JP2003139427A - Cooling device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To protect a pulse tube refrigerator of a cooling device from damage by vibration even if the pulse tube refrigerator is used under large vibration, and enable use of the pulse tube refrigerator of the cooling device under large vibration, for example, in a superconductive magnet device of a magnetically levitated vehicle. SOLUTION: The cooling device is so constructed that, in the pulse tube refrigerator of multistage expansion having a compressor 1 as a pressure source, a first and a second regenerator 5 and 7, a first and a second pulse tube 9 and 14, and a first and a second cold heat recovering heat exchanger 8 and 12 for cold heat recovery, the first cold heat recovering heat exchanger 8 is disposed at a cold end 9b of the first pulse tube 9 on a hot side, and the second cold heat recovering heat exchanger 12 is disposed at a cold end 7b of the second regenerator 7.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a cooling device including a multistage expansion pulse tube refrigerator having a pressure source, a plurality of regenerators, a plurality of pulse tubes, and a plurality of heat exchangers for recovering cold heat. It can be used at low temperature for a superconducting magnet device, for example, a superconducting magnet device for a magnetically levitated vehicle, MRI, or the like.

[0002]

2. Description of the Related Art A conventional cooling device (Japanese Patent Laid-Open No. 2000-161)
803), as shown in FIG. 6, the superconducting magnet 101 cooled by the first refrigerant 103a such as liquid helium is housed in the container 102, and the container 102 is shielded by the shield plate 1.
05, the shield plate 105 is housed in a vacuum chamber 107, and the container 102 is fixed to the vacuum chamber 107 via a large number of heat insulating support members 104, a shield plate 105, and a large number of heat insulating support members 106. In this way, the superconducting magnet device 100 is constructed.

The first cooling device 110 comprises a Joule-Thomson circuit 110A and a pulse tube refrigerator 110B. The Jules Thomson circuit 110A is a compressor 119.
And a low-pressure pipe 120, a high-pressure pipe 121, and a low temperature section 124 of the Joule-Thomson circuit 110A.
The low temperature section 124 includes the heat exchangers 111, 112, 113, 1
14, cold heat recovery heat exchangers 115a, 115b, 116
a, 116b, 117a, 117b, a Joule-Thomson valve 118, and a low temperature pipe 123,
The low temperature section 124 is installed in the vacuum chamber 107.

The downstream side of the Joule-Thomson valve 118 communicates with the container 102. A low pressure side of the heat exchanger 114,
The downstream side of the Joule-Thomson valve 118 is connected to the vapor phase 103b of the container 102 via the low temperature pipes 123 and 122, respectively.
The high pressure side of the heat exchanger 114 communicates with the upstream side of the Joule Thomson 118.

The suction port of the compressor 119 is a low pressure pipe 120.
Via the high pressure pipe 121, and the discharge port of the compressor 119 is connected to the low pressure side of the heat exchanger 111 via the high pressure pipe 121.
It communicates with the high pressure side of 11. The compressor 119 is installed at a remote place where the influence of the magnetic field generated by the superconducting magnet 101 is small.

The pulse tube refrigerator 110B is a compressor 110.
B1 and the first low temperature generator 110B2. The high-pressure pipe 125 of the low temperature generation unit 110B2 is connected to the drive unit 132 by the rotary switching valves 131a, 131b, 131.
It communicates with the low pressure ports of c, 131d, 131e and 131f. The communication ports of the rotary switching valves 131a, 131b, 131c are the normal temperature side of the regenerator 135a and the throttle 13, respectively.
It communicates with 6b and 136c.

The low temperature side of the regenerator 135a has a regenerator 135a.
b is connected to one end of the conduit 137a, and the regenerator 135
The cold side of b communicates with the cold section of the pulse tube 138b via conduit 137b. The other end of the conduit 137a communicates with the low temperature side of the pulse tube 138a. Cold heat recovery heat exchangers 115a and 115b are in thermal contact with the low temperature side of the regenerator 135a and the low temperature side of the pulse tube 138a, respectively.
The low temperature side of the regenerator 135b and the low temperature side of the pulse tube 138b are also in thermal contact with the cold heat recovery heat exchangers 116a and 116b, respectively.

The high temperature side of the pulse tubes 138a and 138b is
Aperture 136 through radiators 139a and 139b, respectively
b, 136c. In this way a set of 2
First low temperature generating part 110B2 of pulse tube 110B for stage expansion
Is configured.

Rotary switching valves 131d, 131e, 13
The communication ports of 1f communicate with the room temperature side of the regenerator 135d and the throttles 136e and 136f, respectively. Regenerator 135d
The low temperature side of the regenerator 135e communicates with one end of the conduit 137d, and the low temperature side of the regenerator 135e communicates with the low temperature part of the pulse tube 138e via the conduit 137e.

The other end of the conduit 137d is connected to the pulse tube 138d.
It communicates with the low temperature side. On the low temperature side of the regenerator 135e,
Cold heat recovery heat exchangers 117a and 117b are in contact with the low temperature side of the pulse tube 138e, respectively. Pulse tube 1
The high temperature sides of 38d and 138e are radiators 139, respectively.
The apertures 136d and 136f communicate with the apertures 136d and 136f. In this way, the first low temperature generating section of another set of two-stage expansion pulse tube refrigerator is constructed.

[0011]

If the conventional cooling device for a superconducting magnet is used in a superconducting magnet device for a magnetically levitated vehicle, it will be used under great vibration. in this case,
The heat exchanger 116b for cold heat recovery is provided at the low temperature end of the second-stage pulse tube 138b of the pulse-tube refrigerator, but the second-stage pulse tube must be longer than the first-stage in order to obtain low temperature refrigeration. Since the heat recovery device for cold heat recovery is provided at the low temperature end of the second-stage pulse tube, the heat exchange for cold-heat recovery due to vibration occurs at the room temperature side root 138b of the second-stage pulse tube under vibration. A large force acts as the inertial force of the container 116b. When the resonance frequency of the second-stage pulse tube and the vibration frequency substantially match, the force due to the inertial force of the pre-cooling heat exchanger 116b becomes extremely large, and this inertial force acts on the root of the room temperature side 138b of the second-stage pulse tube. Second stage pulse tube, normal temperature side 1
There was a problem that the root of 38b was damaged.

Second pulse tube 13 of another pulse tube refrigerator
Since 8e generates refrigeration at a temperature lower than that of the second-stage pulse tube 138b, the diameter and the length thereof are smaller than those of the second-stage pulse tube 138b. Therefore, under vibration,
Due to the inertial force of the heat exchanger 117b for cold heat recovery provided at the low temperature end of the second-stage pulse tube 138e, the root side at the room temperature side of the second-stage pulse tube 138e may be damaged due to the same reason as described above. There was a problem.

Therefore, the present inventor communicated with the pulse tube on the low temperature side in a multistage expansion pulse tube refrigerator having a pressure source, a plurality of regenerators, a plurality of pulse tubes, and a plurality of heat exchangers for cold heat recovery. Focusing on the technical idea of the present invention of disposing the one heat recovery heat exchanger for cold heat in a portion having relatively high strength as compared with the pulse tube on the low temperature side, as a result of further research and development, Even if the pulse tube refrigerator of the cooling device is used under large vibration, the pulse tube refrigerator should not be damaged by the vibration, and the pulse tube of the cooling device under the large vibration like the superconducting magnet device of the magnetic levitation vehicle. The invention has been reached which achieves the aim of enabling the use of refrigerators.

[0014]

The cooling device of the present invention (the first invention according to claim 1) has a pressure source, a plurality of regenerators, a plurality of pulse tubes, and a plurality of heat exchangers for cold heat recovery. In a multistage expansion pulse tube refrigerator, the one heat exchanger for cold heat recovery connected to the pulse tube on the low temperature side is arranged in a portion having relatively high strength as compared with the pulse tube on the low temperature side. Is.

The cooling device of the present invention (the second invention according to claim 2) is a pressure source, first and second regenerators, first and second pulse tubes, first and second cold heat for cold heat recovery. In a multi-stage expansion pulse tube refrigerator having a heat exchanger for recovery,
The first cold heat recovery heat exchanger is provided at the low temperature end of the first pulse tube on the high temperature side, and the second cold heat recovery heat exchanger is provided at the low temperature end of the second regenerator. is there.

The cooling device of the present invention (the third invention according to claim 3) is a compressor, a switching valve, first and second regenerators, first and second heat exchangers for cold heat recovery, first and second heat exchangers. In a two-stage expansion pulse tube refrigerator having a second pulse tube, a radiator and a phase adjuster, the first cold heat recovery heat exchanger is provided between the first regenerator and the second regenerator, The second heat exchanger for cold heat recovery is provided at the low temperature end of the second regenerator.

The cooling device of the present invention (the fourth invention according to claim 4) is a compressor, a switching valve, first and second regenerators, first and second heat exchangers for cold heat recovery, first and second heat exchangers. A two-stage expansion pulse tube refrigerator having a second pulse tube, a radiator and a phase adjuster, wherein the first heat recovery heat exchanger is the low temperature end of the first pulse tube, the first regenerator and the heat exchanger. The heat exchanger for recovering the second cold heat is provided on both sides of the second regenerator, and is provided at the low temperature end of the second regenerator.

A cooling device of the present invention (a fifth invention according to claim 5) is a compressor, a switching valve, first and second regenerators, first and second cold heat recovery heat exchangers, first and second heat exchangers. A second pulse tube, a two-stage expansion pulse tube refrigerator having a radiator and a phase adjuster, a compressor, a heat exchanger, a heat recovery heat recovery unit,
In a cooling device comprising a JT valve and a JT circuit having a liquid reservoir fixed to a vacuum chamber via a heat insulating support, the first cold heat recovery heat exchanger is provided at the low temperature end of the first pulse tube, The second heat exchanger for cold heat recovery is the second heat exchanger.
It is provided at the low temperature end of the regenerator.

The cooling device of the present invention (sixth invention according to claim 6) is a compressor, a switching valve, first and second regenerators, first and second heat recovery heat recovery units, a pulse tube, It has a two-stage expansion pulse tube refrigerator having a radiator and a phase adjuster, a compressor, a heat exchanger, a heat exchanger for cold heat recovery, a JT valve, and a liquid reservoir fixed to a vacuum tank via a heat insulating support material. In a cooling device including a JT circuit, the first cold heat recovery heat exchanger is provided between the first regenerator and the second regenerator, and the second cold heat recovering heat exchanger is the second cold heat recovery heat exchanger. It is provided at the low temperature end of the regenerator.

The cooling device of the present invention (the seventh invention according to claim 7) is a compressor, a switching valve, first and second regenerators, first and second heat exchangers for cold heat recovery, first and second heat exchangers. Second-stage expansion pulse tube refrigerator having a second pulse tube, radiator and phase adjuster, compressor, heat exchanger, heat exchanger for cold heat recovery, J
In a cooling device comprising a T valve and a JT circuit having a liquid reservoir fixed to a vacuum chamber via a heat insulating support, the first heat recovery heat exchanger is provided with the first pulse tube low temperature end and the first heat exchanger. It is provided both between the regenerator and the second regenerator, and the second heat exchanger for recovering cold heat is provided at the low temperature end of the second regenerator.

A cooling device of the present invention (the eighth invention according to claim 8) is the cooling device according to any one of the first to seventh inventions, wherein the cooling device is provided on a moving body.

[0022]

The cooling device according to the first aspect of the present invention having the above-described structure includes a pressure source, a plurality of regenerators, a plurality of pulse tubes,
In a multi-stage expansion pulse tube refrigerator having a plurality of heat recovery heat exchangers, the one heat recovery heat exchanger that is in communication with the low temperature side pulse tube, relative to the low temperature side pulse tube Since it is arranged in a portion having high strength, even if the pulse tube refrigerator of the cooling device is used under a large vibration, there is an effect that the pulse tube refrigerator is not damaged by the vibration.

The cooling device of the second invention having the above structure is
In a multi-stage expansion pulse tube refrigerator having a pressure source, first and second regenerators, first and second pulse tubes, first and second heat recovery heat exchangers for cold heat recovery, the first cold heat recovery Since the heat exchanger for use is provided at the low temperature end of the first pulse tube on the high temperature side and the second heat exchanger for recovering cold heat is provided at the low temperature end of the second regenerator, cooling is performed under large vibration. Even if the pulse tube refrigerator of the equipment is used, the pulse tube refrigerator should not be damaged by vibration, and the pulse tube refrigerator of the cooling equipment should be used under large vibration like the superconducting magnet device of a magnetically levitated vehicle. It has the effect of enabling it.

The cooling device of the third invention having the above structure is
A two-stage expansion pulse tube refrigerator having a compressor, a switching valve, first and second regenerators, first and second heat recovery heat exchangers, first and second pulse tubes, a radiator and a phase adjuster. The first cold heat recovery heat exchanger is provided between the first regenerator and the second regenerator, and the second cold heat recovering heat exchanger is provided at a low temperature end of the second regenerator. Therefore, even if the pulse tube refrigerator of the cooling device is used under large vibration, the pulse tube refrigerator will not be damaged by the vibration, and the cooling device under the large vibration like the superconducting magnet device of the magnetic levitation vehicle. This has the effect of enabling the use of the pulse tube refrigerator.

The cooling device of the fourth invention having the above structure is
A two-stage expansion pulse tube refrigerator having a compressor, a switching valve, first and second regenerators, first and second heat recovery heat exchangers, first and second pulse tubes, a radiator and a phase adjuster. In the above, the first cold heat recovery heat exchanger is provided both at the low temperature end of the first pulse tube and between the first regenerator and the second regenerator, and the second cold heat recovering heat exchanger is provided. Since it is provided at the low temperature end of the second regenerator, even if the pulse tube refrigerator of the cooling device is used under large vibration, the pulse tube refrigerator is prevented from being damaged by vibration, and the superconductivity of the magnetic levitation vehicle is maintained. It is possible to use the pulse tube refrigerator of the cooling device under a large vibration like the magnet device.

The cooling device of the fifth invention having the above structure is
Two-stage expansion pulse tube refrigeration having a compressor, a switching valve, first and second regenerators, first and second heat recovery heat exchangers, first and second pulse tubes, a radiator and a phase adjuster And a JT having a liquid reservoir fixed to a vacuum tank through a compressor, a heat exchanger, a heat exchanger for cold heat recovery, a JT valve and a heat insulating support material.
In a cooling device comprising a circuit, the first cold heat recovery heat exchanger is provided at the first pulse tube low temperature end, and the second cold heat recovery heat exchanger is provided at the second regenerator low temperature end. Therefore, even if the pulse tube refrigerator of the cooling device is used under large vibration, the pulse tube refrigerator will not be damaged by the vibration, and the cooling device under the large vibration like the superconducting magnet device of the magnetic levitation vehicle. This has the effect of enabling the use of the pulse tube refrigerator.

The cooling device of the sixth invention having the above structure is
A two-stage expansion pulse tube refrigerator having a compressor, a switching valve, first and second regenerators, first and second heat recovery heat exchangers, a pulse tube, a radiator and a phase adjuster; A cooling device comprising a heat exchanger, a heat recovery heat exchanger for heat recovery, a JT valve, and a JT circuit having a liquid reservoir fixed to a vacuum tank via a heat insulating support material, wherein the first heat exchanger for heat recovery is used. Since the second cold heat recovery heat exchanger is provided between the first regenerator and the second regenerator and at the second regenerator low temperature end, the pulse tube refrigerator of the cooling device can be operated under large vibration. Even if it is used, it has the effect of preventing the pulse tube refrigerator from being damaged by vibration, and making it possible to use the pulse tube refrigerator of the cooling device under large vibration like the superconducting magnet device of a magnetically levitated vehicle. .

The cooling device of the seventh invention having the above structure is
A two-stage expansion pulse tube refrigerator having a compressor, a switching valve, first and second regenerators, first and second heat recovery heat exchangers, first and second pulse tubes, a radiator and a phase adjuster. When,
In the cooling device including a compressor, a heat exchanger, a heat exchanger for cold heat recovery, a JT valve, and a JT circuit having a liquid reservoir fixed to a vacuum tank via a heat insulating support material, the first heat for cold heat recovery Since the exchanger is provided both in the first pulse tube low temperature end and between the first regenerator and the second regenerator, the second cold heat recovery heat exchanger is provided in the second regenerator low temperature end. ,
Even if the pulse tube refrigerator of the cooling device is used under large vibration, the pulse tube refrigerator should not be damaged by the vibration, and the pulse tube of the cooling device under the large vibration like the superconducting magnet device of the magnetic levitation vehicle. This has the effect of enabling the use of a refrigerator.

The cooling device of the eighth invention having the above structure is
In any one of the first to seventh inventions, since the cooling device is provided in the moving body, even if the pulse tube refrigerator of the cooling device is used under large vibration in the moving body, the pulse tube refrigerator is In order to prevent damage due to vibration, it is possible to use the pulse tube refrigerator of the cooling device under large vibration like the superconducting magnet device in the magnetically levitated vehicle or other moving body.

[0030]

BEST MODE FOR CARRYING OUT THE INVENTION The embodiments of the present invention will be described below.
This will be described with reference to the drawings.

(First Embodiment) As shown in FIGS. 1 to 3, the cooling device of the first embodiment is a compressor 1 as a pressure source, first and second regenerators 5, 7 and a first regenerator. In the multistage expansion pulse tube refrigerator having the second pulse tubes 9 and 14 and the first and second cold heat recovery heat exchangers 8 and 12, the first cold heat recovery heat exchanger 8 is heated to a high temperature. The second cold heat recovery heat exchanger 12 is provided at the low temperature end 9b of the second regenerator 7 while being provided at the low temperature end 9b of the first pulse tube 9 on the side.

The first embodiment is an embodiment belonging to the above-described second and fifth inventions, and is one embodiment of a cooling device for cooling a cooled object such as a superconducting magnet with a liquid helium refrigerant. is there.

As an embodiment belonging to the second invention,
First cold heat recovery heat exchanger 8, second cold heat recovery heat exchanger 1
2, the non-cooled body may be cooled by heat conduction between solids.

The discharge port 1a of the compressor 1 is communicated with the high pressure inlet 3a of the switching valve 3 via the flow path 2 in sequence. The suction port 1b of the compressor 1 communicates with the low pressure outlet 3b of the switching valve 3 via the flow path 18. The port 3c of the switching valve 3 is
When the refrigerant flows from the compressor 1 to the first regenerator 5, it communicates with the high pressure inlet 3a, and when the refrigerant flows from the first regenerator 5 to the compressor 1, it communicates with the low pressure outlet 3b.
The first regenerator 5 is filled with a regenerator material 5c such as a wire mesh.

The port 3c communicates with the high temperature end 5a of the first regenerator 5 via the flow path 4, and the low temperature end 5b of the first regenerator 5 is connected.
Communicates with the flow path 6 and the second regenerator 7.

The flow path 6 is connected to the low temperature end 9b of the first pulse tube 9 through the flow path on the refrigerator side of the first cold heat recovery heat exchanger 8 provided at the low temperature end 9b of the first pulse tube 9. It is in communication. The high temperature end 9 a of the pulse tube 9 communicates with the phase adjuster 23 via the radiator 10 and the flow path 11.

The low temperature end 7b of the second regenerator 7 has a second
A heat exchanger 12 for recovering cold heat is provided, and the low temperature end 7b of the second regenerator 7 receives a second pulse through a flow path on the refrigerator side of the heat exchanger 12 for recovering cold heat and the flow path 13. It communicates with the cold end 14b of the tube 14. High temperature end 14 of the second pulse tube 14
The a is communicated with the phase adjuster 17 via the radiator 15 and the flow path 16. The first refrigerant compressed by the compressor 1 is cooled by the compressor cooler 24. In this way, the pulse tube refrigerator A is configured.

The discharge port of the compressor 51 communicates with the flow channel 52, and the flow channel 52 communicates with the suction port of the compressor 1. The high-pressure side flow path 54a of the heat exchanger 54, the JT circuit side of the first heat recovery heat exchanger 8 and the high-pressure side flow path of the heat exchanger 57 are sequentially arranged on the downstream side of the flow path 53 branched from the flow path 2. 57a,
The JT circuit side of the heat exchanger 12 for cold heat recovery, the high-pressure side passage 60a of the heat exchanger 60 for second cold heat recovery, and the JT valve 67 are connected to the gas phase portion 81a of the first liquid reservoir 81. There is.

The flow paths 68 communicating with the vapor phase portion 81a of the first liquid reservoir 81 are sequentially connected to the low pressure side flow path 60 of the heat exchanger 60.
b, the flow path 69, the low pressure side flow path 57b of the heat exchanger 57, the flow path 70, the low pressure side flow path 54b of the heat exchanger flow path 54, and the flow path 71 to communicate with the suction side of the compressor 51. ing.

In the first embodiment, the heat exchanger 57 has a size shown by a solid line in FIG. 2, and the heat exchanger 113 shown by a broken line in FIG. 2 is the conventional cooling shown in FIG. The heat exchanger in the apparatus shows the difference in size and capacity of the heat exchanger 57 and the heat exchanger 113 as a heat exchanger. That is, the amount of heat exchanged is increased by making the heat exchange 57 in the first embodiment larger than the conventional heat exchanger 113. As a result, the cooling device according to the first embodiment of the present invention is provided with only one pair of regenerators and pulse tubes, and each pair of regenerators 13 has only one regenerator.
5a to 135d, and pulse tubes 138a, 138
b, 138d, and 138e are provided so that the same refrigerating capacity as the conventional example can be obtained.

The first refrigerant compressed by the compressor 51 is
It is cooled by the compressor cooler 72. Thus, the Joule-Thomson circuit B is configured as shown in FIGS. 1 and 2, and the cooling device is configured by the pulse tube refrigerator A and the Joule-Thomson circuit C.

A coolant such as liquid helium is contained in the first liquid reservoir 81, and a superconducting magnet 82 of the object to be cooled is provided in the liquid phase portion 81b of the first liquid reservoir 81. The liquid reservoir 81 is fixed to the shield plate 84 via a large number of heat insulating support materials 83. The shield plate 84 is fixed to the vacuum chamber 80 via a large number of heat insulating support materials 85.

The flow path 92 through which the second refrigerant liquid such as liquid nitrogen flows is in thermal contact with the shield plate 84, and one end side of the flow path 92 communicates with the liquid phase portion 91b of the second liquid reservoir 91. And
One end side of the flow path 92 communicates with the vapor phase portion 91a of the second liquid reservoir 91.

The second liquid reservoir 91 has a large number of heat insulating support materials 93.
It is fixed to the vacuum chamber 80 via. In this way, the superconducting magnet device D is constructed.

The phase adjusters 23 and 17 are shown in FIG.
The orifice type shown in Fig. 3, the active buffer type shown in Fig. 3 (B), the double inlet type shown in Fig. 3 (C), the four-valve shown in Fig. 3 (D), and any other type are adopted. You can do it.

In the orifice type phase adjuster shown in FIG. 3A, 71 is a diaphragm, 73 is a buffer tank,
72 and 13 are flow paths. In the active buffer type phase adjuster shown in FIG. 3B, 74 is a rotary valve, 75, 76 and 77 are low pressure buffer tanks,
Medium pressure buffer tank, high pressure buffer tank, 74a,
74b, 74c, and 74d are ports of the rotary valve, and the radiator 12 and the low-pressure buffer tank 7 are respectively connected through the flow paths.
5, medium pressure buffer tank 76, high pressure buffer tank 77
Is in communication with. In the double-inlet type phase adjuster shown in FIG. 3C, the buffer tank 80 communicates with the radiator 12 via the flow passage 79, the throttle 78, and the flow passage 13, and both ends of the throttle 81 are Channel 2 and channel 1, respectively
It communicates with 3. In the 4-valve type phase adjuster shown in FIG. 3 (D), 82 is a rotary valve, and the port 82 a of the rotary valve 82 is connected to the radiator 12 via the flow path 13.
The port 82b is connected to the flow path 2 communicating with the compressor 1 via the flow path 16, and the port 82c is connected to the compressor 1 via the flow path 17.
Is connected to the low pressure side of.

The gas discharged from the compressor 51 is the heat exchanger 5
It is cooled by the low-pressure low-pressure gas flowing into the high-pressure side passages of Nos. 4, 57, and 60, and flowing into the low-pressure side passages of the heat exchangers 54, 57, and 60 there. The gas that has flowed into the cold heat recovery heat exchanger then has a relatively high temperature generated on the refrigerator side of the first cold heat recovery heat exchanger 8 and the second cold heat recovery heat exchanger 12 of the pulse tube refrigerator A. And cooled with a low temperature refrigerant.
The high-pressure gas flowing out from the high-pressure side flow path of the heat exchanger 60 cools to a lower temperature, flows into the JT valve, and isenthalpically expands to about 1 atm, where a part of the gas becomes a liquid and the first The liquid flows into the gas phase portion 81a of the liquid reservoir 81, and the liquid drops into the liquid phase. The gas sequentially flows into the low pressure side flow paths of the heat exchangers 60, 57 and 54 through the flow path 68 and returns to the suction port of the compressor 51.

Heat enters the first liquid reservoir 81 from the heat-insulating support material 83, and the inflowing heat causes the first refrigerant liquid in the first liquid reservoir 81 to evaporate and become a gas. Since the amount of vaporized gas and the amount of falling liquid are equal, the amount of liquid in the first liquid reservoir 81 is maintained at a constant amount, despite the presence of invasion heat. A total amount of the above-mentioned evaporative gas and the gas flowing out from the JT valve passes through the flow path 68, the low-pressure side flow paths 60b, 57b, 54b of the heat exchangers 60, 57, 54, and the compressor 51 of the compressor 51. Return to the suction port. In this way, one cycle of the cooling device is formed. Other than the above, the configuration is the same as that of the conventional device described above.

The cooling device of the first embodiment having the above-mentioned configuration and operation has the compressors 1 and 51 as pressure sources, the first and second regenerators 5 and 7, the first and second pulse tubes 9 and 14,
First and second cold heat recovery heat exchangers 8, 1 for cold heat recovery
In the multistage expansion pulse tube refrigerator having 2, the first cold heat recovery heat exchanger 8 is provided at the low temperature end 9a of the high temperature side first pulse tube 9, and the second cold heat recovery heat exchanger is provided. 12 is provided at the low temperature end 7b of the second regenerator 7, and since the first pulse tube 9 generates refrigeration at a relatively high temperature (about 100K to 30K), the length of the pulse tube is 12 Is not so long and the amount of refrigeration is large, so the diameter of the pulse tube is relatively large. As a result, even if the first cold heat recovery heat exchanger 8 is provided at the low temperature end 9b of the first pulse tube 9, the room temperature side of the first pulse tube 9 is vibrated due to vibration and the first cold heat recovery heat exchanger 8 is vibrated. It has the effect of not being damaged by inertial force.

On the other hand, since the second pulse tube 14 generates refrigeration at a low temperature (about 30K to 10K), the length of the pulse tube becomes long and the refrigeration amount is small, so that the second pulse tube 14 has the above-mentioned characteristics. It becomes thinner than the first pulse tube 9. Therefore, if it is provided at the low temperature end 14b of the second pulse tube 14, the base of the second pulse tube 14 on the room temperature side is damaged by the inertial force of the heat recovery heat exchanger for vibration, but the low temperature end of the second regenerator 7 is damaged. 7b
Since the second heat exchanger 12 for recovering cold heat is provided in the second
The mass of the low temperature end 14b of the pulse tube 14 is reduced, and the base of the second pulse tube on the room temperature side is not damaged by the inertial force due to the vibration.

The second regenerator 7 is provided in series at the low temperature end of the first regenerator 5, the first regenerator 5 has a larger diameter than the second regenerator 7, and the diameter of the second regenerator 7 is It is larger than the diameter of the second pulse tube 14. The total length of the first regenerator 5 and the second regenerator 7 is shorter than the length of the second pulse tube 14.

As a result, the cooling device of the first embodiment is
At the low temperature end of the second regenerator 7, the second heat recovery unit for cold heat recovery 1
Even if 2 is provided, the room temperature side 5 of the first regenerator 5 is vibrated by vibration.
An effect is obtained in that c is not damaged by the inertial force of the second heat exchanger 12 for cold heat recovery due to vibration.

Further, the cooling device of the first embodiment has an effect of enabling the use of the pulse tube refrigerator of the cooling device under a large vibration like the superconducting magnet device of the magnetically levitated vehicle.

Further, the cooling device of the first embodiment, which is an embodiment belonging to the fifth invention, comprises compressors 1, 51, a switching valve 3, first and second regenerators 5, 7, first and second cold heat. Recovery heat exchangers 8, 12, first and second pulse tubes 9,
14, a two-stage expansion pulse tube refrigerator having radiators 10 and 15 and phase adjusters 17 and 23, and heat exchangers 54 and 57,
60, cold heat recovery heat exchangers 8 and 12, a JT valve 67, and a JT having a liquid reservoir 81 fixed to a vacuum chamber through a heat insulating support material
In the cooling device including a circuit, the first cold heat recovery heat exchanger 8 is connected to the low temperature end 9b of the first pulse tube 9.
In addition, by providing the second heat exchanger 12 for cold heat recovery at the low temperature end 7b of the second regenerator 7, the room temperature side root of the first pulse tube 9, the room temperature side root of the second pulse tube 14, 1 The effect that the base of the regenerator 5 on the room temperature side is not damaged by vibration is obtained.

(Second Embodiment) As shown in FIG. 4, the cooling device according to the second embodiment has a first heat exchanger 2 for cold heat recovery.
The point that 4 is provided between the first regenerator 5 and the second regenerator 7 is a difference from the first embodiment. The other structure is the same as that of the first embodiment.

The cooling device of the second embodiment is an embodiment belonging to the third and sixth inventions, and is an embodiment of a cooling device for cooling a cooled object such as a superconducting magnet with a liquid helium refrigerant. Is.

Further, in the second embodiment, the second
The heat exchanger 12 for recovering cold heat is provided at the low temperature end 7b of the second regenerator 7. Further, as in the first embodiment, the first cold heat recovery heat exchanger and the second cold heat recovery heat exchanger may cool the non-cooled body by heat conduction between solids.

Further, the cooling device of the second embodiment, which is an embodiment belonging to the sixth invention, has a pulse tube refrigerator of two-stage expansion, a compressor, a heat exchanger, and a cold recovery as in the above-mentioned fifth invention. The heat exchanger, a JT valve, and a cooling device including a JT circuit having a liquid reservoir fixed to a vacuum chamber via a heat insulating support material.

In the cooling device of the second embodiment having the above-mentioned configuration, the first cold heat recovery heat exchanger 24 is placed between the first regenerator 5 and the second regenerator 7 and the second cold heat recovering heat exchanger is exchanged. Bowl 12
Since the low temperature end 7b of the second regenerator 7 is provided, the low temperature end 9b of the first pulse tube 9 and the low temperature end 14 of the second pulse tube 14 are provided.
Since no heat exchanger for cold heat recovery is provided in each of b, there is an effect that the roots of the pulse tubes 9 and 14 on the room temperature side are not damaged by vibration.

The first regenerator 5 is shorter than the length of the first pulse tube 9 and has a diameter substantially the same as that of the first pulse tube 9. Therefore, the first regenerator 5 and the second regenerator 7 are respectively provided at low temperature ends. Even if the first cold heat recovery heat exchanger 24 and the second cold heat recovery heat exchanger 12 are provided, the room temperature side root of the first regenerator 5 is not damaged by vibration.

Further, the cooling device of the second embodiment has an effect of enabling the use of the pulse tube refrigerator of the cooling device under a large vibration like the superconducting magnet device of the magnetically levitated vehicle.

Further, the cooling device of the second embodiment as the embodiment belonging to the sixth invention is provided with compressors 1, 51, switching valve 3, first and second regenerators 5, 7, first and second cold heat recovery. Heat exchangers 24, 12, first and second pulse tubes 9, 14, two-stage expansion pulse tube refrigerators having radiators 10, 15 and phase adjusters 17, 23, and heat exchangers 54, 5
7, 60, heat exchangers for cold heat recovery 24, 12, JT valve 67
And a liquid reservoir fixed to the vacuum chamber via a heat insulating support J
In a cooling device including a T circuit, the first cold heat recovery heat exchanger 24 is provided between the first regenerator 5 and the second regenerator 7, and the second cold heat recovery heat exchanger 12 is provided. Second
Since it is provided at the low temperature end 7b of the regenerator 7, the first cold heat recovery heat exchanger 24 and the second cold heat recovery heat exchanger 1 are provided.
Since 2 is applied to the JT circuit, the root of the first pulse tube 9 on the room temperature side, the root of the second pulse tube 14 on the room temperature side, the first
This has the effect that the room temperature side root of the regenerator 5 is not damaged by vibration.

(Third Embodiment) As shown in FIG. 5, the cooling device of the third embodiment has a first heat exchanger 2 for cold heat recovery.
5 and 26 are provided both at the low temperature end 9b of the first pulse tube 9 and between the first regenerator 5 and the second regenerator 7, which is a difference from the above-described embodiment. Other configurations are
This is the same as the embodiment described above.

The cooling device of the third embodiment is an embodiment belonging to the fourth and seventh inventions, and is an embodiment of a cooling device for cooling a cooled object such as a superconducting magnet with a liquid helium refrigerant. Is.

Further, in the third embodiment, the second
The heat exchanger 12 for recovering cold heat is provided at the low temperature end 7b of the second regenerator 7. Further, as in the first embodiment, the first cold heat recovery heat exchanger and the second cold heat recovery heat exchanger may cool the non-cooled body by heat conduction between solids.

Further, the cooling device of the third embodiment, which is an embodiment belonging to the seventh invention, is a pulse tube refrigerator of two-stage expansion, a compressor, a heat exchanger, and a cold heat recovery like the above-mentioned fifth invention. The heat exchanger, a JT valve, and a cooling device including a JT circuit having a liquid reservoir fixed to a vacuum chamber via a heat insulating support material.

In the cooling device of the third embodiment having the above-mentioned structure, the first cold heat recovery heat exchangers 25 and 26 are connected to the low temperature end 9b of the first pulse tube 9, the first regenerator 5, and the first regenerator 5. The heat exchanger 12 for recovering the second cold heat is provided both between the second regenerators 7, and the low temperature end 7b of the second regenerator 7 is provided.
Therefore, even if the pulse tube refrigerator of the cooling device is used under large vibration, the pulse tube refrigerator is prevented from being damaged by the vibration.

Further, the cooling device of the third embodiment has an effect of enabling the use of the pulse tube refrigerator of the cooling device under a large vibration like the superconducting magnet device of the magnetically levitated vehicle.

Further, the cooling device of the third embodiment as the embodiment of the seventh invention is the compressor 1, 51, the switching valve 3, the first
And second regenerators 5, 7, first and second heat recovery heat exchangers 25, 26, 12, first and second pulse tubes 9,
14, a two-stage expansion pulse tube refrigerator having radiators 10 and 15 and phase adjusters 17 and 23, and heat exchangers 54 and 57,
60, heat exchangers 25, 26, 12 for cold heat recovery, JT valve 6
7 and a JT circuit having a liquid reservoir fixed to a vacuum chamber via a heat insulating support material.
The heat exchangers 25, 26 for cold heat recovery are provided both at the low temperature end 9b of the first pulse tube 9 and between the first regenerator 5 and the second regenerator 7, and the second heat exchanger for cold heat recovery is provided. Since 12 is provided at the low temperature end 7b of the second regenerator 7, even if the pulse tube refrigerator of the cooling device is used under large vibration, the pulse tube refrigerator is prevented from being damaged by the vibration and the magnetic levitation is performed. It is possible to use the pulse tube refrigerator of the cooling device under a large vibration like the superconducting magnet device of the vehicle.

In the cooling device of the third embodiment, the first cold heat recovery heat exchanger 25 is provided both at the low temperature end 9b of the first pulse tube 9 and between the first regenerator 5 and the second regenerator 7. Since it is provided, there is an advantage that the efficiency is better than that of the cooling devices in the above-described first and second embodiments.

Although the two compressors 1 and 51 are used in the first to third embodiments of the present invention, the number of compressors may be one or three or more. Also, pulse tube refrigerator, J
Each compressor may be provided in the T circuit.

The embodiments described above are merely examples for the purpose of explanation, and the present invention is not limited to them. Those skilled in the art will recognize from the claims, the detailed description of the invention and the description of the drawings. Modifications and additions can be made without departing from the technical idea of the present invention.

[Brief description of drawings]

FIG. 1 is a circuit diagram showing an entire cooling device according to a first embodiment of the present invention.

FIG. 2 is an enlarged circuit diagram showing a main part of the cooling device according to the first exemplary embodiment.

FIG. 3 is a circuit diagram showing each type of phase adjuster that can be used as the phase adjuster in the cooling device of the first exemplary embodiment.

FIG. 4 is a circuit diagram showing an entire cooling device according to a second embodiment of the present invention.

FIG. 5 is a circuit diagram showing an entire cooling device of a third exemplary embodiment of the present invention.

FIG. 6 is a circuit diagram showing an entire conventional cooling device.

[Explanation of symbols]

1 compressor 5 First regenerator 7 Second regenerator 9 First pulse tube 14 Second pulse tube 8 First heat exchanger for cold heat recovery 12 Second heat exchanger for cold heat recovery 9b Low temperature end of first pulse tube 7b Low temperature end of second regenerator

   ─────────────────────────────────────────────────── ─── Continued front page    (72) Inventor Hideo Mita             Aichi, 2-chome, Asahi-cho, Kariya city, Aichi prefecture             Within Seiki Co., Ltd. (72) Inventor Toyohisa Yamada             Aichi, 2-chome, Asahi-cho, Kariya city, Aichi prefecture             Within Seiki Co., Ltd. (72) Inventor Akira Hirano             Aichi, 2-chome, Asahi-cho, Kariya city, Aichi prefecture             Within Seiki Co., Ltd. (72) Inventor Motohito Igarashi             Tokai, 1-6-6 Yaesu, Chuo-ku, Tokyo             Passenger Railway Co., Ltd. (72) Inventor Takayuki Furusawa             Tokai, 1-6-6 Yaesu, Chuo-ku, Tokyo             Passenger Railway Co., Ltd. (72) Inventor Yoshihiro Jizo             2-3 2-3 Marunouchi, Chiyoda-ku, Tokyo             Inside Ryo Electric Co., Ltd. (72) Inventor Toshiyuki Amano             2-3 2-3 Marunouchi, Chiyoda-ku, Tokyo             Inside Ryo Electric Co., Ltd.

Claims (8)

[Claims] 1. A multistage expansion pulse tube refrigerator having a pressure source, a plurality of regenerators, a plurality of pulse tubes, and a plurality of heat exchangers for cold heat recovery, wherein one of the cold heats connected to the pulse tube on the low temperature side. A cooling device, wherein the recovery heat exchanger is arranged at a portion having a relatively higher strength than the low temperature side pulse tube. 2. A multistage expansion pulse tube refrigerator having a pressure source, first and second regenerators, first and second pulse tubes, and first and second heat exchangers for cold heat recovery for cold heat recovery, The first cold heat recovery heat exchanger is provided at the low temperature end of the first pulse tube on the high temperature side, and the second cold heat recovery heat exchanger is provided at the low temperature end of the second regenerator. Characterized cooling device. 3. Two-stage expansion having a compressor, a switching valve, first and second regenerators, first and second heat recovery heat exchangers, first and second pulse tubes, a radiator and a phase adjuster. In the pulse tube refrigerator, the first cold heat recovery heat exchanger is provided between the first regenerator and the second regenerator, and the second cold heat recovering heat exchanger is the second regenerator. Cooling device characterized by being installed at the low temperature end of. 4. A two-stage expansion having a compressor, a switching valve, first and second regenerators, first and second heat recovery heat exchangers, first and second pulse tubes, a radiator and a phase adjuster. In the pulse tube refrigerator, the first cold heat recovery heat exchanger is provided both at the low temperature end of the first pulse tube and between the first regenerator and the second regenerator, and the second cold heat is provided. The heat exchanger for recovery is the second
A cooling device characterized by being provided at the low temperature end of the regenerator. 5. A two-stage having a compressor, a switching valve, first and second regenerators, first and second heat recovery heat recovery units, first and second pulse tubes, a radiator and a phase adjuster. In a cooling device comprising an expanding pulse tube refrigerator, a compressor, a heat exchanger, a heat exchanger for recovering cold heat, a JT valve and a JT circuit having a liquid reservoir fixed to a vacuum tank through a heat insulating support material. A cooling device, wherein the first cold heat recovery heat exchanger is provided at the first pulse tube low temperature end, and the second cold heat recovery heat exchanger is provided at the second regenerator low temperature end. 6. A two-stage expansion pulse tube refrigerator having a compressor, a switching valve, first and second regenerators, first and second heat recovery heat exchangers, a pulse tube, a radiator and a phase adjuster. And a JT having a liquid reservoir fixed to a vacuum tank via a compressor, a heat exchanger, a heat exchanger for recovering cold heat, a JT valve and a heat insulating support material.
A cooling device comprising a circuit, wherein the first cold heat recovery heat exchanger is provided between the first cold storage device and the second cold storage device, and the second cold heat recovery heat exchanger is provided in the second cold storage device. Cooling device characterized by being installed at the low temperature end of the vessel. 7. A two-stage expansion having a compressor, a switching valve, first and second regenerators, first and second heat recovery heat exchangers, first and second pulse tubes, a radiator and a phase adjuster. In the cooling device including the pulse tube refrigerator, the compressor, the heat exchanger, the heat exchanger for recovering cold heat, the JT valve, and the JT circuit having the liquid reservoir fixed to the vacuum tank through the heat insulating support, The first cold heat recovery heat exchanger is provided both at the low temperature end of the first pulse tube and between the first regenerator and the second regenerator, and the second cold heat recovery heat exchanger is provided at the second cold regenerator. Cooling device characterized by being installed at the low temperature end of the vessel. 8. The cooling device according to claim 1, wherein the cooling device is provided on a moving body.