JP2003098234A5 - - Google Patents
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- Publication number
- JP2003098234A5 JP2003098234A5 JP2001296202A JP2001296202A JP2003098234A5 JP 2003098234 A5 JP2003098234 A5 JP 2003098234A5 JP 2001296202 A JP2001296202 A JP 2001296202A JP 2001296202 A JP2001296202 A JP 2001296202A JP 2003098234 A5 JP2003098234 A5 JP 2003098234A5
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- JP
- Japan
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Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2001296202A JP4729212B2 (en) | 2001-09-27 | 2001-09-27 | Semiconductor test equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2001296202A JP4729212B2 (en) | 2001-09-27 | 2001-09-27 | Semiconductor test equipment |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2003098234A JP2003098234A (en) | 2003-04-03 |
| JP2003098234A5 true JP2003098234A5 (en) | 2008-07-17 |
| JP4729212B2 JP4729212B2 (en) | 2011-07-20 |
Family
ID=19117490
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2001296202A Expired - Fee Related JP4729212B2 (en) | 2001-09-27 | 2001-09-27 | Semiconductor test equipment |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP4729212B2 (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR102409926B1 (en) | 2015-08-18 | 2022-06-16 | 삼성전자주식회사 | Test device and test system having the same |
Family Cites Families (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6468673A (en) * | 1987-09-09 | 1989-03-14 | Hitachi Electr Eng | Semiconductor tester |
| US5225772A (en) * | 1990-09-05 | 1993-07-06 | Schlumberger Technologies, Inc. | Automatic test equipment system using pin slice architecture |
| JPH0593756A (en) * | 1991-09-30 | 1993-04-16 | Mitsubishi Electric Corp | Testing apparatus for semiconductor |
| JP2897660B2 (en) * | 1994-10-07 | 1999-05-31 | 日本電気株式会社 | Control method of test pattern memory for semiconductor integrated circuit inspection equipment |
| JP2814997B2 (en) * | 1996-08-08 | 1998-10-27 | 株式会社アドバンテスト | Semiconductor test equipment |
| JPH1073638A (en) * | 1996-08-29 | 1998-03-17 | Asia Electron Inc | Semiconductor testing apparatus |
| CN1141593C (en) * | 1997-11-20 | 2004-03-10 | 株式会社爱德万测试 | IC testing method and IC testing device using the same |
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2001
- 2001-09-27 JP JP2001296202A patent/JP4729212B2/en not_active Expired - Fee Related