JP2003100844A5 - - Google Patents

Description

[0010]
The quadrilateral substrate reversing device according to the invention as set forth in claim 3 is, for example, as shown in FIGS. 1 and 3, in the quadrilateral substrate reversing device 201 according to claim 2, the buoyant groove is the substrate to be held. W is held at the corner of the substrate W to be held.
In the quadrilateral substrate reversing device according to the invention as set forth in claim 4 , for example, as shown in FIG. 1, in the quadrilateral substrate reversing device 201 according to claim 2 or claim 3 , the substrate holding member 202 is symmetrical about the symmetry axis. , And includes a pair of members 241 which open and close symmetrically about the symmetry axis and hold the substrate W by the closing operation; each pair of members 241 has two holding parts 204. . Typically, the substrate W may be held so that the diagonal axis of the substrate W coincides with the symmetry axis of the member 241.

[0011]
The substrate holding member 202 includes a pair of members 241 which are disposed symmetrically about the symmetry axis, open and close symmetrically about the symmetry axis, and hold the substrate W by the closing operation, and the pair of members 241 respectively hold two pieces Since the component 204 is provided, the substrate W can be held firmly and smoothly.

[0012]
A quadrilateral substrate reversing device according to the invention according to claim 5 has a cylinder 213 having a cylinder axis 214 in the quadrilateral substrate reversing device 201 according to claim 4, for example, as shown in FIG. 1, the cylinder 213 is When air is supplied to the cylinder 213, the cylinder shaft 214 is moved to operate the pair of members 241, thereby releasing the sandwiching of the substrates of the pair of members 241.
In order to achieve the above object, a quadrilateral substrate cleaning unit 1002 according to the invention according to claim 6 comprises: a quadrilateral substrate reversing device 201 according to any one of claims 1 to 5 ; and a quadrilateral substrate A cleaning device 401 for cleaning one of the front surface and the back surface of W and two opposing side surfaces; and a transfer device 501 for transferring the quadrilateral substrate W between the quadrilateral substrate reversing device 201 and the cleaning device 401 Prepare.

[0013]
With such a configuration, since the quadrilateral substrate inverting device 201 according to any one of claims 1 to 5 is provided , either one of the front surface or the back surface of the quadrilateral substrate W is selected by the cleaning device 401, and After cleaning the two opposing side surfaces, the substrate W is transported by the transport device 501 to the quadrilateral substrate reversing device 201, and the substrate W is rotated 180 degrees around the second axis L2 to reverse the front and back of the substrate W , 90 degrees rotation about the vertical central axis can be performed simultaneously. Next, the substrate W is transferred by the transfer device 501 to the cleaning device 401, and the cleaning device 401 can clean the remaining one of the front surface or the back surface, and the remaining two opposite side surfaces. Therefore, the cleaning time by the cleaning unit 1002 can be shortened.
In the quadrilateral substrate cleaning unit according to claim 7 , for example, as shown in FIG. 4 and FIG. 5, in the quadrilateral substrate cleaning unit 1002 according to claim 6, the cleaning device 401 is the substrate W of the quadrilateral. It has a top cleaning roll 402 for cleaning one of the front and back sides, and a side cleaning roll 403 for cleaning the two opposite sides.

Claims (7)

In a quadrilateral substrate inverting apparatus that inverts a quadrilateral substrate;
A substrate holding member for holding the substrate transported along the first axis and rotating the substrate about the second axis by 180 degrees;
Said first axis and said second axis form an angle of 45 degrees;
Quadrilateral substrate reversing device. The substrate holding member has four holding parts formed with buoyant grooves for holding the substrate to be held;
The quadrilateral substrate inverting apparatus according to claim 1. The buoy groove sandwiches the held substrate at the corner of the held substrate;
  The quadrilateral substrate inverting apparatus according to claim 2. The substrate holding member includes a pair of members disposed symmetrically about the symmetry axis, opening and closing symmetrically about the symmetry axis, and holding the substrate by the closing operation;
The pair of members each having two of the holding parts;
The quadrilateral substrate inverting device according to claim 2 or claim 3 . Comprising a cylinder having a cylinder axis;
  The cylinder is configured such that, when air is supplied to the cylinder, the cylinder shaft moves to operate the pair of members to release the sandwiching of the substrates of the pair of members;
  The quadrilateral substrate inverting device according to claim 4. A quadrilateral substrate reversing device according to any one of claims 1 to 5 ;
A cleaning device for cleaning either the front surface or the back surface of the quadrilateral substrate, and two opposing side surfaces;
A transfer device for transferring the quadrilateral substrate between the quadrilateral substrate reversing device and the cleaning device;
Quadrilateral substrate cleaning unit. The cleaning device has a top cleaning roll for cleaning either the front surface or the back surface of the quadrilateral substrate, and a side cleaning roll for cleaning the two opposing side surfaces;
  The quadrilateral substrate cleaning unit according to claim 6.