JP2003090283A5 - - Google Patents

Download PDF

Info

Publication number
JP2003090283A5
JP2003090283A5 JP2001282191A JP2001282191A JP2003090283A5 JP 2003090283 A5 JP2003090283 A5 JP 2003090283A5 JP 2001282191 A JP2001282191 A JP 2001282191A JP 2001282191 A JP2001282191 A JP 2001282191A JP 2003090283 A5 JP2003090283 A5 JP 2003090283A5
Authority
JP
Japan
Prior art keywords
vibrator
drive device
support portion
vibrating body
base
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2001282191A
Other languages
English (en)
Japanese (ja)
Other versions
JP4151251B2 (ja
JP2003090283A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2001282191A priority Critical patent/JP4151251B2/ja
Priority claimed from JP2001282191A external-priority patent/JP4151251B2/ja
Publication of JP2003090283A publication Critical patent/JP2003090283A/ja
Publication of JP2003090283A5 publication Critical patent/JP2003090283A5/ja
Application granted granted Critical
Publication of JP4151251B2 publication Critical patent/JP4151251B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

JP2001282191A 2001-09-17 2001-09-17 駆動装置 Expired - Fee Related JP4151251B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2001282191A JP4151251B2 (ja) 2001-09-17 2001-09-17 駆動装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2001282191A JP4151251B2 (ja) 2001-09-17 2001-09-17 駆動装置

Publications (3)

Publication Number Publication Date
JP2003090283A JP2003090283A (ja) 2003-03-28
JP2003090283A5 true JP2003090283A5 (enExample) 2004-12-16
JP4151251B2 JP4151251B2 (ja) 2008-09-17

Family

ID=19105874

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2001282191A Expired - Fee Related JP4151251B2 (ja) 2001-09-17 2001-09-17 駆動装置

Country Status (1)

Country Link
JP (1) JP4151251B2 (enExample)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007037242A (ja) * 2005-07-25 2007-02-08 Seiko Epson Corp 圧電アクチュエータ、および電子機器
JP2013206914A (ja) * 2012-03-27 2013-10-07 Seiko Epson Corp 力検出素子、力検出モジュール及びロボット

Similar Documents

Publication Publication Date Title
EP2568595A3 (en) Piezoelectric actuator, timepiece, and portable device
JP2008503995A5 (enExample)
EP1372256A3 (en) Rotary drive device
TW200501541A (en) An operating apparatus and an electric instrument
JP2002142470A (ja) 駆動装置
KR890014308A (ko) 와이퍼장치
US7078846B2 (en) Rotary actuator and method of controlling an actuator
JP2003090283A5 (enExample)
CA2323294A1 (en) Motor base for vibratory apparatus
JP4236957B2 (ja) 超音波モータ及び超音波モータ付電子機器
JPH077127B2 (ja) 鏡の水滴除去装置
JP2001292584A5 (enExample)
JPH09225401A (ja) 報知用振動装置
JPS59185180A (ja) 超音波モ−タ
JPH0417584A (ja) 超音波アクチュエータ
JP3616705B2 (ja) 超音波駆動装置、アナログ式時計、及び電子機器
JP2000188882A5 (enExample)
JP4151251B2 (ja) 駆動装置
JP4053773B2 (ja) アクチュエータ制御方法
JP2001001330A (ja) 押出成形体の切断装置
JPS61262091A (ja) 振動波モ−タ
JPH06113564A (ja) アクチュエータ
JPS61277382A (ja) 超音波モ−タ
JPH0373707A (ja) 駆動機構
KR100310559B1 (ko) 평판형 초음파 모터