JP2003124550A - High-voltage pulse generating device and electric discharge stimulation gas laser - Google Patents

Abstract

PROBLEM TO BE SOLVED: To reduce the size of a fan drive motor by improving the cooling efficiency of a high-voltage pulse generating device and, at the same time, to enable the device to make discharge at a high cycle frequency. SOLUTION: Magnetic switches SR1-SR3, capacitors C1 and C2, and a step-up transformer TR1 constituting a high-voltage pulse generating device are arranged in a container 10 filled up with an insulating refrigerant 15. In addition, a cross-flow fan 17 is provided in the container 10 and a radiator 14 is installed at the inlet port of the fan 17. The switches SR1-SR3, capacitors C1 and C2, and transformer TR1 constituting the pulse generating device are cooled by circulating the refrigerant 15 by means of the fan 17. Since the fan 17 is used, the flow velocity distribution of the refrigerant 15 and the temperature distributions in the cores of the switches SR1-SR3, etc., can be made almost uniform. It is also possible to provide a plurality of cross-flow fans in the container 10.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a high-voltage pulse generator and a discharge-excited gas laser device using the same, and more particularly to a high-voltage pulse generator capable of improving cooling efficiency and discharging at a high repetition frequency. And a discharge excitation gas laser device.

[0002]

2. Description of the Related Art With the miniaturization and high integration of semiconductor integrated circuits, it is required to improve the resolution in a projection exposure apparatus for manufacturing the same. For this reason, the wavelength of the exposure light emitted from the exposure light source is being shortened, and as a light source for semiconductor exposure, a K having a wavelength of 248 nm from a conventional mercury lamp is used.
An rF excimer laser device is used. Furthermore, as a light source for next-generation semiconductor exposure, Ar with a wavelength of 193 nm
Gas laser devices that emit ultraviolet light, such as F excimer laser devices and molecular fluorine (F ₂ ) laser devices with a wavelength of 157 nm, are promising. In the KrF excimer laser device, a mixed gas of fluorine (F ₂ ) gas, krypton (Kr) gas and a rare gas such as neon (Ne) as a buffer gas, and in the ArF excimer laser device,
Fluorine (F ₂ ) gas, argon (Ar) gas, mixed gas composed of rare gas such as neon (Ne) as buffer gas, fluorine (F ₂ ) gas and buffer gas in molecular fluorine (F ₂ ) laser device As a laser gas, which is a mixed gas composed of a rare gas such as helium (He), is generated inside the laser chamber sealed at several hundred kPa, the laser gas that is the laser medium is excited.

Inside the laser chamber, a pair of main discharge electrodes for exciting the laser gas are arranged facing each other with a predetermined distance therebetween in the direction perpendicular to the laser oscillation direction. A high-electricity laser pulse is applied to the pair of main discharge electrodes, and when the voltage applied between the main discharge electrodes reaches a certain value (breakdown voltage), the laser gas between the main discharge electrodes is dielectrically broken down and main discharge starts. Then, the laser medium is excited by this main discharge. Therefore, such an exposure gas laser device performs pulse oscillation by repeating main discharge, and the emitted laser light becomes pulsed light. At present, the laser pulse repetition frequency of the laser device used for exposure is 2
Although it is about kHz, in recent years, a repetition frequency of 4 kHz or higher has been required in order to increase throughput and reduce variations in exposure amount.

In the above exposure gas laser device,
FIG. 12 shows an example of a high voltage pulse generation circuit for generating discharge in the laser chamber and exciting laser gas as described above. The high voltage pulse generation circuit of FIG. 12 has three magnetic switches SR1 and SR composed of saturable reactors.
2, a two-stage magnetic pulse compression circuit using SR3. The magnetic switch SR1 is for reducing switching loss in the solid-state switch SW that is a semiconductor switching element such as an IGBT, and is also called magnetic assist. The first magnetic switch SR2 and the second magnetic switch SR3 form a two-stage magnetic pulse compression circuit. Here, FIG. 12A shows a step-up transformer T in addition to the magnetic compression circuit.
A circuit including R1 and FIG. 12B is an example in which the step-up transformer is not included and a reactor L1 for charging the capacitor C0 is included instead of the step-up transformer.

The structure and operation of the circuit will be described below with reference to FIG. Note that the circuit of FIG. 12B does not have a step-up operation by the step-up transformer, and other operations are the same as those of FIG. First, the voltage of the high voltage power supply CH is adjusted to a predetermined value Vin, and the main capacitor C0 is charged. At this time, the solid switch SW is off. When the charging of the main capacitor C0 is completed and the solid state switch SW is turned on, the voltage applied across the solid state switch SW is mainly the magnetic switch S.
It covers both ends of R1. When the time integrated value of the charging voltage Vo of the main capacitor C0 applied to both ends of the magnetic switch SR1 reaches a limit value determined by the characteristics of the magnetic switch SR1, the magnetic switch SR1 is saturated and the magnetic switch SR1 becomes conductive, and the main capacitor C0. A current flows through the magnetic switch SR1, the primary side of the step-up transformer TR1, and the loop of the solid switch SW. At the same time, a current flows in the loop of the capacitor C1 on the secondary side of the step-up transformer TR1, the electric charge accumulated in the main capacitor C0 is transferred, and the capacitor C1 is charged.

After this, the voltage V1 at the capacitor C1
When the time integrated value of reaches a limit value determined by the characteristics of the magnetic switch SR2, the magnetic switch SR2 is saturated and the magnetic switch SR2 becomes conductive, and a current flows in the loop of the capacitor C1, the capacitor C2, and the magnetic switch SR3.
The electric charge stored in the capacitor C1 is transferred and charged in the capacitor C2. Further thereafter, when the time integrated value of the voltage V2 in the capacitor C2 reaches a limit value determined by the characteristics of the magnetic switch SR3, the magnetic switch SR3 is saturated and the magnetic switch SR3 becomes conductive, and the capacitor C2, the peaking capacitor Cp, the magnetic Switch SR3
A current flows in the loop, and the electric charge stored in the capacitor C2 is transferred to charge the peaking capacitor Cp.

Corona discharge for preionization is performed by the dielectric tube Tu into which the first electrode e1 is inserted and the second electrode e.
Dielectric tube T based on the point where 2 is in contact
Although it occurs on the outer peripheral surface of u, the voltage Vp increases as the charging of the peaking capacitor Cp progresses, and when Vp reaches a predetermined voltage, the dielectric tube Tu of the corona preionization unit Tu.
Corona discharge occurs on the surface. Ultraviolet rays are generated on the surface of the dielectric tube Tu by this corona discharge, and the laser gas as the laser medium between the main discharge electrodes E1 and E2 is preionized. As the charging of the peaking capacitor Cp progresses further, the voltage Vp of the peaking capacitor Cp rises, and this voltage Vp has a certain value (breakdown voltage) V.
When reaching b, the laser gas between the main discharge electrodes E1 and E2 is dielectrically broken down to start the main discharge, the main discharge excites the laser medium, and laser light is generated. After that, the voltage of the peaking capacitor Cp rapidly decreases due to the main discharge, and eventually returns to the state before the start of charging. By repeating such a discharging operation above the switching operation of the solid-state switch SW, pulse laser oscillation is performed at a predetermined repetition frequency. Where the magnetic switch SR
By setting the inductance of the capacitance transfer type circuit of each stage composed of 2, SR3 and the capacitors C1 and C2 so as to become smaller toward the subsequent stage, the pulse width of the current pulse that flows through each stage is gradually narrowed. The pulse compression operation is performed, and strong short pulse discharge is realized between the main discharge electrodes E1 and E2.

The three magnetic switches SR1, SR2, SR3, the capacitors C1 and C2, the transformer TR1 (the portion surrounded by the dotted line in FIG. 12A) in FIG.
Three magnetic switches SR1, SR2 in 2 (b),
The SR3 and the capacitors C1 and C2 (the portion surrounded by the dotted line in FIG. 12B) have a large amount of heat generated during operation and therefore need to be cooled. Usually they are placed in a tank filled with an insulating refrigerant, eg insulating oil, for cooling. FIG. 13 shows an example of a cooling structure for a magnetic switch, a transformer, a condenser, etc. under the condition that the laser pulse repetition frequency is about 2 kHz. Note that FIG. 13 is similar to FIG.
It corresponds to the circuit of (a) and shows an example of a schematic configuration in a tank filled with an insulating refrigerant. 12
The example corresponding to (b) has a configuration in which the transformer TR1 is omitted from FIG. 13, and other configurations are similar to those in FIG.

In FIG. 13, in the tank 10, the above-mentioned step-up transformer TR1 and magnetic switches SR1 and SR are provided.
2, SR3 are stacked in a box shape, and capacitors C1 and C2 are mounted around the magnetic switches SR3 and SR2. The core of each of the magnetic switches SR1 to SR3 and the step-up transformer TR1 is often made of a ribbon-shaped ferromagnetic material wound in multiple layers, and its shape is generally circular (cylindrical). FIG. 13 shows a cross-sectional shape when the cylindrical core is cut along a plane including the central axis thereof. The bottom surface of the tank 10 is composed of a conductive base 11, and the conductive base 11 is grounded. A negative high voltage is supplied to the electrode E1 via the negative high voltage introducing member 13 penetrating the insulating member 12 provided on the conductive base 11.
A radiator 14 that is cooled by cooling water is arranged in the upper portion of the tank 10. Insulating refrigerant near the radiator 1
5 is cooled and magnetic switches SR1, SR2, SR3,
The insulating refrigerant 15 near the transformer TR1 and the capacitors C1 and C2 is heated. Therefore, due to the temperature difference, natural convection of the insulating refrigerant 15 occurs as shown by the arrow in the figure.
Insulating refrigerant 15 is magnetic switch SR by natural convection.
1, SR2, SR3 and the core surface of the transformer TR1 and the surfaces of the capacitors C1, C2, and the heat exchange performed at that time cools the magnetic switches SR1, SR2, SR3, the transformer TR1, and the capacitors C1, C2.

It is known that the performance of compressing the pulse width of the magnetic switches SR2 and SR3 (compression performance) in the circuit shown in FIG. 12 is improved as the inductance after the magnetic switch is saturated is smaller. Therefore, FIG.
As shown in, normally, a plurality of core windings of the capacitors C1 and C2 and the magnetic switches SR2 and SR3 are provided in parallel to reduce the parasitic inductance of the capacitors C1 and C2 and the inductance of the coils of the magnetic switches SR2 and SR3. The inductance after the magnetic switch is saturated is reduced. On the other hand, it is also possible to reduce the inductance after saturation of the magnetic switch by reducing the stray inductance. For that purpose, for example, the wiring connecting the capacitor and the magnetic switch may be shortened, and as shown in FIG.
Are arranged close to the magnetic switches SR2 and SR3.
Further, as shown in FIG. 13, magnetic switches SR1 and SR
2, SR3 and the transformer TR1 are arranged in a double box shape to shorten the wiring between the magnetic switches and between the magnetic switch and the transformer to reduce the stray inductance. [Capacitor C2-Magnetic switch SR3-Capacitor C
The loop between [p] is wired as short as possible. In the heavy box-shaped arrangement structure shown in FIG. 13, the temperature of the insulating refrigerant flowing on the surface of each magnetic switch or transformer is different. That is, the heat exchange efficiency between each magnetic switch or transformer and the insulating refrigerant is different. Therefore, it is necessary to set the thickness of the radiator so that the heat generation of the core does not exceed the rating even in the portion where the heat exchange efficiency is the smallest, and the radiator becomes large to some extent.

[0011]

As described above, in recent years, a repetition frequency of 4 kHz or higher is required in order to increase the throughput and reduce the variation in the exposure amount. Under such operating conditions, self-heating in the core of the magnetic switch or transformer increases, the core rating may be exceeded, and the temperature of the insulating refrigerant also rises. To cope with such a situation, it is necessary to increase the cooling efficiency by increasing the size of the radiator. Therefore, the tank becomes large.

FIG. 14 shows a structural example in which the radiator and the tank can be prevented from increasing in size to some extent even under operating conditions of a repetition frequency of 4 kHz or more. In FIG. 14, an axial flow fan 16 is provided inside the tank 10 in FIG. 13 to forcibly convect the insulating refrigerant 15 inside the tank. Thereby, the magnetic switch S
The flow velocity of the insulating refrigerant flowing on the core surfaces of R1 to SR3 and the transformer TR1, the surfaces of the capacitors C1 and C2, and the surface of the radiator 14 increases. Therefore, since the heat exchange efficiency is increased, even under an operating condition of a repetition frequency of 4 kHz or more, the size of the radiator 14 can be suppressed to some extent as compared with the case of natural convection, and the magnetic switches SR1 to SR can be suppressed.
3, the transformer TR1, and the capacitors C1 and C2 can be cooled.

In order to reduce the stray inductance as described above, the magnetic switches SR1, SR2, SR
Since 3 and the transformer TR1 are arranged in the shape of a heavy box, the heat exchange efficiency between each magnetic switch or transformer and the insulating refrigerant is different. Therefore, it is necessary to set the size of the radiator 14 so that the heat generation of the core does not exceed the rating even in the portion where the heat exchange efficiency is the smallest, and the size is increased to some extent. Although FIG. 14 shows the case where one axial fan 16 is provided, a plurality of axial fans 16 may be arranged. Further, as described below, even when the shape of the magnetic switch SR3 is an elliptical shape (race track shape), it is desirable to dispose a plurality of axial fans in the longitudinal direction.

In the high voltage pulse generating circuit of the exposure gas laser apparatus, the stray inductance of the capacitor C2-magnetic switch SR3-peaking capacitor Cp, which is the final stage of the magnetic pulse compression circuit, is reduced to reduce the stray inductance from the capacitor C2 to the peaking capacitor Cp. , It is necessary to speed up the transfer of energy (voltage). That is, when the transition speed is fast, the discharge is performed at a sufficient discharge voltage, but when the transition speed is slow, the discharge occurs at a low voltage, and the emission energy of the laser becomes small.
Here, as described above, the core of the magnetic switch is often a ribbon-shaped ferromagnetic material wound in multiple layers,
The shape thereof is generally circular (cylindrical). In this case, as shown in FIG. 15, the wiring from one end of the capacitor C2 is connected to the wiring connection portion P of the discharge electrode E1 via the magnetic switch SR3. Note that, in FIG. 15, the magnetic switch SR3 and the capacitor C2 in FIG.
FIG. 14 is a top view of the above components as viewed from above in FIG. 13. Since the core of the magnetic switch SR3 has a circular shape, the wiring connection portion P can be provided only near the central portion of the core, and the distance from the wiring connection portion P to each peaking capacitor Cp is different. Becomes Therefore, [capacitor C2-magnetic switch SR3-peaking capacitor C
The distance p is also different, and in the wiring route in which this distance is long, the stray inductance increases and the compression performance of the magnetic switch SR3 deteriorates.

Due to the above circumstances, recently, as described above, the magnetic switch SR3 is often changed from a circular shape to an oval shape (race track shape).
For example, as shown in FIG. 16, the longitudinal direction of the core of the magnetic switch SR3 and the discharge electrodes E1 and E2 (E2 is not shown, but is disposed facing the discharge electrode E1 at a predetermined distance). Are arranged so that their longitudinal directions substantially coincide with each other, capacitors C2 are arranged along the periphery of the core of the magnetic switch SR3, and each capacitor C2 is arranged near each peaking capacitor Cp. The wiring from the capacitor C2 is
Via the magnetic switch SR3, it is connected to the wiring connection parts P1 to P3 provided on the discharge electrode E1. Further, the capacitor C2 and the peaking capacitor Cp are connected via the ground.

Since the core of the magnetic switch SR3 has an oval shape, the capacitor C2 can be provided along the discharge electrode E1 and a plurality of wiring connection parts P1 to P3 are provided at arbitrary positions of the discharge electrode E1. Therefore, the wiring from the capacitor C2 can be connected to the wiring connection portions P1 to P3 in the vicinity. Therefore, even if the connection position of the peaking capacitor Cp is the end of the discharge electrode E1,
[Capacitor C2-Magnetic Switch SR3-Wiring Connection P
1 to P3−the distance from the discharge electrode E1 to the peaking capacitor Cp], and the wiring connection portion P
The distances from 1 to P3 to each peaking capacitor Cp can be made substantially equal. Therefore, the capacitor C
The current paths between 2 and the peaking capacitor Cp can be made substantially equal.

When the magnetic switch SR3 has an oval core as described above, the axial fan 16 shown in FIG.
As shown in FIG. 17, it is desirable to provide a plurality of magnetic switches along the longitudinal direction of the core of the magnetic switch SR3. Here, FIG. 17 is a top view of FIG. 14 viewed from above the tank 10 when the core shape of the magnetic switch SR3 is an elliptical shape. As shown in FIG. 18, in the structure in which a plurality of axial fans are provided along the longitudinal direction as shown in FIG.
The flow distribution of the insulating refrigerant becomes non-uniform, resulting in a flow velocity distribution. For this reason, it is necessary to set the heat exchange to be sufficiently performed even in the region where the flow velocity is the smallest in the flow velocity distribution, which causes a problem that the drive motor of the axial flow fan becomes large. The present invention has been made in view of the above circumstances, and an object of the present invention is to improve the cooling efficiency by substantially equalizing the flow velocity of the insulating refrigerant in the longitudinal direction of the device to be cooled, and to drive the fan. The aim is to reduce the size of the motor and enable discharge at a high repetition frequency.

[0018]

In the present invention, the above problems are solved as follows. (1) In a high voltage pulse generator including a magnetic compression circuit or a magnetic compression circuit and a step-up transformer circuit, a magnetic switch, a capacitor, or a magnetic switch, a capacitor, and a transformer constituting the high voltage pulse generator are filled with an insulating refrigerant. A cross flow fan is provided in the container, and a radiator for cooling the insulating refrigerant is provided at the inlet of the cross flow fan. Then, the insulating refrigerant is circulated by a cross-flow fan to cool the magnetic switch, the capacitor, or the magnetic switch, the capacitor, and the transformer that constitute the high-voltage pulse generator. With the above configuration,
The flow velocity distribution of the insulating refrigerant can be made substantially uniform, and the core temperature distribution can be made substantially uniform. Further, since the variation in the flow velocity distribution is small, the power of the drive motor for driving the cross flow fan may be small, and the motor can be downsized. Especially when an elliptical core is used as the core of the magnetic switch, the temperature distribution of the elliptical core can be improved by arranging the crossflow fan so that its longitudinal direction is substantially parallel to the longitudinal direction of the elliptical core. Can be made substantially uniform. Further, the heat exchange efficiency can be improved by providing the radiator at the inlet of the cross-flow fan having a high flow velocity, whereby the radiator can be downsized. (2) In a high-voltage pulse generator including a magnetic compression circuit or a magnetic compression circuit and a step-up transformer circuit, a magnetic switch, a capacitor, or a magnetic switch, a capacitor, and a transformer constituting the high-voltage pulse generator is filled with an insulating refrigerant. And a plurality of cross flow fans are provided in the container. Then, the insulating refrigerant is circulated by a cross-flow fan to cool the magnetic switch, the capacitor, or the magnetic switch, the capacitor, and the transformer that constitute the high-voltage pulse generator. With the above configuration, as in the case of (1) above, the flow velocity distribution of the insulating refrigerant can be made substantially uniform, and the temperature distribution of the core can be made substantially uniform. Further, by providing a plurality of cross flow fans, the flow of the refrigerant in the container can be made uniform, and each core can be cooled uniformly. (3) In (2) above, a radiator is provided in the container filled with the refrigerant. Thereby, the refrigerant can be effectively cooled. (4) In the above (1), (2), and (3), the flow of the crossflow fan is arranged so that the fluid discharged from the crossflow fan's outlet does not reach the inlet of the crossflow fan without being sufficiently cooled. Provide a wall between the outlet and the inlet. By providing the wall as described above, the fluid discharged from the outlet does not reach the inlet of the cross flow fan without being cooled, and thus the heat exchange efficiency can be improved. (5) In the above (1), (2), (3), and (4), a guide for changing the flow path of the fluid is provided at a portion facing the outlet of the crossflow fan. By providing the guide, the flow of the refrigerant in the container can be made smooth, and the heat exchange efficiency can be further improved. (6) In the above (1), (2), (3), (4) and (5),
The core of the final-stage magnetic switch has an oval shape, and its longitudinal direction is arranged substantially parallel to the longitudinal direction of the cross-flow fan, and the core of the magnetic switch other than the final stage is placed on the oval core, or The magnetic switches and booster transformer cores other than the final stage are arranged such that their central axes are parallel to the longitudinal direction of the oval core. With the above configuration, the flow of the refrigerant flowing between the magnetic switch and the step-up transformer other than the final stage can be made uniform, and each core can be cooled uniformly. Further, since there is no useless space in the container, the device can be downsized. (7) In the above (6), a space is provided between the oblong core and the bottom surface of the container that houses them. As a result, the coolant can flow in the space, and the oval core can be effectively cooled. (8) As a high voltage pulse generator of a discharge excitation gas laser device having a pair of electrodes arranged in a laser chamber and a peaking capacitor connected in parallel to the electrodes, the high voltage pulse generator of the above (1) to (7) A voltage pulse generator is used, and the pair of electrodes is connected to the output terminal of the high voltage pulse generator. (9) The discharge-excited gas laser device according to (8) above is used for KrF
An excimer laser device, an ArF excimer laser device, or a fluorine molecular laser device is used. (10) In the above (9), the repetition frequency of the high voltage pulse generator is set to the KrF excimer laser device or A
In the rF excimer laser device, 4 kHz or higher,
In the case of the fluorine molecular laser device, the frequency is 2 kHz or higher.

[0019]

BEST MODE FOR CARRYING OUT THE INVENTION Embodiments of the present invention will be described below. In the following embodiments, a high voltage pulse generator applied to the above ArF excimer laser device, KrF excimer laser device, and fluorine molecular laser device will be described. The high voltage pulse generator described below applies a high voltage pulse having a high repetition frequency between the discharge electrodes E1 and E2 provided in the laser chamber to generate discharge in the laser chamber and excite laser gas. . The above-mentioned repetition frequency depends on the ArF excimer laser device and the K
The rF excimer laser device has a frequency of 4 kHz or higher, and the molecular fluorine laser device has a frequency of 2 kHz or higher. Since the fluorine molecular laser device has a large input energy, it generates a large amount of heat even at a repetition frequency of 2 kHz or higher, and the same cooling as in the case of oscillating an ArF excimer laser device and a KrF excimer laser device at a repetition frequency of 4 kHz or higher. Is required.

FIG. 1 shows the configuration of a high voltage pulse generator according to an embodiment of the present invention. 1 is similar to FIG.
Fig. 12 shows a schematic configuration example in the tank when the circuit configuration of Fig. 2 (a) is adopted, and in the case of the circuit configuration of Fig. 12 (b), the transformer TR1 is omitted. In FIG. 1, a booster transformer TR1 and magnetic switches SR1, SR2, SR3 are stacked in a heavy box shape inside a tank 10 as in FIG. 13, and capacitors C1, C2 are attached around the magnetic switches SR3, SR2. Has been. The magnetic switches SR1 and SR2 and the step-up transformer TR1 have a circular (cylindrical) shape, and the magnetic switch SR3 has an oval shape as shown in FIG. FIG. 1 shows a cross section when the core of the magnetic switch SR3 is cut by a vertical plane including an ellipse-shaped short axis, and the cores of the magnetic switches SR1 and SR2 and the step-up transformer TR1 are the above-mentioned elliptical shapes. It is located almost on the center of the core. The bottom surface of the tank 10 is composed of a conductive base 11, and the conductive base 11 is grounded. A laser chamber (not shown) including electrodes E1 and E2 is provided below the conductive base 11, and a negative high voltage introducing member 13 penetrating an insulating member 12 provided on the conductive base 11 is interposed therebetween. , A negative high voltage is supplied to the electrode E1, and the electrode E2 is grounded. The tank 10 is filled with the insulating refrigerant 15.

In this embodiment, as the cooling fan, a crossflow fan 17 is used instead of a plurality of conventional axial flow fans, and a radiator 14 cooled by cooling water is provided at the inlet of the crossflow fan 17. Was placed.
The cross-flow fan 17 is arranged such that its longitudinal direction is substantially parallel to the longitudinal direction of the elliptical core of the magnetic switch SR3, and the longitudinal length of the cross-flow fan 17 is the core of the magnetic switch SR3. The length is set to be substantially equal to or longer than the length in the longitudinal direction.
The fan 17a of the cross-flow fan has a configuration in which a pair of circular side plates are connected by a plurality of blades. The plurality of blades are oriented in the radial direction of the side plate, and both ends of the blades are arranged in the circumferential direction of the side plate. Has been done. As shown in FIG. 1, the cross flow fan is used by providing a guide 17b and a partition plate 17c around the fan 17a. A guide 17b provided on the outflow side of the cross flow fan 17
The shape is normally spiral, and a predetermined gap is provided between the fan 17a and the guide wall 17a. A guide 18 is provided inside the tank 10 facing the outflow port 17d, and the cross flow fan 1 is provided.
The insulative refrigerant 15 flowing out of 7 smoothly flows in the tank 10.

In FIG. 1, when the fan 17a is rotated clockwise by a driving device (not shown), the insulating refrigerant 1
5 is cooled by the radiator 14, sucked from the inlet 17e of the cross flow fan 17, and discharged from the outlet 17d.
Drained from. Objects to be cooled such as magnetic switches SR1, SR2, SR3 and transformer TR1 and cross flow fan 1
The positional relationship of 7 is schematically shown in FIGS. 2 (a) and 2 (b). Insulating refrigerant 15 flowing out from the outlet 17d
Is the magnetic switch SR as shown by the arrows in FIGS.
1, SR2, SR3, the core surface of the transformer TR1 and the surfaces of the capacitors C1, C2, and the heat exchange performed at that time cools the magnetic switches SR1, SR2, SR3, the transformer TR1, and the capacitors C1, C2. Then, it reaches the radiator 14 provided at the inflow port of the crossflow fan 17, is cooled there, and reaches the inflow port 17e of the crossflow fan 17.

In the present embodiment, as described above, since the cross flow fan is used as the cooling fan, the flow rate of the insulating refrigerant near the elliptical core of the magnetic switch SR3, which has been non-uniform in the past, is reduced. It becomes possible to make the temperature substantially uniform, and the temperature distribution of the core can be made substantially uniform.
The required power of the drive motor in the case of using the axial flow fan and the case of using the cross flow fan is considered as follows from the viewpoint of the average flow velocity. Figure 3
When a plurality of axial fans are provided as shown in (a),
Since it is necessary to set such that the heat exchange is sufficiently performed even in the region where the flow velocity distribution has a large variation and the flow velocity distribution has the smallest flow velocity, the average flow velocity needs to be considerably higher than the required flow velocity. On the other hand, the cross-flow fan has a small variation in the flow velocity distribution as shown in FIG. Therefore, even if the heat exchange is set to be sufficiently performed in the region where the flow velocity distribution has the smallest flow velocity, the average flow velocity is smaller than that in the axial fan. That is, if a cross flow fan is used as the cooling fan, the power of the driving motor to be driven may be small, and the motor can be downsized.

Further, in this embodiment, since the radiator 14 is provided at the inlet of the cross flow fan 17, the heat exchange efficiency can be improved and the radiator 14 can be miniaturized as described below. The radiator 14 is generally provided with cooling fins on its surface and has a structure for circulating cooling water or the like inside. Therefore, the higher the flow velocity of the insulating refrigerant passing through the surface of the radiator 14 provided with the cooling fins, the greater the heat exchange efficiency. As described above, since the radiator 14 has a structure in which the cooling fins are provided on the surface, the resistance to the flow is large and the flow becomes non-uniform. Therefore, when the radiator is provided in the tank 10, it is preferable to place it in a position where the flow velocity of the insulating refrigerant is as fast as possible. That is, it is desirable to place the core of the insulating refrigerant and the condenser at a position where the flow velocity after heating by heat exchange is high.

In the case of cooling by natural convection, the flow of the insulating refrigerant is gentle and there is not much difference in speed depending on the location, and the insulating refrigerant heated by the convection moves near the upper liquid surface in the tank. Therefore, the radiator 14 is arranged in the upper part of the tank below the liquid surface of the insulating refrigerant. On the other hand, when the axial fan is used as described above, the position where the flow velocity is high after the insulating refrigerant is heated is on the back side of the axial fan. Therefore, it is desirable to arrange the radiator 14 on the back side of the axial fan. However, the space on the back side is narrow because it is close to the wall surface of the tank.
If installed, the flow of the insulating refrigerant becomes extremely slow and the heat exchange efficiency also decreases. Therefore, as in the case of natural convection, the radiator is often arranged in the upper part of the tank below the liquid surface of the insulating refrigerant.

On the other hand, since the inflow direction and the outflow direction of the cross flow fan 17 are substantially orthogonal to each other, as shown in FIGS. 1 and 2, the radiator 14 should be arranged near the inflow port 17e of the crocus flow fan 17. You can That is, the partition plate 17c and the guide 17b of the cross flow fan 17
If the fluid (insulating refrigerant 15) is introduced from above, the radiator 14 can be provided at the inlet 17e of the cross flow fan 17 as shown in FIGS. Inflow port 17e above cross flow fan 17
Since the flow velocity is the highest in the vicinity, the radiator 14 can be arranged at a position where the flow velocity is high after being heated by heat exchange with the insulating refrigerant core and the condenser by adopting the above configuration. Further, this position is also a position where the fluid after being heated flows, and the fluid can be effectively cooled. Furthermore, since the flow velocity is high,
As shown in FIG. 3 and FIG. 14, the heat exchange efficiency is improved as compared with the case where the insulating refrigerant is arranged below the liquid surface in the upper part of the tank. Therefore, the radiator can be downsized.

By the way, in the case of the embodiment described with reference to FIG. 1, as shown in FIG.
It is conceivable that the insulative refrigerant 15 flowing out from the above flows into the fluid inlet 17e in the upper portion of the cross flow fan 17 before being sufficiently cooled by the radiator 14 and the heat exchange efficiency is reduced. Therefore, as shown in FIG. 4 (b), it is desirable to provide a wall 19 so as not to flow from the fluid inlet port 17 e above the cross flow fan 17 before being cooled by the radiator 14. As a result, it is possible to prevent the insulating refrigerant that is not cooled by the radiator 14 from being mixed with the insulating refrigerant sent from the fan to reduce the heat exchange efficiency with the core of the magnetic switch or the transformer.

In the embodiment shown in FIGS. 1 to 4, the magnetic switches SR1 to S are used to reduce the stray inductance.
Although the case where R3 and the step-up transformer TR1 are stacked in the shape of a heavy box is shown, the magnetic switches SR1 to SR3 and the step-up transformer TR1 may be laterally arranged as shown in FIG. That is, in the case of the arrangements shown in FIGS. 1 to 4, the temperature of the insulating refrigerant becomes higher toward the upper part, so that the heat exchange efficiency decreases.
It is necessary to set the size of the radiator 14 so that the heat generation of the core does not exceed the rating even in the part where the heat exchange efficiency is small, and if the core arranged in the upper part is to be cooled efficiently, the radiator will be large to some extent. Turn into. Therefore, the magnetic switches SR1 to SR3 and the step-up transformer TR1
Are arranged in the lateral direction as shown in FIG. 5, and the cross flow fan 17 is arranged such that its longitudinal direction is the magnetic switches SR1 to S.
It is arranged so as to be parallel to the direction of the central axis of R3 and the core of the step-up transformer TR1. Note that FIG. 5A shows the tank 10.
Is a top view seen from above, and FIG. 5B is a side view.
With the arrangement shown in FIG. 5, each of the magnetic switches SR1 to S
The temperatures of the insulating refrigerant flowing on the surfaces of R3 and step-up transformer TR1 can be made substantially the same. That is, the heat exchange efficiencies of the magnetic switches SR1 to SR3 and the step-up transformer TR1 and the insulating refrigerant 15 are almost the same. This heat exchange efficiency is higher than the value in the portion where the heat exchange efficiency is smallest when the magnetic switches and transformers are arranged in the shape of a heavy box. Therefore, it is possible to reduce the size of the radiator as compared with the case of the above-mentioned arrangement in the shape of a heavy box.

In this arrangement, the magnetic switch SR
Although it is possible to use an oval core as the core of No. 3, in order to uniformly cool each core, a circular (cylindrical) shape is used.
Is desirable. Further, in this arrangement, the loop distance between the plurality of [capacitor C2-magnetic switch SR3-capacitor Cp] formed by the plurality of windings provided in parallel on the core of the magnetic switch SR3 is different.
Therefore, in the wiring route where this distance is long, the stray inductance becomes large and the magnetic switch S
The compression performance of R3 decreases.

Therefore, the core of the magnetic switch SR3 at the final stage has an oval shape as shown in FIG. 16, and the magnetic switches SR1 and SR2 other than the final stage and the step-up transformer Tr1 are shown in FIGS. It may be arranged in the lateral direction as shown. That is, the magnetic switch SR3 having an oval core is arranged horizontally as shown in FIG. 1, and the crossflow fan 17 is arranged such that its longitudinal direction is parallel to the longitudinal direction of the core of the magnetic switch SR3. The other magnetic switches SR1 and SR2 and the step-up transformer Tr1 are arranged on the magnetic switch SR3 so that their central axes are parallel to the longitudinal direction of the oval core. In the case of a circuit that does not include the step-up transformer TR1, only the magnetic switches SR1 and SR2 are laterally arranged. Similar to FIG. 5, FIG. 6 shows a top view of the tank 10 seen from above, and FIG.
The figure which looked at the tank 10 from the A direction of FIG. 6 is shown.

In this embodiment, as shown in FIG.
The final-stage magnetic switch SR3 having an oval core at the bottom of the tank 10 is arranged such that its longitudinal direction is horizontal, and the insulating refrigerant 15 flows through the core of the magnetic switch SR3 and the bottom surface of the tank 10. A space is formed. A capacitor C1 is mounted around the magnetic switches SR1 and SR2 and the step-up transformer Tr3 arranged in the lateral direction, and a capacitor C2 is arranged around the oblong magnetic switch SR3. The magnetic switches SR1 to SR2 and the step-up transformer TR1 have a circular (cylindrical) shape, the magnetic switch SR3 has an oval shape, and the magnetic switches SR1 to SR2 and the step-up transformer TR1 have their cores at their centers. So that the axis is parallel to the longitudinal direction of the oval core,
It is arranged almost directly above the elliptical core. Figure 1
Similar to that shown in FIG. 3, the bottom surface of the tank 10 is made of a conductive base 11, and the conductive base 11 is grounded. A laser chamber (not shown) provided with electrodes E1 and E2 is provided below the conductive base 11.
A negative high voltage is supplied to the electrode E1 through a negative high voltage introducing member 13 penetrating the insulating member 12 provided in the electrode E2, and the electrode E2 is grounded. The tank 10 is filled with the insulating refrigerant 15. As in the case of FIG. 1, a cross flow fan 17 is used as the cooling fan, and a radiator 14 cooled by cooling water is arranged at the inlet of the cross flow fan 17. In addition, the cross flow fan 17
The length in the longitudinal direction of is substantially equal to or longer than the length in the longitudinal direction of the core of the magnetic switch SR3.

In the present embodiment, as described above, the magnetic switch SR3 having an oval core is arranged such that its longitudinal direction is substantially parallel to the longitudinal direction of the cross flow fan 17, and the magnetic switch SR3 is arranged. Since the other magnetic switches SR1 and SR2 and the step-up transformer Tr1 are arranged on the above so that their central axes are parallel to the longitudinal direction of the oval core, each core can be cooled uniformly.
In the case of the arrangement of FIG. 1, the magnetic switches SR1 and SR
2. Since the step-up transformer Tr1 is stacked in the shape of a heavy box, the flow of the insulating refrigerant flowing between these cores is not necessarily equal, but if arranged as shown in FIG. 6 and FIG. The insulating refrigerant flowing out is the magnetic switches SR1 and SR2, the step-up transformer Tr1.
It is possible to evenly flow between the cores and cool each core uniformly. In addition, by arranging as in the present embodiment, it is possible to reduce a wasteful space and achieve miniaturization. That is, when the magnetic switches SR1, SR2 and the step-up transformer Tr1 are arranged in a vertically overlapping manner, the above-mentioned FIG.
As shown in FIG. 7, the portions on both sides of the magnetic switches SR1 and SR2 and the step-up transformer Tr1 (A and B portions in FIG. 17) are wasted space. However, by arranging them as shown in FIGS. The parts can be effectively used, and as is clear from comparing FIG. 1 and FIG. 7, the tank 1
The height of 0 can be reduced.

Further, an oval magnetic switch SR3,
If a space in which the insulating refrigerant 15 flows is formed on the bottom surface of the tank 10, the insulating refrigerant flows in this space, so that the magnetic switch SR3 can also be efficiently cooled. In this case, if a space is provided between the condenser C2 and the bottom surface of the tank 10, the flow of the insulating refrigerant can be made smoother. Further, as described above, if the final-stage magnetic switch SR3 has an oval shape, the capacitor C2 is arranged along the periphery of the core of the magnetic switch SR3, and each capacitor C2 is arranged in the vicinity of each peaking capacitor Cp, As shown in FIG. 16, the current paths between the capacitor C2 and the peaking capacitor Cp can be made substantially equal, and the compression performance of the magnetic switch SR3 does not deteriorate.

The case where the cross flow fan 17 is arranged so that the longitudinal direction is horizontal and the radiator 14 is provided above the tank has been described above, but as shown in FIG. You may arrange | position so that a longitudinal direction may become substantially vertical. Even in this case,
As shown in FIG. 1, the radiator 14 is preferably arranged near the inflow port 17e of the crocodile flow fan 17.

In the above embodiments, the case where one crossflow fan is installed in the tank has been described. Next, an embodiment in which a plurality of crossflow fans are provided in the tank will be described. FIG. 9 shows an embodiment in which the inside of the tank 10 is divided into upper and lower parts and is cooled by two cross flow fans. In the figure, the tank 10
Is divided into upper and lower parts by an insulating plate 20, a first crossflow fan 21a, a magnetic switch SR1 and a step-up transformer TR1 are provided in an upper region, and a second crossflow fan is provided in a lower region. 21b and magnetic switches SR3 and SR2 are provided. In addition, the tank 10 facing the first and second cross flow fans 21a and 21b
Guides 22a to 22c for smoothing the flow of the insulating refrigerant 15 are attached to the inside of the. A radiator 14 is attached to the inlets of the first crossflow fan 21a and the second crossflow fan 21b.

The first and second cross flow fans 21a,
The insulating refrigerant flowing out from 22b flows through the tank 10 as shown by the arrow in the figure, and the magnetic switches SR1 to SR
3. Cool the step-up transformer TR1 and the capacitors C1 and C2. Then, the insulating medium 15 is cooled by the radiator 14 attached to the inlets of the first and second cross flow fans 21a and 21b, and flows into the first and second cross flow fans 21a and 21b. In this embodiment,
As described above, the tank is divided into upper and lower parts, and a cross flow fan is provided in each of the divided areas to circulate the insulating refrigerant to cool the magnetic switch, the step-up transformer and the like. The flow can be made uniform, and each magnetic switch SR1 to SR3 and step-up transformer T
R1 can be cooled almost uniformly. Although the insulating plate 20 is provided in FIG. 9, the insulating plate 20 is not essential, and the insulating medium can be circulated as shown by the arrow in FIG. 9 only by providing the guides 22b and 22c on the inner wall of the tank 10. Can be made.

FIG. 10 shows an embodiment in which two cross flow fans are arranged at diagonal positions in the tank.
The radiator 14 is attached to the inlets of the first cross flow fan 21a and the second cross flow fan 21b, and the first and second cross flow fans 21a, 2
A guide 22a for smoothing the flow of the insulating refrigerant 15 is attached to the inside of the tank 10 facing the outlet of 1b. First and second cross flow fan 21
The insulating refrigerant flowing out from a and 21b flows in the tank 10 as shown by an arrow in the figure, and the magnetic switches SR1 to S
The R3, the step-up transformer TR1, and the capacitors C1 and C2 are cooled. Then, the insulating medium 15 is cooled by the radiator 14 attached to the inlets of the first and second cross flow fans 21a and 21b, and flows into the first and second cross flow fans 21a and 21b.

Also in this embodiment, since two cross-flow fans are provided in the tank 10 to circulate the insulating refrigerant to cool the magnetic switch, the step-up transformer, etc., the flow of the insulating refrigerant in the tank 10 will be described. Of the magnetic switches SR1 to SR3 and the step-up transformer T.
R1 can be cooled almost uniformly. Note that FIG.
In the above, the case where the crossflow fan is arranged at the position of the diagonal line in the tank is shown, but the crossflow fan may be attached to one side of the tank. In addition, in FIGS. 9 and 10, as shown in FIG.
May be provided so that the fluid does not flow from the fluid inflow port 17e in the upper portion of the cross flow fan 17 before being cooled by the radiator 14.

FIG. 11 shows an embodiment in which the magnetic switches and step-up transformers arranged in the horizontal direction shown in FIG. 9 are cooled by using two cross flow fans.
FIG. 11 shows a view seen from the side of the tank, and the arrangement of the magnetic switches SR1 to SR3 and the step-up transformer TR1 is the same as that shown in FIG. 5 (a). As shown in the figure, the first and second cross flow fans 21a, 21 are provided on both sides of the magnetic switching SR1 to SR3 and the step-up transformer TR1.
b, the first and second cross flow fans 21 are provided.
A partition plate 23 that serves as a guide is provided between a and 21b, the magnetic switching SR1 to SR3, and the step-up transformer TR1.
a and 23b are provided, and on the lower surface of the tank 10,
Guides 22a to 2 for smoothing the flow of the insulating refrigerant
2b is provided. Further, in this embodiment, the radiator 14 is provided above the tank.

As shown in FIG. 11, the insulating refrigerant 1 flowing out from the first and second cross flow fans 21a and 21b.
Reference numeral 5 denotes magnetic switches SR1 and S as shown by arrows in FIG.
The magnetic switches SR1, SR2, SR3, the transformer T flow through the core surface of the R2, SR3 and the transformer TR1 and the surfaces of the capacitors C1, C2, and heat exchange performed at that time.
The R1 and the capacitors C1 and C2 are cooled. Then, it reaches the radiator 14 provided at the upper part of the tank 10 and is cooled there to cool the first and second cross flow fans 21a,
21b Inlet is reached. In this embodiment, as described above, the first and second cross flow fans are provided to cool the magnetic switches SR1, SR2, SR3, the core of the transformer TR1, etc., and therefore, as in the above-described embodiments, the magnetic The switches SR1 to SR3 and the step-up transformer TR1 can be cooled substantially uniformly.

Although the radiator is provided in the upper portion of the tank in FIG. 11, as described above, the radiator 14 is provided.
May be disposed near the inlet of the crocodile flow fan, as shown in FIG. Further, in the embodiments of FIGS. 9 to 11, the case where the radiator 14 is provided in the tank 10 has been described, but instead of providing the radiator 14 in the tank 10, a cooling means such as a cooling pipe is provided around the tank 10. May be attached to cool the insulating refrigerant.

[0042]

As described above, in the present invention,
The following effects can be obtained. (1) Since the cooling fan is a cross flow fan,
The flow velocity of the insulating refrigerant can be made substantially uniform in the longitudinal direction, and the temperature of the object to be cooled (such as the core of the magnetic switch) in the longitudinal direction can be made substantially uniform. (2) Further, since the variation in the flow velocity distribution can be reduced, even if it is set so that heat exchange is sufficiently performed even in the region of the flow velocity distribution where the flow velocity is the smallest, the average flow velocity is in the longitudinal direction. It is smaller than when using multiple axial fans. That is, the power of the drive motor for driving the fan may be smaller than that of the axial flow fan, and the motor can be downsized. (3) By arranging a radiator at the inlet of the cross-flow fan, the radiator is arranged at the portion where the flow velocity is the fastest, that is, the portion where the flow velocity is high after being heated by heat exchange with the insulating refrigerant core and the condenser. Therefore, the heat exchange efficiency in the radiator is improved. Therefore, it is possible to reduce the size of the radiator. (4) The final round magnetic switch is an oval, and the longitudinal direction of the magnetic switch is approximately parallel to the longitudinal direction of the crossflow fan. On top of the oval magnetic switch, other magnetic switches and a step-up transformer are placed. The cores can be uniformly cooled by arranging them so that their central axes are parallel to the longitudinal direction of the oval cores. In addition, it is possible to reduce wasteful space and achieve size reduction. Furthermore, by providing a space in which the insulating refrigerant flows between the oval core and the bottom of the container, the oval core can be cooled effectively. (5) By providing a plurality of cross flow fans in the tank, the flow of the insulating refrigerant in the tank can be made more uniform, and the heat exchange efficiency can be improved.

[Brief description of drawings]

FIG. 1 is a diagram showing a configuration of a high-voltage pulse generator according to an embodiment of the present invention.

FIG. 2 is a diagram schematically showing a positional relationship between a radiator and a cross flow fan shown in FIG.

FIG. 3 is a diagram showing flow velocity distributions when an axial fan is used and when a crossflow fan is used.

FIG. 4 is a view showing an embodiment in which a wall is provided between an inflow port and an outflow port of a cross flow fan.

FIG. 5 is a diagram showing an embodiment in which magnetic switches, step-up transformers, etc. are arranged in the lateral direction.

FIG. 6 is a diagram showing an embodiment in which the oblong cores are arranged horizontally in FIG.

FIG. 7 is a cross-sectional view taken along the line AA of the high voltage pulse generator shown in FIG.

FIG. 8 is a diagram showing an embodiment in which a cross flow fan is arranged so that its longitudinal direction is substantially vertical.

FIG. 9 is a diagram showing an embodiment in which a tank is divided into upper and lower parts and is cooled by two cross flow fans.

FIG. 10 is a diagram showing an embodiment in which two cross flow fans are arranged at diagonal positions in the tank.

FIG. 11 is a diagram showing an example in which a magnetic switch or the like arranged in the lateral direction is cooled using two cross flow fans.

FIG. 12 is a diagram showing a configuration example of a high voltage pulse generation circuit.

FIG. 13 is a diagram showing an example of a conventional cooling structure.

FIG. 14 is a diagram showing a case where an axial fan is provided inside the tank in FIG.

FIG. 15 is a diagram showing a configuration example when a circular (cylindrical) shape is used as a core of the magnetic switch SR3.

FIG. 16 is a diagram showing a configuration example in the case where an ellipse-shaped one is used as a core of the magnetic switch SR3.

FIG. 17 is a diagram showing a case where a plurality of axial fans are provided along the longitudinal direction of the core of the magnetic switch SR3.

FIG. 18 is a diagram showing a flow velocity distribution when a plurality of axial fans are provided along the longitudinal direction.

[Explanation of symbols]

10 tanks 11 conductive base 12 Insulation member 13 Negative high voltage introducing member 14 radiator 17 Cross Flow Fan 15 Insulating refrigerant 18 Guide 19 walls 20 insulating plate 21a, 21b Cross flow fan 22a-22d guide 23a, 23b Partition plate TR1 step-up transformer SR1 to SR3 Magnetic switch C1, C2 capacitors Cp peaking capacitor E1, E2 electrodes

   ─────────────────────────────────────────────────── ─── Continued front page    F-term (reference) 5F071 AA04 AA06 GG05 GG09 JJ01                       JJ07                 5H790 BA02 BB11 CC01 DD06 EA01                       EA02 EA03 EA11 EA26

Claims (10)

[Claims] 1. A high-voltage pulse generator including a magnetic compression circuit or a magnetic compression circuit and a step-up transformer circuit, wherein a magnetic switch, a capacitor, or a magnetic switch, a capacitor, and a transformer constituting the high-voltage pulse generator is provided. A magnetic switch, a capacitor, or a magnetic switch that is in a container filled with an insulating refrigerant, and a fan is provided in the container, and the insulating refrigerant is circulated by the fan to configure the high-voltage pulse generator. A high voltage pulse generator for cooling a condenser and a transformer, wherein a cross flow fan is used as the fan, and a radiator for cooling the insulating refrigerant is provided at an inlet of the cross flow fan. . 2. A high-voltage pulse generator including a magnetic compression circuit or a magnetic compression circuit and a step-up transformer circuit, wherein the magnetic switch, the capacitor, or the magnetic switch, the capacitor, and the transformer constituting the high-voltage pulse generator are A magnetic switch, a capacitor, or a magnetic switch that is in a container filled with an insulating refrigerant, and a fan is provided in the container, and the insulating refrigerant is circulated by the fan to configure the high-voltage pulse generator. A high-voltage pulse generator for cooling a condenser and a transformer, wherein a plurality of cross-flow fans are used as the fan. 3. The high voltage pulse generator according to claim 2, wherein a radiator is provided in the container filled with the refrigerant. 4. A wall is provided between the outflow port and the inflow port so that the fluid discharged from the outflow port of the crossflow fan does not reach the inflow port of the crossflow fan without being sufficiently cooled. The high voltage pulse generator according to claim 1, 2 or 3. 5. The high voltage pulse according to claim 1, wherein a guide for changing the flow path of the fluid is provided at a portion facing the outlet of the cross flow fan. Generator. 6. The core of the final-stage magnetic switch is oval, and its longitudinal direction is arranged substantially parallel to the longitudinal direction of the cross-flow fan. The core of the magnetic switch, or the core of the magnetic switch other than the final stage and the core of the step-up transformer are arranged such that their central axes are parallel to the longitudinal direction of the oval core. , 2, 3, 4 or the high voltage pulse generator of claim 5. 7. A space is provided between the oblong core and the bottom surface of the container.
High voltage pulse generator. 8. A pair of electrodes, which are connected to an output end of a high-voltage pulse generator including a magnetic compression circuit or a magnetic compression circuit and a step-up transformer circuit, are arranged in a laser chamber, and are connected in parallel to the electrodes. A discharge-excited gas laser device having a peaking capacitor, wherein the high-voltage pulse generating device is defined by claim 1, 2, 3, 4,
A discharge-excited gas laser device, which is the high-voltage pulse generator according to claim 5, 6, or 7. 9. The discharge excitation gas laser device comprises a KrF
The discharge excitation gas laser device according to claim 8, which is an excimer laser device, an ArF excimer laser device, or a fluorine molecular laser device. 10. A KrF excimer laser device or Ar
10. The discharge excitation gas laser device according to claim 9, wherein the F excimer laser device has a repetition frequency of 4 kHz or more and the fluorine molecular laser device has a repetition frequency of 2 kHz or more.