JP2003109720A - Heating device and its control method, and manufacturing equipment and object for manufacturing using same - Google Patents

Abstract

PROBLEM TO BE SOLVED: To control the temperature and its distribution constant of a heater resistor by regularly controlling resistance value of the heater resistor and inputted amount of heat into the heater resistor per unit hour in a bonding method utilizing thermal energy of the heater resistor. SOLUTION: A heater resistor 50 heating an object for processing and power source passing electricity to the heater resistor 50 are provided, and temperature or distribution of the heater resistor is controlled constant by further providing with resistance calculating unit 37 calculating resistance value of the heater resistor from the state of current-carrying and a control unit 10 carrying out control of power source to come as near as possible to a target resistance value from the difference of the calculated resistance value and the targeted resistance value.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a heating device using a resistance heating element, a method for controlling the heating device, production equipment using the heating device, and a workpiece.

[0002]

2. Description of the Related Art Conventionally, there are various joining methods which utilize the thermal energy of a resistance heating element pressed against a work to be joined without directly supplying a current to the work to be joined. Examples thereof include thermocompression bonding in which the workpieces to be bonded are heated while being pressed, and a reflow soldering device that mounts an electronic component such as an IC on a printed circuit board. In actual joining, the dimensional error of the work to be joined, the surface condition, the temperature distribution of the resistance heating element, and variations often affected the joining quality. As an approach from a welding apparatus for stabilizing the welding quality, a method has been proposed in which the temperature of a resistance heating element that heats a workpiece is kept constant. In such a device, a thermocouple is attached near the surface of the resistance heating element that comes into contact with the workpieces to be bonded, the temperature of the resistance heating element is detected by the thermocouple, and this is controlled to a constant value, or a non-contact temperature A method of measuring the surface temperature of the resistance heating element with a meter and controlling it to be constant has been used. Further, there has been proposed a method of detecting a current and a voltage of a heater tool utilizing resistance heating and controlling the temperature of the resistance heating element to be constant by combination with the heater tool.

[0003]

However, in the actual bonding, the temperature of the resistance heating element is usually 200 ° C. to 800 ° C.
Mostly used while heating to ℃. It is needless to say that the resistance heating element itself is deteriorated at such a high temperature unless special protection means (for example, use in an inert gas) is used. Deterioration cannot be avoided. Further, since the thermocouple cannot be directly attached to the pressing surface on the work to be joined, there is a drawback that only the temperature in the vicinity of the pressing surface can be measured. This is also the case when the non-contact temperature measuring method is used. In the non-contact type temperature measurement, the change of the surface state and the change of the thermal emissivity due to the deterioration of the resistance heating element may directly affect the accuracy of temperature detection. On the other hand, in the method of detecting the current / voltage and controlling the temperature of the heater tool to be constant by combination with the heater tool, the accuracy of temperature control may be affected by the material and structure of the heater tool.

Therefore, an object of the present invention is to control the resistance value of the resistance heating element to a constant value in a joining method in which a current is passed through the resistance heating element to utilize the resistance heating, or to the resistance heating element per unit time. To provide a heating device using a resistance heating element for controlling the temperature of the resistance heating element or its distribution by controlling the input heat amount of the heating element to a constant value, a control method therefor, a production facility using the same, and a workpiece. Is.

[0005]

To achieve the above object, the present invention according to claim 1 is provided with a resistance heating element for heating a workpiece and a power supply for energizing the resistance heating element, and the energized state is provided. A resistance calculator that calculates the resistance value of the resistance heating element from the heating unit, and a controller that controls the power source to approach the target resistance value from the difference between the calculated resistance value and the target resistance value It is a device.

The present invention according to claim 2 is the heating device according to claim 1, further comprising a target resistance calculator for calculating a target resistance value with respect to a target temperature.

According to a third aspect of the present invention, a holder for holding a resistance heating element and a holder temperature detector for detecting the temperature of the holder are provided, and a target resistance value is obtained from the target temperature and the temperature of the holder. The heating device according to claim 1, further comprising a target resistance calculator for calculating.

According to a fourth aspect of the present invention, a holder for holding a resistance heating element, a holder temperature detector for detecting the temperature of the holder, and an ambient temperature detector for detecting the ambient temperature are provided and are targeted. The heating device according to claim 1, further comprising a target resistance calculator that calculates a target resistance value from the temperature, the holder temperature, and the ambient temperature.

According to a fifth aspect of the present invention, a resistance calculator for heating a workpiece and a power source for supplying electricity to the resistance heater are provided, and the resistance calculator calculates the resistance value of the resistance heater from the energized state. And a resistance change calculator that calculates a resistance change value from the initial resistance of the resistance heating element, and a control for approaching a target resistance change value from a difference between the calculated resistance change value and a target resistance change value. It is a heating device provided with a controller for the power source.

The present invention according to claim 6 is the heating apparatus according to claim 5, further comprising a target resistance change calculator for calculating a target resistance change value with respect to a target temperature.

According to a seventh aspect of the present invention, a holder for holding a resistance heating element and a holder temperature detector for detecting the temperature of the holder are provided, and a target temperature and a target resistance change value based on the temperature of the holder. The heating device according to claim 5, further comprising a target resistance change calculator for calculating

According to an eighth aspect of the present invention, a holder for holding a resistance heating element, a holder temperature detector for detecting the temperature of the holder, and an ambient temperature detector for detecting the ambient temperature are provided, and a target is provided. The heating device according to claim 5, further comprising a target resistance change calculator that calculates a target resistance change value from the temperature, the holder temperature, and the ambient temperature.

The present invention according to claim 9 is the heating device according to any one of claims 5 to 8, wherein an increase value of resistance value is used for control as a resistance change value of the resistance heating element.

The present invention according to claim 10 is the heating device according to any one of claims 5 to 9, wherein the resistance value of the resistance heating element at an arbitrary ambient temperature is used as the initial resistance value.

The present invention according to claim 11 is a current detector for detecting a current supplied to a resistance heating element, a target current setting device for setting a target current value, and a current detector for starting the power supply to the resistance heating element. A target time setting device that determines a predetermined time is provided, and the controller controls the current applied to the resistance heating element to approach the target current for at least the predetermined time.
The heating device according to any one of 1 to 10.

According to a twelfth aspect of the present invention, a target time calculator for calculating a target predetermined time with respect to a target temperature and a target for calculating a target current value with respect to the target temperature. The heating device according to claim 11, further comprising a current calculator.

According to a thirteenth aspect of the present invention, a holder for holding the resistance heating element and a holder temperature detector for detecting the temperature of the holder are provided, and a target temperature and a predetermined predetermined time from the temperature of the holder are set. The heating device according to claim 11, further comprising a target time calculator for calculating and a target current calculator for calculating a target current value from the target temperature and the holder temperature.

According to a fourteenth aspect of the present invention, a holder for holding the resistance heating element, a holder temperature detector for detecting the temperature of the holder, and an ambient temperature detector for detecting the ambient temperature are provided, and a target is provided. A target time calculator that calculates the target predetermined time from the temperature, the holder temperature, and the ambient temperature, and a target current calculator that calculates the target current value from the target temperature, the holder temperature, and the ambient temperature. The heating device according to claim 11, which is provided.

According to a fifteenth aspect of the present invention, there is provided the heating device according to any one of the eleventh to fourteenth aspects, which stores at least conditions for a predetermined time and a current value for the shape or material of the resistance heating element.

According to the sixteenth aspect of the present invention, a current detector for detecting a current supplied to the resistance heating element, a target current setting unit for setting a target current value, and a reference resistance value of the resistance heating element are determined. A reference resistance setting device is provided, and while the resistance value of the resistance heating element reaches the reference resistance value, the controller controls so that the current supplied to the resistance heating element approaches the target current.
The heating device according to any one of 1 to 10.

The present invention according to claim 17 is the heating apparatus according to claim 16, further comprising a reference resistance calculator for calculating a reference resistance value with respect to a target temperature.

The present invention according to claim 18 is the heating device according to claim 16 or 17, wherein a reference resistance value for at least the shape or material of the resistance heating element is stored.

According to a nineteenth aspect of the present invention, there is provided a resistance value calculating step of detecting a current-carrying state of a resistance heating element for heating a workpiece, and calculating a resistance value of the resistance heating element from the current-carrying state. It is a control method of a heating device having a control step of performing control to bring the resistance value closer to the target resistance value from the difference between the resistance value and the target resistance value.

The present invention according to claim 20 is the method for controlling a heating device according to claim 1, further comprising a target resistance value calculating step for calculating a target resistance value with respect to a target temperature.

According to a twenty-first aspect of the present invention, a holder temperature detecting step for detecting the temperature of a holder holding a resistance heating element, a target resistance value for calculating a target resistance value from the target temperature and the holder temperature. The heating device control method according to claim 19, further comprising a calculation step.

According to a twenty-second aspect of the present invention, a holder temperature detecting step for detecting the temperature of the holder holding the resistance heating element and an ambient temperature detecting step for detecting the ambient temperature are provided, and the target temperature and the holder temperature are set. 20. The method for controlling a heating device according to claim 19, further comprising a target resistance value calculating step for calculating a target resistance value from the temperature and the ambient temperature.

According to a twenty-third aspect of the present invention, an energized state detecting step of detecting an energized state of a resistance heating element for heating a workpiece, and a resistance value of the resistance heating element is calculated from the energized state, and the resistance is calculated. A resistance change value calculating step of calculating a resistance change value from the initial resistance of the heating element, and a control step of performing control to approach a target resistance change value from a difference between the calculated resistance change value and a target resistance change value. Is a method of controlling a heating device having a.

The present invention according to claim 24 is the method of controlling a heating device according to claim 23, further comprising a target resistance value calculation step for calculating a target resistance change value with respect to a target temperature.

According to a twenty-fifth aspect of the present invention, a holder temperature detecting step of detecting a temperature of a holder holding a resistance heating element, and a target resistance for calculating a target resistance change value from the target temperature and the holder temperature. The heating device control method according to claim 23, further comprising a value calculation step.

According to a twenty-sixth aspect of the present invention, a holder temperature detecting step for detecting the temperature of the holder holding the resistance heating element and an ambient temperature detecting step for detecting the ambient temperature are provided, and the target temperature and the holder temperature are set. 24. The heating device control method according to claim 23, further comprising a target resistance change value calculation step for calculating a target resistance change value from the temperature and the ambient temperature.

The present invention according to claim 27 is the method for controlling a heating device according to any one of claims 23 to 26, wherein an increase value of the resistance value is used for control as the resistance change value of the resistance heating element.

The present invention according to claim 28 is the method for controlling a heating device according to any one of claims 23 to 27, wherein the resistance value of the resistance heating element at an arbitrary ambient temperature is used as the initial resistance value.

According to a twenty-ninth aspect of the present invention, a current detecting step for detecting a current supplied to the resistance heating element and a predetermined time setting step for determining a predetermined time from the start of energization of the resistance heating element are provided. The heating device control method according to any one of claims 19 to 28, wherein during the predetermined time, the controller controls the resistance heating element so that the current applied to the resistance heating element approaches a target current.

According to a thirtieth aspect of the present invention, a target predetermined time calculator step for calculating a target predetermined time for a target temperature, and a target target current value for the target temperature are calculated. 30. The method for controlling a heating device according to claim 29, further comprising a step of calculating a target current value to be performed.

According to a thirty-first aspect of the present invention, a holder temperature detecting step of detecting a temperature of a holder holding a resistance heating element, and a target predetermined time for calculating a target predetermined time from the target temperature and the holder temperature. 30. The heating device control method according to claim 29, further comprising: a calculation step and a target current value calculation step of calculating a target current value from the target temperature and the holder temperature.

According to a thirty-second aspect of the present invention, a holder temperature detecting step for detecting the temperature of the holder holding the resistance heating element and an ambient temperature detecting step for detecting the ambient temperature are provided to set the target temperature and the holder temperature. A target predetermined time calculation step for calculating a target predetermined time from the temperature and the ambient temperature, and a target current value calculation step for calculating a target current value from the target temperature, the holder temperature, and the ambient temperature are provided. A heating method control method according to claim 29.

A thirty-third aspect of the present invention is the method for controlling a heating device according to any one of the thirty-ninth to thirty-second aspects, in which at least conditions and current values for the shape or material of the resistance heating element are used.

According to a thirty-fourth aspect of the present invention, a current detection step of detecting a current supplied to the resistance heating element, a target current value setting step of setting a target current value, and a reference resistance value of the resistance heating element are set. 29. A reference resistance value setting step for determining is provided, and while the resistance value of the resistance heating element reaches the reference resistance value, the controller controls so that the current supplied to the resistance heating element approaches the target current. It is a method for controlling a heating device according to any one of the claims.

A thirty-fifth aspect of the present invention is the method for controlling a heating device according to the thirty-fourth aspect, further comprising a target reference resistance value calculating step for calculating a reference resistance value for a target temperature.

A thirty-sixth aspect of the present invention is the method for controlling a heating device according to the thirty-fourth aspect or the thirty-fifth aspect, wherein a reference resistance value for at least the shape or material of the resistance heating element is used.

A thirty-seventh aspect of the present invention is a production facility using the heating device according to any of the first to eighteenth aspects.

According to a thirty-eighth aspect of the present invention, the production data indicating the type of the work to be processed in the production facility, and at least the target resistance value, the target resistance change value, the predetermined current value, corresponding to the production data, 38. The production facility according to claim 37, further comprising a target database for determining one of the reference resistance values.

The present invention according to claim 39 is a workpiece processed by the heating device according to any one of claims 1 to 18.

The present invention according to claim 40 is a work piece processed by the production facility according to claim 37 or 38.

The present invention according to claim 41 is provided with a resistance heating element for heating a workpiece and a power source for energizing the resistance heating element, and the amount of heat input to the resistance heating element per unit time from the energized state. The heating device is provided with a calculator for calculating the amount of heat input and a controller for controlling the power source so as to approach the target amount of heat from the difference between the calculated amount of heat input and the target amount of heat.

The present invention according to claim 42 is the heating apparatus according to claim 41, further comprising a target heat quantity calculator for calculating a target heat quantity with respect to a target temperature.

According to the 43rd aspect of the present invention, a holder for holding the resistance heating element and a holder temperature detector for detecting the temperature of the holder are provided, and the target amount of heat is calculated from the target temperature and the temperature of the holder. 42. The heating device according to claim 41, further comprising a target calorie calculator for performing.

The present invention according to claim 44 is provided with a holder for holding the resistance heating element, a holder temperature detector for detecting the temperature of the holder, and an ambient temperature detector for detecting the ambient temperature. 42. The heating device according to claim 41, further comprising a target heat quantity calculator for calculating a target heat quantity from the temperature, the holder temperature, and the ambient temperature.

[0049]

BEST MODE FOR CARRYING OUT THE INVENTION The present invention provides a resistance heating element for heating a workpiece, a power supply for energizing the resistance heating element, and a resistance calculator for calculating the resistance value of the resistance heating element from the energized state. , By providing a controller that controls the power source to bring the target resistance value closer to the target resistance value from the difference between the calculated resistance value and the target resistance value, and by controlling the resistance value of the resistance heating element to be constant, The temperature of the heating element or its distribution can be controlled to be constant. The target resistance heating element resistance value can be calculated in association with the target resistance heating element temperature. Further, the target resistance value of the resistance heating element can be calculated in association with the temperature of the holder holding the resistance heating element. Further, the target resistance value of the resistance heating element can be calculated in association with the temperature of the holder holding the resistance heating element and the ambient temperature.

Further, the present invention comprises a resistance heating element for heating a workpiece and a power source for energizing the resistance heating element, and a resistance calculator for calculating a resistance value of the resistance heating element from the energized state, A resistance change calculator that calculates a resistance change value from the initial resistance of the resistance heating element, and control the power supply to bring the resistance change value closer to the target resistance change value from the difference between the calculated resistance change value and the target resistance change value. By providing a controller for the resistance heating element to control the increase of the resistance value of the resistance heating element to be constant,
The temperature of the resistance heating element or its distribution can be controlled to be constant. The target resistance change value of the resistance heating element can be calculated in association with the target temperature of the resistance heating element. Further, the target resistance change value of the resistance heating element can be calculated in association with the temperature of the holder holding the resistance heating element. Further, the target resistance change value of the resistance heating element can be calculated in association with the temperature of the holder holding the resistance heating element and the ambient temperature.
Further, the same effect as described above can be obtained by using the increased value of the resistance value of the resistance heating element as the target resistance change value of the resistance heating element. As the initial resistance value used when calculating the target resistance change value of the resistance heating element, the resistance value of the resistance heating element at an arbitrary ambient temperature can be used.

Further, according to the present invention, a current detector for detecting a current supplied to the resistance heating element, a target current setting unit for setting a target current value, and a predetermined time from the start of energization of the resistance heating element are set. A target time setting device is provided, and the controller controls the current applied to the resistance heating element to approach the target current for at least the predetermined time so that the resistance value of the resistance heating element is the target resistance. The time to reach the value can be shortened. The target current or the target predetermined time can be calculated in association with the target temperature of the resistance heating element. Further, the target current or the target predetermined time can be calculated in association with the temperature of the holder that holds the resistance heating element. Further, the target current or the target predetermined time can be calculated in association with the holder that holds the resistance heating element and the ambient temperature. Further, the target current or the target predetermined time may be stored in advance in a storage device corresponding to the shape or material of the resistance heating element.

Further, according to the present invention, a current detector for detecting a current supplied to the resistance heating element, a target current setting unit for setting a target current value, and a reference resistance setting for determining a reference resistance value of the resistance heating element. The resistance value of the resistance heating element is set to a target value by controlling the controller so that the current supplied to the resistance heating element approaches the target current while the resistance value of the resistance heating element reaches the reference resistance value. The time required to reach the resistance value can be shortened. The reference resistance value can be calculated in association with the target temperature of the resistance heating element. The reference resistance value may be stored in advance in a storage device in correspondence with the shape or material of the resistance heating element.

Further, according to the present invention, a resistance heating element for heating a workpiece and a power source for energizing the resistance heating element are provided, and the amount of heat input to the resistance heating element per unit time from the energized state is calculated. A calorie calculator and a controller that controls the power source to bring the calculated calorific value into a target calorific value from the difference between the calorific value and the target calorific value are provided, and the calorific value to the resistance heating element is controlled to be constant. The temperature of the resistance heating element or its distribution can be controlled to be constant. The heat quantity of the target resistance heating element can be calculated in association with the target temperature of the resistance heating element. The target amount of heat of the resistance heating element can be calculated in association with the temperature of the holder that holds the resistance heating element. Also,
The target heat quantity of the resistance heating element can be calculated in association with the temperature of the holder holding the resistance heating element and the ambient temperature. (Embodiment 1) A first embodiment of the present invention will be described with reference to FIG. FIG. 1 is a block diagram showing a heating device according to a first embodiment of the present invention.

In FIG. 1, reference numeral 1 is a rectifier that receives a three-phase input and converts it into direct current, 2 is a control element that converts the direct current of the rectifier 1 into alternating current, and 3 is the alternating current converted by the control element 2. Transformers 4 for converting into voltage are rectifiers for converting the output of the transformer 3 into direct current. The output of the rectifier 4 is supplied to the resistance heating element 50 to heat the resistance heating element. Reference numeral 7 is a resistance calculator that inputs the detection signals of the current detector 5 and the voltage detector 6 to calculate the resistance value, and 9 is the setting signal of the target resistance setting device 8 that sets the target resistance value of the resistance heating element and the above-mentioned Input the calculation signal of the resistance calculator 7,
An error amplifier that calculates and amplifies the error. 10
Receives the output of the error amplifier 9 and receives the control element 2
Is a controller that controls the output for heating the resistance heating element 50 by sending a control signal to the resistance heating element 50. Although not shown, the resistance heating element 50 is usually attached to a holder for use. The details will be described later, but a schematic diagram thereof is shown in FIG.

The operation of this embodiment will be described.
The resistance calculator 7 receives the detected current of the current detector 5 and the detected voltage of the voltage detector 6, calculates the resistance value at each time point, and outputs it to the error amplifier 9. The error amplifier 9 is
The calculated resistance value from the resistance calculator 7 and the target resistance setter 8
The controller 1 is compared with the set resistance value of
Output to 0. The controller 10 receives the signal from the error amplifier 9 and sends a control signal for heating the resistance heating element to the control element 2. This is a so-called normal feedback control operation.

Next, the resistance heating element and the holder for mounting the resistance heating element will be described with reference to FIG. FIG. 2 is a schematic view of a resistance heating element and a holder for mounting the resistance heating element.

In FIG. 2, 51 and 52 are holders. Although not shown, the holders 51 and 52 are connected to the rectifier 4 of FIG. 1 to receive power. Resistance heating element 50
Are attached to holders 51 and 52, and are heated by receiving power from them. In order to prevent the resistance heating element 50 from overheating, cooling water may be caused to flow into the holders 51 and 52 for cooling. In such a method of mounting the resistance heating element, the temperature of the resistance heating element in the contact portion with the holder is almost the same as the temperature of the holder portion. Normally, the AA surface is used as the pressing surface that comes into contact with the workpieces to be joined. The temperature of the pressing surface AA increases with the passage of the energization time. If the energizing current is constant, the temperature of the pressing surface AA is determined by the balance between the resistance heat generation of the resistance heating element 50 and the heat loss to the surroundings. When the temperature distribution of the resistance heating element is balanced, the temperature of the pressing surface AA or its distribution has a certain correlation with the resistance value of the resistance heating element. The schematic diagram is shown in FIG. As the temperature of the resistance heating element rises, its resistance value rises. In other words, by making the resistance value of resistance heating constant, the temperature of the resistance heating element or its distribution can be made constant.

According to this embodiment, by controlling the resistance value of the resistance heating element to a preset value, the temperature of the resistance heating element or its distribution can be controlled to be constant.

In the above-described embodiment, the three-phase alternating current is converted into direct current by the rectifying unit 1 and then converted into alternating current by the control element 2 and input to the transformer 3. An element for controlling can be used. At this time, the rectifier 1 is unnecessary. Further, although the output of the transformer 3 is supplied to the resistance heating element 50 after being converted into direct current by the rectifier 4, the output may be directly supplied to the resistance heating element 50.

In the above embodiment, the resistance heating element 50 may be called an electrode chip of a thermocompression bonding device or a solder reflow device, or a heater tool. The voltage detection line connected to detect the voltage of the resistance heating element 50 is attached to the point where the current flows into the resistance heating element. It is desirable to attach the voltage detection line near the holder as close to the resistance heating element as possible. Heating element 50
You may attach it directly to. (Second Embodiment) A second embodiment of the present invention will be described with reference to FIG. FIG. 4 is a block diagram showing a heating device according to the second embodiment of the present invention.

In the present embodiment, a target resistance calculator 12 that receives the setting signal of the target temperature setter 11 is used instead of the target resistance setter 8 in the embodiment shown in FIG.

The description of the same structure and operation as those of the embodiment shown in FIG. 1 will be omitted. Target resistance calculator 12
Inputs the set temperature of the target temperature setter 11, calculates the resistance value of the resistance heating element corresponding to the set temperature, and outputs it to the error amplifier 9.

In this heating device, when the target temperature is set, the target resistance value of the resistance heating element corresponding to the target temperature can be automatically calculated, and the above-mentioned effect can be obtained. . (Embodiment 3) A third embodiment of the present invention will be described with reference to FIG. FIG. 5 is a block diagram showing a heating device according to the third embodiment of the present invention.

In the present embodiment, instead of the target resistance setter 8 in the embodiment shown in FIG. 1, the target resistance inputting the set signal of the target temperature setter 11 and the detection signal of the holder temperature detector 13 is used. The calculator 14 is used. Note that FIG.
The description of the same configuration and operation as those of the embodiment shown in FIG. The target resistance calculator 14 inputs the set temperature of the target temperature setter 11 before the start of energization to calculate the target resistance value of the resistance heating element corresponding to the set temperature, but during the energization of the junction, the resistance heating element 14 The temperature of the holder part to which is attached is detected by the holder temperature detector 13 at any time, and the target resistance calculated value is corrected and output to the error amplifier 9.

The principle of the heating device in this embodiment will be described. When energization starts, as shown in FIG.
Due to the heat generated by the resistance heating element, the temperature of the holder portion rises from the initial temperature. When the temperature of the holder portion rises, the cooling effect on the resistance heating element decreases, so the temperature distribution of the resistance heating element changes. If the temperature distribution of the resistance heating element changes, even if the resistance value of the resistance heating element is controlled to be constant, the temperature of the pressing surface that is in direct contact with the workpieces will change. Therefore, it is necessary to correct the change in the resistance value of the resistance heating element caused by the change in the holder temperature according to the change in the holder temperature. This is the principle of this embodiment.

In this heating device, the temperature of the holder portion to which the resistance heating element is attached can be detected at any time during the energization of the joining, and the calculated target resistance value can be automatically corrected, and the above-mentioned effects can be obtained. (Fourth Embodiment) A fourth embodiment of the present invention will be described with reference to FIG. FIG. 7 is a block diagram showing a heating device according to the fourth embodiment of the present invention.

In the present embodiment, instead of the target resistance setter 8 in the embodiment shown in FIG. 1, the set signal of the target temperature setter 11, the detection signal of the holder temperature detector 13 and the ambient temperature detector 15 are set. A target resistance calculator 16 which receives the detection signal and is used. Note that the description of the same configuration and operation as those of the embodiment shown in FIG. 1 will be omitted. The target resistance calculator 16 inputs the set temperature of the target temperature setter 11 before the start of energization and calculates the target resistance value of the resistance heating element corresponding to the set temperature. The temperature of the holder part to which is attached is detected by the holder temperature detector 13 at any time, and the ambient temperature during the energization of the junction is detected by the ambient temperature detector 15 at any time to correct the target resistance calculation value, and the error amplifier 9 Output to.

The principle of the heating device in this embodiment will be described. It is conceivable that the ambient temperature of the resistance heating element may change during the energization of the bonding as well as the temperature of the holder portion to which the resistance heating element is attached. When the ambient temperature changes, the heat loss from the resistance heating element changes, so that the temperature distribution of the resistance heating element changes. Even if the resistance value of the resistance heating element is controlled to be constant, the temperature of the pressing surface that is in direct contact with the workpieces will change. Therefore, not only the resistance heating element temperature caused by the holder temperature change but also the resistance heating element temperature change caused by the ambient temperature of the resistance heating element changes It is necessary to correct the resistance value. This is the principle of this embodiment.

In this heating device, the temperature of the holder portion to which the resistance heating element is attached and the ambient temperature can be detected at any time during the joining energization, and the calculated target resistance value can be automatically corrected. You can (Fifth Embodiment) A fifth embodiment of the present invention will be described with reference to FIG. The figure is a block diagram showing a heating device according to a fifth embodiment of the present invention.

In the present embodiment, description of the same configuration and operation as those of the embodiment shown in FIG. 1 will be omitted. Reference numeral 18 is a resistance change calculator that inputs the calculated resistance value of the resistance calculator 7 and the initial resistance set by the initial resistance setting device 17, and calculates a resistance change value with respect to the initial resistance, and 19 is a target resistance change. It is a target resistance change setting device that sets a value.

The principle of this embodiment will be described.
To simplify the explanation, FIG. 9 shows the relationship between the resistance value of the resistance heating element and its temperature and the relationship between the resistance change value from the room temperature resistance and the temperature change value from the room temperature. Regarding the latter, it can be considered that the origin of the glass is placed at room temperature / room temperature resistance value. In the figure, the resistance change value from the room temperature resistance and the temperature change value from the room temperature are used as the origin, but any temperature may be used. The relationship between the resistance value of the resistance heating element and its temperature is equivalent to the relationship between the resistance change value from room temperature and the temperature change from room temperature, and only the origin of the graph is different in the figures. Therefore, the above-described temperature-controlled heating device using the resistance value of the resistance heating element can be realized by using the relationship between the temperature change of the resistance heating element from room temperature and the resistance change value. In the embodiment of the present invention, the resistance change calculator 18 inputs the calculated resistance of the resistance calculator 7 and the set resistance value of the initial resistance setter 17 to calculate the resistance change value of the resistance heating element, Output to the error amplifier 9. The error amplifier 9 inputs the resistance change value and the target resistance change value set by the target resistance change setting unit 19, calculates the error, and outputs the error to the controller 10. The controller 10 receives the signal from the error amplifier 9 and sends a control signal for heating the resistance heating element to the control element 2.

According to this embodiment, the temperature of the resistance heating element or its distribution can be controlled to be constant by controlling the preset resistance change value with respect to the initial resistance value of the resistance heating element. .

In the above embodiment, FIG. 9 has been described by using the temperature change or the resistance change value with respect to the room temperature and the room temperature resistance, but it may not be the room temperature. For example, as described above, the temperature of the resistance heating element at an arbitrary time and the resistance value at that time may be used as the initial value. (Sixth Embodiment) A sixth embodiment of the present invention will be described with reference to FIG. FIG. 10 is a block diagram showing a heating device according to a sixth embodiment of the present invention.

In this embodiment, instead of the target resistance change setting device 19 in the embodiment shown in FIG. 8, a target resistance change calculating device 20 which receives the setting signal of the target temperature setting device 11 is used. Note that the description of the same configuration and operation as those of the embodiment shown in FIG. 8 will be omitted. The target resistance change calculator 20 inputs the set temperature of the target temperature setter 11,
The resistance change value of the resistance heating element corresponding to the set temperature is calculated and output to the error amplifier 9.

In this heating device, when the target temperature is set, the target resistance change value of the resistance heating element corresponding to the target temperature can be automatically calculated, and the above-mentioned effect can be obtained. it can. (Embodiment 7) A seventh embodiment of the present invention will be described with reference to FIG. FIG. 11 is a block diagram showing a heating device according to the seventh embodiment of the present invention.

In the present embodiment, instead of the target resistance change setter 19 in the embodiment shown in FIG. 8, a target signal inputting a set signal of the target temperature setter 11 and a detected signal of the holder temperature detector 13 is used. The resistance change calculator 21 is used.
Note that the description of the same configuration and operation as those of the embodiment shown in FIG. 8 will be omitted. The target resistance change calculator 21 inputs the set temperature of the target temperature setter 11 before the start of energization and calculates the target resistance change value of the resistance heating element corresponding to the set temperature. The temperature of the holder portion to which the heating element is attached is detected by the holder temperature detector 13 at any time to correct the target resistance change calculated value, and the error amplifier 9
Output to.

In this heating device, the temperature of the holder portion to which the resistance heating element is attached can be detected at any time during the energization of the joining, and the calculated target resistance change value can be automatically corrected, and the above-mentioned effects can be obtained. . (Embodiment 8) An eighth embodiment of the present invention will be described with reference to FIG. FIG. 12 is a block diagram showing a heating device according to the eighth embodiment of the present invention.

In the present embodiment, instead of the target resistance change setting device 19 in the embodiment shown in FIG. 8, the setting signal of the target temperature setting device 11, the detection signal of the holder temperature detector 13, and the ambient temperature detector 15 are used. The target resistance change calculator 22 that receives the detection signal of and is used. Note that the description of the same configuration and operation as those of the embodiment shown in FIG. 8 will be omitted. The target resistance change calculator 22 inputs the set temperature of the target temperature setter 11 before the start of energization and calculates the target resistance change value of the resistance heating element corresponding to the set temperature. The temperature of the holder part to which the heating element is attached is detected by the holder temperature detector 13 at any time, and the ambient temperature during joining energization is detected by the ambient temperature detector 15 at any time,
The calculated target resistance change value is corrected and output to the error amplifier 9.

In this heating device, the temperature of the holder portion to which the resistance heating element is attached and the ambient temperature can be detected at any time during the energization of the joining, and the calculated target resistance change value can be automatically corrected, and the above-mentioned effect can be obtained. be able to.

In any one of the fifth to eighth embodiments of the present invention, control is performed using the resistance change value of the resistance heating element with respect to the initial resistance set by the initial resistance setting device 17. However, instead of the resistance change value, the resistance increase value with respect to the initial resistance value may be used. The initial resistance value is preferably a resistance increase value with respect to room temperature, but may be the resistance value of the resistance heating element at any ambient temperature. (Ninth Embodiment) A ninth embodiment of the invention will be described with reference to FIG. FIG. 13 is a block diagram showing a heating device according to the ninth embodiment of the present invention.

In addition to the configuration of each of the first to eighth embodiments, the output signal of the error amplifier 9 is input to the signal selector 27. The signal selector 27 includes the error amplifier 9
Output signal of the error detector 24, which receives the output signals of the current detector 5 and the target current setting device 23, and the output signal of the sequence setting device 26 which receives the output signal of the target time setting device 25. And enter the sequence 26
According to the sequence set in step 1, either the output signal of the error amplifier 9 or the output signal of the error amplifier 24 is selected and output to the controller 10.

The operation of this embodiment will be described.
Note that the description of the same configuration and operation as those of the embodiment shown in FIG. 1 will be omitted. The error amplifier 24 inputs the detected current of the current detector 5 and the set current of the target current setter 23, calculates the error and amplifies the error. When the signal selector 27 selects the output signal of the error amplifier 9 and outputs it to the controller 10, the controller 10 adjusts the calculated resistance value of the resistance calculator 7 to the set resistance value of the target resistance setter 8. Although the output is controlled, when the controller 27 selects the output signal of the error amplifier 24 and outputs it to the controller 10, the controller 10 sets the detected current of the current detector 5 to the set value of the target current setter 23. Control the output so that Both are normal feedback control operations. Whether the signal selector 27 selects the signal of the error amplifier 9 or the signal of the error amplifier 24 is
It depends on the setting signal of the sequence setter 26. The sequence setter 26 outputs a signal to the signal selector 27 so that the signal selector 27 selects the output signal of the error amplifier 24 for the time set by the target time setter 25 from the start of energization. A simple timing diagram of this operation,
FIG. 14 shows a schematic diagram of the resistance value waveform of the resistance heating element. As indicated by the curve 1, the signal selector 27 selects the signal of the error amplifier 24 for a certain period t _ini from the start of energization, so that the current is controlled to I _ini . After that,
Since the signal selector 27 selects the signal of the error amplifier 9, it is controlled so that the resistance value of the resistance heating element becomes constant. As a result, the entire resistance value waveform becomes the result shown by the curve 4. The results of the curves 2 and 5 and the curves 3 and 6 are the results when the current value I _ini is increased and decreased, respectively.
At low current in curve 2, the resistance is as shown in curve 6,
The time from the start of energization until the resistance value stabilizes becomes long.
On the other hand, at the high current of the curve 4, the resistance value becomes as shown by the curve 5, which results in the resistance value rising too much at the end of the conduction time of t _ini . Therefore, the current I _ini and the time t
You need to combine _ini properly.

According to this embodiment, the time from the start of energization to the stabilization of the resistance value is controlled by controlling the current applied to the resistance heating element to be higher than usual for a predetermined time from the start of energization. It can be shortened. (Embodiment 10) FIG. 15 shows a tenth embodiment of the invention.
It will be described based on. FIG. 15 is a block diagram showing a heating device according to the tenth embodiment of the present invention.

In this embodiment, a target time calculator 28 is used in place of the target time setter 25 in the embodiment shown in FIG. 13, and a target current calculator 29 is used in place of the target current setter 23. Both the target time calculator 28 and the target current calculator 29 use the setting signal of the target temperature setting device 11 as an input signal. Note that the description of the same configuration and operation as those of the embodiment shown in FIG. 13 will be omitted. The target time calculator 28 and the target current calculator 29 both input the set temperature of the target temperature setter 11, calculate the target time and the target current corresponding to the set temperature, and calculate the error with the sequence setter 26, respectively. Output to the amplifier 24.

In this heating device, when the target temperature is set, the target time and the target current corresponding to the target temperature can be automatically calculated, and the above-mentioned effects can be obtained. FIG. 1 shows an eleventh embodiment of the present invention.
6 will be described. FIG. 16 is a block diagram showing a heating device according to the eleventh embodiment of the present invention.

In this embodiment, a target time calculator 30 is used in place of the target time setter 25 in the embodiment shown in FIG. 13, and a target current calculator 31 is used in place of the target current setter 23. The target time calculator 30 and the target current calculator 31 both use the setting signal of the target temperature setter 11 and the detection signal of the holder temperature detector 13 as input signals. Note that the description of the same configuration and operation as those of the embodiment shown in FIG. 13 will be omitted. Before the start of energization, the target time calculator 30 and the target current calculator 31 have the target temperature setter 11
The target temperature and the target current corresponding to the set temperature are input and output to the sequence setter 26 and the error amplifier 24, respectively, but the holder portion to which the resistance heating element is attached during energization Is detected by the holder temperature detector 13 at any time to correct the target time and the target current.

With this heating device, the temperature of the holder portion to which the resistance heating element is attached can be detected at any time during the joining energization, and the calculated target time and target current value can be automatically corrected, and the above-mentioned effects can be obtained. You can (Embodiment 12) A twelfth embodiment of the present invention is shown in FIG.
It will be described based on 7. FIG. 17 is a block diagram showing a heating device according to the twelfth embodiment of the present invention.

In the present embodiment, a target time calculator 32 is used in place of the target time setter 25 in the embodiment shown in FIG. 13, and a target current calculator 33 is used in place of the target current setter 23. The target time calculator 32 and the target current calculator 33 are both the setting signal of the target temperature setter 11, the detection signal of the holder temperature detector 13, and the ambient temperature detector 1.
The detection signal 5 and the input signal. Note that the description of the same configuration and operation as those of the embodiment shown in FIG. 13 will be omitted. Before the start of energization, the target time calculator 32 and the target current calculator 33 input the set temperature of the target temperature setter 11 to calculate the target time and the target current corresponding to the set temperature. During energization, the temperature of the holder part to which the resistance heating element is attached is detected by the holder temperature detector 13 at any time, and the ambient temperature is detected by the ambient temperature detector 15 at any time to correct the target time and the target current. And outputs them to the sequence setter 26 and the error amplifier 24, respectively.

In this heating device, the temperature of the holder portion to which the resistance heating element is attached and the ambient temperature can be detected at any time during the energization of the joining, and the calculated target time and target current value can be automatically corrected. The effect of can be obtained.

In any of the ninth to twelfth embodiments of the present invention, the predetermined time and the predetermined current are stored in advance in a storage means such as a storage device as a value corresponding to the shape or material of the resistance heating element. It goes without saying that you can call a value and use it. A memory, a register, or the like may be used as the storage means such as the storage device. (Embodiment 13) FIG. 1 shows a thirteenth embodiment of the present invention.
8 will be described. FIG. 18 is a block diagram showing a heating device according to the thirteenth embodiment of the present invention.

In addition to the configuration of each of the first to eighth embodiments of the present invention, the output signal of the error amplifier 9 is input to the signal selector 27. The signal selector 27 outputs the output signal of the error amplifier 9, the output signal of the error amplifier 24 that receives the output signals of the current detector 5 and the target current setting device 23, and the resistance value calculated by the resistance calculator 7. A comparator 35 for comparing the magnitude relationship with the set resistance value of the reference resistance setter 34.
The output signal of the error amplifier 24 and the output signal of the error amplifier 9 are selected according to the output signal of the comparator 35, and the selected output signal is output to the controller 10. The operation of this embodiment will be described by omitting the description of the same configuration and operation as those of the embodiment shown in FIG. The error amplifier 24 inputs the detected current of the current detector 5 and the set current of the target current setter 23 to input the signal selector 2
7 selects the output signal of the error amplifier 24 to control the controller 1
When output to 0, the controller 10 controls the control element 2 so that the detected current of the current detector 5 becomes the current set by the target current setting device 23 according to the output signal of the error amplifier 24. . This operation is a so-called normal feedback control operation. The comparator 35 is the resistance calculator 7
The resistance value reaching signal is output to the signal selector 27 only when the calculated resistance value reaches the set resistance value. The signal selector 27 selects the output signal of the error amplifier 24 until it receives the resistance value reaching signal from the comparator 35, but when it receives the resistance value reaching signal from the comparator 35, it outputs the error amplifier 9 output. The signal is selected and output to the controller 10.

FIG. 19 shows a simple timing chart of this operation and a schematic diagram of the resistance value waveform of the resistance heating element. As shown by the curves 1 and 4, when the initial current I _ini is applied,
When the resistance value of the resistance heating element rises with the increase of the energization time and reaches the reference resistance value, energization of the initial current I _ini ends. After that, the resistance value of the resistance heating element becomes constant and the temperature of the resistance heating element or its distribution is controlled to be constant by performing the normal resistance value constant control. Curve 2
-Curve 5, curve 3 and curve 6 show the same tendency, but the time until the resistance value of the resistance heating element stabilizes varies depending on the magnitude of the initial current. Therefore, by properly setting the initial current I _ini , the time until the temperature of the resistance heating element becomes stable can be shortened.

According to this embodiment, the current supplied to the resistance heating element is controlled to be higher than usual until the resistance value of the resistance heating element reaches a preset value. It is possible to shorten the time until the resistance value stabilizes. (Fourteenth Embodiment) FIG. 2 shows a fourteenth embodiment of the present invention.
A description will be given based on 0. FIG. 20 is a block diagram showing a heating device according to the fourteenth embodiment of the present invention.

In this embodiment, instead of the reference resistance setting device 34 in the embodiment shown in FIG. 18, a reference resistance calculating device 36 which receives the setting signal of the target temperature setting device 11 is used. Note that the description of the same configuration and operation as those of the embodiment shown in FIG. 18 will be omitted. Reference resistance calculator 36
Inputs the set temperature of the target temperature setter 11, calculates the target resistance value corresponding to the set temperature, and outputs it to the comparator 35.

In this heating device, when the target temperature is set, the reference resistance value corresponding to the target temperature can be automatically calculated, and the above-mentioned effect can be obtained.

In the thirteenth or fourteenth embodiment of the present invention, the reference resistance value is a value stored in advance in a storage means such as a storage device as a value corresponding to the shape or material of the resistance heating element. Needless to say, you can use it. A memory, a register, or the like may be used as the storage means such as the storage device. (Fifteenth Embodiment) FIG. 2 shows a fifteenth embodiment of the present invention.
It will be described based on 1. FIG. 21 is a block diagram showing a method for controlling a heating device according to the fifteenth embodiment of the present invention.

In FIG. 21, the energization current which is the energization state to the resistance heating element for heating the workpiece and the voltage of the resistance heating element are detected, and the resistance value calculating step is performed based on the detection result of the energization state. Calculate the resistance value of the resistance heating element. Next, the difference between the target resistance value set in the target resistance value setting step for setting the target resistance value and the calculated resistance value is calculated, and the resistance value of the resistance heating element approaches the target resistance value based on the difference. Thus, normal feedback control is performed from the control step. The above control is repeated during energization.

According to this embodiment, the temperature of the resistance heating element or its distribution can be controlled to be constant by controlling the resistance value of the resistance heating element to a preset target value. (Embodiment 16) FIG. 2 shows a sixteenth embodiment of the present invention.
It will be described based on 2. 22 is a block diagram showing a method for controlling a heating device according to the sixteenth embodiment of the present invention.

In this embodiment, as compared with FIG. 21, instead of the target resistance value setting step for setting the target resistance value,
The target resistance value is automatically calculated in the target resistance value calculation step by receiving the setting value of the target temperature setting step of setting the target temperature.

According to this embodiment, when the target temperature is set, the target resistance value of the resistance heating element corresponding to the target temperature can be automatically calculated, and the above effects can be obtained. it can. (Embodiment 17) FIG. 2 shows a seventeenth embodiment of the present invention.
It will be described based on 3. FIG. 23 is a block diagram showing the method of controlling the heating device according to the seventeenth embodiment of the present invention.

In this embodiment, as compared with FIG. 21, instead of the target resistance value setting step for setting the target resistance value,
Set value of target temperature setting step to set target temperature,
The target resistance value is automatically calculated in the target resistance value calculation step in response to the detected value of the holder temperature detection step of detecting the temperature of the holder.

According to this embodiment, when the target temperature is set and the holder temperature is still detected, the target resistance value of the resistance heating element corresponding to the target temperature can be automatically calculated. The effects described above can be obtained. (Embodiment 18) FIG. 2 shows the eighteenth embodiment of the present invention.
4 will be described. FIG. 24 is a block diagram showing a method for controlling a heating device according to the eighteenth embodiment of the present invention.

In this embodiment, as compared with FIG. 21, instead of the target resistance value setting step for setting the target resistance value,
Set value of target temperature setting step to set target temperature,
The target resistance value is automatically calculated by the target resistance value calculation step by receiving the detection value of the holder temperature detection step of detecting the temperature of the holder and the detection value of the ambient temperature detection step of detecting the ambient temperature.

According to this embodiment, when the target temperature is set and the holder temperature and the ambient temperature are still detected,
The target resistance value of the resistance heating element corresponding to the target temperature can be automatically calculated, and the above-described effect can be obtained. (Embodiment 19) FIG. 2 shows a nineteenth embodiment of the present invention.
It will be described based on 5. FIG. 25 is a block diagram showing a heating device control method according to a nineteenth embodiment of the present invention.

In FIG. 25, the energization current which is the energization state to the resistance heating element for heating the workpiece and the voltage of the resistance heating element are detected by the energization state detecting step for detecting the energization state. The resistance value of the resistance heating element is constantly calculated from the detected energized state, and the change value from the resistance value of the resistance heating element at the initial stage of energization is calculated in the resistance change value calculating step. Next, the difference between the target resistance change value set by the target resistance change value setting step for setting the target resistance change value and the calculated resistance change value is calculated, and the resistance of the resistance heating element is calculated based on the difference. Normal feedback control is performed from the control step so that the change value approaches the target resistance change value. The above control is repeated during energization.

According to this embodiment, by controlling the resistance change value of the resistance heating element to the preset target value, the temperature of the resistance heating element or its distribution can be controlled to be constant. (Embodiment 20) FIG. 2 shows a twentieth embodiment of the present invention.
6 will be described. FIG. 26 is a block diagram showing a method of controlling the heating device according to the twentieth embodiment of the present invention.

In the present embodiment, as compared with FIG. 25, instead of the target resistance change value setting step of setting the target resistance change value, the target resistance setting step of setting the target temperature is received and the target resistance change step is set. The change value is automatically calculated in the target resistance change value calculation step.

According to this embodiment, when the target temperature is set, the target resistance change value of the resistance heating element corresponding to the target temperature can be automatically calculated, and the above-mentioned effects can be obtained. You can (Embodiment 21) FIG. 2 shows a twenty-first embodiment of the present invention.
It will be described based on 7. FIG. 27 is a block diagram showing the method of controlling the heating device according to the twenty-first embodiment of the present invention.

In the present embodiment, as compared with FIG. 25, instead of the target resistance change value setting step of setting the target resistance change value, the set value of the target temperature setting step of setting the target temperature and the temperature of the holder are The target resistance change value is automatically calculated by the target resistance change value calculation step in response to the detected value of the holder temperature detection step to be detected.

According to this embodiment, when the target temperature is set and the holder temperature is detected, the target resistance change value of the resistance heating element corresponding to the target temperature can be automatically calculated. It is possible to obtain the above effects. (Embodiment 22) FIG. 2 shows a twenty-second embodiment of the present invention.
8 will be described. FIG. 28 is a block diagram showing the method of controlling the heating device according to the 22nd embodiment of the present invention.

In this embodiment, as compared with FIG. 25, instead of the target resistance change value setting step of setting the target resistance value, the set value of the target temperature setting step of setting the target temperature and the temperature of the holder are detected. The target resistance change value is automatically calculated in the target resistance change value calculation step by receiving the detected value of the holder temperature detection step and the detected value of the ambient temperature detection step of detecting the ambient temperature.

According to this embodiment, when the target temperature is set and the holder temperature and the ambient temperature are still detected,
The target resistance change value of the resistance heating element corresponding to the target temperature can be automatically calculated, and the aforementioned effects can be obtained.

In any one of the nineteenth to twenty-second embodiments of the present invention, the resistance change value with respect to the resistance value at the initial stage of energization of the resistance heating element is calculated by the resistance change value calculation step, and the control is performed. The resistance increase value with respect to the initial resistance value may be used instead of the resistance change value. The resistance value of the resistance heating element at room temperature may be used as the initial resistance value, but the resistance value of the resistance heating element at any ambient temperature may be used. (Embodiment 23) FIG. 2 shows a twenty-third embodiment of the present invention.
It will be described based on 9. FIG. 29 is a block diagram showing the method of controlling the heating device according to the twenty-third embodiment of the present invention.

In this embodiment, the steps from the resistance value calculation step to the control step in any of FIGS. 21 to 24, or the energization state detection step to the control step in any of FIGS. 25 to 28 are performed. Before, the current detection step of detecting the current to be energized to the resistance heating element, and a predetermined time setting step for determining a predetermined time from the start of energization to the resistance heating element, and at least set in the predetermined time setting step During the predetermined time, normal feedback control is performed from the control step so that the detected current value of the current detection step becomes the target current value set by the target current setting step that sets the target current value at a higher level than usual. .

According to this embodiment, the current from the start of energization to the stabilization of the resistance value is controlled by controlling the current applied to the resistance heating element to a higher current than usual during the predetermined time from the start of energization. Can be shortened. (Embodiment 24) FIG. 3 shows a twenty-fourth embodiment of the present invention.
A description will be given based on 0. FIG. 30 is a block diagram showing a method for controlling a heating device according to the twenty-fourth embodiment of the present invention.

In this embodiment, as compared with FIG. 29, instead of the predetermined time setting step for setting a predetermined time from the start of energization of the resistance heating element and the target current setting step,
Upon receiving the set value of the target temperature setting step for setting the target temperature, the target predetermined time is automatically calculated from the target predetermined time calculating step, and the target current value is automatically calculated from the target current calculating step.

According to this embodiment, when the target temperature is set, the target predetermined time and the target current from the start of energization of the resistance heating element corresponding to the target temperature are automatically calculated. Therefore, the above-mentioned effects can be obtained. (Embodiment 25) FIG. 3 shows a twenty-fifth embodiment of the present invention.
It will be described based on 1. FIG. 31 is a block diagram showing a method for controlling a heating device according to the twenty-fifth embodiment of the present invention.

In this embodiment, as compared with FIG. 29, instead of the predetermined time setting step for setting a predetermined time from the start of energization of the resistance heating element and the target current setting step,
Based on the set value of the target temperature setting step for setting the target temperature and the detected value of the holder temperature detection step for detecting the temperature of the holder, the target predetermined time is calculated from the target predetermined time calculation step, and the target current is set. The value is automatically calculated in the target current calculation step.

According to this embodiment, when the target temperature is set and the holder temperature is detected, the target predetermined time and the target current from the start of energization of the resistance heating element corresponding to the target temperature are set. Can be automatically calculated, and the above-mentioned effect can be obtained (Embodiment 26). The twenty-sixth embodiment of the present invention will be described with reference to FIG.
It will be described based on 2. FIG. 32 is a block diagram showing a method for controlling the heating device according to the twenty sixth embodiment of the present invention.

In the present embodiment, as compared with FIG. 29, instead of the predetermined time setting step for setting a predetermined time from the start of energization of the resistance heating element and the target current setting step,
Predetermined time to receive the set value of the target temperature setting step to set the target temperature, the holder temperature detection step to detect the holder temperature and the ambient temperature detection step to detect the ambient temperature Is automatically calculated from the target predetermined time calculation step, and the target current value is automatically calculated from the target current calculation step.

According to this embodiment, when the target temperature is set, the holder temperature is detected, and the ambient temperature is detected, the target temperature from the start of energization of the resistance heating element corresponding to the target temperature is detected. In any one of the twenty-third to twenty-sixth embodiments of the present invention in which the predetermined time and the target current can be automatically calculated, and the above-mentioned effects can be obtained, the predetermined time and the predetermined current are It goes without saying that a value stored in advance in a storage means such as a storage device can be called as a value corresponding to the shape or material of the resistance heating element and used. A memory, a register, or the like may be used as the storage means such as the storage device. (Embodiment 27) FIG. 3 shows a twenty-seventh embodiment of the present invention.
It will be described based on 3. FIG. 33 is a block diagram showing the method of controlling the heating device according to the twenty-seventh embodiment of the present invention.

In this embodiment, the steps from the resistance value calculation step to the control step in any of FIGS. 21 to 24, or the energization state detection step to the control step in any of FIGS. 25 to 28 are performed. Before, the current detection step of detecting the current to be applied to the resistance heating element, the target current value setting step of setting the target current, and the reference resistance value setting step of determining the reference resistance value of the resistance heating element. Although not shown, a resistance value calculating step for calculating the resistance value of the resistor at any time based on the detection value of the voltage detecting step for detecting the voltage of the resistor and the detection value of the current detecting step is provided. While the resistance value of the resistance heating element reaches the reference resistance value set in the reference resistance value setting step, the detected current value in the current detection step is the target current value. With the set constant step, so that the high level of the target current value than the normal electric current, perform normal feedback control by the control step.

According to this embodiment, the current flowing through the resistance heating element is controlled to be higher than usual until the resistance value of the resistance heating element reaches the preset reference resistance value. The time from the start of energization until the resistance value stabilizes can be shortened. (Embodiment 28) FIG. 3 shows a twenty-eighth embodiment of the present invention.
4 will be described. FIG. 34 is a block diagram showing the method of controlling the heating device according to the 28th embodiment of the present invention.

In this embodiment, as compared with FIG. 33, instead of the reference resistance value setting step of setting the reference resistance value of the resistance heating element, the set value of the target temperature setting step of setting the target temperature is received, The target reference resistance value of the target resistance heating element is automatically calculated in the target reference resistance value calculation step.

According to this embodiment, when the target temperature is set, the target reference resistance value of the resistance heating element corresponding to the target temperature can be automatically calculated, and the above-mentioned effects can be obtained. You can

In the twenty-seventh or twenty-eighth embodiment of the present invention, the reference resistance value is a value stored in advance in a storage means such as a storage device as a value corresponding to the shape or material of the resistance heating element. Needless to say, you can use it. A memory, a register, or the like may be used as the storage means such as the storage device. (Twenty-ninth Embodiment) A twenty-ninth embodiment of the present invention is a production facility using the heating device described in any one of the first and fourteenth embodiments of the present invention. In addition, the workpiece processed by the heating device is included. Needless to say, even if a production facility using the heating device is used, the same effect as the heating device can be obtained. (Thirtieth Embodiment) The thirtieth embodiment of the present invention corresponds to the production data indicating the type of the workpiece to be processed and the production data in the production equipment of the twenty-ninth embodiment of the present invention. Then, a target value database for determining at least one of the target resistance value, the target resistance change value, the predetermined current value, and the reference resistance value is provided. In addition, the workpiece processed by the production facility is included. With such a configuration, it is possible to use the data accumulated in the database according to the type of the workpiece, and it is possible to more easily perform data setting, data management, and the like. (Embodiment 31) FIG. 3 shows a thirty-first embodiment of the present invention.
It will be described based on 5. FIG. 35 is a block diagram showing a heating device according to a 31st embodiment of the present invention.

Description of the configuration and operation similar to those of the embodiment shown in FIG. 1 will be omitted. Reference numeral 37 is a supplied heat quantity calculator for calculating the quantity of heat supplied to the resistance heating element per unit time in response to the detection signals of the current detector 5 and the voltage detector 6, and 39 is a calculation signal of the supplied heat quantity calculator 37. And a setting signal of the target heat quantity setter 38 for setting the target heat quantity of the resistance heating element per unit time, and the controller 10 calculates and amplifies the difference between them.
It is an error amplifier that outputs to.

The principle of this embodiment will be described.
The amount of heat input to the resistance heating element 50 can be easily calculated based on the detection signals of the voltage detector 5 and the current detector 6. For example, when the constant detection current, the constant detection voltage, and the energization time are I, V, and t, respectively, the heat input to the resistance heating element 50 can be calculated by IVt during the energization period up to time t. The input heat quantity per unit time can be calculated by IV. Even if there are fluctuations in current and voltage,
The amount of heat input to the resistance heating element 50 or the amount of heat input per unit time can be calculated by time integration of the product. When the shape of the resistance heating element 50 is determined and the shape of the holder for mounting the resistance heating element 50 and the ambient temperature are determined, the temperature rise of the resistance heating element 50 is governed by the amount of heat input to the resistance heating element 50. To control the temperature of the resistance heating element 50 or its distribution to be constant, the amount of heat input to the resistance heating element per unit time may be controlled to be constant. This can be understood from the fact that if the temperature rise due to the amount of heat input to the resistance heating element becomes equal to the temperature drop due to heat loss to the surrounding environment, the temperature will stabilize.

The operation of this embodiment will be described.
The input heat amount calculator 37 inputs the detection signals of the current detector 5 and the voltage detector 6, and calculates the amount of heat input to the resistance heating element per unit time. The error amplifier 9 is set by the calculated value of the input heat quantity calculator 37 and the target heat quantity setter 38,
The target value of the amount of heat input to the resistance heating element per unit time is input, the difference between the two is calculated, this is amplified and sent to the controller 10 as an error signal. The controller 10 receives the signal from the error amplifier 9 and sends a control signal for heating the resistance heating element to the control element 2 to control the output to the resistance heating element.

According to this embodiment, the temperature of the resistance heating element or its distribution can be controlled to be constant by controlling the amount of heat input to the resistance heating element per unit time to a preset target heat amount. . (Embodiment 32) FIG. 3 shows a 32nd embodiment of the present invention.
6 will be described. FIG. 36 is a block diagram showing a heating device according to the 32nd embodiment of the present invention.

In the present embodiment, a target heat quantity calculator 39 which receives the setting signal of the target temperature setter 11 is used instead of the target heat quantity setter 38 in the embodiment shown in FIG. Note that the description of the same configuration and operation as those of the embodiment shown in FIG. 35 will be omitted. Target calorie calculator 39
Inputs the set temperature of the target temperature setter 11, automatically calculates the target heat amount of the resistance heating element per unit time corresponding to the set temperature, and outputs it to the error amplifier 9.

In this heating device, when the target temperature is set, the target heat quantity of the resistance heating element per unit time corresponding to the target temperature can be automatically calculated, and the above-mentioned effect can be obtained. be able to. (Embodiment 33) FIG. 3 shows a thirty-third embodiment of the present invention.
It will be described based on 7. FIG. 37 is a block diagram showing a heating device in the thirty-third embodiment of the present invention.

In this embodiment, instead of the target heat quantity setter 38 in the embodiment shown in FIG. 35, the target heat quantity using the set signal of the target temperature setter 11 and the detection signal of the holder temperature detector 13 as input. The calculator 40 is used. In addition,
Description of the same configuration and operation as those of the embodiment shown in FIG. 35 will be omitted. The target calorie calculator 40 is
The set temperature of the target temperature setter 11 is input to calculate the target amount of heat of the resistance heating element per unit time corresponding to the set temperature. The target temperature calculation value detected by the holder temperature detector 13 is automatically corrected and output to the error amplifier 9.

In this heating device, the temperature of the holder portion to which the resistance heating element is attached can be detected at any time during the energization of the joining, and the calculated target heat quantity can be automatically corrected, and the above-mentioned effects can be obtained. (Embodiment 34) FIG. 3 shows a thirty-fourth embodiment of the present invention.
8 will be described. FIG. 38 is a block diagram showing a heating device according to the 34th embodiment of the present invention.

In this embodiment, instead of the target heat quantity setting device 38 in the embodiment shown in FIG. 35, the setting signal of the target temperature setting device 11, the detection signal of the holder temperature detector 13, and the ambient temperature detector 15 are set. A target calorie calculator 41 that receives the detection signal and is used is used. Note that the description of the same configuration and operation as those of the embodiment shown in FIG. 35 will be omitted. The target calorific value calculator 41 inputs the set temperature of the target temperature setter 11 before the start of energization to calculate the target calorific value of the resistance heating element per unit time corresponding to the set temperature, but during the energization of the junction. Automatically detects the target calorific value by automatically detecting the temperature of the holder part to which the resistance heating element is attached by the holder temperature detector 13 and the ambient temperature during joining energization by the ambient temperature detector 15. It is corrected and output to the error amplifier 9.

With this heating device, the temperature of the holder portion to which the resistance heating element is attached and the ambient temperature can be detected at any time during the energization of the joining, and the calculated target calorific value can be automatically corrected. You can

[0137]

According to the heating apparatus of the first aspect, the resistance heating element for heating the workpiece and the power supply for energizing the resistance heating element are provided, and the resistance value of the resistance heating element is calculated from the energized state. A resistance calculator to perform, and a controller for controlling the power source to bring the resistance closer to the target resistance value from the difference between the calculated resistance value and the target resistance value is provided, and the resistance value of the resistance heating element is set in advance. By controlling to a predetermined value, the temperature of the resistance heating element or its distribution can be controlled to be constant.

According to the second aspect of the present invention, a target resistance calculator for calculating a target resistance value with respect to a target temperature is provided, and the target resistance value is automatically calculated. By controlling the resistance value of 1 to the calculated value of the target resistance value, the temperature of the resistance heating element or its distribution can be controlled to be constant.

According to the third aspect of the present invention, a holder for holding the resistance heating element and a holder temperature detector for detecting the temperature of the holder are provided, and the target temperature and the target resistance from the temperature of the holder are provided. By providing a target resistance calculator for calculating the value, the target resistance value is automatically calculated, and the resistance value of the resistance heating element is controlled to the calculated value of the target resistance value, or the temperature of the resistance heating element or its distribution. Can be controlled to be constant.

According to the present invention, the holder for holding the resistance heating element, the holder temperature detector for detecting the temperature of the holder, and the ambient temperature detector for detecting the ambient temperature are provided, and the target By setting a target resistance calculator that calculates the target resistance value from the temperature of the holder, the temperature of the holder, and the ambient temperature, the target resistance value is automatically calculated, and the resistance value of the resistance heating element is By controlling to the calculated value, the temperature of the resistance heating element or its distribution can be controlled to be constant.

According to the fifth aspect of the present invention, a resistance heating element for heating a workpiece and a power supply for energizing the resistance heating element are provided, and a resistance for calculating the resistance value of the resistance heating element is calculated from the energized state. A calculator, a resistance change calculator for calculating a resistance change value from the initial resistance of the resistance heating element, and a difference between the calculated resistance change value and a target resistance change value are brought close to a target resistance change value. A controller for controlling the power source is provided, and a preset resistance change value with respect to an initial resistance value of the resistance heating element is controlled to be constant, thereby controlling the temperature of the resistance heating element or its distribution to be constant. According to the present invention as set forth in claim 6, the target resistance change value is automatically calculated by providing a target resistance change calculator for calculating a target resistance change value with respect to a target temperature. resistance By controlling the resistance change value with respect to the initial resistance value of the thermal body calculated value of the target variable resistance value, it is possible to control the temperature or the distribution of the resistance heating element constant.

According to the seventh aspect of the present invention, a holder for holding the resistance heating element and a holder temperature detector for detecting the temperature of the holder are provided, and the target temperature and the target resistance from the temperature of the holder are provided. By providing a target resistance change calculator for calculating the change value, automatically calculating the target resistance change value, by controlling the resistance change value with respect to the initial resistance value of the resistance heating element to the calculated value of the target change value, The temperature of the resistance heating element or its distribution can be controlled to be constant.

According to the present invention of claim 8, a holder for holding the resistance heating element, a holder temperature detector for detecting the temperature of the holder, and an ambient temperature detector for detecting the ambient temperature are provided. A target resistance change calculator that calculates the target resistance change value from the target temperature, the holder temperature, and the ambient temperature is provided, and the target resistance change value is automatically calculated. By controlling the change value to the calculated value of the target resistance change value, the temperature of the resistance heating element or its distribution can be controlled to be constant.

According to the present invention of claim 9, claim 5
In any of the heating devices of Nos. 1 to 8, the temperature of the resistance heating element or its distribution can be controlled to be constant by using the increase value of the resistance value as the resistance change value of the resistance heating element for control.

According to the tenth aspect of the present invention, in the heating device according to any one of the fifth to ninth aspects, the resistance heating value of the resistance heating element at an arbitrary ambient temperature is used as the initial resistance value. The body temperature or its distribution can be controlled to be constant.

According to the eleventh aspect of the present invention, a current detector for detecting a current supplied to the resistance heating element, a target current setting unit for setting a target current value, and a start time of energization to the resistance heating element A target time setting device that determines the predetermined time from
By controlling the controller so that the current supplied to the resistance heating element approaches the target current for at least the predetermined time, it is possible to shorten the time from the start of the supply of electricity to the stabilization of the resistance value.

According to the twelfth aspect of the present invention, a target time calculator for calculating a target predetermined time with respect to a target temperature, and a target target current value for the target temperature are calculated. By providing a target current calculator to
At least during the predetermined time calculated value, the controller controls the current supplied to the resistance heating element to approach the target current calculated value, thereby shortening the time from the start of energization until the resistance value stabilizes. be able to.

According to the thirteenth aspect of the present invention, a holder for holding the resistance heating element and a holder temperature detector for detecting the temperature of the holder are provided, and the target predetermined temperature and the target predetermined temperature are determined from the holder temperature. A target time calculator for calculating the time and a target current calculator for calculating a target current value from the target temperature and the temperature of the holder are provided, and the controller functions as a resistance heating element for at least the predetermined time calculated value. By controlling the applied current so as to approach the target current calculated value, the time from the start of energization until the resistance value stabilizes can be shortened.

According to the fourteenth aspect of the present invention, the holder for holding the resistance heating element, the holder temperature detector for detecting the temperature of the holder, and the ambient temperature detector for detecting the ambient temperature are provided, and the target is provided. Target time calculator that calculates the target predetermined time from the target temperature, the holder temperature, and the ambient temperature, and the target current calculation that calculates the target current value from the target temperature, the holder temperature, and the ambient temperature. By providing a controller and controlling the controller so that the current applied to the resistance heating element approaches the target current calculated value for at least the predetermined time calculated value, the resistance value is stabilized until the resistance value stabilizes. The time can be shortened.

According to the fifteenth aspect of the present invention, in the heating device according to any one of the eleventh to fourteenth aspects, a value storing at least a predetermined time and a current value condition for the shape or material of the resistance heating element is used. As a result, the time from the start of energization until the resistance value stabilizes can be shortened.

According to the sixteenth aspect of the present invention, a current detector for detecting a current supplied to the resistance heating element, a target current setting unit for setting a target current value, and a reference resistance value of the resistance heating element. By providing a reference resistance setting device that determines the resistance heating element, while the resistance value of the resistance heating element reaches the reference resistance value, the controller controls the current applied to the resistance heating element to approach the target current. It is possible to shorten the time until the resistance value stabilizes.

According to the seventeenth aspect of the present invention, by providing the reference resistance calculator for calculating the reference resistance value with respect to the target temperature, the resistance value of the resistance heating element is calculated by the reference resistance calculation value. By controlling the current supplied to the resistance heating element to a current higher than usual until the resistance value is reached, the time from the start of energization until the resistance value stabilizes can be shortened.

According to the eighteenth aspect of the present invention, in the heating device according to the sixteenth or seventeenth aspect, at least the reference resistance value for the shape or material of the resistance heating element is used to store the value from the start of energization. It is possible to shorten the time until the resistance value stabilizes.

According to the nineteenth aspect of the present invention, there is provided a resistance value calculating step of detecting an energized state of the resistance heating element for heating the workpiece and calculating the resistance value of the resistance heating element from the energized state. There is a control step of performing control to approach the target resistance value from the difference between the calculated resistance value and the target resistance value, and by controlling the resistance value of the resistance heating element to a preset target value, resistance heating The body temperature or its distribution can be controlled to be constant.

According to the twentieth aspect of the present invention, a target resistance value calculating step for calculating a target resistance value with respect to a target temperature is provided to automatically calculate the target resistance value to generate resistance heat. By controlling the resistance value of the body to the calculated value of the target resistance value, the temperature of the resistance heating element or its distribution can be controlled to be constant.

According to the twenty-first aspect of the present invention, the holder temperature detecting step for detecting the temperature of the holder holding the resistance heating element, and the target temperature and the target for calculating the target resistance value from the holder temperature. A resistance value calculation step is provided to automatically calculate a target resistance value, and the resistance value of the resistance heating element is controlled to the calculated value of the target resistance value, thereby controlling the temperature of the resistance heating element or its distribution to be constant. can do.

According to the twenty-second aspect of the present invention, a holder temperature detecting step for detecting the temperature of the holder holding the resistance heating element and an ambient temperature detecting step for detecting the ambient temperature are provided to set the target temperature. A target resistance value calculation step for calculating a target resistance value from the temperature of the holder and the ambient temperature is provided, and the target resistance value is automatically calculated, and the resistance value of the resistance heating element is set to the calculated value of the target resistance value. 24. According to the present invention of claim 23, the temperature of the resistance heating element or its distribution can be controlled to be constant by controlling the energization state for detecting the energization state of the resistance heating element heating the workpiece. A detecting step, a resistance change value calculating step of calculating a resistance value of the resistance heating element from the energized state, and calculating a change value of resistance from the initial resistance of the resistance heating element; and the calculated resistance change. And a target resistance change value, the control step has a control step of approaching the target resistance change value.By controlling the resistance change value of the resistance heating element to a preset target value, the temperature of the resistance heating element is controlled. Alternatively, the distribution can be controlled to be constant.

According to the twenty-fourth aspect of the present invention, the target resistance change value is automatically calculated by providing the target resistance value calculation step for calculating the target resistance change value with respect to the target temperature. By controlling the resistance change value of the resistance heating element to the calculated value of the target resistance change value, the temperature of the resistance heating element or its distribution can be controlled to be constant.

According to the twenty-fifth aspect of the present invention, the holder temperature detecting step for detecting the temperature of the holder holding the resistance heating element, and the target resistance change value is calculated from the target temperature and the holder temperature. By providing a target resistance value calculation step, the target resistance change value is automatically calculated, and the resistance change value of the resistance heating element is controlled to the calculated value of the target resistance change value to obtain the temperature of the resistance heating element or its distribution. Can be controlled to be constant.

According to the twenty-sixth aspect of the present invention, the holder temperature detecting step for detecting the temperature of the holder holding the resistance heating element and the ambient temperature detecting step for detecting the ambient temperature are provided to set the target temperature. A target resistance change value calculation step for calculating a target resistance change value from the holder temperature and the ambient temperature is provided to automatically calculate the target resistance change value, and the resistance change value of the resistance heating element is calculated as the target resistance change value. By controlling the calculated value, the temperature of the resistance heating element or its distribution can be controlled to be constant.

According to the twenty-seventh aspect of the present invention, in the heating device according to any one of the twenty-third to twenty-sixth aspects, the resistance heating value is used as the resistance change value of the resistance heating element for control so that the resistance heating The body temperature or its distribution can be controlled to be constant.

According to the twenty-eighth aspect of the present invention, in the heating device according to any one of the twenty-third to twenty-seventh aspects, by using the resistance value of the resistance heating element at an arbitrary ambient temperature as the initial resistance value, the resistance heating The body temperature or its distribution can be controlled to be constant.

According to a twenty-ninth aspect of the present invention, a current detecting step of detecting a current supplied to the resistance heating element,
A predetermined time setting step for determining a predetermined time from the start of energization of the resistance heating element is provided, and control is performed so that the current supplied to the resistance heating element approaches a target current for at least the predetermined time. According to the present invention of claim 30, the time from the start of energization until the resistance value stabilizes can be shortened by performing the target predetermined time for calculating the target predetermined time with respect to the target temperature. A calculator step and a target current value calculation step for calculating a target current value to be a target for a target temperature are provided, and a target predetermined time and a target current value are automatically calculated, and at least the target predetermined time is calculated. During the calculated value, the controller controls the current that is applied to the resistance heating element so that it becomes the calculated value of the target current value, thus shortening the time from the start of energization until the resistance value stabilizes. Rukoto can.

According to the thirty-first aspect of the present invention, a holder temperature detecting step for detecting the temperature of the holder holding the resistance heating element, and a target for calculating a target predetermined time from the target temperature and the holder temperature. A predetermined time calculation step,
A target current value calculation step for calculating a target current value from the target temperature and the holder temperature is provided to automatically calculate the target predetermined time and the target current value, and at least the calculated value of the target predetermined time During this period, the controller controls the current supplied to the resistance heating element so as to reach the calculated value of the target current value, whereby the time from the start of energization until the resistance value stabilizes can be shortened.

According to the thirty-second aspect of the present invention, a holder temperature detecting step for detecting the temperature of the holder holding the resistance heating element and an ambient temperature detecting step for detecting the ambient temperature are provided to set the target temperature. A target predetermined time calculation step for calculating a target predetermined time from the holder temperature and the ambient temperature, and a target current value calculation step for calculating a target current value from the target temperature, the holder temperature and the ambient temperature. Provided, the target predetermined time and the target current value are automatically calculated, and at least during the calculated value of the target predetermined time, the current supplied to the resistance heating element by the controller becomes the calculated value of the target current value. By controlling in this way, the time from the start of energization until the resistance value stabilizes can be shortened.

According to the present invention of claim 33, in the heating device according to any one of claims 29 to 32, energization is started by using a condition of at least a predetermined time and a current value for the shape or material of the resistance heating element. It is possible to shorten the time from when the resistance value stabilizes.

According to the 34th aspect of the present invention, there is provided a current detecting step of detecting a current supplied to the resistance heating element,
Provide a target current value setting step for setting the target current value and a reference resistance value setting step for determining the reference resistance value of the resistance heating element, while the resistance value of the resistance heating element reaches the reference resistance value,
By controlling the controller so that the current supplied to the resistance heating element approaches the target current, it is possible to shorten the time from the start of energization until the resistance value stabilizes.

According to the thirty-fifth aspect of the present invention, in the heating device of the thirty-fourth aspect, by providing the target reference resistance value calculating step for calculating the reference resistance value with respect to the target temperature, the resistance is changed from the start of energization. The time until the value stabilizes can be shortened.

According to the thirty-sixth aspect of the present invention, in the heating device of the thirty-fourth or thirty-fifth aspect, at least the reference resistance value for the shape or material of the resistance heating element is used to stabilize the resistance value from the start of energization. It is possible to shorten the time until.

According to a thirty-seventh aspect of the present invention, which is a production facility using the heating device according to any one of the first to eighteenth aspects, the temperature of the resistance heating element or its distribution can be controlled to be constant. The time from the start of energization until the resistance value stabilizes can be shortened.

According to the 38th aspect of the present invention, in the production facility of the 37th aspect, the production data indicating the type of the workpiece to be processed by the production facility, and at least the target resistance value corresponding to the production data. By providing a target database that determines one of the target resistance change value, the predetermined current value, and the reference resistance value, it becomes possible to use the data stored in the database according to the type of workpiece. Settings and data management can be performed more easily.

According to the thirty-ninth aspect of the present invention, the temperature of the resistance heating element or its distribution is controlled to be constant during processing of the workpiece processed by the heating device according to any one of the first to eighteenth aspects. In addition, the time from the start of energization until the resistance value stabilizes can be shortened, and stable processing quality can be obtained.

According to the 40th aspect of the present invention, the temperature of the resistance heating element or its distribution can be controlled to be constant during the processing of the workpiece processed by the production facility according to the 37th or 38th aspect. The time from the start of energization until the resistance value stabilizes can be shortened, and stable processing quality can be obtained.

According to the present invention of claim 41, the resistance heating element for heating the workpiece and the power source for energizing the resistance heating element are provided, and the resistance heating element is supplied to the resistance heating element per unit time from the energized state. An input heat amount calculator for calculating the amount of heat, and a controller for controlling the power source so as to bring the target amount of heat close to the target amount of heat from the calculated amount of input heat and a target amount of heat are provided.
By controlling the amount of heat input to the resistance heating element per unit time to a preset predetermined value, the temperature of the resistance heating element or its distribution can be controlled to be constant.

According to the 42nd aspect of the present invention, a target calorie calculator for calculating a target calorific value for a target temperature is provided, and the calorific value input to the resistance heating element per unit time is calculated. By controlling to the target amount of heat, the temperature of the resistance heating element or its distribution can be controlled to be constant.

According to the 43rd aspect of the present invention, a holder for holding the resistance heating element and a holder temperature detector for detecting the temperature of the holder are provided, and a target temperature and a target amount of heat from the temperature of the holder are provided. It is possible to control the temperature of the resistance heating element or its distribution to be constant by providing a target calorie calculator for calculating and controlling the amount of heat input to the resistance heating element per unit time to the calculated target heat value. .

According to the 44th aspect of the present invention, a holder for holding the resistance heating element, a holder temperature detector for detecting the temperature of the holder, and an ambient temperature detector for detecting the ambient temperature are provided. By providing a target calorie calculator that calculates a target calorific value from the temperature and the temperature of the holder and the ambient temperature, by controlling the input calorific value to the resistance heating element per unit time to the calculated target calorific value, The temperature of the resistance heating element or its distribution can be controlled to be constant.

[Brief description of drawings]

FIG. 1 is a block diagram showing a heating device according to a first embodiment of the present invention.

FIG. 2 is a block diagram showing attachment of a resistance heating element to a holder according to the first embodiment of the present invention.

FIG. 3 is a schematic diagram showing the correlation between the temperature of the resistance heating element and the resistance of the resistance heating element in the first embodiment of the present invention.

FIG. 4 is a block diagram showing a heating device according to a second embodiment of the present invention.

FIG. 5 is a block diagram showing a heating device according to a third embodiment of the present invention.

FIG. 6 is a schematic diagram showing changes in the holder temperature of the resistance heating element according to the embodiment of the present invention depending on the energization time.

FIG. 7 is a block diagram showing a heating device according to a fourth embodiment of the present invention.

FIG. 8 is a block diagram showing a heating device according to a fifth embodiment of the present invention.

FIG. 9 is a schematic diagram showing the relationship between the resistance value of the resistance heating element and its temperature and the relationship between the resistance change value from room temperature resistance and the temperature change value from room temperature in the embodiment of the present invention.

FIG. 10 is a block diagram showing a heating device according to a sixth embodiment of the present invention.

FIG. 11 is a block diagram showing a heating device according to a seventh embodiment of the present invention.

FIG. 12 is a block diagram showing a heating device according to an eighth embodiment of the present invention.

FIG. 13 is a block diagram showing a heating device according to a ninth embodiment of the present invention.

FIG. 14 is a schematic diagram showing a current passing through a resistance heating element and a change with time of its resistance value in the embodiment of the present invention.

FIG. 15 is a block diagram showing a heating device according to a tenth embodiment of the present invention.

FIG. 16 is a block diagram showing a heating device according to an eleventh embodiment of the present invention.

FIG. 17 is a block diagram showing a heating device according to a twelfth embodiment of the present invention.

FIG. 18 is a block diagram showing a heating device according to a thirteenth embodiment of the present invention.

FIG. 19 is a schematic diagram showing a current flowing through a resistance heating element and a change with time of its resistance value in the embodiment of the present invention.

FIG. 20 is a block diagram showing a heating device according to a fourteenth embodiment of the present invention.

FIG. 21 is a block diagram showing a method for controlling a heating device according to a fifteenth embodiment of the present invention.

FIG. 22 is a block diagram showing a method for controlling a heating device according to a sixteenth embodiment of the present invention.

FIG. 23 is a block diagram showing a method for controlling a heating device according to a seventeenth embodiment of the present invention.

FIG. 24 is a block diagram showing a method for controlling a heating device according to an eighteenth embodiment of the present invention.

FIG. 25 is a block diagram showing a method for controlling a heating device according to a nineteenth embodiment of the present invention.

FIG. 26 is a block diagram showing a method for controlling a heating device according to a twentieth embodiment of the present invention.

FIG. 27 is a block diagram showing a method for controlling a heating device according to a twenty first embodiment of the present invention.

FIG. 28 is a block diagram showing a method for controlling a heating device according to a twenty-second embodiment of the present invention.

FIG. 29 is a block diagram showing a method for controlling a heating device according to a twenty-third embodiment of the present invention.

FIG. 30 is a block diagram showing a heating device control method according to a twenty-fourth embodiment of the present invention.

FIG. 31 is a block diagram showing a method for controlling a heating device according to a twenty-fifth embodiment of the present invention.

FIG. 32 is a block diagram showing a method of controlling a heating device according to a twenty sixth embodiment of the present invention.

FIG. 33 is a block diagram showing a method for controlling a heating device according to a twenty-seventh embodiment of the present invention.

FIG. 34 is a block diagram showing a method for controlling a heating device according to a twenty-eighth embodiment of the present invention.

FIG. 35 is a block diagram showing a method for controlling a heating device according to a thirty-first embodiment of the present invention.

FIG. 36 is a block diagram showing a method for controlling a heating device according to a thirty-second embodiment of the present invention.

FIG. 37 is a block diagram showing a method for controlling a heating device according to a thirty-third embodiment of the present invention.

FIG. 38 is a block diagram showing a method for controlling a heating device according to a thirty-fourth embodiment of the present invention.

[Explanation of symbols]

1 rectifier 2 control element 3 transformers 4 rectifier 5 Current detector 6 Voltage detector 7 Resistance calculator 8 Target resistance setter 9 Miscalculation amplifier 10 controller 11 Target temperature setter 12 Target resistance calculator 13 Holder temperature detector 14 Target resistance calculator 15 Ambient temperature detector 16 Target resistance calculator 17 Initial resistance setting device 18 Resistance change calculator 19 Target resistance change setting device 20 Target resistance change calculator 21 Target resistance change calculator 22 Target resistance change calculator 23 Target current setting device 24 Error amplifier 25 Target time setting device 26 Sequencer 27 signal selector 28 Target time calculator 29 Target current calculator 30 Target time calculator 31 Target current calculator 32 Target time calculator 33 Target current calculator 34 Reference resistance setting device 35 comparator 36 Reference resistance calculator 37 Heat input calculator 38 Target calorie calculator 39 Target calorie calculator 40 Target calorie calculator 41 Target calorie calculator 50 resistance heating element 51 holder 52 holder

   ─────────────────────────────────────────────────── ─── Continued front page    (72) Inventor Koji Fujii             1006 Kadoma, Kadoma-shi, Osaka Matsushita Electric             Sangyo Co., Ltd. F-term (reference) 3K058 AA02 AA86 AA88 BA19 CA03                       CA04 CA12 CA22 CB10 CB13

Claims (44)

[Claims] 1. A resistance calculator for heating a workpiece, a power supply for energizing the resistance heater, and a resistance calculator for calculating the resistance value of the resistance heater from the energized state; and the calculated resistance. A heating device provided with a controller that controls the power source so as to approach a target resistance value from a difference between a value and a target resistance value. 2. The heating device according to claim 1, further comprising a target resistance calculator for calculating a target resistance value with respect to a target temperature. 3. A target resistance calculator for calculating a target resistance value from a target temperature and a holder temperature detector provided with a holder for holding a resistance heating element and a holder temperature detector for detecting the temperature of the holder. The heating device according to claim 1, which is provided. 4. A holder for holding a resistance heating element, a holder temperature detector for detecting a temperature of the holder, and an ambient temperature detector for detecting an ambient temperature are provided, and a target temperature, a holder temperature and an ambient temperature are provided. The heating device according to claim 1, further comprising: a target resistance calculator that calculates a target resistance value from the temperature of. 5. A resistance calculator for heating a workpiece, a power supply for energizing the resistance heater, and a resistance calculator for calculating the resistance value of the resistance heater from the energized state; and a resistance calculator for the resistance heater. A resistance change calculator that calculates a change value of resistance from an initial resistance, and a control that performs control to bring the power supply closer to a target resistance change value from a difference between the calculated resistance change value and a target resistance change value. Heating device equipped with a vessel. 6. The heating device according to claim 5, further comprising a target resistance change calculator for calculating a target resistance change value with respect to a target temperature. 7. A target resistance change calculation for calculating a target resistance change value based on a target temperature and a holder temperature by providing a holder for holding a resistance heating element and a holder temperature detector for detecting the temperature of the holder. The heating device according to claim 5, further comprising a heater. 8. A holder for holding a resistance heating element, a holder temperature detector for detecting a temperature of the holder, and an ambient temperature detector for detecting an ambient temperature are provided, and a target temperature, a holder temperature and an ambient temperature are provided. The heating device according to claim 5, further comprising: a target resistance change calculator that calculates a target resistance change value from the temperature. 9. The heating device according to claim 5, wherein an increase value of resistance value is used for control as a resistance change value of the resistance heating element. 10. The heating device according to claim 5, wherein the resistance value of the resistance heating element at an arbitrary ambient temperature is used as the initial resistance value. 11. A current detector for detecting a current supplied to a resistance heating element, a target current setter for setting a target current value, and a target time setting for determining a predetermined time from the start of energization of the resistance heating element. Is provided for at least the predetermined time,
The heating device according to any one of claims 1 to 10, wherein the controller controls the current applied to the resistance heating element to approach a target current. 12. A target time calculator for calculating a target predetermined time with respect to a target temperature and a target current calculator for calculating a target current value with respect to a target temperature. Item 12. A heating device according to item 11. 13. A holder for holding a resistance heating element, a holder temperature detector for detecting the temperature of the holder, and a target time calculator for calculating a target predetermined time and a target predetermined time from the temperature of the holder. The heating device according to claim 11, further comprising a target current calculator that calculates a target current value from the target temperature and the holder temperature. 14. A holder for holding a resistance heating element, a holder temperature detector for detecting a temperature of the holder, and an ambient temperature detector for detecting an ambient temperature are provided, and a target temperature, a holder temperature and an ambient temperature are provided. 12. A target time calculator for calculating a target predetermined time from the temperature and a target current calculator for calculating a target current value from the target temperature, the holder temperature, and the ambient temperature are provided. Heating device. 15. The condition of a predetermined time and current value for at least the shape or material of the resistance heating element is stored.
The heating device according to any one of 1 to 14. 16. A current detector for detecting a current applied to a resistance heating element, a target current setting device for setting a target current value, and a reference resistance setting device for determining a reference resistance value of the resistance heating element, While the resistance value of the resistance heating element reaches the reference resistance value,
The heating device according to any one of claims 1 to 10, wherein the controller controls the current applied to the resistance heating element to approach a target current. 17. The heating device according to claim 16, further comprising a reference resistance calculator for calculating a reference resistance value with respect to a target temperature. 18. The reference resistance value for at least the shape or material of the resistance heating element is stored.
The heating device according to. 19. A resistance value calculating step of detecting an energized state of a resistance heating element for heating a workpiece and calculating a resistance value of the resistance heating element from the energized state, the calculated resistance value and a target. The control method of the heating device, which has a control step of performing control to bring the target resistance value close to the target resistance value based on the difference from the resistance value. 20. A target resistance value calculating step for calculating a target resistance value for a target temperature is provided.
A method for controlling the heating device described. 21. A holder temperature detecting step for detecting a temperature of a holder holding a resistance heating element, and a target resistance value calculating step for calculating a target resistance value from the target temperature and the holder temperature. 20. A method for controlling a heating device according to item 19. 22. A holder temperature detecting step for detecting a temperature of a holder holding a resistance heating element and an ambient temperature detecting step for detecting an ambient temperature are provided, and a target temperature, a holder temperature and an ambient temperature are used as targets. The method for controlling a heating device according to claim 19, further comprising a target resistance value calculating step for calculating a resistance value to be set. 23. An energized state detecting step of detecting an energized state of a resistance heating element that heats a workpiece, a resistance value of the resistance heating element is calculated from the energized state, and a resistance value is calculated from an initial resistance of the resistance heating element. A method of controlling a heating device having a resistance change value calculating step of calculating a resistance change value, and a control step of performing control to bring the resistance change value closer to a target resistance change value from a difference between the calculated resistance change value and a target resistance change value. . 24. The heating device control method according to claim 23, further comprising a target resistance change value calculation step for calculating a target resistance change value with respect to a target temperature. 25. A holder temperature detecting step for detecting a temperature of a holder holding a resistance heating element, and a target resistance change value calculating step for calculating a target resistance change value from the target temperature and the holder temperature are provided. The method for controlling a heating device according to claim 23. 26. A holder temperature detecting step for detecting a temperature of a holder holding a resistance heating element and an ambient temperature detecting step for detecting an ambient temperature are provided, and a target temperature, a holder temperature and an ambient temperature are used as targets. 24. The heating device control method according to claim 23, further comprising a target resistance change value calculation step for calculating a resistance change value. 27. The method for controlling a heating device according to claim 23, wherein an increase value of resistance value is used for control as a resistance change value of the resistance heating element. 28. The heating device control method according to claim 23, wherein the resistance value of the resistance heating element at an arbitrary ambient temperature is used as the initial resistance value. 29. A current detecting step of detecting a current applied to the resistance heating element, and a predetermined time setting step of determining a predetermined time from the start of energization of the resistance heating element are provided, and control is performed for at least the predetermined time. 29. The method for controlling a heating device according to claim 19, wherein the heater is controlled so that the current passed through the resistance heating element approaches a target current. 30. A target predetermined time calculation step for calculating a target predetermined time for a target temperature, and a target current value calculation step for calculating a target target current value for a target temperature. 30. The method for controlling a heating device according to claim 29. 31. A holder temperature detecting step of detecting a temperature of a holder holding a resistance heating element, a target predetermined time calculating step of calculating a target predetermined time from the target temperature and the holder temperature, and a target. 30. The heating device control method according to claim 29, further comprising a target current value calculation step of calculating a target current value from the temperature and the temperature of the holder. 32. A holder temperature detecting step of detecting a temperature of a holder holding a resistance heating element and an ambient temperature detecting step of detecting an ambient temperature are provided, and a target temperature, a holder temperature and an ambient temperature are used as targets. 30. The heating device according to claim 29, further comprising: a target predetermined time calculation step for calculating a predetermined time to be set, and a target current value calculation step for calculating a target current value from a target temperature, a holder temperature, and an ambient temperature. Control method. 33. The method for controlling a heating device according to claim 29, wherein a condition of a predetermined time and a current value for at least the shape or material of the resistance heating element is used. 34. A current detection step of detecting a current applied to a resistance heating element, a target current value setting step of setting a target current value, and a reference resistance value setting step of determining a reference resistance value of the resistance heating element. 20. When the resistance value of the resistance heating element reaches a reference resistance value, the controller controls the current applied to the resistance heating element so as to approach the target current.
29. The heating device control method according to any one of 1 to 28. 35. A target reference resistance value calculating step for calculating a reference resistance value for a target temperature is provided.
A method for controlling the heating device described. 36. The method of controlling a heating device according to claim 34, wherein a reference resistance value for at least the shape or material of the resistance heating element is used. 37. A production facility using the heating device according to any one of claims 1 to 18. 38. Production data indicating a type of a work piece machined by a production facility, and at least one of a target resistance value, a target resistance change value, a predetermined current value and a reference resistance value corresponding to the production data. The production facility according to claim 37, further comprising a target database for determination. 39. A workpiece processed by the heating device according to any one of claims 1 to 18. 40. A work piece processed by the production facility according to claim 37. 41. A heat input calculator for calculating the heat input to the resistance heating element per unit time from the current-carrying state, comprising a resistance heating element for heating a workpiece and a power supply for energizing the resistance heating element. A heating device provided with a controller that controls the power source so as to bring the target heat amount close to a target heat amount based on a difference between the calculated input heat amount and a target heat amount. 42. The heating device according to claim 41, further comprising a target heat quantity calculator for calculating a target heat quantity with respect to a target temperature. 43. A holder for holding a resistance heating element, a holder temperature detector for detecting the temperature of the holder are provided, and a target heat amount calculator for calculating a target heat amount from the target temperature and the holder temperature is provided. The heating device according to claim 41. 44. A holder for holding a resistance heating element, a holder temperature detector for detecting a temperature of the holder, and an ambient temperature detector for detecting an ambient temperature are provided, and a target temperature, a holder temperature and an ambient temperature are provided. 42. The heating device according to claim 41, further comprising a target calorie calculator that calculates a target calorific value from the temperature.