and purging gas to the adsorbent layer of the rotor section that is in the process of passing through the zone. A purge area for ventilating and purging the adsorbent layer, and air for pre-dehumidification that has passed through the pre-treatment area are ventilated to the adsorbent layer of the rotor part that is in the process of passing through the zone, and the air after pre-dehumidification is mainly A main treatment area for dehumidification, a rotor-type dehumidifier arranged in that order in the rotor rotation direction, and a ventilation direction of air to the adsorbent layer in the pretreatment area,
A rotor-type dehumidifying device in which the directions of ventilation of air to the adsorbent layer in the main treatment area are opposite to each other. 2. The ventilation direction of air to the adsorbent layer in the pretreatment zone and the ventilation direction of the high temperature gas for regeneration to the adsorbent layer in the regeneration zone are opposite to each other. Rotor type dehumidifier. 3. The ventilation direction of the purging gas to the adsorbent layer in the purge zone and the ventilation direction of air to the adsorbent layer in the main treatment zone are the same. Rotor type dehumidifier.