JP2003100423A - Resistance heating heater - Google Patents
Resistance heating heaterInfo
- Publication number
- JP2003100423A JP2003100423A JP2001295317A JP2001295317A JP2003100423A JP 2003100423 A JP2003100423 A JP 2003100423A JP 2001295317 A JP2001295317 A JP 2001295317A JP 2001295317 A JP2001295317 A JP 2001295317A JP 2003100423 A JP2003100423 A JP 2003100423A
- Authority
- JP
- Japan
- Prior art keywords
- rod
- heat generating
- generating portion
- glassy carbon
- resistance heating
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Abstract
Description
【０００１】[0001]
【発明の属する技術分野】本発明は、抵抗加熱ヒータに
係り、特にＣＶＤ装置のような半導体処理装置の処理容
器内で用いるのに適した抵抗加熱ヒータの電極の改良に
関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a resistance heating heater, and more particularly to improvement of electrodes of a resistance heating heater suitable for use in a processing container of a semiconductor processing apparatus such as a CVD apparatus.
【０００２】[0002]
【従来の技術】従来、この種の抵抗加熱ヒータは、半導
体にとって汚染源となる金属等の汚染物質を発生しない
部材により発熱部及びこの発熱部に接続されている給電
用の電極を形成していた。すなわち、発熱部には、特開
平８−１７７４６号公報に記載されているように、高純
度のガラス状カーボンを用いることなどが提案され、電
極は、その形状による製造上の制約から、特開平９−３
６１２４号公報に記載されているように、黒鉛を高純度
熱分解黒鉛でコーティングしたものや同じく黒鉛をＳｉ
Ｃまたはガラス状カーボンでコーティングしたものが用
いられていた。2. Description of the Related Art Conventionally, a resistance heater of this type has a heat generating portion and a power feeding electrode connected to the heat generating portion formed of a member that does not generate a contaminant such as a metal that is a pollution source for a semiconductor. . That is, it has been proposed to use high-purity glassy carbon for the heat generating portion as described in JP-A-8-17746. 9-3
As described in Japanese Patent No. 6124, graphite coated with high-purity pyrolytic graphite, or graphite coated with Si
Those coated with C or glassy carbon were used.
【０００３】[0003]
【発明が解決しようとする課題】ところで、黒鉛をＳｉ
Ｃでコーティングした電極は、ＳｉＣが電気絶縁材であ
るため、発熱部との接続面をコーティングすることがで
きない。このため、発熱部との接続面から汚染物質を発
生し、また、シリコンのＣＶＤ等の処理に用いられる場
合には、発熱部と接続面との間にシリコンを含む反応ガ
スが侵入し、黒鉛を珪化させてＳｉＣを形成し、通電を
妨げる原因となる。By the way, if graphite is used as Si
Since the electrode coated with C has SiC as an electric insulating material, it cannot coat the connection surface with the heat generating portion. For this reason, contaminants are generated from the connection surface with the heat generating portion, and when used in a process such as CVD of silicon, the reaction gas containing silicon enters between the heat generating portion and the connection surface, and the graphite Is silicified to form SiC, which hinders energization.
【０００４】他方、黒鉛を高純度熱分解黒鉛またはガラ
ス状カーボンでコーティングした電極は、高純度熱分解
黒鉛及びガラス状カーボンが通電性を有しているため、
発熱部との接続面をもコーティングすることができ、汚
染物質の発生を抑えることはできるが、コーティングの
被膜を厚くすることが大変であり、高温に晒されたり、
昇降温を繰り返したりすると、ＳｉＣと比較して劣化が
早く、また、硬度がＳｉＣより低いため、コーティング
の被膜を損傷し易いという欠点がある。On the other hand, in an electrode in which graphite is coated with high-purity pyrolytic graphite or glassy carbon, the high-purity pyrolytic graphite and glassy carbon have electrical conductivity.
It is possible to coat the connection surface with the heat generating part and suppress the generation of pollutants, but it is difficult to thicken the coating film and it is exposed to high temperature,
When the temperature is raised and lowered repeatedly, the deterioration is quicker than that of SiC, and the hardness is lower than that of SiC, so that the coating film is easily damaged.
【０００５】本発明は、前述した課題を解決し、通電
性、寿命及び清浄性のいずれの点においても優れた抵抗
加熱ヒータを提供することを目的としている。An object of the present invention is to solve the above-mentioned problems and to provide a resistance heater which is excellent in terms of electrical conductivity, life and cleanliness.
【０００６】[0006]
【課題を解決するための手段】上記目的を達成するため
の本発明は、抵抗加熱ヒータにおいて、この抵抗加熱ヒ
ータの発熱部に給電するための電極が、複数の棒状部材
を組み合わせて形成され、少なくとも前記発熱部に接続
される側の棒状部材がガラス状カーボンの無垢材により
形成されていることを特徴としている。According to the present invention to achieve the above object, in a resistance heating heater, an electrode for supplying power to a heat generating portion of the resistance heating heater is formed by combining a plurality of rod-shaped members, It is characterized in that at least the rod-shaped member connected to the heat generating portion is made of a solid material of glassy carbon.
【０００７】このように電極を複数の棒状部材の組み合
わせとして形成することにより、少なくとも温度の高い
領域である発熱部に近い部分をガラス状カーボンの無垢
材で形成することが可能になり、ガラス状カーボンは通
電性を有すると共に、ガラス状カーボンの無垢材は高温
や昇降温の繰り返しにも強く、汚染物質を発生すること
もないため、通電性、寿命及び清浄性のいずれの点にお
いても優れた抵抗加熱ヒータとなる。なお、前記発熱部
もガラス状カーボンにより形成すれば、全体としてより
優れた寿命及び清浄性を有する抵抗加熱ヒータとするこ
とができる。By thus forming the electrode as a combination of a plurality of rod-shaped members, it is possible to form at least a portion close to the heat generating portion, which is a high temperature region, by a solid material of glassy carbon. In addition to carbon being electrically conductive, solid glassy carbon is also resistant to high temperatures and repeated heating and cooling, and does not generate pollutants, so it is excellent in terms of electrical conductivity, life and cleanliness. It becomes a resistance heater. If the heat generating portion is also made of glassy carbon, it is possible to obtain a resistance heater having a more excellent life and cleanliness as a whole.
【０００８】[0008]
【発明の実施の形態】以下本発明の一実施形態例につい
て図１を参照して説明する。１０は本発明による抵抗加
熱ヒータであり、その発熱部１１は、ガラス状カーボン
で形成され、図１において上下方向にジグザグ状に伸び
る左右２つの帯状の発熱部１１Ａ、１１Ｂを図１の左右
方向の中央で一体的に接続した形状となっている。な
お、この発熱部１１の形状は、適宜に変更可能である。BEST MODE FOR CARRYING OUT THE INVENTION An embodiment of the present invention will be described below with reference to FIG. Reference numeral 10 is a resistance heater according to the present invention, and its heat generating portion 11 is formed of glassy carbon, and two left and right belt-shaped heat generating portions 11A and 11B extending in a zigzag shape in the vertical direction in FIG. It has a shape that is integrally connected at the center of. The shape of the heat generating portion 11 can be changed as appropriate.
【０００９】左右２つの帯状の発熱部１１Ａ、１１Ｂの
それぞれの両端には、同じくガラス状カーボン製等のボ
ルト１２により、図２に示すような電極１３が取り付け
られている。Electrodes 13 as shown in FIG. 2 are attached to both ends of each of the left and right two band-shaped heat generating portions 11A and 11B by bolts 12 also made of glassy carbon or the like.
【００１０】電極１３は、それぞれが真っ直ぐに伸びる
単純な形状の２つの棒状部材１３Ａ、１３Ｂを、上記ボ
ルト１２と同様のガラス状カーボン製等のボルト１４に
より結合した組み合わせ構造となっている。このように
電極１３を単純な形状の棒状部材１３Ａ、１３Ｂにより
構成することにより、各棒状部材１３Ａ、１３Ｂをガラ
ス状カーボンの無垢材で形成することが容易になる。本
実施の形態では、棒状部材１３Ａ、１３Ｂのうち、発熱
部１１に接続される側の棒状部材１３Ａは、ガラス状カ
ーボンの無垢材により形成されている。The electrode 13 has a combined structure in which two rod-shaped members 13A and 13B each of which has a simple shape, each of which extends straightly, are connected by a bolt 14 made of glassy carbon similar to the bolt 12. By thus forming the electrode 13 with the rod-shaped members 13A and 13B having a simple shape, it becomes easy to form the rod-shaped members 13A and 13B from a solid material of glassy carbon. In the present embodiment, of the rod-shaped members 13A and 13B, the rod-shaped member 13A on the side connected to the heat generating portion 11 is formed of a solid material of glassy carbon.
【００１１】他方、図示しない給電用の端子に接続され
る側の棒状部材１３Ｂは、ガラス状カーボンの無垢材ま
たは、カーボンにガラス状カーボンやＳｉＣをコートし
たもので形成される。On the other hand, the rod-shaped member 13B on the side connected to a power supply terminal (not shown) is made of a solid material of glassy carbon or carbon coated with glassy carbon or SiC.
【００１２】次いで本抵抗加熱ヒータ１０の作用につい
て説明する。抵抗加熱ヒータ１０は、棒状部材１３Ａ、
１３Ｂからなる電極１３を介して発熱部１１へ給電し、
発熱部１１を発熱させる。このとき、発熱部１１と少な
くとも棒状部材１３Ａは同じガラス状カーボンで形成さ
れているが、発熱部１１と棒状部材１３Ａの断面積を、
前者は小さく、後者は大きく形成することにより、発熱
部１１では発熱があり、棒状部材１３Ａは発熱を生じな
いように構成されている。棒状部材１３Ｂについても棒
状部材１３Ａと同様に発熱を生じないように形成されて
いる。Next, the operation of the resistance heater 10 will be described. The resistance heater 10 includes a rod-shaped member 13A,
Power is supplied to the heat generating portion 11 via the electrode 13 composed of 13B,
The heat generating part 11 is caused to generate heat. At this time, the heat generating portion 11 and at least the rod-shaped member 13A are formed of the same glassy carbon, but the cross-sectional areas of the heat generating portion 11 and the rod-shaped member 13A are
The former is small and the latter is large, so that the heat generating portion 11 generates heat and the rod-shaped member 13A does not generate heat. Similarly to the rod-shaped member 13A, the rod-shaped member 13B is also formed so as not to generate heat.
【００１３】このように棒状部材１３Ａは、それ自体は
発熱しないが、発熱部１１からの熱伝導により、少なく
とも発熱部１１に近い部分は発熱部１１とほぼ等しい温
度に上昇する。しかしながら、棒状部材１３Ａは、上記
のようにガラス状カーボンの無垢材で形成されているた
め、汚染物質を発生することはない。As described above, the rod-shaped member 13A itself does not generate heat, but due to heat conduction from the heat-generating portion 11, at least a portion near the heat-generating portion 11 rises to a temperature substantially equal to that of the heat-generating portion 11. However, since the rod-shaped member 13A is formed of a solid material of glassy carbon as described above, it does not generate a pollutant.
【００１４】また、ガラス状カーボンの固有抵抗値は４
０μΩ・ｍであり、カーボンの固有抵抗値の１２μΩ・
ｍより大きいが、十分な通電性を有しており、さらにま
た、ガラス状カーボンの無垢材は、抵抗加熱ヒータ１０
のＯＮ・ＯＦＦによる昇降温の繰り返しにも強く、長寿
命を得ることができる。The specific resistance value of glassy carbon is 4
0 μΩ · m, which is the specific resistance of carbon 12 μΩ ·
Although it is larger than m, it has sufficient electric conductivity. Furthermore, the solid material of glassy carbon is a resistance heater 10.
It is resistant to repeated heating / cooling due to ON / OFF, and long life can be obtained.
【００１５】[0015]
【発明の効果】以上のべたように本発明によれば、電極
のうち少なくとも発熱部に近い高温領域がガラス状カー
ボンの無垢材で形成されるため、通電性、寿命及び清浄
性のいずれの点においても優れた抵抗加熱ヒータとする
ことができる。As described above, according to the present invention, since at least the high temperature region near the heat generating portion of the electrode is formed of the solid material of glassy carbon, any point of electric conductivity, service life and cleanability is obtained. Also in this, it is possible to obtain an excellent resistance heater.
【図１】本発明の一実施形態例を示す平面図。FIG. 1 is a plan view showing an embodiment of the present invention.
【図２】図１の正面図。FIG. 2 is a front view of FIG.
１０ 抵抗加熱ヒータ １１、１１Ａ、１１Ｂ 発熱部 １２、１４ ボルト １３ 電極 １３Ａ、１３Ｂ 棒状部材。 10 Resistance heating heater 11, 11A, 11B Heat generating part 12, 14 volt 13 electrodes 13A, 13B Rod-shaped members.
Claims (2)
ヒータの発熱部に給電するための電極が、複数の棒状部
材を組み合わせて形成され、少なくとも前記発熱部に接
続される側の棒状部材がガラス状カーボンの無垢材によ
り形成されていることを特徴とする抵抗加熱ヒータ。1. In a resistance heating heater, an electrode for supplying power to a heating portion of the resistance heating heater is formed by combining a plurality of rod-shaped members, and at least the rod-shaped member connected to the heating portion is glass-shaped. A resistance heater characterized by being formed of solid carbon material.
成されていることを特徴とする請求項１に記載の抵抗加
熱ヒータ。2. The resistance heater according to claim 1, wherein the heat generating portion is also formed of glassy carbon.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2001295317A JP2003100423A (en) | 2001-09-27 | 2001-09-27 | Resistance heating heater |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2001295317A JP2003100423A (en) | 2001-09-27 | 2001-09-27 | Resistance heating heater |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JP2003100423A true JP2003100423A (en) | 2003-04-04 |
Family
ID=19116776
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2001295317A Pending JP2003100423A (en) | 2001-09-27 | 2001-09-27 | Resistance heating heater |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2003100423A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR100811389B1 (en) | 2006-03-24 | 2008-03-07 | 가부시키가이샤 뉴플레어 테크놀로지 | Semiconductor manufacturing equipment and heater |
-
2001
- 2001-09-27 JP JP2001295317A patent/JP2003100423A/en active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR100811389B1 (en) | 2006-03-24 | 2008-03-07 | 가부시키가이샤 뉴플레어 테크놀로지 | Semiconductor manufacturing equipment and heater |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| A711 | Notification of change in applicant |
Free format text: JAPANESE INTERMEDIATE CODE: A711 Effective date: 20051109 |